JP3063528B2 - Manufacturing method of shadow mask - Google Patents
Manufacturing method of shadow maskInfo
- Publication number
- JP3063528B2 JP3063528B2 JP6160254A JP16025494A JP3063528B2 JP 3063528 B2 JP3063528 B2 JP 3063528B2 JP 6160254 A JP6160254 A JP 6160254A JP 16025494 A JP16025494 A JP 16025494A JP 3063528 B2 JP3063528 B2 JP 3063528B2
- Authority
- JP
- Japan
- Prior art keywords
- shadow mask
- metal plate
- hole side
- pattern
- outer contour
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【0001】[0001]
【産業上の利用分野】本発明は、カラー受像管に用いら
れるシャドウマスクの製造方法に係わり、特に、金属の
薄板上に形成されるシャドウマスクの外形輪郭線の工夫
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a shadow mask used for a color picture tube, and more particularly to a method of forming an outline of a shadow mask formed on a thin metal plate.
【0002】[0002]
【従来の技術】カラー受像管に用いられるシャドウマス
クの製造方法としてフォトエッチング法が知られてお
り、その一例を図3の工程フロー図を用い簡単に説明す
る。まず、シャドウマスクの基板となる金属の薄板をア
ルカリ脱脂液に接触することにより、金属板の表面に付
着している油分や有機系のゴミ等を除去する脱脂処理を
行う。次いで、次工程の感光性樹脂の塗布の際に、金属
板の表面に感光性樹脂を付き易くするために、金属板を
酸処理液に接触することにより、金属板の表面の整面処
理を行う。2. Description of the Related Art A photo-etching method is known as a method of manufacturing a shadow mask used for a color picture tube, and one example thereof will be briefly described with reference to a process flow chart of FIG. First, a degreasing treatment is performed in which a thin metal plate serving as a substrate of a shadow mask is brought into contact with an alkaline degreasing liquid to remove oil, organic dust, and the like attached to the surface of the metal plate. Next, at the time of applying the photosensitive resin in the next step, in order to easily attach the photosensitive resin to the surface of the metal plate, the metal plate is brought into contact with an acid treatment solution, so that the surface of the metal plate is planarized. Do.
【0003】次いで、金属板の両面にネガ型感光性樹脂
を塗布する。次いで、円形パターン部が遮光部となった
大孔小孔二種類のパターンマスクを用い、金属板の片面
に大孔パターンマスクを密着して当て、金属板の他方の
片面に小孔パターンマスクを対応する位置に密着して当
て、同時に両面に紫外線を照射することによりパターン
露光を行い、円形パターン部以外の領域の感光性樹脂の
光硬化を行う。Next, a negative photosensitive resin is applied to both sides of the metal plate. Next, using a pattern mask of two types of large holes and small holes in which the circular pattern portion is a light-shielding portion, the large hole pattern mask is brought into close contact with one surface of the metal plate, and the small hole pattern mask is applied to the other surface of the metal plate. Pattern exposure is performed by closely contacting the corresponding positions and irradiating ultraviolet rays to both sides at the same time, and photo-curing of the photosensitive resin in a region other than the circular pattern portion is performed.
【0004】次いで、例えば温水スプレーにて現像を行
い未露光部の感光性樹脂を除去後、残った感光性樹脂の
硬膜処理およびバーニングを行う。次いで、金属板両面
に一次エッチングを行い、金属板両面に一定のエッチン
グを行う。次いで、小孔側にニスを塗布してエッチング
防止層を形成する。次いで、大孔側に二次エッチングを
行い、小孔と貫通させる。次いで、エッチング防止層お
よび感光性樹脂を除去し、図4の形を得る。次いで、図
4の金属板4から外形輪郭線1以内を抜き出しシャドウ
マスク基板とする。Then, after developing with, for example, a hot water spray to remove the unexposed portion of the photosensitive resin, the remaining photosensitive resin is subjected to hardening treatment and burning. Next, primary etching is performed on both surfaces of the metal plate, and constant etching is performed on both surfaces of the metal plate. Next, a varnish is applied to the small hole side to form an etching prevention layer. Next, secondary etching is performed on the large hole side to penetrate the small hole. Next, the etching prevention layer and the photosensitive resin are removed to obtain the shape shown in FIG. Next, a portion within the outer contour line 1 is extracted from the metal plate 4 in FIG. 4 to obtain a shadow mask substrate.
【0005】ここで、図4中の有孔エリア2は多数の孔
パターンが穿設されたシャドウマスクの画面部を示し、
スカート成形エリア3は外形部を示し、カラー受像管に
組み込む際に、プレスにより成形される部位である。ま
た、外形輪郭線1は最終的に必要とされるシャドウマス
ク基板の外形輪郭を示す。Here, a perforated area 2 in FIG. 4 shows a screen portion of a shadow mask in which a large number of hole patterns are formed.
The skirt molding area 3 indicates the outer shape, and is a part molded by pressing when incorporated in a color picture tube. The outline 1 indicates the finally required outline of the shadow mask substrate.
【0006】現在、図4の金属板4からシャドウマスク
基板を外形輪郭線1の形に抜き出す方法として以下の方
法があげられる。すなわち、機械的には金属板4からシ
ャドウマスク基板に必要な形に、型を用いて打ち抜く方
法があげられる。At present, the following method can be used as a method for extracting the shadow mask substrate from the metal plate 4 shown in FIG. That is, there is a method of mechanically punching the metal plate 4 into a shape required for the shadow mask substrate using a mold.
【0007】または、フォトエッチング法を用い、外形
輪郭線1を貫通状態の破線で形成し非貫通部分を鋏など
で切り抜く方法、もしくは、金属板4の一方の面にハー
フエッチング状態の実線を設け、他方の面に上記の線と
貫通しない程度にハーフエッチング状態にした破線を設
けることで外形輪郭線1を形成し金属板4の不要部分を
人手等で切り取る方法等がある。[0007] Alternatively, a method in which the outline 1 is formed as a penetrating broken line and a non-penetrating portion is cut out with scissors using a photoetching method, or a half-etched solid line is provided on one surface of the metal plate 4. There is a method of forming a contour line 1 by providing a half-etched broken line on the other surface so as not to penetrate the above-mentioned line, and cutting an unnecessary portion of the metal plate 4 by hand or the like.
【0008】しかし、上記の方法では以下のような問題
が生じている。例えば、機械的方法では金属板に無理な
力が掛かり、シャドウマスク基板部に歪みが生じ、ま
た、型の作成に手間がかかる。また、フォトエッチング
法を用い、破線状の貫通孔を設け非貫通部の切断に鋏を
使用する方法では、切断部に不要のバリが残る。また、
金属板の一方の面にハーフエッチング状態の実線を設
け、他方の面に上記の線と貫通しない程度にハーフエッ
チング状態にした破線を設け人手等で切り取る方法は、
外形輪郭線1部が強度的に弱くなるため、エッチング工
程において基板部が重みで金属板4から抜け落ちたり、
エッチング工程以後の搬送時の振動でも基板部が金属板
4から抜け落ちる可能性がある等の問題がある。However, the above method has the following problems. For example, in a mechanical method, an unreasonable force is applied to a metal plate, causing distortion in a shadow mask substrate portion, and it takes time to make a mold. In addition, in the method of using a photoetching method and providing scissor holes in a broken line shape and using scissors to cut a non-through portion, unnecessary burrs remain in the cut portion. Also,
A method in which a solid line in a half-etched state is provided on one surface of a metal plate, and a broken line in a half-etched state is provided on the other surface so as not to penetrate the line, and cut off manually.
Since one part of the outer contour line becomes weak in strength, the substrate part falls off from the metal plate 4 by weight in the etching step,
There is a problem that the substrate portion may fall off from the metal plate 4 even with vibration during the transfer after the etching step.
【0009】[0009]
【発明が解決しようとする課題】本発明の目的は、カラ
ー受像管に用いられるシャドウマスクの製造方法に係わ
り、特に、シャドウマスク基板の外形輪郭線の形成にお
いて上記したような問題点を有しないシャドウマスクの
製造方法を提供することにある。SUMMARY OF THE INVENTION An object of the present invention relates to a method of manufacturing a shadow mask used for a color picture tube, and in particular, does not have the above-mentioned problems in forming an outline of a shadow mask substrate. An object of the present invention is to provide a method of manufacturing a shadow mask.
【0010】[0010]
【課題を解決するための手段】すなわち、本発明は、カ
ラー受像管に用いられるシャドウマスクの製造方法にお
いて、金属の薄板上のシャドウマスク基板部の外形輪郭
線を、貫通孔および、金属板の大孔側と小孔側にハーフ
エッチング状態にて大孔側と小孔側で交互になるような
破線にて形成することで、シャドウマスク基板の外形輪
郭線を一定の強度を持ち、かつ、易破断性を兼ね備える
よう形成することを特徴とするシャドウマスクの製造方
法を提供することにより上記の課題を解決しようとする
ものである。That is, according to the present invention, in a method of manufacturing a shadow mask used for a color picture tube, an outer contour of a shadow mask substrate portion on a thin metal plate is formed by forming a through hole and a metal plate. By forming the large hole side and the small hole side in half-etched state with broken lines alternately on the large hole side and the small hole side, the outer contour of the shadow mask substrate has a certain strength, and An object of the present invention is to solve the above-described problem by providing a method for manufacturing a shadow mask, which is formed so as to have easy breakability.
【0011】本発明を、図を用い具体的に説明を行う。
本発明においては、シャドウマスク基板の外形輪郭線を
形成するために、パターン露光に用いるパターンマスク
上に外形輪郭線として、図2に示すように、例えば、大
孔パターンマスク5側に長さ350〜450μmおよび
巾30μmの長方形の輪郭線用遮光部7を、ピッチ50
0μmにて破線状に設け、また、小孔パターンマスク6
側に長さ50〜150μmおよび巾50μmの長方形の
輪郭線用遮光部8を、ピッチ500μmにて破線状に、
大孔側の破線と交互になるように設ける。The present invention will be specifically described with reference to the drawings.
In the present invention, in order to form an outer contour of a shadow mask substrate, as shown in FIG. A rectangular contour light-shielding portion 7 having a pitch of 50 to 450 μm and a width of 30 μm
It is provided in a dashed line at 0 μm.
A rectangular contour light-shielding portion 8 having a length of 50 to 150 μm and a width of 50 μm is formed on the side in a dashed line at a pitch of 500 μm.
It is provided so as to alternate with the broken line on the large hole side.
【0012】また、図4に示す様な、コーナー部9およ
び、切り込みのあるノッチ部10等の外形輪郭線1が複
雑になる部分においては、人手による金属板4からのシ
ャドウマスク基板の切り取りを行うと、シャドウマスク
基板の曲がりおよび、折れ等の原因となる。そのため、
外形輪郭線1が複雑になる部分においては人手による金
属板4からのシャドウマスク基板の切り取りを行わない
で済むようにエッチング工程において、外形輪郭線が複
雑な部分では、外形輪郭線がハーフエッチング状態では
なく貫通孔となるよう、外形輪郭線の複雑な部分の実線
パターンを、大孔および、小孔の二枚のパターンマスク
上で遮光部としておく。Further, as shown in FIG. 4, in a portion where the outer contour line 1 such as the corner portion 9 and the notch portion 10 having a cut is complicated, the shadow mask substrate is cut off from the metal plate 4 by hand. Doing so may cause the shadow mask substrate to bend or break. for that reason,
In the etching step, the outline contour is half-etched in the part where the outline contour is complicated so that the shadow mask substrate is not manually cut off from the metal plate 4 in the part where the outline contour 1 becomes complicated. Instead, a solid line pattern of a complicated portion of the outer contour line is formed as a light shielding portion on two pattern masks of a large hole and a small hole so as to form a through hole instead.
【0013】上記のパターンマスクを用い、図3のシャ
ドウマスクの製造工程フローに従ってシャドウマスクの
製造を行うことにより、例えば、図1に示す様に、金属
板の片面の大孔パターン側Aに長さ420〜480μm
および巾140〜150μmのハーフエッチング状態の
長円形の孔を、ピッチ500μmの破線状にて得る。ま
た、もう一方の片面の小孔パターン側Bに長さ80〜1
80μmおよび巾80〜90μmのハーフエッチング状
態の長円形の孔を、ピッチ500μmの破線状にて得
る。こうして、大孔側と小孔側とでハーフエッチング状
態の交互の破線凹部が得られる。By using the above pattern mask and manufacturing the shadow mask according to the manufacturing process flow of the shadow mask shown in FIG. 3, for example, as shown in FIG. 420-480 μm
In addition, oval holes in a half-etched state having a width of 140 to 150 μm are obtained in the form of broken lines with a pitch of 500 μm. The other side of the small hole pattern side B has a length of 80-1.
Oval holes in a half-etched state of 80 μm and a width of 80 to 90 μm are obtained in the form of broken lines with a pitch of 500 μm. In this way, half-etched alternately broken concave portions are obtained on the large hole side and the small hole side.
【0014】また、図4に示す様な、コーナー部9およ
び、切り込みのあるノッチ部10などの外形輪郭線が複
雑になる部分においては、外形輪郭線は部分的にハーフ
エッチングではなく金属板の大孔側と小孔側を貫通した
ものを得る。Further, as shown in FIG. 4, in a portion where the outline is complicated, such as a corner portion 9 and a notch portion 10 having a notch, the outline is not half-etched but partially formed by a metal plate. A material penetrating the large hole side and the small hole side is obtained.
【0015】ここで、エッチング工程において基板部が
重みで金属板から抜け落ちたり、エッチング工程以後の
搬送時の振動でも基板部が金属板から抜け落たりするこ
とのない程度の強度を外形輪郭線部がもち、かつ、金属
板からシャドウマスク基板を人手により容易に切り離す
ことの出来る程度の強度をもたせるために、パターンマ
スクおよび、金属板上の破線の最適の長さおよびピッチ
は、以下に示す実施例より経験的に得た。Here, in the etching step, the strength of the outer contour line portion is set so that the substrate portion does not fall off from the metal plate by weight or the substrate portion does not fall off from the metal plate even by vibration during transportation after the etching step. In order to have sufficient strength to allow the shadow mask substrate to be easily separated from the metal plate by hand, the pattern mask and the optimal length and pitch of the dashed line on the metal plate are as follows. Obtained empirically from the examples.
【0016】また、パターンマスク上の輪郭線の巾は、
上記の設定値より小さいとエッチング液の浸透が少なく
なるためにエッチング量が少なくなり、孔がうまく開か
ず外形輪郭線の強度が強くなりすぎることにより易破断
性が失われ、また、巾が大きいとエッチング過度になり
孔が貫通したり、ハーフエッチングとなっても強度不足
となる等の理由により、パターンマスク上の破線状輪郭
線の巾の設定は、以下に示す実施例より経験的に得た。The width of the contour line on the pattern mask is
When the value is smaller than the above set value, the amount of etching is reduced because the penetration of the etching solution is reduced, the hole is not opened well, and the strength of the outer contour line is too strong, so that the breakability is lost, and the width is large. The width of the dashed outline on the pattern mask can be set empirically from the following examples because of excessive etching, penetration of holes, and insufficient strength even in the case of half etching. Was.
【0017】[0017]
【作用】シャドウマスク用金属板に貫通孔および、金属
板の大孔側と小孔側にハーフエッチング状態の破線を、
大孔側と小孔側で交互に設けることでシャドウマスク基
板の外形輪郭線部が一定の強度を持ち、かつ、破線部が
易破断性を持つため、人手でも容易に金属板からのシャ
ドウマスク基板の切り取りが可能になる。The through hole in the metal plate for the shadow mask and the half-etched broken lines on the large hole side and the small hole side of the metal plate,
By alternately providing the shadow mask on the large hole side and the small hole side, the outer contour of the shadow mask substrate has a certain strength, and the broken line portion has easy breakability, so that the shadow mask from the metal plate can be easily made manually. The substrate can be cut off.
【0018】[0018]
【実施例】本発明の実施例を、以下に示す。 <実施例>シャドウマスク用金属板として、厚さ130
μmの鉄とニッケルを主成分とする合金材(アンバー
材)を用い、図3の工程フローに従いシャドウマスクの
製造を行った。Embodiments of the present invention will be described below. <Example> A metal plate for a shadow mask having a thickness of 130
A shadow mask was manufactured according to the process flow of FIG. 3 using an alloy material (amber material) mainly composed of iron and nickel of μm.
【0019】ここで、本発明においては、パターン露光
の際、パターン露光に用いるパターンマスクとして、大
孔パターンマスクにおける外形輪郭線の形成のために、
外形線を長さ400μmおよび巾30μmの長方形の遮
光部を、ピッチ500μmの破線状に形成した。また、
同様に、小孔パターンマスクでの外形線を長さ100μ
mおよび巾50μmの長方形の遮光部を、ピッチ500
μmの破線状にし、図2に示すように大孔側と小孔側で
遮光部が交互になるように形成した。また、シャドウマ
スク基板のコーナー部および、ノッチ部はエッチングに
より貫通孔となるよう、大孔パターンマスクおよび小孔
パターンマスク両方の相対する位置に同一の線パターン
を設けた。Here, in the present invention, at the time of pattern exposure, as a pattern mask used for pattern exposure, in order to form an outer contour line in a large hole pattern mask,
A rectangular light-shielding portion having an outer shape of 400 μm in length and a width of 30 μm was formed in a dashed shape with a pitch of 500 μm. Also,
Similarly, the outline of the small hole pattern mask is 100 μm long.
m and a 50 μm wide rectangular light-shielding part
The light-shielding portion was formed so as to be alternately formed on the large hole side and the small hole side as shown in FIG. Further, the same line pattern was provided at a position opposite to both the large hole pattern mask and the small hole pattern mask so that the corner portion and the notch portion of the shadow mask substrate became through holes by etching.
【0020】上記のパターンマスクを用い、図3の工程
フローに従ってシャドウマスクを製造し、シャドウマス
クの外形輪郭線となるハーフエッチング状態の破線部と
して、大孔パターン側に長さ477μm、巾147μ
m、深さ102μm、ピッチ500μmの長円形の凹部
を、また、小孔パターン側に長さ131μm、巾84μ
m、深さ32μm、ピッチ500μmの長円形の凹部を
各々破線状に得た。また、外形輪郭線のコーナー部およ
び、ノッチ部は貫通孔とした。Using the above pattern mask, a shadow mask is manufactured in accordance with the process flow of FIG. 3 and a length of 477 μm and a width of 147 μm are formed on the side of the large hole pattern as a half-etched broken line portion which becomes an outline of the shadow mask.
m, a depth of 102 μm, a pitch of 500 μm, an oval concave portion, and a small hole pattern side having a length of 131 μm and a width of 84 μm.
m, a depth of 32 μm, and a pitch of 500 μm were obtained in the form of dashed lines, respectively. The corners and notches of the outline were formed as through holes.
【0021】上記で製造されたシャドウマスク用金属板
における外形輪郭線は、一定の強度を持っており、製造
工程中の金属板からのシャドウマスク基板部の抜け落ち
は皆無であった。しかも、金属板からのシャドウマスク
基板部の抜き出しは、人手による金属板の不要部のむし
り取りにより容易に行え、かつ、金属板を数枚重ねた状
態で、まとめて金属板の不要部のむしり取りを人手にて
行うことも可能であった。The outer contour of the metal plate for a shadow mask manufactured as described above had a certain strength, and the shadow mask substrate did not fall off from the metal plate during the manufacturing process. Moreover, the extraction of the shadow mask substrate portion from the metal plate can be easily performed by manually removing the unnecessary portion of the metal plate, and the unnecessary portion of the metal plate is collectively removed in a state where several metal plates are stacked. It was also possible to perform the picking manually.
【0022】[0022]
【発明の効果】本発明により製造されるシャドウマスク
用金属板における外形輪郭線は、一定の強度を持ってお
り、製造工程中の振動等により、金属板からシャドウマ
スク基板部が抜け落ちる不良は皆無となる。しかも、外
形輪郭線が易破断性を持つことで金属板からのシャドウ
マスク基板部の抜き出しは、器具を用いず人手による金
属板の不要部のむしり取りにより容易に行え、かつ、金
属板を数枚重ねた状態でも、まとめて金属板の不要部の
むしり取りを人手にて行うことも可能である等、生産工
数の向上にもつながり、かつ、得られるシャドウマスク
基板の側面もバリが発生せず滑らかなものが得られる
等、本発明は実用上優れている。The outer contour of the metal plate for a shadow mask manufactured according to the present invention has a certain strength, and there is no defect that the shadow mask substrate portion falls off from the metal plate due to vibration during the manufacturing process. Becomes In addition, since the outer contour line is easily breakable, the shadow mask substrate portion can be easily extracted from the metal plate by manually removing unnecessary portions of the metal plate without using an instrument. Even in a stacked state, unnecessary parts of the metal plate can be collectively cut off manually, which leads to an improvement in production man-hours, and burrs occur on the side of the obtained shadow mask substrate. The present invention is practically excellent, for example, a smooth material can be obtained.
【0023】[0023]
【図1】本発明のシャドウマスクの外形輪郭線の一実施
例を示す断面図。FIG. 1 is a cross-sectional view showing one embodiment of an outline of a shadow mask of the present invention.
【図2】本発明に用いる、シャドウマスク用パターンマ
スクの外形輪郭線部の一例を示す説明図。FIG. 2 is an explanatory view showing an example of an outer contour portion of a shadow mask pattern mask used in the present invention.
【図3】シャドウマスクの製造工程の一例を示す工程フ
ロー図。FIG. 3 is a process flow chart showing an example of a shadow mask manufacturing process.
【図4】シャドウマスク基板の一例を示す平面図。FIG. 4 is a plan view showing an example of a shadow mask substrate.
1 外形輪郭線 2 有効エリア 3 スカート成形エリア 4 金属板 5 大孔パターンマスク 6 小孔パターンマスク 7 輪郭線用遮光部 8 輪郭線用遮光部 9 コーナー部 10 ノッチ部 11 感光性樹脂 A 大孔パターン側 B 小孔パターン側 DESCRIPTION OF SYMBOLS 1 Outline contour line 2 Effective area 3 Skirt forming area 4 Metal plate 5 Large hole pattern mask 6 Small hole pattern mask 7 Contour light shielding part 8 Contour light shielding part 9 Corner part 10 Notch part 11 Photosensitive resin A Large hole pattern Side B Small hole pattern side
Claims (1)
の製造方法において、金属の薄板上に形成されるシャド
ウマスク基板部の外形輪郭線を、貫通孔および、金属板
の大孔側と小孔側にハーフエッチング状態にて大孔側と
小孔側で交互になるような破線にて形成することで、シ
ャドウマスク基板の外形輪郭線を一定の強度を持ち、か
つ、易破断性を兼ね備えるように形成することを特徴と
するシャドウマスクの製造方法。In a method of manufacturing a shadow mask used for a color picture tube, an outer contour line of a shadow mask substrate portion formed on a thin metal plate is defined by a through hole and a large hole side and a small hole side of a metal plate. In the half-etched state, the outer contour of the shadow mask substrate is formed with a dashed line that alternates between the large hole side and the small hole side so that it has a certain strength, and also has easy breakability. Forming a shadow mask.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6160254A JP3063528B2 (en) | 1994-07-12 | 1994-07-12 | Manufacturing method of shadow mask |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6160254A JP3063528B2 (en) | 1994-07-12 | 1994-07-12 | Manufacturing method of shadow mask |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0831317A JPH0831317A (en) | 1996-02-02 |
| JP3063528B2 true JP3063528B2 (en) | 2000-07-12 |
Family
ID=15711035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6160254A Expired - Fee Related JP3063528B2 (en) | 1994-07-12 | 1994-07-12 | Manufacturing method of shadow mask |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3063528B2 (en) |
-
1994
- 1994-07-12 JP JP6160254A patent/JP3063528B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0831317A (en) | 1996-02-02 |
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