JP3077922B2 - Laminated glass for hermetic terminals - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated glass for hermetic terminals, and more particularly to a glass used for hermetic terminals for hermetically encapsulating semiconductor devices, circuit components and the like.

[0002]

2. Description of the Related Art As shown in FIG. 4, for example, a hermetic terminal is formed by passing a crank-shaped lead terminal 3 through an hermetic space 2 formed by a box-shaped base 1 made of glass. The structure is such that a seal ring 4 is provided on the upper end surface. Then, circuit components (not shown) and the like are installed in the hermetic space 2 and are electrically connected to the lead terminals 3 while being covered with a lid 5 and crimped to hermetically enclose the circuit components and the like. ing.

Further, as shown in FIG. 5, an airtight terminal in which a hook-shaped lead terminal 3 is sealed to a glass base 1 from the back surface of the base 1 is also known.

As described above, various types of hermetic terminals are known.

[0005]

In the hermetic terminal having such a structure, glass is often used as a material for forming the base 1 or as an insulating material for sealing the lead terminal 3, but this is the first problem. This is because there are advantages such as good adhesion to a metal such as a lead terminal and secondly, a low dielectric constant.

However, on the other hand, there is a disadvantage that the strength is insufficient. For example, in the case of an airtight terminal as shown in FIG. 4, there is a disadvantage that it is difficult to reduce the thickness.

[0007]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and has been described as a sealing glass constituting an airtight terminal.
An object of the present invention is to provide a laminated glass for a hermetic terminal having good adhesion to a metal, a small dielectric constant, and a high strength.

[0008]

Means for Solving the Problems In order to solve the above problems, a laminated glass for a hermetic terminal according to the present invention comprises a high-strength glass layer containing a large amount of ceramic powder at the center, and the amount of ceramic powder added to the front and back surfaces thereof. Characterized in that one or two or more intermediate glass layers whose gradual decrease decreases are provided, and the outermost glass layer to which the amount of ceramic powder added is smaller than that of the intermediate glass layer is provided on the intermediate glass layer.

According to the present invention, a high-strength glass layer is provided at the center, an intermediate glass layer having different addition amounts of ceramic powder gradually from the high-strength glass layer, and a glass layer having good sealing with metal is formed as the outermost layer. Is provided, the adhesiveness to the lead terminal and the seal ring is good, and a glass having high strength can be obtained.

[0010]

DETAILED DESCRIPTION OF THE INVENTION Glass 6 for hermetic terminals according to the present invention
According to FIG. 1, as shown in FIG.
1 and a structure in which an intermediate glass layer 62 is provided on the front and back surfaces of the high-strength glass layer 61 and an outermost glass layer 63 is provided on the outermost side, so that a sandwich structure centering on the high-strength glass layer 61 is obtained. Has become. Although the intermediate glass layer 62 is a single layer in this embodiment, it is apparent that the intermediate glass layer 62 may have a plurality of layers.

In the above-mentioned structure, ceramic powder is added to the high-strength glass layer 61 and the intermediate glass layer 62, and the outermost glass layer 63 contains glass alone or ceramic powder. This is to improve the strength by adding a ceramic powder.

From the high-strength glass layer 61 to the intermediate glass layer 62 and the outermost glass layer 63, the amount of ceramic powder added is reduced. The high-strength glass layer 61 desirably has high strength, while the outermost glass layer 63, which is the outermost layer, desirably has high adhesion to a lead terminal, a seal ring, and a lead terminal. Further, it is not desirable that a distortion occurs when the glass layers are laminated and fired. For this reason, the amount of the ceramic powder added is gradually reduced from the high-strength glass layer 61 to the outermost glass layer 63.

In the present invention as described above, as the glass to be used as the base material, general commercially available glass for hermetic terminals, for example, borosilicate glass for sealing Kovar or soda glass for sealing iron is used. can do.

The ceramic powder to be added to such glass powder is, for example, alumina, forsterite,
Examples include steatite, zircon, cordierite, titania, and mullite.

The amount of the ceramic powder added to such a base glass is 55% by weight in the case of the high-strength glass layer 61.
It should be: If the content exceeds 55% by weight, the strength may be reduced.

Further, in the case of the outermost glass layer 63, the added amount of the ceramic powder is 0 to 30% by weight. If the amount exceeds 30% by weight, a problem may occur in the adhesiveness to the seal ring or the lead terminal.

The difference in the amount of ceramic powder added to the adjacent glass layers from the high-strength glass layer 61 to the outermost glass layer 63 is preferably 20% by weight or less. If the content exceeds 20% by weight, the difference in thermal expansion coefficient between the respective glass layers becomes too large, and there is a possibility that the respective glass layers cannot be uniformly integrated.

As the metal material of the seal ring, the lead terminal and the like sealed by the laminated glass side wall 7 of the present invention, for example, a Kovar alloy, iron, iron nickel alloy or the like can be used.

When the above-mentioned glass to which the ceramic powder is added is produced, the glass powder and the ceramic powder are mixed in a predetermined amount and fired at 900 ° C. to 1200 ° C. By firing in this manner, the glass is homogenized, and a glass having practicality can be obtained.

If the sintering temperature is lower than 900 ° C., the glass powder and the alumina powder do not react with each other and are difficult to be homogenized, while if it exceeds 1200 ° C., the composition may be different.

In stacking the fired glass, the fired glass is in the form of a block.

For example, a binder is arbitrarily mixed into the glass powder to form a green sheet by press molding, extrusion molding, tape molding or the like.

The above-mentioned glass sheets are laminated so as to form the laminated glass of the present invention according to the amount of the ceramic powder added, hot-pressed, punched into a predetermined shape, and fired.

[0024]

EXAMPLES Borosilicate glass for sealing Kovar having an average particle size of 6 to 7 μm (trade name: BH-W: Nippon Electric Glass Co., Ltd.)
Was mixed with varying amounts of alumina powder having a center particle size of 0.4 μm, and baked at 1000 ° C. for 30 minutes in a nitrogen gas atmosphere to homogenize the glass. This is crushed in an automatic mortar,
Further, the powder was finely pulverized with a vibration mill to obtain a powder of 325 mesh pass.

This was molded into a glass plate, laminated according to the present invention and hot-pressed to obtain a five-layered laminated glass having a thickness of 0.3 mm as shown in FIG.

The high-strength glass layer 61 of the laminated glass 6 was obtained by adding 50% by weight of alumina powder, the intermediate glass layer 62 by 30% by weight of alumina powder, and the outermost glass layer 63 by adding 20% by weight of alumina powder. .

Using the laminated glass 6, an airtight terminal whose cross section is shown in FIG. 2 was manufactured. That is, the laminated glass 6
And a laminated glass 6 supporting the lead terminals 3.
And a seal ring 4 is provided above the lead terminal 3.
Was provided and heated to produce a hermetic terminal.

This hermetic terminal is rectangular and 8 × 3.5
mm, and the total thickness was 1.5 mm.

An airtight terminal having the same dimensions as above was
Manufactured using Kovar sealing glass with weight percent addition.

A test for the mechanical strength of these airtight terminals was performed. In the test, as shown in FIGS. 3a and 3b, a carbide rod 7 of 1.25 mmφ is attached to the push-pull gauge 8, and the center of the bottom is pressed at a speed of 30 mm / min from the back side of the airtight terminal until the glass is broken. The breaking force was measured. Airtight terminal 1
The result of 0 tests is 7.0 kgf maximum, 4.4 kgf minimum, and 5.46 kgf average on the hermetic terminal according to the present invention.
Met. On the other hand, in an airtight terminal of 20% by weight of alumina, the maximum is 4.6 kgf, the minimum is 3.4 kgf, and the average is 3.0 kgf.
It was 88 kgf.

In FIG. 3A, a pressing plate 9 having a width of 1.0 mm is used.
Similarly, the central part of the bottom surface of the airtight terminal is pressed at 30 mm / min as shown in FIG. 3C, and a force for bending the lead terminal is applied.
The breaking force until the airtight terminal was broken was measured (bending strength test). When the test was performed on ten hermetic terminals, the hermetic terminal according to the present invention had a maximum of 17.2 kgf, a minimum of 10.7 kgf, and an average of 13.03 kgf. On the other hand, a maximum of 1
3.8kgf, minimum 9.2kgf, average 12.08kg
f.

As is apparent from these results, the hermetic terminal according to the present invention has better strength than the conventional one.

[0033]

As described above, according to the laminated glass for hermetic terminals of the present invention, the adhesion to metal is good,
The glass for airtight terminals having a low dielectric constant and excellent strength can be obtained. For this reason, there is an advantage that the hermetic terminal can be manufactured in which the hermetic terminal is reduced in weight and thickness and the sealing strength of the lead terminal is improved.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a laminated glass for a hermetic terminal according to the present invention.

FIG. 2 is a sectional view of an airtight terminal manufactured using the laminated glass.

FIG. 3a is a schematic view of an apparatus for performing a strength test of an airtight terminal.

FIG. 3b is a schematic view of an apparatus for performing a pressing force test.

FIG. 3c is a schematic diagram of an apparatus for performing a bending strength test.

FIG. 4 is a sectional view of a conventional hermetic terminal.

FIG. 5 is a sectional view of a hermetic terminal having another conventional structure.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Base 2 Airtight space 3 Lead terminal 4 Seal ring 6 Laminated glass 61 High-strength glass layer 62 Intermediate layer 63 Outermost glass layer

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) H01R 9/16 101

Claims (2)

(57) [Claims] 1. A high-strength glass layer to which a large amount of ceramic powder is added at the center, and one or two or more intermediate glass layers in which the amount of ceramic powder added gradually decreases on the front and back surfaces, and the intermediate glass layer is provided on the intermediate glass layer. A laminated glass for a hermetic terminal, comprising an outermost glass layer having a smaller amount of ceramic powder added than a layer. 2. The difference between the amounts of ceramic powder added to adjacent glass layers is 20% by weight or less, and the amount of ceramic powder added to the high-strength glass layer is 55% by weight or less. 2. The laminated glass for a hermetic terminal according to claim 1, wherein the amount of the powder added is 0 to 30% by weight.