JP2990294B2 - X-ray image sensor - Google Patents
X-ray image sensorInfo
- Publication number
- JP2990294B2 JP2990294B2 JP22183190A JP22183190A JP2990294B2 JP 2990294 B2 JP2990294 B2 JP 2990294B2 JP 22183190 A JP22183190 A JP 22183190A JP 22183190 A JP22183190 A JP 22183190A JP 2990294 B2 JP2990294 B2 JP 2990294B2
- Authority
- JP
- Japan
- Prior art keywords
- image sensor
- ray image
- fluorescent film
- ray
- imaging device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000835 fiber Substances 0.000 claims description 17
- 238000003384 imaging method Methods 0.000 claims description 8
- 229910017768 LaF 3 Inorganic materials 0.000 claims description 4
- 229910005690 GdF 3 Inorganic materials 0.000 claims description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 6
- 238000004040 coloring Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 229920003002 synthetic resin Polymers 0.000 description 3
- 239000000057 synthetic resin Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- -1 rare earth fluoride Chemical class 0.000 description 2
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- 231100000987 absorbed dose Toxicity 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measurement Of Radiation (AREA)
- Instruments For Viewing The Inside Of Hollow Bodies (AREA)
- Luminescent Compositions (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、産業用，医療用等に使われているＸ線イメ
ージセンサーに関するものである。Description: TECHNICAL FIELD The present invention relates to an X-ray image sensor used for industrial use, medical use, and the like.
本発明は、固体撮像素子上に、ファイバー部材を設
け、そのファイバー部材上に蛍光膜を形成させたＸ線イ
メージセンサーにおいて、蛍光膜の材料として希土類フ
ッ化物にネオジムイオンをドープしたものを用いること
により、ファイバー部材の光学系Ｘ線着色損傷の影響を
防いだものである。The present invention provides an X-ray image sensor in which a fiber member is provided on a solid-state imaging device and a fluorescent film is formed on the fiber member, wherein a material obtained by doping a rare earth fluoride with neodymium ions as a material of the fluorescent film is used. Thereby, the influence of the optical system X-ray coloring damage of the fiber member is prevented.
従来、Ｘ線イメージセンサーは、固体撮像素子上にフ
ァイバー部材をつけ、その上に可視領域で発光する硫化
亜鉛等の蛍光膜を形成したものであった。2. Description of the Related Art Conventionally, an X-ray image sensor has a structure in which a fiber member is attached to a solid-state imaging device, and a fluorescent film such as zinc sulfide that emits light in a visible region is formed thereon.
上記のような蛍光膜では、可視領域で発光するため、
第２図の斜線部に示すようにＸ線着色損傷をおこし、光
学的性質がかなり劣化するという欠点を有しており、こ
の解決に課題があった。In the above fluorescent film, since light is emitted in the visible region,
As shown by the shaded portion in FIG. 2, X-ray coloring damage is caused, and the optical properties are considerably deteriorated.
上記課題点を解決するために、本発明においては、固
体撮像素子とファイバー部材と蛍光膜とからなるＸ線イ
メージセンサーで、蛍光体をLaF3:NdまたはGdF3:Ndとす
ることにより、ファイバー部材のＸ線着色損傷の影響を
防ぐものとした。ここで、固体撮像素子はCCD,フォトダ
イオード等のいかなる固体撮像素子でもよい。また、フ
ァイバー部材として、ファイバープレート、イメージバ
ンドル等がある。In order to solve the above problems, the present invention provides an X-ray image sensor including a solid-state imaging device, a fiber member, and a fluorescent film, wherein the fluorescent material is LaF 3 : Nd or GdF 3 : Nd, The influence of X-ray coloring damage of the member was prevented. Here, the solid-state imaging device may be any solid-state imaging device such as a CCD or a photodiode. The fiber member includes a fiber plate, an image bundle, and the like.
上記のような構成によれば，用いられる蛍光膜が900n
mから1100nmで発光を有するものであるため、蛍光膜を
透過したＸ線によるファイバー部材の着色損傷の影響を
防ぐことができる。According to the above configuration, the fluorescent film used is 900 n
Since it emits light from m to 1100 nm, it is possible to prevent the influence of coloring damage of the fiber member due to X-rays transmitted through the fluorescent film.
以下に本発明の実施例を図面に基づいて説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
〔第１実施例〕 第１実施例は、蛍光体としてLaF3:Ndを用いた例を説
明する。First Embodiment A first embodiment describes an example in which LaF 3 : Nd is used as a phosphor.
第１図に本発明のＸ線イメージセンサーの実施例を示
す断面図である。この図を用いて構成を説明する。構成
は固体撮像素子４の画像入力面上にファイバープレート
２が光学接着剤３を使って密着している。更に前記ファ
イバープレート２上に蛍光膜１を形成した構成であり、
一体化したＸ線イメージセンサーを作成した。FIG. 1 is a sectional view showing an embodiment of the X-ray image sensor of the present invention. The configuration will be described with reference to FIG. The configuration is such that the fiber plate 2 is in close contact with the image input surface of the solid-state imaging device 4 using the optical adhesive 3. Further, a fluorescent film 1 is formed on the fiber plate 2,
An integrated X-ray image sensor was created.
蛍光膜１は、LaF3:Ndと合成樹脂を混合したものを、
ファイバープレート２上に10〜50ミクロンの厚さに均一
に塗布した。The fluorescent film 1 is a mixture of LaF 3 : Nd and a synthetic resin,
The coating was uniformly applied on the fiber plate 2 to a thickness of 10 to 50 microns.
この蛍光膜１を用いたＸ線イメージセンサーにおいて
104R/hで10h、Ｘ線照射後の出力強度は、従来の可視光
領域の蛍光体を用いたＸ線イメージセンサーの出力強度
を100とした場合500であった。In an X-ray image sensor using the fluorescent film 1
The output intensity after X-ray irradiation at 10 4 R / h for 10 hours was 500 when the output intensity of a conventional X-ray image sensor using a phosphor in the visible light region was 100.
〔第２実施例〕 第２実施例は、本発明のＸ線イメージセンサーの他の
実施例を第３図に基づいて説明する。Second Embodiment In a second embodiment, another embodiment of the X-ray image sensor of the present invention will be described with reference to FIG.
構成は、第１実施例とほぼ同様であるが、第１実施例
では、ファイバー部材としてファイバープレート２を用
いたが、第３実施例ではイメージバンドル８を用いた。The configuration is almost the same as that of the first embodiment. In the first embodiment, the fiber plate 2 is used as the fiber member, but in the third embodiment, the image bundle 8 is used.
蛍光膜として、蛍光体GdF3:Ndと合成樹脂を混合しイ
メージバンドル８上に10〜50ミクロンの厚さに塗布した
ものを用いた。The fluorescent film used was a mixture of a phosphor GdF 3 : Nd and a synthetic resin and applied on the image bundle 8 to a thickness of 10 to 50 μm.
この蛍光膜１をもちいたＸ線イメージセンサーにおい
て104R/hで10h、Ｘ線照射後の出力強度は、従来の可視
領域の蛍光体を用いたＸ線イメージセンサーの出力強度
を100とした場合、500であった。In the X-ray image sensor using the fluorescent film 1, the output intensity after irradiation with X-rays at 10 4 R / h was 10 with the output intensity of the conventional X-ray image sensor using a phosphor in the visible region being 100. In that case, it was 500.
実施例では、蛍光膜のファイバー部材上への形成方法
として、合成樹脂を用いて塗布する方法を挙げたが、こ
の他、蒸着法，スパッタ法,CVD法などの薄膜形成法を用
いて形成することも可能である。In the embodiment, as a method for forming the fluorescent film on the fiber member, a method of applying the synthetic film using a synthetic resin is described. It is also possible.
本発明によれば、発光域が900nmから1100nmである蛍
光体を用いることにより、光学系のＸ線着色損傷の影響
がなくなり、従来の可視領域の蛍光体を用いた場合、10
4レントゲンであった吸収線量が108レントゲンと１万倍
寿命が長くなるＸ線イメージセンサーの達成を可能にし
た。According to the present invention, by using a phosphor having an emission range of 900 nm to 1100 nm, the influence of X-ray coloring damage to the optical system is eliminated, and when a conventional phosphor in the visible region is used, 10
4 Roentgen in which was absorbed dose was it possible to achieve X-ray image sensor 10 8 roentgen and 10,000 times life is prolonged.
第１図は、本発明の実施例を示す断面図、第２図は、フ
ァイバーにおける波長と透過率の変化を示す図，第３図
は、本発明のＸ線イメージセンサーの他の実施例を示す
断面図である。 １……蛍光膜 ２……ファイバープレート ３……光学接着剤 ４……固体撮像素子 ５……リードフレーム ６……基板 ７……Ｘ線照射による劣化部 ８……イメージバンドルFIG. 1 is a cross-sectional view showing an embodiment of the present invention, FIG. 2 is a view showing changes in wavelength and transmittance in a fiber, and FIG. 3 is another embodiment of the X-ray image sensor of the present invention. FIG. DESCRIPTION OF SYMBOLS 1 ... Fluorescent film 2 ... Fiber plate 3 ... Optical adhesive 4 ... Solid-state imaging device 5 ... Lead frame 6 ... Substrate 7 ... Degraded part by X-ray irradiation 8 ... Image bundle
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭56−9245（ＪＰ，Ａ) 特開 昭47−27885（ＪＰ，Ａ) 特開 平２−276996（ＪＰ，Ａ) 特開 昭63−311193（ＪＰ，Ａ) 特開 平１−227583（ＪＰ，Ａ) (58)調査した分野(Int.Cl.6，ＤＢ名) G01T 1/20 G03C 5/16 C09K 11/77 G02B 23/26 G02B 6/02 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-56-9245 (JP, A) JP-A-47-27885 (JP, A) JP-A-2-276996 (JP, A) JP-A 63-924 311193 (JP, A) JP-A-1-227583 (JP, A) (58) Fields investigated (Int. Cl. 6 , DB name) G01T 1/20 G03C 5/16 C09K 11/77 G02B 23/26 G02B 6/02
Claims (1)
け、その上にLaF3:Nd,GdF3:Ndのいずれか一種の蛍光膜
を形成させたことを特徴とするＸ線イメージセンサー。1. An X-ray image sensor comprising: a fiber member provided on a solid-state imaging device; and a fluorescent film of one of LaF 3 : Nd and GdF 3 : Nd formed thereon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22183190A JP2990294B2 (en) | 1990-08-23 | 1990-08-23 | X-ray image sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22183190A JP2990294B2 (en) | 1990-08-23 | 1990-08-23 | X-ray image sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04104144A JPH04104144A (en) | 1992-04-06 |
| JP2990294B2 true JP2990294B2 (en) | 1999-12-13 |
Family
ID=16772877
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22183190A Expired - Fee Related JP2990294B2 (en) | 1990-08-23 | 1990-08-23 | X-ray image sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2990294B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102140345B (en) * | 2010-02-03 | 2014-07-09 | 中国科学院福建物质结构研究所 | Rare earth-doped gadolinium fluoride nano luminous material for time-resolved multi-color fluorescence labeling and preparation method thereof |
-
1990
- 1990-08-23 JP JP22183190A patent/JP2990294B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04104144A (en) | 1992-04-06 |
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