JP3079754B2 - Developing method and developing device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a developing apparatus used for producing a master of a so-called optical recording disk such as a video disk and an audio disk.

[0002]

2. Description of the Related Art In general, an optical recording disc master is
A photosensitive film having a thickness of about 0.1 μm is formed by applying a photoresist on the surface of a glass substrate, and after exposing the photosensitive film to a laser beam or the like according to a recording signal using a master code cutter or the like. , By removing the exposed portion.

[0003] The developing device is a device used to remove the exposure of the photosensitive film in the process of manufacturing the master of the optical recording disk or the like. As shown in FIG. Rotating disk means 101 to rotating drive means 10
While rotating at 2, the developer is sprayed (supplied) on the photosensitive film by the developer supply means 103, and the developing solution dissolves the photosensitive portion of the photosensitive film, forming so-called pits on the photosensitive film. Monitor laser light 105 from laser light source 104
And the diffracted light that changes due to the growth of the pits, that is, the 0th-order light and the 1st-order lights 106 and 107 are detected by the first and second photoelectric conversion units 108 and 109, and when the detection level reaches a predetermined value. There is also known a method in which the development of the developer is stopped by, for example, stopping the spraying of the developer by the developer supply means 103 to control the cross-sectional dimension of the pit by preventing the progress of the development (for example, Japanese Patent Publication No. 2-35925). No.).

[0004]

By the way, the above-mentioned developing device is affected by external elements such as dust floating in the optical path of the laser beam, mist-like developer or fluctuation of the developer surface, as shown in FIG. In addition, the output of the 0th-order light and the 1st-order light is disturbed (pulsation), which causes an error in detecting the development stop position, which adversely affects the pit accuracy.

The present invention solves the above-mentioned conventional problems, and accurately stops development without being influenced by disturbance factors such as dust floating in the optical path of a laser beam, mist-like developer, or fluctuation of the developer surface. The object of the present invention is to provide a developing method and a developing device capable of detecting a position.

[0006]

The disk substrate on which the photosensitive film is formed is rotated, a developing solution is supplied onto the photosensitive film, and the developing solution is used to melt the photosensitive portion of the photosensitive film. Irradiating a laser beam for monitoring to the portion, detects the output of the diffracted light, and stops the development based on the detection result. In order to stabilize irrespective of the presence of disturbance elements such as fluctuations, the amount of laser light applied to the photosensitive film is controlled.

[0007]

The output of the diffracted light is light sensitive even when there is a disturbance such as a change in the output of the laser light source or dust floating in the optical path of the laser light, mist-like developer or fluctuation of the developer surface. By controlling the amount of laser light applied to the film,
Since a stable state without disturbance is maintained, the development stop position can be accurately detected, and a pit with high accuracy can be formed.

[0008]

BRIEF DESCRIPTION OF THE DRAWINGS FIG.

In FIG. 1, reference numeral 1 denotes a developing device of the present invention. The developing device 1 rotates a disk base 3 made of glass on which a photoresist film as a photosensitive film 2 is formed by a rotation driving means 4, Further, a developer 6 is supplied and sprayed on the photosensitive film 2 by a developer supply means 5, and the photosensitive portion of the photosensitive film 2 is melted with the developer 6 to form a pit from the laser light source 7 while forming a pit. The laser light 8 for monitoring is irradiated, the 0th-order light 9 and the 1st-order light 10 are detected by the first and second photoelectric conversion means (detectors) 11 and 12, respectively. The supply of the developer 6 by the supply unit 5 is stopped.

[0010] 13 Even if disturbance element of fluctuation such as dust or mist of the developing solution or a developing solution surface floating in the optical path of the laser light is present, by controlling the output of the laser light source 7, 1 This is a light amount control means for keeping the outputs of the next-order light 9 and the zero- order light 10 in a stable state without disturbance.

Next, each component will be specifically described.

The rotation driving means 4 comprises a turntable 41 on which the disk base 3 is chucked and mounted by vacuum, a spindle 42 on which the turntable 41 is mounted, and a base plate 43 supporting the spindle 42. And a servo motor 45 for rotating the spindle 42 via a belt 44. The servo motor 45 rotates the disk base 3 via the belt 44, the spindle 42, and the turntable 41. .

The developer supply means 5 rotates a nozzle 51 disposed above the turntable 41, a nozzle arm 52 having the nozzle 51 attached to one end thereof, and a nozzle arm 52 provided at the other end of the nozzle arm 52. An arm support base 53 movably supported, and a tube 54 at the other end of the nozzle 51
The developing solution or pure water is connected to the nozzle 51 through the tube 54 and the nozzle arm 52.
, A control circuit 56 for controlling the solenoid valve 55, and a comparison circuit 57 connected to the control circuit 56.

The comparison circuit 57 includes the second
When the output signal from the photoelectric conversion means 12 reaches the development stop level Vb, the control circuit 56 switches the solenoid valve 55 so that the pure liquid is used instead of the developer. Water is supplied, the pure water is sprayed from the nozzle 51 onto the photosensitive film 2, and the developer is washed away.
The development is stopped.

Further, the laser light source 7 have been used a short semiconductor laser of coherence length, the coherence length
A short laser beam 8 is applied to a photoresist film as the photosensitive film 2.

Next, the light amount control means 13 will be described.

The light quantity control means 13 includes a laser driver 61 for controlling the output of the laser light source 7, a control circuit 62 of the laser driver 61, and a first photoelectric conversion means 11 connected to the control circuit 62. And a comparison circuit 63 to which the output of the first photoelectric conversion means 11 is input. The output of the first photoelectric conversion means 11 is input to the comparison circuit 63, and the output of the first photoelectric conversion means 11 is The output of the semiconductor laser as the laser light source 7 is controlled via the control circuit 62 and the laser driver 61 so as to always maintain a stable state regardless of the elements.

A mirror 64 refracts the laser beam 8 emitted from the semiconductor laser toward the photosensitive film.
Is a chamber for spraying and collecting a developer or pure water.

Next, the operation of the developing device will be described.

A disk base 3 having a photosensitive portion corresponding to a recording signal formed on the photosensitive film 2 by a master code cutter or the like is placed on a turntable 41, and pure water is sprayed from a nozzle 51 while rotating the turntable 41. Then, the photosensitive film 2 is washed with water.

After washing the photosensitive film 2 with water, the nozzle arm 52 is rotated to stop the nozzle 51 at a predetermined position on the photosensitive film 2, and the laser light 8 is supplied from the semiconductor laser as the laser light source 7 to the photosensitive film. Irradiate on 2

Then, the developer 6 is sprayed from the nozzle 51 toward the photosensitive film 2 while rotating the disk base 3 by the turntable 41.

[0023] The spraying of the developer 6, is exposed portion of the photosensitive film 2 is no erosion begin to form pits, the pit becomes a predetermined cross-sectional dimension, by the zero-order light 10 and the second photoelectric conversion unit 12 When the output reaches the development stop level Vb, the solenoid valve 55 is operated to spray pure water from the nozzle 51 instead of the developer 6 to wash out the developer 6 to stop the development. Even when there is a possibility that the output of the diffracted light may be disturbed by a disturbance element such as dust or a mist-like developer floating in the optical path of the laser light from the laser light source 7 to the photosensitive film 2. Light amount control means 1 including the comparison circuit 63, the control circuit 62, and the laser driver 61.
3 controls the output of the laser light source 7, and as shown in FIG.
Since the output of the primary light 9 is stabilized, the disturbance of the output of the zero- order light 10 is suppressed, and the development stop position can be accurately detected.

FIG. 3 shows that the light quantity control means 13 is
(EO modulator) 7 provided on the optical path until the laser beam emitted from the light reaches the photosensitive film 2
1, a modulator driver 72 for controlling the modulator 71, and a control circuit 7 for the modulator driver 72.
3 and the comparison circuit 74 connected to the control circuit 73 and to which the output of the first photoelectric conversion means 12 is input, there is a possibility that the disturbance light may cause disturbance in the diffracted light. Even in this case, the comparison circuit 74 and the control circuit 7
3. By controlling the modulator 71 with the modulator driver 72 and controlling the output from the modulator 71, the output of the zero-order light can be stabilized in the same manner as directly controlling the output of the laser light source 7 described above. The development stop position can be accurately detected.

When the output of the laser light source 7 is directly controlled by the light quantity control means, the laser light source 7 itself is limited to a semiconductor laser or the like having a good control response, but the light quantity control means using the modulator 71 is used. Is advantageous in that it can be applied to a laser light source with poor response, such as a gas laser such as a He-Ne laser.

[0026]

As described above, the developing method and the developing apparatus of the present invention have the above-described structure, and are capable of preventing dust floating in the optical path of laser light, fog-like developer or fluctuation of the developer surface. Even when there are disturbance elements, there is an effect that the normal development stop position can be accurately detected without being affected by these disturbance elements, and a highly accurate pit can be formed.

[Brief description of the drawings]

FIG. 1 is a block diagram of a first embodiment.

FIG. 2 is an output waveform diagram.

FIG. 3 is a block diagram of a second embodiment.

FIG. 4 is a block diagram of a conventional example.

FIG. 5 is an output waveform diagram.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Developing device, 2 ... Light sensitive film, 3 ... Disc base, 4 ...
Rotation driving means, 5: developer supply means, 6: developer, 7 ...
Laser light source, 8 monitor light, 9 zero-order light, 10 primary light, 11, 12 first and second photoelectric conversion means, 13 light quantity control means, 61 laser driver, 62 control circuit,
63: comparison circuit, 71: modulator, 72: modulator driver, 73: control circuit, 74: comparison circuit.

────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-3-280232 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) G11B 7/26

Claims (4)

(57) [Claims] 1. A disk substrate on which a photosensitive film is formed is rotated, a developing solution is supplied onto the photosensitive film, and the photosensitive solution of the photosensitive film is melted with the developing solution. In the developing method of irradiating the laser light, detecting the output of the diffracted light, and stopping the development based on the detection result, by controlling the amount of the laser light applied to the photosensitive film, A developing method for removing the disturbance of the output of the diffracted light based on a disturbance element of the output of the diffracted light such as fluctuation of the developer surface. 2. A disk substrate on which a photosensitive film is formed is rotated by a rotation driving means, a developing solution is supplied onto the photosensitive film by a developing solution supply means, and the photosensitive solution of the photosensitive film is supplied with the developing solution. While melting, irradiating the laser light for monitoring from the laser light source to the portion, the output of the diffracted light is detected by the photoelectric conversion means, in a developing device that stops the development based on the detection result, Providing light amount control means for controlling the amount of laser light applied to the light-sensitive film, by the light amount control means, regardless of the presence of a disturbance element in the output of diffracted light such as fluctuations in the developer surface,
A developing device wherein the output of the diffracted light is stabilized. 3. The developing device according to claim 2, wherein the light amount control means includes a laser driver for controlling an output of the laser light source, a control circuit of the laser driver, and a control circuit of the photoelectric conversion means connected to the control circuit. A developing device comprising a comparison circuit to which an output is input. 4. A developing device according to claim 2, wherein said light amount controlling means includes a modulator provided on an optical path from a laser light emitted from a laser light source to a photosensitive film, and a modulator driver for controlling said modulator. And a control circuit for the modulator driver, and a comparison circuit connected to the control circuit and to which an output of the photoelectric conversion unit is input.