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JP3046148B2 - Electronic component storage package - Google Patents
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JP3046148B2 - Electronic component storage package - Google Patents

Electronic component storage package

Info

Publication number
JP3046148B2
JP3046148B2 JP4193617A JP19361792A JP3046148B2 JP 3046148 B2 JP3046148 B2 JP 3046148B2 JP 4193617 A JP4193617 A JP 4193617A JP 19361792 A JP19361792 A JP 19361792A JP 3046148 B2 JP3046148 B2 JP 3046148B2
Authority
JP
Japan
Prior art keywords
lid
metal layer
insulating base
electronic component
rectangular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP4193617A
Other languages
Japanese (ja)
Other versions
JPH0645468A (en
Inventor
浩二 西
定功 吉田
清茂 宮脇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP4193617A priority Critical patent/JP3046148B2/en
Publication of JPH0645468A publication Critical patent/JPH0645468A/en
Application granted granted Critical
Publication of JP3046148B2 publication Critical patent/JP3046148B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders or supports
    • H03H9/10Mounting in enclosures
    • H03H9/1007Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は半導体素子や水晶振動子
等の電子部品を収容するための電子部品収納用パッケー
ジの改良に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in a package for accommodating electronic components such as semiconductor elements and quartz oscillators.

【0002】[0002]

【従来の技術】従来、電子部品、例えば所定の振動周波
数を得る圧電振動子を収容するための電子部品収納用パ
ッケージは、一般に図3に示すように、アルミナセラミ
ックス等の電気絶縁材料から成り、上面から底面にかけ
て導出するタングステン、モリブデン、マンガン等の高
融点金属粉末から成るメタライズ配線層22を有する矩形
状の絶縁基体21と、前記メタライズ配線層22の一部に導
電性接着剤を介し取着され、圧電振動子25を保持すると
ともに該圧電振動子25の電極を外部電気回路と接続する
保持金具23と、同じく電気絶縁材料から成る椀状の蓋体
24とから構成されており、保持金具23上に圧電振動子25
をポリイミド等の導電性接着剤を介して接着保持させる
とともに圧電振動子25の各電極を保持金具23に電気的に
接続させ、しかる後、前記絶縁基体21の上面に蓋体24を
半田等のロウ材から成る封止材26により接合させ、絶縁
基体21と蓋体24とから成る容器の内部に圧電振動子25を
気密に封止することによって最終製品としての圧電振動
素子となる。
2. Description of the Related Art Conventionally, a package for accommodating an electronic component, for example, a piezoelectric vibrator for obtaining a predetermined vibration frequency, is generally made of an electrically insulating material such as alumina ceramics as shown in FIG. A rectangular insulating base 21 having a metallized wiring layer 22 made of a refractory metal powder such as tungsten, molybdenum, manganese or the like derived from the top surface to the bottom surface, and attached to a part of the metallized wiring layer 22 via a conductive adhesive. And a holder 23 for holding the piezoelectric vibrator 25 and connecting the electrodes of the piezoelectric vibrator 25 to an external electric circuit, and a bowl-shaped lid also made of an electrically insulating material.
24, and a piezoelectric vibrator 25 on a holding bracket 23.
Is bonded and held via a conductive adhesive such as polyimide, and each electrode of the piezoelectric vibrator 25 is electrically connected to the holding fitting 23.After that, the lid 24 is attached to the upper surface of the insulating base 21 by soldering or the like. The piezoelectric vibrator 25 is joined as a sealing material 26 made of a brazing material, and the piezoelectric vibrator 25 is hermetically sealed in a container including the insulating base 21 and the lid 24, thereby forming a piezoelectric vibrating element as a final product.

【0003】尚、前記電子部品収納用パッケージは絶縁
基体21の上面外周部及び蓋体24の下面外周部に予めタン
グステン、モリブデン等の高融点金属粉末から成る方形
環状のメタライズ金属層27、28が各々、被着されてお
り、両メタライズ金属層27、28を半田等のロウ材から成
る封止材26で接合させることによって蓋体24が絶縁基体
21に接合されることとなる。
In the electronic component housing package, rectangular annular metallized metal layers 27 and 28 made of a refractory metal powder such as tungsten or molybdenum are previously provided on the outer peripheral portion of the upper surface of the insulating base 21 and the outer peripheral portion of the lower surface of the lid 24. Each of the metallized metal layers 27 and 28 is adhered to each other and joined by a sealing material 26 made of a brazing material such as solder to form a lid 24 on an insulating base.
21 will be joined.

【0004】また、前記蓋体24の絶縁基体21への接合は
その作業性を向上させるために蓋体24に被着させたメタ
ライズ金属層28に封止材26としての半田等のロウ材を予
め接合させておき、絶縁基体21のメタライズ金属層27の
上に蓋体24を、間に封止材26が挟まるようにして載置さ
せ、次に前記蓋体24を絶縁基体21側に一定圧力で押圧す
るとともに封止材26に約300 乃至350 ℃の温度を印加
し、封止材26を加熱溶融することによって行われる。
In order to improve the workability of the lid 24, the brazing material such as solder as a sealing material 26 is applied to a metallized metal layer 28 attached to the lid 24 in order to improve the workability. The cover 24 is placed in advance on the metallized metal layer 27 of the insulating base 21 with the sealing member 26 interposed therebetween, and then the cover 24 is fixed to the insulating base 21 side. This is performed by applying pressure to the sealing material 26 and applying a temperature of about 300 to 350 ° C. to heat and melt the sealing material 26.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、この従
来の電子部品収納用パッケージでは、絶縁基体21及び蓋
体24を構成するアルミナセラミックスが半田等のロウ材
に対し濡れ性が悪いこと及び絶縁基体21及び蓋体24に被
着させたメタライズ金属層27、28の線幅が全周にわたっ
て略同一であること等から絶縁基体21と蓋体24とから成
る容器内部に圧電振動子25を気密に封止する際、蓋体24
を絶縁基体21側に押圧しながら封止材26としてのロウ材
を加熱溶融させると溶融した封止材26が蓋体24の押圧力
により絶縁基体21と蓋体24の角部に押しやられ多量にな
るとともにその一部が外部にはみ出して図4に示すよう
な球状の突起物29を形成してしまい、これが圧電振動素
子を外部電気回路基板に搭載する場合に外部電気回路基
板上に落下し、外部電気回路基板の配線導体を短絡させ
てしまうという欠点を有していた。
However, in this conventional package for housing electronic components, the alumina ceramics constituting the insulating base 21 and the lid 24 has poor wettability with respect to a brazing material such as solder. Also, since the line width of the metallized metal layers 27 and 28 applied to the lid 24 is substantially the same over the entire circumference, etc., the piezoelectric vibrator 25 is hermetically sealed inside the container composed of the insulating base 21 and the lid 24. When stopping, the lid 24
When the brazing material as the sealing material 26 is heated and melted while pressing the insulating material 21 against the insulating base 21, the molten sealing material 26 is pushed to the corners of the insulating base 21 and the lid 24 by the pressing force of the lid 24, and a large amount of And a part thereof protrudes to the outside to form a spherical projection 29 as shown in FIG. 4, which falls on the external electric circuit board when the piezoelectric vibrating element is mounted on the external electric circuit board. This has the disadvantage that the wiring conductors of the external electric circuit board are short-circuited.

【0006】[0006]

【発明の目的】本発明は上記欠点に鑑み案出されたもの
で、その目的は絶縁基体と蓋体の外部に封止材としての
半田等のロウ材が球状の突起物となって突出するのを有
効に防止し、該突起物が外部電気回路基板上に落下し、
外部電気回路基板の配線導体が短絡するのを皆無となす
ことができる電子部品収納用パッケージを提供すること
にある。
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned drawbacks, and has as its object that a solder or other brazing material as a sealing material protrudes out of the insulating base and the lid as spherical projections. Effectively, the protrusions fall on the external electric circuit board,
An object of the present invention is to provide an electronic component housing package that can eliminate short circuit of a wiring conductor of an external electric circuit board.

【0007】[0007]

【課題を解決するための手段】本発明は上面外周部に方
形環状の金属層を被着させた矩形状の絶縁基板と、下面
外周部に方形環状の金属層を被着させた矩形状の蓋体と
から成り、絶縁基板と蓋体の各々の金属層をロウ材から
成る封止材を介し接合させることによって内部に電子部
品を気密に収容するようになした電子部品収納用パッケ
ージであって、前記絶縁基板もしくは蓋体の少なくとも
一方に被着させた方形環状金属層の角部の線幅を角部外
側に向けて直線部の線幅に対し50.0乃至95.0%としたこ
とを特徴とするものである。
According to the present invention, there is provided a rectangular insulating substrate having a rectangular annular metal layer adhered to an outer peripheral portion of an upper surface, and a rectangular insulating substrate having a rectangular annular metallic layer adhered to an outer peripheral portion of a lower surface. An electronic component housing package comprising a lid, wherein the metal layers of the insulating substrate and the lid are joined via a sealing material made of a brazing material so that the electronic components are hermetically accommodated inside. Wherein the line width of the corners of the rectangular annular metal layer attached to at least one of the insulating substrate and the lid is set to 50.0 to 95.0% with respect to the line width of the straight part toward the outside of the corners. Is what you do.

【0008】[0008]

【作用】本発明の電子部品収納用パッケージによれば、
矩形状絶縁基体及び蓋体の少なくとも一方に被着させた
方形環状金属層の角部の線幅を直線部の線幅に対し50.0
乃至95.0% としたことから蓋体を絶縁基体に接合させる
際、封止材としての半田等のロウ材が絶縁基体と蓋体の
角部に多量に集まることはなく、その結果、封止材が絶
縁基体と蓋体の角部からはみ出し、球状の突起物となっ
て突出することはなくなる。
According to the electronic component storage package of the present invention,
The line width at the corners of the rectangular annular metal layer attached to at least one of the rectangular insulating base and the lid is 50.0% of the line width of the linear portion.
When the lid is joined to the insulating base, a large amount of brazing material such as solder as a sealing material does not collect at the corners of the insulating base and the lid, and as a result, the sealing material Does not protrude from the corners of the insulating base and the lid, and does not protrude as a spherical projection.

【0009】[0009]

【実施例】次に本発明を添付図面に基づき詳細に説明す
る。図1及び図2は本発明の電子部品収納用パッケージ
を圧電振動子を収容するパッケージに適用した場合の一
実施例を示し、1 は絶縁基体、2 は蓋体である。この絶
縁基体1 と蓋体2 とで圧電振動子3 を収容するための容
器4 を構成する。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. FIGS. 1 and 2 show an embodiment in which the electronic component housing package of the present invention is applied to a package housing a piezoelectric vibrator, wherein 1 is an insulating base and 2 is a lid. The insulating base 1 and the lid 2 constitute a container 4 for housing the piezoelectric vibrator 3.

【0010】前記絶縁基体1 は酸化アルミニウム質焼結
体、ムライト質焼結体、窒化アルミニウム質焼結体、炭
化珪素質焼結体等の電気絶縁材料から成り、例えば酸化
アルミニウム質焼結体から成る場合は、アルミナ(Al 2
O 3 ) 、シリカ(SiO2 ) 、カルシア(CaO) 、マグネシア
(MgO) 等の原料粉末に適当なバインダー、有機溶剤を添
加混合して泥漿状となすとともにこれを従来周知のドク
ターブレード法やカレンダーロール法等を採用してセラ
ミックグリーンシート( セラミック生シート)を得、し
かる後、これに適当な打ち抜き加工を施すとともに複数
枚積層し、高温( 約1600℃) で焼成することによって製
作される。
The insulating substrate 1 is made of an electrically insulating material such as an aluminum oxide sintered body, a mullite sintered body, an aluminum nitride sintered body, a silicon carbide sintered body, and for example, an aluminum oxide sintered body. If it is composed of alumina (Al 2
O 3 ), silica (SiO 2 ), calcia (CaO), magnesia
A raw material powder such as (MgO) is mixed with a suitable binder and an organic solvent to form a slurry, which is then formed into a ceramic green sheet (ceramic green sheet) using a conventionally known doctor blade method, calender roll method, or the like. It is manufactured by subjecting it to suitable punching, laminating a plurality of layers, and firing at a high temperature (about 1600 ° C.).

【0011】前記絶縁基体1 はまたその上面からスルー
ホール5 を介して下面に導出するメタライズ配線層6 が
被着形成されており、該メタライズ配線層6 の絶縁基体
1 上面部には圧電振動子3 を保持する保持部材7 が導電
性接着剤を介して取着され、また絶縁基体1 の下面部位
は外部電気回路基板に半田等の導電性接着剤を介して接
続される。
A metallized wiring layer 6 extending from the upper surface to the lower surface through a through hole 5 is formed on the insulating substrate 1.
1 A holding member 7 for holding the piezoelectric vibrator 3 is attached to the upper surface via a conductive adhesive, and the lower surface of the insulating base 1 is attached to an external electric circuit board via a conductive adhesive such as solder. Connected.

【0012】前記メタライズ配線層6 は、タングステ
ン、モリブデン、マンガン等の高融点金属粉末から成
り、該タングステン等の高融点金属粉末に適当なバイン
ダー、有機溶剤を添加混合して得た金属ペーストを絶縁
基体1 となるセラミックグリーンシートに予め従来周知
のスクリーン印刷法により印刷塗布しておくことによっ
て絶縁基体1 の上面からスルーホール5 を介して下面に
導出するように被着形成される。
The metallized wiring layer 6 is made of a high melting point metal powder such as tungsten, molybdenum, manganese, etc., and insulates a metal paste obtained by adding a suitable binder and an organic solvent to the high melting point metal powder such as tungsten. The ceramic green sheet serving as the base 1 is coated and applied in advance by a well-known screen printing method so as to be led out from the upper surface of the insulating base 1 to the lower surface through the through hole 5.

【0013】尚、前記メタライズ配線層6 はその表面に
ニッケル、金等の良導電性で、且つ耐蝕性に優れた金属
をメッキにより1.0 乃至20.0μm の厚みに層着させてお
くとメタライズ配線層6 が酸化腐食するのを有効に防止
することができる。従って、前記メタライズ配線層6 の
表面には該メタライズ配線層6 が酸化腐食するのを防止
するためにニッケル、金等を1.0 乃至20.0μm の厚みに
層着させておくことが好ましい。
The metallized wiring layer 6 may be formed by plating a metal having good conductivity and excellent corrosion resistance, such as nickel or gold, to a thickness of 1.0 to 20.0 μm by plating. 6 can be effectively prevented from being oxidized and corroded. Accordingly, it is preferable that nickel, gold, or the like be applied to the surface of the metallized wiring layer 6 to a thickness of 1.0 to 20.0 μm in order to prevent the metallized wiring layer 6 from being oxidized and corroded.

【0014】また前記絶縁基体1 上面のメタライズ配線
層6 には保持部材7 が導電性ポリイミド等の導電性接着
剤を介して取着されており、該保持部材7 の上部には同
じく導電性ポリイミド等の導電性接着剤を介して圧電振
動子3 がその電極を保持部材7 と電気的に接続されるよ
うにして接着保持される。
A holding member 7 is attached to the metallized wiring layer 6 on the upper surface of the insulating base 1 via a conductive adhesive such as a conductive polyimide. The piezoelectric vibrator 3 is bonded and held through a conductive adhesive such as the above so that its electrode is electrically connected to the holding member 7.

【0015】前記保持部材7 は圧電振動子3 を保持する
とともに圧電振動子3 の電極をメタライズ配線層6 に電
気的に接続する作用を為し、例えば洋白(Cu-Zn-Ni 合
金) やコバール金属(Fe-Ni-Co 合金) 、42アロイ(Fe-Ni
合金) 等の弾性を有する金属で形成される。
The holding member 7 functions to hold the piezoelectric vibrator 3 and to electrically connect the electrodes of the piezoelectric vibrator 3 to the metallized wiring layer 6, and for example, nickel silver (Cu-Zn-Ni alloy) or Kovar metal (Fe-Ni-Co alloy), 42 alloy (Fe-Ni
(Alloy).

【0016】尚、前記保持部材7 は洋白等の板材に打ち
抜き加工、折り曲げ加工等の従来周知の金属加工法を採
用することによって所定形状に製作される。
The holding member 7 is manufactured in a predetermined shape by using a conventionally known metal working method such as punching and bending a plate material such as nickel-white.

【0017】また前記絶縁基体1 の上面外周部には方形
環状のメタライズ金属層8 が被着されており、該メタラ
イズ金属層8 には椀状の蓋体2 が半田等のロウ材から成
る封止材10を介して接合され、これによって絶縁基体1
と蓋体2 とから成る容器4 の内部に圧電振動子3 が気密
に封止される。
A rectangular annular metallized metal layer 8 is adhered to the outer peripheral portion of the upper surface of the insulating base 1, and a bowl-shaped lid 2 is formed on the metallized metal layer 8 by sealing a brazing material such as solder. It is joined through a stopper 10, thereby forming the insulating base 1.
A piezoelectric vibrator 3 is hermetically sealed inside a container 4 composed of a cover 4 and a cover 2.

【0018】前記絶縁基体1 の上面外周部に被着された
メタライズ金属層8 はタングステン、モリブデン、マン
ガン等の高融点金属粉末から成り、該タングステン等の
高融点金属粉末に適当なバインダー、有機溶剤を添加混
合して得た金属ペーストを絶縁基体1 となるセラミック
グリーンシートに予め従来周知のスクリーン印刷法等の
厚膜手法により印刷塗布しておくことによって絶縁基体
1 の上面外周部に方形環状に被着される。
The metallized metal layer 8 attached to the outer peripheral portion of the upper surface of the insulating base 1 is made of a high melting point metal powder such as tungsten, molybdenum, manganese, etc. Is added to a ceramic green sheet serving as the insulating substrate 1 in advance by a thick film method such as a conventionally known screen printing method.
1 is attached to the outer periphery of the upper surface in a square ring shape.

【0019】また前記方形環状のメタライズ金属層8 は
その角部の線幅が角部外側に向けて細くなるように、直
線部の線幅よりも細くなっている。そのため蓋体2 を絶
縁基板1 に接合させる際、封止材10としての半田等のロ
ウ材がメタライズ金属層8 をって絶縁基板1 と蓋体2
の角部に多量に集まることはなく、その結果、封止材10
が絶縁基板1 と蓋体2 の角部からはみ出し、球状の突起
物となって突出することはなくなる。そして、メタライ
ズ金属層8 の外周は従来と同様の方形をなしていること
から、絶縁基板1 と蓋体2 を気密かつ強固に接合させる
ことができ、気密封止の信頼性が高い容器4 とすること
ができる。
The rectangular metallized metal layer 8 is thinner than the line width of the straight part so that the line width at the corner becomes narrower toward the outside of the corner. Therefore when joining the lid 2 on the insulating substrate 1, an insulating brazing material such as solder is I transfer the metallized metal layer 8 as the sealing material 10 substrate 1 and the lid 2
Of the sealing material 10
Protrudes from the corners of the insulating substrate 1 and the lid 2 and does not project as spherical projections. Since the outer periphery of the metallized metal layer 8 has the same square shape as that of the related art, the insulating substrate 1 and the lid 2 can be hermetically and firmly joined to each other. can do.

【0020】尚、前記メタライズ金属層8 はその角部の
線幅が直線部の線幅に対し50.0%未満であると蓋体2 を
絶縁基体1 に接合させる際、絶縁基体1 と蓋体2 の角部
に封止材10が十分に入り込まず、これによって容器4 の
気密封止の信頼性が大幅に劣化してしまい、また95.0%
を越えると蓋体2 を絶縁基体1 に接合させる際、封止材
10がメタライズ金属層8 をつたって絶縁基体1 と蓋体2
の角部に多量に集まるとともに絶縁基体1 と蓋体2 の角
部からはみ出して球状の突起物を形成してしまう。従っ
て、前記メタライズ配線層8 はその角部の線幅が直線部
の線幅に対し50.0乃至95.0% のものに特定される。
When the metallized metal layer 8 has a line width of less than 50.0% with respect to the line width of the linear portion, when the cover 2 is joined to the insulating base 1, the insulating base 1 and the cover 2 The sealing material 10 does not sufficiently penetrate into the corners of the container 4, which greatly reduces the reliability of hermetic sealing of the container 4,
When the cover 2 is over, when the lid 2 is joined to the insulating base 1, a sealing material
10 connects the metallized metal layer 8 to the insulating base 1 and the lid 2
And a large amount of protrusions protrude from the corners of the insulating base 1 and the lid 2 and form spherical projections. Accordingly, the metallized wiring layer 8 is specified to have a corner line width of 50.0 to 95.0% of the line width of the straight line portion.

【0021】また前記メタライズ金属層8 はその表面に
ニッケル、金等のロウ材と濡れ性が良い金属をメッキに
より1.0 乃至20.0μm の厚みに層着しておくと蓋体2 を
絶縁基体1 に封止材10を介して接合させ、容器4 を気密
に封止する際、絶縁基体1 に被着させたメタライズ金属
層8 と封止材10との接合が強固となって容器4 の気密封
止の信頼性が大幅に向上する。従って、前記メタライズ
金属層8 の表面にはニッケル、金等のロウ材と濡れ性が
良い金属をメッキにより1.0 乃至20.0μm の厚みに層着
させておくことが好ましい。
When the metallized metal layer 8 is coated with a brazing material such as nickel or gold and a metal having good wettability to a thickness of 1.0 to 20.0 μm by plating, the cover 2 is attached to the insulating base 1. When the container 4 is joined via the sealing material 10 to hermetically seal the container 4, the joining between the metallized metal layer 8 adhered to the insulating base 1 and the sealing material 10 becomes strong and the container 4 is air-tightly sealed. The reliability of stopping is greatly improved. Therefore, it is preferable that a metal having good wettability with a brazing material such as nickel or gold is applied to the surface of the metallized metal layer 8 by plating to a thickness of 1.0 to 20.0 μm.

【0022】更に前記絶縁基体1 の上面外周部に被着さ
せたメタライズ金属層8 上には椀状の蓋体2 が封止材10
を介して接合され、これによって絶縁基体1 と蓋体2 と
から成る容器4 が気密に封止される。
Further, on the metallized metal layer 8 attached to the outer peripheral portion of the upper surface of the insulating base 1, a bowl-shaped lid 2 is provided with a sealing material 10.
Through which the container 4 composed of the insulating base 1 and the lid 2 is hermetically sealed.

【0023】前記蓋体2 は酸化アルミニウム質焼結体、
ムライト質焼結体、窒化アルミニウム質焼結体、炭化珪
素質焼結体等の電気絶縁材料から成り、例えば酸化アル
ミニウム質焼結体から成る場合は、アルミナ、シリカ、
カルシア、マグネシア等の原料粉末に適当なバインダ
ー、有機溶剤を添加混合したものを所定形状を有するプ
レス金型内に充填するとともに一定圧力を印加して成形
し、しかる後、該成形品を約1600℃の温度で焼成するこ
とによって製作される。
The lid 2 is made of an aluminum oxide sintered body,
It is made of an electrical insulating material such as a mullite-based sintered body, an aluminum nitride-based sintered body, and a silicon carbide-based sintered body. For example, in the case of an aluminum oxide-based sintered body, alumina, silica,
A material obtained by adding an appropriate binder and an organic solvent to raw material powders such as calcia and magnesia is filled into a press mold having a predetermined shape and molded by applying a constant pressure. It is manufactured by firing at a temperature of ° C.

【0024】また前記蓋体2 の下面外周部には方形環状
のメタライズ金属層9 が被着されており、該メタライズ
金属層9 を絶縁基体1 の上面のメタライズ金属層8 に封
止材10を介し接合させることによって絶縁基体1 の上面
に蓋体2 が接合される。
On the outer peripheral portion of the lower surface of the lid 2, a rectangular annular metallized metal layer 9 is adhered. The metallized metal layer 9 is attached to the metallized metal layer 8 on the upper surface of the insulating substrate 1 by a sealing material 10. The lid 2 is joined to the upper surface of the insulating base 1 by joining them together.

【0025】尚、前記蓋体2 に被着されたメタライズ金
属層9 は銀ーパラジウム等の金属から成り、銀、パラジ
ウムの粉末にガラスフリット及びバインダー、有機溶剤
を添加混合して得た金属ペーストを蓋体2 の下面外周部
に従来周知のスクリーン印刷法等の厚膜手法により印刷
塗布するとともにこれを約1000℃の温度で焼き付けるこ
とによって蓋体2 の下面外周部に方形環状に被着され
る。
The metallized metal layer 9 attached to the lid 2 is made of a metal such as silver-palladium. A metal paste obtained by adding a glass frit, a binder, and an organic solvent to silver and palladium powders is used. The lower peripheral part of the lid 2 is printed and applied by a conventionally known thick film method such as a screen printing method, and is baked at a temperature of about 1000 ° C. to be adhered in a square annular shape on the lower peripheral part of the lid 2. .

【0026】更に前記メタライズ金属層9 の表面には蓋
体2 を絶縁基体1 に接合させる際の作業性を向上させる
ために半田等のロウ材から成る封止材10が予め被着接合
されており、該ロウ材から成る封止材10は半田粉末に適
当なバインダー、有機溶剤を添加混合して得た半田ペー
ストをメタライズ金属層9 上に従来周知のスクリーン印
刷法により印刷塗布するとともにこれを約350 ℃の温度
で加熱溶融させることによってメタライズ金属層9 の表
面に被着接合される。
Further, on the surface of the metallized metal layer 9, a sealing material 10 made of a brazing material such as solder is previously adhered and joined in order to improve workability in joining the lid 2 to the insulating base 1. The sealing material 10 made of the brazing material is printed and coated with a solder paste obtained by adding and mixing a suitable binder and an organic solvent to the solder powder on the metallized metal layer 9 by a conventionally known screen printing method. By heating and melting at a temperature of about 350 ° C., it is adhered and bonded to the surface of the metallized metal layer 9.

【0027】かくして本発明の電子部品収納用パッケー
ジによれば、絶縁基体1 に取着した保持部材7 に圧電振
動子3 を導電性接着剤により接着固定するとともに絶縁
基体1 の上面に被着させたメタライズ金属層8 に蓋体2
の下面に被着させたメタライズ金属層9 を蓋体2 に予め
被着させておいた半田等のロウ材から成る封止材10を介
して接合させ、絶縁基体1 と蓋体2 とから成る容器4 の
内部に圧電振動子3 を気密に封止することによって製品
としての圧電振動素子となる。
Thus, according to the electronic component housing package of the present invention, the piezoelectric vibrator 3 is adhered and fixed to the holding member 7 attached to the insulating base 1 with a conductive adhesive, and is adhered to the upper surface of the insulating base 1. Metallized metal layer 8 with lid 2
A metallized metal layer 9 adhered to the lower surface of the substrate 2 is joined via a sealing material 10 made of a brazing material such as solder previously adhered to the lid 2 to form an insulating base 1 and a lid 2. By sealing the piezoelectric vibrator 3 inside the container 4 in an airtight manner, a piezoelectric vibrating element as a product is obtained.

【0028】尚、本発明は上述の実施例に限定されるも
のではなく、本発明の要旨を逸脱しない範囲であれば種
々の変更は可能であり、例えば上述の実施例では、絶縁
基体1 の上面外周部に被着させたメタライズ金属層8 に
おいてその角部の線幅を直線部の線幅によりも細くした
が蓋体2 に被着したメタライズ金属層9 の角部の線幅を
直線部の線幅より細くしてもよく、また絶縁基体1 及び
蓋体2 の各々に被着したメタライズ金属層8 、9 の角部
の線幅を直線部の線幅よりも細くしてもよい。
It should be noted that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the gist of the present invention. In the metallized metal layer 8 adhered to the outer peripheral portion of the upper surface, the line width of the corner was narrower than the line width of the linear portion, but the line width of the corner of the metallized metal layer 9 adhered to the lid 2 was changed to the linear portion. The line width at the corners of the metallized metal layers 8, 9 attached to each of the insulating base 1 and the lid 2 may be smaller than the line width of the linear portion.

【0029】また上述の実施例では圧電振動子を収容す
る電子部品収納用パッケージであったが、集積回路素子
や弾性表面波フィルターを収容する電子部品収納用パッ
ケージであってもよい。
In the above-described embodiment, the electronic component housing package for housing the piezoelectric vibrator is used. However, an electronic component housing package for housing an integrated circuit element or a surface acoustic wave filter may be used.

【0030】[0030]

【発明の効果】本発明の電子部品収納用パッケージによ
れば、矩形状絶縁基板及び蓋体の少なくとも一方に被着
させた方形環状金属層の角部の線幅を角部外側に向けて
直線部の線幅に対し5.0 乃至95.0%としたことから蓋体
を絶縁基板に接合させる際、封止材としての半田等のロ
ウ材が絶縁基板や蓋体に被着させた方形環状金属層を
って絶縁基板と蓋体の角部に多量に集まることはなく、
その結果、封止材が絶縁基板と蓋体の角部からはみ出
し、球状の突起物となって突出することはない。従っ
て、この電子部品収納用パッケージでは、圧電振動素子
を外部電気回路基板上に搭載する際、球状の封止材から
成る突起物が外部電気回路基板上に落下し、配線導体間
を短絡させることは皆無となる。また、外周が方形をな
している方形環状金属層により絶縁基板と蓋体を気密か
つ強固に接合させることができ、気密封止の信頼性が高
い電子部品収納用パッケージとなる。
According to the electronic component housing package of the present invention, the line width of the corner of the rectangular annular metal layer attached to at least one of the rectangular insulating substrate and the lid is straightened toward the outside of the corner. When the lid is joined to the insulating substrate, a brazing material such as solder is used to seal the rectangular annular metal layer adhered to the insulating substrate or the lid when the lid is joined to the insulating substrate. As a result, it does not gather in large amounts at the corners of the insulating substrate and the lid,
As a result, the sealing material does not protrude from the corners of the insulating substrate and the lid, and does not protrude as a spherical projection. Therefore, in this electronic component storage package, when the piezoelectric vibrating element is mounted on the external electric circuit board, the projection made of the spherical sealing material falls on the external electric circuit board and short-circuits between the wiring conductors. Is gone. In addition, the insulating substrate and the lid can be hermetically and firmly joined to each other by the rectangular annular metal layer having a rectangular outer periphery, and a highly reliable hermetically sealed electronic component housing package can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明を圧電振動子を収容する電子部品収納用
パッケージに適用した場合の一実施例を示す分解斜視図
である。
FIG. 1 is an exploded perspective view showing an embodiment in which the present invention is applied to an electronic component housing package for housing a piezoelectric vibrator.

【図2】図1 に示すパッケージの断面図である。FIG. 2 is a sectional view of the package shown in FIG. 1;

【図3】従来の電子部品収納用パッケージの分解斜視図
である。
FIG. 3 is an exploded perspective view of a conventional electronic component storage package.

【図4】従来の電子部品収納用パッケージを用いた電子
部品の斜視図である。
FIG. 4 is a perspective view of an electronic component using a conventional electronic component storage package.

【符号の説明】[Explanation of symbols]

1・・・・絶縁基体 2・・・・蓋体 3・・・・圧電振動子 4・・・・容器 8・・・・絶縁基体に被着させた方形環状のメタライズ
金属層 9・・・・蓋体に被着させた方形環状のメタライズ金属
層 10・・・・封止材
DESCRIPTION OF SYMBOLS 1 ... Insulating base 2 ... Lid 3 ... Piezoelectric vibrator 4 ... Container 8 ... Square annular metallized metal layer 9 attached to the insulating base 9 ...・ Square annular metallized metal layer attached to lid 10 ・ ・ Sealant

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) H01L 23/02,23/12 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 7 , DB name) H01L 23 / 02,23 / 12

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】上面外周部に方形環状の金属層を被着させ
た矩形状の絶縁基板と、下面外周部に方形環状の金属層
を被着させた矩形状の蓋体とから成り、絶縁基板と蓋体
の各々の金属層をロウ材から成る封止材を介し接合させ
ることによって内部に電子部品を気密に収容するように
なした電子部品収納用パッケージであって、前記絶縁基
板もしくは蓋体の少なくとも一方に被着させた方形環状
金属層の角部内側を切り欠いた形状とすることによっ
て、該方形環状金属層の角部の線幅を直線部の線幅に対
し50.0乃至95.0%としたことを特徴とする電子部品収納
用パッケージ。
1. An insulating substrate comprising: a rectangular insulating substrate having a rectangular annular metal layer adhered to an outer peripheral portion of an upper surface; and a rectangular lid having a rectangular annular metallic layer adhered to an outer peripheral portion of a lower surface. An electronic component storage package in which electronic components are hermetically stored therein by joining respective metal layers of a substrate and a lid via a sealing material made of a brazing material, wherein the insulating substrate or the lid is provided. The rectangular annular metal layer attached to at least one of the
Te, electronic component storing package, characterized in that the line width of the corner portion of said shaped annular metal layer was 50.0 to 95.0% with respect to the line width of the straight line portion.
JP4193617A 1992-07-21 1992-07-21 Electronic component storage package Expired - Fee Related JP3046148B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4193617A JP3046148B2 (en) 1992-07-21 1992-07-21 Electronic component storage package

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4193617A JP3046148B2 (en) 1992-07-21 1992-07-21 Electronic component storage package

Publications (2)

Publication Number Publication Date
JPH0645468A JPH0645468A (en) 1994-02-18
JP3046148B2 true JP3046148B2 (en) 2000-05-29

Family

ID=16310923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4193617A Expired - Fee Related JP3046148B2 (en) 1992-07-21 1992-07-21 Electronic component storage package

Country Status (1)

Country Link
JP (1) JP3046148B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007202095A (en) * 2005-12-28 2007-08-09 Kyocera Kinseki Corp Piezoelectric device
JP5031486B2 (en) * 2007-08-27 2012-09-19 京セラ株式会社 Electronic components
CN104944354B (en) * 2014-03-31 2017-11-14 中芯国际集成电路制造(上海)有限公司 Chip structure, its preparation method and include its MEMS
CN105480938B (en) * 2014-10-10 2018-04-10 中芯国际集成电路制造(上海)有限公司 A kind of MEMS and preparation method thereof, electronic installation
JP2016103746A (en) * 2014-11-28 2016-06-02 京セラクリスタルデバイス株式会社 Piezoelectric device

Also Published As

Publication number Publication date
JPH0645468A (en) 1994-02-18

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