JP3057890B2 - Method and apparatus for producing pure water - Google Patents
Method and apparatus for producing pure waterInfo
- Publication number
- JP3057890B2 JP3057890B2 JP4091907A JP9190792A JP3057890B2 JP 3057890 B2 JP3057890 B2 JP 3057890B2 JP 4091907 A JP4091907 A JP 4091907A JP 9190792 A JP9190792 A JP 9190792A JP 3057890 B2 JP3057890 B2 JP 3057890B2
- Authority
- JP
- Japan
- Prior art keywords
- tower
- dissolved oxygen
- pure water
- exchange resin
- inert gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims description 59
- 238000000034 method Methods 0.000 title description 26
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 45
- 239000001301 oxygen Substances 0.000 claims description 45
- 229910052760 oxygen Inorganic materials 0.000 claims description 45
- 239000011261 inert gas Substances 0.000 claims description 26
- 239000003957 anion exchange resin Substances 0.000 claims description 19
- 238000004519 manufacturing process Methods 0.000 claims description 16
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 claims description 13
- 239000003729 cation exchange resin Substances 0.000 claims description 9
- 239000007788 liquid Substances 0.000 description 19
- 239000010419 fine particle Substances 0.000 description 16
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 13
- 238000007796 conventional method Methods 0.000 description 12
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 10
- 239000007789 gas Substances 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 7
- 229910001873 dinitrogen Inorganic materials 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 7
- 239000012535 impurity Substances 0.000 description 5
- 239000003456 ion exchange resin Substances 0.000 description 5
- 229920003303 ion-exchange polymer Polymers 0.000 description 5
- 229910021642 ultra pure water Inorganic materials 0.000 description 5
- 239000012498 ultrapure water Substances 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 238000005273 aeration Methods 0.000 description 4
- 229910002092 carbon dioxide Inorganic materials 0.000 description 4
- 239000001569 carbon dioxide Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000006114 decarboxylation reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 241000894006 Bacteria Species 0.000 description 2
- 150000001450 anions Chemical class 0.000 description 2
- 150000001768 cations Chemical class 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000008929 regeneration Effects 0.000 description 2
- 238000011069 regeneration method Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 238000009849 vacuum degassing Methods 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- 239000002349 well water Substances 0.000 description 2
- 235000020681 well water Nutrition 0.000 description 2
- 230000002730 additional effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000005349 anion exchange Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000005341 cation exchange Methods 0.000 description 1
- 230000015271 coagulation Effects 0.000 description 1
- 238000005345 coagulation Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Landscapes
- Degasification And Air Bubble Elimination (AREA)
- Treatment Of Water By Ion Exchange (AREA)
- Physical Water Treatments (AREA)
Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【０００１】[0001]
【産業上の利用分野】本発明は、純水の製造方法及び装
置に係り、特にイオン交換樹脂塔と脱炭酸塔、溶存酸素
除去塔を組み合わせてなる純水製造装置及びこれを用い
た純水の製造方法に関する。The present invention relates relates to a method and apparatus for producing pure water, particularly ion-exchange resin column and deaerator, dissolved oxygen
The present invention relates to a pure water production apparatus formed by combining a removal tower and a pure water production method using the same.
【０００２】[0002]
【従来の技術】水中の各種イオンの除去にはイオン交換
法が広く使用されている。特に、大容量の純水を製造す
る場合には、陽イオン交換樹脂塔と陰イオン交換樹脂塔
との間に水中の炭酸イオンを除去する目的で脱炭酸塔が
設置されている。この脱炭酸塔は、陽イオン交換樹脂塔
からの流出水が低pHであり、後段の陰イオン交換樹脂の
負荷となる炭酸イオンを容易に炭酸ガスとして系外に排
出除去できることから、陽イオン交換樹脂塔と陰イオン
交換樹脂塔との間で空気曝気を行い、液中の炭酸ガスを
除去するものである。2. Description of the Related Art An ion exchange method is widely used for removing various ions in water. In particular, when producing a large volume of pure water, a decarbonation tower is provided between the cation exchange resin tower and the anion exchange resin tower for the purpose of removing carbonate ions in the water. In this decarbonation tower, the effluent from the cation exchange resin tower has a low pH, and carbonate ions, which are a load on the subsequent anion exchange resin, can be easily discharged and removed as carbon dioxide gas from the cation exchange resin tower. Air aeration is performed between the resin tower and the anion exchange resin tower to remove carbon dioxide in the liquid.
【０００３】水中の炭酸イオンは、純水製造に用いる原
水、例えば、市水、井戸水などによってその含有量が異
なり、市水では１０〜３０ppm 、井戸水では２０〜５０
ppmの炭酸イオンが含まれている。したがって、この炭
酸イオンを除去することは、後段の陰イオン交換樹脂の
効率を高める上で重要であり、脱炭酸塔の役割は大き
い。The content of carbonate ions in water varies depending on the raw water used for producing pure water, for example, city water, well water, etc., 10-30 ppm in city water and 20-50 ppm in well water.
Contains ppm carbonate ions. Therefore, it is important to remove the carbonate ion to enhance the efficiency of the subsequent anion exchange resin, and the role of the decarbonation tower is large.
【０００４】しかしながら、空気曝気による脱炭酸法
は、純水中の炭酸ガスのみを対象とした場合には、従来
は大きな問題は生じなかったが、最近では、純水中に含
まれている有機物又は微粒子の問題が顕在化してきてい
る。このため、脱炭酸塔に吹き込む空気をフィルターに
かけ、空気中の微粒子を除去するなどの装置上の改善が
行われている。しかし、空気中の０.1〜0.５μｍという
ような微細な粒子をフィルターによって充分に除去する
ことは困難である。また、脱炭酸塔を空気曝気すること
により微粒子以外の空気中の不純物、例えば、イオン、
有機物、細菌などが多く混入する。これらの不純物は、
脱炭酸塔の後段にある陰イオン交換樹脂塔及び混床塔に
悪影響を及ぼし、樹脂の再生頻度が増加する、純水中の
微粒子が増加するなどの問題が生じる。[0004] However, the decarboxylation method by air aeration has not conventionally caused a major problem when only carbon dioxide in pure water is used, but recently, organic substances contained in pure water have not been problematic. Alternatively, the problem of fine particles has become apparent. For this reason, improvements in the apparatus have been made such as filtering the air blown into the decarbonation tower to remove fine particles in the air. However, it is difficult to sufficiently remove fine particles such as 0.1 to 0.5 μm in air with a filter. In addition, impurities in the air other than the fine particles, for example, ions,
Organic substances, bacteria, etc. are mixed in a lot. These impurities are
This has an adverse effect on the anion exchange resin tower and the mixed bed tower located downstream of the decarbonation tower, and causes problems such as an increase in the frequency of resin regeneration and an increase in fine particles in pure water.
【０００５】さらに、半導体洗浄用の純水や超純水中の
溶存ガス、特に溶存酸素は、イオン交換樹脂の酸化、各
種金属部材の腐食などの防止の観点から除去されてき
た。最近、半導体素子製造におけるＳi ウエハ洗浄時に
液中に溶存酸素が存在すると、Ｓi ウエハ表面に自然酸
化膜が形成され、高性能デバイスを製作する上での問題
点が指摘されており、純水及び超純水中の溶存酸素濃度
を数ppb 以下とする技術開発がなされている。Further, dissolved gases, particularly dissolved oxygen, in pure water or ultrapure water for cleaning semiconductors have been removed from the viewpoint of preventing oxidation of ion exchange resins and corrosion of various metal members. Recently, when dissolved oxygen is present in the liquid during cleaning of a Si wafer in the manufacture of semiconductor devices, a natural oxide film is formed on the surface of the Si wafer, and a problem in manufacturing a high-performance device has been pointed out. Technology has been developed to reduce the dissolved oxygen concentration in ultrapure water to several ppb or less.
【０００６】従来、溶存酸素除去には真空脱気法が広く
採用されてきた。この方法は、塔高１０ｍ程度の真空塔
の上部から被処理水をスプレーし、酸素分圧の低い気相
に液滴を接触させる過程で溶存酸素を除去するものであ
る。しかしながら、この方法は、真空塔内の真空レベル
によって、液中に残存する溶存酸素濃度は限界となり、
通常の限界真空レベルである２０〜３０ Torr では、液
中に溶存酸素が５０〜１００ppb 残留する。したがっ
て、この真空脱気法は性能的に問題がある。Conventionally, vacuum degassing has been widely employed for removing dissolved oxygen. In this method, water to be treated is sprayed from the top of a vacuum tower having a tower height of about 10 m, and dissolved oxygen is removed in the process of bringing the droplets into contact with a gas phase having a low oxygen partial pressure. However, in this method, the concentration of dissolved oxygen remaining in the liquid is limited by the vacuum level in the vacuum tower,
At the normal limit vacuum level of 20 to 30 Torr, 50 to 100 ppb of dissolved oxygen remains in the liquid. Therefore, this vacuum degassing method has a problem in performance.
【０００７】これに対し、様々な液中の溶存酸素を極低
濃度にする方法が現在検討されており、その一つに液中
に窒素ガスなどの不活性ガスを通気する不活性ガス曝気
法がある。この方法は液中に窒素ガスなどの不活性ガス
を通気することによって溶存酸素を除去し、１ppb の濃
度まで溶存酸素を除去することが可能であるが、反面、
通気する不活性ガス量が比較的多量となるという欠点が
ある。[0007] On the other hand, methods for reducing dissolved oxygen in various liquids to an extremely low concentration are currently being studied, and one of them is an inert gas aeration method in which an inert gas such as nitrogen gas is passed through the liquid. There is. This method can remove dissolved oxygen by passing an inert gas such as nitrogen gas through the liquid, and can remove dissolved oxygen up to a concentration of 1 ppb.
There is a disadvantage that the amount of inert gas to be ventilated is relatively large.
【０００８】一方、一次純水システムでは、前記のよう
に、陰イオン交換塔のイオン量を低減するため、陽イオ
ン交換塔から流出する液中の炭酸イオンを除去する操作
が行われる。これが脱炭酸塔の役目であり、通常、この
塔の下部から空気を通気して液中の炭酸イオンを除去し
ている。このため、純水中の溶存酸素は、この脱炭酸塔
の出口で大気と飽和の８０００〜９０００ppb となり、
後段の溶存酸素除去塔に対して大きな負担となってい
る。また、前述のように、溶存酸素の存在によって陰イ
オン交換樹脂の劣化を促進するマイナス面も生じてい
る。On the other hand, in the primary pure water system, as described above, the operation of removing carbonate ions from the liquid flowing out of the cation exchange column is performed in order to reduce the amount of ions in the anion exchange column. This is the function of the decarbonation tower. Usually, air is ventilated from the lower part of the tower to remove carbonate ions in the liquid. Therefore, the dissolved oxygen in the pure water at the outlet of the decarbonation tower becomes 8000 to 9000 ppb, which is saturated with the atmosphere.
The burden on the latter dissolved oxygen removal tower is heavy. Further, as described above, there is a downside that the deterioration of the anion exchange resin is promoted by the presence of dissolved oxygen.
【０００９】[0009]
【発明が解決しようとする課題】本発明は、前記従来技
術の問題点を解消し、脱炭酸塔の通気口にフィルターを
用いることなく、炭酸イオンを炭酸ガスとして除去する
ための通気を行うことができ、これにより液中に微粒子
の増加及び不純物イオンの増加を起こさずに純水を製造
することができ、さらに純水中の溶存酸素を極低濃度ま
で除去しうる純水の製造方法及び装置を提供することを
目的とする。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems of the prior art and to provide ventilation for removing carbonate ions as carbon dioxide gas without using a filter at the ventilation port of the decarbonation tower. It is possible to produce pure water without increasing the number of fine particles and impurity ions in the liquid, thereby producing pure water capable of removing dissolved oxygen in pure water to an extremely low concentration. It is intended to provide a device.
【００１０】[0010]
【課題を解決するための手段】本発明は、脱炭酸塔にお
いて空気曝気の代わりに不活性ガスで曝気することによ
って前記目的を達成したものである。すなわち、本発明
による純水の製造方法は、陽イオン交換樹脂塔、脱炭酸
塔、陰イオン交換樹脂塔及び溶存酸素除去塔に順次通水
することによって純水を製造する場合、溶存酸素除去塔
の底部に不活性ガスを導入し、該溶存酸素除去塔の上部
から排出される不活性ガスの一部又は全 部を上記脱炭酸
塔の底部へ導入することを特徴とする。According to the present invention, the above object has been achieved by performing aeration with an inert gas instead of air in a decarbonation tower. In other words, the method for producing pure water according to the present invention comprises a method for producing pure water by sequentially passing water through a cation exchange resin tower, a decarbonation tower , an anion exchange resin tower and a dissolved oxygen removal tower.
An inert gas is introduced into the bottom of the
The decarboxylation some or all parts of the inert gas discharged from the
It is introduced into the bottom of the tower .
【００１１】また、本発明による純水の製造装置は、陽
イオン交換樹脂塔、脱炭酸塔、陰イオン交換樹脂塔及び
溶存酸素除去塔を含む純水製造装置において、溶存酸素
除去塔の底部に不活性ガス供給装置を接続し、該溶存酸
素除去塔の上部から排出される不活性ガスの一部又は全
部を上記脱炭酸塔の底部へ導入する不活性ガス配管を設
けたことを特徴とする。 The apparatus for producing pure water according to the present invention is
Ion exchange resin tower, decarbonation tower, anion exchange resin tower and
In the pure water production equipment including the dissolved oxygen removal tower, the dissolved oxygen
An inert gas supply device is connected to the bottom of the removal tower, and an inert gas pipe for introducing a part or all of the inert gas discharged from the upper part of the dissolved oxygen removal tower to the bottom of the decarbonation tower is provided.
It is characterized by
【００１２】[0012]
【実施例】図１は、本発明の一実施例を示す純水製造装
置の前段部分の系統図である。図１において被処理水
は、前処理装置１を経て陽イオン交換樹脂塔２に流入す
る。ここで、被処理水中に存在している各種イオンのう
ちＮa 、Ｋなどの陽イオンがイオン交換樹脂の交換基と
反応して除去される。また、このときにＨイオンが水中
に放出されるため、液のpHが低下する。脱炭酸塔３では
pHの低い被処理水を塔の上部からスプレーする被処理水
導入管４及び不活性ガス供給装置５が設置され、塔内下
部の貯留水に窒素ガスなどの不活性ガスを吹き込み、こ
の曝気効果によって水中の炭酸イオンを系外に除去す
る。次に、陰イオン交換樹脂塔６では、炭酸イオン以外
の陰イオンを除去し、さらに混床塔７で残留する各種イ
オンを除去し、この一連のシステムを通過することによ
って純水が製造される。FIG. 1 is a system diagram of a front part of a pure water producing apparatus showing an embodiment of the present invention. In FIG. 1, the water to be treated flows into a cation exchange resin tower 2 via a pretreatment device 1. Here, cations such as Na and K among various ions present in the water to be treated react with the exchange groups of the ion exchange resin and are removed. Further, at this time, since the H ions are released into the water, the pH of the liquid decreases. In decarbonation tower 3,
A treated water introduction pipe 4 for spraying treated water having a low pH from the upper part of the tower and an inert gas supply device 5 are installed, and an inert gas such as nitrogen gas is blown into the stored water at the lower part of the tower. This removes carbonate ions in the water out of the system. Next, in the anion exchange resin tower 6, anions other than carbonate ions are removed, and further, various ions remaining in the mixed bed tower 7 are removed, and pure water is produced by passing through this series of systems. .
【００１３】図２は、市水を原水としたときの本発明方
法及び従来方法の脱炭酸塔出口水の水質の経時変化を示
すグラフである。脱炭酸塔を空気曝気する従来方法は、
炭酸の除去効果は充分であるが、処理液中の 0.2μｍ以
上の微粒子数は１×１０5 〜５×１０5 個／mlと多量含
まれる。これに対し、本発明方法により不活性ガス（例
えば、窒素ガス）を従来法の空気と同量の８０リットル
／分（ガス通気速度：約６０ｍ／時間）を吹き込んだ場
合には、炭酸除去性能はほぼ同程度であるが、処理液中
の微粒子数は１×１０4 個／ml以下であった。すなわ
ち、本発明方法によって、処理液中の微粒子数を９０％
以上低減することが可能となる。この微粒子除去効果の
違いは、脱炭酸塔の次工程である陰イオン交換樹脂塔の
出口水に大きな影響を与える。FIG. 2 is a graph showing the change over time of the water quality at the outlet of the decarbonation tower according to the method of the present invention and the conventional method when city water is used as raw water. The conventional method of aerating the decarbonation tower with air is as follows:
Although the effect of removing carbonic acid is sufficient, the number of fine particles having a size of 0.2 μm or more in the treatment liquid is as large as 1 × 10 5 to 5 × 10 5 particles / ml. On the other hand, when the inert gas (for example, nitrogen gas) is blown by the method of the present invention at 80 liters / minute (gas flow rate: about 60 m / hour), which is the same amount as the air of the conventional method, the carbonic acid removal performance is reduced. Was almost the same, but the number of fine particles in the processing solution was 1 × 10 4 particles / ml or less. That is, by the method of the present invention, the number of fine particles in the treatment liquid is reduced by 90%.
The above can be reduced. This difference in the effect of removing fine particles greatly affects the outlet water of the anion exchange resin tower, which is the next step of the decarbonation tower.
【００１４】図３は、従来方法と本発明方法を採用した
場合の陰イオン交換樹脂の出口水における微粒子濃度の
経時変化を示すグラフである。従来方法では、陰イオン
交換樹脂塔出口水の微粒子は、通水時間約１２時間から
急激に増加するが、本発明方法では通常の再生サイクル
である通水時間２０時間においても微粒子の流出は殆ど
ない。また、表１には、従来法と本発明方法の流出水の
有機物量、総カチオン量及び総アニオン量を示す。この
結果から、本発明方法は微粒子の他の不純物の低減に対
しても効果的であることが分かる。FIG. 3 is a graph showing the change over time in the concentration of fine particles in the outlet water of the anion exchange resin when the conventional method and the method of the present invention are employed. In the conventional method, the fine particles of the water at the outlet of the anion exchange resin tower rapidly increase from about 12 hours of water flow. However, in the method of the present invention, almost no outflow of fine particles occurs even in 20 hours of water flow which is a normal regeneration cycle. Absent. Table 1 shows the amounts of organic substances, total cations, and total anions in the effluent of the conventional method and the method of the present invention. From these results, it can be seen that the method of the present invention is also effective in reducing other impurities in fine particles.
【００１５】[0015]
【表１】 [Table 1]
【００１６】図４の破線は、従来の空気を通気する脱炭
酸塔を有する純水製造装置の溶存酸素の推移を示すグラ
フである。液中の溶存酸素は、炭酸イオンを除去するた
めの脱炭酸塔を通過すると急激に上昇してしまい、後段
の溶存酸素の除去装置に対して大きな負担となっている
ことが分かる。 The broken line in FIG. 4 is a graph showing the transition of dissolved oxygen in a conventional pure water production apparatus having a decarbonation tower through which air is passed. It can be seen that the dissolved oxygen in the liquid rapidly rises when passing through a decarbonation tower for removing carbonate ions, which imposes a heavy burden on a dissolved oxygen removal device at a later stage.
【００１７】図５は、本発明の別の実施例を示す純水製
造装置の全体構成の系統図である。図５に示した装置
は、主として、凝集などの前処理装置１、活性炭塔１
１、２Ｂ３Ｔと称される陽イオン交換樹脂塔２、脱炭酸
塔３、陰イオン交換樹脂塔６、さらに混床塔７、溶存酸
素除去塔８、超純水製造システム９及び不活性ガス供給
装置５から構成されている。原水である市水は、この装
置を順次通過する過程で高純度化される。この装置で
は、不活性ガス供給装置５は、溶存酸素除去塔８の底部
に接続され、溶存酸素除去塔８の上部から排出されるガ
スは、不活性ガス配管１０を介して前段の脱炭酸塔３の
底部に供給され、該脱炭酸塔３において水中の炭酸イオ
ン及び溶存酸素を同時に除去するように構成されてい
る。FIG. 5 shows another embodiment of the present invention .
It is a system diagram of the whole structure of a manufacturing apparatus . The apparatus shown in FIG. 5 mainly includes a pretreatment device 1 for coagulation and the like, an activated carbon tower 1
1, 2B3T, cation exchange resin tower 2, decarbonation tower 3, anion exchange resin tower 6, mixed bed tower 7, dissolved oxygen removal tower 8, ultrapure water production system 9, and inert gas supply device 5 is comprised. City water, which is raw water, is highly purified in the process of sequentially passing through this device. In this apparatus, the inert gas supply device 5 is connected to the bottom of the dissolved oxygen removal tower 8, and the gas discharged from the upper portion of the dissolved oxygen removal tower 8 is supplied to the former decarbonation tower via the inert gas pipe 10. The decarbonation tower 3 is configured to remove carbonate ions and dissolved oxygen in water at the same time.
【００１８】図５に示した装置で実施した場合の水中の
溶存酸素濃度を図４に実線で併記した。図４から分かる
ように、従来方法による脱炭酸を行うことにより炭酸イ
オンの除去性能を低下させることなく、溶存酸素を６０
０〜８００ppb にまで低減することができる。[0018] are also shown by the solid line in FIG. 4 the dissolved oxygen concentration in water when carried out in the apparatus shown in FIG. As can be seen from FIG. 4, the dissolved oxygen is reduced by 60% without deteriorating the carbonate ion removal performance by performing the decarboxylation by the conventional method.
It can be reduced to 0 to 800 ppb.
【００１９】さらに、図６は、溶存酸素除去塔８の入口
液中の溶存酸素に対する必要ガス量についてまとめたも
のであるが、被処理液中の溶存酸素を１〜３ppb にまで
除去するのに必要な窒素ガス量は、従来法では供給液量
に対して 0.8Ｎｌ／ｌであったのに対して、本発明方法
では 0.4Ｎｌ／ｌとなり、吹き込み窒素ガス量を約１／
２に低減可能であった。FIG. 6 summarizes the amount of gas required for dissolved oxygen in the liquid at the inlet of the dissolved oxygen removal tower 8. The method is used to remove dissolved oxygen in the liquid to be treated to 1 to 3 ppb. The necessary nitrogen gas amount was 0.8 Nl / l with respect to the supply liquid amount in the conventional method, but was 0.4 Nl / l in the method of the present invention.
2 could be reduced.
【００２０】[0020]
【発明の効果】本発明によれば、脱炭酸塔における微粒
子をはじめとする各種不純物を効果的に低減でき、後段
の陰イオン交換樹脂塔出口水の水質を大幅に向上するこ
とができる。また、後段の溶存酸素除去塔を経由した窒
素ガスなどの不活性ガスを吹き込むことによりイオン交
換樹脂の劣化の原因となる液中の溶存酸素も同時に除去
することが可能となり、脱炭酸塔の後段に設置された陰
イオン交換樹脂の交換頻度を向上でき、系内での細菌繁
殖を防止できるという付随的効果もある。さらに、溶存
酸素除去塔に不活性ガスを吹き込み、その排出ガスを脱
炭酸塔へ導入する方式とすることにより、不活性ガス使
用量を大幅に低減できる。According to the present invention, various impurities including fine particles in the decarbonation tower can be effectively reduced, and the quality of the water at the outlet of the subsequent anion exchange resin tower can be greatly improved. Also, by blowing an inert gas such as nitrogen gas through a dissolved oxygen removal tower at the subsequent stage, it becomes possible to simultaneously remove dissolved oxygen in the liquid that causes deterioration of the ion exchange resin, There is also an additional effect that the frequency of exchange of the anion exchange resin installed at the subsequent stage of the decarbonation tower can be improved, and the propagation of bacteria in the system can be prevented. Furthermore, by using a method in which an inert gas is blown into the dissolved oxygen removal tower and the exhaust gas is introduced into the decarbonation tower, the amount of inert gas used can be significantly reduced.
【図１】本発明の一実施例を示す純水製造装置の前段部
分の系統図である。FIG. 1 is a front part of a pure water production apparatus showing one embodiment of the present invention.
Minute which is a system diagram.
【図２】従来法及び本発明方法を実施した場合の脱炭酸
塔流出水の水質の経時変化を示すグラフである。FIG. 2 is a graph showing a change over time in water quality of a decarbonation tower effluent when the conventional method and the method of the present invention are performed.
【図３】従来法及び本発明方法を実施した場合の陰イオ
ン交換樹脂塔からの流出水中の微粒子数の経時変化を示
すグラフである。FIG. 3 is a graph showing the change over time in the number of fine particles in the effluent from an anion exchange resin tower when the conventional method and the method of the present invention are carried out.
【図４】従来法及び本発明方法を実施した場合の純水及
び超純水製造装置における溶存酸素の推移を示すグラフ
である。FIG. 4 is a graph showing a transition of dissolved oxygen in a pure water and ultrapure water production apparatus when the conventional method and the method of the present invention are performed.
【図５】本発明の別の実施例を示す純水製造装置の全体
構成の系統図である。FIG. 5 shows an entire pure water production apparatus showing another embodiment of the present invention.
It is a system diagram of a structure .
【図６】従来法及び本発明方法を実施した場合の溶存酸
素除去塔入口の溶存酸素と吹き込み窒素ガス必要量との
関係を示すグラフである。FIG. 6 is a graph showing the relationship between the dissolved oxygen at the inlet of the dissolved oxygen removal tower and the required amount of nitrogen gas blown when the conventional method and the method of the present invention are carried out.
１・・・前処理装置、２・・・陽イオン交換樹脂塔、３
・・・脱炭酸塔、４・・・処理液流入管、５・・・不活
性ガス供給装置、６・・・陰イオン交換樹脂塔、７・・
・混床塔、８・・・溶存酸素除去塔、９・・・超純水製
造システム、１０・・・不活性ガス配管、１１・・・活
性炭塔DESCRIPTION OF SYMBOLS 1 ... Pretreatment apparatus, 2 ... Cation exchange resin tower, 3
... Decarbonation tower, 4 ... Treatment liquid inflow pipe, 5 ... Inert gas supply device, 6 ... Anion exchange resin tower, 7 ...
・ Mixed bed tower, 8 ・ ・ ・ Dissolved oxygen removal tower, 9 ・ ・ ・ Ultra pure water production system, 10 ・ ・ ・ Inert gas pipe, 11 ・ ・ ・ Activated carbon tower
フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) C02F 1/42 B01J 47/00 - 47/14 B01D 19/00 - 19/04 C02F 1/20 Continuation of front page (58) Field surveyed (Int.Cl. 7 , DB name) C02F 1/42 B01J 47/00-47/14 B01D 19/00-19/04 C02F 1/20
Claims (2)
ン交換樹脂塔及び溶存酸素除去塔に順次通水することに
よって純水を製造する場合、溶存酸素除去塔の底部に不
活性ガスを導入し、該溶存酸素除去塔の上部から排出さ
れる不活性ガスの一部又は全部を上記脱炭酸塔の底部へ
導入することを特徴とする純水の製造方法。1. When pure water is produced by sequentially passing water through a cation exchange resin tower, a decarbonation tower, an anion exchange resin tower and a dissolved oxygen removal tower, an inert gas is supplied to the bottom of the dissolved oxygen removal tower. A method for producing pure water, comprising introducing a part or all of an inert gas discharged from an upper part of the dissolved oxygen removing tower to a bottom part of the decarbonating tower.
ン交換樹脂塔及び溶存酸素除去塔を含む純水製造装置に
おいて、溶存酸素除去塔の底部に不活性ガス供給装置を
接続し、該溶存酸素除去塔の上部から排出される不活性
ガスの一部又は全部を上記脱炭酸塔の底部へ導入する不
活性ガス配管を設けたことを特徴とする純水の製造装
置。2. A pure water production apparatus including a cation exchange resin tower, a decarbonation tower, an anion exchange resin tower and a dissolved oxygen removal tower, wherein an inert gas supply device is connected to the bottom of the dissolved oxygen removal tower. An apparatus for producing pure water, comprising an inert gas pipe for introducing a part or all of an inert gas discharged from an upper part of a dissolved oxygen removing tower to a bottom part of the decarbonating tower.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4091907A JP3057890B2 (en) | 1992-03-17 | 1992-03-17 | Method and apparatus for producing pure water |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4091907A JP3057890B2 (en) | 1992-03-17 | 1992-03-17 | Method and apparatus for producing pure water |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05261368A JPH05261368A (en) | 1993-10-12 |
| JP3057890B2 true JP3057890B2 (en) | 2000-07-04 |
Family
ID=14039653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4091907A Expired - Fee Related JP3057890B2 (en) | 1992-03-17 | 1992-03-17 | Method and apparatus for producing pure water |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3057890B2 (en) |
-
1992
- 1992-03-17 JP JP4091907A patent/JP3057890B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05261368A (en) | 1993-10-12 |
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