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JP3010456B2 - Orientation treatment method and orientation treatment device - Google Patents
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JP3010456B2 - Orientation treatment method and orientation treatment device - Google Patents

Orientation treatment method and orientation treatment device

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Publication number
JP3010456B2
JP3010456B2 JP4695692A JP4695692A JP3010456B2 JP 3010456 B2 JP3010456 B2 JP 3010456B2 JP 4695692 A JP4695692 A JP 4695692A JP 4695692 A JP4695692 A JP 4695692A JP 3010456 B2 JP3010456 B2 JP 3010456B2
Authority
JP
Japan
Prior art keywords
rubbing
liquid crystal
alignment
alignment film
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP4695692A
Other languages
Japanese (ja)
Other versions
JPH05249466A (en
Inventor
雅夫 山本
成広 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP4695692A priority Critical patent/JP3010456B2/en
Publication of JPH05249466A publication Critical patent/JPH05249466A/en
Application granted granted Critical
Publication of JP3010456B2 publication Critical patent/JP3010456B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、液晶表示素子の製造時
における配向処理法及び配向処理装置に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an alignment processing method and an alignment processing apparatus for manufacturing a liquid crystal display device.

【0002】[0002]

【従来の技術】液晶表示素子では、一般的にはインジウ
ム・錫酸化物よりなる透明電極層(以下ITO層と略
す)を設けたガラス基板等の液晶支持板上に例えば、ポ
リイミドのような高分子樹脂の塗膜を設け、その直後に
有機質繊維からなるバフ布を巻き付けたローラを用いて
特定の方向に擦るというラビング方式が用いられる。図
3は、この配向処理を行なう装置の概略を示す図であ
る。
2. Description of the Related Art In a liquid crystal display device, a transparent electrode layer (hereinafter abbreviated as an ITO layer) generally made of indium / tin oxide is provided on a liquid crystal support plate such as a glass substrate or the like. A rubbing method is used in which a coating film of a molecular resin is provided, and immediately after that, the film is rubbed in a specific direction using a roller around which a buff cloth made of organic fibers is wound. FIG. 3 is a diagram schematically showing an apparatus for performing this alignment treatment.

【0003】従来の配向処理装置には、移動可能なラビ
ングステージ11が設けられている。そのラビングステ
ージ11の上にポリイミド等の配向膜14及びITO層
13が設けられたガラス基板12を配置する。その後、
有機質繊維からなるラビングクロス16を巻き付けたラ
ビングローラ15を回転させ、ラビングローラ15とラ
ビングステージ11を相対的に移動させながら、配向膜
14表面を擦ることによってラビング処理を施す。この
ラビング処理によって配向膜14の高分子鎖が一定方向
に並んだ状態となり、このように完成した状態を有する
配向膜14によって、液晶分子を規則正しく配向させる
ことが可能になる。
A conventional rubbing stage 11 is provided in a conventional alignment processing apparatus. On the rubbing stage 11, a glass substrate 12 provided with an orientation film 14 of polyimide or the like and an ITO layer 13 is arranged. afterwards,
A rubbing process is performed by rotating a rubbing roller 15 around which a rubbing cloth 16 made of organic fibers is wound and rubbing the surface of the alignment film 14 while relatively moving the rubbing roller 15 and the rubbing stage 11. By this rubbing treatment, the polymer chains of the alignment film 14 are aligned in a certain direction, and the alignment film 14 having such a completed state enables the liquid crystal molecules to be regularly aligned.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、以上の
ような方法では、ラビング処理によって配向膜14の高
分子鎖を規則正しく配向させるには、ラビングローラ1
5を高速で回転させなければならず、このためラビング
時に異物等が多量に発生したり、配向膜14あるいはラ
ビングクロス16が帯電し、それらの表面に異物等が付
着しラビング筋等の欠陥を生じさせ、液晶表示素子の表
示外観が損なわれたり、液晶表示素子の信頼性を低下さ
せるという課題がある。
However, in the above-described method, the rubbing treatment is required to regularly align the polymer chains of the alignment film 14 by the rubbing treatment.
5 must be rotated at a high speed. For this reason, a large amount of foreign matter or the like is generated at the time of rubbing, or the alignment film 14 or the rubbing cloth 16 is charged. This causes a problem that the display appearance of the liquid crystal display element is impaired and the reliability of the liquid crystal display element is reduced.

【0005】本発明は、従来のこのような課題を考慮
し、配向処理時の異物等の発生や帯電を少なくし、液晶
表示素子の表示外観が損なわれたり、信頼性の低下を防
ぐことができる配向処理法及び配向処理装置を提供する
ことを目的とするものである。
The present invention has been made in consideration of the above-described conventional problems, and reduces the generation of foreign substances and the like during the alignment process and the electrification to prevent the display appearance of the liquid crystal display element from being impaired and the reliability from being lowered. It is an object of the present invention to provide an alignment treatment method and an alignment treatment device that can be used.

【0006】[0006]

【課題を解決するための手段】本発明は、配向膜表面に
対しその面に平行な方向に振動する超音波振動を与えな
がら配向処理を行なう液晶用配向膜の配向処理法であ
る。
SUMMARY OF THE INVENTION The present invention is an alignment treatment method for an alignment film for a liquid crystal, wherein the alignment treatment is performed while applying ultrasonic vibration to a surface of the alignment film in a direction parallel to the surface.

【0007】[0007]

【作用】配向膜表面に対しその面に平行な方向に振動す
る超音波振動を与えることにより、配向膜材料そのもの
の変形抵抗が減少し、配向膜は非常に不安定な状態とな
り、配向処理によって高分子鎖が一定方向に並び易くな
り、このため配向処理の効果が向上し、配向処理時にお
ける静電気や異物等の発生が少なくなる。
[Function] By applying ultrasonic vibration to the alignment film surface in a direction parallel to the surface, the deformation resistance of the alignment film material itself is reduced, and the alignment film becomes extremely unstable. The polymer chains are easily arranged in a certain direction, so that the effect of the alignment treatment is improved, and the generation of static electricity and foreign substances during the alignment treatment is reduced.

【0008】[0008]

【実施例】以下に、本発明をその実施例を示す図面に基
づいて説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings showing embodiments thereof.

【0009】図1は、本発明にかかる一実施例の配向処
理装置を示す図である。すなわち、配向処理装置には、
超音波振動を与えるための超音波振動装置27を取り付
けたラビングステージ21が設けられ、その超音波振動
装置27の一端には、固定板28が連結されている。そ
のラビングステージ21の上に、高分子樹脂の塗膜から
なる配向膜24を設けた透明電極層(ITO層)23を
有するガラス基板22が配置される。ガラス基板22の
一端は固定板28によって固定され、超音波振動装置2
7を作動させることで配向膜24に、その表面に対し平
行な方向に振動する超音波を与えることができる。又、
ガラス基板22の上方には、例えばレーヨンの織布でで
きたラビングクロス26を巻き付けたラビングローラ2
5が配置されている。上述のラビングステージ21がス
テージ手段、超音波振動装置27及び固定板28が超音
波振動手段、ラビングクロス26及びラビングローラ2
5がラビング手段をそれぞれ構成している。
FIG. 1 is a view showing an orientation processing apparatus according to one embodiment of the present invention. That is, the alignment treatment device includes:
A rubbing stage 21 provided with an ultrasonic vibration device 27 for applying ultrasonic vibration is provided, and a fixing plate 28 is connected to one end of the ultrasonic vibration device 27. On the rubbing stage 21, a glass substrate 22 having a transparent electrode layer (ITO layer) 23 provided with an alignment film 24 made of a coating film of a polymer resin is arranged. One end of the glass substrate 22 is fixed by a fixing plate 28 and the ultrasonic vibration device 2
By actuating 7, ultrasonic waves that vibrate in a direction parallel to the surface of the alignment film 24 can be applied to the alignment film 24. or,
Above the glass substrate 22, a rubbing roller 2 around which a rubbing cloth 26 made of, for example, rayon woven cloth is wound.
5 are arranged. The above-mentioned rubbing stage 21 is a stage means, the ultrasonic vibration device 27 and the fixing plate 28 are ultrasonic vibration means, the rubbing cloth 26 and the rubbing roller 2.
Numerals 5 constitute rubbing means.

【0010】以上のような構成された配向処理装置によ
り配向処理を行う場合は、まず、ガラス基板22をラビ
ングステージ21に載せ固定板28により固定する。次
に超音波振動装置27を作動させ、ガラス基板22に超
音波振動を矢印29の方向に伝播させることにより、ガ
ラス基板22に塗布された配向膜24に超音波振動が与
えられ、配向処理が容易に行える状態になり、ラビング
ローラ25の回転速度が従来より小さくても十分な配向
状態を得ることが可能になり、従って静電気や異物等の
発生も少なくなる。
In the case where the alignment processing is performed by the alignment processing apparatus configured as described above, first, the glass substrate 22 is placed on the rubbing stage 21 and fixed by the fixing plate 28. Next, the ultrasonic vibration device 27 is operated to propagate the ultrasonic vibration to the glass substrate 22 in the direction of the arrow 29, so that the ultrasonic vibration is given to the alignment film 24 applied to the glass substrate 22, and the alignment process is performed. As a result, the rubbing roller 25 can be easily operated, and a sufficient alignment state can be obtained even if the rotation speed of the rubbing roller 25 is lower than that of the related art.

【0011】以下本発明にかかる一実施例の配向処理法
について、具体的例を挙げ詳しく説明する。
Hereinafter, the orientation treatment method according to one embodiment of the present invention will be described in detail with specific examples.

【0012】(実施例1)まず、市販のポリイミド系配
向膜を専用のシンナーで希釈し、3.0重量%の溶液を
調整した。次に、この溶液をITO電極のパターンを形
成したガラス基板にスピンナで2300回転/分で1分
間回転塗布を行なった。塗布後、80℃で15分間乾燥
を行い溶媒を蒸発させた後250℃1時間で硬化を行い
ポリイミドの塗膜をガラス基板上に形成した。
Example 1 First, a commercially available polyimide-based alignment film was diluted with a special thinner to prepare a 3.0% by weight solution. Next, this solution was spin-coated at 2300 rpm for 1 minute on a glass substrate on which an ITO electrode pattern had been formed. After application, the coating was dried at 80 ° C. for 15 minutes to evaporate the solvent, and then cured at 250 ° C. for 1 hour to form a polyimide coating film on a glass substrate.

【0013】その後、超音波振動装置により周波数20
kHz、強度35W/cm2の超音波振動を発生させる
ことにより配向膜に超音波振動を与えながらこの配向膜
の表面をレーヨンの織布を巻き付けたラビングローラを
用いて塗膜表面を同一方向に4回擦りラビング処理を施
し液晶用配向膜を完成した。この際のラビングローラの
回転数は100rpmであり、ラビング時の塗膜表面の
帯電量を表面電位測定装置を用いて測定したところ、膜
表面から1.0cm離れたところで約−80Vであっ
た。
Thereafter, the frequency of 20
While applying ultrasonic vibration to the alignment film by generating ultrasonic vibration of 35 kHz / cm 2 in intensity, the surface of the alignment film is rubbed with a rubbing roller around which a woven cloth of rayon is wound. Rubbing treatment was performed four times to complete an alignment film for liquid crystal. The rotation speed of the rubbing roller at this time was 100 rpm, and the amount of charge on the coating film surface during rubbing was measured using a surface potential measuring device. As a result, it was about -80 V at a distance of 1.0 cm from the film surface.

【0014】このようにしてラビング配向処理された配
向膜の表面を顕微鏡により観察すると、配向膜の削り屑
等の異物はほとんど観測されなかった。次に、このよう
な処理によりポリイミドの液晶用配向膜を形成した液晶
支持板を2枚用意し、図2に示すように、その片方の支
持板(例えば下側液晶支持板32)の配向膜を形成した
面にスペーサ兼シール樹脂35として、直径6.0μm
のガラス繊維を分散した酸無水物硬化型エポキシ樹脂を
1辺のみ辺の中央に5mmの幅を残して、たの周辺に
0.2mm幅で印刷した上で、上側液晶支持板31と下
側液晶支持板32に形成した配向膜のラビング処理方向
33、34が平行かつ配向膜面を対向させた状態で加圧
し、140℃で4時間加熱して硬化接着した。接着後、
真空注入によりネマチック液晶(メルク社製、商品名Z
LI−2293)を注入し、注入後、開口部36を市販
の酸無水物硬化型エポキシ樹脂で封止した。封止後、液
晶が等方性を示す温度まで加熱し、1時間その温度でア
ニールした後、徐冷し液晶表示素子を完成した。このよ
うに完成した液晶表示素子は、異物のほとんど無い均一
な表示状態を示した。
When the surface of the alignment film subjected to the rubbing alignment treatment in this way was observed with a microscope, foreign substances such as shavings of the alignment film were hardly observed. Next, two liquid crystal support plates on which a liquid crystal alignment film of polyimide is formed by such a process are prepared, and as shown in FIG. 2, the alignment film of one of the support plates (for example, the lower liquid crystal support plate 32) is prepared. On the surface on which is formed, a spacer / seal resin 35 having a diameter of 6.0 μm
An acid anhydride-curable epoxy resin in which glass fibers are dispersed is printed with a width of 0.2 mm around the center of one side, leaving a width of 5 mm at the center of only one side, and then the upper liquid crystal support plate 31 and the lower side. The rubbing directions 33 and 34 of the alignment films formed on the liquid crystal support plate 32 were parallel to each other, and the surfaces of the alignment films were opposed to each other. After bonding,
Nematic liquid crystal (Merck, product name Z
LI-2293) was injected, and after the injection, the opening 36 was sealed with a commercially available acid anhydride-curable epoxy resin. After sealing, the liquid crystal was heated to a temperature at which the liquid crystal exhibited isotropic properties, annealed at that temperature for 1 hour, and then gradually cooled to complete a liquid crystal display device. The liquid crystal display device thus completed exhibited a uniform display state with almost no foreign matter.

【0015】(比較例1)まず、実施例1と同じポリイ
ミド系配向膜を専用のシンナーで希釈し、3.0重量%
の溶液を調整した。次に、この溶液をITO電極のパタ
ーンを形成したガラス基板にスピンナで2300回転/
分で1分間回転塗布を行なった。塗布後、80℃で15
分間乾燥を行い溶媒を蒸発させた後、250℃1時間で
硬化を行い塗膜をガラス基板上に形成した。
(Comparative Example 1) First, the same polyimide-based alignment film as in Example 1 was diluted with a special thinner, and then 3.0% by weight.
Was prepared. Next, this solution was applied to a glass substrate on which an ITO electrode pattern was formed by a spinner at 2300 revolutions / hour.
For 1 minute. After application, 15 at 80 ° C
After drying for 5 minutes to evaporate the solvent, the coating was cured at 250 ° C. for 1 hour to form a coating film on a glass substrate.

【0016】その後、この塗膜の表面をレーヨンの織布
を巻き付けたラビングローラを用いて塗膜表面を同一方
向に4回擦りラビング処理を施し液晶用配向膜を完成し
た。この際のラビングローラの回転数は100rpmで
あり、ラビング時の塗膜表面の帯電量を表面電位測定装
置を用いて測定したところ、膜表面から1.0cm離れ
たところで約−80Vであった。
Thereafter, the surface of the coating film was rubbed four times in the same direction using a rubbing roller around which a woven fabric of rayon was wound, and a rubbing treatment was performed to complete an alignment film for liquid crystal. The rotation speed of the rubbing roller at this time was 100 rpm, and the amount of charge on the coating film surface during rubbing was measured using a surface potential measuring device. As a result, it was about -80 V at a distance of 1.0 cm from the film surface.

【0017】このようにしてラビング配向処理された配
向膜の表面を顕微鏡により観察すると、配向膜の削り屑
等の異物は観測されなかった。次に、このような処理に
よりポリイミドの液晶用配向膜を用い、実施例1と同様
の操作により作製した液晶表示素子では、液晶分子は配
向せず均一な表示状態は得られなかった。
When the surface of the alignment film subjected to the rubbing alignment treatment in this way was observed with a microscope, no foreign matter such as shavings of the alignment film was observed. Next, in the liquid crystal display element manufactured by the same operation as in Example 1 using the polyimide liquid crystal alignment film by such treatment, the liquid crystal molecules were not aligned and a uniform display state could not be obtained.

【0018】(比較例2)まず、実施例1と同じポリイ
ミド系配向膜を専用のシンナーで希釈し、3.0重量%
の溶液を調整した。次に、この溶液をITO電極のパタ
ーンを形成したガラス基板にスピンナで2300回転/
分で1分間回転塗布を行なった。塗布後、80℃で15
分間乾燥を行い溶媒を蒸発させた後、250℃1時間で
硬化を行い塗膜をガラス基板上に形成した。
(Comparative Example 2) First, the same polyimide-based alignment film as in Example 1 was diluted with a special thinner, and then 3.0% by weight.
Was prepared. Next, this solution was applied to a glass substrate on which an ITO electrode pattern was formed by a spinner at 2300 revolutions / hour.
For 1 minute. After application, 15 at 80 ° C
After drying for 5 minutes to evaporate the solvent, the coating was cured at 250 ° C. for 1 hour to form a coating film on a glass substrate.

【0019】その後、この塗膜の表面をレーヨンの織布
を巻き付けたラビングローラを用いて塗膜表面を同一方
向に4回擦りラビング処理を施し液晶用配向膜を完成し
た。この際のラビングローラの回転数は400rpmで
あり、ラビング時の塗膜表面の帯電量を表面電位測定装
置を用いて測定したところ、膜表面から1.0cm離れ
たところで約−600Vであった。
Thereafter, the surface of the coating film was rubbed four times in the same direction using a rubbing roller around which a woven fabric of rayon was wound to complete a rubbing treatment to complete a liquid crystal alignment film. The rotation speed of the rubbing roller at this time was 400 rpm, and the amount of charge on the surface of the coating film during rubbing was measured using a surface potential measuring device. As a result, it was about -600 V at a distance of 1.0 cm from the film surface.

【0020】このようにしてラビング配向処理された配
向膜の表面を顕微鏡により観察すると、多数の異物が観
測された。蛍光スペクトル及び赤外線吸収スペクトル
(IRスペクトル)の測定により異物の同定を行ったと
ころ、異物は主に配向膜のポリイミドの削り屑であるこ
とがわかった。
When the surface of the alignment film subjected to the rubbing alignment treatment in this manner was observed with a microscope, many foreign substances were observed. When the foreign substance was identified by measuring the fluorescence spectrum and the infrared absorption spectrum (IR spectrum), it was found that the foreign substance was mainly shavings of polyimide of the alignment film.

【0021】次に、このような処理によりポリイミドの
液晶用配向膜を用い、実施例1と同様の操作により作製
した液晶表示素子では、ポリイミドの削り屑等のゴミが
目立ち、表示外観が損なわれ均一な表示状態は得られな
かった。
Next, in the liquid crystal display device manufactured by the same operation as in Example 1 using the polyimide alignment film for liquid crystal by such treatment, dust such as shavings of polyimide is conspicuous, and the display appearance is impaired. A uniform display state could not be obtained.

【0022】なお、上記実施例では、配向膜表面での超
音波振動の伝播方向はラビング方向と平行であったが、
これに限らず配向膜面に平行であれば方向は限定される
ものでない。
In the above embodiment, the propagation direction of the ultrasonic vibration on the alignment film surface was parallel to the rubbing direction.
The direction is not limited as long as it is parallel to the alignment film surface.

【0023】[0023]

【発明の効果】以上述べたところから明らかなように本
発明は、配向処理時の異物等の発生や帯電を少なくし、
液晶表示素子の表示外観が損なわれたり、信頼性の低下
を防ぐことができるという長所を有する。
As is apparent from the above description, the present invention reduces the occurrence of foreign substances and the like and the electrification during the alignment treatment,
The liquid crystal display device has advantages in that the display appearance of the liquid crystal display device can be prevented from being deteriorated and the reliability can be prevented from being lowered.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明にかかる一実施例の配向処理装置を示す
図である。
FIG. 1 is a view showing an alignment processing apparatus according to an embodiment of the present invention.

【図2】本発明にかかる一実施例の配向処理法を用いて
作製した高分子樹脂塗膜からなる配向膜を用いて作製し
た液晶表示素子の構成を示す図である。
FIG. 2 is a diagram showing a configuration of a liquid crystal display element manufactured using an alignment film formed of a polymer resin coating film manufactured using the alignment treatment method according to one embodiment of the present invention.

【図3】従来の塗膜のラビング処理を示す図である。FIG. 3 is a view showing a conventional coating film rubbing process.

【符号の説明】[Explanation of symbols]

11、21 ラビングステージ 12、22 ガラス基板 13、23 透明電極層 14、24 配向膜 15、25 ラビングローラ 16、26 ラビングクロス 27 超音波振動装置 28 固定板 29 超音波振動の伝播方向 31 上側液晶支持板 32 下側液晶支持板 33 上側液晶支持板のラビング処理方向 34 下側液晶支持板のラビング処理方向 35 スペーサ兼シール樹脂 36 開口部 11, 21 rubbing stage 12, 22 glass substrate 13, 23 transparent electrode layer 14, 24 alignment film 15, 25 rubbing roller 16, 26 rubbing cloth 27 ultrasonic vibrator 28 fixing plate 29 ultrasonic vibration propagation direction 31 upper liquid crystal support Plate 32 Lower liquid crystal support plate 33 Rubbing direction of upper liquid crystal support plate 34 Rubbing direction of lower liquid crystal support plate 35 Spacer and seal resin 36 Opening

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) G02F 1/1337 ──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. 7 , DB name) G02F 1/1337

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 配向膜表面に対しその面に平行な方向に
振動する超音波振動を与えながら配向処理を行なうこと
を特徴とする液晶用配向膜の配向処理法。
1. An alignment treatment method for a liquid crystal alignment film, wherein an alignment process is performed while applying ultrasonic vibration to a surface of the alignment film in a direction parallel to the surface.
【請求項2】 基板上に設けた配向膜に配向処理を行な
うための配向処理装置において、前記基板を取り付け移
動させるためのステージと、液晶用配向膜に、その配向
膜表面に対し平行な方向に超音波振動を与える装置と、
前記液晶用配向膜表面を所定の方向に擦るラビング手段
とを備えたことを特徴とする配向処理装置。
2. An alignment processing apparatus for performing alignment processing on an alignment film provided on a substrate, comprising: a stage for attaching and moving the substrate; and a direction parallel to a surface of the alignment film for liquid crystal. A device for applying ultrasonic vibration to the
Rubbing means for rubbing the surface of the liquid crystal alignment film in a predetermined direction.
JP4695692A 1992-03-04 1992-03-04 Orientation treatment method and orientation treatment device Expired - Fee Related JP3010456B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4695692A JP3010456B2 (en) 1992-03-04 1992-03-04 Orientation treatment method and orientation treatment device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4695692A JP3010456B2 (en) 1992-03-04 1992-03-04 Orientation treatment method and orientation treatment device

Publications (2)

Publication Number Publication Date
JPH05249466A JPH05249466A (en) 1993-09-28
JP3010456B2 true JP3010456B2 (en) 2000-02-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP4695692A Expired - Fee Related JP3010456B2 (en) 1992-03-04 1992-03-04 Orientation treatment method and orientation treatment device

Country Status (1)

Country Link
JP (1) JP3010456B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101874424B1 (en) 2011-09-05 2018-07-06 삼성디스플레이 주식회사 Alignment layer for display device, liquid crystal display device including the same and method and apparatus for treating the same

Also Published As

Publication number Publication date
JPH05249466A (en) 1993-09-28

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