JP2995262B2 - Rotating cup type chemical solution treatment device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a process for manufacturing a semiconductor device and a mask, a liquid crystal panel, etc., by forming a thin film on a surface of a wafer, a mask or a liquid crystal panel, or developing or etching the surface. TECHNICAL FIELD The present invention relates to a rotating cup type chemical processing apparatus using centrifugal force.

[0002]

2. Description of the Related Art In a semiconductor manufacturing process, a coating film on which a coating material such as a photosensitive liquid is uniformly applied is formed on a base such as a wafer. A semiconductor product is manufactured by performing a predetermined treatment on such a coating film. Since the thickness of the coating film is extremely thin, usually several microns, and a uniform thickness is required,
A chemical processing apparatus 10 as shown in FIG. 7 that can satisfy the above-mentioned requirements is used.

[0003] As shown in FIG.
Has a configuration including a rotating cup 20, a hood 30 that covers the upper surface of the rotating cup 20, and a casing 40 that rotatably supports the rotating cup 20 around an axis and covers an outer peripheral portion. I have. The base B is adsorbed and arranged on the upper surface of the rotating cup 20, and the coating agent is dropped thereon. Then, the coating is covered with the hood 30 and the rotating cup 20 is rotated at a high speed. Is diffused to form a uniform coating film on the substrate B.

A hood 3 is provided on the outer peripheral edge of the rotating
0, and a base mounting space S formed between the rotating cup 20.
A plurality of discharge holes 201 are provided to communicate the outside and the outside, and an excess coating agent is discharged into a collection passage 401 provided in the casing 40 through the discharge holes 201.

[0005] When the swirl of air is formed on the substrate B by the high-speed rotation of the rotary cup 20, ripples are formed on the surface of the coating film, and the uniformity of the thickness of the coating film is impaired. The upper part of the mounting space S is closed by a hood 30. In order to ensure this sealed state, a dovetail-shaped ring groove 203 is formed in an annular projection 202 provided at the upper part of the peripheral portion of the hood 30, and this ring groove 203 has flexibility such as rubber. An O-ring 204 made of a sealing material is fitted.

Since the upper portion of the O-ring 204 projects slightly outward from the ring groove 203, when the hood 30 is mounted on the rotating cup 20, the lower surface of the hood is placed on the slightly projecting portion of the O-ring 204. The upper part of the base mounting space S is in a closed state.

[0007]

By the way, in the conventional structure for closing the base mounting space S, the O-ring 204 is required.
When the upper surface portion (contact surface) of the hood 30 is fitted in the ring groove 203 in a flush state, the lower surface of the hood 30 is
04 is tightly contacted with the contact surface of the O-ring 204, and the sealing action of the O-ring 204 effectively secures the closing of the upper part of the base mounting space S. However, the ring groove 203 is formed on the upper part to prevent the O-ring 204 from coming off. Since the opening width is narrowed, the O-ring 204 is fitted while being pressed toward the ring groove 203, so that the circumferential density distribution of the O-ring 204 fitted into the ring groove 203 may be non-uniform. As a result, as a result, the contact surface of the O-ring 204 is in a state where irregularities are formed.

Therefore, even if the hood 30 is put on the rotating cup 20, a gap is formed between the lower surface of the hood 30 and the O-ring 204 due to the above-mentioned irregularities, and the upper portion of the base mounting space S is in a good closed state. As a result, a vortex is generated in the substrate mounting space S due to the flow of air leaking from the gap, and a uniform coating film is not formed on the surface of the substrate B.

In order to solve such inconvenience, it is conceivable that the opening of the ring groove 203 is enlarged to have a shape different from that of the dovetail groove. A new problem arises in that 204 adheres and comes off the ring groove 203.

Further, when the hood 30 is mounted on the rotary cup 20 in an eccentric state, when the rotary cup 20 is rotated at a high speed, the peripheral surface of the hood 30 is formed on the outer side of the lower peripheral surface 202. It is said that the base B is contaminated and the yield of coated products is reduced because fine dust is generated and sucked into the base mounting space S in a negative pressure state due to the violent collision. It also has problems.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and it is necessary to securely close the upper portion of the rotating cup in the base mounting space in a sealed state and to remove the O-ring once mounted. It is an object of the present invention to provide a rotating cup type chemical solution treatment apparatus which does not generate dust even when the rotating cup is rotated at high speed.

[0012]

According to a first aspect of the present invention, there is provided a rotary-cup-type chemical processing apparatus, comprising: a rotary cup; and a hood for covering the rotary cup from above with an annular elastic seal member. In the cup-type chemical treatment device, the rotary cup is provided with an annular projection on an upper surface of a peripheral portion, and the annular projection has an annular groove formed on an inner peripheral side surface thereof so that the elastic seal member can be fitted therein. A restriction piece for restricting the elastic seal member from coming off is formed at the upper end of the groove.

According to a second aspect of the present invention, there is provided a rotary cup type chemical processing apparatus according to the first aspect, wherein the hood is partially exposed from the annular groove of the elastic seal member when covering the hood. The inclined surface which comes into contact with the set surface is formed in an annular shape.

According to a third aspect of the present invention, there is provided a rotary cup type chemical processing apparatus according to the first aspect, wherein the hood is partially exposed from the annular groove of the elastic seal member when covering the hood. A step surface formed of a vertical wall and a horizontal wall in contact with the set surface is formed in an annular shape.

According to a fourth aspect of the present invention, there is provided a rotating cup type chemical processing apparatus according to any one of the first to third aspects, wherein a part of a lower portion of the annular groove has the lower part. The present invention is characterized in that the peripheral edge of the annular projection is formed so as to be shallow.

According to a fifth aspect of the present invention, there is provided a rotating cup type chemical processing apparatus according to the first or second aspect, wherein the inclined surface is flat.

According to a sixth aspect of the present invention, there is provided a rotating cup type chemical processing apparatus according to the first or second aspect, wherein the inclined surface has a curvature at least equal to or less than the curvature of the elastic seal member. Characterized by having a concave curved surface.

According to a seventh aspect of the present invention, there is provided a rotating cup type chemical processing apparatus according to any one of the first to sixth aspects, wherein the rotating cup is concentric with the annular projection. In addition, an annular dustproof projection is formed on the inner peripheral side of the annular projection, and the hood is provided with an annular dustproof groove that fits into the projection when covered.

According to an eighth aspect of the present invention, there is provided a rotating cup type chemical processing apparatus according to any one of the first to seventh aspects, wherein the annular projection has the annular groove, the outer peripheral side surface and the outer peripheral side surface. And one or more holes penetrating therethrough are provided.

[0020]

According to the present invention, the annular projection has an annular groove formed on the inner peripheral surface thereof so that the elastic seal member can be fitted therein, and an upper end of the annular groove. Since the restricting piece for restricting the elastic seal member from coming off is formed, the elastic seal member once fitted by the retaining action of the overhang-shaped restricting piece formed in the fitting groove has the fitting groove. When the hood is raised, the elastic member adheres to the back surface of the hood and accompanies the hood, so that the seal member does not come off the annular groove.

Further, since the annular groove does not need to be a dovetail groove as in the prior art due to the presence of the restricting piece, the seal member is forcibly pressed and deformed when the seal member is mounted in the annular groove. Due to the resulting non-uniform density distribution, the exposed surface of the seal member cannot be made flush, and thus the problem that the sealability is impaired can be reliably avoided.

According to the second aspect of the present invention, the hood has an annular inclined surface which comes into contact with the surface of the elastic seal member which is partially exposed from the annular groove when the hood is covered. Therefore, the inclined surface of the hood pressing the seal member receives a repulsive force directed obliquely upward from the seal member. The rubbing contact between a part of the hood and a part of the rotating cup caused by eccentricity is effectively avoided, and the generation of fine dust due to the rubbing contact is prevented.

According to the third aspect of the present invention, there is provided a rotary cup type chemical treatment apparatus, wherein the hood has a step formed by a vertical wall and a horizontal wall which abuts on a surface of the elastic seal member partially exposed from the annular groove when the hood is covered. Since the surface is formed in an annular shape, stable sealing can be performed with the vertical wall and the horizontal wall of the step surface sandwiching the exposed surface of the seal member. In particular, since the vertical surface receives a repulsive force from the seal member toward the rotation center, the hood is always pushed back to the rotation center of the rotating cup by this repulsive force, and a part of the hood and a part of the rotating cup caused by eccentricity are formed. Is effectively avoided, and the generation of fine dust due to the rubbing contact is prevented.

According to the rotary cup type chemical processing apparatus of the fourth aspect, the annular groove is formed so that a part of its lower part is formed by making the peripheral edge of the annular projection shallow. The fitted elastic seal member enters into a portion which is shallowly formed in the peripheral edge of the annular projection, and the fitted state of the elastic seal member into the annular groove is stabilized.

According to the rotary cup type chemical processing apparatus of the fifth aspect, since the inclined surface formed on the hood is a flat surface, it is possible to form the inclined surface with a minimum work effort.

According to the rotary cup type chemical processing apparatus of the sixth aspect, the inclined surface formed on the hood is a concave curved surface having a curvature equal to or less than the curvature of the elastic sealing member. The contact area with the seal member increases, and the effect of sealing the rotating cup by mounting the hood is further improved.

According to the rotary cup type chemical processing apparatus of the seventh aspect, the rotary cup has an annular dustproof projection formed concentrically with the annular projection and on the inner peripheral side thereof. Since the annular dust-proof groove fitted to the dust-proof protrusion is provided, even if dust is generated by the two dust-proof protrusions being fitted into the dust-proof groove, entry into the rotating cup is effectively prevented.

According to the rotating cup type chemical processing apparatus of the eighth aspect, since one or a plurality of holes penetrating the annular projection are provided, the sealing member once attached to the annular groove is removed. By inserting a metal fitting into this hole from the outer peripheral side and pressing it, the seal member can be easily taken out from the fitting groove.

[0029]

FIG. 1 is a partially cutaway perspective view showing an example of a rotating cup type chemical processing apparatus according to the present invention, and FIG. 2 is a sectional view taken along line AA of FIG. As shown in these figures, the chemical liquid treatment apparatus 1 performs a disk-shaped rotating cup 2, a hood 3 that covers the upper surface of the rotating cup 2, a casing 4 in which the rotating cup 2 is fitted, and a detachable hood 3. It comprises a hood attaching / detaching mechanism 5, a cup rotating mechanism 6 for rotating the rotating cup 2, and an elevating mechanism 7 for moving the rotating cup 2 up and down.

The rotating cup 2 is composed of a medium-diameter shaft portion 21 and an annular dish portion 22. The upper surface of the annular dish portion 22 is dimensioned so as to be flush with or slightly lower than the upper surface of the medium-diameter shaft portion 21, and a base for forming a coating film on the flush surface. B is placed so as to coincide with the central axis of the middle diameter shaft portion 21. An annular weir 22a protruding upward is provided on an outer peripheral edge of the annular dish 22, and the hood 3 is received by the annular weir 22a. The base mounting space S is formed in a portion surrounded by the annular weir 22a with the hood 3 mounted.

A plurality of small-diameter discharge holes 201 are formed at predetermined intervals in the lower peripheral surface of the annular weir 22a and are inclined obliquely downward from the base mounting space S outward. Excess coating agent in the substrate mounting space S is discharged to the outside through the hole 201.

A concentric rotary shaft 23 is corotatably connected to the lower portion of the middle diameter shaft portion 21. An intake passage 23a penetrating the medium-diameter shaft portion 21 and the rotating shaft 23 is formed in the axial center portion thereof, and a tube 23b connected to a lower end portion of the rotating shaft 23 by operating a vacuum pump (not shown). The base B is sucked into the medium-diameter shaft portion 21 via the.

The rotating cup 2 is fixed to the large-diameter shaft portion 24 with the small-diameter portion of the medium-diameter shaft portion 21 fitted into the cylindrical hole of the cylindrical large-diameter shaft portion 24. A flange portion is formed on the upper portion of the large-diameter shaft portion 24, and the annular dish portion 22 of the rotating cup 2 is fixed to the flange portion.

The lower portion of the large-diameter shaft portion 24 is fitted into a mounting hole P1 formed in the support base P, and a flange 25 is formed on the outer peripheral surface.
The support cylinder 25 is fitted through a bearing 26 to the support cylinder 25 having a. Therefore, the rotating cup 2 is rotatable around the axis of the rotating shaft 23 with respect to the support gantry P.

The hood 3 includes a hood main body 31, a cylindrical grip 32 having a central portion of the hood main body projecting upward, and a bulging edge 33 having an outer peripheral edge of the hood main body 31 bulging upward. It is composed of This bulging edge 33
Is provided corresponding to the annular weir 22a, and the rotating cup 2 is closed by the bottom surface of the bulging edge 33 abutting on the upper surface of the annular weir 22a. On the top of the gripping portion 32, a body 3 below the hood mounting / removing mechanism 5 is provided so as to enable the attaching / detaching operation by the hood attaching / detaching mechanism 5 described later.
A flange 32b having a diameter larger than 2a is formed.

The casing 4 has an annular body, and is supported and fixed to a flange 25 a with the large-diameter shaft portion 24 fitted therein. The upper portion of the casing 4 surrounds the rotary cup 2.

An annular collection passage 4 is provided inside the casing 4.
In the upper part of the recovery passage 401, an annular discharge band hole 41 is provided, and the opening of the discharge band hole 41 faces the discharge hole 201 formed in the annular weir 22a. It is provided. Therefore, unnecessary materials discharged from the base mounting space S of the rotating cup 2 are discharged from the discharging holes 41.
Through the collection passage 401. Collection passage 40
A vertical hole 42 is provided downward in a part of the circumferential direction of 1, and unnecessary matter accumulated in the recovery passage 401 is discharged to the outside from the vertical hole 42.

A hood attaching / detaching mechanism 5 is mounted on the chemical solution processing apparatus 1 in order to attach / detach the hood 3 to / from the rotating cup 2.
Is provided. The hood attaching / detaching mechanism 5 is surrounded by a casing 4 and has a lid 51 for closing the hood 3, an L-shaped arm 52 having a horizontal arm fixed to the lid 51,
It comprises a cylinder 53 for moving the character arm 52 up and down. The cylinder 53 is placed vertically, and the upper end of a cylinder rod 54 protrudingly protruding and retracting from the top is L
The arm 52 is fixed to the vertical arm.

At the center of the lid 51, the grip 32
A fitting hole 51a having a larger diameter than the outer diameter of the body 32a and a smaller diameter than the flange 32b is provided, and a cover bowl 51a for accommodating the flange 32b therein is provided at the center of the lid 51. ing. When the lid 51 is pulled up by the cylinder 53, the edge of the fitting hole 51a is engaged with the flange 32b, and the hood 3 is also pulled up.

In order to rotate the rotary cup 2 about the axis of the rotary shaft 23, a cup rotating mechanism 6 is provided below the support base P. This cup rotating mechanism 6
Is a drive motor 61, a drive pulley 62 provided so as to rotate around the drive shaft of the drive motor 61, the large-diameter shaft portion 2.
4 and a driven pulley 63 provided so as to rotate with the ball spline 63a, and a belt 64 stretched between the driving pulley 62 and the driven pulley 63.

A spline is formed on the outer peripheral surface of the rotary shaft 23, and a ball spline 63a meshing with the spline is fitted and fixed to a lower portion of the cylindrical hole of the large-diameter shaft portion 24. The driven pulley 63 is fixed so as to rotate together with the large-diameter shaft portion 24 and the ball spline 63a. Accordingly, the rotational force of the drive motor 61 is transmitted to the large-diameter shaft portion 24 and the ball spline 63a via the drive pulley 62, the belt 64 and the driven pulley 63, and transmitted to the rotary shaft 23 via the ball spline 63a. The rotating cup 2 including the medium-diameter shaft portion 21 and the annular dish portion 22 rotates.

The lifting mechanism 7 is provided below the rotating shaft 23. The elevating mechanism 7 includes a second cylinder 71 provided vertically near the lower end of the rotary shaft 23, an elevating block 73 coupled to an upper end of a cylinder rod 72 of the second cylinder 71, and the elevating block 73.
And a guide rail 74 extending in the up-down direction for guiding the up-and-down movement.

The lifting block 73 includes a bearing 73.
The rotation shaft 23 is connected to the lower portion of the rotation shaft 23 through a, and the rotation shaft 23 is moved up and down by operating the second cylinder 71 to move the cylinder rod 72 up and down. When the rotating shaft 23 is raised by the operation of the second cylinder 71, the coupling state between the medium-diameter shaft portion 21 and the large-diameter shaft portion 24 provided on the top of the rotating cup 2 is released,
Only the middle diameter shaft portion 21 moves upward with respect to the annular plate portion 22, so that the mounting and picking-up operation of the base B can be easily performed.

Since the rotating cup type chemical treatment apparatus of the present invention is configured as described above, in order to form a coating film on the surface of the base B, first, as shown by a two-dot chain line in FIG. By operating 53, the lid 51 is raised via the cylinder rod 54, the L-shaped arm 52, and the connecting portion 51b. Then, the prone bowl portion 51a is connected to the flange portion 3 of the grip portion 32.
The hood 3 is lifted upward with the pinch 2b picked up, and the base mounting space S of the rotating cup 2 is exposed to the outside.

In this state, if the second cylinder 71 is further operated to raise the elevating block 73, the intermediate diameter shaft portion 21 is raised via the rotating shaft 23 by this raising, and the upper surface portion is placed on the base mounting space. It will be in the state protruding outside from S.
In this state, the base B is accurately placed on the upper surface of the medium diameter shaft portion 21 by a robot arm or the like or a manual operation (not shown), and a predetermined amount of the coating agent is dropped on the surface of the base B. Alternatively, or immediately after the mounting, vacuum suction is performed via the intake passage 23a. Thereafter, the second cylinder 71 is operated in the reverse manner to lower the middle diameter shaft portion 21 to bring the intermediate plate portion 22 into a flush state with the annular dish portion 22 again.

Then, the cylinder 53 is operated in the reverse direction to lower the hood 3 to close the base mounting space S.
The suction of the base B may be performed after the hood 3 is closed, that is, before the rotation of the rotary cup 2 starts.

If the drive motor 61 of the cup rotation mechanism 6 is driven in this state, the rotation is driven by the drive pulley 62,
The power is transmitted to the large-diameter shaft portion 24 and the ball spline 63a via the belt 64 and the driven pulley 63, and is transmitted to the rotary shaft 23 via the above-mentioned and the ball spline 63a, so that the rotary cup 2 rotates at a predetermined speed. The coating agent dropped on the base B by the centrifugal force generated by the rotation of the rotating cup 2 diffuses in the radial direction thinly, and a coating film is formed on the surface of the base B. Excess coating agent shaken off from the base B is discharged from a discharge hole 201 formed in the annular weir 22 a of the rotating cup 2, and introduced into the collection passage 401 through the discharge band hole 41 of the casing 4. And is led out from the vertical hole 42.

After a lapse of a predetermined time, the drive motor 61
The rotation of the hood 3 is stopped, and the cylinder 53 is driven to move the cylinder rod 54 upward.
Is lifted, and the base B immediately after the coating film on the rotating cup 2 is formed is exposed. In this state, the cylinder rod 72 is raised by the operation of the second cylinder 71, and the medium-diameter shaft portion 21 of the rotary cup 2 is raised via the rotary shaft 23 connected to the cylinder rod 72, and is placed thereon. The board B is pushed out of the board mounting space S to the outside. Then, the base B is similarly taken out of the rotary cup 2 by a robot arm or the like and transferred to the next step. By repeating the above operation, a uniform coating film of the coating agent is formed on the surface of the base B.

FIG. 3 is a partially enlarged view of FIG. 2 and shows an example of a seal structure between the rotating cup 2 and the hood 3. As shown in the figure, on the upper surface of the annular weir 22a formed on the outer periphery of the rotating cup 2, two protrusions each having an annular inner protrusion 27 and an outer protrusion 28 having a rectangular cross section are formed. They are provided at predetermined intervals in the direction.

At the upper part of the inner peripheral surface of the outer projection 28, an annular retaining piece 28a protruding inward is provided. The retaining piece 28a is tapered, and an oblique upper inclined wall 28b is formed on the lower surface thereof.

A lower inclined wall 28c parallel to or substantially parallel to the upper inclined wall 28b is located between the inner projection 27 and the outer projection 28 and faces the retaining piece 28a.
Is formed between the upper inclined wall 28b and the lower inclined wall 28c, and an annular fitting groove 29 having a cross-sectional shape into which at least half of a flexible annular O-ring 9 such as rubber is inserted. The O-ring 9 is fitted into the fitting groove 29 to form a seal structure.

In the present embodiment, the fitting groove 29 has horizontal and vertical planes each formed in a plane, but is not limited to a plane, and may be curved along the cross-sectional shape of the O-ring 9. It may be. However, the fitting groove 29 is set to have a dimensional shape having a cross-sectional area which is at least equal to or slightly larger than the cross section of the portion where the O-ring 9 is fitted so that the density distribution of the O-ring 9 penetrated becomes uniform. Is preferred.

On the other hand, an inner annular groove 33a corresponding to the inner projection 27 and an outer annular groove corresponding to the outer projection 28 are provided on the lower surface of the bulging edge 33 bulging above the peripheral edge of the hood body 31. 33b is recessed into a rectangular cross section, and between the inner annular groove 33a and the outer annular groove 33b, an annular fitting projection (annular projection) 33c is fitted into the gap between the inner projection 27 and the outer projection 28. It is supposed to be.

As shown in FIG. 4, a tapered surface 33d which is in contact with the O-ring 9 is formed at a portion of the fitting projection 33c facing the fitting groove 29.
A horizontal surface 33e extends above the 3d. When the horizontal surface 33e abuts near the top of the O-ring 9, the distance from the base B is kept constant.

Therefore, when the base mounting space S of the rotating cup 2 is closed by the hood 3 in a state where the O-ring 9 is mounted in the fitting groove 29, the upper inclined wall 28 b and the lower inclined wall 28 c of the fitting groove 29 are closed. The portion of the O-ring 9 that is sandwiched and exposed to the outside from the fitting groove 29 of the O-ring 9 is a fitting projection 33.
As a result, the upper surface of the base mounting space S is sealed by the O-ring 9 in a state of being pressed against the tapered surface 33d and the horizontal surface 33e.

As described above, the rotating cup type chemical treatment apparatus of the present invention is provided with the upper inclined wall 28b and the lower inclined wall 28c which are obliquely opposed to each other and are parallel to each other in the fitting groove 29 provided in the outer projection 28. The O-ring 9 is fitted between the upper inclined wall 28b and the lower inclined wall 28c, and the O-ring 9 is fitted into the fitting projection 33c of the bulging edge 33.
Since the tapered surface 33d and the horizontal surface 33e that are in contact with the exposed portion of the O-ring 9 are formed, first, the mounting operation of the O-ring 9 into the fitting groove 29 is extremely easy, and the conventional groove is a dovetail groove. Therefore, the difficulty of the mounting operation of the O-ring 9 which has to be pushed in is eliminated.

The retaining piece 2 is provided above the fitting groove 29.
8a is provided in an overhang state with respect to the fitting groove 29, so that once the O-ring 9 is fitted into the fitting groove 29, the O-ring 9 attached to the tapered surface 33d when the hood 3 is opened rises. Does not come off from the fitting groove 29 accompanying the above.

Further, even if the hood 3 is mounted eccentrically with respect to the center of rotation of the rotary cup 2, FIG.
As shown in FIG. 5, the tapered surface 33d of the hood 3 pressing the O-ring 9 receives a repulsive force F from the O-ring 9 obliquely upward and leftward, and a horizontal component Tx of the repulsive force F is generated. Since the hood 3 is pressed in the direction of the center of rotation, the hood 3 is always pushed back to the center of rotation of the rotating cup 2.

Accordingly, the hood 3 receives a force directed outward from the center of rotation due to the centrifugal force caused by the rotation of the rotating cup 2 as in the prior art, and comes into contact with a part of the rotating cup 2, resulting in dust generation due to abrasion wear. Is effectively suppressed.

In this embodiment, the outer projections 28
One or an appropriate number of holes 29a penetrating the outer protrusion 28 in the width direction as shown by a dotted line in FIG. Then, the O-ring 9 can be easily taken out of the fitting groove 29 by inserting a metal fitting from the outside into the hole 29 a and pressing it.

In this embodiment, the inner protrusion 27 is provided further inside the outer protrusion 28 as described above.
Since the inner annular groove 33a that fits into the inner protrusion 27 is provided in the bulging edge 33 and has a double dustproof structure with respect to the outside, it is possible to more effectively prevent dust from entering the base mounting space S. Can be blocked.

In this embodiment, the rotating cup 2
An inner protrusion 27 and an outer protrusion 28 are provided on the annular weir portion 22a, and a fitting protrusion 33c fitted between the inner protrusion 27 and the outer protrusion 28 is provided on the bulging edge 33 of the hood 3. The rotary cup is not limited to the annular protrusion 22a provided with the inner projection 27 and the outer projection 28 and the hood 3 provided with the fitting projection 33c. A projection may be provided.

Further, in this embodiment, a bulging edge 33 is formed on the hood 3, and an inner annular groove 33a for fitting the inner projection 27 and the outer projection 28 on the back surface of the bulging edge 33 and an outer annular groove 33a. Although the annular groove 33 b is recessed, the present invention is not limited to a structure in which the inner annular groove 33 a and the outer annular groove 33 b are recessed on the back surface of the bulging edge 33, but is provided on the edge of the hood 3. The hood body 31 is formed to have the same thickness without providing the bulging edge 33, and the hood body 3 having the same thickness is formed.
Only the fitting projection 33c that fits into the gap between the inner projection 27 and the outer projection 28 protruding from the annular dish 22 of the rotating cup 2 on the back surface of the rotating cup 2 may be protruded.

In this embodiment, the fitting projection 33
4C, a flat tapered surface 33d is formed, but this tapered surface 33d is not limited to a linear shape as shown in FIG. It is also possible to set a curve having a curvature ranging from 0 to 0 (that is, a straight line). By doing so, the O-ring 9 and the tapered surface 3 can be larger than in the case of a straight line.
The contact area with 3d is increased, and the closing effect of the O-ring 9 is improved.

Further, in this embodiment, the inner projection 2
7. The longitudinal cross sections of the outer projection 28, the inner annular groove 33a, and the outer annular groove 33b are set in a rectangular shape. However, these are not limited to being set in a rectangular shape. It may be.

In addition, in this embodiment, the opening of the fitting groove 29 is set to have substantially the same size as the diameter of the O-ring 9, but may be smaller than the diameter of the O-ring 9. Also,
Since the O-ring 9 is effectively prevented from coming off by the retaining piece 28a, the lower inclined wall 28 of the fitting groove 29 is prevented.
c need not be provided.

FIG. 5 is a sectional view showing another example of a hood seal structure. In the case of this example, the fitting groove 29 penetrating the O-ring 9 is flush with the bottom surface of the groove formed between the inner dustproof projection 27 and the outer projection 28. Others are the same as the seal structure of the previous example. As described above, even if the fitting groove 29 is flush with the bottom surface of the groove formed between the inner dustproof projection 27 and the outer projection 28, the O-ring 9 is restricted by the upper retaining piece 28a. O-ring 9
It is effectively restrained from exiting from outside.

FIG. 6 is a sectional view showing still another hood seal structure. In the case of this example, the surface of the fitting projection 33c of the hood 3 that contacts the O-ring 9 is formed by a step surface 33f composed of a vertical wall and a horizontal wall. Others are the same as the first example. Therefore, when the rotary cup 2 is closed by the hood 3 and sealed by the O-ring 9, the vertical plane of the step surface 33 f and the horizontal plane are aligned with the O-ring 9.
And the sealing effect is further improved.

[0069]

According to the rotary cup type chemical processing apparatus of the first aspect of the present invention, the annular projection has an annular groove formed on the inner peripheral side surface thereof so that the elastic seal member can be fitted therein, and the annular projection has the annular groove formed therein. At the upper end of the groove, there is formed a restricting piece for restricting the elastic seal member from coming off, so that the elastic seal once fitted by the overhanging restricting piece formed in the fitting groove is prevented from coming off. The member is effectively prevented from coming off the fitting groove. When the hood is raised, the elastic member adheres to the back surface of the hood and accompanies the hood, so that the seal member does not come off the annular groove.

Since the annular groove does not need to be a dovetail groove as in the prior art due to the presence of the restricting piece, the seal member is forcibly pressed and deformed when the seal member is mounted in the annular groove. Due to the resulting non-uniform density distribution, the exposed surface of the seal member cannot be made flush, and thus the problem that the sealability is impaired can be reliably avoided.

According to the rotary cup type chemical processing apparatus of the second aspect of the present invention, the hood has an annular inclined surface which comes into contact with the surface of the elastic seal member which is partially exposed from the annular groove at the time of coating. Since the inclined surface of the hood pressing the seal member receives a repulsive force directed obliquely upward from the seal member, the hood is constantly pressed toward the center of rotation by the horizontal component force of the repulsive force, and the hood is always rotated by the rotating cup. Rubbing contact between a part of the hood and a part of the rotating cup caused by being pushed back to the center of rotation and eccentricity is effectively avoided, and generation of fine dust due to the above-mentioned rubbing contact is prevented. As a result, frictional contact between a part of the hood and a part of the rotating cup caused by the eccentricity is effectively avoided, and the generation of fine dust due to the above-mentioned frictional contact can be prevented.

According to the rotating cup type chemical solution treatment apparatus of the third aspect of the present invention, the hood is formed by the vertical wall and the horizontal wall which come into contact with the surface of the elastic seal member partially exposed from the annular groove at the time of covering. Since the step surface is formed in an annular shape, stable sealing can be performed with the vertical wall and the horizontal wall of the step surface sandwiching the exposed surface of the seal member. In particular, since the vertical surface receives a repulsive force from the seal member toward the rotation center, the hood is always pushed back to the rotation center of the rotating cup by this repulsive force, and a part of the hood and a part of the rotating cup caused by eccentricity are formed. Is effectively avoided, and the generation of fine dust due to the rubbing contact is prevented. As a result, frictional contact between a part of the hood and a part of the rotating cup caused by the eccentricity is effectively avoided, and the generation of fine dust due to the above-mentioned frictional contact can be prevented.

According to the rotary cup type chemical processing apparatus of the fourth aspect of the present invention, the annular groove is formed by partially forming the lower part of the annular groove so as to be shallow at the peripheral edge of the annular projection. The elastic seal member fitted into the groove enters a portion which is shallowly formed in the peripheral edge of the annular projection, and can stably fit the elastic seal member into the annular groove.

According to the rotating cup type chemical solution treatment apparatus of the present invention, since the inclined surface formed on the hood is a flat surface, the inclined surface can be formed with minimum working effort.

According to the rotating cup type chemical liquid treatment apparatus of the present invention, the inclined surface formed on the hood is a concave curved surface having a curvature equal to or less than the curvature of the elastic seal member. The contact area between the elastic cup and the elastic seal member increases, and the sealing effect of the rotating cup by mounting the hood can be further improved.

According to the rotary cup type chemical liquid treatment apparatus of the present invention, the rotary cup is concentric with the annular projection and has an annular dustproof projection formed on the inner peripheral side thereof. Since the annular dustproof groove fitted to the dustproof protrusion is provided, the dustproof protrusion and the groove can effectively prevent dust from entering the rotating cup.

In the rotating cup type chemical treatment apparatus according to the eighth aspect of the present invention, the annular projection is provided with one or a plurality of holes penetrating in the width direction. The seal member can be easily removed from the fitting groove only by the operation of inserting and pressing.

[Brief description of the drawings]

FIG. 1 is a partially cutaway perspective view showing an example of a rotating cup type chemical treatment apparatus according to the present invention.

FIG. 2 is a sectional view taken along line AA of FIG.

FIG. 3 is a partially enlarged view of a main part of FIG. 2 and shows a seal structure of a hood.

FIG. 4 is a partially enlarged view of a main part of FIG. 3;

FIG. 5 is a cross-sectional view showing another example of the seal structure of the hood.

FIG. 6 is a cross-sectional view showing still another example of the hood seal structure.

FIG. 7 is an explanatory view of a cross-sectional view for explaining a conventional rotating cup type chemical solution treatment apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Chemical solution processing apparatus 2 Rotation cup 21 Medium diameter shaft part 22 Annular dish part 22a Annular weir part 201 Discharge hole 23 Rotation shaft 23a Intake passage 23b Tube 24 Large diameter shaft part 25 Support cylinder 25a Flange 26 Bearing 27 Inner projection 28 Outer projection 29 fitting groove 3 hood 31 hood main body 32 gripping portion 33 bulging edge 4 casing 41 discharge band hole 401 recovery passage 42 vertical hole 5 hood attaching / detaching mechanism 51 lid body 52 L-shaped arm 53 cylinder 54 cylinder rod 6 cup rotating mechanism 61 Drive motor 62 Drive pulley 63 Driven pulley 7 Lifting mechanism 71 Second cylinder 72 Cylinder rod 73 Lifting block 739 O-ring

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁶ , DB name) B05C 11/08 G03F 7/16 502 H01L 21/027 H01L 21/306 H01L 21/68

Claims (8)

(57) [Claims] 1. A rotating cup type chemical processing apparatus comprising: a rotating cup; and a hood for covering the rotating cup from above through an annular elastic seal member. The annular protrusion has an annular groove formed on the inner peripheral side thereof so that the elastic seal member can be fitted therein, and a restricting piece for restricting the elastic seal member from coming off is formed at an upper end of the annular groove. A rotating cup type chemical solution treatment device, characterized in that: 2. The rotary cup type as claimed in claim 1, wherein said hood has an annular inclined surface which comes into contact with a surface of said elastic seal member which is partially exposed from said annular groove when covered. Chemical treatment equipment. 3. A stepped surface comprising a vertical wall and a horizontal wall which abuts on a surface of the elastic seal member partially exposed from the annular groove at the time of covering, and is annularly formed on the hood. The rotating cup type chemical processing apparatus according to claim 1. 4. The rotating cup according to claim 1, wherein a part of a lower portion of the annular groove is formed by making a peripheral edge of the annular projection shallow. -Type chemical solution processing equipment. 5. The rotating cup type chemical processing apparatus according to claim 1, wherein the inclined surface is a flat surface. 6. The rotating cup type chemical treatment apparatus according to claim 1, wherein the inclined surface is a concave curved surface having a curvature not more than a curvature of the elastic seal member. 7. The rotary cup is concentric with the annular projection, and has an annular dustproof projection formed on the inner peripheral side of the annular projection. 2. A groove is provided.
7. A rotating cup type chemical solution treatment apparatus according to any one of claims 1 to 6. 8. The rotating cup according to claim 1, wherein the annular projection is provided with one or more holes penetrating the annular groove and the outer peripheral side surface. -Type chemical solution processing equipment.