JP2969016B2 - Method for manufacturing thin-film magnetic head - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a floating type thin film magnetic head which is used in a magnetic recording device such as an HDD or a computer and has a thin film read / write element on an end face of a slider. The present invention relates to an improvement in the pattern of such a read / write element.

[0002]

2. Description of the Related Art A floating type thin film magnetic head uses a dynamic pressure generated by the viscosity of air generated when moving at a high speed relative to a recording medium such as a magnetic disk, and makes a contact with a magnetic disk surface. A small flying height is generated, and is used for a read / write magnetic head such as an HDD. As a general configuration of such a thin film magnetic head, two read / write elements are provided on one side surface of a substantially rectangular slider. More specifically, two flying rails are formed on the bottom surface of the slider so as to protrude in parallel, and the two read / write elements are arranged so as to be close to the ends of the two flying rails. I have.

[0003] However, with the recent increase in recording density, the magnetic head has also been reduced in size. Accordingly, the size of the read / write element has been required to be reduced. However, the size of the read / write element is limited. Accordingly, a conventional Japanese Patent Application Laid-Open No. Hei 2-263308
As disclosed in Japanese Patent Application Laid-Open No. H10-209, there has been proposed a magnetic head in which only one read / write element is mounted on a slider. That is, as shown in FIG. 6 (A), two floating rails 2 are formed on the lower surface of a flat and substantially rectangular slider 1 on both side edges in the longitudinal direction so as to protrude in a parallel state. One read / write element 3 is formed on one side in the lateral direction of the slider. With such a configuration,
Even if the slider is small, a relatively large read / write element 3 can be used, so that the degree of freedom in pattern design can be improved and the manufacturing operation can be simplified.

[0004]

However, when a magnetic head is actually mounted in a magnetic recording apparatus, it is difficult to mount the magnetic head only in the case where the read / write element 3 is disposed on the right side in the figure as shown in FIG. In some cases, a thin film magnetic head in which the read / write element 3 is disposed on the left side as shown in FIG. Therefore, different types of mask patterns are formed according to both types,
Such a mask must be manufactured and stored, which complicates the operation.

The present invention has been made in view of the above background, and an object of the present invention is to manufacture a thin-film magnetic head having a configuration in which one read / write element is mounted on a slider by using the same mask pattern. It is an object of the present invention to provide a method of manufacturing a thin-film magnetic head which can be manufactured by using the read / write element, that is, the read / write element can be shared.

[0006]

In order to achieve the above-mentioned object, a method of manufacturing a thin-film magnetic head according to the present invention comprises a slider having at least two floating rails on a surface facing a magnetic recording medium. On a side surface, in a method of manufacturing a thin film magnetic head in which a thin film read / write element is disposed in close proximity to one of the floating rails, first, on a wafer,
Forming a read / write element consisting of a pattern having a pair of extraction electrodes arranged so as to extend in opposite directions on the end side of the coil, and then according to the mounting position on the slider on which the read / write element is mounted The read / write element is cut out from the wafer so as to cut off an unnecessary part of the pair of extraction electrode parts, and is arranged at a predetermined position of the slider.

[0007]

According to the present invention, the pattern of the read / write element formed on the wafer is adjusted so that two extraction electrodes are connected to one end of the coil and the arrangement directions of the pair of extraction electrodes are different. ing. Then
In order to actually mount the read / write element on the slider, an unnecessary portion of the pair of extraction electrodes was cut off, so that one read / write element was mounted on the slider using the read / write element manufactured from the same mask pattern. A thin-film magnetic head having the above configuration can be manufactured. That is, it is possible to cope with the manufacture of a type of magnetic head in which the mounting position of the read / write element with respect to the slider is different only by changing the cut portion.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the method for manufacturing a thin film magnetic head according to the present invention will be described below. First, as shown in FIG.
A number of read / write elements 12 having a predetermined shape are formed by appropriately laminating a magnetic material, a non-magnetic material, an insulating material, a conductor, and the like on the wafer 10. As shown in FIG. 2, the read / write element 12 includes a magnetic yoke 14 made of a core member vertically stacked with a nonmagnetic material interposed therebetween so as to have a gap at the tip (the lower end in the figure). Magnetic yoke 1
And a spiral coil 15 disposed so as to be interposed between the two core members on the rear side (upper side in the figure). In this example, the coils 15 are arranged in two layers. That is, the first coil portion 16
And the second coil portion 17 is provided thereover via an insulating layer.
Is provided. The first and second coil portions 16, 17 are electrically connected by locating the respective center-side end portions 16a, 17a at the same position in the vertical direction, and connecting them.

The extraction electrodes 20 are connected to both ends of the coil 15, that is, to outer end portions 16 b and 17 b of the first coil portion 16 and the second coil portion 17. Here, in the present invention, when connecting the extraction electrode 20,
Conventionally, only one extraction electrode was connected to one end 16b, 17b.
b and 17b are provided with two extraction electrodes having different arrangement directions.

That is, in the first coil portion 16, a substantially T-shaped first lead wire 21 is provided at an end portion 16b thereof, and first and second ends of the first lead wire 21 extending in opposite directions to the left and right are provided. The second extraction electrodes 20a and 20b are respectively provided in series. On the other hand, in the second coil portion 17, first, the second lead wire 22 is pulled out from the outer peripheral end 17b in parallel with the first lead electrode 20a, and the third lead electrode 20c is provided at the tip. . Then, a third lead wire 23 is formed so as to be located on an extension of the second lead wire 22 outward from a predetermined position of the outermost periphery of the coil of the second coil portion 17, and the third lead wire 23 is formed. Is provided with a fourth extraction electrode 20d at the tip of. As a result, the first
The line connecting the extraction electrode 20a and the second extraction electrode 20b is in a parallel state with the line connecting the third extraction electrode 20c and the fourth extraction electrode 20d, and the read / write element 12 is bilaterally symmetric. The term “end side of the coil” as used in this specification is a broad concept including the installation site of the third lead wire 23.

Next, each read / write element 12 is transferred to the wafer 1
Cut out from 0. At the time of this cutting, the cutting position is adjusted according to the type of the magnetic head to be manufactured, that is, whether the position where the read / write element is attached to the slider is on the right or left side. Now, assuming that the read / write element 12 is mounted on the right side of the slider 24 as shown in FIG. 3, the area is surrounded by a broken line in FIG.
a, 20c are excised. Then, the cut-out read / write element 12 (having only the second and fourth extraction electrodes 20b and 20d) is mounted on a predetermined position of the slider 24. Thus, a thin-film magnetic head is manufactured. As described above, in this example, unnecessary extraction electrodes can be cut off at the same time as the step of cutting out the read / write element 12, so that the number of manufacturing steps does not increase. Although not shown, when the read / write element is mounted on the left side of the slider, the wafer 1 is cut so that the second and fourth extraction electrodes 20b and 20d are cut off.
The read / write element 12 may be cut out from 0.

In the above-described embodiment, the structure of the read / write element has been described in the case where the coil is of a two-layer type. However, the present invention is not limited to this. For example, as shown in FIG. It may be. However,
As shown, one coil end 30 in the case of a single-layer type
a is located at the center, the T-shaped lead wire 31 ′
Must be extended to such a central part.

Further, in the above-described embodiment, an example having two sets of extraction electrodes 20 has been described. However, the present invention is not limited to this. For example, as shown in FIG. A pair of fifth and sixth extraction electrodes 20e and 20f may be connected to the connection portion of the coil to have a shape having three sets of extraction electrodes.
FIG. 1B shows an equivalent circuit thereof.

[0014]

As described above, in the method of manufacturing a thin film magnetic head according to the present invention, two readout electrodes are connected to one end of a coil as read / write elements formed on a wafer. When the read / write element is actually mounted on the slider by changing the arrangement direction of the pair of extraction electrodes, unnecessary portions of the pair of extraction electrodes are cut off, so that the read / write manufactured from the same mask pattern is used. A thin-film magnetic head having a configuration in which one read / write element is mounted on a slider using the element can be manufactured. As a result, the wafer manufacturing process can be simplified and shortened, and the cost can be reduced.

[Brief description of the drawings]

FIG. 1 is a plan view showing an example of a wafer on which a number of read / write elements are formed, which is used in an embodiment of a method of manufacturing a thin film magnetic head according to the present invention.

FIG. 2A is an enlarged plan view of the read / write element. (B) is an enlarged plan view showing the first coil unit. (C) is an enlarged plan view showing a second coil unit.

FIG. 3 is a front view showing an example of a thin-film magnetic head manufactured by carrying out this embodiment.

FIG. 4 is a plan view showing another example of the read / write element used in the present invention.

FIG. 5A is a plan view showing still another example of the read / write element used in the present invention. (B) is a diagram showing an equivalent circuit thereof.

FIG. 6 is a diagram showing a conventional magnetic head.

[Explanation of symbols]

 Reference Signs List 10 wafer 12 read / write element 15 coil 16b end of coil 17b end of coil 20a first extraction electrode 20b second extraction electrode 20c third extraction electrode 20d fourth extraction electrode 20e fifth extraction electrode 20f sixth Extraction electrode 24 slider

──────────────────────────────────────────────────の Continuing on the front page (72) Inventor Hideo Nawa 5-36-11 Shimbashi, Minato-ku, Tokyo Inside Fuji Electric Chemical Co., Ltd. (72) Genichi Ishida 5-36-11 Shimbashi, Minato-ku, Tokyo No. Fuji Electric Chemical Co., Ltd. (56) References JP-A-3-95715 (JP, A) (58) Field surveyed (Int. Cl. ⁶ , DB name) G11B 5/31

Claims (1)

(57) [Claims] 1. A thin film comprising a thin-film read / write element disposed on one side of a slider having at least two floating rails on a surface facing a magnetic recording medium, in a state of being close to one of the floating rails. In the method of manufacturing a magnetic head, first, a read / write element is formed on a wafer, the read / write element being composed of a pattern having a pair of extraction electrodes arranged so as to extend in opposite directions to the ends of the coils, respectively. Cutting out the read / write element from the wafer so as to cut off an unnecessary portion of the pair of extraction electrode parts according to the mounting position on the slider on which the element is mounted, and disposing it at a predetermined position on the slider. A method for manufacturing a thin film magnetic head.