JP3065719B2 - Calibration method of halogen gas leak detector - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for detecting a halogen gas leak.
Relates calibration method vessels, more particularly, for example, it relates to a method of calibrating the detection sensitivity of the halogen gas leak detector for detecting the leakage, such as chlorofluorocarbons.

[0002]

2. Description of the Related Art Conventionally, calibration of a halogen gas leak detector has been performed using a reference leak generator called a leak standard. This leakage standards, halogen moth
An increase valve is provided between the upper tank and the lower tank filled with gas (for example, chlorofluorocarbon), and the lower tank is opened to the atmosphere via a release valve.
In addition, a reference leakage amount is generated from the lower tank via the capillary.

[0003]

However, in the above-mentioned conventional example, since it was necessary to obtain a constant pressure by operating the increase valve and the release valve , the calibration of the halogen gas leak detector was complicated. There were disadvantages.

The present invention has been made in view of the above-described drawbacks of the prior art, and has as its object to eliminate the need to operate a valve or the like for maintaining a constant pressure and to easily generate a reference leakage amount to achieve a halogen. and to provide a Ru calibration method can be calibrated gas leakage detector.

[0005]

SUMMARY OF THE INVENTION The present invention provides a halogen gas
In the calibration method of the leak detector, a pressure tank inside Harogenga scan is filled, the pressure detector for outputting an electrical signal is mounted in accordance with the pressure supplied from the pressure tank via an on-off valve, wherein A certain amount of leak gas supplied through an on- off valve and a capillary is led to a halogen gas leak detector via a probe, and the leak gas is supplied from the pressure detector.
The output signal is sent to the CPU pressure correction calculation of the leakage amount
This problem is solved by performing the calibration of the halogen gas leak detector while performing the above .

[0006]

The present invention operates as follows. In other words, the blade inside
A pressure tank Rogenga scan is filled, the pressure detector is mounted via an on-off valve. The on-off valve and the capillary - a certain amount of leakage gas is supplied through its leakage gas <br/> scan pro - directed to a halogen gas leak detector through the drive. Furthermore, the output signal from the pressure detector with pressure compensation operation is sent to the CPU leakage amount is performed, the calibration of the halogen gas leak detector is performed.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings. FIG. 1 is a diagram for explaining an embodiment of the present invention.
In the figure, reference numeral 1 denotes a pressure tank filled with, for example, Freon gas, 2 denotes an on- off valve , and 3 denotes an electric power supply according to the supplied pressure.
A pressure detector for outputting a gas signal , 4 is a capillary, 5 is a probe for guiding a certain amount of leak gas supplied through the capillary 4 to a halogen gas leak detector 6, 7 is a pump, and 8 is a pressure. Detector output P1 and halogen gas leak detection
Multiplexer to be sent sequentially A / D converter 9 receives the output S1 of the can 6, 10 includes a central processing unit which receives the output of the A / D converter 9 performs a predetermined operation (hereinafter, "CPU"
11) is an RO for exchanging information with the CPU 10.
Reference numeral 12 denotes a memory including M and RAM, and a display unit 12 that receives an output of the CPU 10 and displays a leakage amount and the like.

FIG. 2 shows the pressure P supplied from the pressure detector 3.
FIG. 4 is a characteristic curve diagram showing a relationship between the amount of leakage and the amount of leakage . FIG. 3 shows the pressure Ps detected by the halogen gas leak detector 6 and the pressure Ps.
FIG. 3 is a characteristic curve diagram showing a relationship with a leakage amount L , in which a solid line A is a reference calibration curve stored in another area of the ROM in the memory 11, and a broken line B is a halogen gas leak detection curve.
This is a calibration curve actually measured by the output unit 6.

The operation of the embodiment of the present invention will be described below in detail with reference to FIGS. The memory 11 (RO in FIG. 1)
In M), a characteristic curve as shown in FIG. 2 is stored in advance. Then, in FIG. 1, Opening the open-close valve 2, the pressure of the halogen gas in the tank 1 is supplied to the pressure detector 3, depending from the pressure detector 3 with the pressure of the halogen gas
The electric signal P1 is sent to the multiplexer 8 and A / D converted by the A / D converter 9. After the electric signal P1 is subjected to A / D conversion, it is sent to the CPU 10 and the leakage amount L is determined by a predetermined calculation based on the characteristic curve of FIG.

Further, a certain amount of leak gas supplied through the capillary 4 is guided to the halogen gas leak detector 6 through the probe 5 at a certain flow rate and detected. Its <br/> detection signal S1 is sent to the multiplexer 8, Ru is A / D converted by the A / D converter 9. The A / D converted signal is
The leakage amount is sent to the CPU 10 and determined by a predetermined calculation, and is displayed on the display 12.

By the way, as described above, the halogen gas
If the calibration curve created based on the detection signal S1 of the leak detector 6 is as shown by the broken line B in FIG. 3, the calibration curve is corrected as follows. That is, a characteristic curve shown by a solid line A in FIG. 3 is stored in another area of the memory 11 (ROM) in FIG. Further, when the calibration curve created based on the detection signal S1 of the halogen gas leak detector 6 as described above shows the dashed line B in FIG. 3, the dashed line B is compared with the solid line A. Correct the calibration curve so that it matches the solid line A. The present invention can be variously modified without being limited to the above-described embodiment.

[0012]

According to the present invention as described above in detail, according to the present invention, the capillary pressure detector - near to provided, for a structure so as to obtain a constant pressure, the ink as in the prior lease valves and Dikuri - Subarubu There is an advantage that it is not necessary to operate. Further, since the pressure fluctuation is monitored by the pressure detector , there is an advantage that an accurate leak amount can always be detected.

[0013] Therefore, according to the present invention does not require such as a valve operation for maintaining a constant pressure, easily generates a reference leak <br/> weight halogen gas leakage can be calibrated halogen gas leak detector A detector calibration method is realized.

[Brief description of the drawings]

FIG. 1 is a diagram for explaining an embodiment of the present invention.

FIG. 2 is a characteristic curve diagram showing a relationship between a pressure and a leak amount (leak amount) .

FIG. 3 is a calibration curve diagram showing a relationship between a pressure and a leak amount (leak amount) .

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Pressure tank 2 On- off valve 3 Pressure detector 4 Capillary 5 Probe 6 Gas leak detector 7 Pump 8 Multiplexer 9 A / D converter 10 Central processing unit (CPU) 11 Memory 12 Display

Claims (1)

(57) [Claims] To 1. A pressure tank inside Harogenga scan is filled, the pressure detector for outputting an electrical signal is mounted in accordance with the pressure supplied from the pressure tank via an on-off valve, and the on-off valve Halogen gas leak detection through a probe for a certain amount of leak gas supplied via a capillary
And output signals from the pressure detector to CP
While the pressure correction calculation of the leakage amount is delivered to the U, the calibration method of the halogen gas leak detector, characterized in that for calibrating of the halogen gas leak detector.