Deprecated: The each() function is deprecated. This message will be suppressed on further calls in /home/zhenxiangba/zhenxiangba.com/public_html/phproxy-improved-master/index.php on line 456
JP2996945B2 - Raw material composition for preparing adhesive for electroless plating and method for preparing adhesive for electroless plating - Google Patents
[go: Go Back, main page]

JP2996945B2 - Raw material composition for preparing adhesive for electroless plating and method for preparing adhesive for electroless plating - Google Patents

Raw material composition for preparing adhesive for electroless plating and method for preparing adhesive for electroless plating

Info

Publication number
JP2996945B2
JP2996945B2 JP10442398A JP10442398A JP2996945B2 JP 2996945 B2 JP2996945 B2 JP 2996945B2 JP 10442398 A JP10442398 A JP 10442398A JP 10442398 A JP10442398 A JP 10442398A JP 2996945 B2 JP2996945 B2 JP 2996945B2
Authority
JP
Japan
Prior art keywords
resin
composition
adhesive
electroless plating
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP10442398A
Other languages
Japanese (ja)
Other versions
JPH1161089A (en
Inventor
嘉隆 小野
雅人 川出
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Priority to JP10442398A priority Critical patent/JP2996945B2/en
Publication of JPH1161089A publication Critical patent/JPH1161089A/en
Application granted granted Critical
Publication of JP2996945B2 publication Critical patent/JP2996945B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Chemically Coating (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、無電解めっき用接
着剤調製用の原料組成物および無電解めっき用接着剤の
調製方法に関する。
The present invention relates to a raw material composition for preparing an adhesive for electroless plating and a method for preparing an adhesive for electroless plating.

【0002】[0002]

【従来の技術】近年、多層配線基板の高密度化という要
請から、いわゆるビルドアップ多層配線基板が注目され
ている。このビルドアップ多層配線基板は、例えば特公
平4−55555 号公報に開示されているような方法により
製造される。即ち、コア基板上に、感光性の無電解めっ
き用接着剤からなる層間樹脂絶縁剤を塗布し、これを乾
燥したのち露光,現像することにより、バイアホール用
開口を有する層間樹脂絶縁層を形成し、次いで、この層
間樹脂絶縁層の表面を酸化剤等による処理にて粗化した
のち、その粗化面に感光性の樹脂層を露光,現像処理し
てなるめっきレジストを設け、その後、めっきレジスト
非形成部分に無電解めっきを施してバイアホールを含む
導体回路パターンを形成し、このような工程を複数回繰
り返すことにより、多層化したビルドアップ配線基板が
得られる。
2. Description of the Related Art In recent years, so-called build-up multilayer wiring boards have been receiving attention due to a demand for higher density of the multilayer wiring boards. This build-up multilayer wiring board is manufactured by a method disclosed in, for example, Japanese Patent Publication No. 4-55555. That is, an interlayer resin insulating layer made of a photosensitive electroless plating adhesive is applied on the core substrate, dried, exposed and developed to form an interlayer resin insulating layer having a via hole opening. Then, after the surface of the interlayer resin insulating layer is roughened by treatment with an oxidizing agent or the like, a plating resist obtained by exposing and developing a photosensitive resin layer on the roughened surface is provided. A conductive circuit pattern including via holes is formed by applying electroless plating to a portion where no resist is formed, and such a process is repeated a plurality of times to obtain a multilayered build-up wiring board.

【0003】このような方法で製造されるビルドアップ
配線基板に関し、特開平7−340048号公報では、層間樹
脂絶縁層に用いられる無電解めっき用接着剤として、硬
化処理によって酸あるいは酸化剤に難溶性となる,未硬
化の熱硬化性樹脂と熱可塑性樹脂からなる複合樹脂マト
リックス中に、酸あるいは酸化剤に可溶性の硬化処理さ
れた耐熱性樹脂粒子を分散してなる組成物が提案されて
いる。
Japanese Patent Application Laid-Open No. 7-340048 discloses a build-up wiring board manufactured by such a method. As an adhesive for electroless plating used for an interlayer resin insulating layer, it is difficult to cure an acid or an oxidizing agent by curing. There has been proposed a composition in which cured heat-resistant resin particles that are soluble in an acid or an oxidizing agent are dispersed in a composite resin matrix composed of an uncured thermosetting resin and a thermoplastic resin that becomes soluble. .

【0004】[0004]

【発明が解決しようとする課題】しかしながら、このよ
うな無電解めっき用接着剤は、工業的に大量生産した場
合、実際にプリント配線板を製造するに当たって基板に
塗布するまでの間、保存する必要がある。このため、こ
の保存の間に、上記無電解めっき用接着剤は、次第に硬
化が進行して樹脂の粘度が高くなり、塗布できない状態
になるなどの問題があった。
However, when such an adhesive for electroless plating is mass-produced industrially, it is necessary to store the adhesive until it is applied to a substrate when actually producing a printed wiring board. There is. Therefore, during this storage, the adhesive for electroless plating has a problem that the curing gradually progresses, the viscosity of the resin increases, and the adhesive cannot be applied.

【0005】本発明の目的は、接着剤保存時に不可避的
に発生するその接着剤の硬化を抑制することにあり、こ
れにより、所定の物性を確保した無電解めっき用接着剤
を確実にプリント配線板の製造に提供しようとするもの
である。
An object of the present invention is to suppress the curing of the adhesive which is inevitably generated during the storage of the adhesive, whereby the adhesive for electroless plating having predetermined physical properties can be surely printed. It is intended to provide for the manufacture of boards.

【0006】[0006]

【課題を解決するための手段】発明者らは、上記目的の
実現に向け鋭意研究を行った結果、以下に示す内容を要
旨構成とする発明に想到した。即ち、本発明にかかる無
電解めっき用接着剤調製用の原料組成物は、予め下記の
形態に調整された各組成物; .硬化処理によって酸あるいは酸化剤に難溶性とな
る、未硬化の熱硬化性樹脂を含む樹脂組成物、 .酸あるいは酸化剤に可溶性の硬化処理をされた耐熱
性樹脂粒子、熱可塑性樹脂および有機溶剤を含む樹脂組
成物、 .硬化剤組成物、 を混合可能に準備し、かつそれぞれ樹脂組成物、樹脂
組成物、硬化剤組成物に隔離した状態に保持し、無
電解めっき用接着剤として使用する直前にその隔離され
た状態にある上記各組成物, およびを混合攪拌す
るようにしてなるものである。
Means for Solving the Problems The inventors of the present invention have conducted intensive studies for realizing the above-mentioned object, and as a result, have conceived an invention having the following features as the main constitutions. That is, the raw material compositions for preparing the adhesive for electroless plating according to the present invention are prepared in advance in the following forms: A resin composition containing an uncured thermosetting resin which becomes hardly soluble in an acid or an oxidizing agent by a curing treatment; A resin composition containing heat-resistant resin particles which have been subjected to a curing treatment soluble in an acid or an oxidizing agent, a thermoplastic resin and an organic solvent; The hardener composition is prepared so that it can be mixed, and the resin composition, the resin composition, and the hardener composition are kept separated from each other, and the separated state immediately before being used as an adhesive for electroless plating. Are mixed and stirred.

【0007】また、本発明にかかる無電解めっき用接着
剤の調製方法は、硬化処理によって酸あるいは酸化剤に
難溶性となる、未硬化の熱硬化性樹脂、熱可塑性樹脂硬
化剤組成物および有機溶剤からなる複合樹脂マトリック
ス中に、酸あるいは酸化剤に可溶性の熱硬化処理された
耐熱性樹脂粒子を分散してなる無電解めっき用接着剤を
調製するに当たり、 .硬化処理によって酸あるいは酸化剤に難溶性とな
る、未硬化の熱硬化性樹脂を含む樹脂組成物、 .酸あるいは酸化剤に可溶性の硬化処理をされた耐熱
性樹脂粒子、熱可塑性樹脂および有機溶剤を含む樹脂組
成物、 .硬化剤組成物、 を、それぞれ樹脂組成物、樹脂組成物、硬化組成物
に隔離保持し、無電解めっき用接着剤として使用する
直前にその隔離された状態にある上記各組成物を混合攪
拌することを特徴とするものである。
Further, the method for preparing the adhesive for electroless plating according to the present invention is a method for preparing an uncured thermosetting resin, a thermoplastic resin curing agent composition and an organic compound which becomes hardly soluble in an acid or an oxidizing agent by a curing treatment. In preparing an adhesive for electroless plating, a thermosetting resin particle soluble in an acid or an oxidizing agent is dispersed in a composite resin matrix composed of a solvent. A resin composition containing an uncured thermosetting resin which becomes hardly soluble in an acid or an oxidizing agent by a curing treatment; A resin composition containing heat-resistant resin particles which have been subjected to a curing treatment soluble in an acid or an oxidizing agent, a thermoplastic resin and an organic solvent; The curing agent composition is separately held in the resin composition, the resin composition, and the curing composition, respectively, and the above-mentioned respective compositions in the isolated state are mixed and stirred immediately before use as an adhesive for electroless plating. It is characterized by the following.

【0008】なお、上記無電解めっき用接着剤調製用の
原料組成物および無電解めっき用接着剤の調製方法にお
いて、熱硬化性樹脂は、熱硬化官能基の一部を感光基で
置換してなることが好ましく、また、硬化剤組成物は、
熱硬化性樹脂の硬化剤および光開始剤を含むことが好ま
しい。
In the raw material composition for preparing the adhesive for electroless plating and the method for preparing the adhesive for electroless plating, the thermosetting resin is obtained by substituting a part of the thermosetting functional group with a photosensitive group. Preferably, the curing agent composition,
It is preferable to include a curing agent for the thermosetting resin and a photoinitiator.

【0009】本発明の無電解めっき用接着剤調製用の原
料組成物は、硬化処理によって酸あるいは酸化剤に難溶
性となる、未硬化の熱硬化性樹脂、熱可塑性樹脂、硬化
剤組成物および有機溶剤からなる複合樹脂マトリックス
中に、酸あるいは酸化剤に可溶性の硬化処理された耐熱
性樹脂粒子を分散してなる無電解めっき用接着剤を調製
するための組成物であり、硬化剤成分を他の樹脂成分
, と隔離した状態で保持すると共に、樹脂組成物
と樹脂組成物どうしをも隔離している点に特徴があ
る。
The raw material composition for preparing an adhesive for electroless plating according to the present invention comprises an uncured thermosetting resin, a thermoplastic resin, a curing agent composition, which becomes hardly soluble in an acid or an oxidizing agent by a curing treatment. In a composite resin matrix composed of an organic solvent, a composition for preparing an adhesive for electroless plating obtained by dispersing cured heat-resistant resin particles soluble in an acid or an oxidizing agent, and a curing agent component. Other resin components
, And holds in the isolated state, there is a feature in the point that isolates also was what resin composition and the resin composition.

【0010】これにより、本発明にかかる上記原料組成
物は、樹脂成分の硬化が進まず、1か月以上経過して
も、粘度上昇がみられない。その結果、この原料組成物
からなる無電解めっき用接着剤は、実際にプリント配線
板を製造するに当たって基板に塗布する際に、塗布性に
関し問題はなかった。また、本発明にかかる上記原料組
成物は、樹脂成分を感光化した場合でも、その樹脂成分
の光重合反応が進行しない。その結果、この原料組成物
からなる無電解めっき用接着剤は、実際にプリント配線
板を製造するに当たって基板に塗布して露光する際に、
解像度の低下が見られない。
As a result, in the raw material composition according to the present invention, the curing of the resin component does not progress and the viscosity does not increase even after one month or more. As a result, the adhesive for electroless plating made of this raw material composition had no problem in applicability when actually applied to a substrate in manufacturing a printed wiring board. In the raw material composition according to the present invention, even when the resin component is sensitized, the photopolymerization reaction of the resin component does not proceed. As a result, the adhesive for electroless plating made of this raw material composition is actually applied to a substrate in the manufacture of a printed wiring board and is exposed when exposed.
No reduction in resolution is seen.

【0011】このような本発明において、樹脂組成物
と樹脂組成物を隔離する理由は、これらを混合してお
くと、粘度上昇が見られるからである。
In the present invention, the reason for separating the resin composition from the resin composition is that if they are mixed, an increase in viscosity is observed.

【0012】一方、本発明にかかる無電解めっき用接着
剤の調製方法は、隔離された状態にある上記各組成物
を、無電解めっき用接着剤として使用するその直前に攪
拌混合する点に特徴がある。
On the other hand, the method for preparing an adhesive for electroless plating according to the present invention is characterized in that the above-mentioned isolated compositions are stirred and mixed immediately before being used as an adhesive for electroless plating. There is.

【0013】これにより、本発明にかかる上記接着剤調
製方法によれば、組成物混合から接着剤として使用する
までの時間が極めて短いので、粘度等の上昇が少ない所
定の物性を確保した無電解めっき用接着剤を確実にプリ
ント配線板の製造に提供することができる。
According to the above method for preparing an adhesive according to the present invention, the time from mixing of the composition to use as an adhesive is extremely short, so that the electroless method can secure predetermined physical properties with little increase in viscosity and the like. The plating adhesive can be reliably provided for the manufacture of a printed wiring board.

【0014】このような本発明において、無電解めっき
用接着剤は、ロール混練やボールミル、ビーズミルなど
を用いて、各組成物を攪拌混合することにより調製す
る。例えば、まず、樹脂組成物をロール混練やボール
ミル、ビーズミルで混合調整し、その後、この樹脂組成
物に対し、樹脂組成物および硬化剤組成物を添加
して混合攪拌する方法がある。
In the present invention, the adhesive for electroless plating is prepared by stirring and mixing each composition using a roll kneader, a ball mill, a bead mill or the like. For example, there is a method in which the resin composition is firstly kneaded with a roll, mixed and adjusted by a ball mill or a bead mill, and then the resin composition and the curing agent composition are added to the resin composition, followed by mixing and stirring.

【0015】以上説明したような無電解めっき用接着剤
調製用の原料組成物および無電解めっき用接着剤の調製
方法において、樹脂組成物中の熱硬化性樹脂は、熱硬
化官能基の一部を感光基で置換して感光性を付与してお
くことが好ましい。この理由は、感光性を付与した熱硬
化性樹脂を樹脂成分として含む接着剤を用いれば、露
光,現像処理により、その接着剤層にバイアホール用の
開口部を容易に形成できるからである。
In the raw material composition for preparing the adhesive for electroless plating and the method for preparing the adhesive for electroless plating as described above, the thermosetting resin in the resin composition has a part of the thermosetting functional group. Is preferably substituted with a photosensitive group to impart photosensitivity. The reason for this is that if an adhesive containing a thermosetting resin imparted with photosensitivity as a resin component is used, an opening for a via hole can be easily formed in the adhesive layer by exposure and development.

【0016】この熱硬化性樹脂としては、エポキシ樹脂
やフェノール樹脂、ポリイミド樹脂などを用いることが
できる。特に、エポキシ樹脂としては、ノボラック型エ
ポキシ樹脂や脂環式エポキシ樹脂などを用いることがで
きる。また、感光化する場合には、メタクリル酸やアク
リル酸などと熱硬化基をアクリル化反応させる。特にエ
ポキシ樹脂のアクリレートが最適である。
As the thermosetting resin, epoxy resin, phenol resin, polyimide resin and the like can be used. In particular, as the epoxy resin, a novolak type epoxy resin, an alicyclic epoxy resin, or the like can be used. In the case of photosensitization, methacrylic acid, acrylic acid, or the like is subjected to an acrylation reaction with a thermosetting group. Particularly, acrylate of epoxy resin is most suitable.

【0017】なお、樹脂組成物には、感光性モノマー
や消泡剤を入れてもよい。感光性モノマーとしては、東
亜合成製のアロニクスM325 ,M315 、日本化薬製のDP
E-6A、共栄社化学製のR−604 などを用いることができ
る。消泡剤としては、シリコーン系消泡剤やサンノプコ
社製のS−65などを用いることができる。
Incidentally, the resin composition may contain a photosensitive monomer or an antifoaming agent. Examples of the photosensitive monomer include Alonix M325 and M315 manufactured by Toa Gosei and DP manufactured by Nippon Kayaku.
E-6A, R-604 manufactured by Kyoeisha Chemical, and the like can be used. As the defoaming agent, a silicone-based defoaming agent, S-65 manufactured by San Nopco, or the like can be used.

【0018】樹脂組成物中の熱可塑性樹脂としては、
ポリエーテルスルフォン、ポリスルフォン、ポリフェニ
レンスルフォン、ポリフェニレンサルファイド、ポリフ
ェニルエーテル、ポリエーテルイミドなどを用いること
ができる。
The thermoplastic resin in the resin composition includes:
Polyether sulfone, polysulfone, polyphenylene sulfone, polyphenylene sulfide, polyphenyl ether, polyether imide, and the like can be used.

【0019】樹脂組成物中の耐熱性樹脂粒子として
は、平均粒子径2μm以下の微粒子と平均粒径2μmを
超え10μm以下の粗粒子との混合物、あるいは平均粒子
径2μm未満であって微粒子および粗粒子の混合物、を
用いることが望ましい。前者はフルアディテイブ法で、
後者はセミアディティブ法で好適に使用される。
The heat-resistant resin particles in the resin composition may be a mixture of fine particles having an average particle diameter of 2 μm or less and coarse particles having an average particle diameter of more than 2 μm and 10 μm or less, or a mixture of fine particles having an average particle diameter of less than 2 μm and It is desirable to use a mixture of particles. The former is a full additive method,
The latter is preferably used in the semi-additive method.

【0020】この耐熱性樹脂粒子の樹脂成分としては、
エポキシ樹脂、アミノ樹脂(メラミン樹脂、尿素樹脂、
グアナミン樹脂など)、ビスマレイミド−トリアジン樹
脂などがよい。特に、エポキシ樹脂は、そのオリゴマー
の種類、硬化剤の種類を適宜選択することにより、酸や
酸化剤に溶解するもの、あるいは難溶解性のものを任意
に調製することができる。例えば、ビスフェノールA型
エポキシ樹脂オリゴマーをアミン系硬化剤で硬化させた
樹脂は、クロム酸に非常によく溶ける。しかし、クレゾ
ールノボラック型エポキシ樹脂オリゴマーをイミダゾー
ル硬化剤で硬化させた樹脂は、クロム酸に溶解しにく
い。
As the resin component of the heat resistant resin particles,
Epoxy resin, amino resin (melamine resin, urea resin,
Guanamine resin) and bismaleimide-triazine resin. In particular, the epoxy resin can be arbitrarily prepared to be soluble in an acid or an oxidizing agent or hardly soluble by appropriately selecting the type of oligomer and the type of curing agent. For example, a resin obtained by curing a bisphenol A type epoxy resin oligomer with an amine curing agent is very soluble in chromic acid. However, a resin obtained by curing a cresol novolak type epoxy resin oligomer with an imidazole curing agent is not easily dissolved in chromic acid.

【0021】樹脂組成物中の有機溶媒としては、ジエ
チレングリコールジメチルエーテル(DMDG)、トリ
エチレングリコールジメチルエーテル(DMTG)など
の、下記構造式を持つグリコールエーテル系の溶剤やN
−メチルピロリドン(NMP)などを用いることが望ま
しい。 CH3O−(CH2CH2O) n −CH3 (n=1〜5)
Examples of the organic solvent in the resin composition include glycol ether solvents having the following structural formula, such as diethylene glycol dimethyl ether (DMDG) and triethylene glycol dimethyl ether (DMTG);
It is desirable to use -methylpyrrolidone (NMP) or the like. CH 3 O— (CH 2 CH 2 O) n —CH 3 (n = 1 to 5)

【0022】硬化剤組成物は、熱硬化性樹脂の硬化剤
および光開始剤を含むことが好ましい。この理由は、接
着剤の露光現像処理、およびその後の加熱硬化処理を確
実に実施するためである。
The curing agent composition preferably contains a curing agent for a thermosetting resin and a photoinitiator. The reason for this is to ensure that the exposure and development treatment of the adhesive and the subsequent heat curing treatment are performed.

【0023】この硬化剤としては、イミダゾール硬化剤
がよく、特に、25℃で液状のものが好適に用いられる。
このような液状イミダゾール硬化剤としては、1-ベンジ
ル−2-メチルイミダゾール(品名:1B2MZ )、1-シアノ
エチル−2-エチル−4-メチルイミダゾール(品名:2E4M
Z-CN)、4-メチル−2-エチルイミダゾール(品名:2E4M
Z )を用いることができる。このイミダゾール硬化剤の
添加量は、上記樹脂組成物の総固形分に対して1〜10重
量%とすることが望ましい。この理由は、添加量がこの
範囲内にあれば均一混合がしやすいからである。
As the curing agent, an imidazole curing agent is preferable, and a liquid that is liquid at 25 ° C. is particularly preferably used.
Examples of such a liquid imidazole curing agent include 1-benzyl-2-methylimidazole (product name: 1B2MZ) and 1-cyanoethyl-2-ethyl-4-methylimidazole (product name: 2E4M).
Z-CN), 4-methyl-2-ethylimidazole (product name: 2E4M
Z) can be used. The addition amount of the imidazole curing agent is desirably 1 to 10% by weight based on the total solid content of the resin composition. The reason for this is that if the added amount is within this range, uniform mixing is easy.

【0024】なお、この硬化剤組成物には、光開始
剤、光増感剤を添加してもよい。光開始剤としては、チ
バガイギー製のイルガキュアI−907 やベンゾフェノン
などを用いることができ、光増感剤としては、日本化薬
製のDETX−S やミヒラーケトンなどを用いることができ
る。
Incidentally, a photoinitiator and a photosensitizer may be added to the curing agent composition. As a photoinitiator, Irgacure I-907 or benzophenone manufactured by Ciba Geigy can be used, and as a photosensitizer, DETX-S or Michler's ketone manufactured by Nippon Kayaku can be used.

【0025】なお、前記樹脂組成物の熱硬化性樹脂と
樹脂組成物の熱可塑性樹脂の重量比は、1/4〜4/
1であることが望ましい。熱硬化性樹脂の靱性を改善で
きる最適範囲だからである。前記樹脂組成物における
有機溶剤の配合量は、熱可塑性樹脂成分 100重量部に対
して 100〜300 重量部であることが望ましい。前記硬化
剤組成物の硬化剤は、その添加量を、無電解めっき用
接着剤の総固形分に対して1〜10重量%とすることが望
ましい。
The weight ratio of the thermosetting resin of the resin composition to the thermoplastic resin of the resin composition is 1/4 to 4 /
It is desirably 1. This is because the optimum range can improve the toughness of the thermosetting resin. The amount of the organic solvent in the resin composition is desirably 100 to 300 parts by weight based on 100 parts by weight of the thermoplastic resin component. It is desirable that the amount of the curing agent of the curing agent composition be 1 to 10% by weight based on the total solid content of the adhesive for electroless plating.

【0026】[0026]

【実施例】【Example】

(実施例1)(フルアディティブ法) A.無電解めっき用接着剤調製用の原料組成物(本発明
にかかる原料組成物) 〔樹脂組成物〕クレゾールノボラック型エポキシ樹脂
(日本化薬製、分子量2500)の25%アクリル化物を80wt
%の濃度でDMDGに溶解させた樹脂液を35重量部、感
光性モノマー(東亜合成製、アロニックスM315 )4重
量部、消泡剤(サンノプコ製、S−65)0.5 重量部、N
MP 3.6重量部を攪拌混合して得た。 〔樹脂組成物〕ポリエーテルスルフォン(PES)12
重量部、エポキシ樹脂粒子(三洋化成製、ポリマーポー
ル)の平均粒径 3.0μmのものを 12.08重量部、平均粒
径 0.5μmのものを4.83重量部、を混合した後、さらに
NMP30重量部を添加し、ビーズミルで攪拌混合して得
た。 〔硬化剤組成物〕イミダゾール硬化剤(四国化成製、
2E4MZ-CN)2重量部、光開始剤(チバガイギー製、イル
ガキュア I−907 )2重量部、光増感剤(日本化薬
製、DETX-S)0.2 重量部、NMP 1.5重量部を攪拌混合
して得た。
(Example 1) (Full additive method) Raw material composition for preparing adhesive for electroless plating (raw material composition according to the present invention) [Resin composition] 80 wt% of 25% acrylate of cresol novolac type epoxy resin (Nippon Kayaku, molecular weight 2500)
% Of a resin solution dissolved in DMDG at a concentration of 35%, 4 parts by weight of a photosensitive monomer (Alonix M315, manufactured by Toagosei Co., Ltd.), 0.5 parts by weight of an antifoaming agent (S-65, manufactured by San Nopco), N
3.6 parts by weight of MP were obtained by stirring and mixing. [Resin composition] Polyether sulfone (PES) 12
Parts by weight, 12.08 parts by weight of an epoxy resin particle (manufactured by Sanyo Chemical Industries, polymer pole) having a mean particle size of 3.0 μm, and 4.83 parts by weight of an epoxy resin particle having a mean particle size of 0.5 μm, and then 30 parts by weight of NMP were added. Then, it was obtained by stirring and mixing with a bead mill. [Curing agent composition] Imidazole curing agent (Shikoku Chemicals,
2E4MZ-CN), 2 parts by weight of a photoinitiator (Circa Geigy, Irgacure I-907), 0.2 parts by weight of a photosensitizer (Nippon Kayaku, DETX-S), and 1.5 parts by weight of NMP are stirred and mixed. I got it.

【0027】これらの樹脂組成物、樹脂組成物およ
び硬化剤組成物それぞれを、隔離した状態に保持し、
25℃で1か月間保存した。
Each of the resin composition, the resin composition and the curing agent composition is kept in an isolated state,
Stored at 25 ° C. for one month.

【0028】B.層間樹脂絶縁剤調製用の原料組成物 〔樹脂組成物〕クレゾールノボラック型エポキシ樹脂
(日本化薬製、分子量2500)の25%アクリル化物を80wt
%の濃度でDMDGに溶解させた樹脂液を35重量部、感
光性モノマー(東亜合成製、アロニックスM315 )4重
量部、消泡剤(サンノプコ製、S−65)0.5 重量部、N
MP 3.6重量部を攪拌混合して得た。 〔樹脂組成物〕ポリエーテルスルフォン(PES)12
重量部、エポキシ樹脂粒子(三洋化成製、ポリマーポー
ル)の平均粒径 0.5μmのものを 14.49重量部、を混合
した後、さらにNMP30重量部を添加し、ビーズミルで
攪拌混合して得た。 〔硬化剤組成物〕イミダゾール硬化剤(四国化成製、
2E4MZ-CN)2重量部、光開始剤(チバガイギー製、イル
ガキュア I−907 )2重量部、光増感剤(日本化薬
製、DETX-S)0.2 重量部、NMP1.5 重量部を攪拌混合
して得た。
B. Raw material composition for preparing interlayer resin insulation agent [Resin composition] 80 wt% of 25% acrylate of cresol novolak type epoxy resin (Nippon Kayaku, molecular weight 2500)
% Of a resin solution dissolved in DMDG at a concentration of 35%, 4 parts by weight of a photosensitive monomer (Alonix M315, manufactured by Toagosei Co., Ltd.), 0.5 parts by weight of an antifoaming agent (S-65, manufactured by San Nopco), N
3.6 parts by weight of MP were obtained by stirring and mixing. [Resin composition] Polyether sulfone (PES) 12
After mixing 14.49 parts by weight of an epoxy resin particle (manufactured by Sanyo Chemical Industries, polymer pole) having an average particle size of 0.5 μm, 30 parts by weight of NMP was further added, and the mixture was stirred and mixed with a bead mill. [Curing agent composition] Imidazole curing agent (Shikoku Chemicals,
2E4MZ-CN), 2 parts by weight of a photoinitiator (Circa Geigy, Irgacure I-907), 0.2 parts by weight of a photosensitizer (Nippon Kayaku, DETX-S), 1.5 parts by weight of NMP I got it.

【0029】これらの樹脂組成物、樹脂組成物およ
び硬化剤組成物それぞれを、隔離した状態に保持し、
25℃で1か月間保存した。なお、上記層間樹脂絶縁剤
は、接着剤層と絶縁剤層の2層で構成する層間樹脂絶縁
層における下層の絶縁剤層として用いられる樹脂組成物
である。
Each of the resin composition, the resin composition and the curing agent composition is kept in an isolated state,
Stored at 25 ° C. for one month. The interlayer resin insulating agent is a resin composition used as a lower insulating layer in an interlayer resin insulating layer composed of an adhesive layer and an insulating layer.

【0030】C.樹脂充填剤調製用の原料組成物 〔樹脂組成物〕ビスフェノールF型エポキシモノマー
(油化シェル製、分子量310 、YL983U)100重量部、表
面にシランカップリング剤がコーティングされた平均粒
径 1.6μmのSiO2 球状粒子(アドマテック製、CRS 11
01−CE、ここで、最大粒子の大きさは後述する内層銅パ
ターンの厚み(15μm)以下とする) 170重量部、レベ
リング剤(サンノプコ製、ペレノールS4)1.5 重量部
を攪拌混合することにより、その混合物の粘度を23±1
℃で45,000〜49,000cps に調整して得た。 〔硬化剤組成物〕イミダゾール硬化剤(四国化成製、
2E4MZ-CN)6.5 重量部。
C. Raw material composition for resin filler preparation [Resin composition] 100 parts by weight of bisphenol F type epoxy monomer (manufactured by Yuka Shell, molecular weight 310, YL983U), having an average particle diameter of 1.6 μm coated with a silane coupling agent on the surface SiO 2 spherical particles (Admatech, CRS 11
01-CE, where the maximum particle size is 170 parts by weight of the inner layer copper pattern described below (15 μm or less) and 1.5 parts by weight of a leveling agent (manufactured by San Nopco, Perenol S4) by stirring and mixing. The viscosity of the mixture is 23 ± 1
The temperature was adjusted to 45,000-49,000 cps at ℃. [Curing agent composition] Imidazole curing agent (Shikoku Chemicals,
2E4MZ-CN) 6.5 parts by weight.

【0031】これらの樹脂組成物および硬化剤組成物
それぞれを、隔離した状態に保持し、25℃で1か月間
保存した。
Each of the resin composition and the curing agent composition was kept isolated and stored at 25 ° C. for one month.

【0032】D.液状めっきレジスト調製用の原料組成
物 〔樹脂組成物〕クレゾールノボラック型エポキシ樹脂
(日本化薬製)のエポキシ基50%をアクリル化した感光
性付与のオリゴマー(分子量4000) 100重量部、メチル
エチルケトンに溶解させた80重量%のビスフェノールA
型エポキシ樹脂(油化シェル製、エピコート1001)32重
量部、感光性モノマーである多価アクリルモノマー(日
本化薬製、R604 )6.4 重量部、同じく感光性モノマー
である多価アクリルモノマー(共栄社化学製、DPE6A )
3.2 重量部を混合し、さらにレベリング剤(共栄社化学
製、ポリフローNo.75 )を全重量 100重量部に対して
0.5重量部混合して攪拌混合して得た。 〔硬化剤組成物〕イミダゾール硬化剤(四国化成製、
2E4MZ-CN)3.4 重量部、光開始剤(チバガイギー製、イ
ルガキュア I−907 )2重量部、光増感剤(日本化薬
製、DETX-S)0.2 重量部、NMP1.5 重量部を攪拌混合
して得た。
D. Raw material composition for preparing liquid plating resist [Resin composition] 100 parts by weight of a photosensitizing oligomer (molecular weight 4000) in which 50% of epoxy groups of cresol novolak type epoxy resin (manufactured by Nippon Kayaku) are acrylated, dissolved in methyl ethyl ketone 80% by weight of bisphenol A
32 parts by weight of epoxy resin (made by Yuka Shell, Epicoat 1001), 6.4 parts by weight of photosensitive monomer, polyvalent acrylic monomer (Nippon Kayaku, R604), polyvalent acrylic monomer also made of photosensitive monomer (Kyoeisha Chemical Made, DPE6A)
3.2 parts by weight, and then add a leveling agent (Kyoeisha Chemical, Polyflow No. 75) to the total weight of 100 parts by weight.
The mixture was obtained by mixing 0.5 parts by weight and stirring and mixing. [Curing agent composition] Imidazole curing agent (Shikoku Chemicals,
2E4MZ-CN) 3.4 parts by weight, 2 parts by weight of photoinitiator (Circa Geigy, Irgacure I-907), 0.2 part by weight of photosensitizer (Nippon Kayaku, DETX-S), 1.5 parts by weight of NMP I got it.

【0033】これらの樹脂組成物および硬化剤組成物
それぞれを、隔離した状態に保持し、25℃で1か月間
保存した。
Each of the resin composition and the curing agent composition was kept in an isolated state and stored at 25 ° C. for one month.

【0034】E.プリント配線板の製造 (1) 厚さ1mmのガラスエポキシ樹脂またはBT(ビスマ
レイミドトリアジン)樹脂からなる基板1の両面に18μ
mの銅箔8がラミネートされている銅張積層板を出発材
料とした(図1参照)。まず、この銅張積層板をドリル
削孔し、無電解めっき処理を施し、パターン状にエッチ
ングすることにより、基板1の両面に内層銅パターン4
とスルーホール9を形成した。
E. Manufacture of printed wiring board (1) 18 μm on both sides of substrate 1 made of glass epoxy resin or BT (bismaleimide triazine) resin having a thickness of 1 mm
A copper-clad laminate on which m copper foils 8 were laminated was used as a starting material (see FIG. 1). First, the copper-clad laminate is drilled, subjected to an electroless plating treatment, and etched in a pattern to form an inner copper pattern 4 on both surfaces of the substrate 1.
And a through hole 9 were formed.

【0035】(2) 内層銅パターン4およびスルーホール
9を形成した基板を水洗いし、乾燥した後、酸化浴(黒
化浴)として、NaOH(10g/l),NaClO2 (40g/
l),Na3PO4(6g/l)、還元浴として、NaOH(10g
/l),NaBH4 (6g/l)用いた酸化−還元処理によ
り、内層銅パターン4およびスルーホール9の表面に粗
化層11を設けた(図2参照)。
(2) The substrate having the inner layer copper pattern 4 and the through hole 9 formed thereon was washed with water and dried, and then used as an oxidation bath (blackening bath) as NaOH (10 g / l) and NaClO 2 (40 g / l).
l), Na 3 PO 4 (6 g / l), NaOH (10 g
/ L), a roughened layer 11 was provided on the surface of the inner layer copper pattern 4 and the through hole 9 by oxidation-reduction treatment using NaBH 4 (6 g / l) (see FIG. 2).

【0036】(3) Cの樹脂充填剤調製用の原料組成物を
混合混練して樹脂充填剤10を得た。 (4) 前記(3) で得た樹脂充填剤10を、調製後24時間以内
に基板の両面にロールコータを用いて塗布することによ
り、導体回路4間あるいはスルーホール9内に充填し、
70℃,20分間で乾燥させ、他方の面についても同様にし
て樹脂充填剤10を導体回路4間あるいはスルーホール9
内に充填し、70℃,20分間で加熱乾燥させた(図3参
照)。
(3) The raw material composition for preparing the resin filler C was mixed and kneaded to obtain a resin filler 10. (4) The resin filler 10 obtained in the above (3) is applied to both sides of the substrate using a roll coater within 24 hours after the preparation, thereby filling the space between the conductor circuits 4 or the inside of the through hole 9;
After drying at 70 ° C. for 20 minutes, the resin filler 10 is similarly applied to the other surface between the conductor circuits 4 or through holes 9.
And dried by heating at 70 ° C. for 20 minutes (see FIG. 3).

【0037】(5) 前記(4) の処理を終えた基板の片面
を、#600 のベルト研磨紙(三共理化学製)を用いたベ
ルトサンダー研磨により、内層銅パターン4の表面やス
ルーホール9のランド表面に樹脂充填剤10が残らないよ
うに研磨し、次いで、前記ベルトサンダー研磨による傷
を取り除くためのバフ研磨を行った。このような一連の
研磨を基板の他方の面についても同様に行った。次い
で、100 ℃で1時間、120 ℃で3時間、 150℃で1時
間、 180℃で7時間の加熱処理を行って樹脂充填剤10を
硬化した(図4参照)。
(5) The surface of the inner layer copper pattern 4 and the through holes 9 are formed on one surface of the substrate after the treatment of the above (4) by belt sanding using # 600 belt polishing paper (manufactured by Sankyo Rikagaku). Polishing was performed so that the resin filler 10 did not remain on the land surface, and then buffing was performed to remove scratches due to the belt sander polishing. Such a series of polishing was similarly performed on the other surface of the substrate. Next, a heat treatment was performed at 100 ° C. for 1 hour, at 120 ° C. for 3 hours, at 150 ° C. for 1 hour, and at 180 ° C. for 7 hours to cure the resin filler 10 (see FIG. 4).

【0038】このようにして、スルーホール9等に充填
された樹脂充填剤10の表層部および内層導体回路4上面
の粗化層11を除去して基板両面を平滑化し、樹脂充填剤
10と内層導体回路4の側面とが粗化層11を介して強固に
密着し、またスルーホール9の内壁面と樹脂充填剤10と
が粗化層11を介して強固に密着した配線基板を得た。即
ち、この工程により、樹脂充填剤10の表面と内層銅パタ
ーン4の表面が同一平面となる。ここで、充填した硬化
樹脂のTg点は155.6 ℃、線熱膨張係数は44.5×10-6
℃であった。
In this manner, the surface layer portion of the resin filler 10 filled in the through holes 9 and the like and the roughened layer 11 on the upper surface of the inner conductor circuit 4 are removed to smooth both surfaces of the substrate.
A wiring board is firmly adhered to the side surface of the inner conductor circuit 4 via the roughened layer 11 and the inner wall surface of the through hole 9 is tightly adhered to the resin filler 10 via the roughened layer 11. Obtained. That is, by this step, the surface of the resin filler 10 and the surface of the inner layer copper pattern 4 become flush with each other. Here, the Tg point of the filled cured resin is 155.6 ° C., and the coefficient of linear thermal expansion is 44.5 × 10 −6 /
° C.

【0039】(6) 前記(5) の処理で露出した内層導体回
路4およびスルーホール9のランド上面に厚さ 2.5μm
のCu−Ni−P合金からなる粗化層(凹凸層)11を形成
し、さらに、その粗化層11の表面に厚さ 0.3μmのSn層
を設けた(図5参照、但し、Sn層については図示しな
い)。その形成方法は以下のようである。即ち、基板を
酸性脱脂してソフトエッチングし、次いで、塩化パラジ
ウムと有機酸からなる触媒溶液で処理して、Pd触媒を付
与し、この触媒を活性化した後、硫酸銅8g/l、硫酸
ニッケル 0.6g/l、クエン酸15g/l、次亜リン酸ナ
トリウム29g/l、ホウ酸31g/l、界面活性剤 0.1g
/l、pH=9からなる無電解めっき浴にてめっきを施
し、銅導体回路4上面およびスルーホール9のランド上
面にCu−Ni−P合金の粗化層11を形成した。ついで、ホ
ウフッ化スズ0.1mol/l、チオ尿素1.0mol/l、温度50
℃、pH=1.2 の条件でCu−Sn置換反応させ、粗化層11
の表面に厚さ0.3 μmのSn層を設けた。
(6) The inner conductor circuit 4 and the through-hole 9 exposed in the processing of (5) have a thickness of 2.5 μm
A roughened layer (concavo-convex layer) 11 made of a Cu—Ni—P alloy was formed, and a Sn layer having a thickness of 0.3 μm was provided on the surface of the roughened layer 11 (see FIG. 5; Is not shown). The formation method is as follows. That is, the substrate was acid-degreased and soft-etched, and then treated with a catalyst solution comprising palladium chloride and an organic acid to provide a Pd catalyst. After activating this catalyst, copper sulfate 8 g / l, nickel sulfate 0.6 g / l, citric acid 15 g / l, sodium hypophosphite 29 g / l, boric acid 31 g / l, surfactant 0.1 g
Then, plating was performed in an electroless plating bath consisting of / l and pH = 9 to form a roughened layer 11 of a Cu-Ni-P alloy on the upper surface of the copper conductor circuit 4 and the upper surface of the land of the through hole 9. Then, tin borofluoride 0.1 mol / l, thiourea 1.0 mol / l, temperature 50
C., a Cu-Sn substitution reaction was performed under the conditions of pH = 1.2,
Was provided with a 0.3 μm-thick Sn layer on the surface thereof.

【0040】(7) Bの層間樹脂絶縁剤調製用の原料組成
物を攪拌混合し、粘度1.5 Pa・sに調整して層間樹脂絶
縁剤(下層用)を得た。Aの無電解めっき用接着剤調製
用の原料組成物を攪拌混合し、粘度7Pa・sに調整して
無電解めっき用接着剤溶液(上層用)を得た。
(7) The raw material composition for preparing the interlayer resin insulating agent B was mixed with stirring and adjusted to a viscosity of 1.5 Pa · s to obtain an interlayer resin insulating agent (for lower layer). The raw material composition for preparing the adhesive for electroless plating of A was stirred and mixed, and the viscosity was adjusted to 7 Pa · s to obtain an adhesive solution for electroless plating (for upper layer).

【0041】(8) 前記(6) の基板の両面に、前記(7) で
得られた粘度 1.5Pa・sの層間樹脂絶縁剤(下層用)を
調製後24時間以内にロールコータで塗布し、水平状態で
20分間放置してから、60℃で30分の乾燥(プリベーク)
を行い、絶縁剤層2aを形成した。さらにこの絶縁剤層の
上に前記(7) で得られた粘度7Pa・sの感光性の接着剤
溶液(上層用)を調製後24時間以内に塗布し、水平状態
で20分間放置してから、60℃で30分の乾燥(プリベー
ク)を行い、接着剤層2bを形成した(図6参照)。
(8) The interlayer resin insulating material (for lower layer) having a viscosity of 1.5 Pa · s obtained in the above (7) is applied to both surfaces of the substrate of the above (6) by a roll coater within 24 hours after preparation. In a horizontal position
Leave for 20 minutes, then dry at 60 ° C for 30 minutes (pre-bake)
Was performed to form an insulating agent layer 2a. Further, the photosensitive adhesive solution (for the upper layer) having a viscosity of 7 Pa · s obtained in the above (7) is applied on the insulating layer within 24 hours after preparation, and left in a horizontal state for 20 minutes. Then, drying (prebaking) was performed at 60 ° C. for 30 minutes to form an adhesive layer 2b (see FIG. 6).

【0042】(9) 前記(8) で絶縁剤層2aおよび接着剤層
2bを形成した基板の両面に、85μmφの黒円が印刷され
たフォトマスクフィルムを密着させ、超高圧水銀灯によ
り 500mJ/cm2 で露光した。これをDMTG溶液でスプ
レー現像し、さらに、当該基板を超高圧水銀灯により30
00mJ/cm2 で露光し、100 ℃で1時間、120 ℃で1時
間、その後 150℃で3時間の加熱処理(ポストベーク)
をすることにより、フォトマスクフィルムに相当する寸
法精度に優れた85μmφの開口(バイアホール形成用開
口6)を有する厚さ35μmの層間樹脂絶縁層(2層構
造)2を形成した(図7参照)。なお、バイアホールと
なる開口には、スズめっき層を部分的に露出させた。
(9) In the above (8), the insulating layer 2a and the adhesive layer
A photomask film on which a black circle of 85 μmφ was printed was brought into close contact with both surfaces of the substrate on which 2b was formed, and was exposed at 500 mJ / cm 2 using an ultra-high pressure mercury lamp. This is spray-developed with a DMTG solution, and the substrate is further subjected to an ultra-high pressure mercury lamp for 30 minutes.
Exposure at 00 mJ / cm 2 , heat treatment at 100 ° C. for 1 hour, 120 ° C. for 1 hour, and then at 150 ° C. for 3 hours (post bake)
To form a 35 μm thick interlayer resin insulating layer (two-layer structure) 2 having an opening of 85 μmφ (via hole forming opening 6) having excellent dimensional accuracy equivalent to a photomask film (see FIG. 7). ). Note that the tin plating layer was partially exposed in the opening serving as the via hole.

【0043】(10)開口が形成された基板を、クロム酸に
2分間浸漬し、層間樹脂絶縁層2の接着剤層2bの表面に
存在するエポキシ樹脂粒子を溶解除去することにより、
当該層間樹脂絶縁層2の表面を粗面とし、その後、中和
溶液(シプレイ社製)に浸漬してから水洗いした(図8
参照)。さらに、粗面化処理(粗化深さ6μm)した該
基板の表面に、パラジウム触媒(アトテック製)を付与
することにより、層間樹脂絶縁層2の表面およびバイア
ホール用開口6に触媒核を付けた。
(10) The substrate having the openings formed therein is immersed in chromic acid for 2 minutes to dissolve and remove the epoxy resin particles present on the surface of the adhesive layer 2b of the interlayer resin insulation layer 2.
The surface of the interlayer resin insulating layer 2 was roughened, and then immersed in a neutralizing solution (manufactured by Shipley Co., Ltd.) and then washed with water (FIG. 8).
reference). Further, by applying a palladium catalyst (manufactured by Atotech) to the surface of the substrate subjected to the surface roughening treatment (roughening depth: 6 μm), a catalyst nucleus is formed on the surface of the interlayer resin insulating layer 2 and the via hole opening 6. Was.

【0044】(11)Dの液状めっきレジスト調製用の原料
組成物を攪拌混合し、液状めっきレジストを得た。 (12)前記(10)で触媒核付与の処理を終えた基板の両面
に、上記液状めっきレジストをロールコーターを用いて
塗布し、60℃で30分間の乾燥を行い、厚さ30μmのレジ
スト層を形成した。次に、このレジスト層の上に、導体
回路パターンの描画されたフォトマスクフィルムを載置
して 400mJ/cm2 の紫外線を照射し、露光した。そし
て、フォトマスクフィルムを取り除いた後、レジスト層
をDMTGで溶解現像し、基板上に導体回路パターン部
の抜けためっき用レジストを形成し、さらに、超高圧水
銀灯にて6000mJ/cm2 で露光し、100 ℃で1時間、その
後、150℃で3時間の加熱処理を行い、層間樹脂絶縁層
2の上に永久レジスト3を形成した(図9参照)。
(11) The raw material composition for preparing a liquid plating resist of D was stirred and mixed to obtain a liquid plating resist. (12) The liquid plating resist is applied on both sides of the substrate after the catalyst nucleation treatment in the step (10) using a roll coater, and dried at 60 ° C. for 30 minutes to form a resist layer having a thickness of 30 μm. Was formed. Next, a photomask film on which a conductive circuit pattern was drawn was placed on the resist layer, and the resist layer was exposed to ultraviolet light of 400 mJ / cm 2 . Then, after removing the photomask film, the resist layer is dissolved and developed with DMTG to form a plating resist on the substrate where the conductor circuit pattern portion has been removed, and further exposed to 6000 mJ / cm 2 using an ultra-high pressure mercury lamp. A heat treatment was performed at 100 ° C. for 1 hour and then at 150 ° C. for 3 hours to form a permanent resist 3 on the interlayer resin insulating layer 2 (see FIG. 9).

【0045】(13)上記永久レジスト3を形成した基板
に、予め、めっき前処理(具体的には触媒核の活性化)
を施し、その後、下記組成を有する無電解銅−ニッケル
合金めっき浴を用いて一次めっきを行い、レジスト非形
成部分に厚さ約1.7 μmの銅−ニッケル−リンめっき薄
膜を形成した。このとき、めっき浴の温度は60℃とし、
めっき浸漬時間は1時間とした。 錯化剤… Na3C6H5O7 : 0.23M (60g/l) 還元剤… NaPH2O2・H2O : 0.19M (20g/l) pH調節剤…NaOH : 0.75M (pH=9.5 ) 安定剤…硝酸鉛 : 0.2 mM(80ppm ) 界面活性剤 : 0.05g/l 析出速度は、1.7 μm/時間
(13) Pre-plating treatment (specifically, activation of catalyst nuclei) is applied to the substrate on which the permanent resist 3 has been formed.
Then, primary plating was performed using an electroless copper-nickel alloy plating bath having the following composition to form a copper-nickel-phosphorous plating thin film having a thickness of about 1.7 μm on the non-resist-forming portion. At this time, the temperature of the plating bath was 60 ° C,
The plating immersion time was 1 hour. Complexing agent: Na 3 C 6 H 5 O 7 : 0.23 M (60 g / l) Reducing agent: NaPH 2 O 2 .H 2 O: 0.19 M (20 g / l) pH regulator: NaOH: 0.75 M (pH = 9.5) Stabilizer: Lead nitrate: 0.2 mM (80 ppm) Surfactant: 0.05 g / l Precipitation rate is 1.7 μm / hour

【0046】(14)一次めっき処理した基板を、前記めっ
き浴から引き上げて表面に付着しているめっき浴を水で
洗い流し、さらに、その基板を酸性溶液で処理すること
により、銅−ニッケル−リンめっき薄膜表層の酸化皮膜
を除去した。その後、Pd置換を行うことなく、銅−ニッ
ケル−リンめっき薄膜上に、下記組成の無電解銅めっき
浴を用いて二次めっきを施すことにより、アディティブ
法による導体層として必要な外層導体パターン5および
バイアホール(BVH )7を形成した。このとき、めっき
浴の温度は50〜70℃とし、めっき浸漬時間は90〜360 分
とした。 金属塩… CuSO4・5H2O : 8.6 mM 錯化剤…TEA : 0.15M 還元剤…HCHO : 0.02M その他…安定剤(ビピリジル、フェロシアン化カリウム
等):少量 析出速度は、6μm/時間
(14) The substrate subjected to the primary plating is pulled out of the plating bath, the plating bath attached to the surface is washed away with water, and the substrate is treated with an acidic solution to obtain copper-nickel-phosphorus. The oxide film on the surface of the plating thin film was removed. Then, without performing Pd substitution, a secondary plating is performed on the copper-nickel-phosphorous plating thin film using an electroless copper plating bath having the following composition, so that the outer layer conductor pattern 5 required as a conductor layer by the additive method is formed. And via holes (BVH) 7 were formed. At this time, the temperature of the plating bath was 50 to 70 ° C., and the plating immersion time was 90 to 360 minutes. Metal salts ... CuSO 4 · 5H 2 O: 8.6 mM Complexing agent ... TEA: 0.15 M reducing agent ... HCHO: 0.02 M Others ... stabilizer (bipyridyl, potassium ferrocyanide and the like): a small amount deposition rate, 6 [mu] m / Time

【0047】(15)このようにしてアディティブ法による
導体層(厚さ15μm程度)を形成した後、#600 のベル
ト研磨紙を用いたベルトサンダー研磨により、基板の片
面を、永久レジスト3の表層とバイアホール7の銅の最
上面とが揃うまで研磨した。引き続き、ベルトサンダー
による傷を取り除くためにバフ研磨を行った(バフ研磨
のみでもよい)。そして、他方の面についても同様に研
磨して、基板両面が平滑なプリント配線基板を形成した
(図10参照)。
(15) After the conductor layer (about 15 μm thick) is formed by the additive method in this way, one surface of the substrate is coated with the surface of the permanent resist 3 by belt sander polishing using # 600 belt polishing paper. And the upper surface of the copper in the via hole 7 was polished. Subsequently, buffing was performed to remove the scratches caused by the belt sander (only buffing may be performed). Then, the other surface was similarly polished to form a printed wiring board having both surfaces smooth (see FIG. 10).

【0048】(16)そして、硫酸銅8g/l、硫酸ニッケ
ル 0.6g/l、クエン酸15g/l、次亜リン酸ナトリウ
ム29g/l、ホウ酸31g/l、界面活性剤 0.1g/lか
らなるpH=9の無電解めっき液に浸漬し、厚さ3μm
のCu−Ni−P合金からなる粗化層11を形成した(図11参
照)。そしてさらに、前述の工程を繰り返すことによ
り、アディティブ法による導体層を更にもう一層形成
し、このようにして配線層をビルドアップすることによ
り多層配線基板を得た。
(16) Copper sulfate 8 g / l, nickel sulfate 0.6 g / l, citric acid 15 g / l, sodium hypophosphite 29 g / l, boric acid 31 g / l, surfactant 0.1 g / l Immersed in an electroless plating solution having a pH of 9 and a thickness of 3 μm
A roughened layer 11 made of a Cu—Ni—P alloy was formed (see FIG. 11). Further, by repeating the above-mentioned steps, a further conductive layer was formed by the additive method, and a wiring layer was built up in this way to obtain a multilayer wiring board.

【0049】(17)一方、DMDGに溶解させた60重量%
のクレゾールノボラック型エポキシ樹脂(日本化薬製)
のエポキシ基50%をアクリル化した感光性付与のオリゴ
マー(分子量4000)を 46.67g、メチルエチルケトンに
溶解させた80重量%のビスフェノールA型エポキシ樹脂
(油化シェル製、エピコート1001)15.0g、イミダゾー
ル硬化剤(四国化成製、2E4MZ-CN)1.6 g、感光性モノ
マーである多価アクリルモノマー(日本化薬製、R604
)3g、同じく多価アクリルモノマー(共栄社化学
製、DPE6A ) 1.5g、分散系消泡剤(サンノプコ社製、
S−65)0.71gを混合し、さらにこの混合物に対して光
開始剤としてのベンゾフェノン(関東化学製)を2g、
光増感剤としてのミヒラーケトン(関東化学製)を 0.2
g加えて、粘度を25℃で 2.0Pa・sに調整したソルダー
レジスト組成物を得た。なお、粘度測定は、B型粘度計
(東京計器、 DVL-B型)で 60rpmの場合はローターNo.
4、6rpm の場合はローターNo.3によった。
(17) On the other hand, 60% by weight dissolved in DMDG
Cresol novolak epoxy resin (Nippon Kayaku)
46.67 g of a photosensitizing oligomer (molecular weight 4000) obtained by acrylizing 50% of the epoxy groups of epoxy resin, 15.0 g of an 80 wt% bisphenol A type epoxy resin (made by Yuka Shell, Epicoat 1001) dissolved in methyl ethyl ketone, imidazole curing 1.6 g of an agent (2E4MZ-CN, manufactured by Shikoku Chemicals Co., Ltd.) and a polyacrylic monomer (R604, manufactured by Nippon Kayaku, a photosensitive monomer)
3 g), 1.5 g of polyvalent acrylic monomer (Kyoeisha Chemical, DPE6A), and a dispersion defoaming agent (San Nopco,
S-65) of 0.71 g, and 2 g of benzophenone (Kanto Chemical) as a photoinitiator was added to the mixture.
0.2 of Michler's ketone (Kanto Chemical) as photosensitizer
g was added to obtain a solder resist composition whose viscosity was adjusted to 2.0 Pa · s at 25 ° C. The viscosity was measured using a B-type viscometer (Tokyo Keiki, DVL-B type) at 60 rpm and the rotor No.
In the case of 4, 6 rpm, the rotor No. 3 was used.

【0050】(18)前記(16)で得られた多層配線基板に、
Pd触媒を付与し、この触媒を活性化した後、硫酸銅8g
/l、硫酸ニッケル 0.6g/l、クエン酸15g/l、次
亜リン酸ナトリウム29g/l、ホウ酸31g/l、界面活
性剤 0.1g/l、pH=9からなる無電解めっき浴にて
Cu−Ni−P合金めっきを施し、導体回路表面に粗化層11
を形成した。その多層配線基板の両面に、上記ソルダー
レジスト組成物を20μmの厚さで塗布した。次いで、70
℃で20分間、70℃で30分間の乾燥処理を行った後、円パ
ターン(マスクパターン)が描画された厚さ5mmのフォ
トマスクフィルムを密着させて載置し、1000mJ/cm2
紫外線で露光し、DMTG現像処理した。そしてさらに、80
℃で1時間、 100℃で1時間、 120℃で1時間、 150℃
で3時間の条件で加熱処理し、はんだパッド部分(バイ
アホールとそのランド部分を含む)を開口した(開口径
200μm)ソルダーレジスト層(厚み20μm)14を形成
した。
(18) The multilayer wiring board obtained in (16) is
After applying a Pd catalyst and activating this catalyst, copper sulfate 8 g
/ L, nickel sulfate 0.6g / l, citric acid 15g / l, sodium hypophosphite 29g / l, boric acid 31g / l, surfactant 0.1g / l, pH = 9 in an electroless plating bath
Cu-Ni-P alloy plating is applied, and a roughened layer 11
Was formed. The solder resist composition was applied to both sides of the multilayer wiring board in a thickness of 20 μm. Then 70
° C. for 20 minutes, after the drying process for 30 minutes was carried out at 70 ° C., a circle pattern (mask pattern) is brought into close contact with a photomask film having a thickness of 5mm drawn is placed, with ultraviolet 1000 mJ / cm 2 Exposure and DMTG development processing. And even 80
1 hour at 100 ° C, 1 hour at 100 ° C, 1 hour at 120 ° C, 150 ° C
Heat treatment under the conditions of 3 hours, to open the solder pad portion (including the via hole and its land portion) (opening diameter
A 200 μm) solder resist layer (thickness: 20 μm) 14 was formed.

【0051】(19)次に、ソルダーレジスト層14を形成し
た基板を、塩化ニッケル30g/l、次亜リン酸ナトリウ
ム10g/l、クエン酸ナトリウム10g/lからなるpH
=5の無電解ニッケルめっき液に20分間浸漬して、開口
部に厚さ5μmのニッケルめっき層15を形成した。さら
に、その基板を、シアン化金カリウム2g/l、塩化ア
ンモニウム75g/l、クエン酸ナトリウム50g/l、次
亜リン酸ナトリウム10g/lからなる無電解金めっき液
に93℃の条件で23秒間浸漬して、ニッケルめっき層15上
に厚さ0.03μmの金めっき層16を形成した。
(19) Next, the substrate on which the solder resist layer 14 has been formed is subjected to a pH of 30 g / l of nickel chloride, 10 g / l of sodium hypophosphite, and 10 g / l of sodium citrate.
= 5 for 20 minutes to form a nickel plating layer 15 having a thickness of 5 μm at the opening. Further, the substrate was placed on an electroless gold plating solution comprising 2 g / l of potassium gold cyanide, 75 g / l of ammonium chloride, 50 g / l of sodium citrate, and 10 g / l of sodium hypophosphite at 93 ° C. for 23 seconds. By dipping, a gold plating layer 16 having a thickness of 0.03 μm was formed on the nickel plating layer 15.

【0052】(20)そして、ソルダーレジスト層14の開口
部に、はんだペーストを印刷して 200℃でリフローする
ことによりはんだバンプ(はんだ体)17を形成し、はん
だバンプ17を有するプリント配線板を製造した(図12参
照)。
(20) Then, a solder paste is printed in the opening of the solder resist layer 14 and reflowed at 200 ° C. to form a solder bump (solder body) 17. A printed wiring board having the solder bump 17 is formed. Manufactured (see FIG. 12).

【0053】(比較例1)層間樹脂絶縁層を構成する上
層用の無電解めっき用接着剤として、以下に示す成分組
成のものを使用したこと以外は、実施例1と同様にして
多層プリント配線板を製造した。クレゾールノボラック
型エポキシ樹脂(日本化薬製、分子量2500)の25%アク
リル化物を35重量部、ポリエーテルスルフォン(PE
S)12重量部、イミダゾール硬化剤(四国化成製、2E4M
Z-CN)2重量部、感光性モノマー(東亜合成製、アロニ
ックスM315 )4重量部、光開始剤(チバガイギー製、
イルガキュア I−907 )2重量部、光増感剤(日本化
薬製、DETX-S)0.2 重量部を混合し、これらの混合物に
対してエポキシ樹脂粒子(三洋化成製、ポリマーポー
ル)の平均粒径3.0 μmのものを 12.08重量部、平均粒
径 0.5μmのものを4.83重量部、消泡剤(サンノプコ製
S−65)0.5 重量部を混合した後、さらにNMP30重
量部を添加しながら混合して粘度3.0 Pa・sの感光性の
無電解めっき用接着剤を得た。
Comparative Example 1 Multilayer printed wiring was carried out in the same manner as in Example 1 except that the adhesive having the following composition was used as the adhesive for electroless plating for the upper layer constituting the interlayer resin insulating layer. Boards were manufactured. 35% by weight of 25% acrylate of cresol novolak type epoxy resin (manufactured by Nippon Kayaku, molecular weight 2500), polyether sulfone (PE
S) 12 parts by weight, imidazole curing agent (Shikoku Chemicals, 2E4M
Z-CN) 2 parts by weight, photosensitive monomer (Toa Gosei Co., Aronix M315) 4 parts by weight, photoinitiator (Ciba Geigy,
2 parts by weight of Irgacure I-907) and 0.2 parts by weight of a photosensitizer (DETX-S manufactured by Nippon Kayaku) were mixed, and the average particle size of epoxy resin particles (Polymer Pole manufactured by Sanyo Chemical Industries) was added to the mixture. 12.08 parts by weight having a diameter of 3.0 μm, 4.83 parts by weight of a particle having an average particle diameter of 0.5 μm, and 0.5 parts by weight of an antifoaming agent (S-65 manufactured by San Nopco) were mixed, and further mixed while adding 30 parts by weight of NMP. Thus, a photosensitive adhesive for electroless plating having a viscosity of 3.0 Pa · s was obtained.

【0054】この感光性の無電解めっき用接着剤を25℃
で1か月間保存したところ、硬化してしまい、塗布する
ことができなかった。
The photosensitive adhesive for electroless plating was heated at 25 ° C.
When stored for one month, the resin cured and could not be applied.

【0055】(実施例2)(セミアディティブ法) A.無電解めっき用接着剤調製用の原料組成物(本発明
にかかる原料組成物) 〔樹脂組成物〕クレゾールノボラック型エポキシ樹脂
(日本化薬製、分子量2500)の25%アクリル化物を80wt
%の濃度でDMDGに溶解させた樹脂液を35重量部、感
光性モノマー(東亜合成製、アロニックスM315 )3.15
重量部、消泡剤(サンノプコ製、S−65)0.5 重量部、
NMP3.6 重量部を攪拌混合して得た。 〔樹脂組成物〕ポリエーテルスルフォン(PES)12
重量部、エポキシ樹脂粒子(三洋化成製、ポリマーポー
ル)の平均粒径1.0 μmのものを 7.2重量部、平均粒径
0.5μmのものを3.09重量部を混合した後、さらにNM
P30重量部を添加し、ビーズミルで攪拌混合して得た。 〔硬化剤組成物〕イミダゾール硬化剤(四国化成製、
2E4MZ−CN)2重量部、光開始剤(チバガイギー製、イ
ルガキュア I−907 )2重量部、光増感剤(日本化薬
製、DETX-S)0.2 重量部、NMP 1.5重量部を攪拌混合
して得た。
(Example 2) (Semi-additive method) Raw material composition for preparing adhesive for electroless plating (raw material composition according to the present invention) [Resin composition] 80 wt% of 25% acrylate of cresol novolac type epoxy resin (Nippon Kayaku, molecular weight 2500)
35% by weight of a resin solution dissolved in DMDG at a concentration of 3.15% and a photosensitive monomer (Toa Gosei Co., Aronix M315) 3.15
Parts by weight, 0.5 parts by weight of an antifoaming agent (manufactured by San Nopco, S-65)
3.6 parts by weight of NMP were obtained by stirring and mixing. [Resin composition] Polyether sulfone (PES) 12
Weight part, epoxy resin particles (manufactured by Sanyo Chemical Co., polymer pole) having an average particle diameter of 1.0 μm, 7.2 parts
After mixing 3.09 parts by weight of 0.5 μm, further add NM
P30 parts by weight was added, and the mixture was stirred and mixed with a bead mill to obtain. [Curing agent composition] Imidazole curing agent (Shikoku Chemicals,
2E4MZ-CN), 2 parts by weight of a photoinitiator (Circa Geigy, Irgacure I-907), 0.2 parts by weight of a photosensitizer (Nippon Kayaku, DETX-S), and 1.5 parts by weight of NMP are mixed with stirring. I got it.

【0056】これらの樹脂組成物、樹脂組成物およ
び硬化剤組成物それぞれを、隔離した状態に保持し、
25℃で1か月間保存した。
Each of the resin composition, the resin composition and the curing agent composition is kept in an isolated state,
Stored at 25 ° C. for one month.

【0057】B.層間樹脂絶縁剤調製用の原料組成物 〔樹脂組成物〕クレゾールノボラック型エポキシ樹脂
(日本化薬製、分子量2500)の25%アクリル化物を80wt
%の濃度でDMDGに溶解させた樹脂液を35重量部、感
光性モノマー(東亜合成製、アロニックスM315 )4重
量部、消泡剤(サンノプコ製、S−65)0.5 重量部、N
MP 3.6重量部を攪拌混合して得た。 〔樹脂組成物〕ポリエーテルスルフォン(PES)12
重量部、エポキシ樹脂粒子(三洋化成製、ポリマーポー
ル)の平均粒径 0.5μmのものを 14.49重量部、を混合
した後、さらにNMP30重量部を添加し、ビーズミルで
攪拌混合して得た。 〔硬化剤組成物〕イミダゾール硬化剤(四国化成製、
2E4MZ −CN)2重量部、光開始剤(チバガイギー製、イ
ルガキュア I−907 )2重量部、光増感剤(日本化薬
製、DETX-S)0.2 重量部、NMP1.5 重量部を攪拌混合
して得た。
B. Raw material composition for preparing interlayer resin insulation agent [Resin composition] 80 wt% of 25% acrylate of cresol novolak type epoxy resin (Nippon Kayaku, molecular weight 2500)
% Of a resin solution dissolved in DMDG at a concentration of 35%, 4 parts by weight of a photosensitive monomer (Alonix M315, manufactured by Toagosei Co., Ltd.), 0.5 parts by weight of an antifoaming agent (S-65, manufactured by San Nopco), N
3.6 parts by weight of MP were obtained by stirring and mixing. [Resin composition] Polyether sulfone (PES) 12
After mixing 14.49 parts by weight of an epoxy resin particle (manufactured by Sanyo Chemical Industries, polymer pole) having an average particle size of 0.5 μm, 30 parts by weight of NMP was further added, and the mixture was stirred and mixed with a bead mill. [Curing agent composition] Imidazole curing agent (Shikoku Chemicals,
2E4MZ-CN), 2 parts by weight of a photoinitiator (Circa Geigy, Irgacure I-907), 0.2 parts by weight of a photosensitizer (Nippon Kayaku, DETX-S), 1.5 parts by weight of NMP I got it.

【0058】これらの樹脂組成物、樹脂組成物およ
び硬化剤組成物それぞれを、隔離した状態に保持し、
25℃で1か月間保存した。なお、上記層間樹脂絶縁剤
は、接着剤層と絶縁剤層の2層で構成する層間樹脂絶縁
層における下層の絶縁剤層として用いられる樹脂組成物
である。
Each of the resin composition, the resin composition and the curing agent composition is kept in an isolated state,
Stored at 25 ° C. for one month. The interlayer resin insulating agent is a resin composition used as a lower insulating layer in an interlayer resin insulating layer composed of an adhesive layer and an insulating layer.

【0059】C.プリント配線板の製造 (1) 実施例1の(1) 〜(6) の工程を実施した(図1〜5
参照)。 (2) Bの層間樹脂絶縁剤調製用の原料組成物を攪拌混合
し、粘度1.5 Pa・sに調整して層間樹脂絶縁剤(下層
用)を得た。Aの無電解めっき用接着剤調製用の原料組
成物を攪拌混合し、粘度7Pa・sに調整して無電解めっ
き用接着剤溶液(上層用)を得た。
C. Production of Printed Wiring Board (1) Steps (1) to (6) of Example 1 were performed (FIGS. 1 to 5).
reference). (2) The raw material composition for preparing the interlayer resin insulating agent of B was stirred and mixed, and the viscosity was adjusted to 1.5 Pa · s to obtain an interlayer resin insulating agent (for lower layer). The raw material composition for preparing the adhesive for electroless plating of A was stirred and mixed, and the viscosity was adjusted to 7 Pa · s to obtain an adhesive solution for electroless plating (for upper layer).

【0060】(3) 基板の両面に、前記(2) で得られた粘
度 1.5Pa・sの層間樹脂絶縁剤(下層用)を調製後24時
間以内にロールコータで塗布し、水平状態で20分間放置
してから、60℃で30分の乾燥(プリベーク)を行い、絶
縁剤層2aを形成した。さらにこの絶縁剤層の上に前記
(2) で得られた粘度7Pa・sの感光性の接着剤溶液(上
層用)を調製後24時間以内に塗布し、水平状態で20分間
放置してから、60℃で30分の乾燥(プリベーク)を行
い、接着剤層2bを形成した(図6参照)。
(3) The interlayer resin insulating material (for lower layer) having a viscosity of 1.5 Pa · s obtained in the above (2) is applied to both surfaces of the substrate by a roll coater within 24 hours after the preparation, and is applied in a horizontal state. After standing for 60 minutes, drying (prebaking) was performed at 60 ° C. for 30 minutes to form an insulating layer 2a. Further, on this insulating layer,
Apply the photosensitive adhesive solution (for upper layer) having a viscosity of 7 Pa · s obtained in (2) within 24 hours after preparation, leave it in a horizontal state for 20 minutes, and then dry at 60 ° C for 30 minutes ( (Prebaking) to form an adhesive layer 2b (see FIG. 6).

【0061】(4) 前記(3) で絶縁剤層2aおよび接着剤層
2bを形成した基板の両面に、85μmφの黒円が印刷され
たフォトマスクフィルムを密着させ、超高圧水銀灯によ
り 500mJ/cm2 で露光した。これをDMTG溶液でスプ
レー現像し、さらに、当該基板を超高圧水銀灯により30
00mJ/cm2 で露光し、100 ℃で1時間、その後 150℃で
5時間の加熱処理(ポストベーク)をすることにより、
フォトマスクフィルムに相当する寸法精度に優れた85μ
mφの開口(バイアホール形成用開口6)を有する厚さ
35μmの層間樹脂絶縁層(2層構造)2を形成した(図
7参照)。なお、バイアホールとなる開口には、スズめ
っき層を部分的に露出させた。
(4) In the above (3), the insulating layer 2a and the adhesive layer
A photomask film on which a black circle of 85 μmφ was printed was brought into close contact with both surfaces of the substrate on which 2b was formed, and was exposed at 500 mJ / cm 2 using an ultra-high pressure mercury lamp. This is spray-developed with a DMTG solution, and the substrate is further subjected to an ultra-high pressure mercury lamp for 30 minutes.
Exposure at 100 mJ / cm 2 and heat treatment (post-bake) at 100 ° C. for 1 hour and then at 150 ° C. for 5 hours
85μ with excellent dimensional accuracy equivalent to a photomask film
Thickness with mφ opening (via hole forming opening 6)
A 35 μm interlayer resin insulating layer (two-layer structure) 2 was formed (see FIG. 7). Note that the tin plating layer was partially exposed in the opening serving as the via hole.

【0062】(5) 前記(4) の処理を施した基板を、クロ
ム酸に1分間浸漬し、層間樹脂絶縁層2の接着剤層2bの
表面に存在するエポキシ樹脂粒子を溶解除去することに
より、当該層間樹脂絶縁層2の表面を粗面とし、その
後、中和溶液(シプレイ社製)に浸漬してから水洗いし
た(図8参照)。さらに、粗面化処理した該基板の表面
に、パラジウム触媒(アトテック製)を付与することに
より、層間樹脂絶縁層2の表面およびバイアホール用開
口6の内壁面に触媒核を付けた。
(5) The substrate subjected to the treatment of (4) is immersed in chromic acid for 1 minute to dissolve and remove the epoxy resin particles present on the surface of the adhesive layer 2b of the interlayer resin insulating layer 2. Then, the surface of the interlayer resin insulating layer 2 was roughened, and then immersed in a neutralizing solution (manufactured by Shipley Co., Ltd.) and then washed with water (see FIG. 8). Further, by applying a palladium catalyst (manufactured by Atotech) to the surface of the substrate subjected to the surface roughening treatment, a catalyst nucleus was attached to the surface of the interlayer resin insulating layer 2 and the inner wall surface of the via hole opening 6.

【0063】(6) 以下の組成の無電解銅めっき浴中に基
板を浸漬して、粗面全体に厚さ1.6 μmの無電解銅めっ
き膜12を形成した(図13参照)。 〔無電解めっき液〕 EDTA 150 g/l 硫酸銅 20 g/l HCHO 30 ml/l NaOH 40 g/l α、α’−ビピリジル 80 mg/l PEG 0.1 g/l 〔無電解めっき条件〕70℃の液温度で30分
(6) The substrate was immersed in an electroless copper plating bath having the following composition to form a 1.6 μm thick electroless copper plating film 12 on the entire rough surface (see FIG. 13). [Electroless plating solution] EDTA 150 g / l Copper sulfate 20 g / l HCHO 30 ml / l NaOH 40 g / l α, α'-bipyridyl 80 mg / l PEG 0.1 g / l [Electroless plating conditions] 70 ° C. 30 minutes at liquid temperature

【0064】(7) 前記(6) で形成した無電解銅めっき膜
12上に市販の感光性ドライフィルムを張り付け、マスク
を載置して、100 mJ/cm2 で露光、0.8 %炭酸ナトリウ
ムで現像処理し、厚さ15μmのめっきレジスト3を設け
た(図14参照)。
(7) Electroless copper plating film formed in (6)
A commercially available photosensitive dry film was stuck on 12 and a mask was placed thereon, exposed at 100 mJ / cm 2 , developed with 0.8% sodium carbonate, and provided with a plating resist 3 having a thickness of 15 μm (see FIG. 14). ).

【0065】(8) ついで、レジスト非形成部分に以下の
条件で電解銅めっきを施し、厚さ15μmの電解銅めっき
膜13を形成した(図15参照)。 〔電解めっき液〕 硫酸 180 g/l 硫酸銅 80 g/l 添加剤(アトテックジャパン製、カパラシドGL) 1 ml/l 〔電解めっき条件〕 電流密度 1A/dm2 時間 30分 温度 室温
(8) Next, electrolytic copper plating was performed on the non-resist-formed portion under the following conditions to form an electrolytic copper plating film 13 having a thickness of 15 μm (see FIG. 15). [Electroplating solution] Sulfuric acid 180 g / l Copper sulfate 80 g / l Additive (captoside GL, manufactured by Atotech Japan) 1 ml / l [Electroplating conditions] Current density 1 A / dm 2 hours 30 minutes Temperature Room temperature

【0066】(9) めっきレジスト3を5%KOHで剥離
除去した後、そのめっきレジスト3下の無電解めっき膜
12を硫酸と過酸化水素の混合液でエッチング処理して溶
解除去し、無電解銅めっき膜12と電解銅めっき膜13から
なる厚さ18μmの導体回路(バイアホールを含む)5を
形成した(図16参照)。
(9) After the plating resist 3 is peeled off with 5% KOH, the electroless plating film under the plating resist 3 is removed.
12 was dissolved and removed by etching with a mixed solution of sulfuric acid and hydrogen peroxide to form a conductor circuit (including via holes) 5 having a thickness of 18 μm and comprising an electroless copper plating film 12 and an electrolytic copper plating film 13 ( See Figure 16).

【0067】(10)導体回路5を形成した基板を、硫酸銅
8g/l、硫酸ニッケル 0.6g/l、クエン酸15g/
l、次亜リン酸ナトリウム29g/l、ホウ酸31g/l、
界面活性剤 0.1g/lからなるpH=9の無電解めっき
液に浸漬し、該導体回路5の表面に厚さ3μmの銅−ニ
ッケル−リンからなる粗化層11を形成した(図17参
照)。このとき、形成した粗化層11をEPMA(蛍光X
線分析装置)で分析したところ、Cu : 98mol%、Ni :
1.5 mol%、P: 0.5mol%の組成比であった。さらに、
ホウフッ化スズ0.1mol/l、チオ尿素1.0mol/l、温度
50℃、pH=1.2 の条件でCu−Sn置換反応を行い、前記
粗化層11の表面に厚さ 0.3μmのSn層を設けた(Sn層に
ついては図示しない)。
(10) The substrate on which the conductor circuit 5 is formed is made of copper sulfate 8 g / l, nickel sulfate 0.6 g / l, citric acid 15 g / l
1, sodium hypophosphite 29 g / l, boric acid 31 g / l,
A surface roughening layer 11 made of copper-nickel-phosphorus having a thickness of 3 [mu] m was formed on the surface of the conductor circuit 5 by immersing in an electroless plating solution having a pH of 9 containing 0.1 g / l of a surfactant (see FIG. 17). ). At this time, the formed roughened layer 11 is applied to EPMA (fluorescent X
Line analyzer), Cu: 98 mol%, Ni:
The composition ratio was 1.5 mol%, P: 0.5 mol%. further,
Tin borofluoride 0.1 mol / l, thiourea 1.0 mol / l, temperature
A Cu-Sn substitution reaction was performed under the conditions of 50 ° C. and pH = 1.2 to provide a 0.3 μm thick Sn layer on the surface of the roughened layer 11 (the Sn layer is not shown).

【0068】(11)前記(2) 〜(10)の工程を繰り返すこと
により、さらに上層の導体回路を形成し、多層プリント
配線板を得た。但し、Sn置換は行わなかった(図18〜23
参照)。 (12)さらに、実施例1の(17)〜(20)までの実施して、は
んだバンプ17を有する多層プリント配線板を製造した
(図24参照)。
(11) By repeating the above steps (2) to (10), a further upper layer conductive circuit was formed, and a multilayer printed wiring board was obtained. However, Sn substitution was not performed (FIGS. 18 to 23).
reference). (12) Further, the steps (17) to (20) of Example 1 were performed to manufacture a multilayer printed wiring board having the solder bumps 17 (see FIG. 24).

【0069】(比較例2)層間樹脂絶縁層を構成する上
層用の無電解めっき用接着剤として、以下に示す成分組
成のものを使用したこと以外は、実施例2と同様にして
多層プリント配線板を製造した。クレゾールノボラック
型エポキシ樹脂(日本化薬製、分子量2500)の25%アク
リル化物を35重量部、ポリエーテルスルフォン(PE
S)12重量部、イミダゾール硬化剤(四国化成製、2E4M
Z-CN)2重量部、感光性モノマー(東亜合成製、アロニ
ックスM315 )4重量部、光開始剤(チバガイギー製、
イルガキュア I−907 )2重量部、光増感剤(日本化
薬製、DETX−S )0.2 重量部を混合し、これらの混合物
に対してエポキシ樹脂粒子(三洋化成製、ポリマーポー
ル)の平均粒径1.0 μmを7.2 重量部、平均粒径0.5 μ
mのものを3.09重量部、消泡剤(サンノプコ製、S−6
5)0.5 重量部を混合した後、さらにNMP30重量部を
添加しながら混合して粘度7Pa・sの感光性の無電解め
っき用接着剤を得た。
Comparative Example 2 Multilayer printed wiring was performed in the same manner as in Example 2 except that the adhesive having the following composition was used as the adhesive for electroless plating for the upper layer constituting the interlayer resin insulating layer. Boards were manufactured. 35% by weight of 25% acrylate of cresol novolak type epoxy resin (manufactured by Nippon Kayaku, molecular weight 2500), polyether sulfone (PE
S) 12 parts by weight, imidazole curing agent (Shikoku Chemicals, 2E4M
Z-CN) 2 parts by weight, photosensitive monomer (Toa Gosei Co., Aronix M315) 4 parts by weight, photoinitiator (Ciba Geigy,
2 parts by weight of Irgacure I-907) and 0.2 part by weight of a photosensitizer (DETX-S, manufactured by Nippon Kayaku) were mixed, and the average particle size of epoxy resin particles (Polymer Pole, manufactured by Sanyo Chemical Industries) was added to the mixture. 7.2 parts by weight of diameter 1.0 μm, average particle diameter 0.5 μ
m, 3.09 parts by weight, an antifoaming agent (manufactured by San Nopco, S-6
5) After mixing 0.5 parts by weight, the mixture was further mixed while adding 30 parts by weight of NMP to obtain a photosensitive adhesive for electroless plating having a viscosity of 7 Pa · s.

【0070】この感光性の無電解めっき用接着剤を25℃
で1か月間保存したところ、硬化してしまい、塗布する
ことができなかった。
This photosensitive electroless plating adhesive was heated at 25 ° C.
When stored for one month, the resin cured and could not be applied.

【0071】[0071]

【発明の効果】以上説明のように本発明によれば、接着
剤保存時に不可避的に発生するその接着剤の硬化を抑制
することができるので、無電解めっき用接着剤の長期保
存が可能となる。しかも、本発明によれば、粘度などの
所定の物性を確保した無電解めっき用接着剤を確実にプ
リント配線板の製造に提供できるので、その無電解めっ
き用接着剤の調製方法は量産に適したものである。
As described above, according to the present invention, it is possible to suppress the hardening of the adhesive which is inevitably generated during the storage of the adhesive, so that the adhesive for electroless plating can be stored for a long time. Become. Moreover, according to the present invention, since the adhesive for electroless plating ensuring predetermined physical properties such as viscosity can be reliably provided for the production of printed wiring boards, the method for preparing the adhesive for electroless plating is suitable for mass production. It is a thing.

【図面の簡単な説明】[Brief description of the drawings]

【図1】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 1 is a view showing each manufacturing process of a multilayer printed wiring board in an example.

【図2】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 2 is a diagram showing each manufacturing process of a multilayer printed wiring board in an example.

【図3】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 3 is a diagram showing each manufacturing process of the multilayer printed wiring board in the example.

【図4】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 4 is a view showing each manufacturing process of the multilayer printed wiring board in the example.

【図5】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 5 is a diagram showing each manufacturing process of the multilayer printed wiring board in the example.

【図6】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 6 is a diagram showing each manufacturing process of the multilayer printed wiring board in the example.

【図7】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 7 is a diagram showing each manufacturing process of the multilayer printed wiring board in the example.

【図8】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 8 is a diagram showing each manufacturing process of the multilayer printed wiring board in the example.

【図9】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 9 is a diagram showing each manufacturing process of the multilayer printed wiring board in the example.

【図10】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 10 is a diagram illustrating each manufacturing process of the multilayer printed wiring board in the example.

【図11】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 11 is a diagram showing each manufacturing process of the multilayer printed wiring board in Example.

【図12】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 12 is a diagram illustrating each manufacturing process of the multilayer printed wiring board in the example.

【図13】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 13 is a diagram illustrating each manufacturing process of the multilayer printed wiring board in the example.

【図14】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 14 is a diagram illustrating each manufacturing process of the multilayer printed wiring board in the example.

【図15】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 15 is a diagram illustrating each manufacturing process of the multilayer printed wiring board in Example.

【図16】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 16 is a diagram illustrating each manufacturing process of the multilayer printed wiring board in Example.

【図17】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 17 is a diagram illustrating each manufacturing process of the multilayer printed wiring board in Example.

【図18】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 18 is a diagram illustrating each manufacturing process of the multilayer printed wiring board in Example.

【図19】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 19 is a diagram illustrating each manufacturing process of the multilayer printed wiring board in Example.

【図20】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 20 is a diagram illustrating each manufacturing process of the multilayer printed wiring board in Example.

【図21】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 21 is a diagram illustrating each manufacturing process of the multilayer printed wiring board in Example.

【図22】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 22 is a diagram illustrating each manufacturing process of the multilayer printed wiring board in Example.

【図23】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 23 is a diagram illustrating each manufacturing process of the multilayer printed wiring board in Example.

【図24】実施例における多層プリント配線板の各製造工
程を示す図である。
FIG. 24 is a diagram illustrating each manufacturing process of the multilayer printed wiring board in Example.

【符号の説明】[Explanation of symbols]

1 基板 2 層間樹脂絶縁層 2a 絶縁剤層 2b 接着剤層 3 めっきレジスト 4 内層導体回路(内層銅パターン) 5 外層導体回路(外層銅パターン) 6 バイアホール用開口 7 バイアホール(BVH ) 8 銅箔 9 スルーホール 10 充填樹脂(樹脂充填剤) 12 無電解銅めっき膜 13 電解銅めっき膜 14 ソルダーレジスト層 15 ニッケルめっき層 16 金めっき層 17 はんだバンプ Reference Signs List 1 substrate 2 interlayer resin insulating layer 2a insulating layer 2b adhesive layer 3 plating resist 4 inner layer conductor circuit (inner layer copper pattern) 5 outer layer conductor circuit (outer layer copper pattern) 6 opening for via hole 7 via hole (BVH) 8 copper foil 9 Through hole 10 Filling resin (resin filler) 12 Electroless copper plating film 13 Electrolytic copper plating film 14 Solder resist layer 15 Nickel plating layer 16 Gold plating layer 17 Solder bump

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI H05K 3/46 H05K 3/46 E N T // H05K 3/18 3/18 E (56)参考文献 特開 平7−34048(JP,A) 特開 平8−64961(JP,A) 特開 昭61−83218(JP,A) 特開 平8−48964(JP,A) 特開 平10−310687(JP,A) (58)調査した分野(Int.Cl.7,DB名) C09J 201/00 C23C 18/20 C23C 18/26 C23C 18/31 H05K 3/38 H05K 3/46 H05K 3/18 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI H05K 3/46 H05K 3/46 E N T // H05K 3/18 3/18 E (56) References JP-A-7-34048 (JP, A) JP-A-8-64961 (JP, A) JP-A-61-83218 (JP, A) JP-A-8-48964 (JP, A) JP-A-10-310687 (JP, A) ( 58) Field surveyed (Int.Cl. 7 , DB name) C09J 201/00 C23C 18/20 C23C 18/26 C23C 18/31 H05K 3/38 H05K 3/46 H05K 3/18

Claims (6)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 予め下記の形態に調整された各組成物; .硬化処理によって酸あるいは酸化剤に難溶性とな
る、未硬化の熱硬化性樹脂を含む樹脂組成物、 .酸あるいは酸化剤に可溶性の硬化処理をされた耐熱
性樹脂粒子、熱可塑性樹脂および有機溶剤を含む樹脂組
成物、 .硬化剤組成物、 を混合可能に準備し、かつそれぞれ樹脂組成物、樹脂
組成物、硬化剤組成物に隔離した状態に保持し、無
電解めっき用接着剤として使用する直前にその隔離され
た状態にある上記各組成物, およびを混合攪拌す
るようにしてなる無電解めっき用接着剤調製用の原料組
成物。
1. Each composition prepared in advance into the following form: A resin composition containing an uncured thermosetting resin which becomes hardly soluble in an acid or an oxidizing agent by a curing treatment; A resin composition containing heat-resistant resin particles which have been subjected to a curing treatment soluble in an acid or an oxidizing agent, a thermoplastic resin and an organic solvent; A hardening agent composition is prepared so as to be mixable, and a resin composition and a resin, respectively.
Composition, curing agent composition ,
Immediately before use as an adhesive for electrolytic plating
Mix and stir each of the above compositions
Adhesive for electroless plating raw material composition for the preparation obtained by the so that.
【請求項2】 前記熱硬化性樹脂は、熱硬化性官能基の
一部を感光基で置換してなる請求項1に記載の無電解め
っき用接着剤調製用の原料組成物。
2. The raw material composition for preparing an adhesive for electroless plating according to claim 1, wherein the thermosetting resin has a part of the thermosetting functional group substituted by a photosensitive group.
【請求項3】 前記硬化剤組成物は、熱硬化性樹脂の硬
化剤および光開始剤を含む請求項1または2に記載の無
電解めっき用接着剤調製用の原料組成物。
3. The raw material composition for preparing an adhesive for electroless plating according to claim 1, wherein the curing agent composition contains a curing agent for a thermosetting resin and a photoinitiator.
【請求項4】 硬化処理によって酸あるいは酸化剤に難
溶性となる、未硬化の熱硬化性樹脂、熱可塑性樹脂、硬
化剤組成物および有機溶剤からなる複合樹脂マトリック
ス中に、酸あるいは酸化剤に可溶性の硬化処理された耐
熱性樹脂粒子を分散してなる無電解めっき用接着剤を調
製するに当たり、 .硬化処理によって酸あるいは酸化剤に難溶性とな
る、未硬化の熱硬化性樹脂を含む樹脂組成物、 .酸あるいは酸化剤に可溶性の硬化処理をされた耐熱
性樹脂粒子、熱可塑性樹脂および有機溶剤を含む樹脂組
成物、 .硬化剤組成物、 を、それぞれ樹脂組成物、樹脂組成物、硬化組成物
隔離保存し、無電解めっき用接着剤として使用する
直前に、その隔離された状態にある上記各組成物を混合
攪拌することを特徴とする無電解めっき用接着剤の調製
方法。
4. An acid or oxidizing agent in a composite resin matrix comprising an uncured thermosetting resin, a thermoplastic resin, a curing agent composition and an organic solvent, which becomes hardly soluble in an acid or an oxidizing agent by a curing treatment. In preparing an adhesive for electroless plating in which soluble hardened heat-resistant resin particles are dispersed, A resin composition containing an uncured thermosetting resin which becomes hardly soluble in an acid or an oxidizing agent by a curing treatment; A resin composition containing heat-resistant resin particles which have been subjected to a curing treatment soluble in an acid or an oxidizing agent, a thermoplastic resin and an organic solvent; A curing agent composition, a resin composition, a resin composition, and a curing composition , respectively .
A method for preparing an adhesive for electroless plating, comprising mixing and stirring each of the above-mentioned isolated compositions immediately before use as an adhesive for electroless plating.
【請求項5】 前記熱硬化性樹脂は、熱硬化性官能基の
一部を感光基で置換してなる請求項4に記載の無電解め
っき用接着剤の調製方法。
5. The electroless resin according to claim 4, wherein the thermosetting resin has a part of the thermosetting functional group substituted by a photosensitive group.
Preparation of adhesive for plating .
【請求項6】 前記硬化剤組成物は、熱硬化性樹脂の硬
化剤および光開始剤を含む請求項4または5に記載の調
製方法。
6. The preparation method according to claim 4, wherein the curing agent composition contains a curing agent for a thermosetting resin and a photoinitiator.
JP10442398A 1997-06-12 1998-04-15 Raw material composition for preparing adhesive for electroless plating and method for preparing adhesive for electroless plating Expired - Fee Related JP2996945B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10442398A JP2996945B2 (en) 1997-06-12 1998-04-15 Raw material composition for preparing adhesive for electroless plating and method for preparing adhesive for electroless plating

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP15520197 1997-06-12
JP9-155201 1997-06-12
JP10442398A JP2996945B2 (en) 1997-06-12 1998-04-15 Raw material composition for preparing adhesive for electroless plating and method for preparing adhesive for electroless plating

Publications (2)

Publication Number Publication Date
JPH1161089A JPH1161089A (en) 1999-03-05
JP2996945B2 true JP2996945B2 (en) 2000-01-11

Family

ID=26444903

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10442398A Expired - Fee Related JP2996945B2 (en) 1997-06-12 1998-04-15 Raw material composition for preparing adhesive for electroless plating and method for preparing adhesive for electroless plating

Country Status (1)

Country Link
JP (1) JP2996945B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000327934A (en) * 1999-03-16 2000-11-28 Ibiden Co Ltd Resin composition for forming roughened surface and printed circuit board

Also Published As

Publication number Publication date
JPH1161089A (en) 1999-03-05

Similar Documents

Publication Publication Date Title
US6248428B1 (en) Adhesive for electroless plating, raw material composition for preparing adhesive for electroless plating and printed wiring board
JP2000165046A (en) Multilayer built-up wiring board
JP3296995B2 (en) Raw material composition for preparing interlayer resin insulator and method for preparing interlayer resin insulator
JPH1098271A (en) Interlayer insulating agent and multilayered printed wiring board
JPH10256724A (en) Multilayer printed circuit board
JPH1117345A (en) Multilayer printed wiring board
JP2996945B2 (en) Raw material composition for preparing adhesive for electroless plating and method for preparing adhesive for electroless plating
JPH10126040A (en) Manufacture of printed wiring board
JPH10247783A (en) Multilayer printed wiring board and manufacture thereof
JP3781395B2 (en) Raw material composition for preparing electroless plating adhesive and electroless plating adhesive
JP2000133941A (en) Multilayer build-up wiring board
JPH10247784A (en) Multilayer printed wiring board and manufacture thereof
JP3733204B2 (en) Raw material composition for preparing resin filler and method for preparing resin filler
JP4137240B2 (en) Method for manufacturing printed wiring board
JP2000349427A (en) Printed wiring board, printed wiring board for surface mounting, and surface-mount wiring board
JP2000101246A (en) Multilayer built-up wiring board and its manufacture
JP4127440B2 (en) Multilayer build-up wiring board
JP3224211B2 (en) Solder resist composition and printed wiring board
JP2000196227A (en) Manufacture of printed wiring board
JP2000101243A (en) Multilayer built-up wiring board and its manufacture
JPH116074A (en) Raw material composition for preparation of liquid plating resist and preparation of liquid plating resist
JPH10242639A (en) Multilyer printed wiring board and its manufacturing method
JP2000077846A (en) Manufacture of printed wiring board
JP3459767B2 (en) Printed wiring board
JP2000058710A (en) Printed wiring board

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 8

Free format text: PAYMENT UNTIL: 20071029

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20081029

Year of fee payment: 9

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 9

Free format text: PAYMENT UNTIL: 20081029

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091029

Year of fee payment: 10

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 10

Free format text: PAYMENT UNTIL: 20091029

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 11

Free format text: PAYMENT UNTIL: 20101029

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 12

Free format text: PAYMENT UNTIL: 20111029

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111029

Year of fee payment: 12

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 13

Free format text: PAYMENT UNTIL: 20121029

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131029

Year of fee payment: 14

LAPS Cancellation because of no payment of annual fees