JP3040686B2 - Liquid crystal device manufacturing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal device manufacturing apparatus, and more particularly, to a small and easy-to-handle liquid crystal device manufacturing apparatus capable of efficiently and easily manufacturing a defect-free liquid crystal device.

[0002]

2. Description of the Related Art In recent years, various liquid crystal devices have been developed and commercialized. Examples of the liquid crystal device include a liquid crystal cell and a liquid crystal display. The liquid crystal cell is, for example, a glass plate, an insulating film,
In a liquid crystal empty cell in which laminated bodies formed by laminating electrodes and the like are integrated through a spacer, the liquid crystal is obtained by filling a liquid crystal into a space formed by the laminated body and the spacer. A liquid crystal display is obtained, for example, by stacking a plurality of liquid crystal cells. Conventionally, various liquid crystal devices have been manufactured by pressing a laminate, a liquid crystal empty cell, a liquid crystal cell, and the like using a rigid press.

[0003] However, since electrodes and the like in a liquid crystal device are generally formed in a complicated mesh-like pattern, when the liquid crystal device is pressed under high pressure by a rigid press, the glass layer and the electrodes and the like in the liquid crystal device are displaced. Stress concentrates on the boundary between the surface that contacts and the surface that does not contact,
From there, the glass layer breaks. In particular, in the case of a liquid crystal empty cell, a liquid crystal cell, a liquid crystal display, or the like, since the inside of the portion where the spacer is provided is hollow or filled with liquid crystal, the glass layer receives uneven stress. Easy to break. As a result, there is a problem that liquid crystal leakage occurs, a large number of defective liquid crystal devices are manufactured, and even if a liquid crystal device is manufactured, the yield is extremely low.

In addition, when a rigid press is used, there is a problem that the parallelism of the press surface is not sufficient, uniform press-fitting cannot be performed, and a layer is easily peeled off in a liquid crystal device. In particular, as the number of layers in the liquid crystal device increases, the difference in density at the time of pressure bonding becomes more remarkable, so that the effect is greater. Therefore, when a liquid crystal device having a multilayer structure is pressure-bonded, a large number of defective products are likely to be generated due to poor pressure bonding, and there is a problem that the yield is deteriorated. Pressing with a rigid press causes distortion in the mold when pressurized, so the manner in which the force is applied may differ depending on the position of action of the upper mold and the lower mold, making it easier for the applied pressure to become uneven, It causes peeling. Further, the rigid press requires a structure capable of withstanding high pressure, and therefore has a large and complicated structure, which is inconvenient to handle.

An object of the present invention is to solve the above-mentioned conventional problems in response to the above-mentioned demands. The present invention
It is an object of the present invention to provide a small and easy-to-handle liquid crystal device manufacturing apparatus capable of efficiently and easily manufacturing a high quality liquid crystal device.

[0006]

Means for Solving the Problems The invention according to claim 1 for solving the problems comprises a material storage space and a pressure medium storage space, one of which is open , And isolating the material storage space and the pressure medium storage space,
To transmit the pressure of the pressure medium filling the pressure medium containing space to the arranged material in the material accommodating space
Placed on the opposite side of the material storage space from the open part
A pressure vessel main body comprising a pressure transmitting means having an elastic member, a pressing member fixed to the pressure vessel main body at the time of pressurization, closing the material accommodation space, and having a smooth surface for pressing the material, and wherein a liquid crystal device manufacturing apparatus characterized by comprising a heating means for heating the pressure vessel body, the invention described in claim 2 is one
And a pressurizing force of the pressure medium filled in the pressure medium storage space, the material storage space and the pressure medium storage space being separated from each other. An opening in the material storage space to transmit the material to the material disposed in the material storage space.
Is a pressure vessel main body comprising a pressure transmitting means having an elastic member disposed on the opposite side, a smooth surface fixed to the pressure vessel main body at the time of pressurization, closing the material accommodating space, and pressing the material. A pressurizing member having, a gas introduction / discharge means for introducing and discharging gas into the material storage space, and when the pressure in the material storage space is reduced by the gas introduction / discharge means, the gas in the material storage space is reduced. An apparatus for manufacturing a liquid crystal device, comprising: a ventilation securing means for allowing discharge by the gas introduction / discharge means; and a heating means for heating the inside of the pressure vessel main body.

In a preferred aspect of the liquid crystal device manufacturing apparatus, the pressure transmitting means is provided with the material accommodating space and the pressure medium accommodating space separated from each other and has a plurality of through holes. Member, a seal member disposed on the surface of the support member on the material storage space side,
A liquid crystal device manufacturing apparatus comprising: an elastic member disposed on a surface of the seal member; and the liquid crystal device, wherein the ventilation securing means is a groove formed on a surface of the pressure transmitting means facing the material storage space. A liquid crystal device manufacturing apparatus, wherein the manufacturing apparatus, wherein the ventilation securing means is a groove formed in an area other than the area where the material is placed, on a surface of the pressure transmitting means facing the material housing space; The ventilation securing means is provided with an opening space portion capable of accommodating the material, and in a spacer formed on the upper surface of the pressure transmitting means in the material accommodating space so as to be disposed on the surface facing the smooth surface of the pressing member. A liquid crystal device manufacturing apparatus, wherein the groove is a formed groove, wherein the ventilation securing means includes an opening space portion capable of accommodating the material, and is provided above the pressure transmitting means in the material accommodating space. It may include a liquid crystal device manufacturing apparatus, and a net member provided on the surface facing the smooth surface of the pressing member in the positionable-formed spacers.

[0008]

The liquid crystal device manufacturing apparatus according to the first aspect operates as follows. That is, the material is arranged in the material accommodation space. The material receiving space is closed by the smooth surface of the holding member. The pressure medium is filled in the pressure medium storage space. The inside of the pressure medium storage space is pressurized. The elastic member in the pressure transmitting means transmits the pressing force of the pressure medium filled in the pressure medium storage space to the material, and presses the material.
The smooth surface of the holding member presses the material. The heating means heats the inside of the pressure vessel main body. The material is pressed, and a liquid crystal device is manufactured.

The liquid crystal device manufacturing apparatus according to the second aspect operates as follows. That is, the material is arranged in the material accommodation space. The material receiving space is closed by the smooth surface of the holding member. Gas introduction and discharge means exhausts the gas in the material storage space. The material storage space is in a reduced pressure state. The material accommodating space is hermetically closed by a smooth surface of the holding member. The pressure medium is filled in the pressure medium storage space. The elastic member in the pressure transmitting means transmits the pressing force of the pressure medium filled in the pressure medium storage space to the material, and presses the material. The smooth surface of the holding member presses the material. The material is pressed by the elastic member and the smooth surface.

[0010] At this time, there is a space between the region of the elastic member where the material is not disposed and the smooth surface of the pressing member. Further, when the gas in the material accommodating space is exhausted by the gas introduction / exhaust means and the pressure medium accommodating space is filled with the pressure medium, the elastic member expands toward the smooth surface. The volume of the space is reduced. The elastic member contacts the smooth surface. During this time, the material is pressed by the elastic member and the smooth surface.

At the time of pressurization, the flow path for exhausting the gas in the material accommodating space by the gas introducing / discharging means is secured by the ventilation securing means. Will continue. The heating means heats the inside of the pressure vessel main body. This heating and pressurization by the elastic member and the smooth surface generate gas from the material. This gas is exhausted by the gas introduction / discharge means via the ventilation securing means. As a result, the material is pressed tightly and a liquid crystal device without voids is manufactured.

[0012]

【Example】

(Embodiment 1) Hereinafter, a first embodiment of a liquid crystal device manufacturing apparatus according to the present invention will be described with reference to the drawings.

FIG. 1 is a schematic sectional view showing an embodiment of a liquid crystal device manufacturing apparatus according to the present invention. The liquid crystal device manufacturing apparatus according to the first embodiment shown in FIG. 1 includes a pressure vessel main body 1, a gas supply / discharge device, a yoke 5, and an electric heater.

The pressure vessel main body 1 has a first main body 6, a second main body 7, an elastic member 3, and a pressure medium supply means 21E (for this, see FIG. 5).

The first main body 6 is a disk-shaped member having two planes parallel to each other. As shown in FIGS. 1 and 2, the first main body 6 has a disk-shaped through hole 8 having a common central axis with the central axis of the first main body 6. Therefore, it can be said that the first main body 6 is an annular body having a small height.

The first main body 6 is provided with an O-ring 38 and a gas introduction / discharge path 41. The O-ring 38 is mounted in an annular groove formed on one end surface of the first main body 6. The gas introduction / discharge passage 41 has a third opening 39 that opens on the inner peripheral surface of the first main body 6 on the end surface side where the O-ring 38 is provided, and a fourth opening that opens on the outer peripheral surface of the first main body 6. 40 is provided.

The second main body 7 is a disk-shaped member having two planes parallel to each other and having the same outer diameter as the first main body 6. The second main body 7 has a recess 9 having a common central axis with the central axis of the first main body 6 and having the same inner diameter as the inner diameter of the through hole 8 in the first main body 6.

The first main body 6 is stacked on the second main body 7 arranged with the concave portion 9 facing upward, with the O-ring 38 facing upward. At this time, a cylindrical concave portion is formed by the through hole 8 in the first main body 6 and the concave portion 9 in the second main body 7.

As shown in FIG. 2, the upper end surface of the second main body 7 that contacts the first main body 6 is inclined toward the recess 9 side,
An annular tapered surface 10 formed in an annular shape so as to surround the concave portion 9;
And an annular horizontal surface 11 formed in an annular shape so as to be continuous. For this reason, when the first main body 6 is stacked on the upper end surface of the second main body 7, a gap is formed by the lower end surface of the first main body 6, the annular horizontal surface 11 parallel to the lower end surface, and the annular tapered surface 10. It is formed. In this gap, a portion formed by the lower end surface of the first main body 6 and the annular tapered surface 10 forms a backup ring mounting portion 12.
It is. The backup ring mounting section 12 has a wedge-shaped vertical cross section. Further, a portion formed by the lower end surface of the first main body 6 and the annular horizontal surface 11 is a seal member mounting portion 13. The shape of the vertical section of the seal member mounting portion 13 is rectangular.

A backup ring 14 whose vertical cross-sectional shape is the same as that of the backup ring mounting portion 13 is mounted on the backup ring mounting portion 12. In this embodiment, the backup ring 1
Reference numeral 4 is made of metal. In addition, the backup ring 14
The material is not particularly limited as long as it is formed of a material that can be plastically deformed or elastically deformed when pressurized. Examples of the material of the backup ring 14 include various thermoplastic resins, various metals, and various rubbers.
It can be appropriately selected according to the pressing force.

As shown in FIG. 3, the elastic member 3 has a seal member 15, a support member 16, and an elastic body 15A.

The seal member 15 is a thin disk-shaped member, and is made of rubber in this embodiment. Note that the seal member 15 is not particularly limited as long as it has elasticity and pressure resistance and can transmit the pressure of the pressurized medium.

The support member 16 is a thin disk-shaped member.
The support member 16 has a large number of through holes 17 formed in the board surface. In this embodiment, the support member 16 is made of metal.

As shown in FIG. 2, in this embodiment, when the seal member 15 is disposed concentrically on the support member 16, the peripheral portion of the seal member 15 not in contact with the support member 16 is Folded on the back of 16,
It is integrated with the support member 16. The peripheral edge of the seal member 15 integrated with the support member 16 is mounted on the seal member mounting portion 13. As a result, the seal member 15 integrated with the support member 16 is stretched inside the pressure vessel main body 1. At this time, the support member 16 prevents the central portion of the seal member 15 from hanging down or curving downward in the pressure vessel main body 1, and the pressure medium housing space 1
It has a function of transmitting the pressure of the pressure medium 19 filled in the seal 8 to the seal member 15 through the opening 17.

The elastic body 15A is a disk-shaped member, and is made of rubber in this embodiment. The elastic body 15A is
The material is not particularly limited as long as it has elasticity and pressure resistance and can transmit the pressure of the pressurized medium. Elastic body 15
As shown in FIGS. 3 and 4, in A, grooves 15B arranged radially from the center thereof are formed on one of the boards. The groove 15B is an example of a ventilation securing means.
The groove 15B has a predetermined length L from the peripheral portion of the elastic body 15A.
Having. The length L is determined so that the groove 15B is formed in a region other than the region where the material 24 is placed on the board of the elastic body 15A. The elastic body 15A is placed on the seal member 15 such that the groove 15B faces upward. In addition, the ventilation securing means can be formed as a groove provided on a surface of the elastic member 3 facing the material accommodating space 20 described later.

When the elastic member 3 is formed in the pressure vessel main body 1, the recess formed by the first main body 6 and the second main body 7 is divided into two spaces. Among these two spaces, the space formed by the concave portion 9 of the second main body 7 and the elastic member 3 is a pressure medium accommodating space 18 and formed by the through hole 8 of the first main body 6 and the elastic member 3. Is the material storage space 20. Elastic member 3 in material accommodation space 20
A material 24 is disposed on the upper side. In this example,
The material 24 is an aggregate formed by stacking a predetermined number of liquid crystal cells. As the material, a glass plate, an insulating film, a liquid crystal empty cell constituting member formed by stacking electrodes and the like, a liquid crystal empty cell precursor obtained by stacking the laminates via a spacer, and a predetermined number of liquid crystal empty cells are stacked. There is no particular limitation as long as a liquid crystal device can be formed by heat and pressure molding, such as an aggregate.

In this embodiment, the first main body 6 is
When the material housing space 20 is closed by a smooth surface 46 of the yoke 5 described later, the height is designed so that the smooth surface 46 and the upper surface of the material 24 arranged in the material housing space 20 are in contact with each other. When the upper end surface of the first main body 6 where the O-ring 38 is provided is covered with the smooth surface 46, the O-ring 3
8 and the smooth surface 46 hermetically close the material storage space 20.

As shown in FIG. 5, the pressure medium supply means 21E includes a pressure medium introduction / discharge path 21 and a pressure medium storage tank 21.
A, the pipe P, the first pump 21B, and the second pipe P ₂
, A valve V, and a second pump 21C.

The pressure medium introduction / discharge passage 21 communicates a first opening 22 opening on the bottom surface of the second main body 7 and a second opening 23 opening on the outer peripheral surface of the second main body 7. The pressure medium storage tank 21 </ b> A is installed outside the pressure vessel main body 1 and houses the pressure medium 19 inside. The pipe P introduces the pressure medium 19 from the pressure medium storage tank 21 </ b> A to the second opening 23. The first pump 21B is provided in the middle of the pipe P, forcibly discharges the pressure medium 19 to the pressure medium introduction / discharge path 21 and forcibly discharges the same. The second pipe P ₂ branches in the middle of the pipe P,
It communicates with the pressure medium storage tank 21A. Valve V and the second pump 21C is provided in the middle of the second pipe P _2. The pressure medium 19 is filled in the pressure medium storage space 18 by the pressure medium supply means 21E.

In the present invention, the pressure transmitting means is formed to have the elastic member 3 and the pressure medium supply means 21E. In this pressure transmitting means, the material 24 is firmly supported by the presence of the support member 16, and the material accommodating space 20 and the pressure medium accommodating space 18 are liquid-tightly isolated by the presence of the sealing member 15, so that the pressure medium The pressure medium 19 in the storage space 18 does not leak into the material storage space 20. Pressure medium 1 filled in pressure medium storage space 18
9 is applied to the seal member 15 and the elastic body 15A through a large number of through holes 17 in the support member 16, and is transmitted to the material 24 via the seal member 15 and the elastic body 15A. The pressure transmitting means is an elastic body 1
5A may be omitted and formed by the support member 16 and the seal member 15. In this case, the seal member 15 becomes an elastic member in the pressure transmitting means.

The pressure vessel main body 1 is supported by a frame (not shown). Pressure vessel body 1
Is a disk shape in this embodiment, but may be a square disk shape in design.

As shown in FIG. 5, a gas supply / discharge device (not shown) is connected to a pipe P ₁ connected to the fourth opening 40 and one end of the pipe P ₁ to send out gas. And a pump (not shown) capable of discharging. This gas supply / discharge device is connected to a gas introduction / discharge path 41. In this embodiment, the gas introduction / discharge means is formed to have a gas introduction / discharge path 41 and a gas supply / discharge device.

As shown in FIGS. 1 and 6, the yoke 5 is formed by four flat plates. The yoke 5 has a pair of vertical portions 42 erected vertically, and an upper horizontal portion 43 and a lower horizontal portion 44 provided in parallel so as to extend horizontally over the upper and lower portions of the vertical portions 42. It becomes.
The pair of vertical portions 42, upper horizontal portion 43, and lower horizontal portion 44 are integrated. In this example,
A surface located inside the yoke 5 in the upper horizontal portion 43 is a smooth surface 46. The yoke 5 serves as a holding member in the present invention.

In the yoke 5, an opening formed by the upper horizontal portion 43 and the lower horizontal portion 44 and the pair of vertical portions 42 (hereinafter referred to as “working opening 45”) accommodates the pressure vessel main body 1. Have the required size. In other words, when the pressure vessel main body 1 is accommodated in the working opening 45, the smooth surface 46 is located at a position in contact with the upper surface of the pressure vessel main body 1, and the upper surface of the lower horizontal portion 44 is
Is designed so that the distance between the pair of vertical portions 42 is sufficiently longer than the diameter of the pressure vessel body 1.

In this embodiment, the yoke 5 comprises a guide 47A which slides over a pair of horizontally arranged rails (hereinafter referred to as "horizontal rails 47"), and a cylinder 48 as a drive source thereof. It has. Therefore, when arranging the material 24 in the material accommodating space 20 in the pressure vessel main body 1, the yoke 5 can be automatically horizontally moved to a position retracted from the pressure vessel main body 1.
Further, when performing pressure molding, the working opening 4 of the yoke 5
The yoke 5 can be automatically horizontally moved to a position where the yoke 5 can accommodate the pressure vessel main body 1. The yoke 5 is fixedly arranged when the drive source is not driven. Note that an electric motor may be used as a drive source of the yoke 5.

In this embodiment, an electric heater (not shown) is provided inside the pair of vertical portions 42, upper horizontal portion 43 and lower horizontal portion 44 of the yoke 5.
This electric heater is the heating means in the present invention.
The structure of the heating means is not particularly limited as long as the heating means is designed to be able to heat the material 24 while the material 24 housed in the pressure vessel main body 1 is being pressurized.

In FIG. 6, reference numeral 49 denotes a frame for supporting and fixing the entire apparatus, and reference numeral 50 denotes an operation box for controlling the operation of the entire apparatus and supporting the operation control.

Next, the production of a liquid crystal device using this liquid crystal device production apparatus will be described.

First, the yoke 5 is made to stand by at a position retracted from the pressure vessel main body 1 as an initial state. Pressure vessel body 1
Open the recessed part of and expose it. The elastic body 15A is placed on the seal member 15 in the material housing space 20 of the pressure vessel main body 1. At this time, since the seal member 15 is integrated with the support member 16, even if the elastic body 15 </ b> A is placed on the seal member 15, the seal member 15 does not fall down and is firmly placed on the seal member 15. Enshrined. Next, the material 24 is arranged on the elastic member 15A.
The material 24 is an aggregate formed by stacking a predetermined number of liquid crystal cells. In this embodiment, the assembly is provisionally press-bonded, but the liquid crystal cells which are present separately may be arranged on the elastic member 15A one by one without performing the pre-press bonding.

The cylinder 48 is driven to move the yoke 5 horizontally along the horizontal rail 47, and the pressure vessel main body 1 is accommodated in the working opening 45 of the yoke 5. York 5
, The material storage space 20 in the pressure vessel main body 1 is closed. At this time, the gas introduction / discharge means is driven. The gas in the material storage space 20 is sucked and exhausted from the gas introduction / exhaust passage 41. Material storage space 20
The inside is decompressed. Accordingly, the elastic member 15A swells toward the smooth surface 46, and in some cases, the elastic member 15A
The upper surface of A contacts the smooth surface 46. At that time, the elastic member 1
Since the groove 15B is formed on the upper surface of the groove 5A, the groove 1B is formed.
The gas in the material storage space 20 continues to be smoothly exhausted through 5B. Further, the third opening 3 of the gas introduction / discharge passage 41
9 is open at the upper end of the inner peripheral surface of the first main body 6, even if the swelling elastic member 15A contacts the smooth surface 46, the groove 1
The gas in the material storage space 20 is smoothly exhausted by the 5B and the third opening 39.

While the gas introduction / discharge means is driven, the pressure medium 19 is filled into the pressure medium storage space 18 via the pressure medium introduction / discharge path 21 by the pressure medium supply means. When the pressure in the pressure medium storage space 18 reaches a predetermined pressure, the filling of the pressure medium 19 into the pressure medium storage space 18 by the pressure medium supply unit is stopped. The predetermined pressure of the pressure medium 19 is applied to the elastic member 15A through the through hole 17 in the support member 16. The predetermined pressure of the pressure medium 19 acts to push up the smooth surface 46 via the elastic member 15A and the material 24, but does not rise because the yoke 5 is fixedly arranged. Therefore, the pressure medium 1
By the predetermined pressure of 9, the material 24 is pressed while being sandwiched between the elastic member 15A and the smooth surface 46. Material 24
Is usually about 0.5 to 9 kg / cm ² .

In the present invention, as shown in this embodiment, since the pressure for pressurizing the material 24 is small as described above, the cover or the cover member fitted into the concave portion of the pressure vessel main body 1 is not used. No simplification of the device structure is achieved without the need.

During this pressurization, heating is performed by an electric heater provided in the yoke 5. The heat generated by the electric heater is conducted to the yoke 5 and the pressure vessel main body 1, whereby the material 24 is heated and pressurized. The temperature at which the material 24 is heated is usually about 100 to 220 ° C.

When the material 24 is heated and pressurized, gas may be generated from the material 24. However, since the gas in the material accommodating space 20 is exhausted by the gas supply / discharge device, the generated gas passes through the groove 15B formed on the upper surface of the elastic member 15A and the gas introduction / discharge path 41 to the pressure vessel main body 1. It is exhausted outside. Therefore, gas generated in the material 24 during heating and pressurization does not remain. As a result, a defective liquid crystal device having voids and cracks is not manufactured.

By performing such a heating and pressurizing treatment, the material 24 is integrally pressed. As a result, a liquid crystal display is manufactured.

When the heating and pressurizing process for a predetermined time is completed,
By driving the pressure medium supply device, the pressure medium 19 filled in the pressure medium storage space 18 through the pressure medium introduction / discharge path 21 is discharged until the pressure in the pressure medium storage space 18 returns to normal pressure. . With the discharge of the pressure medium 19 or after the pressure in the pressure medium storage space 18 returns to the normal pressure, the gas supply / discharge device is driven to introduce the gas into the material storage space 20. Due to the introduction of the gas, the elastic member 15A swelling toward the material accommodating space 20 is pushed back toward the support member 16 and returns to its original flat surface. Next, cylinder 4
By driving the yoke 5 again, the yoke 5 is retracted.
At this time, since the gas is introduced into the material accommodating space 20, the elastic member 15A is not pulled toward the smooth surface 46 when the yoke 5 is retracted from the pressure vessel main body 1, so that the elastic member 15A No cracks occur. The liquid crystal device pressed by heating and pressing is taken out of the pressure vessel main body 1.

When the liquid crystal device is taken out of the material accommodating space 20, the smooth surface 46 of the elastic member 15A is
Since the flat surface on the side is not swollen, is in a flat flat state, and has no damage such as cracks, the next liquid crystal device can be immediately manufactured.

The liquid crystal device manufacturing apparatus according to the first embodiment has the following effects.

(1) Since the cover member is not used and the holding member is also used as the cover member, the size of the apparatus can be reduced and the handling thereof can be facilitated. Furthermore, when closing the material storage space in the pressure vessel main body with the smooth surface of the holding member, it is not necessary to exhaust the material storage space, and the operation is simple.

(2) The problem of manufacturing a liquid crystal device by a rigid press can be solved. That is,
The layers in the liquid crystal device can be pressed uniformly. Therefore, layer separation in the liquid crystal device can be prevented. The glass layer can be prevented from being damaged. Therefore, a liquid crystal device having no defect can be manufactured with high yield. The yield can be improved about 1.5 times or more as compared with a mechanical press.

(3) Since the groove is provided on the upper surface of the elastic member, the pressure in the material accommodating space causes the elastic member to swell and the upper surface of the elastic member comes into contact with the smooth surface of the pressing member. Even if there is a case, the space containing the material can be effectively reduced to a predetermined degree of pressure reduction.

(4) The gas generated at the time of heating and pressing is
Since it is removed through the groove provided in the elastic member, a high-quality liquid crystal device can be efficiently manufactured without generating voids or bubbles.

(5) The pressing member can be easily detached after the pressing operation. When the pressing member is retracted from the pressure vessel main body, the elastic member is not damaged by pulling the elastic member. Therefore, there are few failures.

(6) After completion of the heating and pressing operation, since the swelling due to the pressing operation of the elastic member has been eliminated, it is necessary to start the heating and pressing operation of the next material without replacing the elastic member. Thus, a large number of liquid crystal devices can be manufactured continuously efficiently and easily.

The liquid crystal device manufacturing apparatus according to the first embodiment is provided with the gas introduction / discharge means and the ventilation securing means. In the present invention, these may be appropriately selected and used as needed. The object of the present invention can be achieved even when not used. However, when the gas introduction / discharge means and the ventilation securing means are not used, the effects of the above (3) to (6) may not be obtained. Therefore, in the present invention, an embodiment using these is preferable.

(Embodiment 2) FIG. 7 is a schematic sectional view showing an embodiment of a liquid crystal device manufacturing apparatus according to the present invention.

The liquid crystal device manufacturing apparatus according to the second embodiment is different from the liquid crystal device manufacturing apparatus according to the first embodiment in that the yoke 5 is replaced with a flat yoke 5a and the pressure vessel main body 1 is straddled on the horizontal rail 47. The liquid crystal device manufacturing apparatus according to the first embodiment is the same as the liquid crystal device manufacturing apparatus according to the first embodiment except that the pressure vessel main body 1 provided with a guide 47A that slides and a cylinder 48 (see FIG. 6) as its driving source is replaced. Therefore, the details of each member can be easily understood by referring to the description in the first embodiment.

In the second embodiment, the yoke 5a is fixedly arranged at a position in contact with the upper end surface of the pressure vessel main body 1. The surface of the plate surface of the yoke 5a that is in contact with the upper end surface of the pressure vessel main body 1 is the smooth surface 46. The yoke 5a is a holding member. The pressure vessel main body 1 can automatically and horizontally move on the horizontal rail 47 from a position where the concave portion is opened to a position where it is closed by the smooth surface 46.

In this embodiment, the yoke 5a constitutes a holding member.

The yoke 5a is connected to the pressure vessel main body 1.
Is disposed with a slight clearance with respect to the upper end surface of the pressure vessel main body 1, and descends to close the recessed portion of the pressure vessel main body 1 during the heating and pressing molding, and the flat surface 46 and the pressure vessel main body 1 are lowered.
May be designed so as to be fixed at a position where the upper end surface contacts the upper surface.

The liquid crystal device manufacturing apparatus of the second embodiment has the same functions and functions as the liquid crystal device manufacturing apparatus of the first embodiment. Therefore, when the liquid crystal device manufacturing apparatus of the second embodiment is used, a liquid crystal device can be manufactured in the same manner as in the first embodiment. The liquid crystal device manufacturing apparatus according to the second embodiment has the same excellent effects as the liquid crystal device manufacturing apparatus according to the first embodiment. However, compared to the liquid crystal device manufacturing apparatus according to the first embodiment, the yoke 5a can be simplified. Therefore, the entire apparatus can be reduced in size and simplified.

(Embodiment 3) As shown in FIG. 8, the liquid crystal device manufacturing apparatus according to the third embodiment is different from the liquid crystal device manufacturing apparatus according to the first embodiment in that the yoke 5 is replaced with an upper yoke 5b formed in a flat plate shape. Except that the pressure vessel main body 1 is fixedly mounted on the upper surface of the lower yoke 5c instead of the lower yoke 5c, the configuration is the same as that of the liquid crystal device manufacturing apparatus of the first embodiment.

The lower yoke 5c is connected to the horizontal rail 4
A guide 47A that straddles and slides on the top 7, and a cylinder 48 (the same as in FIG. 6) as a drive source for the guide 47A are provided.

The upper yoke 5b is fixedly arranged at a position in contact with the upper end surface of the pressure vessel main body 1.
The surface of the plate surface of the upper yoke 5b that is in contact with the upper end surface of the pressure vessel main body 1 is a smooth surface. The upper yoke 5b is a holding member. The pressure vessel main body 1 is fixed on the lower yoke 5c in a state where the concave portion is opened upward. Therefore, the pressure vessel main body 1 can automatically and horizontally move on the horizontal rail 47 from a position where the recessed portion is opened to a position where it is closed by the smooth surface 46. Since the lower yoke 5c has the pressure vessel main body 1 fixed and mounted on the upper surface thereof, the lower yoke 5c
Also has a function as a mounting table for the pressure vessel main body 1 and a function as a base for fixing the pressure vessel main body 1.

The upper yoke 5b is disposed with a slight clearance with respect to the upper end surface of the pressure vessel main body 1, and descends to close the concave portion of the pressure vessel main body 1 at the time of hot press molding. The smooth surface and the pressure vessel body 1
May be designed so as to be fixed at a position where the upper end surface contacts the upper surface.

The liquid crystal device manufacturing apparatus of the third embodiment has the same functions and functions as those of the liquid crystal device manufacturing apparatus of the first embodiment. Therefore, when the liquid crystal device manufacturing apparatus of the third embodiment is used, a liquid crystal device can be manufactured in the same manner as in the first embodiment. The liquid crystal device manufacturing apparatus according to the third embodiment has the same excellent effects as the liquid crystal device manufacturing apparatus according to the first embodiment.

(Embodiment 4) FIG. 9 is a schematic sectional view showing an embodiment of a liquid crystal device manufacturing apparatus according to the present invention.
As shown in FIG. 9, the liquid crystal device manufacturing apparatus according to the fourth embodiment includes a pressure vessel main body 1a having pressure transmitting means, a gas supply / discharge device, and a yoke 5d.

As shown in FIG. 9, the pressure vessel main body 1a differs from the pressure vessel main body 1 in the liquid crystal device manufacturing apparatus of the first embodiment in its structure, arrangement state, posture state and the like.

First, the pressure vessel main body 1a is
A groove 15B is formed on the surface of the seal member 15 without using 5A. The groove 15B may be formed so as to smoothly exhaust the gas that may be present in the material 24 or the gas existing in the material accommodating space 20. For example, the groove 15B is substantially the same as that in the first embodiment. The same is formed. The gas supply / discharge device provided in the pressure vessel main body 1a is substantially the same as that in the first embodiment.

The upper surface of the yoke 5d is a smooth surface 46. This yoke 5d may be fixed in its position unchanged, or may be formed to be horizontally movable.

The pressure vessel main body 1a is disposed on the smooth surface 46 of the yoke 5d with its concave portion facing downward. The pressure vessel main body 1a is vertically movable by a cylinder (not shown), and is fixed at an arbitrary position.

The yoke 5 is provided with an electric heater inside the yoke 5 as in the second embodiment. Therefore, the details of each member can be easily understood by referring to the description in the first and second embodiments.

Next, the manufacture of a liquid crystal device using the liquid crystal device manufacturing apparatus of the fourth embodiment will be described.

First, as an initial state, the pressure vessel main body 1a is positioned above the yoke 5d. In this state, the yoke 5
The concave portion of the pressure vessel main body 1a is located above the smooth surface 46 of d by a predetermined distance, and the opening of the concave portion opens toward the smooth surface 46.

The material 24 is placed at a predetermined position on the smooth surface 46 of the yoke 5d. The material 24 can be the same as in the first embodiment. In the fourth embodiment, the material 24 is made of a glass layer,
It is a liquid crystal empty cell precursor obtained by laminating a laminate formed by laminating electrodes, insulating films and the like via a spacer. The liquid crystal empty cell precursor is temporarily compressed.

A cylinder (not shown) provided in the pressure vessel main body 1a is driven, and the pressure vessel main body 1a is lowered so that the liquid crystal empty cell precursor is accommodated in the concave portion of the pressure vessel main body 1a. The pressure vessel main body 1 is fixedly arranged at a position where the lower end face of the pressure vessel main body 1a and the smooth surface 46 are in contact with each other. Then, the material storage space 20 in the pressure vessel main body 1 is closed by the smooth surface 46.
At this time, the material 24 is in the material accommodation space 2 of the pressure vessel main body 1.
0, one end of which is in contact with the smooth surface 46 and the other end of which is in contact with the seal member 15.

The gas in the material accommodating space 20 is sucked and exhausted from the gas introduction / discharge path 41 constituting a part of the gas introduction / discharge means. The inside of the material storage space 20 is decompressed. Along with this, the seal member 15 swells toward the smooth surface 46,
It contacts the smooth surface 46. In FIG. 9, the depth of the recess in the pressure vessel main body 1a is illustrated to be large for easy understanding, but the depth from the opening of the recess to the sealing member 15A is determined by the liquid crystal empty cell. Since it is substantially the same as the thickness of the precursor, it is designed to have a very small depth dimension. Therefore, when the pressure in the material accommodating space 20 is reduced, the seal member 15A swells and the smooth surface 46 is easily formed.
It adheres to.

At this time, the groove 15 is formed on the surface of the seal member 15.
Since B is formed, the gas in the material storage space 20 continues to be smoothly exhausted through the groove 15B. Further, since the third opening 39 of the gas introduction / discharge passage 41 is open at the lower end of the inner peripheral surface of the first main body 6, even if the swelling seal member 15 contacts the smooth surface 46, the groove 15B and the third opening 39 are formed. The gas in the material storage space 20 is smoothly exhausted by the part 39.

While the gas introduction / discharge means is driven, the pressure medium 19 is filled into the pressure medium storage space 18 via the pressure medium introduction / discharge path 21 by the pressure medium supply means. When the pressure in the pressure medium storage space 18 reaches a predetermined pressure, the filling of the pressure medium 19 into the pressure medium storage space 18 by the pressure medium supply unit is stopped. The predetermined pressure of the pressure medium 19 is applied to the through holes 17 in the support member 16 (see FIG. 2).
(See FIG. 2).
The predetermined pressure of the pressure medium 19 acts to push down the smooth surface 46 via the seal member 15 and the material 24, but does not lower because the yoke 5 is fixedly arranged. Therefore, the material 24 is pressed by the predetermined pressure of the pressure medium 19 while being sandwiched between the seal member 15 and the smooth surface 46. The pressure for pressurizing the material 24 is usually about 1 to ² kg / cm ² . During this pressurization, the yoke 5
Heating is performed by an electric heater provided in d. The heat from the electric heater is conducted to the yoke 5d and the pressure vessel main body 1, whereby the material 24 is heated and pressurized. Material 2
The temperature for heating 4 is usually about 140 to 160 ° C.

When the material 24 is heated and pressurized, gas may be generated from the material 24. However, since the gas in the material accommodating space 20 is exhausted by the gas supply / discharge device, the generated gas is supplied to the outside of the pressure vessel main body 1a through the groove 15B formed on the surface of the seal member 15 and the gas introduction / discharge path 41. Exhausted. Therefore, gas generated in the material 24 during heating and pressurization does not remain. As a result, a defective liquid crystal device having voids and cracks is not manufactured.

By performing such a heating and pressurizing treatment, the material 24 is integrally pressed, and a liquid crystal empty cell is manufactured.

When the heating and pressurizing process for a predetermined time is completed,
By driving the pressure medium supply device, the pressure medium 19 filled in the pressure medium storage space 18 through the pressure medium introduction / discharge path 21 is discharged until the pressure in the pressure medium storage space 18 returns to normal pressure. . With the discharge of the pressure medium 19 or after the pressure in the pressure medium storage space 18 returns to the normal pressure, the gas supply / discharge device is driven to introduce the gas into the material storage space 20. Due to the introduction of the gas, the seal member 15 swelling toward the material storage space 20 is pushed back toward the support member 16 and returns to the original state. Next, the cylinder provided in the pressure vessel main body 1a is driven again to raise the pressure vessel main body 1a. At this time, since gas is introduced into the material accommodating space 20, when the pressure vessel main body 1a is raised, the sealing member 1
5 is not pulled toward the smooth surface 46, so that the seal member 15 does not crack. On the smooth surface 46 of the yoke 5d, there is a liquid crystal empty cell formed by pressing a liquid crystal empty cell precursor.

In the fourth embodiment, the raw material 24 is
By automatically arranging the liquid crystal device on the flat surface 6 and automatically moving the finished liquid crystal device from the smooth surface 46, continuous production of the liquid crystal device can be efficiently performed.

The liquid crystal device manufacturing apparatus according to the fourth embodiment has the same effects as the liquid crystal device manufacturing apparatus according to the first embodiment.

(Embodiment 5) FIG. 10 is a schematic sectional view showing an embodiment of a liquid crystal device manufacturing apparatus according to the present invention. As shown in FIG. 10, the liquid crystal device manufacturing apparatus according to the fifth embodiment differs from the pressure vessel body 1b in that the yoke 5e has a smooth lower surface 46 in terms of its structure and the like.
That is, the elastic body 15A has no groove 15B as shown in FIG. 3 formed on the surface facing the smooth surface 46 of the yoke 5e, and closes the material accommodating space 20 with the smooth surface 46. In this case, the spacer 4 is interposed in a region not occupied by the material 24 in the space between the upper surface of the elastic member 15A and the smooth surface 46. 4A on the surface facing
Is different from the liquid crystal device manufacturing apparatus of the first embodiment in the point that is provided. Therefore, the details of each member can be easily understood by referring to the description in the first embodiment.

As shown in FIGS. 10 and 11, the spacer 4 is a ring-shaped plate, and has a groove 4A having a V-shaped cross section on its surface. And this spacer 4
It is provided with a housing opening 4B having a plane shape larger than the plane shape of the raw material 24, for example, a square or a circle (a circle in the fifth embodiment).

The material of the spacer 4 may be a hard rubber or the like. In addition, the groove 14A may have a function of effectively removing gas from the space for accommodating the material, in other words, the accommodation opening 4B, and may have any cross-sectional shape. It doesn't matter how many pieces are formed. For example, a plurality of grooves may be formed radially from the inside to the outside on the surface of the spacer 4, and the cross section of the groove 4A may be rectangular or semi-circular as shown in FIG. May be.

When the spacers 4 are provided in this manner, the pressure in the material accommodating space 20 is reduced as in the first embodiment, and the pressurized medium 19 is filled in the pressurized medium accommodating space 18 during the heat and pressure molding. By doing so, it is possible to prevent the elastic body 15A from swelling and undergoing excessive deformation such that the swelling elastic body 15A comes into contact with the lower surface of the smooth surface 46. Since the elastic body 15A does not undergo excessive deformation or distortion by interposing the spacer 4, the damage to the elastic body 15A can be reduced accordingly.

Since the groove 4A is provided on the upper surface of the spacer 4, even if the upper surface of the spacer 4 and the lower surface of the smooth surface 24 are brought into close contact with each other by reducing the pressure in the material accommodating space 20, the groove 4A is formed. The gas in the region where the material 24 exists can be effectively discharged. Thereby, the gas generated from the raw material 24 can be effectively discharged to the outside of the pressure vessel body 20 at the time of the heat and pressure molding, and a liquid crystal device free from voids and cracks can be easily manufactured. The liquid crystal device manufacturing apparatus according to the fifth embodiment has substantially the same operation and effect as the liquid crystal device manufacturing apparatus according to the first embodiment.

(Embodiment 6) FIG. 13 is a schematic sectional view showing an embodiment of a liquid crystal device manufacturing apparatus according to the present invention. As shown in FIG. 13, the liquid crystal device manufacturing apparatus according to the sixth embodiment uses a spacer 4 having an accommodation space 4B having substantially the same planar shape as the material 24 as shown in FIG. Different from manufacturing equipment.

Also in the liquid crystal device manufacturing apparatus according to the sixth embodiment, since the groove 4A is provided in the spacer 4, substantially the same operation and effect as those of the liquid crystal device manufacturing apparatus according to the fifth embodiment can be obtained.

The effect of the liquid crystal device manufacturing apparatus according to the sixth embodiment is notable because the entire space between the elastic body 15A and the smooth surface 46 is substantially occupied by the material 24 and the spacer 4. Since the swelling of the elastic member 15A is suppressed as much as possible during the pressure forming operation or the pressure reducing operation at the time of the non-pressure forming, the damage due to the deformation fatigue of the elastic member 15A is reduced as much as possible. In other words, in the liquid crystal device manufacturing apparatus according to the sixth embodiment, the elastic member 3 is hardly damaged, and the elastic member 3 can be made to last longer. In addition,
The liquid crystal device manufacturing apparatus according to the sixth embodiment has substantially the same operation and effect as the liquid crystal device manufacturing apparatus according to the fifth embodiment.

(Embodiment 7) FIG. 14 is a schematic sectional view showing an embodiment of a liquid crystal device manufacturing apparatus according to the present invention. As shown in FIGS. 14 and 15, the liquid crystal device manufacturing apparatus according to the seventh embodiment includes the spacer 4 having the accommodation space 4 </ b> B having the same planar shape as the material 24.
The difference from the liquid crystal device manufacturing apparatus of the sixth embodiment is that the outer spacer 4C and the inner spacer 4D are formed as a pair.

The inner spacer 4D has a housing space 4B having a plane shape substantially the same as the plane shape of the material 24, and is a circular disk-shaped body. A plurality of grooves 4a are formed on the upper surface of the inner spacer 4D. On the other hand, the outer spacer 4
C is an annular disk having a circular opening substantially the same as the planar shape of the inner spacer 4D. The outer spacer 4C also has a plurality of grooves 4A formed on the upper surface thereof. The grooves 4a and 4A are provided so as to form a series of grooves when the inner spacer 4D is fitted into the opening of the outer spacer 4C.

The advantages of a pair of spacers 4 are as follows. If a plurality of types of inner spacers 4D having different accommodation spaces 4B are prepared, only the appropriately selected inner spacers 4D are replaced in the openings of the outer spacers 4C, and the same liquid crystal device manufacturing apparatus is used. Different liquid crystal devices can be manufactured. The liquid crystal device manufacturing apparatus according to the seventh embodiment has substantially the same operation and effect as the liquid crystal device manufacturing apparatus according to the sixth embodiment.

(Embodiment 8) In the liquid crystal device manufacturing apparatus of Embodiment 8, instead of using the inner spacer 4D having a groove, as shown in FIG. 16, an inner spacer 4F having no groove is used. In the inner spacer 4F,
The liquid crystal device manufacturing apparatus of the seventh embodiment differs from the liquid crystal device manufacturing apparatus of the seventh embodiment in that a net member 4G, for example, a wire net is arranged on the surface facing the smooth surface 46.

[0097] The net member 4g and the groove 4A in the outer spacer 4C constitute a ventilation securing means.

The advantage of the mesh member 4g is that when the inner spacer provided with the groove and the outer spacer provided with the groove are used,
The alignment of the grooves is necessary, but providing the mesh member 4G makes such alignment insoluble. The liquid crystal device manufacturing apparatus according to the eighth embodiment has substantially the same operation and effect as the liquid crystal device manufacturing apparatus according to the seventh embodiment.

(Embodiment 9) The liquid crystal device manufacturing apparatus of Embodiment 9 is different from the liquid crystal device manufacturing apparatus of Embodiment 1 in that the pressure medium supply means 21E has two pumps 21B and 21B.
As shown in FIG. 17, the pressure medium supply means 21F in the liquid crystal device manufacturing apparatus of the ninth embodiment uses a single pump, as shown in FIG. Different from device.

In the liquid crystal device manufacturing apparatus according to the ninth embodiment, the pressure medium supply means 21F is provided with a first pump 21B in the middle of a pipe P connected to the second opening 23 and reaching the pressure medium storage tank 21A. first interposed a valve V ₁ to the pipe P between the first pump 21B second opening 23, the second valve V ₂ to the pipe between the first pump 21B and the pressure medium reservoir 21A was interposed, the pipe P between the first valve V ₁ and the second opening 23, one end of the bypass pipe P ₃ interposing the third valve V ₃ is connected, the other of the bypass pipe P ₃ The end is
Connected to the pipe P between the first pump 21B and the second valve V _2, the first pump 21B to the pipe P between the first valve V _1, draw tip to a pressure medium reservoir 21A, and formed by bonding a branch pipe P ₄ interposing a fourth valve V ₄ in the middle.

[0102] In such a pressure medium supply means 21A, when filling a pressure medium 19 to the pressure medium receiving space 18, the first valve V ₁ and the second valve V ₂ to the open state, the remaining valves V _3, the V ₄ to the closed state. Then, when the first pump 21B is driven, the pressure medium 19 is press-fitted into the pressure medium storage space 18 via the pipe P. To discharge the pressure medium 19 is press-fitted into the pressure medium receiving space 18, first the valve V ₁ and the second valve V ₂ in the closed state, the remaining valves V ₃ and V ₄
Open. Then, the pressure medium 19 is bypass pipe P _3, and is discharged to the pressure medium reservoir 21A through the first pump 21B and the branch pipe P _4.

When the pressure medium supply means in the liquid crystal device manufacturing apparatus of the ninth embodiment is adopted, the number of pumps can be reduced to one, so that the apparatus configuration can be simplified and the apparatus can be downsized. The liquid crystal device manufacturing apparatus according to the ninth embodiment also has substantially the same operation and effect as the liquid crystal device manufacturing apparatus according to the first embodiment.

[0103]

According to the liquid crystal device manufacturing apparatus of the present invention, (1) a lid member is not used, and instead, a holding member is also used as a lid member, so that the device can be miniaturized and its handling can be reduced. Can be facilitated. further,
When closing the material accommodating space in the pressure vessel main body with the smooth surface of the holding member, it is not necessary to exhaust the material accommodating space, and the operation is simple.

(2) The problem of manufacturing a liquid crystal device by a rigid press can be solved. That is,
The layers in the liquid crystal device can be pressed uniformly. Therefore, layer separation in the liquid crystal device can be prevented. The glass layer can be prevented from being damaged. Therefore, a liquid crystal device having no defect can be manufactured with high yield. The yield can be improved about 1.5 times or more as compared with a mechanical press.

(3) Since the grooves are provided on the upper surface of the elastic member, the pressure in the material accommodating space causes the elastic member to swell and the upper surface of the elastic member to contact the smooth surface of the pressing member. Even if there is a case, the space containing the material can be effectively reduced to a predetermined degree of pressure reduction.

(4) The gas generated at the time of heating and pressing is
Since it is removed through the groove provided in the elastic member, a high-quality liquid crystal device can be efficiently manufactured without generating voids or bubbles.

(5) The pressing member can be easily detached after the pressing operation. When the pressing member is retracted from the pressure vessel main body, the elastic member is not damaged by pulling the elastic member. Therefore, there are few failures.

(6) After the heating / pressing operation is completed, since the swelling due to the pressing operation of the elastic member has been eliminated, it is necessary to start the heating / pressing operation of the next material without replacing the elastic member. Thus, a large number of liquid crystal devices can be manufactured continuously efficiently and easily.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view showing an embodiment of a liquid crystal device manufacturing apparatus according to the present invention.

FIG. 2 is a partial cross-sectional explanatory view showing an overlapping portion of a first main body and a second main body in the liquid crystal device manufacturing apparatus shown in FIG.

FIG. 3 is a partially sectional explanatory view showing a state where an elastic member is mounted in the liquid crystal device manufacturing apparatus shown in FIG. 1;

FIG. 4 is a partial perspective view showing an example of an elastic member having a groove formed on an upper surface thereof.

FIG. 5 is a schematic explanatory view showing an example of a pressure medium supply unit employing two pumps.

FIG. 6 is a schematic explanatory view showing the liquid crystal device manufacturing apparatus shown in FIG. 1 as viewed from above.

FIG. 7 is a schematic sectional view showing one embodiment of the liquid crystal device manufacturing apparatus of the present invention.

FIG. 8 is a schematic sectional explanatory view showing one embodiment of the liquid crystal device manufacturing apparatus of the present invention.

FIG. 9 is a schematic sectional explanatory view showing one embodiment of the liquid crystal device manufacturing apparatus of the present invention.

FIG. 10 is a partial cross-sectional explanatory view showing an example of a liquid crystal device manufacturing apparatus using a spacer having a groove.

FIG. 11 is a partial perspective view showing a spacer having a groove.

FIG. 12 is a schematic cross-sectional explanatory view showing a form of a groove provided in a spacer.

FIG. 13 is a partial cross-sectional explanatory view showing an example of a liquid crystal device manufacturing apparatus using another spacer having a groove.

FIG. 14 is a partial cross-sectional explanatory view showing an example of a liquid crystal device manufacturing apparatus using a pair of spacers including an inner spacer and an outer spacer having a groove.

15 is a partial perspective view showing an example of a pair of spacers in the liquid crystal device manufacturing apparatus shown in FIG.

FIG. 16 is a partial perspective view illustrating an example of a spacer including an outer spacer having a groove and an inner spacer having a net member.

FIG. 17 is a schematic explanatory view showing an example of a pressure medium supply unit employing one pump.

[Explanation of symbols]

1, 1a, 1b: pressure vessel main body, 3: elastic member, 4: spacer, 5, 5a, 5d, 5e: yoke, 5b: upper yoke, 5c: lower yoke ,
6 1st main body, 7 2nd main body, 8 ... through-hole, 9 ... recessed part, 10 ... annular taper surface, 11 ...
· Annular horizontal surface, 12 ··· Ring mounting part, 13 ···
Elastic member mounting part, 14 ... backup ring, 15
... Seal member, 16 ... Support member, 17 ... Through hole, 18 ... Pressure medium accommodation space, 19 ... Pressure medium, 20 ... Material accommodation space, 21 ... Pressure medium introduction Discharge path, 22: first opening, 23: second opening, P: pipe, 24: material, 38: O-ring, 39: third opening, 40 ... Fourth opening, 4
1 ... gas introduction / discharge path, 42 ... vertical part, 43 ...
-Upper horizontal part, 44 ... Lower horizontal part, 45 ... Working opening part, 46 ... Smooth surface, 47 ... Horizontal rail, 4
7A: Guide, 48: Cylinder, 49:
Frame, 50 ... operation box.

──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Hiroshi Sakurada 2-16-2 Noguchicho, Higashimurayama-shi, Tokyo Nikkiso Co., Ltd. Higashimurayama Works (72) Inventor Jun Tsutsumi 2-16- Noguchimachi, Higashimurayama-shi, Tokyo 2 Higashimurayama Works, Nikkiso Co., Ltd. (72) Akira Nishioka, Inventor 2-16-2 Noguchicho, Higashimurayama-shi, Tokyo Nikkiso Co., Ltd. Higashimurayama Works, (56) References JP-A-59-57221 (JP, A (58) Fields surveyed (Int. Cl. ⁷ , DB name) G02F 1/1339 505 G02F 1/13 101

Claims (2)

(57) [Claims] 1. A material storage space and a pressure medium storage space, one of which is open , are separated from the material storage space and the pressure medium storage space, and the pressure medium storage space is filled. The material accommodating space is configured to transmit the pressure of the pressure medium to the material disposed in the material accommodating space.
A pressure vessel main body comprising a pressure transmitting means having an elastic member disposed on a side opposite to the opening in the pressure vessel main body, fixed to the pressure vessel main body at the time of pressurization, closing the material accommodating space, and An apparatus for manufacturing a liquid crystal device, comprising: a holding member having a smooth surface to be pressed; and a heating means for heating the inside of the pressure vessel main body. 2. A pressure medium storage space comprising a material storage space and a pressure medium storage space, one of which is open , and wherein the material storage space and the pressure medium storage space are separated from each other and filled in the pressure medium storage space. The material accommodating space is configured to transmit the pressure of the pressure medium to the material disposed in the material accommodating space.
A pressure vessel main body comprising a pressure transmitting means having an elastic member disposed on the side opposite to the open portion , fixed to the pressure vessel main body at the time of pressurization, closing the material accommodating space, and A pressing member having a smooth surface to press,
A gas introduction / discharge means for introducing and discharging a gas into the material storage space, and when the inside of the material storage space is depressurized by the gas introduction / discharge means, the gas in the material storage space is subjected to the gas introduction / discharge means. And a heating means for heating the inside of the pressure vessel main body.