JP3025923B2 - Semiconductor integrated circuit device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in a semiconductor integrated circuit measuring device. In particular, the present invention relates to an improvement aiming to provide a semiconductor integrated circuit measurement device capable of executing a threshold measurement and a measurement of input / output hysteresis characteristics of a semiconductor integrated circuit at high speed and with high accuracy.

[0002]

2. Description of the Related Art An example of an apparatus for measuring threshold and input / output hysteresis characteristics of a semiconductor integrated circuit according to the prior art will be described with reference to FIG.

In FIG. 1, reference numeral 2 denotes a test semiconductor integrated circuit, and reference numeral 10 denotes a measuring device for measuring the threshold and input / output hysteresis characteristics of the semiconductor integrated circuit 2. 101
Is a stepped voltage (or current) generating means for receiving a constant voltage or a constant current and outputting a stepped voltage or a stepped current, and 102 is a stepped voltage or current inputted to the semiconductor integrated circuit 2 under test. Reference numeral 103 denotes input measuring means for measuring, and 103 denotes output monitoring means for monitoring that the output of the semiconductor integrated circuit under test 2 is inverted from a low level to a high level or from a high level to a low level.

When the threshold and the input / output hysteresis characteristics are measured by using this measuring device, the step-like voltage (or current) generating means 101 is operated, and
A voltage or current that increases or decreases stepwise at intervals of 2 ms is generated, and this voltage or current is input to the semiconductor integrated circuit under test 2 and the output of the semiconductor integrated circuit is inverted at each stage of the input voltage and current. Output monitoring means
The input voltage or the input current value at the time when the output is inverted is measured using the input measuring means 102, and the threshold and the input / output hysteresis characteristics are measured.

The accuracy of the above-mentioned measuring device is determined by the minimum value of one step of voltage / current determined based on the resolution of the stepped voltage (or current) generating means 101.

[0006]

The above-described prior art semiconductor integrated circuit measuring apparatus has the following disadvantages. I. The minimum value of one step of the stepped voltage or current input to the semiconductor integrated circuit is not sufficiently small, and therefore, the accuracy of the measuring device is not sufficiently satisfactory.

[0007] b. Because the input voltage and current are stepped,
Since the application time is required for each voltage value and current value, when the number of steps is large, the time required for the measurement is lengthened.

C. In each stage of the input voltage and the current, it is necessary to confirm whether or not the output is inverted each time, so that a long time is required for the measurement. D. Overshoot occurs when the input voltage / current changes stepwise, and a malfunction such as inversion of the output in response to the overshoot by the semiconductor integrated circuit may occur, and the measurement becomes unstable.

E. Since both the input and the output of the semiconductor integrated circuit must be monitored and measured, the measurement labor is increased and is ineffective. SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned drawbacks, and to provide a semiconductor integrated circuit measuring device capable of efficiently performing a threshold measurement and an input / output hysteresis characteristic measurement of a semiconductor integrated circuit at high speed and with high accuracy. Is to do.

[0010]

The above object is achieved by any of the following means. First means, whereas
The reference voltage is input to the input terminal of
Comparator (15) to which output of conductor integrated circuit is input
And a resistor (R) connected to the output terminal of the comparator (15).
A first terminal connected to one end of the diode (D);
The other end of the diode (D) is connected to the first capacitor (C).
Terminal, input terminal of the semiconductor integrated circuit, and voltage measuring means
(16) is connected to the second terminal of the resistor (R).
A second end of the resistor (R) between the power supply terminal (E) and the power supply terminal (E);
And the first terminal of the capacitor (C) and the power terminal (E).
The first switch (S) connected to one of the terminals
W1), and a first terminal of the capacitor (C).
And a second switch (S) between the power supply terminal (E) and the power supply terminal (E).
W2) is a semiconductor integrated circuit device .

The second means is that a reference voltage is applied to one input terminal.
Is input to the other input terminal.
A comparator (15) to which the output of 7) is inputted,
A first terminal of a resistor (R) is connected to an output terminal of the comparator (15).
And one end of a diode (D) are connected to the diode.
A first terminal of a capacitor (C) and a semiconductor at the other end of (D)
The input terminal of the integrated circuit is connected to the voltage measuring means (16).
Between the second terminal of the resistor (R) and the power supply terminal (E).
A second terminal of the resistor (R) is connected to the power terminal
(E) and the first terminal of the capacitor (C).
The first switch (SW1) connected to either
And a first terminal of the capacitor (C) and the power terminal
(E), a second switch (SW2) is provided.
Wherein the output of the semiconductor integrated circuit is the current / voltage converter.
Semiconductor integrated circuit device connected to the input of stage (17) .

The third means is that a reference voltage is applied to one input terminal.
Is input, and the output of the semiconductor integrated circuit is input to the other input terminal.
A comparator (15) to be inputted, and the comparator
A first terminal of a resistor (R) and a diode at the output of (15)
(D) is connected at one end to the other end of the diode (D).
First terminal of capacitor (C) and current / voltage conversion means
The input terminal of (17) is connected, and the second terminal of the resistor (R) is connected.
And the power supply terminal (E), the resistor (R)
A second terminal connected to the power terminal (E) and the capacitor;
(C) a first terminal connected to one of the first terminals
A switch (SW1) is provided, and the capacitor (C) is provided.
Between the first terminal and the power supply terminal (E).
A switch (SW2) is provided, and the current / voltage conversion means is provided.
The output of the stage (17) is connected to the input of the semiconductor integrated circuit and the current measurement.
And a semiconductor integrated circuit device connected to the setting means (19) .

The fourth means is that a reference voltage is applied to one input terminal.
Is input to the other input terminal, and the first current / voltage conversion
Comparator (15) to which the output of stage (17) is input
And a resistor (R) connected to the output terminal of the comparator (15).
The first terminal is connected to one end of the diode (D),
The first terminal of the capacitor (C) is connected to the other end of the diode (D)
And the second current / voltage conversion means (18) are connected,
Between the second terminal of the resistor (R) and the power terminal (E);
Connects the second terminal of the resistor (R) to the power supply terminal (E).
And the first terminal of the capacitor (C)
A first switch (SW1) connected to the
A first terminal of the capacitor (C) and the power terminal (E);
A second switch (SW2) is provided between
The second current / voltage conversion means (18) comes out of semiconductor integration.
Connected to the input of the circuit and the current measuring means (19);
The output of the semiconductor integrated circuit is the first current / voltage conversion means.
(17) a semiconductor integrated circuit device connected to the input terminal
It is a place.

[0014]

In the semiconductor integrated circuit measuring apparatus according to the present invention, the terminal voltage of the capacitor during charging or discharging, which changes with an appropriate time constant, or a current corresponding to this terminal voltage is input to the semiconductor integrated circuit under test. Therefore, a continuously changing test voltage or test current can be supplied to the semiconductor integrated circuit.

The output voltage of the comparator, whose output is inverted in synchronization with the inversion of the output of the semiconductor integrated circuit under test, is applied to the charge / discharge circuit of the capacitor, and the output voltage is inverted from a low level to a high level. As a result, the discharging of the capacitor is automatically stopped, and the charging of the capacitor is automatically stopped by inverting the output voltage from the high level to the low level. Then, in this charge / discharge stopped state, the input of the semiconductor integrated circuit under test is measured.

[0016]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a semiconductor integrated circuit measuring apparatus according to a fifth embodiment of the present invention will be described with reference to the drawings.

The first embodiment (corresponding to claim 1) is a case where the input of the semiconductor integrated circuit under test is a voltage and the output is a voltage. FIG. 1 shows a circuit of the first embodiment. In the figure,
Reference numeral 1 denotes a semiconductor integrated circuit measuring device, C denotes a capacitor charged by a DC power supply E connected to a power supply terminal 11, and R denotes a charge / discharge resistance of the capacitor C. S
W1 is switching switching means for switching and connecting one terminal a of the charge / discharge resistor R to the capacitor C or the power supply terminal 11, and SW2 is interposed between the capacitor C and the power supply terminal 11. Switching means. D is a diode, the anode of which is connected to the other terminal b of the charging / discharging resistor R, and the cathode of which is connected to the capacitor C. Reference numeral 12 denotes an output terminal for outputting the terminal voltage of the capacitor C to the test semiconductor integrated circuit 2, and reference numeral 13 denotes an input terminal to which the output of the test semiconductor integrated circuit 2 is input. Reference numeral 15 denotes the output of the test semiconductor integrated circuit 2 input to one input terminal, the other input terminal to which the reference voltage _Vref is input via the terminal 14, and the output terminal to This is a comparator connected to the other terminal b. When the input voltage of the test semiconductor integrated circuit 2 is at a high voltage level, the comparator 15 outputs a low level voltage, and the test semiconductor integrated circuit 2
The input of the comparator 15 is selected such that the output of the comparator 15 is also inverted when the output of the comparator 15 is inverted. Reference numeral 16 denotes voltage measuring means for measuring the terminal voltage of the capacitor C.

Next, the operation of the semiconductor integrated circuit measuring apparatus according to this embodiment will be described. First, a case where the input voltage of the semiconductor integrated circuit is reduced from the high voltage level will be described. Turn on the switching means SW2 and turn on the capacitor C
To a power supply voltage V1 higher than the threshold voltage. When the capacitor C is charged to V1, the output terminal voltage of the comparator 15 is at a low level. Next, when the switching means SW2 is turned off and the switching switching means SW1 which has been in the off state is turned on to the capacitor C side, the electric charge of the capacitor C is discharged to the comparator 15 via the charging / discharging resistor R. As a result, the terminal voltage of the capacitor C decreases from V1 according to a falling curve that is a time constant CR. When the terminal voltage of this decreasing capacitor reaches the threshold voltage of the semiconductor integrated circuit under test 2, the output of the semiconductor integrated circuit 2 is inverted, and based on this, the output terminal voltage of the comparator 15 changes from a low level to a high level. Flip to Therefore, the discharge of the capacitor C becomes impossible, the discharge stops, and the terminal voltage of the capacitor C keeps the voltage at the time of stopping the discharge. In this state, the terminal voltage of the capacitor C is measured using the voltage measuring means 16.

Next, a case where the input voltage of the semiconductor integrated circuit is increased from a low level to a high level will be described. The power supply of the low voltage V2 is connected to the power supply terminal 11. This voltage V
2 may be 0. SW2 is turned on to charge the capacitor C to the power supply voltage V2. When the capacitor C is charged to V2, the output terminal voltage of the comparator 15 is at a high level. Next, the switching means SW2 is turned off, and the power supply voltage is further changed from V2 to a power supply voltage V3 higher than the threshold voltage. Next, when the switching switching means SW1, which has been in the off state, is turned on to the power supply terminal 11, the capacitor C becomes the charge / discharge resistor R
And a diode (D). as a result,
The terminal voltage of the capacitor C increases from V2 according to a rising curve in which the time constant is CR. When the terminal voltage of the increasing capacitor C reaches the threshold voltage of the test semiconductor integrated circuit 2, the output of the semiconductor integrated circuit 2 is inverted, and based on this, the output terminal voltage of the comparator 15 changes from a high level to a low level. Invert to level. Therefore, the anode of the diode (D) has a lower potential than the cathode, and the capacitor C
Is stopped, and the current flows into the comparator 15. The terminal voltage of the capacitor C keeps the voltage at the time of stopping charging. In this state, the terminal voltage of the capacitor C is measured using the voltage measuring means 16.

As described above, in the semiconductor integrated circuit measuring apparatus according to the present embodiment, the terminal voltage of the capacitor C during charging or discharging is used as the input voltage of the semiconductor integrated circuit 2 to be tested. It changes continuously and the input voltage application time is shorter than in the case of the step voltage of the prior art. Therefore, high-speed and high-accuracy measurement is possible as compared with the related art.

The second embodiment (corresponding to claim 2) is a case where the input of the semiconductor integrated circuit under test is a voltage and the output is a current, and FIG. 2 shows a circuit of the second embodiment. This embodiment is the first
In this embodiment, the only difference is that the output current of the semiconductor integrated circuit under test 2 is converted into a voltage signal by the current / voltage conversion means 17 and used as an input to the comparator 15. Descriptions of other reference numerals and operations are the same as those of the first embodiment, and thus will be omitted.

The third embodiment (corresponding to claim 3) is a case where the input of the semiconductor integrated circuit under test is a current and the output is a voltage. FIG. 3 shows a circuit of the third embodiment. This embodiment is the first
This embodiment is different from the first embodiment in that the terminal voltage of the capacitor C is converted into a current by the voltage / current converting means 18 to be an input to the semiconductor integrated circuit 2 under test, and the voltage in the first embodiment is different from that of the first embodiment. The only difference is that a current measuring means 19 for measuring the output current of the voltage / current converting means 18 is provided in place of the measuring means 16. Descriptions of other reference numerals and operations are the same as those of the first embodiment, and thus will be omitted.

The fourth embodiment (corresponding to claim 4) is a case where the input of the semiconductor integrated circuit under test is a current and the output is a current. FIG. 4 shows a circuit of the fourth embodiment. This embodiment is the first
This embodiment is different from the third embodiment in that the voltage / current conversion means 18 described in the third embodiment and the second
The point that the current / voltage converting means 17 described in the embodiment is added, and the current measuring means 19 for measuring the output current of the voltage / current converting means 18 instead of the voltage measuring means 16 in the first embodiment. Is provided only. Descriptions of other reference numerals and operations are the same as those of the first embodiment, and thus will be omitted.

In the fifth embodiment, the input / output of the semiconductor integrated circuit under test is
This is a semiconductor integrated circuit measuring device that can be used regardless of whether the output is voltage or current. The circuit is shown in FIG. This embodiment is different from the fourth embodiment in that in this embodiment, the switching switching means SW3 ·
Switching means SW interlocked with SW4
5 · SW6 and a point where a voltage measuring means 16 for measuring the terminal voltage of the capacitor C is added. The switching means SW3 and SW4 are switched in accordance with the input condition of the semiconductor integrated circuit under test 2 to determine whether the terminal voltage of the capacitor C or the current obtained by converting the voltage using the voltage / current converting means 18 is input. The switching means SW5 and SW6 are switched in accordance with the output conditions of the test semiconductor integrated circuit 2, so that when the output of the semiconductor integrated circuit 2 is a voltage, it is directly input to the comparator 15, and when the output is a current, the current is a current. The voltage is converted into a voltage using a voltage conversion means 17 and is used as an input to the comparator 15.

In the present embodiment, since the input and output of the semiconductor integrated circuit under test 2 can be measured by using either a voltage or a current with a single measuring device, efficient measurement is possible and economy is achieved. Benefits can be enjoyed.

[0026]

As described above, in the semiconductor integrated circuit measuring apparatus according to the present invention, the terminal voltage of the capacitor which is charged or discharged via the charging / discharging resistor is used as the input of the semiconductor integrated circuit to be tested. The output of the semiconductor integrated circuit is input to a comparator that inverts the output periodically inverting the output of the integrated circuit, and the output voltage of the comparator is applied to the charge / discharge circuit of the capacitor to automatically charge and discharge. The terminal voltage of the capacitor is converted into a current by a voltage / current conversion means and input according to the input condition and output condition of the semiconductor integrated circuit, and the output is converted to a current / Since the voltage is converted into a voltage by the voltage conversion means and input to the comparator, the input voltage and current of the semiconductor integrated circuit under test can be continuously changed. High precision can be measured, also be stable measurement since there is no malfunction due to an overshoot of the input voltage and current from kill. Furthermore, since a long application time for each input voltage value and current value in the prior art is not required, the measurement time can be reduced,
Easy to measure and effective.

Therefore, the present invention can provide a semiconductor integrated circuit measuring apparatus capable of efficiently performing a threshold measurement and an input / output hysteresis characteristic measurement of a semiconductor integrated circuit at high speed and with high accuracy.

[Brief description of the drawings]

FIG. 1 is a circuit diagram of a semiconductor integrated circuit measuring device according to a first embodiment of the present invention.

FIG. 2 is a circuit diagram of a semiconductor integrated circuit measuring device according to a second embodiment of the present invention.

FIG. 3 is a circuit diagram of a semiconductor integrated circuit measuring device according to a third embodiment of the present invention.

FIG. 4 is a circuit diagram of a semiconductor integrated circuit measuring device according to a fourth embodiment of the present invention.

FIG. 5 is a circuit diagram of a semiconductor integrated circuit measuring device according to a fifth embodiment of the present invention.

FIG. 6 is a block diagram of a semiconductor integrated circuit measuring device according to the related art.

[Explanation of symbols]

REFERENCE SIGNS LIST 1 semiconductor integrated circuit measuring device (the present invention) 2 semiconductor integrated circuit 15 comparator 16 voltage measuring device 17 current / voltage converting device 18 voltage / current converting device 19 current measuring device 10 semiconductor integrated circuit measuring device (prior art) 101 step-like voltage (Or current) generating means 102 Input measuring means 103 Output measuring means C Capacitor R Charging / discharging resistance D Diode SW1, SW3, SW4, SW5, SW6 Switching switching means SW2 Switching means

──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Katsuya Ishikawa 1015 Kamikodanaka, Nakahara-ku, Kawasaki City, Kanagawa Prefecture Inside Fujitsu Limited (56) References JP-A-63-138281 (JP, A) JP-A-3-65668 (JP, A) (58) Field surveyed (Int. Cl. ⁷ , DB name) G01R 31/26 G01R 31/28 H01L 21/66

Claims (4)

(57) [Claims] A reference voltage is inputted to one input terminal,
The output of the semiconductor integrated circuit is input to the other input terminal.
And a fourth resistor (R) connected to an output terminal of the comparator (15).
Is connected to one end of the diode (D), and the other end of the diode (D) is connected to the first terminal of the capacitor (C).
Terminal, input terminal of the semiconductor integrated circuit, and voltage measuring means
(16) is connected between the second terminal of the resistor (R) and the power supply terminal (E).
Connects the second terminal of the resistor (R) to the power supply terminal (E).
And the first terminal of the capacitor (C)
A first switch (SW1) connected to the power supply terminal and a first terminal of the capacitor (C).
(E), a second switch (SW2) is provided.
The semiconductor integrated circuit device characterized by being. 2. A reference voltage is input to one input terminal,
The output of the current / voltage conversion means (17) is input to the other input terminal.
A comparator (15) to be input, and a first resistor (R) connected to an output terminal of the comparator (15).
Is connected to one end of a diode D), and the other end of the diode (D) is connected to a first terminal of a capacitor (C).
Terminal and the input terminal of the semiconductor integrated circuit and the voltage measuring means (1
6) is connected between the second terminal of the resistor (R) and the power supply terminal (E).
Connects the second terminal of the resistor (R) to the power supply terminal (E).
And the first terminal of the capacitor (C)
A first switch (SW1) connected to the power supply terminal and a first terminal of the capacitor (C).
(E), a second switch (SW2) is provided.
Is the output of the semiconductor integrated circuit is the current / voltage converting means
(17) a semi-conductor connected to the input
Body integrated circuit device. 3. A reference voltage is inputted to one input terminal,
The other input terminal receives the output of the semiconductor integrated circuit.
A comparator (15) and a first end of a resistor (R) connected to the output of the comparator (15).
Is connected to one end of a diode (D), and a first end of a capacitor (C) is connected to the other end of the diode (D).
Terminal and the input terminal of the current / voltage conversion means (17) are connected.
Between the second terminal of the resistor (R) and the power supply terminal (E).
Connects the second terminal of the resistor (R) to the power supply terminal (E).
And the first terminal of the captor (C)
A first switch (SW1) connected to the power supply terminal and a first terminal of the capacitor (C).
(E), a second switch (SW2) is provided.
The output of the current / voltage conversion means (17) is
Connected to the input of the integrated circuit and the current measuring means (19).
The semiconductor integrated circuit device according to Machicho that that. 4. A reference voltage is inputted to one input terminal,
The other input terminal of the first current / voltage conversion means (17)
A comparator (15) to which an output is input, and a first resistor (R) connected to an output terminal of the comparator (15).
Is connected to one end of a diode (D), and the other end of the diode (D) is connected to a first terminal of a capacitor (C).
The terminal is connected to the second current / voltage conversion means (18).
Between the second terminal of the resistor (R) and the power supply terminal (E).
Connects the second terminal of the resistor (R) to the power supply terminal (E).
And the first terminal of the capacitor (C)
A first switch (SW1) connected to the power supply terminal and a first terminal of the capacitor (C).
(E), a second switch (SW2) is provided.
Is the output of the second current / voltage converting means (18) is a semiconductor
An output of the semiconductor integrated circuit connected to an input of the integrated circuit and a current measuring means (19);
And characterized in that it is connected to the input terminal means (17)
Semiconductor integrated circuit device.