JP3010102B2 - Steam drying equipment - Google Patents
Steam drying equipmentInfo
- Publication number
- JP3010102B2 JP3010102B2 JP4317931A JP31793192A JP3010102B2 JP 3010102 B2 JP3010102 B2 JP 3010102B2 JP 4317931 A JP4317931 A JP 4317931A JP 31793192 A JP31793192 A JP 31793192A JP 3010102 B2 JP3010102 B2 JP 3010102B2
- Authority
- JP
- Japan
- Prior art keywords
- steam
- tank
- medium
- drying
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は蒸気乾燥装置に関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a steam dryer.
【0002】[0002]
【従来の技術】従来の此種装置は図2に示すように、蒸
気乾燥槽Aの下部に高揮発性媒体Bを貯留させ、ヒータ
Cで加熱して媒体蒸気を発生させ、ドレン受皿Dの上方
に位置したフックEで保持した被乾燥物Fに付着してい
る水分を、媒体蒸気に接触させることにより媒体蒸気と
置換し、且つ加熱により乾燥させるものであった。な
お、図2中、Gは冷却コイル、Hは受皿である。BACKGROUND OF THE INVENTION Conventional此種device as shown in FIG. 2, to store the highly volatile medium B at the bottom of the vapor drying tank A, to generate vapor medium is heated by the heater C, the drain pan D the moisture adhering to the article to be dried F held by the hook E located upward, and replaced with medium vapor by contacting the vapor medium was and what is dried by pressurized heat. What
In FIG. 2 , G is a cooling coil, and H is a saucer.
【0003】[0003]
【発明が解決しようとする課題】前記従来の装置にあっ
ては、蒸気乾燥槽A中の被乾燥物Fの水分だけではな
く、保持している搬出入機構であるフックに付着してい
る水分も、蒸気雰囲気中で媒体蒸気によって置換され
る。フックと被乾燥物の表面積を比較すると、フックの
形状によっては、被乾燥物よりもこちらの方が大きい場
合があり、その場合には蒸気乾燥槽内に持込む水分量が
被乾燥物自体よりも多くなってしまう。In the above-mentioned conventional apparatus, not only the water content of the material F to be dried in the steam drying tank A is not limited to the water content.
In addition , the moisture adhering to the hook, which is the carrying in / out mechanism, is also replaced by the medium vapor in the vapor atmosphere. Comparing the surface area of the hook and the object to be dried , it may be larger depending on the shape of the hook than the object to be dried.
There are cases, in which case the amount of water bringing the vapor drying tank becomes larger than the material to be dried itself.
【0004】この状態において媒体蒸気で水置換する
と、余分な水を処理することになり、媒体液の劣化が生
じ、媒体蒸気の質が処理する度に悪くなり、精密乾燥に
バラツキが生ずることになる。そこで、本発明において
は被乾燥物のみを蒸気乾燥槽内に置いて蒸気乾燥すると
共に、蒸気乾燥槽を処理工程に応じて加熱あるいは冷却
し、かつ媒体蒸気の吐出量を調整して媒体蒸気の消耗を
少なくし、且つ媒体液の劣化を防止することができる装
置を提供しようとするものである。[0004] <br/> and you water displacement in vapor medium in this state, the handle excess water, cause deterioration of the liquid medium, deteriorates each time the processing quality of the media steam, fine dried <br/> variation is that occurring. Therefore, in the present invention, only the material to be dried is placed in a steam drying tank and steam dried , and the steam drying tank is heated or cooled in accordance with a processing step.
And, and in which to reduce the consumption of vapor medium by adjusting the discharge amount of vapor medium, and it seeks to provide an apparatus which can prevent deterioration of the liquid medium.
【0005】[0005]
【課題を解決するための手段】本発明においては前記課
題を解決するために、被乾燥物のみを受台上に載置する
蓋を有する蒸気乾燥槽と、高揮発性媒体を加熱して蒸気
媒体を発生させる蒸気発生槽と、蒸気発生槽と蒸気乾燥
槽とを連結する媒体用可変バルブを有する蒸気パイプと
から成る蒸気乾燥装置において、蒸気乾燥槽の外周にジ
ャケットを設け、蒸気媒体による乾燥工程中にジャケッ
ト内に温水を流す温水タンクを接続すると共に、乾燥工
程終了時にジャケットに冷却水を流す冷却水供給管及び
この冷却水の排出を行う冷却水排出管とをそれぞれ該ジ
ャケットに接続して蒸気乾燥装置を構成した。In order to solve the problem in the present invention SUMMARY OF THE INVENTION, by heating the vapor drying tank having a lid for placing only the material to be dried on the pedestal, a highly volatile vapor medium In a steam drying apparatus comprising a steam generating tank for generating a medium, and a steam pipe having a variable valve for a medium connecting the steam generating tank and the steam drying tank, a jacket is provided on an outer periphery of the steam drying tank , and drying by a steam medium is performed. with connecting hot water tank to flow hot water in the jacket during the process, the cooling water supply pipe supplying a cooling water to the jacket during the drying process is completed and
And a cooling water discharge pipe for discharging the cooling water.
The steam drying device was constructed by connecting to a racket .
【0006】又、上記蒸気乾燥装置において、蒸気乾燥
槽に、蒸気媒体による乾燥工程終了後に冷却冷媒ガスを
供給する気体供給管を接続する様にした。 In the above-mentioned steam drying apparatus, a gas supply pipe for supplying a cooling refrigerant gas after the drying step with a steam medium is completed is connected to the steam drying tank .
【0007】更に、同じく上記蒸気乾燥装置において、
蒸気乾燥槽に液化した媒体を貯溜する凝縮液タンクを接
続し、該凝縮液タンクを、ヒータが設けられている蒸気
発生槽に接続する様にした。 [0007] Further, in the steam drying apparatus,
A condensed liquid tank for storing the liquefied medium was connected to the steam drying tank, and the condensed liquid tank was connected to a steam generating tank provided with a heater .
【0008】[0008]
【作用】本発明は前記のように構成したもので、蒸気乾
燥槽の外周に設けたジャケット内に温水タンクから温水
を流して加熱し、受台上に被乾燥物のみを載置した後に
蒸気発生槽で発生させた蒸気媒体を、媒体用可変バルブ
で供給量を調整して被乾燥物に吹付け、被乾燥物の表面
に付着している水分と置換させて被乾燥物を乾燥させ
る。The present invention is constructed as described above,
Warm water from a warm water tank is placed in a jacket provided on the outer periphery of the drying tank.
After heating and placing only the material to be dried on the receiving stand
A variable valve for the medium
Adjust the supply amount with and spray on the material to be dried.
Dry the object to be dried by displacing moisture adhering toLet
You.
【0009】次に、蒸気媒体の供給を停止し、気体供給
管から冷却冷媒ガスを蒸気乾燥槽内に導入して蒸気媒体
を冷却して液体にし、凝縮液タンクに流下させる。この
際、蒸気乾燥槽内を大気圧に戻す。そして、被乾燥物の
水分の置換が終り、乾燥状態になったとき、ジャケット
内の温水を温水タンクに戻し、冷却水供給管から冷却水
をジャケットに送ってジャケット及び蒸気乾燥槽を冷却
する。Next, the supply of the vapor medium is stopped, and a cooling refrigerant gas is introduced from the gas supply pipe into the vapor drying tank to cool the vapor medium to a liquid and flow down to the condensate tank. At this time, the inside of the steam drying tank is returned to the atmospheric pressure. Then, when the replacement of the water content of the object to be dried is completed and the dried state is obtained, the warm water in the jacket is returned to the warm water tank, and the cooling water is sent from the cooling water supply pipe to the jacket to cool the jacket and the steam drying tank.
【0010】次に、蓋を開いて水分が付着していない搬
送機構で被乾燥物を搬出する。この時、凝縮液タンクか
ら高揮発性媒体を蒸気発生槽に送る。[0010] Next, the lid is opened, and the object to be dried is carried out by a transport mechanism to which moisture does not adhere. At this time, the highly volatile medium is sent from the condensate tank to the steam generation tank.
【0011】[0011]
【実施例】本発明の実施例を図1に基いて詳細に説明す
る。蒸気乾燥槽1は蓋2で密閉できるようになってお
り、底壁3は傾斜面で形成され、凝縮液バルブ4を有す
る凝縮液排出管5で凝縮液タンク6と接続されている。
蒸気乾燥槽1内には被乾燥物7を受ける受台8を受皿9
の上方に設け、受皿9は中間タンク10及び排液バルブ
11を介して排液タンク12に接続されている。一方、
蒸気発生槽13には底壁外にヒータ14が設けられてお
り、高揮発性媒体15を蒸発させて媒体蒸気16を発生
させられる様になっている。又、媒体用可変バルブ17
を有する蒸気パイプ18で蒸気乾燥槽1と蒸気発生槽1
3とは接続されており、被乾燥物7に媒体蒸気16を吹
付けるようになっている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail with reference to FIG. The steam drying tank 1 can be hermetically closed by a lid 2, the bottom wall 3 is formed with an inclined surface, and is connected to a condensate tank 6 by a condensate discharge pipe 5 having a condensate valve 4.
In the steam drying tank 1, a receiving stand 8 for receiving the object 7 to be dried is placed in a receiving tray 9.
, The receiving tray 9 is connected to a drain tank 12 via an intermediate tank 10 and a drain valve 11. On the other hand ,
The steam generating tank 13 is provided with a heater 14 outside the bottom wall .
Ri, generates a vapor medium 16 by evaporation of the highly volatile media 15
It is made to be made. In addition, the medium variable valve 17
Steam steam pipe 18 having a drying tank 1 and the steam generator tank 1
3 are connected to the, so that the blowing medium vapor 16 in the material to be dried 7.
【0012】又、蒸気発生槽13は前記凝縮液タンク6
とバルブ19及びポンプ20を介して導管21で接続さ
れており、更に、この蒸気発生槽13には新しい高揮発
性媒体15を供給するバルブ22を有する媒体供給管2
3及び安全弁24,自動圧力調整弁25を有する排出管
26がそれぞれ設けられている。又、蒸気乾燥槽1の外
周にはジャケット27が設けられており、このジャケッ
ト27の下部には温水用バルブ28と温水用ポンプ29
を有する還流用接続管30が取付けられ、温水タンク3
1と接続されている。温水タンク31は内部にヒータ3
2を設けて温水タンク31内の温水33を加熱するよう
になっている。この温水タンク31は温水供給接続管3
4によってジャケット27の上部と連結している。前記
温水供給接続管34の途中には温水用ポンプ35と温水
用バルブ36が設けられている。更に温水タンク31に
は大気に連通するエアー供給用バルブ37が設けられて
いる。The steam generating tank 13 is provided with the condensed liquid tank 6.
Connection of at conduit 21 via a valve 19 and a pump 20 and
It is further new highly volatile in the steam generating vessel 13
Supply pipe 2 having valve 22 for supplying conductive medium 15
3 and the safety valve 24, the discharge pipe 26 are respectively provided with an automatic pressure control valve 25. Further, the vapor drying tank on the outer circumference of the 1 and the jacket 27 is provided, hot water valve 28 and hot water pump 29 to the bottom of this di catcher Kek <br/> DOO 27
The reflux connection tube 30 having attached, the hot water tank 3
It is connected 1. The hot water tank 31 has a heater 3 inside.
2 is provided to heat the hot water 33 in the hot water tank 31. The hot water tank 31 is connected to the hot water supply connection pipe 3.
It is connected to the upper portion of the jacket 27 by four. In the middle of the <br/> hot water supply connection pipe 34 is heated pump 35 and hot water valve 36 is kicked set. In addition to hot water tank 31
Air supply valve 37 communicating with the atmosphere is provided.
【0013】又、ジャケット27の上部には冷却水38
を供給する冷却用バルブ39を有する冷却水供給管40
が連結されている。更に、前記還流用接続管30のジャ
ケット27寄りの部分からは冷却水排出管41が分岐
し、この冷却水排出管分41には冷却水排出用バルブ4
2及び冷却水排出用ポンプ43が設けてられている。A cooling water 38 is provided above the jacket 27.
Water supply pipe 40 having a cooling valve 39 for supplying water
Are connected. Moreover, the the reflux connection pipe 30 Ja
From part of socket 27 toward the cooling water discharge pipe 41 is branched, the cooling water discharge valve 4 in the cooling water discharge pipe min 41
2 and a cooling water discharge pump 43 is not provided.
【0014】又、蒸気乾燥槽1の上部には気体供給管4
4が接続されており、ガス用バルブ45を設けて冷却用
冷媒ガス46を供給すると共に、エアー用バルブ47を
有するエアー供給管48をこの気体供給管44に接続し
てクリーンエアー49を蒸気乾燥槽1内に供給できるよ
うになっている。又、蒸気乾燥槽1の上部には排気管5
0が接続されており、この排気管50の途中に自動圧力
調整弁51と安全弁52とが設けられている。A gas supply pipe 4 is provided above the steam drying tank 1.
4 is connected, supplies a cooling refrigerant gas 46 provided with a gas valve 45, vapor drying the clean air 49 and connect the air supply pipe 48 having an air valve 47 to the gas supply pipe 44 It can be supplied into the tank 1 . An exhaust pipe 5 is provided above the steam drying tank 1.
0 is connected , and an automatic pressure regulating valve 51 and a safety valve 52 are provided in the exhaust pipe 50 .
【0015】本実施例は前記のように構成したもので、
蒸気乾燥槽1内にはエアー用バルブ47を開いてクリー
ンエアー49が導入されている。又、温水用バルブ28
を開いて、温水タンク31からジャケット27へ温水3
3が送られ、蒸気乾燥槽1は 加熱されている。被乾燥物
7は搬送機構(図示省略)でよって送られてくるが、蓋
2を移動機構(図示省略)で開いた後に、受台8上に載
置し、搬送機構は速やかに外部に移動し、移動機構の操
作にて蓋2で蒸気乾燥槽1を密閉する。This embodiment is constructed as described above.
A clean air 49 is introduced into the steam drying tank 1 by opening an air valve 47. Also, the hot water valve 28
And open the warm water 3 from the warm water tank 31 to the jacket 27.
3, and the steam drying tank 1 is heated. The article to be dried 7 is sent by a transport mechanism (not shown). After the lid 2 is opened by a moving mechanism (not shown), the dried article 7 is placed on the receiving table 8 and the transport mechanism is quickly moved to the outside. Then, the steam drying tank 1 is sealed with the lid 2 by operating the moving mechanism.
【0016】一方、蒸気発生槽13内の高揮発性媒体1
5は、ヒーター14の加熱で蒸気媒体16となる。そし
て、媒体用可変バルブ17を開き、蒸気媒体16の供給
量を調整して蒸気パイプ18から蒸気乾燥槽1内の被乾
燥物7にこの蒸気媒体16を吹付ける。[0016] On the other hand, highly volatile medium 1 in the vapor generating bath 13
5 becomes a vapor medium 16 by heating of the heater 14. Then, open the medium for the variable valve 17, blowing the steam medium 16 by adjusting the supply amount of the steam medium 16 from the steam pipe 18 to the material to be dried 7 of vapor drying tank 1.
【0017】蒸気媒体16は被乾燥物7の表面で凝縮さ
れ、被乾燥物7に付着している水分53が置換される。
置換された凝縮液と水分53とは受皿9に流下し、中間
タンク10に溜る。被乾燥物7の水分53の置換が終わ
ると蒸気乾燥槽1内の圧力が高くなり、自動圧力調整弁
51が開き、媒体蒸気16は放出されるが、自動圧力調
整弁51が作動する直前に媒体用可変バルブ17が閉
じ、媒体蒸気16の流入は遮断される。この時、蒸気発
生槽13のヒータ14は蒸気発生槽13の内部圧力が規
定以上になるとその作動を停止する。The vapor medium 16 is condensed on the surface of the object 7 to be dried, and the water 53 adhering to the object 7 is replaced.
The displaced condensate and water 53 flow down to the tray 9 and accumulate in the intermediate tank 10. When the replacement of the moisture 53 in the dried object 7 is completed, the pressure in the steam drying tank 1 increases, the automatic pressure regulating valve 51 opens, and the medium vapor 16 is released, but immediately before the automatic pressure regulating valve 51 operates. The medium variable valve 17 is closed, and the flow of the medium vapor 16 is shut off. At this time, the heater 14 of the steam generator vessel 13 stops its operation when the internal pressure of the steam generator vessel 13 becomes equal to or higher than prescribed.
【0018】次に、ガス用バルブ45を開き、冷却冷媒
ガス46を蒸気乾燥槽1内に一定時間供給すると蒸気乾
燥槽1内の媒体蒸気16は冷却され、液状になり、凝縮
液バルブ4を開くと、凝縮液タンク6に送られる。又、
蒸気乾燥槽1内の蒸気媒体16が凝縮されると、前記エ
アー用バルブ47が開き、蒸気乾燥槽1内は大気圧に戻
る。尚、この工程で被乾燥物7の水分53の置換が終わ
り乾燥状態になった時、温水用バルブ36が閉まり、温
水用ポンプ35が停止し、ジャケット27への温水33
の供給が停止される。一方、エアー供給用バルブ37が
開き、温水用バルブ28は開き、温水用ポンプ29は駆
動されているので、ジャケット27内の温水33は温水
タンク31に戻される。Next, when the gas valve 45 is opened and the cooling refrigerant gas 46 is supplied into the steam drying tank 1 for a certain period of time, the medium vapor 16 in the steam drying tank 1 is cooled and turned into a liquid state, and the condensed liquid valve 4 is opened. When opened, it is sent to the condensate tank 6. or,
When the vapor medium 16 in the steam drying tank 1 is condensed, the air valve 47 opens, and the inside of the steam drying tank 1 returns to the atmospheric pressure. In this step , when the replacement of the water 53 of the material to be dried 7 is completed and the drying state is reached, the hot water valve 36 is closed, the hot water pump 35 is stopped, and the hot water 33
Supply of Ru is stopped. On the other hand, it opens the air supply valve 37 is opened hot water valve 28, since the hot water pump 29 is driven, the hot water 33 in the di jacket 27 is returned to the hot water tank 31.
【0019】次に、温水用バルブ28を閉じ温水用ポン
プ29を停止させた後に、冷却用バルブ39と冷却水排
出用バルブ42とを共に開き、冷却水排出用ポンプ43
を駆動して冷却水供給管40からジャケット27内に冷
却水を送り、蒸気乾燥槽1を冷却する。そして、この状
態において前記したようにエアー用バルブ47を開いて
蒸気乾燥槽1内を大気圧に戻す。次に、蒸気乾燥槽1内
の蓋2を開いて水分の付いていない搬送機構で乾燥され
た被乾燥物7を蒸気乾燥槽1の外部に搬出して乾燥作業
は終了する。尚、この時、バルブ19を開きポンプ20
を駆動して凝縮液タンク6から高揮発性媒体15を蒸気
発生槽13に供給し、供給作業が終わるとポンプ20を
停止し、バルブ19を閉じる。Next, after closing the hot water valve 28 and stopping the hot water pump 29, the cooling valve 39 and the cooling water
The outlet valve 42 is opened together with the cooling water discharge pump 43.
Is driven to send cooling water from the cooling water supply pipe 40 into the jacket 27 to cool the steam drying tank 1. Then, to return to atmospheric pressure the vapor drying tank 1 by opening the air valve 47 as described above in this state. Next, the lid 2 in the steam drying tank 1 is opened, and the drying target 7 dried by the transport mechanism without moisture is carried out to the outside of the steam drying tank 1 to perform a drying operation.
It comes to an end. At this time, the valve 19 is opened and the pump 20 is opened.
Supplying high volatile media 15 to the steam generator vessel 13 from the condensate tank 6 by driving a pump 20 stops the supply operation is terminated, closing the valve 19.
【0020】又、被乾燥物7が蒸気乾燥槽1から搬出さ
れると、ジャケット27内は温水33を流すために、冷
却用バルブ39が閉じられる。その後、ジヤケット27
内の冷却水38がなくなると冷却水排出用バルブ42が
閉まり、冷却水排出用ポンプ43が停止する。又エアー
供給用バルブ37が閉る。次に、温水用バルブ28,3
6を開き、温水用ポンプ29,35を駆動して温水タン
ク31内の温水33をジャケット27に流す。この状態
になると搬送機構により水分53の付いた被乾燥物7が
蒸気乾燥槽1内の受台8上に載置され、蒸気乾燥が繰返
される。[0020] Also, the material to be dried 7 is unloaded from the vapor drying tank 1, the jacket 27 to flow hot water 33, Ru cooling valve 39 is closed. After that , the jacket 27
When the cooling water 38 in the inside runs out, the cooling water discharge valve 42 closes, and the cooling water discharge pump 43 stops. Further, the air supply valve 37 is closed. Next, the hot water valves 28, 3
6 is opened, and the hot water pumps 29 and 35 are driven to flow the hot water 33 in the hot water tank 31 through the jacket 27. In this state, the dried object 7 with the moisture 53 is placed on the receiving table 8 in the steam drying tank 1 by the transport mechanism, and the steam drying is repeated.
【0021】[0021]
【発明の効果】本発明は前記のような構成、作用を有
し、媒体用可変バルブにより蒸気乾燥槽への蒸気媒体の
供給量を調整するので、高揮発性媒体の消耗が少なくな
る、又、高揮発性媒体の劣化が減少するので乾燥のバラ
ツキがなくなる、更に、蒸気乾燥槽のジャケットに温水
を流して加熱し、冷却水を流して冷却するので、乾燥工
程及び蒸気媒体の液化を効率的かつ確実に行うことがで
きる、等の効果を有し、極めて実用的なものである。 The present invention has the above-described configuration and operation.
And, since adjusting the supply amount of the steam medium to the steam drying tank by the medium for a variable valve, wasting is reduced highly volatile medium, also drying of the dispersion is eliminated because degradation of highly volatile medium is reduced, Furthermore , since warm water is flowed into the jacket of the steam drying tank to heat it, and cooling water is flown to cool it , the drying step and the liquefaction of the steam medium can be performed efficiently and reliably.
It is extremely practical, having such effects as
【図1】本発明に係る蒸気乾燥装置の一実施例の配置を
示す配置図。FIG. 1 is a layout diagram showing the layout of an embodiment of a steam drying apparatus according to the present invention.
【図2】従来装置の断面図。FIG. 2 is a sectional view of a conventional device.
1 蒸気乾燥槽 2 蓋 3 底壁 4 凝縮液バルブ 5 凝縮液排出管 6 凝縮液タンク 7 被乾燥物 8 受台 9 受皿 10 中間タンク 11 排液バルブ 12 排液タンク 13 蒸気発生槽 14 ヒータ 15 高揮発生媒体 16 媒体蒸気 17 媒体用可変バルブ 18 蒸気パイプ 19 バルブ 20 ポンプ 21 導管 22 バルブ 23 媒体供給管 24 安全弁 25 自動圧力調整弁 26 排出管 27 ジャケット 28 温水用バルブ 29 温水用ポンプ 30 還流用接続管 31 温水タンク 32 ヒータ 33 温水 34 温水供給接続管 35 温水用ポンプ 36 温水用バルブ 37 エアー供給用バルブ 38 冷却水 39 冷却用バルブ 40 冷却水供給管 41 冷却水排出管 42 冷却水排出バルブ 43 冷却水排出ポンプ 44 気体供給管 45 ガス用バルブ 46 冷却冷媒ガス 47 エアー用バルブ 48 エアー供給管 49 クリーンエアー 50 排気管 51 自動圧力調整弁 52 安全弁 53 水分DESCRIPTION OF SYMBOLS 1 Steam drying tank 2 Lid 3 Bottom wall 4 Condensate valve 5 Condensate discharge pipe 6 Condensate tank 7 Dried material 8 Receiving stand 9 Receiving tray 10 Intermediate tank 11 Drain valve 12 Drain tank 13 Steam generation tank 14 Heater 15 High volatile raw medium 16 vapor medium 17 medium variable valve 18 steam pipe 19 valve 20 pump 21 conduit 22 valve 23 medium supply pipe 24 safety valve 25 automatic pressure regulating valve 26 discharge pipe 27 a jacket 28 for the hot water valve 29 hot water pump 30 the reflux Connection pipe 31 Hot water tank 32 Heater 33 Hot water 34 Hot water supply connection pipe 35 Hot water pump 36 Hot water valve 37 Air supply valve 38 Cooling water 39 Cooling valve 40 Cooling water supply pipe 41 Cooling water discharge pipe 42 Cooling water discharge valve 43 cooling water discharge pump 44 the gas supply tube 45 gas valve 46 cooled Medium gas 47 Air valve 48 air supply pipe 49 clean air 50 exhaust pipe 51 automatic pressure regulating valve 52 safety valve 53 water
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭61−138582(JP,A) 特開 平3−2389(JP,A) 特開 平3−258380(JP,A) 特開 平4−251929(JP,A) 特開 平3−89984(JP,A) 特開 平2−253893(JP,A) 特開 平3−98683(JP,A) 実開 平5−48334(JP,U) (58)調査した分野(Int.Cl.7,DB名) B08B 3/04 - 3/12 C23G 5/04 H01L 21/304 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-61-138582 (JP, A) JP-A-3-2389 (JP, A) JP-A-3-258380 (JP, A) JP-A-4- 251929 (JP, A) JP-A-3-89984 (JP, A) JP-A-2-253893 (JP, A) JP-A-3-98683 (JP, A) JP-A-5-48334 (JP, U) (58) Fields surveyed (Int.Cl. 7 , DB name) B08B 3/04-3/12 C23G 5/04 H01L 21/304
Claims (3)
する蒸気乾燥槽と、高揮発性媒体を加熱して蒸気媒体を
発生させる蒸気発生槽と、蒸気発生槽と蒸気乾燥槽とを
連結する媒体用可変バルブを有する蒸気パイプとから成
る蒸気乾燥装置において、蒸気乾燥槽の外周にジャケッ
トを設け、蒸気媒体による乾燥工程中にジャケット内に
温水を流す温水タンクを接続すると共に、乾燥工程終了
時にジャケットに冷却水を流す冷却水供給管及びこの冷
却水の排出を行う冷却水排出管とをそれぞれ該ジャケッ
トに接続したことを特徴とする蒸気乾燥装置。1. A steam drying tank having a lid for placing only the material to be dried on the pedestal, and the steam generator tank to generate steam medium by heating the highly volatile media, vapor generating bath and vapor drying tank in the steam drying apparatus comprising a steam pipe with a variable valve medium connecting the door, the jacket provided on the outer periphery of the vapor drying tank, the connecting hot water tank to flow hot water in the jacket during the drying process by steam medium, cooling water supply pipe and the cold flowing cooling water to the jacket during the drying process is completed
Connect the cooling water discharge pipe for discharging
Vapor drying apparatus, characterized in that connected to and.
終了後に冷却冷媒ガスを供給する気体供給管を接続した
ことを特徴とする請求項1記載の蒸気乾燥装置。2. The steam drying apparatus according to claim 1, wherein a gas supply pipe for supplying a cooling refrigerant gas after a drying step using a steam medium is completed is connected to the steam drying tank.
縮液タンクを接続し、該凝縮液タンクを、ヒータが設け
られている蒸気発生槽に接続したことを特徴とする請求
項1記載の蒸気乾燥装置。3. A condensate tank for storing a liquefied medium in a steam drying tank, wherein the condensate tank is provided with a heater.
Steam drying apparatus according to claim 1, characterized in that connected to the steam generator tank being.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4317931A JP3010102B2 (en) | 1992-11-04 | 1992-11-04 | Steam drying equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4317931A JP3010102B2 (en) | 1992-11-04 | 1992-11-04 | Steam drying equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06142624A JPH06142624A (en) | 1994-05-24 |
| JP3010102B2 true JP3010102B2 (en) | 2000-02-14 |
Family
ID=18093631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4317931A Expired - Fee Related JP3010102B2 (en) | 1992-11-04 | 1992-11-04 | Steam drying equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3010102B2 (en) |
-
1992
- 1992-11-04 JP JP4317931A patent/JP3010102B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06142624A (en) | 1994-05-24 |
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|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |