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JP3045064B2 - Angle displacement mechanism - Google Patents
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JP3045064B2 - Angle displacement mechanism - Google Patents

Angle displacement mechanism

Info

Publication number
JP3045064B2
JP3045064B2 JP8040226A JP4022696A JP3045064B2 JP 3045064 B2 JP3045064 B2 JP 3045064B2 JP 8040226 A JP8040226 A JP 8040226A JP 4022696 A JP4022696 A JP 4022696A JP 3045064 B2 JP3045064 B2 JP 3045064B2
Authority
JP
Japan
Prior art keywords
displacement
fixed
piezoelectric element
angular displacement
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP8040226A
Other languages
Japanese (ja)
Other versions
JPH09233863A (en
Inventor
伸明 海老原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP8040226A priority Critical patent/JP3045064B2/en
Publication of JPH09233863A publication Critical patent/JPH09233863A/en
Application granted granted Critical
Publication of JP3045064B2 publication Critical patent/JP3045064B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Mechanical Light Control Or Optical Switches (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Optical Communication System (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は角度変位機構に関
し、特に光通信においてレーザ光の照射角度の微調整を
行うための角度変位機構に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an angle displacement mechanism, and more particularly to an angle displacement mechanism for finely adjusting a laser beam irradiation angle in optical communication.

【0002】[0002]

【従来の技術】従来、この種の角度変位機構において
は、図3に示すように、構造部材11に2つの細くくび
れたヒンジ部11a,11bが配設されており、構造部
材11のヒンジ部11a,11bに対応する位置に接着
剤15またはネジ等で圧電素子13,14の一端を固定
している。
2. Description of the Related Art Conventionally, in such an angular displacement mechanism, as shown in FIG. 3, two narrow neck portions 11a and 11b are provided on a structural member 11, and the hinge portion of the structural member 11 is provided. One ends of the piezoelectric elements 13 and 14 are fixed to positions corresponding to 11a and 11b with an adhesive 15 or screws.

【0003】圧電素子13,14の他端は構造部材12
に接着剤15またはネジ等で固定している。構造部材1
2には角度変位機構の実装位置に固定するための貫通穴
12a,12bが配設されている。
The other ends of the piezoelectric elements 13 and 14 are
Is fixed with an adhesive 15 or a screw. Structural member 1
2 is provided with through holes 12a and 12b for fixing the angular displacement mechanism to the mounting position.

【0004】この角度変位機構は構造部材12の貫通穴
12a,12bに図示せぬネジを挿通することで、その
ネジによって実装位置に固定される。その状態で、圧電
素子13,14に電圧を印加し、圧電素子13,14を
駆動する。
The angular displacement mechanism is fixed to a mounting position by inserting screws (not shown) into the through holes 12a and 12b of the structural member 12. In this state, a voltage is applied to the piezoelectric elements 13 and 14 to drive the piezoelectric elements 13 and 14.

【0005】圧電素子13,14の一方、例えば圧電素
子13に電圧を印加すると、圧電素子13に発生する力
によって構造部材11のヒンジ部11aが押されるの
で、構造部材11が角度Δθだけ傾くことになる。
When a voltage is applied to one of the piezoelectric elements 13 and 14, for example, the piezoelectric element 13, the hinge 11a of the structural member 11 is pushed by the force generated in the piezoelectric element 13, so that the structural member 11 is tilted by the angle Δθ. become.

【0006】このとき、構造部材11の変形はヒンジ部
11aで生じるが、この構造部材11の弾性変形内で変
形させることで、繰返し動作を実現している。つまり、
構造部材11はヒンジ部11aの変形によって圧電素子
13の直線変位Δxを角度変位Δθに変換している。
At this time, the deformation of the structural member 11 occurs at the hinge portion 11a, but by repeating the deformation within the elastic deformation of the structural member 11, a repetitive operation is realized. That is,
The structural member 11 converts the linear displacement Δx of the piezoelectric element 13 into an angular displacement Δθ by deforming the hinge portion 11a.

【0007】尚、圧電素子14を駆動した場合には上記
と同様にヒンジ部11bの変形によって圧電素子14の
直線変位Δxが角度変位Δθに変換される。また、上記
の技術については、実開平3−40896号公報等に開
示されている。
When the piezoelectric element 14 is driven, the linear displacement .DELTA.x of the piezoelectric element 14 is converted into an angular displacement .DELTA..theta. The above technique is disclosed in Japanese Utility Model Laid-Open No. 3-40896.

【0008】[0008]

【発明が解決しようとする課題】上述した従来の角度変
位機構では、駆動された圧電素子に対応するヒンジ部分
の変形によって圧電素子の直線変位を角度変位に変換し
ているので、角度変位特性をよくするにはヒンジ部分の
剛性を低くしなければならない。
In the above-described conventional angular displacement mechanism, the linear displacement of the piezoelectric element is converted into the angular displacement by the deformation of the hinge portion corresponding to the driven piezoelectric element. To improve this, the rigidity of the hinge must be reduced.

【0009】しかしながら、ヒンジ部分の剛性を低くす
ると、動作させない時には振動等によって振れてしまう
ため、ヒンジ部分の剛性はそれ程低くすることはできな
い。つまり、耐振動特性をよくするためにヒンジ部分に
剛性を持たせると、ヒンジ部分の変形が小さくなるの
で、角度変位が小さくなる。
However, if the rigidity of the hinge portion is reduced, the hinge portion may be shaken by vibration or the like when not operated, so that the rigidity of the hinge portion cannot be reduced so much. That is, if the hinge portion is given rigidity to improve the vibration resistance, the deformation of the hinge portion is reduced, and the angular displacement is reduced.

【0010】そのため、静止時に角度変位を生ずる側の
構造部材を耐振動制御装置を用いて固定することで、ヒ
ンジ部分の剛性を低くした場合、すなわち角度変位を大
きくした場合の耐振動特性を保っている。したがって、
従来の角度変位機構では角度変位を得るとともに、耐振
動性を確保しようとすると、機器の大型化や重量の増大
を招いてしまう。
[0010] Therefore, by fixing the structural member on the side where angular displacement occurs at rest using the vibration-resistant control device, vibration-resistant characteristics when the rigidity of the hinge portion is reduced, that is, when the angular displacement is increased, are maintained. ing. Therefore,
In the conventional angular displacement mechanism, in order to obtain the angular displacement and secure the vibration resistance, the size and weight of the device are increased.

【0011】そこで、本発明の目的は上記の問題点を解
消し、機器の大型化や重量の増大を招くことなく、角度
変位を容易に得ることができるとともに、耐振動性を確
保することができる角度変位機構を提供することにあ
る。
Therefore, an object of the present invention is to solve the above-mentioned problems and to easily obtain angular displacement without increasing the size and weight of the device and to secure vibration resistance. An object of the present invention is to provide an angular displacement mechanism capable of performing the above.

【0012】[0012]

【課題を解決するための手段】本発明による角度変位機
構は、第1及び第2の圧電素子のうちの一方に電圧を印
加して当該圧電素子の直線変位を角度変位に変換する角
度変位機構であって、実装位置に固定される固定部材
と、前記角度変位を得る変位部材と、前記固定部材及び
前記変位部材を一体に接続する低剛性のヒンジ部材と、
一端が前記固定部材に固着された前記第1の圧電素子の
他端に固着されかつ前記第1の圧電素子への電圧印加時
に前記変位部材を押圧する第1の押圧部材と、一端が前
記固定部材に固着された前記第2の圧電素子の他端に固
着されかつ前記第2の圧電素子への電圧印加時に前記変
位部材を押圧する第2の押圧部材とを備え、前記変位部
材は、前記第1及び第2の圧電素子への電圧印加時に当
接される前記第1及び第2の押圧部材各々の当接位置に
配設された第1及び第2の凹部を具備し 耐振動性を確
保する時に前記第1及び第2の圧電素子に同時に電圧を
印加して前記変位部材を前記第1及び第2の押圧部材で
固定するようにしている。
According to the present invention, there is provided an angular displacement mechanism for applying a voltage to one of a first piezoelectric element and a second piezoelectric element to convert a linear displacement of the piezoelectric element into an angular displacement. A fixed member fixed to the mounting position, a displacement member that obtains the angular displacement, a low-rigidity hinge member that integrally connects the fixed member and the displacement member,
A first pressing member fixed at one end to the other end of the first piezoelectric element fixed to the fixing member and pressing the displacement member when a voltage is applied to the first piezoelectric element; A second pressing member that is fixed to the other end of the second piezoelectric element that is fixed to a member and that presses the displacement member when a voltage is applied to the second piezoelectric element; comprises a first and second recesses disposed in the contact position of the first and second pressing members each being in contact when a voltage is applied to the first and second piezoelectric elements, vibration resistance Make sure
Voltage is simultaneously applied to the first and second piezoelectric elements.
Applying the displacement member with the first and second pressing members
I am trying to fix it .

【0013】本発明による他の角度変位機構は、上記の
構成において、前記第1及び第2の押圧部材各々が、前
記変位部材の第1及び第2の凹部に当接されかつ先端が
半球状の突起部を具備している。
Another angular displacement mechanism according to the present invention, in the above structure, wherein each of the first and second pressing members is provided with
The tip of the displacement member is in contact with the first and second concave portions and the tip is
It has a hemispherical projection .

【0014】[0014]

【0015】[0015]

【0016】[0016]

【発明の実施の形態】まず、本発明の作用について以下
に述べる。
DESCRIPTION OF THE PREFERRED EMBODIMENTS First, the operation of the present invention will be described below.

【0017】圧電素子の直線変位を角度変位に変換する
部分を変位部と押圧部材とに分割し、変位部と固定部と
を低剛性のヒンジ部で一体に接続する。これによって、
圧電素子の一方に電圧を印加すればそれに対応する押圧
部材が変位部を押圧して角度変位を生じ、圧電素子の両
方に同時に電圧を印加すればそれに対応する押圧部材が
夫々変位部を押圧して固定するので、機器の大型化や重
量の増大を招くことなく、角度変位を容易に得ることが
可能になるとともに、耐振動性を確保することが可能と
なる。
A portion for converting the linear displacement of the piezoelectric element into an angular displacement is divided into a displacement portion and a pressing member, and the displacement portion and the fixed portion are integrally connected by a low-rigidity hinge portion. by this,
When a voltage is applied to one of the piezoelectric elements, the corresponding pressing member presses the displacement portion to generate an angular displacement, and when a voltage is applied to both of the piezoelectric elements simultaneously, the corresponding pressing members press the respective displacement portions. Therefore, the angular displacement can be easily obtained without increasing the size and weight of the device, and the vibration resistance can be ensured.

【0018】すなわち、圧電素子の直線変位を角度変位
に変換する部分を、圧電素子の発生力を伝搬する押圧部
材と圧電素子の直線変位を角度変位に変換する変位部と
に分割することで、低剛性が要求される角度変位特性と
高剛性が要求される耐振動性との相反する特性を夫々確
保することが可能となる。
That is, the portion for converting the linear displacement of the piezoelectric element into an angular displacement is divided into a pressing member for transmitting the force generated by the piezoelectric element and a displacement portion for converting the linear displacement of the piezoelectric element into an angular displacement. It is possible to ensure the conflicting characteristics between the angular displacement characteristics that require low rigidity and the vibration resistance that requires high rigidity.

【0019】次に、本発明の一実施例について図面を参
照して説明する。図1及び図2は本発明の一実施例の構
成を示す図である。図1(a)は本発明の一実施例の正
面図であり、図1(b)は本発明の一実施例の底面図で
あり、図2は図1(a)のA部拡大図である。
Next, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 and FIG. 2 are diagrams showing the configuration of one embodiment of the present invention. 1A is a front view of one embodiment of the present invention, FIG. 1B is a bottom view of one embodiment of the present invention, and FIG. 2 is an enlarged view of a portion A in FIG. 1A. is there.

【0020】これらの図において、本発明の一実施例に
よる角度変位機構は構造部材1と、押圧部材2,3と、
圧電素子4,5とから構成されている。構造部材1には
押圧部材2,3に押圧されて角度変位を生ずる変位部1
aと、図示せぬ実装位置に固定するための固定部1b
と、変位部1a及び固定部1bを一体に接続する低剛性
のヒンジ部1cと、貫通穴1d,1eと、押圧部材2,
3の突起部2a,3aが当接される凹部1f,1gとが
配設されている。
In these figures, an angular displacement mechanism according to an embodiment of the present invention includes a structural member 1, pressing members 2, 3,
It is composed of piezoelectric elements 4 and 5. The structural member 1 has a displacement portion 1 which is pressed by the pressing members 2 and 3 to generate an angular displacement.
a and a fixing portion 1b for fixing to a mounting position (not shown)
, A low-rigidity hinge portion 1c that integrally connects the displacement portion 1a and the fixed portion 1b, through holes 1d and 1e,
3 are provided with recesses 1f, 1g with which the protrusions 2a, 3a are brought into contact.

【0021】構造部材1の固定部1bの所定位置には圧
電素子4,5の一端が接着剤6で接着固定され、圧電素
子4,5の他端には夫々押圧部材2,3が接着剤6で接
着固定されている。
One end of each of the piezoelectric elements 4 and 5 is bonded and fixed to a predetermined position of the fixing portion 1b of the structural member 1 with an adhesive 6, and pressing members 2 and 3 are attached to the other ends of the piezoelectric elements 4 and 5, respectively. 6 is fixed by bonding.

【0022】この場合、押圧部材2,3の突起部2a,
3aは各々先端部が半球状となっており、構造部材1の
変位部1aに設けられた凹部1f,1gに対向する位置
にかつ凹部1f,1gと非接触に配置されている。
In this case, the projections 2a,
3a has a hemispherical tip, and is disposed at a position facing the concave portions 1f and 1g provided in the displacement portion 1a of the structural member 1 and in non-contact with the concave portions 1f and 1g.

【0023】すなわち、突起部2a,3aは圧電素子
4,5に電圧が印加されて直線変位が生じた時に夫々凹
部1f,1gに当接されても、その当接位置で位置滑り
が生じないようになっている。また、突起部2a,3a
と凹部1f,1gとの間には隙間Bが設けてあるので、
突起部2a,3aの一方が対応する凹部1f,1gに当
接して変位部1aを押圧した時にその押圧動作が他方に
よって妨げられないようになっている。
In other words, even if the projections 2a and 3a abut against the recesses 1f and 1g when a voltage is applied to the piezoelectric elements 4 and 5 and a linear displacement occurs, no positional slip occurs at the abutting positions. It has become. Also, the projections 2a, 3a
Since there is a gap B between the recesses 1f and 1g,
When one of the projections 2a, 3a contacts the corresponding recesses 1f, 1g and presses the displacement portion 1a, the pressing operation is not hindered by the other.

【0024】したがって、変位部1aに角度変位を生じ
させる場合、圧電素子4,5の一方に電圧を印加すれ
ば、その圧電素子4,5の一方に接着固定された押圧部
材2,3がΔxだけ移動する。これによって、突起部2
a,3aが凹部1f,1gに当接してその部分を押圧す
ることになるので、変位部1aにΔθだけ角度変位が生
ずることになる。
Accordingly, when an angular displacement is caused in the displacement portion 1a, if a voltage is applied to one of the piezoelectric elements 4 and 5, the pressing members 2 and 3 bonded and fixed to one of the piezoelectric elements 4 and 5 become Δx Just move. Thereby, the protrusion 2
Since the a and 3a come into contact with the concave portions 1f and 1g and press the corresponding portions, angular displacement occurs by Δθ in the displacement portion 1a.

【0025】上記の構成において、ヒンジ部1cは一本
の細い部材で変位部1aと固定部1bとをつないでいる
ため、従来例の2つのヒンジを変形させる構造(図3参
照)に比べて剛性が低くなり、角度変位が容易に得られ
る。しかも、ヒンジ部1cと押圧部材2,3との距離を
調整することで、変位部1aの角度変位が容易に調整可
能となる。
In the above configuration, since the hinge portion 1c connects the displacement portion 1a and the fixed portion 1b with one thin member, the hinge portion 1c is different from the conventional structure in which two hinges are deformed (see FIG. 3). Rigidity is reduced and angular displacement can be easily obtained. Moreover, by adjusting the distance between the hinge portion 1c and the pressing members 2 and 3, the angular displacement of the displacement portion 1a can be easily adjusted.

【0026】また、上記の構成において、耐振動性を確
保する場合には圧電素子4,5に対して同時に電圧を印
加することで、突起部2a,3aがともに凹部1f,1
gに当接するので、変位部1aは角度変位を生ずること
なく固定される。よって、耐振動制御装置を用いなくと
も、耐振動性を確保することが可能となる。
In the above configuration, when vibration resistance is ensured, a voltage is simultaneously applied to the piezoelectric elements 4 and 5, so that the projections 2a and 3a are both concave portions 1f and 1f.
Since the abutment is in contact with g, the displacement portion 1a is fixed without causing angular displacement. Therefore, vibration resistance can be ensured without using a vibration resistance control device.

【0027】このように、圧電素子4,5の直線変位を
角度変位に変換する部分を変位部1aと押圧部材2,3
とに分割し、変位部1aと固定部1bとを低剛性のヒン
ジ部1cで一体に接続することによって、圧電素子4,
5の一方に電圧を印加すればそれに対応する押圧部材
2,3が変位部1aを押圧して角度変位を生じ、圧電素
子4,5の両方に同時に電圧を印加すればそれに対応す
る押圧部材2,3が夫々変位部1aを押圧して固定する
ので、機器の大型化や重量の増大を招くことなく、角度
変位を容易に得ることができるとともに、耐振動性を確
保することができる。
As described above, the portion that converts the linear displacement of the piezoelectric elements 4 and 5 into an angular displacement is defined by the displacement portion 1a and the pressing members 2 and 3.
And the displacement portion 1a and the fixed portion 1b are integrally connected by a low-rigidity hinge portion 1c.
When a voltage is applied to one of the piezoelectric elements 4 and 5, the corresponding pressing members 2 and 3 press the displacement portion 1a to generate angular displacement, and when a voltage is applied to both the piezoelectric elements 4 and 5 simultaneously, the corresponding pressing member 2 , 3 respectively press and fix the displacement portion 1a, so that angular displacement can be easily obtained and vibration resistance can be ensured without increasing the size and weight of the device.

【0028】すなわち、圧電素子4,5の直線変位を角
度変位に変換する部分を、圧電素子4,5の発生力を伝
搬する押圧部材2,3と、圧電素子4,5の直線変位を
角度変位に変換する変位部1aとに分割することで、低
剛性が要求される角度変位特性と高剛性が要求される耐
振動性との相反する特性を夫々確保することが可能とな
る。
That is, the portion that converts the linear displacement of the piezoelectric elements 4 and 5 into an angular displacement is defined by pressing members 2 and 3 that propagate the force generated by the piezoelectric elements 4 and 5 and the linear displacement of the piezoelectric elements 4 and 5 by an angle. By dividing the displacement into the displacement portion 1a that converts the displacement, it is possible to secure mutually conflicting characteristics between the angular displacement characteristics requiring low rigidity and the vibration resistance requiring high rigidity.

【0029】[0029]

【発明の効果】以上説明したように本発明によれば、第
1及び第2の圧電素子のうちの一方に電圧を印加して当
該圧電素子の直線変位を角度変位に変換する角度変位機
構において、実装位置に固定される固定部材と角度変位
を得る変位部材とを低剛性のヒンジ部材で一体に接続
し、各々一端が固定部材に固着された第1及び第2の圧
電素子の他端に第1及び第2の圧電素子への電圧印加時
に変位部材を押圧する第1及び第2の押圧部材を固着す
ることによって、機器の大型化や重量の増大を招くこと
なく、角度変位を容易に得ることができるとともに、耐
振動性を確保することができるという効果がある。
As described above, according to the present invention, there is provided an angular displacement mechanism for applying a voltage to one of the first and second piezoelectric elements and converting a linear displacement of the piezoelectric element into an angular displacement. A fixed member fixed to the mounting position and a displacement member that obtains angular displacement are integrally connected by a low-rigid hinge member, and one end is connected to the other end of the first and second piezoelectric elements fixed to the fixed member, respectively. By fixing the first and second pressing members that press the displacement member when voltage is applied to the first and second piezoelectric elements, the angular displacement can be easily performed without increasing the size and weight of the device. In addition to this, there is an effect that vibration resistance can be ensured.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(a)は本発明の一実施例の正面図、(b)は
本発明の一実施例の底面図である。
FIG. 1A is a front view of an embodiment of the present invention, and FIG. 1B is a bottom view of the embodiment of the present invention.

【図2】図1(a)のA部拡大図である。FIG. 2 is an enlarged view of a portion A in FIG.

【図3】(a)は従来例の正面図、(b)は従来例の底
面図である。
3A is a front view of a conventional example, and FIG. 3B is a bottom view of the conventional example.

【符号の説明】[Explanation of symbols]

1 構造部材 1a 変位部 1b 固定部 1c ヒンジ部 1f,1g 凹部 2,3 押圧部材 2a,3a 突起部 4,5 圧電素子 DESCRIPTION OF SYMBOLS 1 Structural member 1a Displacement part 1b Fixed part 1c Hinge part 1f, 1g Depression 2,3 Pressing member 2a, 3a Projection part 4,5 Piezoelectric element

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 第1及び第2の圧電素子のうちの一方に
電圧を印加して当該圧電素子の直線変位を角度変位に変
換する角度変位機構であって、実装位置に固定される固
定部材と、前記角度変位を得る変位部材と、前記固定部
材及び前記変位部材を一体に接続する低剛性のヒンジ部
材と、一端が前記固定部材に固着された前記第1の圧電
素子の他端に固着されかつ前記第1の圧電素子への電圧
印加時に前記変位部材を押圧する第1の押圧部材と、一
端が前記固定部材に固着された前記第2の圧電素子の他
端に固着されかつ前記第2の圧電素子への電圧印加時に
前記変位部材を押圧する第2の押圧部材とを有し、 前記変位部材は、前記第1及び第2の圧電素子への電圧
印加時に当接される前記第1及び第2の押圧部材各々の
当接位置に配設された第1及び第2の凹部を含み、 耐振動性を確保する時に前記第1及び第2の圧電素子に
同時に電圧を印加して前記変位部材を前記第1及び第2
の押圧部材で固定するようにした ことを特徴とする角度
変位機構。
An angular displacement mechanism for applying a voltage to one of a first piezoelectric element and a second piezoelectric element to convert a linear displacement of the piezoelectric element into an angular displacement, wherein the fixing member is fixed at a mounting position. A displacement member that obtains the angular displacement, a low-rigidity hinge member that integrally connects the fixed member and the displacement member, and one end fixed to the other end of the first piezoelectric element having one end fixed to the fixed member A first pressing member for pressing the displacement member when a voltage is applied to the first piezoelectric element, and one end fixed to the other end of the second piezoelectric element fixed to the fixed member, and A second pressing member that presses the displacement member when applying a voltage to the second piezoelectric element, wherein the displacement member is in contact with the first and second piezoelectric elements when a voltage is applied. Disposed at the contact positions of the first and second pressing members. The first and second recesses seen including, in the first and second piezoelectric element when securing the vibration resistance
At the same time, a voltage is applied to move the displacement member to the first and second positions.
An angular displacement mechanism characterized by being fixed by a pressing member .
【請求項2】 前記第1及び第2の押圧部材各々は、前
記変位部材の第1及び第2の凹部に当接されかつ先端が
半球状の突起部を含むことを特徴とする請求項1記載の
角度変位機構。
2. The first and second pressing members each include a front member.
The tip of the displacement member is in contact with the first and second concave portions and the tip is
2. The method according to claim 1, further comprising a hemispherical projection.
Angle displacement mechanism.
JP8040226A 1996-02-28 1996-02-28 Angle displacement mechanism Expired - Lifetime JP3045064B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8040226A JP3045064B2 (en) 1996-02-28 1996-02-28 Angle displacement mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8040226A JP3045064B2 (en) 1996-02-28 1996-02-28 Angle displacement mechanism

Publications (2)

Publication Number Publication Date
JPH09233863A JPH09233863A (en) 1997-09-05
JP3045064B2 true JP3045064B2 (en) 2000-05-22

Family

ID=12574844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8040226A Expired - Lifetime JP3045064B2 (en) 1996-02-28 1996-02-28 Angle displacement mechanism

Country Status (1)

Country Link
JP (1) JP3045064B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090153935A1 (en) * 2004-04-22 2009-06-18 Osamu Kajino Actuator
KR101024997B1 (en) * 2009-01-16 2011-03-25 한국전기연구원 Angle adjusting device using piezoelectric element
DE102016220524A1 (en) * 2016-10-19 2018-04-19 Robert Bosch Gmbh Micromechanical component and production method for a micromechanical component

Also Published As

Publication number Publication date
JPH09233863A (en) 1997-09-05

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