JP2979441B2 - Zone plate mounting frame - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a zone plate used for, for example, an optical apparatus for X-rays.

[0002]

2. Description of the Related Art Among X-ray diffraction elements which generate an optical effect by utilizing an X-ray diffraction phenomenon, a zone plate has attracted attention as an imaging element in a soft X-ray region. The zone plate has an array structure in which a plurality of soft X-ray opaque members are provided concentrically, and these opaque zones and gap portions (transmission zones) other than the zones are alternately adjacent to each other. I have.

A general structure of a zone plate is that a thin-film support film made of a material having a relatively high transmittance to soft X-rays is provided on a transmission window opened in a substrate. The opaque zones are held at predetermined intervals. Therefore, the transmission part of the zone plate is formed by the support film. An optical device using such a zone plate is, for example, an X-ray microscope.

As shown in FIG. 3, a zone plate used in a conventional X-ray microscope is provided with an opening in the center of the inside of one large substrate, and a support film is stretched over a transmission window on the opening. An X-ray opaque zone is formed on the support film (hereinafter, a portion 10 including a transmission window, a support film, and an X-ray transmission zone is referred to as a transmission window portion). In addition, the outer peripheral portion 9 of the substrate is used as a mounting frame when the substrate is mounted on the optical device. A second opening 11 is provided between the outer peripheral portion 9 and the central transmission window portion 10, and this opening 11 is used as a visible light window of an optical microscope.

In general, when a zone plate is used, each user mounts the device on the apparatus by appropriately devising the outer peripheral portion of the substrate. Further, the zone plate is often supplied in the form of a thin film, and is mounted on the apparatus by a method such as a method of directly stopping it with a tape.

[0006]

In the conventional zone plate, when the substrate is Si and the outer peripheral portion of the substrate is used as a mounting frame as it is, since Si is a material having relatively low thermal conductivity, heating by X-rays is performed. It is difficult to escape enough. Therefore, there is a problem that the zone plate expands and contracts due to the heating, and the aberration increases. The zone plate supplied in a thin film state was inconvenient to handle and easily broken.

In the manufacture of a zone plate, usually, exposure with an electron beam is performed by processing one zone plate in a high vacuum state in a vacuum apparatus, and it takes more than one hour before and after the decompression operation alone. However, failures and breakage during the manufacturing process are apt to occur, and if the breakage occurs, the operation up to that point is totally useless and only the damage remains.

Further, in the conventional mounting frame, when a fragile material such as Si is used for the substrate, there is a problem that handling becomes difficult. For example, if a large window for visible light for an optical microscope is provided between the outer peripheral portion and the central transmitting portion,
The cross section 12 of the window became thin, and this portion was easily damaged.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems and to obtain a mounting frame for mounting a device which reduces damage to a zone plate, and to improve the production efficiency of a zone plate by using the mounting frame. Aim.

[0010]

In the zone plate according to the first aspect of the present invention, an X-ray transmission thin film stretched over a transmission window on an opening of a substrate, and an X-ray transmission thin film provided on the thin film.
A mounting frame used when mounting a zone plate comprising a line opaque zone to an optical device, wherein an outer peripheral portion is a mounting portion to the optical device, and a zone plate supporting portion is provided in the center of the inside, The portion has an opening corresponding to the transmitting portion of the zone plate, and a mounting portion adhered to the vicinity of the peripheral edge of the opening on the lower surface of the zone plate substrate.

According to a second aspect of the present invention, there is provided the zone plate mounting frame according to the first aspect, wherein the second opening is provided between the support portion and the outer peripheral portion. It has a part.

[0012]

According to the present invention, the mounting frame used for mounting the zone plate to the apparatus has a zone plate supporting portion in the center of the mounting frame. The mounting frame can be made of a material other than the above. As the material, for example, a material such as Cu which has good heat conductivity and is easy to process is widely used. Therefore, in a mounting frame made of a material that can sufficiently release the heat of X-rays, damage to the zone plate due to heating can be reduced, and an increase in aberration can be avoided.

Further, since the zone plate itself does not need to have an outer peripheral portion serving as a mounting frame, a zone plate having only a transmission window portion and the vicinity of the transmission window portion may be used. Since this is mounted on the mounting frame and used, handling of the zone plate is simplified.

In the case of a miniaturized zone plate having no outer peripheral portion as described above, a large amount of light can be exposed at one time in the manufacturing process, so that it can be mass-produced and supplied as chips. Therefore, as compared with the conventional case where one zone plate is manufactured at one time, a very high yield can be obtained and productivity is improved even if some breakage occurs.

[0015]

FIG. 1 shows a zone plate mounting frame according to an embodiment of the present invention. FIG. 2 shows the zone plate 1 of FIG.
FIG. 3 is an enlarged cross-sectional view of a support portion 3 of FIG.

In the drawing, a support portion 3 is provided at the center of a mounting frame 4 made of Cu, and a second opening 5 is provided between the support portion 3 and an outer peripheral portion 6. The zone plate 1 of the Si substrate is bonded to the center of the mounting frame 4 by the support portion 3. The zone plate 1 is provided only in the vicinity of a transmission window composed of a support thin film 8 stretched over a transmission window 10 on the opening 2 of the substrate 7 and an X-ray opaque zone 9 provided on the support thin film 8. Consists of

The supporting portion 3 has an opening 11 corresponding to the opening 2 on the lower surface of the substrate of the zone plate 1 and is provided so as to be adhered to the vicinity of the peripheral end of the opening 2 of the zone plate.
The support portion 3 may be any one that can attach and detach the zone plate, such as a strong seal. Thus, when the zone plate is damaged, only the zone plate is replaced and the mounting frame can be used again.

[0018]

As described above, according to the present invention, since the mounting frame provided with the zone plate supporting portion is used when the zone plate is mounted on the apparatus, it is easily broken as the substrate of the zone plate. The mounting frame can be made of a material other than Si. As the material, for example, a material such as Cu which has good heat conductivity and is easy to process is widely used. Therefore, in a mounting frame made of a material that can sufficiently release the heat of X-rays, damage to the zone plate due to heating can be reduced, and an increase in aberration can be avoided.

Since the zone plate itself does not need to have an outer peripheral portion serving as a mounting frame, a support film stretched over a transmission window above the opening and an X-ray opaque ring provided on the support film are provided. A zone plate consisting of a band-shaped transmission window and only the vicinity of the transmission window may be used.

In the case of a miniaturized zone plate having no outer peripheral portion as described above, a large amount of light can be exposed at one time in the manufacturing process, so that it can be mass-produced and supplied as chips. Therefore, as compared with the conventional case where one zone plate is manufactured at one time, a very high yield can be obtained and productivity is improved even if some breakage occurs.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of an embodiment of the present invention.

FIG. 2 is an enlarged sectional view of FIG.

FIG. 3 is a configuration diagram of a conventional zone plate.

[Explanation of symbols]

 1: Zone plate of Si substrate 2: Zone plate opening 3: Zone plate support 4: Zone plate mounting frame 5: Large window for optical microscope 6: Peripheral portion of mounting frame 8: Support thin film 9: X-ray opaque zone 10: Zone plate transmission window 11: Mounting frame support opening

Claims (2)

(57) [Claims] 1. An X extending over a transmission window above an opening of a substrate.
A mounting frame used when mounting a zone plate comprising a radiation transmitting thin film and an X-ray opaque ring provided on the thin film to an optical device, and an outer peripheral portion is a mounting portion to the optical device. A zone plate support portion in the center of the inside, the support portion having an opening corresponding to the transmission portion of the zone plate, and a mounting portion adhered to the vicinity of the opening peripheral end of the lower surface of the zone plate substrate. Zone plate mounting frame. 2. The zone plate mounting frame according to claim 1, further comprising a second opening between said support portion and an outer peripheral portion.