JP2968697B2 - Bearings, vacuum suction devices for mounting machines, vacuum suction devices for LCD transport machines - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mounting machine and an LCD transport machine.
Suitably such as vacuum suction apparatus and such a vacuum suction device
On a shaft received.

[0002]

2. Description of the Related Art A general mounting machine or transfer machine picks up a work placed at a predetermined position by a holding means such as a chuck device and moves the picked up work to another position. Is repeated. By the way, depending on the shape and properties of the work, it may not be suitable for gripping by a chuck device or the like. In this case, by using a vacuum suction device instead of the chuck device,
Workpieces may be picked up.

FIG. 7 schematically shows an example of a conventional vacuum suction device of a mounting machine, specifically, an example of a vacuum suction device 102 in a die bonder for mounting an IC chip 101 in a die area of a wiring board 1000.

As shown in FIG. 1, the vacuum suction device 102 includes a rod 103, a rolling bearing 104 for supporting the rod 103, and a head portion 105 for fixing the rolling bearing 104. A gas passage 1 for evacuation is provided inside a rod body 106 constituting the rod 103.
07 is formed. One end of this gas passage 107 is
It is opened by a suction port 108 provided at the lower end of the rod body 106. The other end of the gas passage 107 is connected to a vacuum pump (not shown) via an exhaust pipe 109.

The rod body 106 is inserted into a rod insertion hole 110 of the rolling bearing 104 with its lower end protruding. Since a plurality of balls 111 are arranged in the rod insertion hole 110, the rod 103 can slide in the vertical direction and the circumferential direction. A coil 112 is provided at the upper end of the rod 103, and a wiring 113 extends from the coil 112. on the other hand,
A magnet 114 is provided on the head 105 side. Accordingly, when the coil 112 is energized, the magnetic field formed between the coil 112 and the magnet 114 changes, so that the rod 103 is driven in a predetermined direction.

In the case of such a vacuum suction device 102, when vacuum evacuation is performed by a vacuum pump, an IC
The chip 101 can be sucked. Therefore, first, the head unit 105 is moved onto the component tray and the IC chip 1 is moved.
After sucking 01, the head unit 105 is moved to a die area on the wiring board 100 by a head driving unit (not shown). Next, the head unit 105 is lowered, and the IC chip 101 is pressed with a predetermined pressing force to the bonding material 115 in the die area.
Press up. Then, the IC chip 101 is mounted by the adhesive force of the bonding material 115. Thereafter, the vacuum suction by the vacuum suction device 102 is stopped, and the head unit 105 is stopped.
From the wiring board 100 to the component tray.
When a plurality of mounting areas exist on the wiring board 100, the above operation is repeated.

[0007]

Incidentally, it is generally desirable that the vacuum suction device 102 of the die bonder has the following performance. First, the IC chip 101
Is extremely small (approximately 20 g to 100 g). If the pressure is too high, the IC chip 101 will be deformed or broken. If the pressure is too low, the bonding of the IC chip 101 will be incomplete. Second, the IC chip 101
Can be bonded to the exact position on the die area (± 1μm ~
Bonding can be performed within an error range of about 2 μm).

However, the conventional vacuum suction device 102
In the case of (2), since the wiring 113 and the exhaust pipe 109 extend from the upper end of the rod 103, they obstruct the movement of the rod 103 or affect the pressing force of the rod 103. In addition, the rotation of the rod 103 cannot be performed due to the presence of the wiring 113. further,
Since the rolling bearing 104 supports the entire rod 103 by contacting the outer peripheral surface of the rod main body 106, there is naturally a limit in reducing the sliding resistance.

Due to the above problems, it has conventionally been difficult to improve the control accuracy of the rod 103. In addition, there is a large restriction on the degree of freedom when moving the rod 103, particularly when rotating the rod 103.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problem, and an object of the present invention is to improve the control accuracy of a rod by reliably reducing the movement resistance of the rod for adsorbing an object. An object of the present invention is to provide a vacuum suction device for a mounting machine or an LCD carrier .

[0011] Another object of the present invention is to provide a suitable shaft received in such above excellent vacuum suction device.

[0012]

In order to solve the above-mentioned problems, the invention according to claim 1 comprises a rod body and the rod body.
A first opening formed at the tip of the pad body;
Part disposed on the outer peripheral surface of the rod body and in the rod insertion hole
A second opening formed between the first opening and the second opening;
Bearing for contactlessly supporting a rod with a fluid passage
And a rod insertion hole through which the rod body is inserted.
Having a bearing surface and the lock
A sleeve made of a porous body provided in the through hole,
A pressurized port for supplying pressurized fluid to the sleeve and a front
Pressurized fluid ejected from the bearing surface of the sleeve
A suction port for discharging to the outside of the
Corresponds to the second opening on the outer peripheral surface of the rod in the insertion hole
A block side opening formed at a position where
A side opening and a port communicated through a fluid passage.
The bearing is the gist.

According to a second aspect of the present invention, in the first aspect, a magnet is provided at a base end of the rod body. Claim 3
According to the invention described in (1), in (1) or (2), a concave portion is formed in the outer peripheral surface of the rod body and a portion arranged in the rod insertion hole, and the second opening is formed in the concave portion.

According to a fourth aspect of the present invention, in the third aspect, the concave portion is an annular groove. Serial mounting of the invention in claim 5, in claim 4, the width of the annular groove is larger than the movable distance of the rod.

[0015] The invention according to claim 6 is the invention according to claims 1 to 5.
In any one of the above, a contact member made of a porous body is provided at a tip portion of the rod body. According to a seventh aspect of the present invention, in any one of the first to sixth aspects, a protrusion for preventing the rod from coming off is provided on the outer peripheral surface of the rod body.

The invention described in claim 8 is the invention according to claims 1 to 7
In any one of the above, the cross-sectional shape of the rod body is circular. In a ninth aspect of the present invention, in any one of the first to eighth aspects, the rod body is bent in a substantially L shape.

According to the tenth aspect of the present invention , the bent portion is bent in a substantially L shape.
Bending rod body and LCD for vacuum suction
A suction port formed at the tip of the rod body;
An exhaust port formed on the outer peripheral surface of the pad body, and the suction port.
A vacuum passage having a vacuum passage communicating with the exhaust port.
Block, which has a rod insertion hole, and a bearing surface.
And a porous body provided in the rod insertion hole.
And a sleeve for supplying pressure fluid to the sleeve.
Pressure port and squirts from the bearing surface of the sleeve
Suction for discharging pressure fluid outside the block
Port and a rod outer peripheral surface in the rod insertion hole.
It is formed at a position corresponding to the exhaust port, and
Suction to introduce the gas exhausted from the vent to the block side
Inlet, a vacuum port connected to the vacuum means,
Vacuum for communication between the vacuum port and the suction port
Bearing with a passage and the rod insertion hole
And the head to which the bearing is fixed so that
The gist of the present invention is a vacuum suction device for an LCD transfer machine .

According to the eleventh aspect of the present invention, there is provided a rod body having a linear and circular cross section, a suction port formed at a distal end of the rod body for vacuum suction of an electronic component, and an outer peripheral surface of the rod body. An exhaust port formed in, a vacuum evacuation passage communicating the suction port and the exhaust port, a rod having a magnet provided at a base end of the rod body, and a block having a rod insertion hole, A sleeve made of a porous body having a bearing surface and provided in the rod insertion hole, a pressurizing port for supplying a pressure fluid to the sleeve, and a block of the pressure fluid ejected from a bearing surface of the sleeve. A suction port for discharging to the outside of the rod, and a gas formed at a position corresponding to the exhaust port on the outer peripheral surface of the rod in the rod insertion hole and exhausting gas from the exhaust port. A bearing provided with a suction port to be introduced into the block side, a vacuum port connected to a vacuum means, a vacuum path communicating the vacuum port with the suction port, and a bearing provided on the rod side. The gist of the present invention is a vacuum suction device for a mounting machine, comprising a coil provided at a position corresponding to the magnet, and a head to which the bearing is fixed so that the rod insertion hole is oriented vertically.

[0019]

According to the first to ninth aspects of the present invention , the rod insertion
The rod body of the rod inserted into the through hole is made of a porous material
Pressurized fluid evenly and evenly ejected from the sleeve
Is supported in a non-contact manner by the action of In this case, the first
Opening, rod side fluid passage, second opening, block side
One path through which fluid can flow by means of openings and ports
Is formed. Therefore, vacuum evacuation is performed through the above-mentioned path.
It becomes possible.

According to the second aspect of the present invention, there is no need to provide wiring on the rod side. According to the third to fifth aspects of the present invention, even when the rod moves in the stroke direction, the flow of fluid is not blocked between the opening of the bearing-side fluid passage and the second opening.

[0021] According to the invention described in claim 4, even when the rod is rotated, it is not name that flow of fluid between the opening and the second opening of the fluid passage of the bearing side is shut off.

According to the seventh aspect of the present invention, the movement of the rod in the predetermined direction is regulated by the contact of the convex portion for retaining to any part on the fixed side. According to the eighth aspect of the present invention, since the rod body has a rotationally symmetric shape about the axis thereof, the rod can be rotated.

According to the tenth aspect, the evacuation is performed.
When the rod starts sucking the LCD and the
The LCD moves horizontally in the same direction following the moving LCD.
You. At this time, the upper surface of the LCD is always kept at a certain height.
It is. In addition, a rod using a pressurized fluid
Rods are supported in a non-contact manner, so rod movement resistance is extremely low
Smaller. Therefore, LCDs that are easily bent can be transported reliably.
can do.

According to the eleventh aspect of the present invention, since the rod is supported in a non-contact manner by the bearing using the pressurized fluid, the movement resistance of the rod is extremely reduced. Also, in this case, a suction path, a vacuum passage on the rod side, an exhaust port, a suction port, a vacuum passage and a vacuum port on the block side form a vacuum passage. Then, when vacuum evacuation is performed through this vacuum evacuation passage, the electronic component is reliably attracted to the tip of the rod, and the electronic component is mounted at a predetermined position.

[0025]

【Example】

[Embodiment 1] FIG.
This will be described in detail with reference to FIG.

The vacuum suction device D1 of this embodiment comprises a rod 1, a hydrostatic bearing 2 for supporting the rod 1, a head 3, a vacuum pump, an air supply source (all not shown), and the like. The die bonder includes the above-described vacuum suction device D1, head unit driving means (not shown) for driving the head portion 3 constituting the vacuum suction device D1 in the horizontal and vertical directions, and a control computer. I have.

As shown in FIG. 1, a block mounting portion 4 for fixing the hydrostatic bearing 2 is provided on the lower end surface of the head portion 3. A rod insertion hole 5 having a circular cross section is formed at the center of the block mounting portion 4. The head unit 3 including the static pressure bearing 2 moves between a component tray (not shown) and a mounting stage. On the upper surface of the component tray, IC chips 6 as objects to be sucked are regularly placed. On the other hand, a wiring board 7 for mounting the IC chip 6 is set on the upper surface of the mounting stage. The IC chip 6 is bonded to a mounting area on the wiring board 7 by a bonding material 8.

As shown in FIGS. 1 and 2, the rod body 9 constituting the rod 1 is a straight bar made of metal (aluminum in this embodiment) having a circular cross section. The diameter of the rod body 9 is about 4 mm to 15 mm (8 mm in this embodiment). At the center of the distal end surface (center of the lower end surface) of the rod body 9, a suction port 10 as a first opening is provided. A suction pad 11 is provided on the lower end surface of the rod body 9.
Is formed. The suction pad 11 as a contact member is fitted to the fitting portion 28. This suction pad 11 is a suction pad 11 made of a sintered trifluoride resin having many fine pores.

An annular groove 1 serving as a concave portion is provided at a position on the outer peripheral surface of the rod body 9 which is housed inside the hydrostatic bearing 2.
2 are formed. The width W of the annular groove 12 is set to be larger than the stroke length of the rod 1. However, the width W of the annular groove 12 is set so that the annular groove 12 does not project from the hydrostatic bearing 2 even when the rod 1 makes a stroke. On the bottom surface of the annular groove 12, one exhaust port 13 is provided as a second opening. A first vacuum passage 14 as a fluid passage is provided through the center of the rod body 9. First vacuum passage 1
Reference numeral 4 communicates the suction port 10 with the exhaust port 13. The rod body 9 is manufactured by appropriately grinding the outer peripheral surface of an aluminum bar and drilling a predetermined portion with a drill or the like.

As shown in FIG. 1, the block 15 constituting the hydrostatic bearing 2 has one rod insertion hole 16 for movably inserting the rod body 9. Such a block 15 is fixed to the block mounting section 4 of the head section 3 so that the rod insertion hole 16 is oriented vertically. The cross-sectional shape of the rod insertion hole 16 is the same as the cross-sectional shape of the rod body 9. The inner diameter of the rod insertion hole 16 is only slightly larger than the diameter of the rod body 9 to be inserted. Therefore, the clearance between the outer peripheral surface of the rod body 9 and the inner wall surface of the rod insertion hole 16 is several μm (5 μm in this embodiment).
Note that such a rod insertion hole 16 is formed by drilling a predetermined portion of a metal member to be the block 15 with a drill or the like.

As shown in FIG. 1, the rod insertion hole 16
A sleeve 17 made of a porous material made of graphite is fitted to a fitting portion provided on the inner wall surface of the device. The inner wall surface of the sleeve 17 is a bearing surface for supporting the rod body 9. The outer peripheral surface and the inner wall surface of the sleeve 17 are communicated with each other by fine continuous pores. A pressure port 18, a suction port 19, and a vacuum port 20 are respectively provided on the side surface of the block 15. Pressurized air is supplied to the pressurized port 18 from an air supply source (not shown). Pressurizing port 1
The pressurized air supplied to 8 passes through an air supply passage 21 inside the block 15 and then reaches an air pocket 22 surrounding the outer periphery of the sleeve 17. The pressurized air reaching the outer peripheral surface of the sleeve 17 further passes through continuous pores inside the sleeve 17 and then blows out from the entire inner wall surface of the sleeve 17.

As shown in FIG. 1, a plurality of suction ports 23 are formed in the rod insertion hole 16 of the block 15 at a position slightly above the upper end surface of the sleeve 17. Similarly, a plurality of suction ports 24 are formed in the rod insertion hole 16 of the block 15 at a position slightly below the lower end surface of the sleeve 17. These suction ports 23 and 24 and the suction port 19 are communicated by an exhaust passage 25 inside the block 15. The suction port 19 is connected to a vacuum pump (not shown). Therefore, most of the pressurized air ejected from the inner wall surface of the sleeve 17 is sucked through the suction ports 23 and 24 and the suction port 19.

In the rod insertion hole 16 of the block 15, one suction port 26 as a block-side opening is formed at a position above the suction ports 23. The suction port 26 has a different function from the suction ports 23 and 24 for sucking the pressurized air. The suction port 26 and the evacuation port 20 are connected to a second evacuation passage 2 as a fluid passage formed inside the block 15.
7 are connected. The evacuation port 20 is connected to a vacuum pump (both not shown) as evacuation means via piping. The rod body 9 of the rod 1 is inserted into the rod insertion hole 16 of the hydrostatic bearing 2 configured as described above. At this time, the rod 1 is in a state where the distal end portion is protruded downward, and is movable with respect to the hydrostatic bearing 2 (specifically, vertically movable and pivotable).

As shown in FIG. 1, the suction port 26 on the block 15 side is provided so as to correspond to the annular groove 12 on the rod 1 side. Therefore, the suction port 26 is connected to the rod 1
Irrespective of the position to which it moves, it is always open in the annular groove 12. Therefore, in the vacuum suction device D1, continuous pores in the suction pad 11, the suction port 10, the first evacuation passage 14, the exhaust port 13, the annular groove 12, the suction port 26, the second evacuation passage 27, By the evacuation port 20, 1
A book evacuation path is formed.

Next, a mechanism for controlling the pressing force of the rod 1 will be described. As shown in FIG. 1, a voice coil motor 32 as a coil is mounted in the rod insertion hole 5 on the head unit 3 side. Two wirings 33 are drawn out from the voice coil motor 32.
The voice coil motor 32 generates a magnetic field having an intensity corresponding to the intensity of the current supplied from these wires 33.
On the other hand, as shown in FIGS. 1 and 2, a permanent magnet 34 is joined to the base end surface (upper end surface) of the rod body 9.
The upper end of the rod 1 having the permanent magnet 34 is inserted through the through-hole 35 of the voice coil motor 32 in a non-contact manner. The magnetic field is changed by changing the amount of current supplied to the voice coil motor 32, and as a result, the thrust (pressing force) of the rod 1 is determined.

Next, the operation of the vacuum suction device D1 of this embodiment will be described. First, the wiring board 7 before component mounting is set on the mounting stage. At this time, a predetermined amount of the bonding material 8 is applied to the mounting area of the wiring board 7 in advance. In use, first, the vacuum pump connected to the evacuation port 20 is driven. Then
The evacuation is started via the evacuation path, and the IC chip 6 can be sucked to the lower end of the rod 1. In this state, the head unit 3 is moved onto the component tray, and the IC chip 6 is attached to the suction pad 11 of the rod 1.
To be absorbed. Next, the head portion 3 having sucked the IC chip 6 is once lifted upward, and then horizontally moves to a position above the wiring board 7. The head unit 3 that has moved to a position above the wiring board 7 aligns the IC chip 6 with the mounting area, and then presses the IC chip 6 against the upper surface of the bonding material 8 with a predetermined pressure (see FIG. 2). Thereafter, the evacuation by the vacuum pump is released, and the IC chip 6 is released from the rod 1. As a result, the IC chip 6 is bonded to the mounting area by the adhesive force of the bonding material 8. Thereafter, the head unit 3 returns to the position on the component tray by moving along the same path as described above. When the component-mounted wiring board 7 is unloaded from the mounting stage, another wiring board 7 is newly loaded thereon. Then, the vacuum suction device D1 repeats the same operation as described above.

Now, in the vacuum suction device D1 of this embodiment,
Pressurized air is injected from the bearing surface of the sleeve 17 toward the outer peripheral surface of the rod body 9, and the rod 1 is supported by the hydrostatic bearing 2 in a non-contact manner by the action of the pressurized air. For this reason, the movement resistance of the rod 1 can be reduced as compared with the conventional one. In particular, since the sleeve 17 used in this embodiment is made of a porous material, there is an advantage that the pressurized air is uniformly and uniformly injected from the inner wall surface. This certainly contributes to the reduction of the movement resistance.

Further, in the vacuum suction device D1 of this embodiment,
Since the permanent magnet 34 is provided on the rod 1 side and the voice coil motor 32 is provided on the head unit 3 side, the wiring 33 can be provided on the head unit 3 side which is relatively fixed. Therefore, even when the rod 1 moves, the wiring 33 does not interfere. Moreover, the second in the hydrostatic bearing 2
Since the vacuum evacuation passage 27 and the vacuum evacuation port 20 are provided, the exhaust pipe does not become an obstacle during movement unlike the conventional art. That is, according to this embodiment, since the rod 1 is completely floating, there is an advantage that the sliding resistance becomes almost zero and the movement of the rod 1 becomes extremely smooth. As a result, the control of the pressing force of the rod 1 can be performed more delicately and, as a result, the die bonding property is surely improved as compared with the conventional device. That is, IC
It is possible to securely and accurately join the IC chip 6 to a desired location without deformation and destruction of the chip 6.

In the case of the rod 1 of this embodiment, the rod 1 is rotatable and further rotatable because the rod body 9 has a rotationally symmetric shape. This is a benefit of the rod 1 being completely floating. Therefore, the degree of freedom of the movement of the rod 1 is extremely large as compared with the related art. This means
This means that fine alignment and the like of the electronic components can be realized by the rotation of the rod 1.

[0040] Further, in the present embodiment, that it has provided a porous body made of suction pads 11 on the lower end surface of the rod body 9. Follow Tsu <br/> Te, also improved the durability of the rod 1.

Further, in the vacuum suction device D1 of this embodiment,
There is a feature that pressurized air at normal temperature is always sprayed from the inner wall surface of the sleeve 17 toward the rod body 9. For this reason, the rod 1 is reliably cooled by the heat of the rod body 9 being taken away by the air. Therefore, even if the heat of the molten solder is conducted to the rod 1, the temperature rise of the rod 1 can be reliably prevented. therefore,
Thermal expansion, thermal deformation, and the like of the rod body 9 due to a rise in temperature are also avoided. In addition, since the risk of thermal expansion is reduced, the clearance between the rod insertion hole 16 and the rod body 9 can be set small. It should be noted that reducing the clearance in this way also leads to a reduction in the outflow of air flowing through the evacuation path. Therefore,
The loss of evacuation becomes extremely small. [Embodiment 2] Next, the present invention is applied to an LCD (Liquid crystal d).
An embodiment embodied in a vacuum suction device D2 of a transfer machine for transferring isplay will be described in detail with reference to FIG. Here, the same parts as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

As shown in FIG. 3, the vacuum suction device D2 of this embodiment is basically the same as that of the first embodiment.
0, a static pressure bearing 41, a head section 42, a vacuum pump, an air supply source (all not shown), and the like. Further, this LCD transport device is constituted by a vacuum suction device D2 as a sub-transport portion, a roll conveyor 43 as a main transport portion, an air cylinder 44 as a rod return means, a control computer for driving and controlling these.

Each roll 4 constituting the roll conveyor 43
5 are arranged in a horizontal direction at a predetermined interval from each other. The roll conveyor 43 moves the plate-shaped LCD 46 in the horizontal direction (ie, FIG.
To the left) at a constant speed. In addition, the length, width, and thickness dimensions of the LCD 46 to be transported are 300 mm ×
It is 400 mm x 1.1 mm. Therefore, the LCD 46 is extremely thin and flexible.

The head section 42 is disposed above the roll conveyor 43. The static pressure bearing 41 is fixed to the block mounting portion 4 provided on the left side surface of the head portion 43. The voice coil motor 32 provided in the rod insertion hole 5 on the head section 42 side is omitted here.

As shown in FIG. 3, the rod body 48 of the rod 40 used in the second embodiment is a rod made of aluminum bent substantially in an L shape and has a circular cross-sectional shape. . The rod body 48 includes a suction port 10 as a first opening, an annular groove 12 as a recess, an exhaust port 13 as a second opening, and a first vacuum passage 14 as a fluid passage, as in the first embodiment. It has. The magnet 34 as in the first embodiment is provided on the base end face of the rod body 48.
Is not installed. Therefore, the movement of the rod 40 is not controlled by the magnetic force. Further, since the stroke length of the rod 40 is larger than that of the first embodiment, the width W of the annular groove 12 is also large (for example, about 40 mm).

The static pressure bearing 41 of this embodiment has basically the same configuration as that of the first embodiment. In this block 47, the suction port 2 connected to the suction port 19
The distance from the portion where 3 is formed to the right end face of the block 47 is longer than that of the block 15 of the first embodiment. The block 47 is fixed to the block attaching section 4 of the head section 42 such that the rod insertion hole 16 is oriented horizontally.
The rod body 48 of the rod 40 is inserted into the rod insertion hole 16. At this time, the tip of the rod 40 protruding from the left side surface of the block 47 faces the lower side, that is, the roll conveyor 43 side. The distance between the outer surface of the suction pad 11 and the peripheral surface of the roll 45 is L
It is slightly larger than the thickness of CD46. Also,
The rod 40 is movable relative to the static pressure bearing 41 (specifically, horizontally movable and rotatable).

Air cylinder 44 as rod return means
Has a piston rod 49, a pressing plate 50, and a piston (not shown). The piston is slidably accommodated in the air cylinder 44. One end of a piston rod 49 is fixed to this piston. Piston rod 49 projecting from air cylinder 44
A pressing plate 50 is fixed to the other end of. The air cylinder 44 thus configured
Is set above the roll conveyor 43 and in front of the rod 40. Accordingly, when the air cylinder 44 extends, the rod 40 is pushed back by the pressing plate 50 abutting against the outer peripheral surface of the rod body 48.

Next, the operation of the vacuum suction device D2 of the LCD transporter of this embodiment will be described. In the initial state,
The rod 40 of the vacuum suction device D2 is in a contracted state.
When the LCD 46 is transported by the roll conveyor 43, evacuation is first started, and the rod 40
The central part of the end in the traveling direction of is sucked. As described above, since the rod 40 of this embodiment does not particularly have a magnet or the like, it follows the LCD 46 moving on the roll conveyor 43,
The rod 40 also moves horizontally in the same direction. At this time, FIG.
As shown by a solid line, the upper surface of the LCD 46 is always kept at a constant height. Thereafter, when the rod 40 extends to the end of the stroke, the evacuation is stopped and the air cylinder 44 is driven. As a result, by being pushed back by the pressing plate 50, only the rod 40 that has released the LCD 46 returns to the original position. New L
When the CD 46 is transported, the vacuum suction device D2 repeats the same operation as described above.

According to the present embodiment, the LCD 46 is attracted to the tip of the rod 40 by evacuation.
During transport, the upper surface of the LCD 46 is always kept at a constant height. Therefore, as shown by the two-dot chain line L1 in FIG. 3, the central portion of the end face of the LCD 46 in the traveling direction does not bend downward. Therefore, the bent end face is positioned at the front roll 45.
The LCD 46 does not advance smoothly due to being caught on the peripheral surface of the LCD. Moreover,
It is possible to reliably prevent the LCD 46 from being deformed or damaged due to being caught or the like. Further, since the rod 40 is completely floating with respect to the hydrostatic bearing 41, even when the rod 40 moves following, the movement resistance is extremely small. As described above, according to the vacuum suction device D2 of this embodiment, the LCD 46 which is easily bent is used.
Can be reliably transported to a predetermined location.

The present invention can be modified as follows, for example. (1) Not only the rods 1 and 40 of the first and second embodiments but also rods having the following configurations may be used. 4A, the rod body 61 is hollow.
With this configuration, the rod 60 becomes lighter,
The movement control accuracy is improved. The rod 6 in FIG.
In 2, the flange 30 is formed in the rod body 63 at a position on the tip side of the annular groove 12. FIG. 4 (c)
In the rod 64, exhaust ports 13 are radially formed at a plurality of locations in the annular groove 12 of the rod body 65. With this configuration, vacuuming can be performed smoothly even when the rod 64 is rotated to any position. In the rod 66 of FIG. 4D similar to the rod 40 of the second embodiment, the distal end of the rod body 67 is branched into three parts on the way, and the suction port 10 and the suction pad 11 are provided respectively. . With this configuration, a plurality of locations on the LCD 46 can be sucked, and bending is less likely to occur.
In the rod 68 shown in FIG. 4E, the suction port 10 is formed not on the distal end surface of the rod body 69 but on the outer peripheral surface of the distal end portion. In the rod 70 of FIG. 4F, a through hole 72 is formed in the rod body 71, and a pin 73 as a retaining projection is pressed into the through hole 72. In the rod 74 of FIG. 5A, the rod body 75 has a square cross section, and the rod 74 has a quadrangular prism shape as a whole. FIG.
In the rod 76 shown in (b), the rod body 77 has a rectangular cross section, and the rod 76 has a plate shape as a whole. The rod body 77 includes a plurality of vacuum passages 1.
4 are formed in parallel. These rods 74, 76
Is suitable for applications that do not need to be rotated, unlike the above embodiment. In this case, the shape of the rod insertion hole into which the rods 74 and 76 are inserted needs to be the same as the cross-sectional shape of the rod bodies 75 and 77.

(2) The porous sleeve 17 used for the hydrostatic bearings 2 and 41 does not need to be made of graphite as in the embodiment, and may be made of, for example, resin, metal or ceramic. Good. In addition to the above-mentioned sleeve 17 made of a porous body, it is of course allowable to use a sleeve having a plurality of holes penetrating from the outer peripheral surface to the inner wall surface. Further, the suction pad 11, which is also made of a porous body, may be made of not only resin but also graphite, metal or ceramic.

(3) Instead of the first embodiment in which the bearing is the static pressure bearing 2 and the permanent magnet 32 is provided on the rod side and the voice coil motor 34 is provided on the head 3 side, for example, the permanent magnet 34 and the voice coil motor 34 May be the same as the conventional arrangement, and only the bearing may be the non-contact type static pressure bearing 2. Also, while the permanent magnet 32 is provided on the rod 1 side and the voice coil motor 34 is provided on the head section 3 side, the bearing may be a contact type as in the past. Even when such a configuration is adopted, either the exhaust pipe or the wiring can be omitted, so that the control accuracy of the rod 1 can be improved to some extent.

(4) The hydrostatic bearings 2, 41 of the first and second embodiments
In addition, a static pressure bearing having the following configuration may be used. In the static pressure bearing 80 shown in FIG. 6A, an air pocket 81 having the same function as the annular groove is provided in the rod insertion hole 16.
Are formed. A rod 82 having no annular groove on the outer peripheral surface of the rod body 83 is inserted through the static pressure bearing 80. In the hydrostatic bearing 84 of FIG. 6B, an engagement groove 86 is provided in the block 85, and the flange 3 is provided therein.
0 is arranged. In the static pressure bearing 87 shown in FIG. 6C, an engagement groove 89 is provided in the block 88, and the suction port 26 is formed in the engagement groove 89.
The rod 90 used for this has two flanges 30 on the outer peripheral surface of a rod body 91. These flanges 30 are arranged in the engaging groove 89. That is, in the hydrostatic bearing 87, the engagement groove 89
Has both the air pocket function and the retaining function described above.

(5) In order that the sleeve 17 is on the upper side and the suction port 26 connected to the evacuation port 20 is on the lower side,
The block 2 may be fixed to the head 3. (6) The material of the rod bodies 9, 48 and the like may be a metal material other than aluminum (for example, iron, iron alloy, copper, titanium, etc.). Further, it is needless to say that a ceramic material or a resin material can be used without being limited to the metal material. A resin material is preferable from the viewpoint of moldability and lightness, and a metal material and a ceramic material are preferable from the viewpoint of rigidity.

(7) The present invention can be applied not only to the vacuum suction device D1 of a die bonder and the vacuum suction device D2 of an LCD transporter, but also to a chip mounter used for mounting bare chips and various chip components. It may be applied to a vacuum suction device of another mounting machine. Further, the present invention may be applied to not only the vacuum suction device of the semiconductor manufacturing apparatus as described above, but also various inspection / measurement devices, precision processing devices, medical devices, vacuum suction devices of micromanipulation devices, and the like. In these applications, the rod and the bearing of the present invention may be used not for vacuum suction but for fluid supply.

Here, in addition to the technical ideas described in the claims, the technical ideas grasped by the above-described embodiment and other examples are listed below together with their effects. (1) A rod body bent in a substantially L shape and an LCD
A suction port formed at the distal end of the rod body for vacuum suction, an exhaust port formed on the outer peripheral surface of the rod body, and a vacuum passage connecting the suction port and the exhaust port. A rod having a rod insertion hole, a block having a bearing surface, a porous sleeve having a bearing surface and provided in the rod insertion hole, a pressurizing port for supplying a pressurized fluid to the sleeve, A suction port for discharging the pressure fluid ejected from the bearing surface of the sleeve to the outside of the block; and a discharge port formed in the rod insertion hole at a position corresponding to the exhaust port on the outer peripheral surface of the rod and exhausted from the exhaust port. A suction port for introducing a gas to be blown into the block side, a vacuum port connected to a vacuum means, and a pipe connecting the vacuum port and the suction port. A bearing and a pull passage, the rod insertion hole vacuum suction device LCD conveyor consisting of a head portion in which the bearing is fixed so that sideways,
And a transfer method using this device. With this apparatus and method, it is possible to reliably transport a flexible LCD.

The technical terms used in this specification are defined as follows. "Porous body: A structure having fine pores inside, made of synthetic resin material such as sintered trifluoride resin, sintered tetrafluoride resin, sintered nylon resin, sintered polyacetal resin, etc. In addition to those made of metal materials such as sintered aluminum, sintered copper, and sintered stainless steel, those made of soft minerals such as graphite, and those made of sintered ceramics. "

[0058]

According to the tenth aspect, as described in detail above,
According to the invention, the lock for adsorbing the LCD which is the object to be adsorbed is
LC that easily bends by reducing the movement resistance of the
Vacuum suction of LCD transport machine that can transport D securely
A dressing device can be provided. According to the invention described in 請 Motomeko 11, to provide a vacuum suction device of the mounting apparatus capable of reliably improved rod control accuracy by reducing the moving resistance of the rod which adsorbs adsorbate it can. Further, according to the invention described in claims 1-9, Ru can provide suitable bearing such as the above better vacuum suction device.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view showing a vacuum suction device for a die bonder according to a first embodiment.

FIG. 2 is a schematic perspective view showing a rod according to the first embodiment.

FIG. 3 is a schematic cross-sectional view illustrating a vacuum suction device of an LCD transport device according to a second embodiment.

4A to 4F are schematic cross-sectional views showing another example of a rod.

5 (a) and 5 (b) are partial schematic perspective views showing another example of a rod.

FIGS. 6A to 6C are partial schematic cross-sectional views showing another example of the hydrostatic bearing.

FIG. 7 is a schematic cross-sectional view showing a conventional vacuum suction device for a die bonder.

[Explanation of symbols]

1,40,60,62,64,66,68,70,7
4, 76, 82, 90 ... rod, 2, 41, 80, 8
4,87 ... (static pressure) bearing, 3,42 ... head part, 6 ...
IC chips as objects to be adsorbed, 9, 48, 61, 63,
65, 67, 69, 71, 75, 77, 83, 91: rod body, 10: suction port as first opening, 11: suction pad, 12: annular groove as recess, 13: as second opening , A first evacuation passage as a fluid passage, 15, 47, 85, 88 ... block, 16 ...
Rod insertion hole, 17 ... sleeve, 18 ... pressure port, 1
Reference numeral 9: suction port, 20: (vacuum) port, 27: second vacuum passage as an opening on the block side, 30: flange as a protrusion for retaining, 32 ... voice coil motor as a coil, 34 ... (Permanent) magnet, 46 ... LCD as an object to be attracted, 73 ... Pin as a protrusion for retaining, W ... width of annular groove, D1, D2 ... vacuum suction device.

────────────────────────────────────────────────── ─── Continuation of front page (56) References JP-A-4-334960 (JP, A) JP-A-6-198523 (JP, A) JP-A-4-264287 (JP, A) JP-A-4- 82684 (JP, A) (58) Field surveyed (Int. Cl. ⁶ , DB name) F16C 32/00-32/06 B25J 15/00-15/12 H05K 33/00

Claims (11)

(57) [Claims] 1. A rod body (9, 48, 61, 63, 6).
5, 67, 69, 71, 75, 77, 83, 91),
The rod body (9, 48, 61, 63, 65, 67,
69, 71, 75, 77, 83, 91)
The first opening (10) and the rod body (9, 4).
8,61,63,65,67,69,71,75,7
7, 83, 91) and the rod insertion hole (1).
6) A second opening (1) formed in a portion arranged inside
3) and a fluid passage for communicating the two openings (10, 13).
Rod (1, 40, 60, 62,
64, 66, 68, 70, 74, 76, 82, 90)
Non-contact bearings (2, 41, 84, 87)
And the rod body (9, 48, 61, 63, 65, 67,
69, 71, 75, 77, 83, 91)
Block (15, 47, 8) having a pad insertion hole (16).
5,88), having a bearing surface and inserting the rod
The porous sleeve (1) provided in the through hole (16)
7) and supplying a pressurized fluid to the sleeve (17).
Pressurizing port (18) and the shaft of the sleeve (17)
The pressure fluid ejected from the receiving surface is supplied to the block (15, 4).
7, 85, 88) suction port for discharging to the outside
(19) and a lock in the rod insertion hole (16).
At the position corresponding to the second opening (13) on the outer peripheral surface of the gate.
The block side opening (26) to be formed and the block side opening
The port communicated with the port (26) through the fluid passage (27).
(20). 2. The rod body (9, 48, 61, 63,
The bearing according to claim 1, wherein a magnet (34) is provided at a base end of each of (65, 69, 71, 75, 77, 83, 91) . 3. The rod body (9, 61, 65, 69,
71, 75, 77) and the rod insertion hole (1).
The bearing according to claim 1 or 2, wherein a recess (12) is formed in a portion arranged in the inside (6), and the second opening (13) is formed in the recess (12) . 4. The recess (12) is an annular groove.
The bearing described in . 5. A width (W) of said annular groove (12) is equal to said rod (1, 40, 62, 64, 66, 68, 70, 74, 74).
The shaft according to claim 4, which is larger than the movable distance of (76).
received. 6. The rod body (9, 48, 61, 63,
The bearing according to any one of claims 1 to 5, wherein a contact member (11) made of a porous body is provided at a distal end of each of the first, second, third, second, third, second, third, fourth, fifth, sixth, fifth, sixth, fifth, sixth, seventh, sixth, seventh, eighth, third, and ninth . 7. The rod body (9, 48, 61, 63,
The bearing according to any one of claims 1 to 6, wherein a protrusion (30, 73) for retaining is provided on an outer peripheral surface of each of (65, 67, 69, 71, 75, 77, 83, 91) . 8. The rod body (9, 48, 61, 63,
The bearing according to any one of claims 1 to 7, wherein the cross-sectional shape of (65, 67, 69, 71, 83, 91) is circular.
Ke. 9. A bearing according to claim 1, wherein said rod body is bent in a substantially L-shape.
Ke . 10. A rod body (4) bent substantially in an L-shape.
8,67) and the LCD (46) for vacuum suction.
Suction formed at the tip of the rod body (48, 67)
Mouth (10) and outer peripheral surface of the rod body (48, 67)
An exhaust port (13) formed in the suction port (10);
A vacuum passage (1) communicating with the exhaust port (13).
4) a rod (40, 66), and a rod insertion hole
Block (47) having (16) and bearing surface
And a rod provided in the rod insertion hole (16).
A sleeve made of a porous body (17), and the sleeve (17)
Pressurized port (18) for supplying pressurized fluid to the
The pressure fluid ejected from the bearing surface of the sleeve (17)
A suction port for discharging to the outside of the block (47)
(19) and the rod insertion hole (16) in the rod insertion hole (16).
Formed at a position corresponding to the exhaust port (13) on the outer peripheral surface of the pad
Gas that is exhausted from the exhaust port (13)
(26) for introducing air into the block (47)
And a vacuum port (20) connected to the vacuum means.
And the vacuum port (20) and the suction port (26)
Bearing with a vacuum passage (27) for communicating
(41), the rod insertion hole (16) is turned sideways
(4) to which the bearing (41) is fixed as described above.
2) A vacuum suction device for an LCD transport machine comprising: 11. A rod body having a linear and circular cross section (9, 61, 63, 65, 69, 71, 83, 91).
And the rod body (9, 61, 63, 65, 69, 71, 83, 91) for vacuum suction of the electronic component (6).
And a suction port (10) formed at the tip of the rod body (9, 61, 63, 65, 69, 71, 83, 91).
An exhaust port (13) formed on the outer peripheral surface of the rod, a vacuum evacuation passage (14) for communicating the suction port (10) with the exhaust port (13), and the rod body (9, 61, 63, 6).
5, 69, 71, 83, 91) and a magnet (34) provided at the base end thereof.
68, 70, 82, 90) and a block (15, 85, 90) having a rod insertion hole (16).
88) and a porous sleeve (17) having a bearing surface and provided in the rod insertion hole (16).
A pressurizing port (18) for supplying a pressure fluid to the sleeve (17); and a pressure fluid ejected from a bearing surface of the sleeve (17) to the block (15, 85,
88) a suction port (19) for discharging to the outside,
In the rod insertion hole (16), a gas is formed at a position corresponding to the exhaust port (13) on the outer peripheral surface of the rod and gas discharged from the exhaust port (13) is directed to the block (15, 85, 88) side. An inlet (26) to be introduced into the
An evacuation port (20) connected to evacuation means,
A bearing (2, 84, 87) having a vacuum passage (27) for communicating the vacuum port (20) with the suction port (26), and the rod (1, 60, 62,
64, 68, 70, 82, 90), a coil (32) is provided at a position corresponding to the magnet (34), and the bearing is arranged such that the rod insertion hole (16) is oriented vertically. (2, 84, 87) and a head part (3) to which it is fixed.