JP3084699B2 - Wire saw wire reel mounting structure - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire reel mounting structure for a wire saw, and more particularly to a wire saw mounting structure for fastening a wire reel to a turntable with bolts.

[0002]

2. Description of the Related Art Conventionally, a wire reel mounting structure of a wire saw has a structure in which a wire reel is fixed by screwing a bolt onto a turntable.
Are fitting portions 3A, 4 formed on the mating surfaces of the respective flanges 3, 4 of the wire reel 1 and the turntable 2.
With A fitted, tighten and secure with bolts. In this case, the wire reel 1 is placed on the turntable 2, and the cylindrical concave portion 4A formed on the lower flange 4 of the wire reel 1 is replaced with the cylindrical convex portion 3A formed on the flange 3 of the turntable 2. Fit. At the same time, the detent pins 6 provided on the turntable 2 are inserted into pin holes 7 provided on the lower flange 4. Next, a bolt 9 is inserted into a bolt hole 8 formed along the center line of the wire reel 1, and a bolt head 9A is attached to the wire reel 1.
And the turntable 2
The screw portion 9B (male screw) of the bolt 9 is screwed into the screw hole 3B (female screw) formed in the convex portion 3A. As a result, as the screw portion 9B of the bolt 9 enters the screw hole 3B of the turntable 2, the tightening force of the bolt 9 is applied between the upper flange 5 and the flange 3 of the turntable 2.
The wire reel 1 can be fastened and fixed to the turntable 2. That is, the upper flange 5 of the wire reel 1 is used as a tightening surface of the bolt 9.

[0003]

However, the conventional wire reel mounting structure for a wire saw has the following disadvantages. (1) In the wire reel 1 of the wire saw, since the wires 10, 10,... Are wound around the wire reel 1 many times, when the wire 10 is wound around the wire reel 1, the force 11 in the direction of the arrow shown in FIG. Acts in the longitudinal direction of the wire reel 1. With this force, the wire reel 1
Since the overall length of the bolt 9 increases, a strong tensile force acts on the bolt 9 in the axial direction. As a result, the wire reel 1 is connected to the turntable 2
There is a drawback that the bolt 9 cannot be turned when it is removed from the cable. (2) Since the flange surfaces 4 and 5 of the wire reel 1 are deformed in an arc shape by the force 11 in the arrow direction, the recess 4A of the lower flange surface 4 of the wire reel 1 Bolt 9 bites into protrusion 3A
There is a disadvantage that the wire reel 1 cannot be detached from the turntable 2 even if the wire reel 1 is removed from the wire reel 1.

Therefore, due to the disadvantages (1) and (2), the work of removing the wire reel 1 from the turntable 2 becomes difficult, and the work requires a long time. (3) When mounting the wire reel 1 on the turntable 2, the detent pin 6 is fitted simultaneously with the fitting of the concave portion 4 </ b> A of the wire reel 1 and the convex portion 3 </ b> A of the turntable 2.
In addition, there is a disadvantage that the position of the pin hole 7 must be determined, and the operation is troublesome.

The present invention has been made in view of such circumstances, and the wire reel can be easily removed from the turntable without being affected by the deformation of the wire reel due to winding of the wire. It is an object of the present invention to provide a wire reel mounting structure of a wire saw capable of improving the wire saw.

[0006]

According to the present invention, in order to achieve the above object, a workpiece is pressed against a wire running between one wire reel and the other wire reel, and abrasive grains are applied to the wire. A wire saw that cuts the workpiece into a number of thin wafers by supplying a working fluid containing: a bolt hole formed in a center line of the wire reel that rewinds or winds the wire. In a wire reel mounting structure of a wire saw for fixing the wire reel to the turntable by screwing the bolt into a turntable on the rotating power side, the bolt is formed in a stepped structure, Tighten the flange on the turntable side of the wire reel with the stepped part of the bolt and the turntable flange. Characterized in that fixed to Nrota side.

In order to achieve the above object, a workpiece is pressed against a wire running between one wire reel and the other wire reel, and a working fluid containing abrasive grains is supplied to the wire. A wire saw for cutting the workpiece into a plurality of thin wafers, wherein a fitting portion of the wire reel for rewinding or winding the wire is fitted to a fitting portion of a turntable on a rotating power side. In the fitted state, in a wire reel mounting structure of a wire saw, a bolt is inserted into a bolt hole formed in a center line of the wire reel, the bolt is screwed into a turntable, and the wire reel is fixed to the turntable. The bolt is formed in a stepped structure, and the flange on the turntable side of the wire reel is attached to the step of the bolt. Together to tighten the flange of the feeder unit and the turntable is fixed to the turbine rotor side to form a tapered said each of the fitting portion, characterized in that so as to fit the taper.

In order to achieve the above object, a workpiece is pressed against a wire running between one wire reel and the other wire reel, and a working fluid containing abrasive grains is supplied to the wire. A wire saw for cutting the workpiece into a number of thin wafers, wherein the wire reel for rewinding or winding the wire is fixed to a turntable on a rotating power side with bolts. In the mounting structure, the flange on the turntable side of the wire reel and the flange of the turntable are fastened and fixed with bolts, and a bolt position for fixing the flanges together is
A plurality of wire reels are provided at positions shifted from a center line of the wire reel.

[0009]

According to the first aspect of the present invention, it is possible to tighten and fix the bolt so that the tightening force of the bolt is applied only between the flange of the turntable and the flange of the wire reel on the turntable side. As a result, no tightening force is applied between the upper flange of the wire reel and the flange of the turntable as in the conventional case, so that the wire is wound around the wire reel, so that an elongating force acts in the longitudinal direction of the wire reel. However, there is no axial tension on the bolt. Therefore, when removing the wire reel from the turntable, the bolt can be easily turned and loosened.

According to a second aspect of the present invention, a bolt is tightened and fixed only between a turntable flange and a wire reel flange on the turntable side so that a tightening force of a bolt is applied. The fitting part
The taper was adjusted. Thus, as in the case of the first aspect, even if the wire reel is subjected to a longitudinal elongation force acting on the wire reel, no axial tensile force acts on the bolt. Furthermore, since the fitting part is tapered,
Even if the flange is deformed, the fitting portions do not bite each other. Thus, the wire reel can be easily removed from the turntable.

According to a third aspect of the present invention, a plurality of bolt positions for tightening and fixing the wire reel and the flange of the turntable are set at positions shifted from the center line of the wire reel and the turntable. I made it. As a result, even if the wire reel is deformed by the winding of the wire, there is no elongation of the bolt due to the deformation, and no axial tensile force acts on the bolt. Therefore, the wire reel can be easily removed from the turntable. Also, bolts can be used in place of detent pins.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a wire reel mounting structure for a wire saw according to the present invention will be described below in detail with reference to the accompanying drawings. Before describing the embodiment of the wire reel mounting structure of the wire saw according to the present invention, first, the overall configuration of the wire saw 110 will be described with reference to FIG. The wire 114 wound around one of the wire reels 112 has a wire guide device 116 and a plurality of fixed guide rollers 11.
8, 118, and sequentially wound around three grooved rollers 122, 122, 122 via a dancer roller 120 to form a wire row 124, and then a plurality of fixed guide rollers 118, 118, a dancer roller 120, a wire guide device The wire is wound on the other wire reel 126 via 116.

A weight 144 having a predetermined weight is suspended from the dancer roller 120, and a required tension is constantly applied to the traveling wire 114. A wire cleaning device 146 is provided in the middle of the wire running path, and the processing liquid 14 attached to the wire 114 by the wire cleaning device 146.
0 is removed.

The wire reels 112 and 126 are connected to drive motors 128 and 130 which can rotate forward and backward, respectively, and one of three grooved rollers 122.
Is connected to a drive motor 132 that can rotate forward and reverse. As a result, the wire 114 is connected to one of the wire reels 112.
And the other wire reel 126 reciprocates. A processing liquid 140 containing abrasive grains (usually, GC of about $ 600 to $ 1000 is used) stored in a polishing liquid storage tank 138 is supplied from the polishing liquid supply nozzle 142 to the wire row 124. .

Below the wire array 124, a semiconductor ingot 154, which is a workpiece, is provided with a work block 15.
6 and the work table 148 via the slice base 158. The work feed table 148 is provided movably up and down by a screw rod 152 rotated by a motor 150. The semiconductor ingot 154
The workpiece feed table 148 is moved upward to be pressed against the high-speed running wire row 124, and is wrapped by the processing liquid 140 supplied to the high-speed running wire row 124 to form a large number of thin wafers. Be cut off.

Next, a first embodiment of a wire saw mounting structure for a wire saw according to the present invention will be described. FIG.
1 is a cross-sectional view illustrating a first embodiment of a wire reel mounting structure for a wire saw according to the present invention. On a frame wall of a wire saw main body (not shown), bolts 28, 28... Are fixed to a casing 26 containing a motor 22 for rotating the turntable 20 and a rotating power unit such as a rotating shaft 24. In the center of the upper surface of the flange 30 of the turntable 20, a columnar projection 30A is formed, and a screw hole 30B (female screw) for screwing with a screw part 32A (male screw) of a bolt 32 described later is formed. Further, on the outer peripheral side of the flange surface 30, a detent pin 34 protrudes. On the other hand, the wire reel 36 has a disk-shaped upper flange 40 (upper flange in FIG. 2) and a lower flange 42 (lower flange in FIG. 2) fixed to both ends of a cylindrical body 38, respectively. At the center of the flange 42, a concave portion 42A to be fitted to the convex portion 30A of the turntable 20 is formed, and at the outer peripheral side, a pin hole 43 corresponding to the detent pin 34 is formed. In addition, the wire reel 36
A bolt hole 44 through which the bolt 32 penetrates is formed. The diameter of the bolt hole 44 is such that the upper flange 40 and the body 38 are formed to have a diameter through which the shaft portion 32B of the bolt 32 penetrates. The lower flange 42 is formed to have a diameter through which the screw portion 32A having a smaller diameter than the shaft portion 32B passes. The bolt 32 is formed in a stepped structure having a stepped portion 32E in which the screw portion 32A is thinner than the bolt shaft portion 32B,
The length of the screw portion 32A of the bolt 32 is the length of the turntable 2
Slightly formed to a length Me from the screw hole 30B formed in the 0. The head portion 32C of the bolt 32 has the same diameter as the shaft portion 32B, and has a hexagonal hole 32D for inserting a driver member (not shown) in an end surface thereof.

In order to fix the wire reel 36 to the turntable 20, first, the wire reel 36 is placed on the surface of the flange 30 of the turntable 20, and the recess 4 formed on the lower flange 42 of the wire reel 36 is formed.
2A is fitted to the protrusion 30A formed on the surface of the flange 30 of the turntable 20. At the same time, the pin hole 43 of the lower flange 42 is inserted into the detent pin 34 protruding from the turntable 20. Next, the bolt 32 is inserted into the bolt hole 44.
And screw the screw portion 32A into the screw hole 30B of the turntable flange 20. As a result, when the bolt 32 is rotated to allow the screw portion 32A to enter the screw hole 30B, the stepped portion 32E of the bolt 32
2, the tightening force of the bolt 32 acts between the lower flange 42 and the flange 30 of the turntable 20, so that the wire reel 36 is tightened and fixed to the turntable 20. That is, the bolt 32 can be tightened and fixed so that the tightening force of the bolt 32 is applied only between the lower flange 42 of the wire reel 36 and the flange 30 of the turntable 20.

Therefore, according to the wire reel mounting structure of the wire saw of the present invention, the conventional wire saw in which the tightening force of the bolt 32 is applied between the upper flange 40 of the wire reel 36 and the flange 30 of the turntable 20 is used. Unlike the wire reel mounting structure, even if an elongation force acts in the longitudinal direction of the wire reel 36 due to the winding of the wire 10, no tensile force acts on the bolt 32. As a result,
When removing the wire reel 36 from the turntable 20, the bolt 32 can be easily turned and loosened.
Accordingly, the work of removing the wire reel 36 can be performed easily and quickly, and the work efficiency can be improved.

Next, a second embodiment of the wire reel mounting structure for a wire saw according to the present invention will be described with reference to FIG.
In the first embodiment, since the stepped portion 32E needs to be brought into contact with the upper surface 42B of the lower flange 42, the upper flange 40 into which the bolt 32 is inserted and the body 38 are connected to the shaft 3 of the bolt 32.
The lower flange 42 has a bolt hole 4 having a diameter through which the screw portion 32A of the bolt 32 can be inserted and the shaft portion 32B cannot pass.
4 is required. Thus, in the first embodiment, since the wire reel 36 is not vertically symmetrical, the wire reel 36 cannot be used with the upper flange 40 and the lower flange 42 reversed (the upper flange 40 is matched with the flange 30 of the turntable 20). Therefore, when winding a new wire,
There is a problem that the winding direction of the wire must be limited. That is, due to the structure of the wire saw, FIG.
As shown in FIG. 4, it is necessary to wind the wire 10 in front of the worker 46 side, and there is a problem if the wire 10 is wound so as to come to the back side of the worker 46 as shown in FIG.

Therefore, in a second embodiment of the wire reel mounting structure for a wire saw according to the present invention, as shown in FIG.
The structure of the wire reel 36 is vertically symmetrical, and a washer 48 is movably provided in the bolt hole 44 of the body 32B of the wire reel 36. Specifically, the diameter of the bolt hole 44, the recesses 40A and 42A, and the pin hole 43 are formed identically by the upper and lower flanges 40 and 42, and the wire reel 3
The diameter of the bolt hole 44 of the body 38 of each
2 was larger than the diameter of the bolt hole formed. The screw portion 32A of the bolt 32 is inserted into the bolt hole 44 of the body portion 38.
Is provided, and a washer 48 having a hole through which the shaft portion 32B does not pass is movably provided. And washer 48
, The stepped portion 32E is brought into contact with the flange of the wire reel. Other structures are the same as those of the first embodiment.

Thus, according to the second embodiment, the wire reel 36 mounted on the turntable 20 can be turned upside down, so that there is no need to limit the winding direction of the wire 10. That is, in the case of the winding method shown in FIG. 4B, the winding direction is changed to the winding direction shown in FIG. Can be.

Next, a third embodiment of the wire reel mounting structure for a wire saw according to the present invention will be described with reference to FIG.
In the third embodiment, the shape of the concave portion 42A formed in the lower flange 42 of the wire reel 36 is tapered so that the hole diameter becomes smaller toward the back, and is formed on the flange 30 of the turntable 20. The protrusion 30A is
The taper 50 was provided so that it became thinner toward the tip. Other structures are the same as in the first embodiment. Thus, similarly to the first embodiment, there is an effect that the bolt 32 can be tightened and fixed so that the tightening force of the bolt 32 is applied only between the flange 30 of the turntable 20 and the lower flange 42 of the wire reel 36. Since the fitting portion (the convex portion 30A and the concave portion 42A) has a taper 50,
Be modified as wire reel 36 is shown in FIG. 9,
The concave portion 42A does not bite into the convex portion 30A. Therefore, the work of removing the wire reel 36 can be performed more easily and quickly than in the first embodiment.

It goes without saying that the third embodiment can be applied to the second embodiment. Next, a fourth embodiment of a wire reel mounting structure for a wire saw according to the present invention will be described with reference to FIG. In the fourth embodiment, in addition to forming the fitting portion (the convex portion 30A and the concave portion 42A) into a taper 50, bolt holes 52, 52 are formed at opposing positions near the outer peripheral side of the flange 30 of the turntable 20, and
The bolt hole 5 in the lower flange 42 of the wire reel 36
Screw holes 54, 54 were formed at positions corresponding to 2, 52, respectively. That is, as shown in the first to third embodiments, the bolt hole 44 and the screw hole 30B are not formed along the center line of the wire reel 36 and the turntable 20, but the bolt is located at a position away from the center line. The holes 50 and the screw holes 52 are formed so that the tightening force of the bolts 56 is applied between the lower flange 42 of the wire reel 36 and the flange 30 of the turntable 20. As a result, even if the wire reel 36 is deformed as shown in FIG. 9 , the bolt 56 does not expand due to the deformation, so that no axial tensile force acts on the bolt 56. Therefore, when removing the wire reel 36 from the turntable 20, the bolt 56 can be easily rotated and loosened. In addition, since the bolt 56 serves as the detent pin 34, the detent pin 34 can be omitted. Accordingly, it is not necessary to position the detent pin 34 and the pin hole 43. Therefore, the time for attaching and detaching the wire reel 36 to and from the turntable 20 can be greatly reduced. Further, since the length of the bolt 56 is shortened, it is not necessary to take up a space necessary for inserting and removing the bolt 56 from the wire saw, so that the wire saw body can be made compact.

FIG. 7 shows a first embodiment in which a V guide 60 is erected along the turntable 20 to facilitate positioning when the wire reel 36 is mounted on the turntable 20. To the fourth embodiment. Further, the concave portion is provided on the flange on the wire reel side, and the convex portion is provided on the flange on the turntable side.

[0025]

As described above, according to the first aspect of the present invention,
According to the wire reel mounting structure of the wire saw, the bolt is tightened and fixed so that the bolting force is applied only between the flange of the turntable and the flange of the wire reel on the turntable side. This allows
When the wire is wound around the wire reel, even if a longitudinal extension force acts on the wire reel, no axial pulling force acts on the bolt, so when removing the wire reel from the turntable, the bolt can be easily removed. Can be loosened by turning.

According to the wire saw wire reel mounting structure of the present invention, the bolt tightening force is applied only between the turntable flange and the turntable side flange of the wire reel. And the fitting portion between the wire reel and the turntable was tapered. As a result, even when the wire is wound around the wire reel, even if a longitudinal elongation is applied to the wire reel, no axial tensile force acts on the bolt. Can be easily turned and loosened, and the fitting portion can be easily removed even if the flange of the wire reel is deformed.

Further, according to the wire reel mounting structure of the wire saw of the third aspect of the present invention, the position of the bolt for tightening and fixing the wire reel and the flange of the turntable is set from the center line of the wire reel and the turntable. Added multiple settings at shifted positions. As a result, even if the wire reel is deformed by the winding of the wire, there is no elongation of the bolt due to the deformation, and no axial tensile force acts on the bolt. Therefore, the wire reel can be easily removed from the turntable. Also, bolts can be used in place of detent pins.

As described above, when the wire reel mounting structure for a wire saw according to the present invention is employed, the wire reel can be easily and quickly attached to and detached from the turntable, so that work efficiency can be improved. Further, since an abnormal tensile force is not applied to the bolt, the life of the bolt can be extended. In addition, when a plurality of bolt positions are set at positions shifted from the center line of the wire reel and the turntable, the bolts can be shortened, so that little space is required for inserting and removing the bolts, and the wire saw body is compact. Can be

[Brief description of the drawings]

FIG. 1 is an overall configuration diagram of a wire saw.

FIG. 2 is a sectional view illustrating a first embodiment of a wire reel mounting structure for a wire saw according to the present invention.

FIG. 3 is a sectional view for explaining a second embodiment of a wire reel mounting structure for a wire saw according to the present invention.

4A and 4B are explanatory diagrams illustrating a winding direction of a wire reel. FIG. 4A illustrates a correct winding direction.
(B) shows wrong winding direction

FIG. 5 is a sectional view illustrating a third embodiment of the wire reel mounting structure for a wire saw according to the present invention.

FIG. 6 is a sectional view for explaining a fourth embodiment of a wire reel mounting structure for a wire saw according to the present invention.

FIG. 7 is a top view showing a positioning V-block when the wire reel is mounted on the turntable.

FIG. 8 is a sectional view illustrating a conventional wire reel mounting structure of a wire saw.

FIG. 9 is an explanatory diagram showing deformation of a wire reel that occurs when a wire is wound around the wire reel.

[Description of Signs] 10, 114 ... wire 20 ... turntable 30 ... turntable flange 30A ... turntable projection 30B ... turntable screw hole 32, 52 ... bolt 32A, 54 ... bolt screw part 32B ... bolt Shaft portion 32E Bolt stepped portion 36, 112 Wire reel 38 Body portion on wire reel 40 Upper flange 42 Lower flange 44, 52 Bolt hole 48 Washer 50 Taper 110 Wire saw 122 Groove Attached roller 124: wire row 128, 130, 132 ... drive motor

──────────────────────────────────────────────────続 き Continued on the front page (58) Fields surveyed (Int. Cl. ⁷ , DB name) B24B 27/06 B28D 5/04 B65H 75/14

Claims (3)

(57) [Claims] An object is pressed against a wire running between one wire reel and the other wire reel, and a working liquid containing abrasive grains is supplied to the wire to divide the work into a large number of thin plates. A wire saw for cutting into a wafer having a shape, wherein a bolt is inserted into a bolt hole formed in a center line of the wire reel for rewinding or winding the wire, and the bolt is screwed into a turntable on a rotating power side. In the wire reel mounting structure of a wire saw for fixing the wire reel to the turntable, the bolt is formed in a stepped structure,
A wire reel mounting structure for a wire saw, wherein a flange on the turntable side of the wire reel is fastened to a turbine rotor side by a stepped portion of the bolt and a flange of the turntable. 2. A method in which a workpiece is pressed against a wire running between one wire reel and the other wire reel, and a processing liquid containing abrasive grains is supplied to the wire to divide the workpiece into a large number of thin plates. A wire saw that cuts into a wafer in a shape of a wire, wherein the fitting portion of the wire reel for rewinding or winding the wire is fitted to the fitting portion of the turntable on the rotating power side, Insert the bolt into the bolt hole formed in the center line,
In a wire reel mounting structure of a wire saw for fixing the wire reel to the turntable by screwing the bolt into a turntable, the bolt is formed in a stepped structure, and a flange of the wire reel on the turntable side is provided. The stepped portion of the bolt and the flange of the turntable are tightened and fixed to the turbine rotor side, and the respective fitting portions are tapered to be tapered. Wire reel mounting structure. 3. A workpiece running against one of a wire reel and another wire reel is pressed against the workpiece, and a working fluid containing abrasive grains is supplied to the wire to remove the workpiece from a plurality of thin plates. A wire saw for cutting into a wafer in a shape of a wire, wherein the wire reel for rewinding or winding the wire is fixed to a turntable on a rotating power side with a bolt by a wire reel mounting structure of the wire saw. The flange on the turntable side of the reel and the flange of the turntable are fastened and fixed with bolts, and a plurality of bolt positions for fixing the flanges are provided at positions shifted from the center line of the wire reel. Wire reel mounting structure of the wire saw.