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JP2985641B2 - Magneto-optical recording medium and reproducing method thereof - Google Patents
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JP2985641B2 - Magneto-optical recording medium and reproducing method thereof - Google Patents

Magneto-optical recording medium and reproducing method thereof

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Publication number
JP2985641B2
JP2985641B2 JP6025585A JP2558594A JP2985641B2 JP 2985641 B2 JP2985641 B2 JP 2985641B2 JP 6025585 A JP6025585 A JP 6025585A JP 2558594 A JP2558594 A JP 2558594A JP 2985641 B2 JP2985641 B2 JP 2985641B2
Authority
JP
Japan
Prior art keywords
layer
reproducing
recording
magneto
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP6025585A
Other languages
Japanese (ja)
Other versions
JPH07235089A (en
Inventor
秀高 伊藤
敏史 川野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Chemical Corp
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Filing date
Publication date
Application filed by Mitsubishi Chemical Corp filed Critical Mitsubishi Chemical Corp
Priority to JP6025585A priority Critical patent/JP2985641B2/en
Publication of JPH07235089A publication Critical patent/JPH07235089A/en
Application granted granted Critical
Publication of JP2985641B2 publication Critical patent/JP2985641B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、情報の記録再生を行う
為の光磁気記録媒体に関するものであり、特に再生時に
再生光照射領域の一部分からのみ、再生信号を取り出す
ようにすることによって、高密度に情報の記録再生がで
きる光磁気記録媒体及びその再生方法に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magneto-optical recording medium for recording and reproducing information, and more particularly, to reproducing a reproduction signal from only a part of a reproduction light irradiation area at the time of reproduction. The present invention relates to a magneto-optical recording medium capable of recording and reproducing information at a high density and a reproducing method therefor.

【0002】[0002]

【従来の技術】光磁気記録媒体は、高記録密度、廉価、
書換え可能な情報記録媒体として実用化されている。特
に希土類元素と遷移金属のアモルファス合金の記録層を
用いた媒体は非常に優れた記録再生特性を示す。光磁気
ディスクは非常に大容量の記録媒体であるが、社会の情
報量の増大に伴い、更なる大容量化が望まれている。
2. Description of the Related Art A magneto-optical recording medium has a high recording density, a low cost,
It has been put to practical use as a rewritable information recording medium. In particular, a medium using a recording layer of an amorphous alloy of a rare earth element and a transition metal exhibits extremely excellent recording / reproducing characteristics. Magneto-optical disks are extremely large-capacity recording media, but with the increase in the amount of information in society, further increase in capacity is desired.

【0003】通常の場合、光ディスクの記録密度は、再
生光のスポットの大きさによって決定される。レーザー
光の波長が短いほどスポットの大きさを小さくすること
ができる為、レーザー光の短波長化の検討が進められて
いるが、現段階では非常に困難を伴っている。
In a normal case, the recording density of an optical disc is determined by the size of the spot of the reproduction light. Since the spot size can be reduced as the wavelength of the laser beam becomes shorter, studies have been made on shortening the wavelength of the laser beam, but this is extremely difficult at this stage.

【0004】一方、近年、レーザーの波長によって決定
されるより細かい分解能を様々な工夫によって達成しよ
うとする、いわゆる超解像技術の試みが行われている。
その一つに、光磁気ディスクを用い、多層膜間の交換結
合力を用いた超解像(Magnetically induced Super Res
olution、以下MSRという。)方式が報告されてい
る。
On the other hand, in recent years, so-called super-resolution techniques have been attempted to achieve finer resolution determined by the wavelength of a laser by various means.
One of them is the use of a magneto-optical disk and the super-resolution (Magnetically induced Super Res
olution, hereinafter referred to as MSR. ) The method has been reported.

【0005】この方式の一つの形態は、保磁力の小さな
再生層、キュリー温度の低い切断層、キュリー温度が高
く保磁力が大きい記録層、の互いに交換結合した3層か
らなる媒体を用いる。再生磁界を印加しながら再生光に
より加熱したとき、媒体の高温部で各磁性層間の交換結
合が切断される。
One form of this system uses a medium composed of three layers exchange-coupled to each other: a reproducing layer having a small coercive force, a cutting layer having a low Curie temperature, and a recording layer having a high Curie temperature and a large coercive force. When heated by the reproducing light while applying the reproducing magnetic field, the exchange coupling between the respective magnetic layers is cut at the high temperature portion of the medium.

【0006】再生層は単独での保磁力が小さいので高温
部では磁化が一様に再生磁界の方向を向き、記録ビット
が消去される。この結果、低温部のみが再生され、結果
的に高温部をマスクしたことになり再生範囲が狭くなる
ため、再生光を絞るのと同じ効果が得られ、高密度の記
録ビットの再生を行うことが可能になる。
[0006] Since the coercive force of the reproducing layer alone is small, the magnetization is uniformly oriented in the direction of the reproducing magnetic field in the high temperature portion, and the recorded bits are erased. As a result, only the low-temperature portion is reproduced, and as a result, the high-temperature portion is masked, so that the reproduction range is narrowed. Becomes possible.

【0007】消去された記録ビットは、媒体温度が低く
なり交換結合が回復した時に、記録層から転写されるこ
とにより自動的に復活する。この方式は、信号を再生光
スポットの前方で検出するため、Front Aperture Detec
tion、FADと呼ばれる。FAD方式の欠点として、再
生時にかなり大きな再生磁界(Hr)が必要な点が挙げ
られる。この際の再生磁界は、通常24000A/m以
上が必要であり、強い再生磁界を印加しながら再生する
為に、記録層に記録されたビットが不安定になるという
欠点があった。
The erased recording bit is automatically restored by being transferred from the recording layer when the medium temperature is lowered and exchange coupling is restored. This method detects the signal in front of the reproduction light spot, so Front Aperture Detec
and FAD. A drawback of the FAD method is that a considerably large reproducing magnetic field (Hr) is required during reproduction. At this time, the reproducing magnetic field usually needs to be 24000 A / m or more, and there is a disadvantage that the bits recorded in the recording layer become unstable because reproduction is performed while applying a strong reproducing magnetic field.

【0008】また、記録に必要な磁界より大きな磁界が
再生に必要となる可能性もあり、磁気ヘッドを小型化
し、装置を簡略化しようとする際に大きな障害となる。
特に、磁界変調記録では記録磁界が10000A/m以
下であることが多く、再生磁界の印加が磁気ヘッドには
大きな負担となる。
Further, there is a possibility that a magnetic field larger than the magnetic field required for recording is required for reproduction, which is a major obstacle in reducing the size of the magnetic head and simplifying the apparatus.
In particular, in magnetic field modulation recording, the recording magnetic field is often 10000 A / m or less, and the application of the reproducing magnetic field imposes a heavy burden on the magnetic head.

【0009】[0009]

【発明が解決しようとする課題】本発明の目的は、再生
に必要な磁界の大きさが小さくて済み、且つ高いCN比
(キャリアーとノイズの比、以下CNRという。)が得
られる超解像型の光磁気記録媒体及びその再生方法を提
供することにある。再生磁界の問題点の解決を図るもの
として、本出願人は先に、FAD媒体のマスク部のカー
回転角を低下させることにより、再生磁界を用いずに超
解像効果を得る媒体及び記録再生方法の提案をした(例
えば特願平5−196248号「光磁気記録媒体及び記
録再生方法」)。
SUMMARY OF THE INVENTION An object of the present invention is to provide a super-resolution in which a magnetic field required for reproduction can be small and a high CN ratio (carrier-to-noise ratio, hereinafter CNR) can be obtained. And a reproducing method therefor. In order to solve the problem of the reproducing magnetic field, the present applicant has previously reduced the Kerr rotation angle of the mask portion of the FAD medium, thereby obtaining a medium that achieves a super-resolution effect without using a reproducing magnetic field and a recording and reproducing method. A method was proposed (for example, Japanese Patent Application No. 5-196248, "Magneto-optical recording medium and recording / reproducing method").

【0010】本発明では再生時に磁壁エネルギーを解消
する力によりマスクを形成し、超解像効果を得るもの
で、再生磁界が小さくて済み且つ高いCNRを得る超解
像再生を達成しようとするものである。
In the present invention, a mask is formed by a force for eliminating domain wall energy at the time of reproduction to obtain a super-resolution effect, and an attempt is made to achieve super-resolution reproduction that requires a small reproduction magnetic field and obtains a high CNR. It is.

【0011】本発明の要旨は、基板上に少なくとも再生
層、切断層及び記録層の3層よりなる互いに交換結合し
た磁性層がこの順に設けられており、再生層、切断層、
記録層のキュリー温度を各々Tc1、Tc2、Tc3とし
たときに、Tc1、Tc2、Tc3は室温以上であり、 Tc1>Tc2、Tc3>Tc2 という関係を満たす光磁気記録媒体において、再生層が
Gd、FeおよびCoを主体とする希土類金属と遷移金
属のアモルファス合金より成り、GdFeCo中のGd
のモル分率が27〜35%であり、 外部磁界が1000
0A/m以下の状態で再生光により媒体を部分的に加熱
することにより、予め記録された特定の磁化方向の磁区
のみが低温時に比べ縮小することを特徴とする光磁気記
録媒体に存する。また、本発明の他の要旨は、上記の光
磁気記録媒体を用い、再生時の外部磁界が10000A
/m以下で、再生光の照射により媒体を加熱し、記録さ
れた磁区を縮小させながら再生することを特徴とする光
磁気記録媒体の再生方法に存する。また、本発明のさら
に他の要旨は、上記の光磁気記録媒体を用い、記録の際
は、先ず一定方向に磁界を印加しながら連続光を照射し
て磁化を一方向に揃え、次にそれとは逆方向に磁界を印
加しながら情報に応じたパルス光を照射して、消去とは
逆方向の磁化による磁区を形成することによって記録を
行い、再生の際は、外部磁界が10000A/m以下
で、再生光の照射により媒体を加熱し、記録された磁区
を縮小させながら再生することを特徴とする光磁気記録
媒体の記録再生方法に存する。
The gist of the present invention is that a magnetic layer composed of at least three layers of a reproducing layer, a cutting layer and a recording layer, which are exchange-coupled to each other, is provided on a substrate in this order.
When the Curie temperatures of the recording layers are Tc1, Tc2, and Tc3, respectively, Tc1, Tc2, and Tc3 are equal to or higher than room temperature. In the magneto-optical recording medium that satisfies the relationship of Tc1> Tc2, Tc3> Tc2, the reproducing layer has Gd, Gd in GdFeCo is composed of an amorphous alloy of rare earth metal and transition metal mainly composed of Fe and Co.
The molar fraction of 27-35% der of is, the external magnetic field is 1000
The medium is partially heated by the reproduction light under the condition of 0 A / m or less.
By doing so, the previously recorded magnetic domain of a specific magnetization direction
Only the magneto-optical recording medium is characterized in that it is smaller than at low temperatures . Further, another gist of the present invention is that
Using a magnetic recording medium, the external magnetic field during reproduction is 10,000A
/ M or less, the medium is heated by the irradiation of reproduction light,
Light that is reproduced while reducing the magnetic domains
A method for reproducing a magnetic recording medium. Further, according to the present invention,
Another point is that the above-described magneto-optical recording medium is used for recording.
First, irradiate continuous light while applying a magnetic field in a certain direction.
To align the magnetization in one direction, and then apply a magnetic field in the opposite direction.
Irradiating pulse light according to the information while applying
Recording by forming magnetic domains by reverse magnetization
When reproducing, the external magnetic field is 10,000 A / m or less.
Then, the medium is heated by irradiating the reproducing light, and the recorded magnetic domain is
Magneto-optical recording characterized by reproducing while reducing the size
The present invention resides in a recording and reproducing method for a medium.

【0012】本発明の光磁気記録再生方法を図を用いて
説明する。図1は本発明の光磁気記録再生原理を示すた
めの光磁気記録媒体の断面図であり、図2はその平面図
である。本発明の光磁気記録媒体は、基板上に再生層
1、切断層2及び記録層3の少なくとも3層よりなる互
いに交換結合した磁性層がこの順に設けられている。再
生層1、切断層2、記録層3のキュリー温度を各々Tc
1、Tc2、Tc3としたときに、Tc1、Tc2、Tc3は
室温以上であり、 Tc1>Tc2、Tc3>Tc2 という関係を満たす。
The magneto-optical recording / reproducing method of the present invention will be described with reference to the drawings. FIG. 1 is a sectional view of a magneto-optical recording medium for illustrating the principle of magneto-optical recording and reproduction of the present invention, and FIG. 2 is a plan view thereof. In the magneto-optical recording medium of the present invention, the exchange-coupled magnetic layers including at least three layers of the reproducing layer 1, the cutting layer 2, and the recording layer 3 are provided on the substrate in this order. The Curie temperatures of the reproducing layer 1, the cutting layer 2, and the recording layer 3 are each set to Tc.
When Tc2 and Tc3 are set, Tc1, Tc2, and Tc3 are equal to or higher than room temperature, and satisfy the relations of Tc1> Tc2 and Tc3> Tc2.

【0013】この光磁気記録媒体に記録を行う場合、先
ず一定方向に磁界を印加しながら連続光を照射して磁化
方向を一方向に揃える(消去)。次にそれとは逆方向に
磁界を印加しながら、情報に応じたパルス光を照射し、
消去とは逆方向の磁化による磁区を形成する(記録)。
図1および図2において、低温時において記録ビット4
は記録層3と再生層1においてはほぼ同じ大きさを有し
ている。
When recording is performed on this magneto-optical recording medium, first, a continuous magnetic field is applied while applying a magnetic field in a certain direction to align the magnetization direction in one direction (erase). Next, while applying a magnetic field in the opposite direction, irradiate pulse light according to the information,
A magnetic domain is formed by magnetization in the direction opposite to the erasure (recording).
In FIG. 1 and FIG.
Have substantially the same size in the recording layer 3 and the reproduction layer 1.

【0014】記録を再生すべく弱い磁界Hrを印加しな
がら図に示す再生光6を照射した際、記録層3と再生層
1の間の交換結合力が小さくなるか、或は無くなった
際、この領域8において低温時には交換結合力によって
抑えられていた再生層内の磁壁エネルギーを低下させよ
うとする力によって高温部では磁壁の面積を減少させる
方向に磁区が5の方向に動く。
When the reproducing light 6 shown in the figure is irradiated while applying a weak magnetic field Hr to reproduce the recording, when the exchange coupling force between the recording layer 3 and the reproducing layer 1 becomes small or disappears, In this region 8, the magnetic domain moves in the direction of 5 in the direction of decreasing the domain wall area in the high temperature region by the force for reducing the domain wall energy in the reproducing layer, which was suppressed by the exchange coupling force at the time of low temperature.

【0015】この際、記録方向の磁区は消去方向の磁区
に囲まれている形になっているから、記録方向の磁区の
縮小が必ずエネルギー的に安定化方向になる。従って、
記録方向の磁区の再生時にその高温部分は再生信号に関
与せず、従来強い再生磁界を印加することによって得て
いた「マスク」が極めて弱い再生磁界の印加で得ること
ができる。
At this time, since the magnetic domain in the recording direction is surrounded by the magnetic domain in the erasing direction, the reduction of the magnetic domain in the recording direction always becomes the energy stabilizing direction. Therefore,
When reproducing a magnetic domain in the recording direction, the high temperature portion does not contribute to the reproduction signal, and the "mask" conventionally obtained by applying a strong reproducing magnetic field can be obtained by applying a very weak reproducing magnetic field.

【0016】この場合、磁区が縮小した際の磁壁エネル
ギーの安定化を進める上で、隣接する記録トラック9の
間の中間領域10も消去と同一の方向に予め消去されて
いることが望ましい。ここで、ランド記録の場合は中間
領域はグルーブ部であり、グルーブ記録の場合は中間領
域はランド部となる。
In this case, in order to promote the stabilization of the domain wall energy when the magnetic domain is reduced, it is desirable that the intermediate region 10 between the adjacent recording tracks 9 is also erased in advance in the same direction as the erase. Here, in the case of land recording, the intermediate region is a groove portion, and in the case of groove recording, the intermediate region is a land portion.

【0017】また、長い記録磁区を再生する場合、磁区
の中央付近では縮小によるエネルギーの安定化の効果が
小さくなり「マスク」を形成できない場合がある。しか
しこの場合でも、記録磁区の両端では磁区の縮小が起こ
りマスクが発生する為、隣接する記録磁区との信号の分
離性能は向上し超解像効果が得られる。磁壁を移動させ
る力を大きくするためには、記録磁区の周囲が記録磁区
とは反対の方向に均一に磁化されていることが望まし
い。
When reproducing a long recorded magnetic domain, the effect of stabilizing the energy by the reduction in the vicinity of the center of the magnetic domain is reduced, so that a "mask" may not be formed. However, even in this case, since the magnetic domain is reduced at both ends of the recording magnetic domain and a mask is generated, the signal separating performance from the adjacent recording magnetic domain is improved and the super-resolution effect is obtained. In order to increase the force for moving the domain wall, it is desirable that the periphery of the recording magnetic domain is uniformly magnetized in the direction opposite to the recording magnetic domain.

【0018】何故なら記録磁区以外との間に磁壁が存在
すれば、記録磁区が拡大することが磁壁エネルギーを低
下させることもあり得るからである。周囲が均一であっ
て初めてマスクの磁化方向、大きさが均一なものとな
る。従って、記録トラックを隔てる中間領域(例えばラ
ンド記録の場合ならグルーブ部、グルーブ記録の場合な
らランド部)は消去方向に均一に磁化されていることが
好ましい。
This is because, if a domain wall exists between the recording domain and the area other than the recording domain, the expansion of the recording domain may reduce the domain wall energy. Only when the circumference is uniform, the magnetization direction and size of the mask become uniform. Therefore, it is preferable that an intermediate region (for example, a groove portion in the case of land recording and a land portion in the case of groove recording) separating the recording tracks is uniformly magnetized in the erasing direction.

【0019】このような媒体を得る為には、再生光によ
って高温に加熱された部分で磁壁を解消することによる
エネルギーの減少が、磁化方向が揃うことによる静磁エ
ネルギーの増加よりも大きく、且つ保持力に打ち勝つ程
の力をもっていなければならない。静磁エネルギーを充
分大きくするには、再生層が高い垂直磁気異方性をもつ
ことが必要であり、垂直磁気異方性は、再生時において
8×105erg/cm3以上あることが好ましい。静磁エネル
ギーは1erg/cm2以上あることが好ましい。しかし、静
磁エネルギーが大きすぎると記録層の情報が再生層に転
写し難くなる為、10erg/cm2以下であることが好まし
い。
In order to obtain such a medium, the energy reduction by eliminating the domain wall in the portion heated to a high temperature by the reproduction light is larger than the increase in the magnetostatic energy due to the uniform magnetization direction, and Must have enough power to overcome holding power. In order to sufficiently increase the magnetostatic energy, the reproducing layer needs to have high perpendicular magnetic anisotropy, and the perpendicular magnetic anisotropy is preferably 8 × 10 5 erg / cm 3 or more during reproduction. . The magnetostatic energy is preferably 1 erg / cm 2 or more. However, if the magnetostatic energy is too large, it is difficult to transfer the information in the recording layer to the reproducing layer, so that it is preferably 10 erg / cm2 or less.

【0020】この垂直磁気異方性や静磁エネルギーは成
膜時のガス圧力等の条件によって調節することが可能で
ある。磁区が縮小して、磁化方向が均一化されると静磁
エネルギーの増加が起こる。この増加を極力抑える為に
は、再生層の磁化がTc2近傍で小さくなってその結果
静磁エネルギーが非常に小さくなることが必要である。
The perpendicular magnetic anisotropy and the magnetostatic energy can be adjusted by conditions such as gas pressure during film formation. When the magnetic domain is reduced and the magnetization direction is made uniform, the magnetostatic energy increases. In order to suppress this increase as much as possible, it is necessary that the magnetization of the reproducing layer becomes small in the vicinity of Tc2, so that the magnetostatic energy becomes very small.

【0021】この為、再生層は室温で希土類金属の磁化
が優勢であり、昇温によって磁化が減少する組成が好ま
しい。Tc2における再生層の好ましい体積磁化率は2
00emu/cm2以下、更に好ましくは150emu/cm2以下で
ある。こういった再生層に用いられる物質としては、G
dFeCoを主体とし、必要に応じてTi、Cr、M
o、Tb等の元素を合計5mol%以下添加した希土類
金属と遷移金属のアモルファス合金が用いられる。
For this reason, it is preferable that the reproducing layer has a composition in which the magnetization of the rare earth metal is predominant at room temperature, and the magnetization decreases as the temperature rises. The preferred volume susceptibility of the reproducing layer at Tc2 is 2
It is at most 00 emu / cm 2, more preferably at most 150 emu / cm 2 . As a substance used for such a reproducing layer, G
dFeCo as the main component, and Ti, Cr, M
An amorphous alloy of a rare earth metal and a transition metal to which elements such as o and Tb are added in a total amount of 5 mol% or less is used.

【0022】組成としては、GdFeCo中のGdのモ
ル濃度が27%以上である。しかしGdのモル濃度が大
きすぎるとCNRが著しく低下するので、35%以下で
ある。好ましくは28%以上34%以下である。キュリ
ー温度としては、250℃以上であることが好ましい。
再生層の垂直磁気異方性を大きくするには、磁性層にあ
る程度の膜応力をもたせて逆磁歪効果による異方性を発
生させるのが好ましい。
As for the composition, the molar concentration of Gd in GdFeCo is 27% or more. However, if the molar concentration of Gd is too large, the CNR is remarkably reduced. Preferably it is 28% or more and 34% or less. The Curie temperature is preferably 250 ° C. or higher.
In order to increase the perpendicular magnetic anisotropy of the reproducing layer, it is preferable to give the magnetic layer some film stress to generate the anisotropy by the inverse magnetostriction effect.

【0023】膜応力は大きすぎると膜の耐久性に悪影響
を与えるため1×109 dyne/cm2以上5×109 dyne/c
m2以下であることが好ましい。再生層の膜厚は、薄い方
が磁化が受ける力が大きいので好ましい。しかし、薄る
ぎる場合、再生信号が小さくなるので8nm以上、50
nm以下が好ましい。更に好ましくは、12nm以上、
35nm以下である。
If the film stress is too large, the durability of the film is adversely affected, so that it is 1 × 10 9 dyne / cm 2 or more and 5 × 10 9 dyne / c.
It is preferably at most m 2 . It is preferable that the thickness of the reproducing layer is thin because the force applied to the magnetization is large. However, if it is too thin, the reproduction signal becomes small, so
nm or less is preferable. More preferably, 12 nm or more,
It is 35 nm or less.

【0024】切断層は、キュリー温度が再生層や記録層
のそれと比べて低いものである必要がある。切断層のキ
ュリー温度は、100〜180℃程度が好ましい。再生
層は垂直磁気異方性が高く、再生層の磁化に強い力を発
生させるものが好ましい。
The cut layer must have a Curie temperature lower than those of the reproducing layer and the recording layer. The Curie temperature of the cutting layer is preferably about 100 to 180 ° C. The reproducing layer preferably has a high perpendicular magnetic anisotropy and generates a strong force in the magnetization of the reproducing layer.

【0025】用いられる物質としては、TbFe、Tb
FeCo、DyFeCo、DyFe、TbDyFeCo
等の希土類と遷移金属の合金が好ましい。膜厚は2nm
以上、30nm以下であることが好ましい。記録層は、
安定して記録を蓄えている層であるから、再生ビームで
劣化しないキュリー温度を有していることが必要であ
る。
The substances used include TbFe, Tb
FeCo, DyFeCo, DyFe, TbDyFeCo
And alloys of rare earths and transition metals. The film thickness is 2 nm
As described above, the thickness is preferably 30 nm or less. The recording layer is
Since it is a layer that stably stores data, it is necessary that the layer has a Curie temperature that does not deteriorate with a reproduction beam.

【0026】キュリー温度は、200〜280℃程度が
好ましい。キュリー温度が高すぎると、記録に要するレ
ーザーのパワーが強くなりすぎてしまう。記録層は、再
生層の磁化に強い力を与えるために、高い垂直磁気異方
性を持つことが必要である。記録層の物質としては、T
bFeCo、TbCo、DyFeCo、TbDyFeC
o、GdTbFe、GdTbFeCo等の希土類と遷移
金属の合金が好ましく用いられる。
The Curie temperature is preferably about 200 to 280 ° C. If the Curie temperature is too high, the laser power required for recording will be too strong. The recording layer needs to have high perpendicular magnetic anisotropy in order to give a strong force to the magnetization of the reproducing layer. The material of the recording layer is T
bFeCo, TbCo, DyFeCo, TbDyFeC
An alloy of a rare earth and a transition metal such as o, GdTbFe, GdTbFeCo is preferably used.

【0027】特に好ましく用いられるのはTbFeCo
である。記録層の膜厚は10nm以上、50nm以下で
あることが好ましい。以上の磁性層は、希土類金属と遷
移金属の合金を用いた場合、非常に酸化し易いため、磁
性層の両側に保護膜を設けた形態をとることが好まし
い。保護膜としては、酸化Si、酸化Al、酸化Ta、
酸化Ti、窒化Si、窒化Al、炭化Siなどの単体或
はそれらの混合物が好ましく用いられる。
TbFeCo is particularly preferably used.
It is. The thickness of the recording layer is preferably 10 nm or more and 50 nm or less. When an alloy of a rare earth metal and a transition metal is used, the magnetic layer is very easily oxidized. Therefore, it is preferable to adopt a form in which protective films are provided on both sides of the magnetic layer. As the protective film, Si oxide, Al oxide, Ta oxide,
A simple substance such as Ti oxide, Si nitride, Al nitride, Si carbide or a mixture thereof is preferably used.

【0028】保護膜の膜厚は50nm〜150nm程度
が好ましい。基板側の保護膜を作製後、表面をプラズマ
エッチングすることで磁性層の磁気異方性を向上させる
ことができる。磁性層の記録層側に直接或は保護層を介
して、放熱層としてAl、Cu、Au、Ag等の単体、
或はそれを主体とした合金よりなる高熱伝導物質を設け
ることは、再生時のマスクを安定させるうえで望ましい
構成である。
The thickness of the protective film is preferably about 50 to 150 nm. After forming the protective film on the substrate side, the magnetic anisotropy of the magnetic layer can be improved by plasma etching the surface. A heat radiation layer directly on the recording layer side of the magnetic layer or via a protective layer, such as Al, Cu, Au, Ag or the like;
Providing a high thermal conductive material made of an alloy mainly composed of such a material is a desirable configuration for stabilizing the mask during reproduction.

【0029】放熱層の膜厚は10nm〜100nm程度
が好ましい。
The thickness of the heat radiation layer is preferably about 10 nm to 100 nm.

【0030】[0030]

【実施例】以下に実施例を以て本発明を更に詳細に説明
するが、本発明はその要旨を越えない限り以下の実施例
に限定されるものではない。 実施例1 基板として1.2mmの厚さで、1.6μmの案内溝を
有する光透過性ポリカーボネート樹脂製基板を用いた。
EXAMPLES The present invention will be described in more detail with reference to the following Examples, which, however, are not intended to limit the scope of the invention. Example 1 A light-transmitting polycarbonate resin substrate having a thickness of 1.2 mm and a guide groove of 1.6 μm was used as a substrate.

【0031】これをスパッタリング装置内で5×10-5
Pa以下の真空度になるまで排気を行った。その後この
基板上に誘電体層として、酸化タンタル薄膜を反応性ス
パッタリング法により形成した。次に、その表面を高周
波プラズマで100Wの出力で5分間エッチングし、表
面を平滑化した。
This is placed in a sputtering apparatus at 5 × 10 -5.
Evacuation was performed until the degree of vacuum became Pa or less. Thereafter, a tantalum oxide thin film was formed as a dielectric layer on the substrate by a reactive sputtering method. Next, the surface was etched with high-frequency plasma at an output of 100 W for 5 minutes to smooth the surface.

【0032】エッチング後の酸化タンタル層の厚みが約
85nmとなるように初期の膜厚を設定した。次にこの
酸化タンタル層の上にGd28(Fe80Co2072(原子
%、3d遷移金属中のCo濃度は20原子%)なる組成
のアモルファスより成り厚さ35nmの再生層3、Tb
20Fe80より成り厚さ10nmの切断層4、Tb21(F
80Co2079より成り厚さ38nmの記録層5、更に
SiNより成り厚さ78nmの誘電体層を順次スパッタ
リングにより被着形成した。
The initial film thickness was set so that the thickness of the tantalum oxide layer after etching was about 85 nm. Next, on the tantalum oxide layer, a reproducing layer 3 made of amorphous having a composition of Gd 28 (Fe 80 Co 20 ) 72 (atomic%, Co concentration in the 3d transition metal is 20 atomic%) and having a thickness of 35 nm, Tb
20 Fe 80 than become cut layer having a thickness of 10nm 4, Tb 21 (F
A recording layer 5 made of e 80 Co 20 ) 79 and having a thickness of 38 nm, and a dielectric layer made of SiN and having a thickness of 78 nm were sequentially formed by sputtering.

【0033】また磁性層をそれぞれGd28(Fe80Co
2072のみ、Tb20Fe80のみ、Tb21(Fe80
2079のみにしたこと以外は上と同様の方法で作製し
たサンプルについて、X線回折を行ったところ、結晶性
を示すピークは観測されなかった。また、それらのサン
プルについて、温度を上昇させながら磁気カールループ
の測定を行い、キュリー点を測定したところ、それぞれ
220℃以上(再生層)、約120℃(切断層)、22
0℃以上(記録層)であることが判った。
Each of the magnetic layers is made of Gd 28 (Fe 80 Co).
20 ) 72 only, Tb 20 Fe 80 only, Tb 21 (Fe 80 C
o 20 ) X-ray diffraction was performed on a sample prepared in the same manner as above except that only 79 was used, and no peak indicating crystallinity was observed. The magnetic curl loop was measured for these samples while increasing the temperature, and the Curie points were measured. The Curie points were 220 ° C. or higher (reproducing layer), about 120 ° C. (cutting layer), and 22 ° C., respectively.
It was found that the temperature was 0 ° C. or higher (recording layer).

【0034】このような構成を有する媒体に対して、波
長830nm、開口数0.55の評価機を用いて、先ず
カットオフ空間周波数以上の周波数成分を持つ高密度記
録を行った。記録パワーは9mW、線速は7m/s、周
波数は7MHzであった。この記録動作後に、再生パワ
ー2.4mWで、外部磁界の強度を変化させながら再生
し、CNRを測定した。その結果45dBのCNRを得
るのに必要な最低Hrは1.6kA/mであり、最高到
達CNRは49.2dBであった。
First, high-density recording having a frequency component equal to or higher than the cut-off spatial frequency was performed on a medium having such a configuration using an evaluator having a wavelength of 830 nm and a numerical aperture of 0.55. The recording power was 9 mW, the linear velocity was 7 m / s, and the frequency was 7 MHz. After this recording operation, reproduction was performed at a reproduction power of 2.4 mW while changing the intensity of the external magnetic field, and the CNR was measured. As a result, the minimum required Hr to obtain a CNR of 45 dB was 1.6 kA / m, and the maximum reached CNR was 49.2 dB.

【0035】実施例2 再生層がGd30(Fe80Co2070の膜厚35nmのア
モルファス合金とした以外は実施例1と同様の方法で作
製した。再生層のキュリー温度は220℃以上であっ
た。これを実施例1と同様の磁気特性評価を行ったとこ
ろ、再生磁界0でも45dB以上が得られ、最高到達C
NRは47.6dBであった。
Example 2 A film was prepared in the same manner as in Example 1 except that the reproducing layer was an amorphous alloy of Gd 30 (Fe 80 Co 20 ) 70 having a thickness of 35 nm. The Curie temperature of the reproducing layer was 220 ° C. or higher. When this was evaluated for magnetic properties in the same manner as in Example 1, 45 dB or more was obtained even at a reproduction magnetic field of 0,
The NR was 47.6 dB.

【0036】実施例3 再生層がGd33(Fe80Co2067の膜厚35nmのア
モルファス合金とした以外は実施例1と同様の方法で作
製した。再生層のキュリー温度は220℃以上であっ
た。これを実施例1と同様の磁気特性評価を行ったとこ
ろ、再生磁界0でも45dB以上が得られ、最高到達C
NRは48.5dBであった。
Example 3 A film was produced in the same manner as in Example 1 except that the reproducing layer was made of Gd 33 (Fe 80 Co 20 ) 67 , an amorphous alloy having a thickness of 35 nm. The Curie temperature of the reproducing layer was 220 ° C. or higher. When this was evaluated for magnetic properties in the same manner as in Example 1, 45 dB or more was obtained even at a reproduction magnetic field of 0,
The NR was 48.5 dB.

【0037】比較例1 再生層がGd24(Fe80Co2076の膜厚35nmのア
モルファス合金とした以外は実施例1と同様の方法で作
製した。再生層のキュリー温度は220℃以上であっ
た。これを実施例1と同様の磁気特性評価を行ったとこ
ろ、45dBのCNRを得るのに必要な最低Hrは3
7.0kA/mであり、最高到達CNRは50.2dB
であった。
COMPARATIVE EXAMPLE 1 The same procedure as in Example 1 was carried out except that the reproducing layer was an amorphous alloy of Gd 24 (Fe 80 Co 20 ) 76 having a thickness of 35 nm. The Curie temperature of the reproducing layer was 220 ° C. or higher. When the magnetic properties were evaluated in the same manner as in Example 1, the minimum Hr required to obtain a CNR of 45 dB was 3
7.0 kA / m, and the highest attainable CNR is 50.2 dB
Met.

【0038】比較例2 再生層がGd26(Fe80Co2074の膜厚35nmのア
モルファス合金とした以外は実施例1と同様の方法で作
製した。再生層のキュリー温度は220℃以上であっ
た。これを実施例1と同様の磁気特性評価を行ったとこ
ろ、45dBのCNRを得るのに必要な最低Hrは3
1.3kA/mであり、最高到達CNRは50.3dB
であった。
Comparative Example 2 The same procedure as in Example 1 was carried out except that the reproducing layer was an amorphous alloy of Gd 26 (Fe 80 Co 20 ) 74 having a thickness of 35 nm. The Curie temperature of the reproducing layer was 220 ° C. or higher. When the magnetic properties were evaluated in the same manner as in Example 1, the minimum Hr required to obtain a CNR of 45 dB was 3
1.3 kA / m, the highest CNR reached is 50.3 dB
Met.

【0039】比較例3 再生層がGd36(Fe80Co2064の膜厚35nmのア
モルファス合金とした以外は実施例1と同様の方法で作
製した。
Comparative Example 3 The same procedure as in Example 1 was carried out except that the reproducing layer was an amorphous alloy of Gd 36 (Fe 80 Co 20 ) 64 having a thickness of 35 nm.

【0040】再生層のキュリー温度は220℃以上であ
った。これを実施例1と同様の磁気特性評価を行ったと
ころ、Hrを0〜64kA/mの範囲で変化させてもC
NRは45dBには到達しなかった。また、最高到達C
NRは40.5dBであった。これらの評価結果を図3
に示す。実線は45dBのCNRを得るのに必要な最低
磁界強度(kA/m)を、破線は最高到達CNR(d
B)を示す。図3より明らかなように、再生磁界が微弱
な状態でも、所定のGd組成の実施例では超解像効果に
より高いCNRを得ることができた。
The Curie temperature of the reproducing layer was 220 ° C. or higher. The magnetic properties were evaluated in the same manner as in Example 1. As a result, even when Hr was changed in the range of 0 to 64 kA / m, C
The NR did not reach 45 dB. In addition, the highest attainment C
The NR was 40.5 dB. Figure 3 shows the results of these evaluations.
Shown in The solid line indicates the minimum magnetic field strength (kA / m) required to obtain a CNR of 45 dB, and the broken line indicates the highest attained CNR (d
B) is shown. As is clear from FIG. 3, even in the state where the reproducing magnetic field is weak, a high CNR can be obtained by the super-resolution effect in the example having the predetermined Gd composition.

【0041】[0041]

【発明の効果】本発明の光磁気記録媒体及びその記録再
生方法によれば、再生磁界が微弱な状態でも超解像の効
果が得られ、従来の超解像媒体と比べ記録ビットの長期
安定性やドライブの小型化に優れた効果を得ることがで
きる。
According to the magneto-optical recording medium and the recording / reproducing method of the present invention, the effect of super-resolution can be obtained even when the reproducing magnetic field is weak, and the long-term stability of the recording bit can be obtained as compared with the conventional super-resolution medium. It is possible to obtain excellent effects in terms of performance and miniaturization of the drive.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明の光磁気再生方式を示す断面図。FIG. 1 is a sectional view showing a magneto-optical reproducing method according to the present invention.

【図2】 本発明の光磁気再生方式を示す平面図。FIG. 2 is a plan view showing a magneto-optical reproducing method according to the present invention.

【図3】 本発明の実施例及び比較例における、45d
BのCNRを得るのに必要な最低Hr及び最高到達CN
Rの、再生層中のGd比依存性。
FIG. 3 shows 45d in Examples and Comparative Examples of the present invention.
Minimum Hr and maximum reached CN required to obtain CNR of B
The dependence of R on the Gd ratio in the reproducing layer.

【符号の説明】[Explanation of symbols]

1 再生層 2 切断層 3 記録層 4 記録磁区 5 磁壁の移動方向 6 再生光 7 再生光の移動方向 8 高温部 9 記録トラック 10 中間領域 REFERENCE SIGNS LIST 1 reproducing layer 2 cutting layer 3 recording layer 4 recording magnetic domain 5 moving direction of domain wall 6 reproducing light 7 moving direction of reproducing light 8 high temperature section 9 recording track 10 intermediate area

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6,DB名) G11B 11/10 506 G11B 11/10 586 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 6 , DB name) G11B 11/10 506 G11B 11/10 586

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 基板上に少なくとも再生層、切断層及び
記録層の3層よりなる互いに交換結合した磁性層がこの
順に設けられており、再生層、切断層、記録層のキュリ
ー温度を各々Tc1、Tc2、Tc3としたときに、Tc
1、Tc2、Tc3は室温以上であり、 Tc1>Tc2、Tc3>Tc2 という関係を満たす光磁気記録媒体において、 再生層がGd、FeおよびCoを主体とする希土類金属
と遷移金属のアモルファス合金より成り、GdFeCo
中のGdのモル分率が27〜35%であり、 外部磁界が10000A/m以下の状態で再生光により
媒体を部分的に加熱することにより、予め記録された特
定の磁化方向の磁区のみが低温時に比べ縮小する ことを
特徴とする光磁気記録媒体。
A magnetic layer exchange-coupled with at least three layers of a reproducing layer, a cutting layer and a recording layer is provided in this order on a substrate, and the Curie temperatures of the reproducing layer, the cutting layer and the recording layer are each set to Tc1. , Tc2, and Tc3, Tc
1, Tc2 and Tc3 are higher than room temperature, and in a magneto-optical recording medium satisfying the relationship of Tc1> Tc2, Tc3> Tc2, the reproducing layer is made of an amorphous alloy of a rare earth metal and a transition metal mainly composed of Gd, Fe and Co. , GdFeCo
Ri mole fraction from 27 to 35% der of Gd in the external magnetic field by the reproducing light under the following conditions 10000 A / m
By partially heating the medium, the pre-recorded features
A magneto-optical recording medium characterized in that only magnetic domains having a fixed magnetization direction are reduced as compared with a low temperature .
【請求項2】 請求項1に記載の光磁気記録媒体を用
い、再生時の外部磁界が10000A/m以下で、再生
光の照射により媒体を加熱し、記録された磁区を縮小さ
せながら再生することを特徴とする光磁気記録媒体の再
生方法
2. Use of the magneto-optical recording medium according to claim 1.
When the external magnetic field during reproduction is 10,000 A / m or less,
The medium is heated by light irradiation, and the recorded magnetic domains are reduced.
Reproduction of a magneto-optical recording medium,
Raw method .
【請求項3】 基板上に少なくとも再生層、切断層及び
記録層の3層よりなる互いに交換結合した磁性層がこの
順に設けられており、再生層、切断層、記録層のキュリ
ー温度を各々Tc1、Tc2、Tc3としたときに、Tc
1、Tc2、Tc3は室温以上であり、 Tc1>Tc2、Tc3>Tc2 という関係を満たし、且つ再生層がGd、FeおよびC
oを主体とする希土類金属と遷移金属のアモルファス合
金より成り、GdFeCo中のGdのモル分率が27〜
35%である光磁気記録媒体への記録再生方法であっ
て、 記録の際は、先ず一定方向に磁界を印加しながら連続光
を照射して磁化を一方向に揃え、次にそれとは逆方向に
磁界を印加しながら情報に応じたパルス光を照射して、
消去とは逆方向の磁化による磁区を形成することによっ
て記録を行い、 再生の際は、外部磁界が10000A/m以下で、再生
光の照射により媒体を加熱し、記録された磁区を縮小さ
せながら再生すること を特徴とする光磁気記録媒体の記
録再生方法。
3. At least a reproducing layer, a cutting layer, and a
The magnetic layers exchange-coupled to each other consisting of three recording layers are
Are provided in this order, the curability of the reproducing layer, the cutting layer, and the recording layer
-When the temperatures are Tc1, Tc2 and Tc3, respectively,
1, Tc2 and Tc3 are higher than room temperature , satisfy the relation of Tc1> Tc2, Tc3> Tc2 , and the reproducing layer is composed of Gd, Fe and C
amorphous alloy of rare earth metal and transition metal mainly composed of o
Made of gold, and the molar fraction of Gd in GdFeCo is 27 to
35% recording / reproducing method for a magneto-optical recording medium.
Te, the time of recording, first continuous light while applying a magnetic field in a predetermined direction
To align the magnetization in one direction, and then in the opposite direction.
Irradiating pulse light according to information while applying a magnetic field,
By forming magnetic domains due to magnetization in the opposite direction to erasure,
In the case of reproduction, when the external magnetic field is 10,000 A / m or less,
The medium is heated by light irradiation, and the recorded magnetic domains are reduced.
Recording on a magneto-optical recording medium characterized in that reproduction is performed while
Recording and playback method.
JP6025585A 1994-02-23 1994-02-23 Magneto-optical recording medium and reproducing method thereof Expired - Fee Related JP2985641B2 (en)

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Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6025585A JP2985641B2 (en) 1994-02-23 1994-02-23 Magneto-optical recording medium and reproducing method thereof

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Publication Number Publication Date
JPH07235089A JPH07235089A (en) 1995-09-05
JP2985641B2 true JP2985641B2 (en) 1999-12-06

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JPH07235089A (en) 1995-09-05

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