JP3036576B2 - Frame structure of clean room - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a frame structure for constructing a clean room inside a steel building.
More specifically, the present invention relates to a frame structure in a case where a ceiling chamber in which a cleaner unit is installed above a beam and a supply chamber in which a filter is installed below a beam.

[0002]

2. Description of the Related Art When a clean room such as a clean air chamber for manufacturing semiconductor components or a sterile room in a hospital is constructed in a steel frame building, the following frame structure is considered. That is, a ceiling chamber is formed by surrounding a plurality of upper non-combustible and heat-insulating side panels, an upper panel, and a lower panel above a beam such as a horizontal steel frame on the ceiling side, and a cleaner unit is installed inside the ceiling chamber. I do. Also, a plurality of lower wall panels are locally suspended and surrounded immediately below the beams to form a supply chamber communicating with the ceiling chamber. Then, a support frame member called a grape shelf is mounted above the supply chamber, the filter grid is suspended, and a plurality of filters are arranged and attached to the filter grid.

On the other hand, a clean room is formed by horizontally mounting a ceiling plate near the lower end of a lower wall panel, and further by installing a partition panel between a wall panel or a filter grid and a work floor therebelow. Then, an air passage is routed from below the work floor of the clean room to the ceiling chamber, and the air in the clean room is constantly circulated through the filter to be cleaned by the operation of the cleaner unit.

[0004] Conventionally, as a frame structure of the above-mentioned clean room, for example, as shown in Japanese Utility Model Publication No. 4-46005, a wall panel is hung below an ceiling with anchor bolts, and in a space inside the wall panel, it is attached to the ceiling. It is known that a fixing bolt is fastened and suspended, a grid-like support frame member is horizontally mounted with the fixing bolt, and a filter is installed on the frame member.

[0005]

However, in the above-mentioned prior art, since the wall panel, the frame material of the filter and the like are separately mounted under the ceiling, the side wall panel and the upper step are mounted on the beam. When a ceiling chamber is formed by a panel, a lower panel, and the like, those structural members are individually attached using beams or the like. For this reason, the mounting of the side wall panel, the lower panel, the profile, and the like becomes extremely complicated, and the number of steps and time required for the operation are increased. In addition, in places where beams are complicated, it may not be possible to reliably fix the structural member. Further, since a large number of structural members are individually attached, it is difficult to ensure airtightness. For this reason, the clean room is liable to infiltrate dirty air or leak clean air, and it is difficult to increase cleanliness.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and is a clean room in which the work of assembling a side wall panel, a lower panel, a shape member, and the like above and below a beam can be simplified and assured, and airtightness can be improved. It is an object of the present invention to provide a skeleton structure.

[0007]

According to a first aspect of the present invention, there is provided a frame structure for a clean room, comprising: a ceiling chamber including a side wall panel, an upper panel, and a lower panel in a ceiling portion of the clean room. And a supply chamber that communicates with the ceiling chamber via a cleaner unit and communicates with the clean room via a filter, in a frame structure of a clean room, a beam disposed on the ceiling of the clean room. A U-shaped rail for mounting the wall panel, a receiving angle on which the lower panel is placed, and a narrow opening-shaped engagement groove that opens downward are provided on the shape member fixed to the shape member. The support frame member is supported via support means which is suspended in engagement with the groove, and the filter is mounted on the support frame member via suspension means. By comprising hung a filter grid, characterized by.

According to a second aspect of the present invention, the frame structure of the clean room communicates with the ceiling of the clean room through a cleaner unit between the ceiling chamber including the side wall panel, the upper panel and the lower panel, and the ceiling chamber. In a frame structure of a clean room having a supply chamber communicating with a clean room via a filter, (1) an upper section of a mounting section fixed to a beam disposed on a ceiling of the clean room; A U-shaped rail for mounting the side wall panel, a receiving angle on which the lower panel is placed, and a narrow opening-like engaging groove which opens downward, are engaged with the engaging groove of the shape member, and are hung down. A support grid member is supported via a support means, and a filter grid on which the filter is mounted is suspended from the support frame member via a suspension means. And (2) a lower C-shaped channel connected to the upper C-shaped member and suspending the side wall panel to form a supply chamber, the lower C-shaped channel having an opening downward and having a seat plate receiving portion. An airtight plate is provided above the outside of the channel and a joining piece is provided at a tip of the airtight plate, and a parallel rail is provided below the inside of the channel.

According to a third aspect of the present invention, the support means is formed of a support fitting having a nut and a seat plate at both ends of a suspension bolt, and the support frame member is opened at an upper portion of the rectangular cylindrical main body. The support plate is formed of a hollow profile having a narrow opening-like concave groove, and the seat plate of the support fitting is engaged with the engaging groove of the profile and the concave groove of the hollow profile. It is characterized by.

According to a fourth aspect of the present invention, there is provided a frame structure for a clean room, wherein the supporting means is a U-shaped fitting which is fitted around the supporting frame member and integrally connected thereto, and is attached to the U-shaped fitting with bolts and nuts. And a seat plate engaged with the channel of the profile.

[0011]

According to the first aspect of the present invention configured as described above, the side wall panel is formed by the U-shaped rail of the profile fixed to the beam disposed on the ceiling of the clean room, and the lower panel is formed by the receiving angle. The ceiling chamber can be airtightly formed by installing each with a simple operation, and a cleaner unit can be installed in this ceiling chamber.

Further, inside the supply chamber, a support frame member is supported by support means engaging with the engagement groove of the upper profile member, and the filter grid is easily suspended by the support frame member. A plurality of filters are installed. Therefore, the ceiling chamber and the supply chamber can be formed above and below the beam by a simple operation, and the support frame member and the filter grid can be easily mounted in the supply chamber, thereby greatly improving workability and the like. .

According to the second aspect, the airtightness of both the ceiling chamber and the supply chamber is simultaneously secured,
Both chambers are formed with a simple operation.

That is, in addition to the structure of the first aspect, the lower profile is attached to the lower part of the beam, and the lower profile is fixed to the beam and the upper profile. At this time, since the lower profile member closes the opening between the beams with an airtight plate, the airtightness of the supply chamber can be ensured, and the lower side wall panel is hung at the channel, so the lower side wall panel can be easily attached. Can be constructed.

According to the third aspect, the support means is formed of a support fitting having a nut and a seat plate at both ends of the suspension bolt, and the support frame member has a narrow opening shape opening at the upper part of the rectangular cylindrical main body. Since it is formed of a hollow profile having a concave groove, the seat plate of the support fitting is engaged with the engaging groove of the profile and the concave groove of the hollow profile, and is attached and slid. Can be easily suspended and mounted in position.

According to the fourth aspect, the support means includes a U-shaped fitting which is fitted around the support frame member and integrally connected thereto.
By providing a seat plate attached to the U-shaped bracket with bolts and nuts and engaged with the channel of the profile, the support frame member is engaged with the engaging groove of the profile and suspended at an arbitrary position. It can be lowered and mounted, and the mounting strength of the support frame member can be increased.

[0017]

Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 shows the entire configuration of an embodiment of a framework structure of a clean room according to the present invention, in a case example applied to a mode in which a clean room is partially disposed in a normal building.

In the clean room 4, a ceiling chamber 2 is formed on the upper part of a beam 1 such as a steel frame, which is laid on the ceiling side of the frame, surrounded by a plurality of upper side wall panels 35, an upper panel 36 and a lower panel 33. The cleaner unit 5 is installed in the ceiling chamber 2. As the panel used here, an insulating panel made of an inorganic panel, a resin foam core panel or the like, a fireproof insulating panel, or the like is applied.

A supply chamber 3 communicating with the ceiling chamber 2 is formed by locally suspending and surrounding a plurality of lower side wall panels 37 directly below the beam 1. Then, a support frame member 55 (hereinafter, referred to as a grape rack) which is arranged in a lattice above the supply chamber 3 is mounted,
On the other hand, a filter grid 70 is hung horizontally below the lower end of the side wall panel 37, and a plurality of filters 71 are mounted side by side on the grid-like filter grid 70. Also, the ceiling plate 6 of the normal building is horizontally mounted near the lower end of the lower side wall panel 37, and the partition panel 7 is further mounted between the side wall panel 37 or the filter grid 70 and the work floor therebelow to partition. , A clean room 4 is formed. Then, an air passage 8 is routed from below the working floor of the clean room 4 to the ceiling chamber 2, and the air flowing down the clean room 4 by the operation of the cleaner unit 5 is always circulated through the filter 71 to be cleaned. Have been.

The clean room 4 configured as described above
In this embodiment, the upper side walls 11 of the mounting section 10 formed of an extruded section made of an aluminum alloy mounted on the upper and lower sides of the beam 1 are used.
5. The lower panel 33 and the grape rack 55 can be attached at the same time, and the lower side wall panel (generally also referred to as a "down wall panel") is formed by the profile 20 formed of an extruded profile made of an aluminum alloy. 37 can be connected to each other.

Referring to FIG. 3, each of the profiles 11 and 20 will be described in detail. As shown in FIG. 3A, the mounting section 10 is divided into an upper section section 11 and a lower section section 20. The upper section member 11 has a horizontal plate 12 placed on the beam 1, and a U-shaped rail 14 is provided on the upper part of the horizontal plate 12 via a coupling space 13 opened upward. And a substantially C-shaped narrow opening-like engaging groove 16 (hereinafter referred to as a channel) opened downward at a lower portion of the reinforcing rail 15, and a lower panel inside the reinforcing rail 15. The horizontal receiving angles 17 for 33 are respectively arranged in parallel and integrally formed. The lower section member 20 has a seat plate receiving portion 21 a in a substantially C-shaped channel 21 opened downward, and an airtight plate 23 that stands vertically above the outside of the channel 21 is provided. A joint piece 24 is provided, and a parallel rail 22 is provided below the channel 21 to be integrally formed.

Here, the U-shaped rail 14 of the upper section member 11 is used.
Has the same width dimension as the upper side wall panel 35 and can be fitted and fitted tightly. here,
By forming the step 14a on the outer edge of the U-shaped rail 14 on the opening side, the side wall panel 35 is formed in the U-shaped rail 14.
After fitting, the step portion 14a can be filled with the seal member 90 (see FIG. 2). Also, U-shaped rail 1
A step 14b is formed at the bottom of the base 4 to serve as a seat for the side wall panel 35. Channel 21 and parallel rail 2 of lower profile 20
2 has the same width dimension as the lower side wall panel 37 and can be mounted similarly. When forming an L-shaped clean room, the upper and lower profile members 11 and 20 are formed into two types, a straight portion having a predetermined length and a corner portion bent in an L-shape. By combining the straight part and the corner part, it is possible to form a clean room that is connected and assembled in a continuous straight or L-shape having a predetermined size in consideration of an air circulation capacity, a filter installation space, and the like. ing.

On the other hand, as shown in FIG. 3 (b), the joint shape member 30 for fixing the upper panel 36 to the side wall panel 35 has a U-shaped rail 31 tightly wrapped around the end of the side wall panel.
It is formed with a receiving angle 32 provided inside. And it is formed so that it can be assembled in a straight or L-shape like the upper and lower profile members 11 and 20.

Next, referring to FIGS. 2, 4 and 5, a case where the mounting profile 10 is mounted on the beam 1 will be described.
First, the horizontal plate 12 of the upper profile member 11 is placed on the plurality of beams 1, and is fixed to the beams 1 at the connection space 13 and the like by screws 26. In addition, a cutout groove 25 that is opened upward according to the state of the plurality of beams 1 is previously cut and formed in a part of the airtight plate 23 of the lower profile 20. At the same position as the U-shaped rail 14 under the beam 1, the lower section 2
The channel 21 abuts on the lower surface 1a of the beam 1 while fitting the notch groove 25 of the airtight plate 23 into the beam 1, and at this time, the joining piece 24 is screwed to the side surface of the joining space 13 of the upper section member 11. In this state, the lower profile 20 is fixed to the beam 1 with the angles 27 and the screws 26. In the case of a corner portion as shown in FIG.
1, 20 are fixed by combining straight portions in an L-shape.

In this way, the upper profile 11 and the lower profile 20 below the beam 1 are attached to the mounting profile 10 with the airtight plate 23 straddling the beam 1. They are combined and attached together. Thereby, the U-shaped rail 14, the channel 16 and the receiving angle 1 are placed on the beam 1.
7 are connected, and a channel 21 is connected and disposed immediately below the beam 1. Further, the beam 1 is reliably surrounded by the airtight plate 23, and the upper and lower profile members 11, 20 are formed.
Are joined in an airtight manner, so that the inside of the mounting member 10 attached to the beam 1 is kept airtight. Further, even in a place where a plurality of beams 1 are intricate due to the combination of the respective structural members, it can be securely attached by a simple operation.

Next, the attachment of the side wall panel, the lower panel and the like will be described. First, the mounting members 10 above and below the beam 1 are attached.
After mounting, the lower panel 33 is placed horizontally on the receiving angle 17 and the beam 1 of the upper profile member 11. The lower panel 33 is attached by screwing the lower panel 33 to the reinforcing rail 15 with an angle 34. By installing the lower panel 33, the working environment above the beam 1 is greatly widened.

Thereafter, as shown in FIG. 6, the straight panel 35a and the corner panel 35b of the upper plurality of side wall panels 35 are connected to a fitting member 38 having, for example, a cross-shaped cross section.
And is inserted vertically into the U-shaped rail 14 of the mounting section 10 from above. Thereby, the upper side wall panel 35
Are vertically erected in a straight and L-shape. Then, by mounting the rail 31 of the connecting member 30 on the upper end opening of the side wall panel 35, the plurality of side wall panels 35 are integrally and firmly connected by the upper and lower rails 14 and 31. afterwards,
As shown in FIG. 7, the upper panel 36 is horizontally placed on the receiving angle 32 of the joint member 30, and is screwed to the joint member 30 at the angle 34, and the upper panel 36 is attached. In addition, the step portion 14a of the U-shaped rail 14 is filled with a sealing member 90 to maintain the airtightness between the side wall panel 35 and the profile 11.

In this way, the ceiling chamber 2 of the rectangular chamber is formed airtightly on the beam 1 by the upper side wall panel 35, the upper panel 36 and the lower panel 33. Then, the cleaner unit 5 is installed on the lower panel 33 with a hole or the like opened.

Next, a case where a plurality of lower side wall panels 37 are attached to the channel 21 of the lower profile member 20 immediately below the beam 1 will be described. In this case, the side wall panel 37
A height adjustment unit 50 is provided on the side wall panel 37 while being connected and suspended using the panel connection suspension unit 40.

As shown in FIGS. 2 and 4, the height adjusting means 50 is such that a decorative profile 51 having a substantially U-shaped cross section covers the lower end of the side wall panel 37 and joins the panels together at the lower end of the side wall panel 37. Are formed, and are connected by adjusting bolts 52 and nuts 53 formed by threading the parallel rails 22 of the lower profile 20 and the decorative profile 51 at both ends. By changing the interval between the nuts of the adjustment bolt 52, the height of the lower end of the lower side wall panel 37 can be arbitrarily adjusted by the decorative profile 51. In this case, a turnbuckle member can be used instead of the adjustment bolt 52.

As shown in FIG. 8, the joining suspending means 40 includes a fitting member 41 into which a suspending bolt 42 is inserted, a nut 4
3 comprises an elongated upper seat 44 and an elongated lower seat 46 having a nut 45. Then, the two adjacent side wall panels 37 are air-tightly joined by the fitting material 41, and thereafter, the hanging plates 42 are passed through the fitting material 41, and the seat plates 44, 46 are mounted on the upper and lower ends thereof by the nuts 43, 45. In addition, although the thing which the protrusion piece was formed in the lower surface is illustrated as the seat plates 44 and 46, it is not necessarily required. In this case, the upper seat plate 44 is passed between the panels from the upper surface of the panel, and the lower seat plate 46 is tightly contacted with the lower surface of the panel and is passed between the panels, thereby tightening the two adjacent side wall panels 37.
Are firmly sandwiched by upper and lower seating plates 44 and 46 passed between the panels, and are joined in an airtight joint state. Here, the side wall panel 37 is illustrated as having a groove on four sides, but the upper side of the panel may not have the groove.

When the upper seat plate 44 is engaged with the seat plate receiving portion 21a of the channel 21 of the lower profile member 20 and slid to a predetermined position, the side wall panel 37 is moved to the parallel rail 2
2, it can be easily attached by hanging it while guiding it vertically. Thus, the lower plurality of side wall panels 37 are
It is assembled and suspended in a channel 21 of the lower section member 20 immediately below the beam 1 so as to surround four sides in an airtight state. The lower side wall panel 37 forms a cylindrical supply chamber 3 having the same size as the ceiling chamber 2 in an airtight manner.

Next, the internal configuration of the supply chamber 3 will be described. At the upper part in the supply chamber 3, a support frame member 55 (hereinafter, referred to as a grape rack) arranged in a lattice is horizontally mounted between the beams. The grape rack 55 is shown in FIG.
As shown in the figure, a narrow opening-shaped concave groove 57 (which is formed in the form of a lattice with a hollow shape made of, for example, an aluminum alloy and is formed of an elongated shelf-shaped material 56 and opens upward at an upper portion of the shape material 56. In the following, a narrow groove 58 (hereinafter, referred to as a lower channel) is formed in the lower part of the lower channel. Further, a support bracket 60 (support means) provided with a nut 62 and a seat plate 63 at both ends of the suspension bolt 61 is provided. , The grape rack 55 is easily suspended and supported. At this time, the seat plate 63 is connected to both channels 16,
57 can be freely slid, whereby the supporting bracket 60 is set at an optimum position at both ends of the grape shelf 55 in consideration of the weight distribution and the like, and the grape shelf 55 is moved to an arbitrary position in the supply chamber 3. Attached to

The filter grid 70 is provided above the filter grid 70 with, for example, four suspending members 65 (suspending means) similarly having a nut 66 and a seat plate 67. Then, the seat plate 67 of the four hanging brackets 65 is engaged with the lower channel 58 of the grape shelf 55 and slid, so that the filter grid 70 can be easily and simply brought to the same level as the lower end of the side wall panel below the grape shelf 55. Hanged horizontally. A large number of filters 7 are arranged on a filter grid 70 arranged in a grid.
1 are arranged horizontally. In this manner, the grape rack 55 and the filter grid 70 having the filter 71 are easily and appropriately mounted in the supply chamber 3, and are securely supported by the weight of the grape rack 55 and the filter grid 70 by the upper profile member 11. Is done.

Further, below the supply chamber 3, as shown in FIG. 1 and FIG.
The ceiling plate 6 is horizontally mounted on the outer side near the decorative profile 51 at the lower end of the ceiling plate 6. After the side wall panel 37 is attached, the height of the decorative section 51 covering the lower portion of the side wall panel 37 is adjusted by the height adjusting means 50 so that the decorative section 51 is adjusted.
The partition panel 7 is attached below and attached in an airtight manner,
This improves the appearance. In addition, a clean room 4 is formed below the supply chamber 3 by a ceiling plate 6 and a partition panel 7 to be airtight. The air passage 8 is routed from below the working floor of the clean room 4 to the ceiling chamber 2 to circulate the air.

In the clean room 4 having the above structure, when the cleaner unit 5 is operated, the air in the clean room 4 is sucked into the ceiling chamber 2 while being air-conditioned, and this air is filtered by the filter 71 in the supply chamber 3 and supplied to the clean room 4 again. Circulate as you do. In this case, the airtightness of the portion of the beam 1 is ensured by the upper and lower profiles 11 and 20, and the ceiling chamber 2 and the supply chamber 3 are also airtightly formed. Leakage is prevented. Therefore clean room 4
Is efficiently cleaned and becomes very clean air.

In the above embodiment, the case where the support means is constituted by the suspension bolts 61 and the nuts 62 and the seat plates 63 attached to both ends of the suspension bolts 61 has been described. It is not necessary to adopt such a structure, and a structure as shown in FIG. 10 may be employed. That is,
In the second embodiment, the support means 60 has a U-shaped fitting 80, which is fitted around the shelf 56 and fixed integrally by screws 81, and the U-shaped fitting 80 is provided.
An elongated seat plate 82 is attached to the upper part by bolts 83 and nuts 84. Therefore, also in this case, the grape shelf 55 is easily hung at an arbitrary position in the supply chamber 3 by engaging and sliding the seat plate 82 with the channel 16 of the upper profile 11. According to the second embodiment, the mounting strength can be increased by the U-shaped bracket 80 and the elongated seat plate 82.

Although the embodiment of the present invention has been described above, the structure of the upper profile 11 and the lower profile 20 and the structure of each panel 3
The assembling structure of 3, 35, 36, 37 is not limited to the above embodiment, and at least the U-shaped rail 14 for mounting the side wall panel 35 and the mounting of the lower panel 33 are provided on the upper profile member 11. Other parts may be arbitrarily selected as long as they have the receiving angle 16 and the channel 16 opening downward, and the mode of assembling the panel can be appropriately selected as needed. Further, the sealing members can be arbitrarily filled in the shaped members, the panels, and the joints and the connection portions of the shaped members and the panels, whereby the airtightness can be further improved.

When a filter member is provided in the cleaner unit itself, the filter 71 can be replaced with a perforated plate.

[0040]

As described above, according to the frame structure of the clean room according to the first aspect of the present invention, since a plurality of panels can be simultaneously attached by one profile (upper profile), construction is possible. Becomes easier. That is, the side wall panel is attached by the U-shaped rail of the shape member fixed to the beam disposed on the ceiling of the clean room, and the lower panel is attached by the receiving angle by the simple operation, so that the ceiling chamber can be formed airtight. A cleaner unit can be installed in this ceiling chamber. Further, inside the supply chamber, a support frame member is supported by a support means engaging with the engagement groove of the profile, and the filter grid is easily suspended by the support frame member. Can be installed. Therefore,
A ceiling chamber and a supply chamber can be formed above and below the beam by a simple operation, and a support frame member and a filter grid can be easily mounted in the supply chamber, thereby greatly improving workability and the like.

Further, according to the frame structure of the clean room according to the second aspect in which the lower profile is added, the opening between the beams of the supply chamber and the airtightness under the beams are ensured, so that the supply chamber is formed airtight. Since the clean room described above is formed and the side wall panels only have to be engaged with and suspended from the channel rails, all the construction work is simplified.

According to the frame structure of the clean room according to the third aspect, the support means is formed by a support fitting having a nut and a seat plate at both ends of the suspension bolt, and the support frame member is provided on the upper portion of the rectangular cylindrical main body. Is formed of a hollow profile having a narrow opening-like concave groove that opens to the base, so that the seat plate of the support fitting is engaged with the engaging groove of the profile and the concave groove of the hollow profile, and is mounted and slid. By doing so, it can be easily hung and mounted at any position, and workability can be improved. In addition, the support frame member and the filter grid can be reliably supported by the profile or the upper profile.

According to the frame structure of the clean room according to the fourth aspect, the support means is a U-shaped fitting which is fitted around the support frame member and integrally connected thereto, and is attached to the U-shaped fitting with bolts and nuts. And a seat plate to be engaged with the channel of the profile, so that the support frame member can be easily suspended at any position by being engaged with the engagement groove of the profile or the upper profile, and can be mounted. Further, the mounting strength of the support frame member can be increased.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view showing an overall configuration of an example of a frame structure of a clean room according to the present invention.

FIG. 2 is an enlarged sectional view showing a main part.

FIG. 3 is a cross-sectional view of an attachment section (a) and a connection section (b) according to the present invention.

FIG. 4 is a perspective view illustrating a mounting state of a mounting profile, a side wall panel, and a lower panel and height adjustment means.

FIG. 5 is an exploded perspective view showing an attached state of an upper profile member.

FIG. 6 is an exploded perspective view showing an attached state of an upper side wall panel.

FIG. 7 is an exploded perspective view showing an attached state of the upper panel and the lower panel of the upper layer.

FIG. 8 is an exploded perspective view showing an attached state of a lower side wall panel.

FIG. 9 is an exploded perspective view showing an attached state of a grape shelf.

FIG. 10 is an exploded perspective view showing another embodiment of the support for the grape rack.

[Explanation of symbols]

 2 ceiling chamber 3 supply chamber 5 cleaner unit 10 mounting section 11 upper section section (section section) 14 U-shaped rail 15 reinforcing rail 16 channel (engaging groove) 17 receiving angle 20 lower section section 21 channel 22 parallel rail 23 airtight plate 24 Joining piece 33 Lower panel 35 Side wall panel 37 Side wall panel 55 Grape shelf (support frame member) 56 Shelf shape member 57 Upper channel (concave groove) 60 Support metal fitting (support means) 61 Hanging bolt 62 Nut 63 Seat plate 65 Suspension Fitting (suspension means) 66 Nut 67 Seat plate 70 Filter grid 71 Filter 80 U-shaped fitting 81 Screw 82 Seat plate 83 Bolt 84 Nut

──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Toyojiro Hamamoto 3-13-12 Mita, Minato-ku, Tokyo Nippon Light Metal Co., Ltd. (56) References JP-A-61-276644 (JP, A) Sho 62-67017 (JP, U) Real opening Sho 61-12903 (JP, U) (58) Fields investigated (Int. Cl. ⁷ , DB name) E04H 5/02 E04B 5/52 B01D 1/04 F24F 7 / 06

Claims (4)

(57) [Claims] 1. A ceiling chamber comprising a side wall panel, an upper panel, and a lower panel, which communicates with a ceiling unit of a clean room via a cleaner unit and a filter between the ceiling chamber and the clean room. In a frame structure of a clean room including a supply chamber that communicates, a U-shaped rail for attaching the side wall panel to a shape fixed to a beam disposed on a ceiling of the clean room;
A receiving angle on which the lower panel is placed and a narrow opening-shaped engaging groove which opens downward are provided, and the supporting frame member is supported via supporting means which is engaged with the engaging groove of the shape member and is suspended therefrom. A frame structure for a clean room, wherein a filter grid on which the filter is mounted is suspended from the support frame member via suspension means. 2. A ceiling chamber comprising a side wall panel, an upper panel, and a lower panel, which is connected to a ceiling of a clean room via a cleaner unit and a filter between the ceiling chamber and the clean room. (1) A U-shaped rail for attaching the side wall panel to an upper section of an attachment section fixed to a beam disposed on a ceiling of the clean room. And a receiving angle on which the lower panel is placed and a narrow opening-shaped engaging groove which opens downward, and a supporting frame member is provided via supporting means which is suspended by engaging with the engaging groove of the shape member. Supporting, a filter grid on which the filter is mounted on the support frame member via a suspending means, and (2) the upper section member A lower section member, which is connected and suspends the side wall panel to form a supply chamber, has a substantially C-shaped channel which opens downward and has a seat plate receiving portion, and an airtight plate and a tip of an airtight plate above and outside the channel. The frame structure of a clean room, characterized in that a joint piece is provided on the inside and a parallel rail is provided below the inside of the channel. 3. The support means is formed by a support fitting having a nut and a seat plate at both ends of a suspension bolt, and the support frame member is provided with a narrow opening-shaped recess opening at an upper portion of the rectangular cylindrical main body. 3. The support plate according to claim 1, wherein the support plate is formed of a hollow profile, and the seat plate of the support fitting is engaged with an engagement groove of the profile and a concave groove of the hollow profile. The frame structure of the clean room described. 4. The support means is a U-shaped fitting fitted around and integrally connected to the support frame member, and is attached to the U-shaped fitting with bolts and nuts to be engaged with the channel of the profile. A seat plate is provided.
The frame structure of the clean room described.