JP2970802B2 - XY stage device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an XY stage device, and more particularly to an XY stage device capable of moving a stage member on which an object is mounted at a high speed and positioning with high accuracy.

[0002]

FIG. 8 is a perspective view of a conventional XY stage device. A conventional XY stage device has an X stage 100 arranged along the X axis and a Y stage arranged along the Y axis.
It comprises a stage 110 and a movable stage 120.

When the ball screw 102 is rotated by the servo motor 103 of the X stage 100, the Y stage 110 is driven by the guide mechanism 101 of the X stage 100.
To move in the X-axis direction. By rotating the ball screw 112 by the servo motor 113 of the Y stage 110, the movable stage 120
It is guided by the ten guide mechanisms 111 and moves in the Y-axis direction.

[0004] As described above, the movable stage 120 can be moved in a plane by combining the two uniaxial stages at right angles.

[0005]

In a method of driving a one-axis stage in which a servo motor and a ball screw are combined by a semi-closed (semi-closed) loop control system that feeds back from an encoder of the servo motor, the rigidity of a ball screw portion is reduced. Since the effect of the backlash is not fed back, it is difficult to precisely position the movable stage. In addition, with the method of driving with a fully closed loop control system that directly detects the stage position, the stability of the control loop due to the vibration of the ball screw during high-speed movement cannot be ensured, and the response characteristics can be improved. Have difficulty.

An object of the present invention is to provide an XY stage device capable of high-speed movement and precise positioning.

[0007]

According to one aspect of the present invention, a support member and a support member are provided so as to be able to translate in a virtual movable plane.
A stage member attached to the support member, a driving force generated in both sides of a virtual plane parallel to the movable surface, generating a driving force symmetrical with respect to the virtual plane, and applying a driving force in the movable surface to the stage member. X with one linear motor
A Y stage device is provided.

Since the stage member is directly translated by the linear motor, no power transmission mechanism is required, and the size and weight can be reduced. Since a symmetric driving force is generated on both sides of the virtual plane, a large thrust can be obtained.

According to another aspect of the present invention, the first linear motor is a plurality of permanent magnets fixedly attached to one of the support member and the stage member, and the first linear motor defines the virtual plane. The plurality of permanent magnets arranged such that the magnetic pole surfaces of the same polarity face each other with the polarities alternately reversed along a linear arrangement direction parallel to the movable surface, and the support member, A coil fixedly attached to the other one of the stage members, the permanent magnet being parallel to the movable surface and between the mutually facing magnetic pole faces of the permanent magnet and the virtual plane; An XY stage device is provided which is arranged so as to be orthogonal to the arrangement direction of the XY stage and has the coils configured to include current paths that are antisymmetric with respect to the virtual plane.

According to another aspect of the present invention, the first linear motor is further disposed between two mutually facing magnetic pole faces of the permanent magnet, and between the two magnetic pole faces. An XY stage device is provided having a center yoke defining a gap in which the current path is located.

By arranging the center yoke, the magnetic flux density in the gap where the current path is arranged can be increased.
According to another aspect of the present invention, there is provided an XY stage device in which the permanent magnet is fixedly attached to the support member.

Generally, coils are lighter than permanent magnets. Therefore, by attaching the permanent magnet to the support member and attaching the coil to the stage member, the weight of the movable portion can be reduced. When the weight of the movable part is reduced, acceleration and deceleration can be performed quickly.

According to another aspect of the present invention, a relative position of the position detection point fixed to the stage member with respect to the support member is detected, and a position signal corresponding to the relative position of the position detection point is generated. A position sensor, wherein the position of the center of gravity of the stage member and the entire member fixed to the stage member and moving together with the stage member, the position detection points, and the virtual plane are located with respect to the normal direction of the virtual plane. A virtual plane, and a position detection point, or a position of a center of gravity, a position detection point, and the position sensor arranged in the order of the virtual plane, and a control unit that drives the first linear motor based on the position signal. Is provided.

According to another aspect of the present invention, the linear motor includes a second linear motor that generates a driving force in a first direction parallel to the movable surface, and a first linear motor parallel to the movable surface. An XY stage device having a third linear motor that generates a driving force in a second direction orthogonal to the direction X.

The stage member can be translated in the movable plane by the second and third linear motors. According to another aspect of the present invention, there is provided an XY stage device in which the second and third linear motors each include a pair of linear motors arranged in parallel with each other in the movable surface.

Since the pair of linear motors are arranged in parallel in the movable surface, the stage member can be driven more stably. According to another aspect of the present invention, a support member, a stage member attached to the support member so as to be able to translate in a virtual movable surface, and the stage member, A driving means for performing a relative translation with respect to a position detection point fixed to the stage member, and detecting a relative position of the position detection point with respect to the support member to correspond to a relative position of the position detection point. A position detecting means for generating a position signal, wherein a position of the center of gravity of the stage member and the entire member fixed to the stage member and moving together with the stage member is acted upon by a combined driving force applied to the stage member by the driving means. The drive point to perform and the position detection point are arranged in this order with respect to the normal direction of the movable surface, and the drive is performed based on the position signal. An XY stage and a control means for controlling the stage are provided.

When the center of gravity, the driving points, and the position detection points are arranged in this manner, the phase delay in the frequency response characteristic of the control system near the resonance frequency of the pitching motion of the movable part is reduced. Since the phase delay is reduced, the gain near the resonance frequency can be increased. Therefore, it is possible to perform stable control at a higher frequency.

[0018]

FIG. 1 is a block diagram of an embodiment of the present invention.
1 shows a partially cutaway perspective view of a Y stage device. X shown in FIG.
The Y stage device includes a base 10 having a flat upper surface, a movable stage 20, and a linear motor 30. Take the X and Y axes inside the top surface of the base 10,
Consider a coordinate system that takes the Z axis in the normal direction of the upper surface.

An X-axis linear guide 11 is disposed on the upper surface of the base 10 in parallel with the X-axis, and the Y-axis linear guide 11 is disposed in parallel with the Y-axis.
The shaft linear guide 12 is guided by the X-axis linear guide 11 and moves in the X-axis direction. The movable stage 20 is guided by the Y-axis linear guide 12 and moves in the Y-axis direction. As described above, the movable stage 20 moves along the XY plane by the combination of the X-axis and Y-axis linear guides 11 and 12.

A linear motor 30 is arranged in a square shape so as to surround a movable area where the movable stage 20 moves. The linear motor 30 includes X-axis linear motors 30B and 30D arranged parallel to the X-axis, and Y-axis linear motors 30A and 30C arranged parallel to the Y-axis. FIG. 1 shows a configuration in which a part of the linear motors 30C and 30D is broken.

The linear motor 30A includes a yoke 31A fixed to the base 10, a coil 32A fixed to the movable stage 20, and a permanent magnet 33A fixed to the yoke 31A.
a to 33Aj. In FIG. 1, the permanent magnets 33Ag to 33Aj are not shown because they are behind the coil 32A.

As shown in FIG. 2, the yoke 31A has a lower yoke, a center yoke, and an upper yoke, which are long in the Y-axis direction, stacked on the base 10 in this order at regular intervals.
The yokes are connected to each other at both ends. Permanent magnets 33Aa to 33Ae are fixed to the lower surface of the upper yoke of the yoke 31A, and permanent magnets 33Af to 33Aj are fixed to the upper surface of the lower yoke. A fixed gap is defined between the center yoke side pole face of each permanent magnet and the center yoke. Each permanent magnet is equivalent with respect to its size and magnetization intensity.

The permanent magnets 33Aa and 33Af, 33Ab and 33Ag, 33Ac and 33Ah, 33Ad and 33Ai,
33Ae and 33Aj face each other across the center yoke. The mutually facing magnetic pole faces of the permanent magnets have the same polarity. That is, the permanent magnet 33Aa
33Aj are arranged symmetrically with respect to an imaginary plane passing through the center of the center yoke in the height direction (Z-axis direction) and parallel to the XY plane. In addition, the permanent magnets 33Aa-3
3Ae magnet array, and permanent magnets 33Af to 33A
Each of the magnet rows composed of j is configured such that the polarity of the magnetic pole surface on the center yoke side is alternately reversed along the Y axis.

Returning to FIG. 1, the coil 32A includes an upper current path in the X-axis direction arranged in a gap between the magnet row including the permanent magnets 33Aa to 33Ae and the center yoke, and permanent magnets 33Af to 33Aj. It is configured to include a lower current path in the X-axis direction arranged in a gap between the magnet row and the center yoke. When a current flows through the coil 32A, currents in opposite directions flow through the upper current path and the lower current path of the coil 32A. That is, the coil 32A forms a current path that is antisymmetric with respect to the virtual plane.

Since the linear motors 30B to 30D have the same configuration as the linear motor 30A, the description is omitted here. . When a current flows through the coils 32A and 32C, an electromagnetic force in the Y-axis direction is generated on the coils 32A and 32C.
When a current flows through the coils 32B and 32D, an electromagnetic force in the X-axis direction is generated on the coils 32B and 32D. Since each of the coils 32A to 32D is fixed to the movable stage 20, by passing a current through the coils 32A to 32D,
The movable stage 20 can be moved in the XY plane.

A movable stage 20 is provided on the upper surface of the base 10.
The position sensor 13 is arranged in the movable area of the. The position sensor 13 detects the position of a position detection point fixed to the lower surface of the movable stage 20, and outputs a position signal.

The control means 40 receives the position signal from the position sensor 13 and controls the linear motor 30 based on the position signal. Next, the driving principle of the linear motor will be described with reference to FIGS.

FIG. 2 is a sectional view of the linear motor 30A of FIG. The linear motors 30B to 30D have the same configuration. The yoke 31A is composed of a lower yoke 31Aa, a center yoke 31Ab, an upper yoke 31Ac, and a high magnetic permeability member interconnecting these at both ends.

The permanent magnet 3 is provided on the lower surface of the upper yoke 31Ac.
3Aa to 33Ae are arranged and attached in the Y-axis direction,
On the upper surface of the lower yoke 31Aa, permanent magnets 33Af to 33A
Aj are mounted in the Y-axis direction. A gap 34B is defined between the permanent magnets 33Aa to 33Ae and the center yoke 31Ab, and a gap 34A is defined between the permanent magnets 33Af to 33Aj and the center yoke 31Ab.

The permanent magnets 33Aa and 33Af, 33Ab and 33Ag, 33Ac and 33Ah, 33Ad and 33Ai,
33Ae and 33Aj face each other across the center yoke. Permanent magnets 33Aa, 33Ac, 33
The magnetic poles on the center yoke side of Ae, 33Af, 33Ah and 33Aj are S poles, and permanent magnets 33Ab, 33Ad, and 33A.
g and 33Ai are arranged such that the magnetic poles on the center yoke side become N poles.

Accordingly, one permanent magnet, gap 34A or 34B, center yoke, gap 34A or 34
A closed magnetic circuit is formed by B, the adjacent permanent magnet, and the lower yoke 31Aa or the upper yoke 31Ac. Therefore, in the gaps 34A and 34B, the magnetic fields in the + Z direction and the -Z direction appear alternately along the Y axis. In addition, by providing a center yoke made of a high magnetic permeability material,
The magnetic flux density in 4A and 34B can be increased.

In the gaps 34A and 34B, a lower current path and an upper current path of the coil 32A are disposed along the X-axis direction, respectively. The coil 32A includes four equivalent coils 32Aa to 32Ad arranged in the Y-axis direction. The arrangement pitch of the coils 32Aa to 32Ad is
It is set to の of the arrangement pitch of the permanent magnets 33Aa to 33Aj. Although not shown in the drawing, the coils 32Aa to 32Aa to
32Ad is wound on a coil bobbin made of a non-magnetic material.

When a current flows through the coils 32Aa to 32Ad, currents in opposite directions flow through the upper current path and the lower current path,
The opposite magnetic field generates an electromagnetic force in both the current paths in the same Y-axis direction. Therefore, a thrust in the Y-axis direction is generated in each coil.

FIG. 3 is a graph showing the thrust generated in the coils 32Aa to 32Ad. The horizontal axis is Y of the coil 32.
The moving distance from the reference point in the axial direction is shown, and the vertical axis shows the thrust on an arbitrary scale. Here, the movement distance lp on the horizontal axis is the pitch of the arrangement of the permanent magnets 33Aa to 33Aj. Curve p
Represents the thrust in the Y-axis direction when a constant current flows through each of the coils 32Aa and 32Ac, and the curve q represents the thrust in the Y-axis direction when a constant current flows through each of the coils 32Ab and 32Ad.

The thrust generated by a pair of the coils 32Aa and 32Ac and the thrust generated by a pair of the coils 32Ab and 32Ad have a phase shift of about 1/2 pitch. If it is a sine waveform, the other will be a cosine waveform. The magnitude of the thrust is proportional to the current flowing through the coils 32Aa to 32Ad.

The force generated by one set of the coils 32Aa and 32Ac and one set of the coils 32Ab and 32Ad can be expressed as follows.

[0037]

F _A = ki _A cos (πY / lp) (1)

[0038]

F _B = ki _B sin (πY / lp) (2) where F _A and F _B are coils 32Aa and 32, respectively.
_A thrust in the Y-axis direction generated by one set of Ac and one set of coils 32Ab and 32Ad, i _A and i _B are currents flowing through one set of coils 32Aa and 32Ac and one set of coils 32Ab and 32Ad, respectively, and Y is a coil. 32A displacement,
lp indicates the pitch of the arrangement of the permanent magnets, and k indicates the thrust constant.

The current flowing through each coil is determined by the following equation based on the displacement of the coil 32A.

[0040]

I _A = i _r cos (πY / lp) (3)

[0041]

[Number 4] _{i B = i r sin (πY} / lp) ... (4) here, i _r denotes a target current.

At this time, the total thrust F generated by the coils 32Aa to 32Ad is:

[0043]

F = F _A + F _B = ki _r (5)

[0044] Thus, by passing an alternating current expressed in the coil 32Aa~32Ad by the formula (3) and (4), it is possible to generate a thrust proportional to the target current i _r. Also, the linear motor 30C shown in FIG. 1 can generate the same thrust in the Y-axis direction as the linear motor 30A. Further, the linear motors 30B and 30D can generate a thrust in the X-axis direction.

As described above, since the thrust of the linear motor can be directly transmitted to the movable stage without using the power transmission mechanism, the weight of the movable stage can be reduced and the response speed can be increased. Further, since the load of the linear motor for the X-axis direction is substantially equal to the load of the linear motor for the Y-axis direction,
Variations in response performance between the X and Y axes can be reduced.

In the above embodiment, a magnetic field is applied to both the upper current path and the lower current path of the movable coil 32A to generate thrust in two current paths. Therefore, thrust is generated in one current path. A larger thrust can be obtained than in the case of

In the above embodiment, the permanent magnet is fixed to the base and the coil is fixed to the movable stage. Alternatively, the permanent magnet may be fixed to the movable stage and the coil may be fixed to the base. In addition, since the coil is generally lighter than the permanent magnet, fixing the coil to the movable stage can reduce the weight of the movable portion compared to the case where the permanent magnet is fixed to the movable stage, and can accelerate and decelerate more quickly. .

In FIGS. 2 and 3, the linear motor
Although the case of the phase driving is shown, the pitch of the coil may be set to 1 / N of the pitch of the permanent magnet, and the N-phase driving may be performed. next,
The position control method of the XY stage device shown in FIG. 1 will be described with reference to FIGS.

FIG. 4 is a sectional view taken on a plane passing through the center of the movable stage 20 of the XY stage apparatus of FIG. 1 and perpendicular to the Y axis. The coils 32A are provided on both sides of the movable stage 20 in the drawing.
And 32C are attached. Coils 32A and 3
2C engages the magnetic fields of the permanent magnets attached to yokes 31A and 31C, respectively.

The movable stage 20 includes a Y-axis linear guide 1
2 guides in the Y-axis direction. Y-axis linear guide 12
Are guided in the X-axis direction by an X-axis linear guide (not shown). Below the movable stage 20, a position sensor 13 fixed to the base is arranged. Position sensor 1
3 detects the position in the XY plane of the position detection point Ps fixed to the lower surface of the movable stage 20.

The point Pg in FIG. 4 represents the position of the center of gravity of the movable stage 20 and the whole members such as coils fixed to the movable stage 20. The point Pf represents a driving point of the combined thrust by the linear motor 30. The driving point Pf is determined by the coils 32A to 32A.
It is located in a plane containing the midpoint between the 2D upper and lower current paths.

Since the height of the center of gravity Pg of the entire movable part and the drive point Pf from the base surface are different, when the movable stage 20 is driven in the X-axis direction, in addition to the translational movement in the X-axis direction, Pitching movement occurs. Since the height of the center of gravity Pg and the position detection point Ps from the base surface are different, if a pitching motion occurs, a position detection error occurs. Since the position control error due to the resonance of the pitching motion is included in the position control loop, the band in which the position control can be stably performed is limited.

When the frequency characteristics of the position control loop were determined by simulation, it was found that the frequency characteristics varied greatly depending on the order of arrangement of the center of gravity Pg, the driving point Pf, and the position detection point Ps in the direction normal to the movable surface. .

FIGS. 5A and 5B are block diagrams of an open loop control system and a closed loop control system for position control, respectively. The input signal of the control system is a position command value, and the output signal is a position detection value.

As shown in FIG. 5A, the open loop control system gives a proportional gain to a position command value and gives a differential gain to a differential signal of the position command value. The signal given the proportional gain and the signal given the differential gain are added and input to the XY stage device. The position detection value is obtained from the XY stage device. As shown in FIG. 5B, in the closed loop control system, the output signal of the open loop control system shown in FIG. 5A is negatively fed back to the input side.

FIG. 6 shows the frequency characteristics when the drive point Pf and the position detection point Ps are on opposite sides of the center of gravity Pg (when the drive point and the position detection point are in opposite phases). FIG. 7 shows the driving point P
7 shows frequency characteristics when f and the position detection point Ps are on the same side as viewed from the center of gravity Pg (when the drive point and the position detection point are in phase).

FIGS. 6 (A) and 7 (A) show the gain in the case of open loop control, and FIGS. 6 (B) and 7 (B)
Indicates a phase in the case of open loop control. In each graph, the horizontal axis represents frequency in units of Hz, and FIG.
The vertical axis of (A) represents the gain in the unit of dB, and the vertical axes of FIGS. 6B and 7B represent the phase in the unit of “degree”.

The simulation conditions were as follows: the coil mass was 1.1 kg, the coil viscosity coefficient was 120 kg /
s, load mass 3.6 kg, load viscosity coefficient 1.7 kg
/ S, the guide system stiffness coefficient was 1.65 × 10 ⁷ N / m, the distance between the center of gravity Pg and the drive point Pf was 6 mm, and the distance between the center of gravity Pg and the position detection point Ps was 32 mm. Here, the coil viscosity coefficient is related to the resistance force based on the eddy current generated in the coil bobbin, the load viscosity coefficient is related to the resistance force based on the frictional force of the linear guide, and the guide system stiffness coefficient is related to the resonance frequency of the pitching motion. Parameter.

The proportional gain and the differential gain were selected so that the gain margin was 15 dB and the phase margin was 40 degrees. Specifically, the differential gain was determined so that the phase margin became 40 degrees or more, and then the proportional gain was determined so that the gain margin became 15 dB or more. When the driving point and the position detection point are in opposite phases, the proportional gain is 4800 and the differential gain is 24
0, the proportional gain in the case of the same phase was 30,000, and the differential gain was 1500.

As shown in FIG. 6A, when the driving point and the position detection point are in opposite phases, the resonance frequency of the pitching motion is lower than the anti-resonance frequency.
As shown in (A), when the driving point and the position detection point are in phase, the resonance frequency of the pitching motion is higher than the anti-resonance frequency. Further, as shown in FIG. 6B, when the driving point and the position detection point are in opposite phases, a valley-shaped peak appears near the resonance frequency and the phase is greatly delayed. As shown in ()), when the driving point and the position detection point are in phase, a mountain-like peak appears near the resonance frequency and the phase delay is small.

As shown in FIG. 6B, when the driving point and the position detection point are in opposite phases, a phase lag of 1 near the resonance frequency occurs.
Since the angle is 80 degrees or more, the gain near the resonance frequency cannot be increased. On the other hand, FIG.
As shown in the figure, when the driving point and the position detection point are in phase,
Since the phase delay near the resonance frequency is 180 degrees or less,
The gain near the resonance frequency can be increased.

FIGS. 6C, 6D and 7C,
(D) shows the frequency characteristics of the closed-loop control system when the driving point and the position detection point are in the opposite phase and in the same phase, respectively. Normally, when the gain is reduced to -3 dB or more, it cannot follow the position command value sufficiently. Therefore, when the driving point and the position detection point are in opposite phases, the controllable band is about 1 as shown in FIG.
It is considered to be 0 Hz or less. When the driving point and the position detection point are in phase, the controllable band is about 10
It is considered to be 0 Hz or less.

As described above, by configuring the drive point and the position detection point to have the same phase, the controllable band can be increased. FIG. 4 shows a case where the center of gravity Pg, the driving point Pf, and the position detection point Ps are arranged in this order with respect to the normal direction of the movable surface.
The position detection points Ps and the driving points Pf may be arranged in this order.

In the above simulation, the case of controlling the XY stage device using the linear motor shown in FIG. 1 has been described. However, the closed loop control system assumed in the simulation is not limited to the XY stage device using the linear motor, XY stage device. For example, the present invention can be applied to an XY stage device in which a one-axis stage using a ball screw is combined as shown in FIG.

The present invention has been described in connection with the preferred embodiments.
The present invention is not limited to these. For example, it will be apparent to those skilled in the art that various modifications, improvements, combinations, and the like can be made.

[0066]

As described above, according to the present invention,
Since a large thrust can be obtained, the movable stage can be driven at high speed. Further, since the phase delay of the closed loop control system at the time of the resonance of the pitching motion can be reduced, it is possible to stably control a relatively high frequency.

[Brief description of the drawings]

FIG. 1 is a partially cutaway perspective view of an XY stage device according to an embodiment of the present invention.

FIG. 2 is a sectional view of a linear motor used in the XY stage device shown in FIG.

FIG. 3 is a graph showing a thrust of the linear motor shown in FIG.

FIG. 4 is a cross-sectional view of a movable stage and a linear motor for explaining a positional relationship between a center of gravity, a driving point, and a position detection point of the movable stage in the XY stage device shown in FIG.

FIG. 5 is a block diagram of an open loop control system and a closed loop control system of the XY stage device.

FIG. 6 is a graph showing frequency characteristics of an open-loop control system and a closed-loop control system when the driving point and the position detection point shown in FIG. 4 are on opposite sides from the center of gravity.

7 is a graph showing frequency characteristics of an open-loop control system and a closed-loop control system in a case where a driving point and a position detection point shown in FIG. 4 are on the same side as viewed from the center of gravity.

FIG. 8 is a perspective view of an XY stage device according to a conventional example.

[Explanation of symbols]

 Reference Signs List 10 Base 11 X-axis linear guide 12 Y-axis linear guide 13 Position sensor 20 Movable stage 30 Linear motor 31A, 31B, 31C, 31D Yoke 32A, 32B, 32C, 32D Coil 33A, 33B, 33C, 33D Permanent magnet 34A, 34B 40 control means

────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kenichi Makino 63-30 Yuyogaoka, Hiratsuka-shi, Kanagawa Prefecture Sumitomo Heavy Industries, Ltd. (56) References JP-A-7-46818 (JP, A) JP-A-62-254681 (JP, A) JP-A-55-139071 (JP, A) JP-A-62-5420 (JP, A) (58) Fields investigated (Int. Cl. ⁶ , DB name) H02K 41 / 00-41/035 H02P 5/00 101 H02P 7/00 101

Claims (6)

(57) [Claims] 1. A supporting member, a stage member attached to the supporting member so as to be able to translate in a virtual movable surface, and a symmetrical member with respect to the virtual plane on both sides of a virtual plane parallel to the movable surface. A first linear motor that generates a driving force and applies a thrust in the movable surface to the stage member, and detects a relative position of a position detection point fixed to the stage member with respect to the support member, thereby detecting the position. A position sensor that generates a position signal corresponding to the relative position of the point, the center of gravity position of the stage member and the entire member fixed to the stage member and moving with the stage member, the position detection point, and the virtual plane An XY stage arranged in the order of the barycentric position, the virtual plane, and the position detection point, or the barycentric position, the position detection point, and the virtual plane in the normal direction of the virtual plane apparatus. 2. The apparatus according to claim 1, wherein the first linear motor includes a plurality of permanent magnets fixedly attached to one of the support member and the stage member, the first linear motor having the same polarity with respect to the virtual plane. The plurality of permanent magnets whose magnetic pole surfaces face each other and are arranged so that the polarities are alternately reversed along a linear arrangement direction parallel to the movable surface, and the one of the support member and the stage member A coil fixedly attached to a different one of the permanent magnets, disposed between the mutually facing magnetic pole surfaces of the permanent magnets and the virtual plane, parallel to the movable surface, and orthogonal to an arrangement direction of the permanent magnets. The XY stage apparatus according to claim 1, further comprising: the coil configured to include current paths that are antisymmetric with respect to the virtual plane. 3. The first linear motor is further disposed between two mutually facing magnetic pole faces of the permanent magnet, and the current path is disposed between each of the two magnetic pole faces. 3. The XY stage device according to claim 2, further comprising a center yoke defining a gap. 4. The XY stage device according to claim 2, wherein the permanent magnet is fixedly attached to the support member. 5. A first linear motor that generates a thrust in a first direction parallel to the movable surface, and a second linear motor that is parallel to the movable surface and orthogonal to the first direction. The XY stage device according to any one of claims 1 to 4, further comprising a third linear motor that generates a thrust in a second direction. 6. The X according to claim 5, wherein the second and third linear motors each comprise a pair of linear motors arranged in parallel with each other in the movable surface.
Y stage device.