JP3086016B2 - Step measuring apparatus and method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a step measuring apparatus and a step measuring method for judging the size of a step at a connecting portion where design is important, such as a connecting portion of a weather strip of an automobile.

[0002]

2. Description of the Related Art Conventionally, as a step measuring method of this kind, the dimensions of both sides sandwiching a step are manually measured with calipers or the like, and the size of the step is calculated based on the measurement result.

[0003]

When the dimensions on both sides sandwiching the step are measured with calipers or the like, and the size of the step is calculated based on the measurement result, manual measurement is performed for a large step. It is easy, but when the step is small, even if you try to measure both sides manually, you can not determine the position of the step unless you check the reflection state by illuminating the light, and as a result it is difficult to identify both sides of the step, work efficiency Was not good.

Accordingly, an object of the present invention is to provide a step measuring apparatus and a method for measuring a step without artificially measuring both sides of the step.

[0005]

According to a first aspect of the present invention, there is provided a level difference measuring apparatus which sets a position at which light is irradiated to an object to be measured at predetermined intervals, and applies light to the object in a length direction in which the step of the object continues. Is continuously irradiated in a direction intersecting with, and the bright spot position is detected. At each position, the bright spot position of the device under test is detected, the data is stored in a memory for each position, the step center point is calculated from the data at each position, and the longitudinal direction of the device under test is calculated from the step center point. The specified extraction points on both sides are designated, and the positions of the predetermined extraction points on both sides from the detected step center point are measured vertically from a specific extraction point position from the data in the memory stored as two-dimensional coordinates to perform another extraction. The distance to the position connecting the points is calculated.

According to a second aspect of the present invention, there is provided a method for measuring a level difference,
By irradiating light in a direction intersecting the length direction in which the step of the measured object continues, the bright spot position of the measured object is continuously detected, and the continuously detected bright spot of the measured object is detected. A half position of the sum of the high position and the low position is defined as the step center position, and both sides separated by a predetermined distance from the step center position in a direction intersecting the length direction in which the step of the DUT continues. Is set as an extraction point, the extraction point is approximated as a continuous position, and the distance between one extraction point and the other extraction point is measured perpendicularly to the tangent line on the extraction point side. Quantity.

[0007]

According to the first aspect of the present invention, light is radiated toward the measured object at predetermined intervals set by the position setting means, and the irradiation position is detected by the reading detection means. The detected data is stored in the memory for each position by the position detecting means. The step center point is calculated by the extraction point calculation unit from the data for each position obtained by the position detection unit, and the predetermined extraction points on both sides in the length direction of the measured object are designated from the step center point,
Then, the positions of predetermined extraction points on both sides from the step center point detected by the extraction point calculation means by the step position coordinate means are stored in the memory as two-dimensional coordinates. The distance from a specific extraction point or a position connecting the extraction points of the step position coordinate means stored as the two-dimensional coordinates to a position connecting the other extraction points vertically by the step calculation means is calculated, and this is calculated as a step amount. Is what you do.

According to the second aspect of the present invention, light is radiated in a direction intersecting the length direction in which the step of the measured object continues, and a bright spot position formed by the irradiated light on the measured object is provided. Are continuously detected, and a half of the sum of the high and low positions of the continuously detected bright spot positions of the measured object is obtained.
The position of the step as the center position of the step, the position of the both sides separated by a predetermined distance without influence of the step in the direction intersecting the length direction of the step of the DUT from the step center position continues, and the extraction point Approximate as a continuous position, measure the distance between one extraction point side and the other extraction point perpendicular to the tangent to the extraction point side, and use that as the step amount of the extraction point. .

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A description will now be given of a step measuring apparatus according to one embodiment of the present invention.

FIG. 1 is a block diagram showing the overall schematic configuration of a step measuring device according to one embodiment of the present invention. FIG. 2 is a schematic explanatory view for explaining the basic principle of the reading detecting means 10 of the step measuring device according to one embodiment of the present invention.

In FIG. 1 and FIG. 2, the reading detecting means 10 of the present embodiment emits a two-dimensional slit light in a direction substantially perpendicular to the direction of the step 12 of the measured object 11 by scanning by the light source 14, ie, Irradiation is performed in a crossing direction, and a light spot generated on the DUT 11 by the irradiation is optically detected by the two-dimensional light receiving element 13 as two-dimensional data.

As the light source 14 of the present embodiment, a semiconductor laser is used.
Scanning is repeatedly performed in the Y-axis direction in FIG.
Two-dimensional slit light is formed. 2 above
The two-dimensional slit light forms a continuous bright spot on the surface of the device under test 11, the lens 15 draws it on the two-dimensional light receiving element 13, and detects the position of the bright spot as the two-dimensional coordinate Ya, Za position. ing.

The laser source control circuit 20 excites the above-mentioned semiconductor laser, scans it repeatedly in the Y-axis direction,
As a result, drive control is performed so as to form two-dimensional slit light.

The pulse motor control circuit 60 controls the X-axis pulse motor 6 for moving the table 64 in the X-axis direction.
1. A Y-axis pulse motor 62 for moving the table 64 in the Y-axis direction, and a Z for moving the reading detection means 10 in the Z-axis direction.
Acting as a controller and a driver of the axis pulse motor 63, the position to be irradiated with the slit light by the output of the control circuit 30 is set to the DUT 11 placed on the table 64.
Is moved in the X-axis and Y-axis directions to determine the planar position. Further, by moving the reading detection means 10 in the Z-axis direction, the position between the object 11 and the reading detection means 10 is kept at an appropriate interval.

When a step having a large cross-sectional area is measured by using visible light or monochromatic light without using a laser as the light source 14, the reading detection means 10 needs to be provided with a Z in order to reduce the bright spot to a small area. It is necessary to provide an auto-focus function that displaces in the axial direction.

The control circuit 30 comprises a microcomputer, and generates a signal for controlling the generation of the semiconductor laser and the repetitive scanning in the Y-axis direction of the laser source control circuit 20. Further, the two-dimensional light receiving element 13 is synchronized with the scanning position.
The upper bright spot position is read, and the read data is stored in the RAM 40 of a readable / writable memory. Then, the control circuit 30 determines the step position from the data obtained by reading the bright spot position stored in the RAM 40, and calculates the intermediate position of the position where the maximum or minimum predetermined amount of uniform value is obtained by the average or least square method. Then, the step center point G (see FIG. 7B) is calculated. By specifying distances on both sides from the step center point G, the positions of the specified extraction points LR and LL (see FIG. 7B) are stored in the RAM 40.
Is read from the data stored in the RAM 50, and the data is read from the RAM 50.
To be stored. The extraction points LR, L stored in the RAM 50
Calculate the level difference from the position of L and transfer the data to the printer 7.
Output with 0. Each operation of the control circuit 30 is displayed on the display means 80.

The step measuring apparatus according to the present embodiment thus configured operates as follows.

FIGS. 3 to 5 are flowcharts of a main program for controlling the level difference measuring device of the present embodiment.

FIG. 6 is an explanatory view showing a scanning state of the step measuring device according to one embodiment of the present invention. FIG. 7 is a diagram showing a step amount according to a main program for controlling the step measuring device according to one embodiment of the present invention. It is an explanatory view of a process of performing an operation. This program is started simultaneously with turning on the power switch.

First, the length direction of the step 12 of the DUT 11 is fixed so that the length direction of the step 12 substantially coincides with the X-axis direction of the table 64.
When the DUT 11 is a weather strip, the length direction of the weather strip is defined as the Y-axis direction.

In step S1, initialization is performed. In step S2, the output of the semiconductor laser of the light source 14 is set. In step S3, measurement and start of two-dimensional slit light (movement of a luminescent spot is one-dimensional) are performed by scanning. Set the end position. The measurement start and measurement end positions of the slit light are set to distances L on both sides from the step center point G (see FIG. 7B) so that the width of the step 12 can be set within the width.
Is set to the width including. In step S4, the amount of step movement of the scan interval for performing repetitive scanning is set, and in step S5, the positions of the extraction points LR and LL separated from the step center point G of the boundary point are set. These setting conditions are displayed on the display means 80 such as a CRT in step S6.
In step S7, the operation of a start switch (not shown) is determined, and if it is determined that the start switch is not operated, the routine from step S2 to step S7 is repeatedly executed, and a predetermined condition setting is awaited.

When it is determined in step S7 that a start switch (not shown) has been operated, the X coordinate position is driven in step S10 by driving the X-axis pulse motor 61 to perform a step movement position Xi (i = 1 to n) for performing repetitive scanning. Integer), that is, X1, X2,.
In step S11, scanning between the measurement start and measurement end positions set in step S3 is started in the Y-axis direction. In step S12, scanning, that is, a continuous luminescent spot on the surface of the DUT 11 generated by the two-dimensional slit light is performed. Then, the Y-axis coordinate (Ya) and the Z-axis coordinate (Za) corresponding to the scan position are read by the lens 15 formed on the two-dimensional light receiving element 13. FIG. 7A shows an example in which the step movement positions are X1, X2,... X5. Step moving position X in step S13
Steps S11 to S13 until it is determined that the scan corresponding to i (X1, X2,... Xn) has been completed.
Is repeatedly executed. When data corresponding to the step movement position Xi is obtained by executing the routine from step S11 to step S13, the data is transferred to the step movement position Xi corresponding to the scan position in step S14.
The Y-axis coordinate (Ya) data or the Z-axis coordinate (Za) data is stored in the RAM 40 specified by the address and the step center point G corresponding to each step movement position Xi is calculated in step S15 based on the data. As shown in FIG. 7B, the calculation of the step center point G is performed by dividing the half of the sum of the points where the maximum or minimum predetermined amount of the uniform value is obtained on the Z axis by the step center point G. The point is on the Z axis. That is, the Z-axis coordinate Z3 of the step center point G in FIG. 7B is Z3 = (Z1 + Z2) /
It becomes 2. In step S16, the Y-axis coordinate data (Ya) and the Z-axis coordinate data (Za) stored in the RAM 40 addressed by the step movement position Xi are displayed, and in step S17, the next step movement position Xi + 1 to be scanned is set. The routine from step S10 to step S18 is repeatedly executed until it is determined that all the scanning steps are completed in step S18.

If it is determined in step S18 that all the scanning steps have been completed, the positions of the left and right extraction points LR and LL are calculated from the step center point G in step S20, and the left and right extraction points are calculated from the calculated step center point G. As shown in FIG. 7C, the Y-axis coordinate (Ya) data and the Z-axis coordinate (Za) data of the positions of the points LR and LL are read from the RAM 40 in step S21 for each of the step movement positions X1, X2,. And writes the coordinate positions into the RAM 50.

In step S22, the positions of the left and right extraction points LR and LL are connected by straight lines from the step center point G, and the state is displayed in step S23. In step S24, the step amount is calculated based on the small value of the Z-axis coordinate. In this operation of this embodiment, the other extraction points LR and LL are drawn perpendicularly to the tangent of the Z-axis coordinate with reference to the small value of the Z-axis coordinate for each of the step movement positions X1, X2,. The distance of the intersection with the trajectory is measured, and the measured value is used as the step amount (see FIG. 7D). Step S
When the calculation of the step amount for each of the step movement positions X1, X2,... Xn is completed at 24, the minimum and maximum step amounts are selected at step S25, and the step movement positions X1, X2,. The step amount, the minimum step amount, and the maximum step amount for each Xn are printed out by the printer 70 until the end switch (not shown) is turned on in step S27.
The routine from step S22 to step S27 is repeatedly executed.

In this type of embodiment, since the position where the step 12 is set is not strictly specified, the present invention is not limited to the measurement of the step 12 but outputs the maximum and minimum of the step amount. It can also be used for quality control of what is manufactured on-line or in-line in the process of producing the device under test 11.

As described above, the step measuring apparatus according to the embodiment of the present invention emits laser light while scanning in the Y-axis direction, which is a direction intersecting the length direction in which the step 12 of the DUT 11 continues. A scanning detection unit 10 for detecting a bright spot position of the DUT 11, and a laser scanning interval in a length direction where the step 12 of the DUT 11 continues using the reading detection unit 10, that is, Step moving position X1, X2, ...
A position setting means comprising a step S4 for setting Xn, and detecting the bright spot position of the DUT 11 at each of the step moving positions X1, X2,... Xn, and converting the data into the step moving positions X1, X2. ,..., Xn stored in the RAM 40 for each of the step S10 to step S14, and the step center point from the data for each of the step movement positions X1, X2,. G
Calculating predetermined extraction points LR and LL on both sides in the longitudinal direction of the DUT 11 from the step center point G (step S).
15 and predetermined extraction points LR and LL on both sides from the step center point G detected by the extraction point calculation means.
Step position coordinate means comprising a routine of steps S20 and S21 for storing the position of the step as two-dimensional coordinates in the RAM 50, and a specific extraction point L of the step position coordinate means.
A step calculating means comprising a step S24 for calculating a distance from a position connecting R and LL to a position connecting the other extraction points by measuring vertically, that is, calculating a step amount.
This can be an embodiment of the first aspect of the present invention.

Further, the step difference measuring method according to the embodiment of the present invention is as follows.
By irradiating a laser in a direction intersecting the length direction where the step 12 of the DUT 11 continues, the bright spot position of the DUT 11 is continuously detected. The sum of the high position Z1 and the low position Z2 of the detected bright spot position is 2
The half position Z3 is set as the step center point G, and the positions on both sides separated by a predetermined distance L from the position of the step center point G in the direction intersecting the length direction in which the step 12 of the DUT 11 continues are extracted. The points LR and LL are set as points, and the extraction points LR and LL are approximated as continuous positions. The distance between one extraction point LR and the other LL perpendicular to the tangent line on the side of the extraction point LR is measured. Then, it is used as the step amount. This can be an embodiment of the second aspect of the present invention.

Therefore, according to the embodiment of the present invention, if the length direction of the step 12 of the object to be measured 11 is substantially coincident with the X-axis direction of the table 64 and fixed, the step moving position X
By setting the step intervals of 1, X2,... Xn, the detection density of the step 12 of the DUT 11 is determined. Since the predetermined extraction points LR and LL on both sides are determined,
Even if the position of the step center point G is slightly shifted, the position of the step 12 is determined by the apparatus itself, so that the work efficiency of the step detection is improved.

Further, the slit light is step-moved in the X-axis direction and projected onto the step 12 extending in the X-axis direction of the DUT 11 which changes two-dimensionally in the Y-axis and Z-axis planes. The distance between one of the two extracted point sequences based on the Z-axis coordinates of the obtained step 12 and the other extracted point sequence in the normal direction is defined as the step amount. Therefore, no matter how the step 12 of the DUT 11 changes in a two-dimensional plane, the relative position between the reading detection unit 10 and the DUT 11 with respect to the slit light projected from the Z-axis direction is changed. If it is moved only in the direction following the step 12 perpendicular to the projection direction, the true step amount can be accurately measured.

In this embodiment, when the object to be measured 11 is concentrically changing, if the scan is made to coincide with the center axis direction, the step movement positions X1, X2,.
By setting the step interval of n, it is possible to set the minimum unit of steps. Further, even if the object 11 is rotated around the center thereof, the step movement positions X1, X2,.
n can be obtained.

By the way, the reading detecting means 10 of the above embodiment is used.
Is to irradiate a laser while scanning in a Y-axis direction which is a direction intersecting a length direction in which the step 12 of the DUT 11 continues, thereby detecting a bright spot position of the DUT 11. However, when practicing the present invention, the laser may be monochromatic light such as visible light or infrared light. Further, a gas laser or the like may be used other than the semiconductor laser. Alternatively, a laser scan is performed by expanding a laser beam optically in a plane, projecting the laser beam on a step 12 of an object 11 to be measured, and reflecting the reflected light by one per scan of the reading / detecting means 10.
It may be two-dimensional coordinates of a point.

The position setting means of the above embodiment uses the reading detection means 10 to move the laser stepping positions X1, X2,.
Xn is set. However, when the present invention is implemented, the step movement position may be set to one as long as the step 12 can be specified. Also, the reading detecting means 10
If the object moves continuously, it can be detected at a plurality of positions where the object moves continuously.

The extraction point calculation means of the above embodiment is
A step center point G is calculated from the data for each of the step moving positions X1, X2,... Xn, and predetermined extraction points LR and LL on both sides in the length direction of the DUT 11 are designated from the step center point G. However, when the present invention is implemented, the predetermined extraction points LR and LL on both sides can be set to a uniform distance or a non-uniform distance.

Further, the step position coordinate means in the above embodiment is
The positions of the predetermined extraction points LR and LL on both sides from the step center point G detected by the extraction point calculating means are set as two-dimensional coordinates in the RAM.
Although the data is stored in the memory 50, the memory for implementing the present invention can be the same memory as the RAM 40 of the step position detecting means. When the same memory is used as described above, it can be handled by setting a memory area.

Further, the step calculating means of the above embodiment is
The method is to measure vertically from a position connecting the specific extraction points LR and LL of the step position coordinate means to a position connecting the other extraction points, but when implementing the present invention, , Either extraction point LR or extraction point LL may be used as a reference, or an adjacent extraction point LR or extraction point L
It can be anywhere between L. However, in the case of using either the extraction point LR or the extraction point LL as a reference, the error can be reduced because the measured value is the reference.

[0036]

As described above, in the step measuring device according to the first aspect of the present invention, light is irradiated across the length direction where the step of the measured object continues, and the bright spot position generated on the measured object is determined. A position setting unit for setting a position at which reading is to be performed by the reading detection unit; and a position detection unit for storing data obtained by the reading detection unit in a memory. The step center point is calculated from the data for each position, and the predetermined extraction points on both sides in the length direction of the device to be measured are designated from the step center point, and the positions of the predetermined extraction points on both sides are designated as step position coordinates. Means are stored as two-dimensional coordinates, and a step is obtained by measuring vertically from a position connecting specific extraction points and calculating a distance to a position connecting other extraction points.

Therefore, if the length direction of the step of the object to be measured is fixed so as to substantially coincide with the direction of the step movement, the step center point is calculated, and the predetermined extraction points on both sides in the length direction of the object to be measured are calculated. Therefore, even if the position of the object to be measured is fixed, that is, the position of the step center point is slightly shifted, the position of the step can be determined by the apparatus itself, and the work efficiency of the step detection is improved. In addition, the detection of the step can be automated. Further, since the position at which reading is performed by the reading detecting means can be set by the position setting means, the reading accuracy of the step can be improved by setting the reading position interval.

In the step measuring method according to the second aspect of the present invention, light is radiated in a direction intersecting a length direction in which the step of the measured object continues to continuously detect a bright spot position of the measured object. A half of the sum of the high position and the low position of the continuously detected bright spot positions of the DUT is set as the step center position, and the length of the step of the DUT from the step center position continues. The positions on both sides separated by a predetermined distance in the direction intersecting with the vertical direction are set as extraction points, and the extraction points are approximated as continuous positions. Since the distance between the extraction points is measured and used as a step, if the length direction of the step of the DUT is fixed almost in the moving direction, the position at which the DUT is fixed will be slightly Even if the position is shifted, the position of the step can be determined by the device itself, and the step The working efficiency is improved, also, can automate the detection of step.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing an overall schematic configuration of a step measurement device according to an embodiment of the present invention.

FIG. 2 is a schematic explanatory view for explaining a basic principle of a reading detecting means of the step measuring device according to one embodiment of the present invention.

FIG. 3 is a flowchart of a part of a main program for controlling the level difference measuring device according to one embodiment of the present invention.

FIG. 4 is a flowchart of another part of a main program for controlling the level difference measuring device according to one embodiment of the present invention.

FIG. 5 is a flowchart of the rest of the main program for controlling the level difference measuring device according to one embodiment of the present invention.

FIG. 6 is an explanatory diagram showing a scan state of the step measurement device according to one embodiment of the present invention.

FIG. 7 is an explanatory diagram of a process of calculating a step in the step measuring device according to one embodiment of the present invention.

[Explanation of symbols]

 REFERENCE SIGNS LIST 10 reading detection means 11 DUT 12 step 30 control circuit 40,50 RAM G step center LR, LL extraction point

Continuation of the front page (72) Inventor Kazunori Higuchi 41-1, Chukumi Yokomichi, Nagakute-cho, Aichi-gun, Aichi Prefecture Inside Toyota Central Research Laboratory Co., Ltd. (58) Field surveyed (Int. Cl. ⁷ , DB name) G01B 11 / 00-11/30

Claims (2)

(57) [Claims] (1) A long-sized automobile for which design is important.
The length direction where the step of the connection part of the object is continued is irradiated with light in the length direction of the object which intersects with the length direction of the step to detect the bright spot position of the object. A predetermined position for relatively moving the read detection means and the object to be measured in a length direction in which the step of the object is continued, and detecting a bright spot position of the object to be measured. Position setting means for setting, a position detection means for storing data obtained by the reading detection means for each position in a memory, and a step center point is calculated from the data for each position obtained by the reading detection means, Extraction point calculating means for designating predetermined extraction points on both sides in the longitudinal direction of the measured object from the step center point, and setting the position of the predetermined extraction point designated by the extraction point calculation means to 2
Step position coordinate means for storing as dimensional coordinates, and step calculating means for calculating a distance from a position connecting the specific extraction points of the step position coordinate means to a position connecting the other extraction points by measuring vertically. A level difference measuring device, comprising: 2. A long-sized automobile for which design is important.
By irradiating the light in the length direction of the DUT intersecting the length direction of the step with respect to the length direction in which the step of the connection portion of the DUT continues, the bright spot position of the DUT is continuously set. The position of half of the sum of the high position and the low position of the continuously detected bright spot position of the DUT is set as the step center position, and the position of the DUT is determined from the step center position . The positions on both sides separated by a predetermined distance in the length direction are set as extraction points, the extraction points are approximated as continuous positions, and the other extraction points are perpendicular to one extraction point side and tangent to the extraction point side. A step measuring method, comprising measuring a distance between the two, and using the measured distance as a step amount.