JP2970040B2 - Solid-state imaging device - Google Patents
Solid-state imaging deviceInfo
- Publication number
- JP2970040B2 JP2970040B2 JP11810991A JP11810991A JP2970040B2 JP 2970040 B2 JP2970040 B2 JP 2970040B2 JP 11810991 A JP11810991 A JP 11810991A JP 11810991 A JP11810991 A JP 11810991A JP 2970040 B2 JP2970040 B2 JP 2970040B2
- Authority
- JP
- Japan
- Prior art keywords
- resin
- transparent cap
- imaging device
- solid
- state imaging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/756—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink
Landscapes
- Solid State Image Pick-Up Elements (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は固体撮像素子に関し、特
に固体撮像素子のパッケージングに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid-state imaging device, and more particularly to a solid-state imaging device packaging.
【0002】[0002]
【従来の技術】固体撮像素子のパッケージングにおい
て、入力として光学像をチップ上に正確に結像する必要
から、従来、図3に示すように撮像チップ2が必要な信
号端子3を備えたチップ収納容器1に接着され、通常光
学的平坦度を有するガラス平板からなる光入射面をもつ
透明キャップ4が封止樹脂5によって固着された構造に
なっている。6はボンディングワイヤである。2. Description of the Related Art In packaging a solid-state imaging device, since an optical image must be accurately formed on a chip as an input, a chip provided with a signal terminal 3 requiring an imaging chip 2 as shown in FIG. A transparent cap 4 having a light incident surface, usually made of a glass flat plate having optical flatness, adhered to the storage container 1 is fixed by a sealing resin 5. Reference numeral 6 denotes a bonding wire.
【0003】このような固体撮像素子用のパッケージン
グでの要求は、極力価格的に安価であることはもちろん
であるが、耐湿性に対する高い信頼性が求められてい
る。[0003] In such packaging for a solid-state imaging device, not only is it inexpensive as much as possible, but also high reliability for moisture resistance is required.
【0004】これは、図3に示すように撮像素子チップ
2は、封止された空間に位置するため、外部から水分が
取り込まれた状態で、収納容器温度が急激に低下する
と、内部の水蒸気が結露し、キャップ4の内面あるいは
撮像素子チップ2上に水滴として付着し、撮像に重大な
支障を来すことによる。This is because, as shown in FIG. 3, the image pickup device chip 2 is located in a sealed space, so that when the temperature of the storage container is rapidly reduced while moisture is taken in from the outside, the water vapor inside the image pickup device chip 2 is reduced. Is condensed and adheres as water droplets on the inner surface of the cap 4 or on the image sensor chip 2, causing serious trouble in imaging.
【0005】そこで、最近では価格面及び耐湿性の信頼
性面で優れる図4に示すような構造のパッケージングが
主流になりつつある。図4の構造では、封止部を平坦度
の出し易いチップ収納容器の最上平坦部とすることによ
って、耐湿性を確保する上で重要な封止樹脂を薄く、か
つ均一にすることを可能とし、かつ収納容器に非常に単
純にして作り易くすることによって低価格を実現してい
る。[0005] Therefore, recently, packaging having a structure as shown in FIG. 4 which is excellent in terms of price and reliability of moisture resistance is becoming mainstream. In the structure of FIG. 4, the sealing portion is made the uppermost flat portion of the chip storage container which is easy to obtain a flatness, thereby making it possible to make the sealing resin important for securing moisture resistance thin and uniform. In addition, a low price is realized by making the storage container very simple and easy to make.
【0006】[0006]
【発明が解決しようとする課題】しかしながら、このよ
うな構造では、比較的強度の弱いガラス平板からなる透
明キャップ4が最上部に位置し、かつその側端部が露出
した構造となっているため、側端部を破損し易く、ま
た、その側端部の破損を低減するため、図5に示すよう
に高価な面取り及び研摩仕上げを用いるが、これら研摩
仕上げ部4aには微細なガラス片が残留し易く、透明キ
ャップ4をチップ収納容器に封止固着した後の表面クリ
ーニング作業において、これらの透明キャップ4の側端
部から分離した微細なガラス片によって表面に傷を付け
るという欠点があった。However, in such a structure, the transparent cap 4 made of a glass plate having relatively low strength is located at the uppermost portion, and the side end thereof is exposed. In order to easily damage the side end and to reduce the damage to the side end, expensive chamfering and polishing are used as shown in FIG. There is a disadvantage that the surface is easily scratched by fine glass pieces separated from the side ends of the transparent cap 4 in the surface cleaning operation after the transparent cap 4 is sealed and fixed to the chip storage container. .
【0007】本発明の目的は、透明キャップの側端部に
対する研摩仕上げ加工を不要にした固体撮像素子を提供
することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a solid-state image pickup device which does not require polishing and finishing for side edges of a transparent cap.
【0008】[0008]
【課題を解決するための手段】前記目的を達成するた
め、本発明に係る固体撮像素子は、チップ収納容器の最
上平坦部に透明キャップを封止樹脂により接着して、該
容器内の撮像チップを気密封止した固体撮像素子であっ
て、前記透明キャップは、その下面周辺部と側面部と上
面周辺部とが樹脂で被覆保護されたものである。また前
記透明キャップの下面周辺部と側面部と上面周辺部とを
被覆保護している樹脂は、前記封止樹脂である。 また
前記透明キャップの下面周辺部を被覆保護している樹脂
は、前記封止樹脂であり、前記透明キャップの側面部と
上面周辺部とを被覆保護している樹脂は、前記封止樹脂
とは異なった樹脂である。 In order to achieve the above object, a solid-state imaging device according to the present invention comprises a transparent cap adhered to the uppermost flat portion of a chip storage container with a sealing resin to form an imaging chip in the container. Wherein the transparent cap has a lower peripheral portion, a side surface portion, and an upper surface.
The periphery of the surface is covered and protected with resin. Again before
Around the lower surface, the side surface and the upper surface of the transparent cap
The resin that is covered and protected is the sealing resin. Also
Resin that covers and protects the periphery of the lower surface of the transparent cap
Is the sealing resin, and a side portion of the transparent cap
The resin that covers and protects the periphery of the upper surface is the sealing resin
Is a different resin.
【0009】[0009]
【作用】透明キャップの側端部を樹脂で被覆することに
より保護する構造としたものである。The structure is such that the side end of the transparent cap is protected by coating with a resin.
【0010】[0010]
【実施例】次に本発明について図面を参照して説明す
る。DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings.
【0011】(実施例1)図1は、本発明の実施例1を
示す断面図である。(Embodiment 1) FIG. 1 is a sectional view showing Embodiment 1 of the present invention.
【0012】図1において、撮像チップ2は、例えば電
荷転送機能を用いた2次元撮像素子チップで、裏面を銀
ペースト等による接着剤によってチップ収納容器1に接
着固定されている。撮像チップ2の各信号電極は、ボン
ディングワイヤ6でチップ収納容器1の信号端子3に接
続されている。In FIG. 1, an image pickup chip 2 is, for example, a two-dimensional image pickup element chip using a charge transfer function, and the back surface is bonded and fixed to a chip storage container 1 with an adhesive such as a silver paste. Each signal electrode of the imaging chip 2 is connected to the signal terminal 3 of the chip housing 1 by a bonding wire 6.
【0013】チップ収納容器1は、信号端子3を形成す
るリードフレームとあらかじめ焼結形成した上下のセラ
ミック板とを低温ガラス8で溶着させてある。このチッ
プ収納容器1は、あらかじめ平坦に焼結形成されたプレ
ートを使用するため、チップ収納容器1の最上平坦部
は、ソリを含め10μm程度の平坦度に保たれている。In the chip container 1, a lead frame for forming the signal terminals 3 and upper and lower ceramic plates formed in advance by sintering are welded with low-temperature glass 8. Since the chip storage container 1 uses a plate which has been formed by sintering in advance, the uppermost flat portion of the chip storage container 1 is maintained at a flatness of about 10 μm including a warp.
【0014】一方、透明キャップ4は、光学的平坦度を
得るため両面が研摩仕上げされた0.7mm厚のガラス
平板から切断形成されている。透明キャップ4のすべて
の側端部は封止樹脂5によって光入射面側の上面周辺部
を含めて予め0.2mm程度の厚さで被覆されている。
これらの側端部の被覆は、両面に封止用の樹脂部を形成
することによって0.7mm厚の側端部を同時に容易に
覆うことができる。On the other hand, the transparent cap 4 is cut and formed from a 0.7 mm-thick glass plate polished on both sides to obtain optical flatness. All side edges of the transparent cap 4 are covered with the sealing resin 5 in advance to a thickness of about 0.2 mm including the peripheral portion of the upper surface on the light incident surface side.
These side edges can easily and simultaneously cover the 0.7 mm thick side edges by forming sealing resin portions on both sides.
【0015】また、本実施例の透明キャップ4は、側端
部が樹脂被覆されているため、面取り及び研摩仕上加工
はなくてもよく、透明キャップ4を従来より安価に製造
できる。Further, since the transparent cap 4 of the present embodiment is covered with a resin at its side end, chamfering and polishing and finishing are not required, and the transparent cap 4 can be manufactured at a lower cost than before.
【0016】このような透明キャップ4は、従来と同様
な熱による固着封止手段によって、チップ収納容器1に
均一で、かつ10〜20μmと薄い封止樹脂5によって
固着され、高い耐湿性を保持する構造を形成している。The transparent cap 4 is fixed to the chip container 1 by a sealing resin 5 which is uniform and as thin as 10 to 20 μm, and maintains high moisture resistance by the same fixing and sealing means by heat as in the past. To form a structure.
【0017】このような封止樹脂で覆われた透明キャッ
プ4の側端部は、機械的な力によってもカケ等が生ずる
ことなく、またガラス細片のカケ落ちによって表面クリ
ーニング時に表面にキズを付けることも防止できる。The side end of the transparent cap 4 covered with such a sealing resin is free from chipping or the like even by a mechanical force, and is scratched on the surface during the surface cleaning due to chipping off of glass fragments. It can be prevented from being attached.
【0018】(実施例2)図2は、本発明の実施例2を
示す断面図である。(Embodiment 2) FIG. 2 is a sectional view showing Embodiment 2 of the present invention.
【0019】本実施例における透明キャップ4は、実施
例1と同様に面取り,研摩仕上のなされていないガラス
平板キャップで、封止樹脂5は従来と同様に封止固着に
必要な部分のみにあらかじめ0.1μm厚で付着形成さ
れており、この透明キャップ4も実施例1と同様にチッ
プ収納容器1に均一で薄く固着されることとなる。The transparent cap 4 in the present embodiment is a glass flat cap without chamfering and polishing as in the first embodiment, and the sealing resin 5 is previously applied only to portions necessary for sealing and fixing as in the prior art. The transparent cap 4 is formed so as to have a thickness of 0.1 μm. The transparent cap 4 is also uniformly and thinly fixed to the chip storage container 1 as in the first embodiment.
【0020】一方、側端保護樹脂7はアクリル系の樹脂
であり、透明キャップ4を封止固着した後に側端部に1
00μm程度の厚さに塗布形成し、約120℃の温度で
硬化処理したもので、透明キャップ4の側端部を機械的
な力から保護するとともに、ガラス細片がカケ落ちて表
面クリーニング時に傷を付けるのを防止する。On the other hand, the side end protection resin 7 is an acrylic resin, and after the transparent cap 4 is sealed and fixed, 1
The transparent cap 4 is coated and formed to a thickness of about 00 μm and cured at a temperature of about 120 ° C. The side end of the transparent cap 4 is protected from mechanical force, and the glass fragments fall off and become scratched during surface cleaning. Prevent from attaching.
【0021】[0021]
【発明の効果】以上のように本発明は、チップ収納容器
の最上平坦部に透明キャップを封止固着することによっ
て耐湿性の良いパッケージングを実現するとともに、従
来問題であった透明キャップ側端部の機械的な力による
破損及び、側端部からの微細なガラス片のカケ落ちによ
って表面クリーニング時の傷を、キャップ側端部を封止
樹脂あるいは他の樹脂で覆って保護することに防止する
ことができる。As described above, the present invention realizes packaging with good moisture resistance by sealing and fixing the transparent cap to the uppermost flat portion of the chip storage container, and at the same time the transparent cap side end which has been a problem. Prevents damage caused by mechanical force of the part and damage caused by fine glass fragments falling from the side end during surface cleaning by protecting the cap side end with sealing resin or other resin to protect it can do.
【図1】本発明の実施例1を示す断面図である。FIG. 1 is a sectional view showing a first embodiment of the present invention.
【図2】本発明の実施例2を示す断面図である。FIG. 2 is a sectional view showing a second embodiment of the present invention.
【図3】従来例を示す断面図である。FIG. 3 is a sectional view showing a conventional example.
【図4】従来例を示す断面図である。FIG. 4 is a sectional view showing a conventional example.
【図5】従来の固体撮像素子における透明キャップの側
端部を示す一部拡大断面図である。FIG. 5 is a partially enlarged cross-sectional view showing a side end of a transparent cap in a conventional solid-state imaging device.
1 チップ収納容器 2 撮像チップ 3 信号端子 4 透明キャップ 5 封止樹脂 6 ボンディングワイヤ 7 側端保護樹脂 DESCRIPTION OF SYMBOLS 1 Chip storage container 2 Imaging chip 3 Signal terminal 4 Transparent cap 5 Sealing resin 6 Bonding wire 7 Side end protection resin
Claims (3)
ップを封止樹脂により接着して、該容器内の撮像チップ
を気密封止した固体撮像素子であって、 前記透明キャップは、その下面周辺部と側面部と上面周
辺部とが樹脂で被覆保護されたものであることを特徴と
する固体撮像素子。The method according to claim 1 transparent cap top flat portion of the chip container by bonding with a sealing resin, a solid-state imaging device hermetically sealed imaging chip within said vessel, said transparent cap, the lower surface near Section, side section and top circumference
A solid-state imaging device, wherein a side portion is covered and protected by a resin.
と上面周辺部とを被覆保護している樹脂は、前記封止樹
脂であることを特徴とする請求項1に記載の固体撮像素
子。 2. A peripheral portion and a side portion of a lower surface of the transparent cap.
Resin that covers and protects
The solid-state imaging device according to claim 1, wherein the imaging device is a fat.
Child.
護している樹脂は、前記封止樹脂であり、前記透明キャ
ップの側面部と上面周辺部とを被覆保護している樹脂
は、前記封止樹脂とは異なった樹脂であることを特徴と
する請求項1に記載の固体撮像素子。 3. A cover around a lower surface of the transparent cap.
The resin being protected is the sealing resin, and the transparent
Resin that covers and protects the side and top periphery
Is a resin different from the sealing resin,
The solid-state imaging device according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11810991A JP2970040B2 (en) | 1991-04-22 | 1991-04-22 | Solid-state imaging device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11810991A JP2970040B2 (en) | 1991-04-22 | 1991-04-22 | Solid-state imaging device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04322450A JPH04322450A (en) | 1992-11-12 |
| JP2970040B2 true JP2970040B2 (en) | 1999-11-02 |
Family
ID=14728246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11810991A Expired - Fee Related JP2970040B2 (en) | 1991-04-22 | 1991-04-22 | Solid-state imaging device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2970040B2 (en) |
-
1991
- 1991-04-22 JP JP11810991A patent/JP2970040B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04322450A (en) | 1992-11-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |