JP3103124B2 - Electric joining method of ceramics - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for electrically joining ceramics, particularly when joining large-sized and complicated-shaped ceramics, to raise the temperature to a desired joining temperature while satisfactorily energizing and heating the butt portion. is there.

[0002]

2. Description of the Related Art Conventionally, a general method of electrically joining ceramics is roughly divided into the following methods (1) to (1).
The method is divided into (4) .

(1) Ceramic having conductivity at high temperatures
When joining the components, preheat the
After making the mix or bonding agent conductive, the ceramics
Alternatively, heat is generated by energizing the bonding agent,
How to heat and join. In this case, the joining portion is formed by interposing a bonding agent between the joining surfaces of the two ceramics, and the joining portion is preheated by an auxiliary heating means such as a gas burner or a preheating heating means. Then, after the ceramics or the bonding agent becomes conductive, a voltage is applied between at least a pair of conducting electrodes provided corresponding to the butted portions, and a high-temperature conductive member having a conductive property is passed through these electrodes. By energizing the lamix or the bonding agent , Joule heat is generated to heat the butted portion, and the bonding is performed by reacting the bonding agent with the ceramic to be bonded.

[0004] (2) Two ceramic each other having conductivity at least one of the ceramics at room temperature
When joined, the butt of both, by energizing the conductive ceramic along the abutment surface and parallel <br/> direction, a method of bonding by heating the abutting surfaces. Two to join
At least one of the ceramic if the electrically conductive at room temperature, is interposed bonding agent between the two ceramics constituting the butt portion. At least a pair of current-carrying electrodes or a strip-shaped current-carrying electrode is brought into contact with a portion constituting a butt portion of the ceramic having conductivity, and the current- carrying member is energized by the ceramic having conductivity as at least a pair of current-carrying electrodes. Then, the vicinity of the butted portion of the ceramics having conductivity is heated by Joule heat, whereby the bonding agent is reacted to perform bonding.

[0005] (3) a heating insert material having conductivity at room temperature is interposed between the two object to be bonded, both the contact
Heating in the direction parallel to the
A method of joining by generating heat by passing electricity through the support material . This method includes the following methods (A) and (B).
There is. (A) when bonding two ceramic each other with insulating or high-resistance was deposited bonding agent to both sides
The heating insert made of conductive ceramics is
A butting portion is formed between two butting surfaces of ceramics to be joined . At least a pair of current-carrying electrodes or strip-shaped current-carrying electrodes are brought into contact with both end surfaces of the heating insert material, and a current is applied to the heating insert material along a direction parallel to the abutting surface to generate a die generated from the insert material. The joining is performed by causing the joining agent to react with the heat of the cement.

(B) At least one has high conductivity
When joining two ceramics or using metal
Conductive ceramic when joining
Insulating ceramic is applied to the conductive ceramics
Heating insert material with a laminated structure
Insert between the butted surfaces of the joined body, and
The butting portion is formed by interposing a bonding agent between the joining and the joining.
Heating the insert member is to be joined side having high conductivity
It is arranged with the insulating ceramics positioned . At least a pair of current-carrying electrodes or strip-shaped current-carrying electrodes are brought into contact with both end surfaces of the conductive ceramic of the heating insert material, and electricity is supplied to the heating insert material along a direction parallel to the abutting surface to be generated from the insert material. Bonding is performed by causing the bonding agent to react with Joule heat.

(4) Ceramic having conductivity at room temperature
Sera that have conductivity at room temperature or at room temperature
Using the mix and metal as objects to be joined,
When joining, in the direction perpendicular to the butting surface of both
Energized along the joints to add
How to join by heating. This method includes the following (A) and
And (B). (A) A butting portion is formed by interposing a bonding agent between two members to be bonded . A current-carrying electrode is brought into contact with each of the two objects, and power is supplied from one object to the other object.
The bonding agent reacts with the Joule heat generated
To join .

[0008] (B) two heating insert material resistivity than object to be bonded is made of high conductive ceramic between object to be bonded is arranged, the insert material and the two object to be bonded
The butting portion is formed with a bonding agent interposed therebetween . An electric current is generated by applying a current- carrying electrode to each of two objects to be joined and applying an electric current from one object to the other object.
The bonding agent is reacted by the generated Joule heat to perform bonding.

[0009]

[SUMMARY OF THE INVENTION] object to be bonded is a small
If, also in the simple case the shape of the object to be bonded is Oite are also sufficiently heated even butted portion number less energized electrodes by fixing the powered electrode. However, the object
Large, long joint length (or butt length)
If the shape of the butted part is complicated, the current-carrying electrode is fixed
Or the number of current-carrying electrodes is small
Then, the butted portion cannot be sufficiently heated. That
Because, (b) a method of joining while resulting relative movement by suitable moving means between the powered electrode and the object to be conducting member, (b)
A method has been proposed in which a plurality of pairs of electrodes or strip-shaped electrodes are provided along the abutting portion, and all the electrodes are energized and heated at the same time (JP-A-1-176282).

[0010] However, in the case of the method (a) ,
To heat the butt better, a fairly fast switch
Moving means to move electrodes or ceramics by speed
Not only increases the cost of the equipment, but also
And the space for installing the equipment can be avoided.
Absent. Also, if moving parts are provided, maintenance
It is necessary to increase the number of times, and on the safety
There is also a problem. Further, in order to heat the butted portion to a necessary temperature when the resistance of the member to be energized is small, it is necessary to supply a large current from the electrode to the member to be energized. No. However, when the electrodes or ceramics are moved, the contact state between them becomes worse and the contact resistance increases,
Since discharge is likely to occur at the electrode contact points, there is a risk that the ceramics to be joined may be damaged or deteriorated by thermal shock at the time of discharge.

In addition, in the case of the method (b), since power is supplied to the entire butting portion at the same time, there is a problem that the required power supply capacity is increased and the cost is increased .
Also, when ceramics with irregular cross-section and ceramics with asymmetric shape are joined together ,
Since the resistance value and heat capacity are different,
When power is supplied, uniform power can be applied to the entire joint surface.
Can not. As a result, local overheating occurs,
The shape of ceramics that can cause
There was a problem that dimensions were limited. Object of the present invention
Is a conventional ceramic caused by the existence of moving parts
Problem with the welding method and the entire joint
Performance, cost, and safety
To solve the problems on the surface and obtain good joining results.
To provide a method for joining ceramics
You.

[0012]

According to the present invention, there is provided a heating insert material having a bonding agent interposed between abutting surfaces of two members to be bonded, at least one of which is made of ceramics , or a conductive ceramics base material. A butt portion is formed with a bonding agent interposed therebetween, and the object to be bonded, the bonding agent, and the heating
Of the insert material to generate Joule heat
Three or more current-carrying electrodes on the surface of the
Contact with a gap, and pass through the current-carrying member through the current-carrying electrode.
Joule generated from the energized member by charging
Joining two workpieces by heating and reacting the joining agent with heat
The method is intended for electrical bonding of ceramics. The present invention
In the above, when energizing the energized member, the above three or more
Between at least one pair of conducting electrodes selected from the conducting electrodes of
Energize so that at least between a pair of energized electrodes
To move the energized area that occurs when
Prepare multiple types of electrode switching patterns,
Out of multiple types of electrode switching patterns
Select the appropriate electrode switching pattern and
In this case, the electrode switching pattern for energizing with a short energizing distance
And then gradually increase the energizing distance
Select the switching pattern and set the energized area along the
The two joined objects are joined while moving .

In this specification, two "butting surfaces" are used.
Of the parts to be joined to each other. The three or more current-carrying electrodes may be arranged at equal intervals, or may be arranged by changing the distance between the electrodes according to the shape of the butted portion or the difference in the heat capacity of the heated portion.

As the heating insert, a material having a conductive ceramic base material is used.
Layered composite ceramics in which insulating ceramics are provided on one or both sides of conductive ceramics, such as a heating insert material disclosed in JP-A-320273 and JP-A-1-320276, can also be used.

The conductive ceramics include oxides such as lanthanum chromite, TiN, Zr
Nitrides such as N, carbides such as SiC and TiC, M
Examples thereof include silicides such as oSi2, boride-based ceramics such as TiB2 and ZrB2, and composite ceramics of an insulating ceramic such as Al2 O3 and Si3 N4 and a conductive ceramic or metal such as TiN and ZrN.

There are various combinations of two objects to be joined,
For example, when two bonded objects are made of insulating ceramics, a combination of the two is made of ceramics that have no conductivity at room temperature but have conductivity at high temperatures, and at least one of the bonded objects is made of conductive ceramics. made case, and two other one is made of a ceramic of the object to be bonded in some cases, such as made of metal.

In addition, the mode of energizing the member to be energized may be any mode as long as it can generate Joule heat for heating the bonding agent . For example, selected from three or more energized electrodes
Parallel to the butt surface through at least one pair of conducting electrodes
Current may flow in any direction, and three or more conducting electrodes
Butt surface through at least one pair of conducting electrodes selected from
The current may flow in a direction perpendicular to the direction. Suffered
The electrode switching pattern for energizing the energizing member may be any pattern as long as the energizing region can be moved along the butting portion . In the present invention, the electrode disconnection
Prepare multiple types of replacement patterns to change
Appropriate from among multiple types of electrode switching patterns
Select the pole switching pattern. Here, the change in the condition of the butted portion refers to a change in the condition based on a rise in the temperature of the butted portion, a decrease in the resistance value of the energized region, a difference in the heat capacity of the energized portion, and the like.

Further, in the present invention, the initial period is short.
Select the electrode switching pattern that energizes at energizing distance,
Select an electrode switching pattern to increase the energizing distance later
However, stepwise here includes one step.

In the present invention, it is also possible to select an electrode switching pattern such that the current-carrying region before and the current-carrying region partially overlap.

Furthermore, Oite the present invention, the energizing current, is heated substantially uniformly the butted portion by changing at least one of power and current-supply holding time in accordance with the different abutment of the conditions by (a) energizing position The energization conditions , and (b) at least one of the energization current, power and energization holding time is changed over time according to a predetermined temperature control pattern to reduce the thermal shock of the object to be bonded and to promote the reaction of the bonding agent. The figure
At least one of the energization conditions
In addition, the current-carrying member may be energized .

In practicing the present invention, not only the energization of all three or more energized electrodes is controlled collectively, but also
When the length of the butted portion is very long or the shape of the butted portion is complicated , three or more current-carrying electrodes are connected to one group.
The large number of current-carrying electrodes into a plurality of electrode groups
When applying power to the member to be energized,
Current between at least one pair of electrodes selected from a group of electrodes
Between the selected at least one pair of conducting electrodes.
The energized area generated when energized is moved along the butt
Multiple electrode switching patterns for each electrode group
Therefore, a predetermined electrode switching pattern and
And energization is controlled according to specified energization conditions to
Joins two workpieces while moving along the butt
It may be. Also in this case, it is needless to say that the distance between the current-carrying electrodes may be changed according to the condition of the butting portion. When performing control by dividing into multiple electrode groups,
Each electrode group may be energized by one energization controller, or each electrode group may be energized by an independent energization controller. The mode of control of each electrode group is arbitrary.

[0022]

As described above, according to the present invention, the abutting member contacts the member to be energized.
At least one selected sequentially from three or more energized electrodes
Apply current between the pair of current-carrying electrodes so that at least
The energized area generated when energized between energized electrodes is
Prepare multiple types of electrode switching patterns to move along
In the initial period of power supply,
Select the pole switching pattern and then gradually increase the energizing distance
Select the electrode switching pattern so that the
Join while moving along the butt
I have. Therefore, there is no need to cause relative movement between the energized electrode and the joined body as in the related art, and since there are no movable parts, the number of maintenance operations can be reduced and the operation is safe. Further, since the current-carrying electrode and the current-carrying member can be brought into close contact with each other, no discharge occurs even if the current is increased, and the ceramic is not damaged or deteriorated. Further, when the energizing region is moved along the butt portion, the long butt portion can be heated to a predetermined temperature by using a small-capacity power source as compared with the conventional method of energizing the entire butt portion simultaneously. In the case of joining ceramics having an irregular cross section and ceramics having an asymmetrical shape, it is possible to heat each part almost uniformly by controlling the energizing condition according to the difference in resistance value and heat capacity between energized electrodes. Therefore, it is possible to prevent local overheating from occurring as in the conventional method of energizing the entire butted portion simultaneously. As a result, the present invention is particularly effective when joining large-diameter tubular ceramics by butt joining, and joining by joining the surfaces of long plate-shaped ceramics in the longitudinal direction,
It also works effectively when joining ceramics with irregular cross-sections and ceramics with asymmetrical shapes,
It is possible to join by increasing the temperature to a desired joining temperature while energizing and heating the entire butted portion in a good state,
Alternatively, bonding can be performed by raising the temperature to a desired bonding temperature in an appropriate heating pattern.

Further, according to the present invention, an appropriate electrode switching pattern is selected from a plurality of types of electrode switching patterns in accordance with a change in the condition of the butting portion, and energization is performed, so that energization can be controlled efficiently. In addition, even a workpiece having a complicated shape can be easily bonded . When the member to be energized is made of a material whose resistance value decreases as the temperature rises, the resistance of the energized region is high at the initial stage of energization because the temperature of the abutting portion is low, and a relatively large voltage is required. I do. When the temperature of the butted portion rises, the resistance value of the energized region decreases, and the energized region can be expanded with the same energized voltage. Therefore, as in the present invention , in the initial stage of energization, energization is performed with the shortest energization distance, and when the electrode switching pattern is selected so as to increase the energization distance stepwise, the long butting portion can be heated to a desired temperature with a small power supply capacity. Can be warmed.

Further, in the present invention, the electrode switching pattern is formed so that the former energized region and the latter energized region partially overlap.
When the selection is made, compared to the case where the energized regions are not overlapped, the energization can be performed with the resistance value of the energized region as low as possible, so that the temperature drop of the heating unit is suppressed and the voltage fluctuation is suppressed. This makes it possible to move the energized area smoothly with less noise.

Further, in the present invention, two energizing conditions are set.
(A) At least one of (b) and the electrode switching pattern
Better by conducting electricity in combination with
Bonding can be performed. It satisfies the energizing condition (a)
In this case, for example , as in the case where two joined bodies have different shapes, the rate of temperature rise or the rate of decrease in the resistance value of the energized region differs depending on the energized position of the butted portion, or the heat capacity differs depending on the energized position. In addition, the butted portion can be heated almost uniformly . It also satisfies the energizing condition (b)
In accordance with the predetermined temperature control pattern (heating rate, joining temperature holding time, cooling rate), if at least one of the energizing current, the power and the energizing holding time is changed over time, the thermal shock of the article to be joined is reduced. the reaction of relaxation or bonding agent or can promote. The temperature control pattern to be used may be determined by a preliminary experiment.

Further, in the present invention, three or more current-carrying electrodes are divided into a plurality of electrode groups along the butting portion, and the current-carrying is controlled according to a predetermined electrode switching pattern and a predetermined current-carrying condition for each electrode group . In this case, even when the length of the butted portion is very long or the shape of the butted portion is complicated, the butted portion can be efficiently heated to a desired temperature in a short time.

[0027] In the present invention, when adapted to control each electrode group at each independent power control device
The can and this <br/> performed relatively easily energization control of each electrode group.

[0028]

Embodiments of the present invention will be described below with reference to the drawings.

[0029]

Embodiment 1 FIGS. 1 to 13 show that at least one of the two objects to be bonded is made of conductive ceramics,
This embodiment shows an example in which a joint is formed by interposing a bonding agent between the butted surfaces of two objects to be joined, and a current is supplied in a direction parallel to the joint.

[0030]

Embodiment 1 FIGS. 1A and 1B are a schematic front view and a schematic plan view, respectively, of a joining apparatus for carrying out a method of the present invention. In this embodiment, a round pipe-shaped conductive ceramic 1a and a ceramic 1b having an insulating property at room temperature are butted together via a bonding agent 2 to form a butted portion, and the butted ends of the ceramics 1a and 1b and the bonding agent are formed. The current-carrying electrodes 4a to 4h are brought into contact with these members over the straddle 2. The conducting electrodes 4a to 4h are arranged only on the outer peripheral side along the butting portion. As the ceramic 1a having conductivity, a conductive Si3 N4 ceramic 1a having a resistivity of about 10 ^-2 [Ω · cm] containing a conductive substance such as TiN or TiC (outer diameter 60 × inner diameter 48 × length 100)
mm) was used. The ceramics 1b having insulating properties include insulating Si3 N having the same dimensions as the ceramics 1a.
4 Ceramics were used. As the bonding agent 2, a bonding agent 2 of a Ti-based active metal brazing material was used. The ceramics 1a and 1b were held by holding jigs 3a and 3b, and were fixed by applying an appropriate pressure P. The current-carrying electrodes 4a to 4h for supplying a heating current include ceramics 1a,
Eight tungsten current-carrying electrodes each having a joint end face having a shape capable of being fitted to the outer peripheral surface of 1b were used. When the current-carrying electrodes 4a to 4h are brought into contact with the outer peripheral side of the conductive ceramics 1a along the butting portion, a conductive carbon paste is applied to the joint surface and the current-carrying electrodes 4a to 4h are applied.
h is brought into close contact with the butt. The electrodes 4a to 4h
In a fixed state without being moved, they are arranged at substantially equal intervals in the circumferential direction. Although not shown, a heat insulating material is provided around the butted portion to prevent heat dissipation from the butted portion. As disclosed in JP-A-1-320273, a reflector may be provided on the heat insulating material.

Next, the configuration of the energization control device 5 will be described with reference to FIG. The current-carrying electrodes 4a to 4h are connected to an electrode switching unit 51.
The electrode switching unit 51 sequentially applies the output from the power supply unit 52 to the energized electrodes selected in accordance with the command. The output voltage, current, and power of the power supply unit 52 are detected by the output detection unit 53, and the measured values are input to the control unit 54. This control unit 54 includes:
The output of the temperature detector 6 for detecting the temperature of the butting portion is also input, and the control unit 54 gives instructions to the electrode switching unit 51 and the power supply unit 52 based on the input measurement values to control these devices. These power supply switching unit 51, power supply unit 52,
The output detection unit 53 and the control unit 54 constitute the power supply control device 5. Here, any of a DC power supply and an AC power supply may be used as the power supply unit 52, and in the case of AC, any frequency can be applied. As the temperature detector 6, a radiation thermometer, a thermocouple, or the like can be used.

In this embodiment, power control is performed in a bonding atmosphere of Ar gas based on a power control pattern (energization condition) as shown in FIG. This power control pattern determines a temperature control pattern. Then, mainly the conductive ceramics 1a and the bonding agent 2 are energized, and the energized electrodes are sequentially switched in accordance with the electrode switching pattern shown in FIG. In the first switching, the switching terminals 51a and 51c are operated to apply a voltage between the energized electrodes 4a and 4c. In the second to eighth switching thereafter, the terminals 51b-51d,..., 51h-51b are sequentially operated. , 4h-4b, the energization region is moved over the entire circumference of the butted portion. At the ninth switching, the electrodes are returned to the electrodes 4a to 4c again, and energization is repeatedly performed in the same electrode switching order as described above. At this time, the current holding time (hereinafter referred to as “holding time”) between each of the current-carrying electrodes is set to a constant 70 msec for 5 minutes after the start of the current application, and then the current holding time is set to a constant 30 msec for 20 minutes at the end of the current application. , The switching time for each electrode is switched so as to be substantially zero. In this electrode switching pattern, the temperature of the abutting portion is efficiently raised by changing the energizing time and the energizing power while keeping the energizing distance between the selected energizing electrodes constant. Since the power control pattern and the electrode switching pattern have been input to the control unit 54 of the power supply control device 5 in advance, automatic control is possible.

In this embodiment, the display unit 55 and the recording unit 5
The display unit 55 displays the voltage, current, and power detected by the output detection unit 53 and the measured temperature of the butting unit detected by the temperature detector 6. The recording unit 56 records the outputs of the output detection unit 53 and the temperature detector 6 over time. It is also possible to manually control the current or the power. In this case, the control is performed using an operation knob provided on the control unit 54 while observing the measured value displayed on the display unit 55.

When the temperature detector 6 detects that the butted portion has reached the joining temperature of about 920 ° C. due to the energization heating,
The control unit 54 then holds the heating state for about 5 minutes to cause the bonding agent and the ceramic to react, and then cools to room temperature according to the power control pattern to complete the bonding.

When the airtightness of the joined body manufactured by such a method was evaluated using a He leak detector, good airtightness below the detection limit was shown. Also,
When the structure was observed by cutting the bonded portion, it was found that a dense bonding layer was formed and good bonding was obtained. For comparison, two opposed current-carrying electrodes were brought into contact with a ceramic sample of the same shape, and the ceramic was rotated at a rotation speed of about 100 rpm to perform bonding. Arc discharge occurs in the
Cracks occurred in the ceramics, and a good joined body could not be obtained.

[0036]

[Embodiment 2] FIG. 3 (A) shows an electrode arrangement diagram in which the electrode arrangement of Embodiment 1 is expanded.
A state in which an electrode group consisting of 2, 43,..., 4 (N-2), 4 (N-1), and 4N is in contact with the outer peripheral side of the conductive ceramic 1a along the butt portion as in the first embodiment. Is shown.

In this embodiment, the four types of patterns shown in FIG. 3B are appropriately combined and used as the electrode switching patterns. In the pattern 1, current is supplied by setting the space between adjacent electrodes as a current supply region. That is, current is applied between the electrodes having the shortest energization distance, and the energization region is moved along the butting portion. Specifically, the current-carrying electrode 4 is switched at the first switching.
Energization is performed between 1-42, and at the second to n-th switching thereafter, 42-43, 43-44, ..., 4 (N-1) -4n,
The energization is performed by sequentially selecting the 4N-41 energizing electrodes. (N
After the +1) th time, the energization is repeated again in the same electrode switching order as described above. In the patterns 2 and 3, the energizing distance is twice as long as that of the pattern 1 because the energizing electrodes are sequentially selected so as to sandwich two other energizing electrodes therebetween. Specifically, 41-44 and 42-4 at the first to n-th switching.
5,43-46, ..., 4 (n-1) -42,4N-43
Are sequentially selected. In pattern 3, switching 1 to n
The first time 41-44, 43-46, 45-48, ..., 4
(N-3) -4N, 4 (n-1) -42 energizing electrodes are selected. In the pattern 2, the portion where the current-carrying region before and after the current-carrying region overlap with each other is larger than that in the pattern 3. In pattern 4, the current-carrying electrodes are sequentially selected at a current-carrying distance that is twice as long as the current-carrying distance of pattern 1 so that the preceding and current-carrying regions do not overlap. Specifically, switching 1 to n-th time is 4
1-44,44-47, ..., 4 (N-4) -4N, 4N
−43, and the (n + 1) th and subsequent times are repeated in the same electrode switching order as above.

These patterns are merely examples, and various patterns and combinations of patterns can be applied according to the shape or heat capacity of the butted portion. For example, there is a case where one arbitrary pattern is selected according to the value of the outer diameter or the inner thickness of the pipe, and energization is performed based on the same pattern from the start to the end of energization. Further, there are cases where two or more different patterns are used from the start to the end of energization. For example, in the case of a conductive ceramic having a negative temperature characteristic of resistance, pattern 1 is used at the beginning of energization. The starting voltage is reduced by setting the shortest energizing distance. And when the resistance value of the conductive ceramic decreases with the temperature rise,
By increasing the energizing distance and enlarging the heating area, a good heating state can be obtained even with a small equipment capacity. Therefore, pattern 2 is selected. After the temperature further rises, the overlapping area between the previous energizing region and the subsequent energizing region may be reduced, so that pattern 3 is selected, and then pattern 4 is selected. Depending on the characteristics of the ceramics and the length of the butted portion, energization may be performed using other combinations of patterns. For example, pattern 1 may be selected first, and after a desired energization time elapses, for example, pattern 2 may be selected, and energization may be performed based on the two patterns from the start to the end of energization.

In Examples 1 and 2, the shape of the ceramic may be a tube having a cross section other than a circle, or a column.

[0040]

Embodiment 3 FIGS. 4 (A) and 4 (B) are schematic cross-sectional views of an example of a bonding apparatus for performing the method of the present invention when conductive ceramics are used as the ceramics 1a and 1b as the members to be bonded. It is a shape and a vertical cross-sectional view, but the round pipe-shaped ceramics 1a and 1b are butted together, one energizing electrode 40 is disposed on the inner peripheral side of the butted portion, and a plurality of energized electrodes are provided on the outer peripheral side along the butted portion. The case where the electrodes 4a to 4d are arranged and joined are shown. 4 (A) and 4 (B) show only the electrode switching unit 51 of the energization control device 5 shown in FIG. 1 (B).

In this embodiment, as the conductive ceramic, for example, SiC ceramics (outer diameter 40 × inner diameter 24 × length 30 mm) having a resistivity of about 10 ⁻¹ [Ω · cm] is used. As the bonding agent 2, a Ge powder bonding agent is used. The four outer energizing electrodes 4a, 4b, 4c, 4d and the disc-shaped inner electrode 40 are each made of ceramic 1
A carbon paste is applied to the outer and inner peripheral sides of the butted portions of a and 1b to make contact. The outer energizing electrodes 4a to 4d are fixed so as not to move, the energizing electrodes 4a and 4b are arranged at an angular interval of substantially 90 degrees, and the energizing electrodes 4a and 4c and the energizing electrodes 4b and 4d are arranged so as to face each other. I have. In addition,
The inner conducting electrode 40 may have a donut shape.

The energizing electrodes 4a to 4d are connected to switching terminals 51a, 51b, 51c, 51d of the electrode switching section 51,
The inner conducting electrode 40 is connected to the ground terminal 52 of the electrode switching section 51.
e. The voltage is supplied to four switching terminals 51a-5
Via 1d, a voltage is sequentially applied between the outer energizing electrodes 4a to 4d and the inner energizing electrode 40 in a predetermined pattern at an arbitrary time interval.

Now, the joining atmosphere is set to a vacuum, a voltage of about 36 V is applied to the butted portion of the ceramic member from room temperature without preheating, and electricity is mainly supplied to the butted portion of the SiC ceramics, and the holding time between the electrodes is reduced. 1/60 sec,
The switching terminal 5 is set so that the switching time between the other electrodes is substantially zero.
When 1a to 51d are switched, the energizing direction is 4a → ceramic member → 40, 4b → ceramic member → 40, 4c
→ ceramics member → 40 and 4d → ceramics member → 40 is sequentially switched, and the energized area is intermittently moved over the entire circumference of the butted portion of ceramics.

The current is gradually increased from the start of energization to about 1
At 30 A, the joining temperature becomes 1200 ° C., and the entire butted portion is heated and held for about 10 minutes mainly by Joule heat generated in the ceramics. After the bonding agent and the ceramics are reacted, the current is gradually reduced, and cooled to room temperature. To complete the joining. A 3 × 4 × 40 mm test piece was cut out from this bonded body sample and subjected to a four-point bending test. As a result, the bonding strength was 120 MPa.
Met.

In this embodiment, an integral electrode is used as the inner conducting electrode. Contrary to this embodiment, an integral electrode is used as the outer conducting electrode and a plurality of divided inner electrodes are used. It goes without saying that the above-mentioned electrode may be used.

[0046]

[Embodiment 4] FIG. 5A shows an electrode arrangement diagram obtained by expanding and deforming the electrode arrangement of the embodiment 3 shown in FIG. In this example, the inner energizing electrodes are provided in a number corresponding to the outer energizing electrodes, and energization is performed between the inner and outer energizing electrodes. Specifically, N energized electrodes 41 and 4 are provided on the outer peripheral side of the butted portion.
.., 4 (N-2), 4 (N-1), and 4N are in contact with the outer peripheral side of the ceramics 1a along the abutting portion as in the third embodiment. Further, on the inner peripheral side of the butting portion, N divided conducting electrodes 41 ', 42
', 43', ..., 4 (N-2) ', 4 (N-1)', 4
The inner electrode group made of N ′ is in contact with the outer energizing electrodes so as to face each other, and is arranged at substantially equal intervals in the circumferential direction.

As the electrode switching pattern in this embodiment, various patterns can be applied. For example, FIG.
Can be used. Pattern 1 is an electrode switching pattern in which the energization distance between the outer electrode group and the inner electrode group is the shortest. Specifically, for example, energization of the electrodes 41-41 'is started at the first switching, and 42-42', 43-43 at the second to nth switching thereafter.
', ..., 4 (N-1) -4 (N-1)', 4N-4N '
Then, the (n + 1) th and subsequent times are repeated in the same electrode switching order as described above. Pattern 2 is a pattern in which the energization distance is longer than that of pattern 1. Specifically, switching 1 to n
In the first round, 41-42 ', 42-43, ..., 4 (N-1) 4
N ′, 4N−41 ′, and thereafter, the same is repeated. Pattern 3 is a pattern in which the same region is energized so as to cross while changing the energization direction. Specifically, 4
1-42 ', 42-41', 42-43 ', 43-42
... 4N-41 ', 41-4N', and thereafter are repeated in the same manner. Pattern 4 is a composite pattern such as a combination of pattern 1 and pattern 2. Specifically, 41-41 'and 41-42 at the 1st to 2nth switching.
', 42-42, ..., 4 (N-1) -4N, 4N-4N
', 4N-41', and thereafter are repeated in the same manner. In the present embodiment, the same number of inner conductive electrodes and outer conductive electrodes are used. However, it is needless to say that the numbers of inner conductive electrodes and outer conductive electrodes may be different.

It is also possible to use a pattern in which energization is performed between the energized electrodes on the outer peripheral side and between the energized electrodes on the inner peripheral side without energizing between the energized electrodes on the outer peripheral side and the energized electrodes on the inner peripheral side. is there. For example, the current-carrying electrodes 41-42 and 41'-4
2 ', 42-43, 42-'43', ... 4 (N-1)-
The energized electrodes can be switched in the energizing order of 4N, 4 (N-1) '-4N'. As described above, various patterns can be used, and the joining operation may be performed to the end with one pattern, but an appropriate pattern is sequentially selected from a plurality of types according to the characteristics of the portion to be energized. You may choose.

[0049]

Fifth Embodiment FIGS. 6A and 6B are schematic cross-sectional views and a vertical cross-sectional view of a modification of the embodiment shown in FIG. A conductive member 39 is arranged on the inner peripheral side of the portion so as to be in contact with the inner peripheral surface. In the figure, ceramics 1a, 1b, bonding agent 2, holding jigs 3a, 3b, and outer energizing electrodes 4a-4b
Is the same as in the third embodiment, except that the inner electrode 40 is simply a conductive member 39. Also, the outer conducting electrode 4a
Switching terminal 51a of the electrode switching unit 51, the conducting electrode 4b and the switching terminal 51b, and the conducting electrodes 4c and 4d and the ground terminal 52.
e are connected to each other.

The two terminals 51a, 51 at arbitrary time intervals
When a voltage is alternately applied to b, the energizing direction is 4a → ceramic member → conductive member 39 → ceramic member → 4c
And 4b → ceramic member → 4d.
Therefore, the energized region can be intermittently moved over the entire periphery of the butted portion of the ceramics. Other joining conditions and joining results are the same as those in the third embodiment, and thus description thereof is omitted.

[0051]

Embodiment 6 FIGS. 7 (A) and 7 (B) are a schematic perspective view and a schematic top view, respectively, of an embodiment in which the present invention is applied to the joining of irregularly shaped ceramics. The ceramics 1a and 1b are butt-joined to form a butt portion, and the conducting electrodes 9a to 9e and 9a 'to 9e' are arranged and joined on both sides along the butt portion.

The ceramics 1a and 1b are Si-impregnated reaction sintered SiC ceramics each having a resistivity of about 10 ^° Ω · cm, and the ceramic 1a has a trapezoidal shape of the illustrated size. Has a rectangular shape. The bonding agent 2 interposed between the ceramics 1a and 1b is a Si-based reaction sintering bonding agent. The ceramics 1a and 1b are held by a holding device (not shown) and fixed by applying appropriate pressure. The current-carrying electrodes 9a to 9e and 9a 'to 9e' are rectangular electrodes formed by stacking two tungsten plates. These current-carrying electrodes are arranged so as to face each other along the abutting portion at substantially equal intervals, and each current-carrying electrode is in contact with each of the ceramics 1a and 1b. In addition, a heat insulating material (not shown) is provided around the butted portion to prevent heat dissipation from the butted portion.

In an Ar gas atmosphere, FIG.
The electrode switching pattern shown in FIG. 8 was used in order to mainly supply current to the ceramics 1a and 1b while satisfactorily heating the entire butted portion while performing current or voltage control based on the temperature control pattern shown in FIG. As shown in FIG. 8, in the first switching operation, for example, energization is started from between the energizing electrodes 9a and 9b ', and in the second to eighth switching operations, the electrodes 9a-9b' and 9b-9b are started.
,..., 9d-9d ′, 9d-9e ′, the energization area is sequentially moved over the entire length. Next, switch 9
In the 16th to 16th times, the electrodes 9e-9e ', 9e-9d',.
By switching to 9b-9b 'and 9a'-9b, the energized area is moved backward. After the 17th switching, the electrodes 9a to 9a 'are returned again, and the energization is repeated in the same electrode switching order as described above. At this time, for 5 minutes after the start of energization, the holding time between the energized electrodes is 50 to 80 m.
The switching time is changed within a range of 25 to 40 msec until 20 minutes after the end of energization, and the switching time between the electrodes is switched so as to be substantially zero. The temperature control pattern and the electrode switching pattern are predetermined, and are automatically controlled by feeding back a temperature signal from a temperature detector to control the temperature as shown in FIG. 7C.

When the joining temperature reaches about 1450 ° C., which is the joining temperature due to the heating, the temperature is maintained for about 5 minutes to allow the joining agent and the ceramic to react, and then cooled to room temperature to complete the joining. From the joined body sample thus manufactured, 3
A test piece of × 4 × 40 mm was cut out and subjected to a four-point bending test. As a result, the joining strength was about 200 MPa. Further, when the joined body was cut and the joining layer was observed with an optical microscope, it was found that a uniform joining layer was formed and good joining was obtained over the entire surface.

In the electrode switching pattern in this embodiment, the distance between the energized electrodes 9a-9a ', 9b-9b',
The reason why the holding time is lengthened in the order of 9c-9c 'and 9d-9d' is that the heat capacity increases with the change in the shape of these parts, so that the temperature rise is prevented from becoming slow, and This is for the purpose of improving the temperature distribution of the entire butted portion. For these purposes, the power supply holding time may be fixed, and the amount of power may be varied according to the magnitude of the heat capacity between the selected power supply electrodes.

[0056]

[Embodiment 7] Fig. 9 (A) shows an electrode arrangement diagram of the present embodiment in which the electrode arrangement of the embodiment 6 is extended with respect to long plate-shaped ceramics having the same length. Then N
, 9 (N-2), 9
A first electrode group consisting of (N-1) and 9N and N energized electrodes 91 ', 92', 93 ', ..., 9 (N-2)', 9
A second electrode group composed of (N-1) 'and 9N' is arranged along the butting portion so as to face each other with the butting portion interposed therebetween. The current-carrying electrodes are arranged at substantially equal intervals along the butted portion and are in contact with each of the ceramics 1a (1b). In this embodiment, the number of the current-carrying electrodes constituting the first and second electrode groups is set to the same number. However, the number of the current-carrying electrodes in both groups may be different.
Either one of the electrode groups may be formed as an integral band-shaped electrode.

Also in this embodiment, various patterns can be applied as the electrode switching pattern, but FIG. 9B illustrates four types of patterns as an example. In the pattern 1 of FIG. 9B, energization of the energizing electrodes 91-91 'is started at the first switching, and 92-92', 93-93 at the second to n-th times.
,..., 9 (N-1) -9 (N-1) ', 9N-9N, and the energized region is moved in the longitudinal direction of the butted portion. Then, after the (n + 1) th time, the same electrode switching order is repeated again. So in this pattern,
Only the outward movement for moving the energization region from one end of the butting portion to the other end is performed. On the other hand, in the patterns 2 to 4, the forward movement in which the energized area is moved from one end to the other end of the butting portion and the return movement in which the energized area is moved from the other end to one end are alternately performed. The selection pattern of the current-carrying electrodes of pattern 2 is the same as that of pattern 1. On the other hand, in pattern 3, in order to increase the energizing distance, switching 1
, 9- (N-
1) Energization is performed in the order of -9N ', 9N-9 (N-1)' to move the energization area in the outward path, and (n + 1) to (2n-
2) 9 (N-1) -9 (N-2) ', ..., 93-
The energization is performed in the order of 92 'and 92-91', and the energization area is moved backward. Then, after the (2n-1) -th time, the same electrode switching sequence is repeated again. The pattern 4 is a pattern in which the pattern 2 and the pattern 3 are combined, and energization is performed so that the first energization region and the subsequent energization region partially overlap.

When joining materials whose resistance value decreases as the temperature rises, pattern 1 or pattern 4 is selected at the beginning of energization when the temperature of the butt portion is low, and pattern 2 or 3 is selected at the stage when the temperature rises. It is preferred to choose. Also in this example, it goes without saying that the power supply time, the power supply, and the like may be changed during the control.

[0059]

Eighth Embodiment FIG. 10A shows an embodiment of the invention in which a plurality of current-carrying electrodes are divided into a plurality of groups and energization is controlled by a predetermined electrode switching pattern for each group. Such a grouping of the conducting electrodes is performed when the entire butted portion cannot be easily heated satisfactorily, such as when joining a large-sized member having a long joining length or a complex-shaped member such as an irregularly shaped or asymmetrically shaped ceramic. Suitable for. The basis of the concept is to divide the butted portion into a plurality of regions in the longitudinal direction, provide one energization control device for each divided portion, and control the group of energized electrodes arranged in the divided portion by the corresponding energization control device. Then, a plurality of current-carrying regions are simultaneously moved as a whole of the ceramics to perform heat bonding. In this embodiment, as in the case of the seventh embodiment, the electrode arrangement of the seventh embodiment is extended to plate-like ceramics of the same shape, and a plurality of current-carrying electrodes are arranged. The plurality of conducting electrodes are divided into three electrode groups G1 to G3. First electrode group G
1 includes a first electrode group including N energized electrodes 11, 12,..., 1N and a second electrode group including N energized electrodes 11 ′, 12 ′,. Second electrode group G2
Is a third electrode composed of M energized electrodes 21, 22,..., 2M.
An electrode group and a fourth electrode composed of M electrodes 21 ', 22', ..., 2M '. The third electrode group G3 is L
, 3L and a sixth electrode group consisting of L current-carrying electrodes 31 ', 32', ..., 3L '. Note that, in the first to third electrode groups G1 to G3, an integrated band-shaped electrode can be used as one of the electrode groups.

As the electrode switching pattern in this embodiment, various patterns can be applied as in the previous embodiment.
For example, as shown in the electrode switching pattern shown in FIG.
-11 'is energized, and the energization is performed in the order of the energizing electrodes 12-12',...
After the +1) th time, the energization is repeated again in the same electrode switching order as described above. In the electrode group G2, energization of the energizing electrodes 21-21 'is started at the first switching, and energization is performed in the order of the energizing electrodes 22-22',..., 2M-2M 'at the second to m-th switching. After the first time, the energization is repeated again in the same electrode switching order as described above. In the electrode group G3, energization of the energized electrodes 31-31 'is started at the first switching, and energized electrodes 32-32',.
Energization is performed in the order of L-3L, and after (l + 1) -th time,
The energization is repeated again in the same electrode switching order as described above. In the present embodiment, the number of current-carrying electrodes is set to L <M <N for a general description. In such a case, the current-carrying holding time for the selected current-carrying electrode in each electrode group is determined by the electrode group. It is necessary to satisfy G1 <electrode group G2 <electrode group G3.

In the case of a simple shape and a simple joining length as shown in FIG. 10 (A), L = M = N is generally set for one energization control device or each electrode group. The energization control device provided in the above may be used to perform energization control on each electrode group at the same time as shown in FIG. However, when joining ceramics with different shapes, the number of current-carrying electrodes in each electrode group, the spacing between current-carrying electrodes, etc. may be changed according to the difference in heat capacity of each part of the butted portion, or the current-carrying conditions may be different for each electrode group. It is preferable that more uniform heating can be achieved by changing.

As an energizing switching pattern, when the number of energizing electrodes in each of the electrode groups G1 to G3 is L = M = N,
FIG. 12 is shown by using three energization controllers 1-3 (not shown).
According to the electrode switching pattern shown in FIG.
In G3 to G3, the electrodes may be independently switched, and the movement of the energization region may be moved at a plurality of locations of the butting portion. In addition, even when the three energization control devices 1 to 3 are used, as in the electrode switching pattern shown in FIG. Instead of moving the energizing region, one energizing region may always be moved along the butting portion.

When a plurality of electrode groups are controlled to be energized by separate energization control devices, the electrode switching pattern and energization conditions (current, power, energization holding time, temperature control) at each energized location are set. Is desirably performed independently. In this case, it is necessary to mutually control the switching of the current-carrying electrodes of each current-carrying control device so that voltage is not simultaneously applied to the same current-carrying electrode from different current-carrying control devices.

In the above embodiment, when plate-shaped ceramics are joined, a plurality of current-carrying electrodes are divided into a plurality of groups to control the energization. Can of course be applied.

[0065]

Embodiment Group 2 Next, with reference to FIGS. 14 to 18, an embodiment of a method for joining two objects to be joined with a heating insert material interposed therebetween will be described. If a heating insert is used, not only ceramics but also ceramics and metal can be joined. Even when the heating insert is used, the basic structures of the power supply control device and the pressurizing device can be substantially the same as those described with reference to FIGS. 1A and 1B. Therefore, in the following embodiment, the description of the power supply control device and the pressurizing device will be omitted. The heating insert material used is not limited to the one in which a bonding agent is directly supported on the abutting surface of the conductive ceramics, and also the heating insert material disclosed in JP-A-1-320273 and JP-A-1-320276. As an insert material, a layered composite ceramic or the like in which an insulating ceramic is provided on one or both surfaces of a conductive ceramic can be used.

Even when the heating insert is used, the arrangement of the current-carrying electrodes is basically the same as that described in the first to eighth embodiments except that the current-carrying member is replaced by the heating insert. All the electrode switching patterns described in the first to eighth embodiments can be applied. For example, even when two large-diameter tubular ceramics are joined using a heating insert, the third embodiment described with reference to FIGS. 3A and 3B and the third embodiment with reference to FIGS. 5A and 5B will be described. Example 4
The energization may be performed using the same electrode switching pattern with the same energizing electrode arrangement as that described above. In addition, when two tubular ceramics are joined by using a heating insert material, and when an integrated electrode is disposed inside, the above-described third and fifth embodiments described with reference to FIGS. 4 and 6 are used. The energization may be performed using the energization electrode arrangement and the energization pattern. Further, when two elongated ceramics described with reference to FIG. 9A are joined using a heating insert material, energization is performed using the electrode switching pattern shown in FIG. 9B with the same energizing electrode arrangement. Just do it. In the case where a plurality of current-carrying electrodes are divided into a plurality of groups and a current is applied to the heating insert material, FIG. 10B and FIGS.
The current can be supplied by using the electrode switching pattern.

[0067]

Embodiment 9 In this embodiment, as shown in FIGS. 14A and 14B, eight outer conducting electrodes 4a to 4h and one inner conducting electrode 4a to 4h are connected.
And a plurality of energizing electrodes 39. Except for the heat insulating material 7 and the insert material 20 for heating, other configurations are shown in FIG.
Since the configuration is the same as that of the first embodiment shown in (A) and (B), the description is omitted. In this embodiment, round pipe-shaped insulating ceramics 1a and 1b are joined to each other with a heating insert 20 interposed therebetween to form a butt portion, and the heating insert 20 is contacted with the conducting electrodes 4a to 4h and 39. Let me. Each of the ceramics 1a and 1b has a size of outer diameter 50 × inner diameter 42 × length 100 mm. Ceramics 1a and 1b are made of ordinary insulating Al ₂ O
₃ ceramics. The heating insert 20 is
Conductivity A having an annular shape and a resistivity of about 10 ⁻³ [Ω · cm]
NaF as bonding agent on both sides of l ₂ O ₃ ceramics
It is configured to carry a system glass solder. The current-carrying electrodes 4a to 4h and 30 are formed of tungsten, and are in close contact with the conductive ceramic of the insert material 20 via a carbon paste or a carbon sheet. In a test for confirming the effect of the present embodiment,
The energization is started at room temperature in an Ar gas atmosphere, and the energized electrodes 4a-39, 4b-39, 4c-39, 4d-39,
14e-39, 4f-39, 4g-39, and 4h-39, the energization is performed in this order, and the energization regions are sequentially switched.
The vicinity of the butted portion was heated by power control in a pattern as shown in FIG. The current holding time between the current-carrying electrodes is 70 m
sec After the joining temperature is kept at about 1000 ° C., the state is maintained for 10 minutes to cause the bonding agent to react. Joined. When the airtightness of this joined body was checked with a He leak detector, no leak was detected over the entire circumference. Further, the joined portion of the joined body was cut out, polished, and observed for a structure with an optical microscope.
m, a dense bonding layer was formed, and it was found that good bonding was formed over the entire bonding portion.

Here, an example in which the electrode switching pattern and the holding time are constant has been described. However, it is also possible to change the electrode switching pattern and the current holding time appropriately with respect to the elapsed time after the start of energization. Further, the present embodiment can be applied to a shape other than concentric circles or a square shape.

[0069]

Embodiment 10 In this embodiment, the ninth embodiment shown in FIG.
In this configuration, the bonding is performed by supplying electricity to the heating insert using only the outer energizing electrodes 4a to 4h without using the inner energizing electrode 39. In tests to see the effect,
Dimensions are 50 x outer diameter x 42 inner diameter x 100 mm length, about 10 ³
SiC ceramics having a resistivity of [Ω · cm] were joined together. And as a heating insert material, about 1
A heating insert material in which a Ti-based active metal brazing material was provided as a bonding agent on both surfaces of a SiC ceramic having a resistivity of 0 ^-1 [Ω · cm] was used. The atmosphere was a vacuum of 10 ⁻⁵ Torr. Then, the energization starts from the room temperature state, and FIG.
The energized regions were sequentially switched in a switching pattern as shown in FIG. 5A, and the vicinity of the butted portion was heated by controlling the temperature of the pattern as shown in FIG. When the joining temperature reached about 950 ° C., the temperature was maintained for 5 minutes to react the joining agent, and the reacted joining agent was allowed to react with the ceramic to be joined and the heating insert material to join them. here,
If the switching pattern of the energization interval was changed during the joining, the temperature characteristics of the resistance of the heating insert used here were negative. As the temperature rises, the resistance decreases. Therefore, by widening the energization interval, an attempt is made to heat a wide area with the same voltage, and there is an advantage that the capacity of the power supply can be reduced. When the confidentiality of this joined body was checked using a He leak detector, no leak was detected over the entire circumference. Also, when the joined portion of the joined body was cut out, polished and observed for the structure with an optical microscope, a dense joining layer of about 8 μm was formed, and it was found that good joining was formed over the entire joined portion. Do you get it.

Here, an example in which the holding time is constant is shown.
Joining is possible even if it changes over time.

[0071]

Embodiment 11 In this embodiment, as can be seen from the arrangement of the current-carrying electrodes with respect to the joints shown in FIG. 16A and the explanatory view shown in FIG. This is an example of a case where 1b is joined using a heating insert material 20. In the test for confirming the effect, the size of the ceramics 1a and 1b was 10 × 15.
0x20mm (butting surface 10x150mm)
A conductive Si3 N4 ceramic having a resistivity of ^-3 [.OMEGA.cm] was used. As the heating insert 20,
It has the same cross-sectional shape as the butt surface, about 10 ^-2 [Ωcm]
Conductive Si3 N4 ceramics 20a having a specific resistivity
10 ^{+ 5} [Ωcm] or more insulating Si3
A heating insert having a sandwich structure formed by laminating insulating layers 20b made of N4 was used. A bonding agent 2 is provided between the butting surfaces of the insulating layer 20b and the ceramics 1a and 1b.
As 0c, a Ti-based active metal brazing material was interposed. The atmosphere was in a vacuum of 10 ⁻⁵ Torr. The energization was started from the room temperature state, the energization area was sequentially switched by the electrode switching pattern shown in FIG. 17, and the vicinity of the butted portion was heated by controlling the temperature of the pattern as shown in FIG. When the joining temperature reached about 950 ° C., the state was maintained for 5 minutes to react the joining agent, and the reacted joining agent was reacted with the ceramic to be joined and the insert material for heating to join them. A 3 × 4 × 40 mm bending test piece was cut out from the joined body and subjected to a four-point bending test.
Was obtained. Also, when the bonded portion of this bonded body was cut out, polished, and observed for structure with an optical microscope, a dense bonding layer of about 8 μm was formed, and good bonding was formed over the entire bonded portion. I understood.

Here, a description has been given of an example of joining conductive ceramics. However, by using an insulating heating insert material on the butted surface side as in this example,
The present invention can be applied to bonding with a metal. In the case of joining with metal, a soft metal or a material with an intermediate coefficient of thermal expansion is interposed between the metal and the insert material for heating to further reduce the stress in consideration of the effect of residual stress. It is preferred that

[0073]

Embodiment 12 In this embodiment, two insulating Si3 N4 ceramics 1a and 1b having different shapes as shown in FIG. 18 are joined together. The arrangement of the conducting electrodes with respect to the
The configuration is the same as that of the electrode arrangement shown in FIG. In this example, C
The aF2 based bonding agent is applied to both the abutting faces ^{10 -2 [Ω} ·
[cm] is inserted between the ceramics 1a and 1b to be joined. The atmosphere was Ar gas. The energization was performed by temperature control, and each set value as shown in FIG. 18C was input in advance to a control program, and the control was performed by automatic control. At this time, the holding time is changed depending on each energized portion in order to heat the entire butted surface as evenly as possible in consideration of the heat capacity. For this purpose, the same effect can be obtained even if the energizing current or the electric power is changed depending on each energizing location. As shown in FIG. 18 (B), when the temperature of the joint reaches about 1450 ° C., the state is maintained for 10 minutes, and then pressure is applied in a direction perpendicular to the joint surface, and the room temperature is set in accordance with the program. To complete the joining. A 3 × 4 × 40 mm bending test piece was cut out from this sample, and a four-point bending test was performed. As a result, it was found that a strength of about 280 MPa was obtained and good bonding was obtained.

[0074]

Embodiment Group 3 Next, a ceramic having no conductivity at room temperature but having conductivity at high temperature or a bonding agent having conductivity at high temperature is heated using an auxiliary heating device, and then the two ceramics are electrically bonded. An example in such a case will be described. A method of joining the two ceramics by heating the butted portion of the two ceramics by using the auxiliary heating device and then conducting electricity from the current-carrying electrode to cause the bonding agent to react is well-known. Example group 3
Is substantially the same as each of the embodiments of the embodiment group 1 and the embodiment group 2 except that an auxiliary heating device is used. As the auxiliary heating means, various heating means such as a gas flame, an electric furnace, and lamp heating can be used, but these heating means may be used alone, but a plurality of heating means may be used. Of course, they may be used in combination.

In the case where the current-carrying member has sufficient conductivity at room temperature as in the embodiments 1 and 2 and the embodiment 4 described later, it depends on the degree of conductivity. However, in general, a power supply capable of supplying a low voltage and a large current is used as the power supply. In this case, since the resistance value is large even after the auxiliary heating, a power supply which can supply a large voltage and a small current is generally used.

In each embodiment of this embodiment group, all the electrode switching patterns described in the above-mentioned embodiment groups 1 and 2 can be used. For example, when joining two tubular or columnar ceramics, the arrangement and the electrode switching pattern of the current-carrying electrodes shown in FIGS. The arrangement and the electrode switching pattern of the conducting electrodes shown in FIG. 4 of the third embodiment, FIGS. 5A and 5B of the fourth embodiment, and FIG. 6 of the fifth embodiment can be used. In the case of joining ceramics of different shapes, the arrangement and the electrode switching pattern of the conducting electrodes shown in FIGS. 7 and 8 of the sixth embodiment can be used. Further, when two rectangular ceramics having the same shape and size are joined, the seventh embodiment described above is used.
9A and 9B can be used. Further, when the butted portion is long or when the shape of the butted portion is complicated such as when two ceramics are joined so as to form an L-shape, as in the eighth embodiment described above. Alternatively, a plurality of energizing electrodes may be divided into a plurality of groups, and energization may be controlled for each group.

[0077]

Embodiment 13 This embodiment is an example of joining tubular ceramics. FIG. 19 is a schematic view of the joining apparatus of this embodiment. The basic configuration is the same as that of the apparatus shown in FIG. 1 (A). Is arranged at intervals around the. FIG. 20A shows the arrangement of the conducting electrodes used in the test to confirm the effect, and FIG. 20B shows the electrode switching pattern used in the test. The two ceramics 1a and 1b used in the test have dimensions of an outer diameter of 60.
× Insulating Si in pipe shape with inner diameter 44 × length 100mm
A ₃ N ₄ ceramics, the bonding agent CaF
_{A two} -part bonding agent was used. Tungsten electrodes were used as the ten current-carrying electrodes 40 to 49 arranged so as to be in close contact with the outer peripheral surface of the butted portion. Although not shown, ten gas burners 8 as auxiliary heating devices were arranged at equal intervals along the outer periphery of the butted portion. The gas burner was arranged so as to cover the butted portion almost uniformly with a gas flame.

In the test, first, the joint was 80
After preheating to 0 to 900 ° C, a voltage was applied to the current-carrying electrode to start current-carrying heating. The energization at this time was performed by power control, and the power value, time, switching pattern, and holding time as shown in FIG. When the joining time became 12 minutes, the two ceramics were axially pressed so as to face each other, and after 15 minutes, the gas flame was stopped and cooled to room temperature to complete the joining. When the airtightness of this sample was checked with a He leak detector, it was confirmed that the leak was at a level below the detection limit and good airtightness was obtained. In addition, 3 ×
When a 4 × 40 mm bending test piece was cut out and subjected to a four-point bending test, a strength of about 300 MPa was obtained, and it was found that good joining was possible.

In the above embodiment, in order to obtain a better heating state, the power supply holding time, the power supply elapsed time and the power supply power are changed together with the power supply start elapsed time. In the present embodiment, the reason why the electrode switching pattern is changed with time is that the resistance value of the bonding agent is high at the beginning of energization, so that it is necessary to select an electrode switching pattern having a relatively small distance between energized electrodes. When the voltage is lowered and the resistance value of the bonding agent decreases as the temperature rises, the distance between the energized electrodes is changed to a large electrode switching pattern, and a wider energized area is heated, so that the power supply with a smaller capacity can be used for butt jointing. This is for heating the part more evenly. In the above embodiment, the energization holding time is changed because at the beginning of energization, heat escapes to the object to be joined is large and the heating speed of the bonding agent is low. After the temperature has risen sufficiently, the holding time is shortened to more uniformly heat the entire butted portion.

Further, in the above embodiment, the energization is performed so that the preceding energization region and the subsequent energization region partially overlap.
Since the change in the resistance value between the current-carrying electrodes can be reduced as compared with the case where the current-carrying regions are not overlapped, a stable movement of the current-carrying region with less voltage fluctuation can be achieved. Example group 3
In the electrical joining method, the resistance value changes greatly with respect to the temperature of the member to be energized, and a large voltage is required in principle.
The effect of using such an electrode switching pattern,
That is, there is a great effect in terms of reducing the power supply capacity, achieving uniform heating, improving safety, and the like.

It is to be noted that, unlike the control pattern shown in FIG. 20B, it is also possible to carry out the joining while keeping the current holding time and the electrode switching pattern constant. Can be used.

[0082]

Embodiment 14 This embodiment is an example in which ceramics having different shapes are joined. The sample used for confirming the effect is shown in FIG. As shown in FIG. 21A, two different-shaped Si ₃ N ₄ ceramics 1a,
1b, a CaF ₂ -based bonding agent was interposed, and FIG.
As shown in (B), the current-carrying electrodes 9a to 9
e and 9a 'to 9e'. In addition, the gas crater for auxiliary heating was also arranged corresponding to each energized electrode. In the test,
After the joint was preheated to 800 to 900 ° C. by a gas flame, a voltage was applied to the current-carrying electrodes to start current-carrying heating. The energization was performed by electric power control, and each set value as shown in FIG. 22 was input to a program of the energization control device, and was performed by automatic control. At this time, the holding time was changed depending on each energized point in order to heat the entire joint surface as uniformly as possible in consideration of the amount of heat dissipation. At the same time as the end of the joining time (10 minutes), pressure was applied in a direction perpendicular to the joining surface, the gas flame was stopped, and the mixture was cooled to room temperature, thereby completing the joining. A 3 × 4 × 40 mm bending test piece was cut out from this sample and subjected to a four-point bending test. As a result, it was found that a strength of about 300 MPa was obtained and good bonding was obtained.

[0083]

Embodiment 15 In this embodiment, a plurality of current-carrying electrodes 4a to 4l arranged along the butted portion of the tubular ceramics are divided into two electrode groups G1 (electrodes 4a to 4g) and an electrode group G2 (electrodes 4g to 4a). This is an embodiment in which the energization electrodes of two electrode groups are energized by two energization controllers 5A and 5B, and an electric furnace 80 is used as an auxiliary heating device. FIG. 23A shows an arrangement configuration of the current-carrying electrodes used to confirm the effect, and FIG. 23B shows the electrode switching patterns and the current-carrying conditions used in the test. The two ceramics used for the test had an outer diameter of 1
Pipe-shaped insulating Si with size 00 x inside diameter 90 x length 30mm
A ₃ N ₄ ceramics, CaF2 as a bonding agent
A system bonding agent was used. Twelve current-carrying electrodes 4a to 4l made of tungsten are arranged at equal intervals on the outer peripheral surface of the butted portion so as to closely contact with each other. The electric furnace 80 is used as an auxiliary heating device, the object to be welded and the entire energized electrode are put therein, and the electric furnace is heated to about 900 ° C. by heaters 81 and 82 to perform auxiliary heating. A voltage was applied to 4 l to start energization heating of the bonding agent. The atmosphere in the electric furnace 80 was an Ar gas atmosphere. The energization at this time is performed by current control, and the two energization controllers 5A and 5B select the energization selected in the respective electrode groups G1 and G2 according to the electrode switching pattern and energization conditions as shown in FIG. The electrodes were simultaneously energized and heated. At this time, it is necessary to control so that the voltage is not simultaneously applied to the energization electrodes 4a and 4g of the electrode groups G1 and G2 from both energization control devices 5A and 5B. 15 minutes after the start of energization, 2
The two ceramics were pressurized in the axial direction so as to face each other, and were cooled according to the current switching pattern. After stopping the energization, the heaters 81 and 82 were also stopped, and the inside of the electric furnace 80 was cooled down to room temperature to complete the joining. The reason why the energizing current was increased at the beginning of energization and the current value of the energizing current was decreased in the latter half under energizing conditions is to raise the temperature of the bonding agent as soon as possible, reduce its resistance, and energize it. Then, when the butting portion is sufficiently heated and the energization becomes stable, the current is then reduced so that the temperature becomes suitable for the reaction of the bonding agent. If you keep the current high, it will cause overheating,
This is because good bonding cannot be performed. The reason for changing the distance between the energized electrodes is the same as the reason described in the thirteenth embodiment.
As a result of performing the same evaluation as in Example 13 on the sample thus bonded, it was found that good bonding could be performed. Here, an electric furnace is used as auxiliary heating, but heating by a gas flame may be used. In this case, the whole sample was placed in the electric furnace and the auxiliary heating was performed. However, in the case of a long sample or the like, only a part near the butt portion is put in the electric furnace, and only the vicinity of the butt portion is auxiliary-heated. It is more preferable from the viewpoint of joining cost. Further, in this example, the electrode group is simply divided into two electrode groups. However, if the size is further increased, the electrode group may be further divided into a plurality of electrode groups. In addition, various usages as described in the eighth embodiment can be applied.

[0084]

[Embodiment Group 4] In each of the above embodiments, current is supplied in a direction parallel to the butted portion of the objects to be joined. The present invention can also be applied to the case where current is supplied in the vertical direction. As the energization method itself, there are a method without a heating insert material and a method with a heating insert material as shown in, for example, Japanese Patent Application Laid-Open No. 1-176283 and the like. Is omitted. In the method using the heating insert material, the resistance value of the heating insert material to be used is set to be larger than the resistance value of the object to be joined. Joule heat is generated, and there is a feature that bonding with high heating efficiency can be performed. In the following embodiments, conductive ceramics or conductive ceramics and metal can be joined.

[0085]

Embodiment 16 FIGS. 24 (A) and (B) are side views of an embodiment in which rectangular ceramics 1a and 1b having the same shape and the same size are butted together with a bonding agent 2 to join a sample having a butted portion. And a plan view. In the present embodiment, the current-carrying electrodes A1 to AN and B
1 to aB are brought into close contact with each other. Ceramics 1
b on both side surfaces of the conducting electrodes a1 to aN and b1 to b, respectively.
N is in close contact. The current-carrying electrodes A1 to AN and the current-carrying electrodes a1 to aN constitute a first electrode set that conducts electricity, and the current-carrying electrodes B1 to BN and the current-carrying electrodes b1 to bN constitute a second set of electrodes that conduct electricity. doing. Each energized electrode is
They are arranged at equal intervals in the longitudinal direction. Also in the present embodiment, it is possible to conduct electricity to the first set of electrodes and the second set of electrodes using various electrode switching patterns. FIG.
Shows an example of an electrode switching pattern that can be used in this embodiment. Pattern 1 is a pattern in which the distance between two energized electrodes to be energized is the shortest. In this pattern, the energized area is sequentially moved from one end to the other end of the butted portion (forward movement). Pattern 2 reciprocates the energized area along the butting portion. In the pattern 3, the energization distance is made longer than in the patterns 1 and 2, and the energization region is reciprocated along the abutting portion. Pattern 4 is a pattern in which pattern 2 and pattern 3 are combined. Although the above embodiment is an example in the case where there is no heating insert material, it goes without saying that the above-mentioned electrode switching pattern can also be applied to a system using a heating insert material.

[0086]

Embodiment 17 FIGS. 26A and 26B show comparatively wide rectangular ceramics 1a and 1b having the same shape and dimensions.
The side view and the top view of the example which joins the sample which constituted the butting part by butting via the heating insert material 20 with which the bonding agent was applied to both sides between them are shown. In this embodiment,
A state in which a first electrode row of current-carrying electrodes A1 to AN, a second electrode row of current-carrying electrodes B1 to BN, and a third electrode row of current-carrying electrodes C1 to CN are tightly pressed on the upper surface of the ceramic 1a. In contact. Also, a third electrode row of current-carrying electrodes a1 to aN, and current-carrying electrodes b1 to bN
And the fifth electrode row (not shown) of the current-carrying electrodes c1 to cN are in close contact with each other.
The current-carrying electrodes a1 to aN and b1 to bN are brought into contact with each other in a state of being tightly pressed. In the present embodiment, the conducting electrode A
1 to AN and the energizing electrodes a1 to aN constitute a first set of electrodes for energizing, and include the energizing electrodes B1 to BN and the energizing electrodes b1 to b1.
bN constitutes a second set of electrodes that conduct electricity, and the conducting electrodes C1 to CN and c1 to cN constitute a third set of electrodes that conduct electricity. In this embodiment, three sets of electrodes are used. However, it goes without saying that more sets of electrodes can be used according to the width of the ceramic. FIG. 27 shows an example of an electrode switching pattern that can be used when m sets of electrodes are used. It goes without saying that a pattern other than the electrode switching pattern shown in FIG. 27 can be used. Further, in the present embodiment, the same number of energized electrodes are arranged on both sides of the object to be joined, but the number of energized electrodes on both sides may be different, and they are arranged on one side of the object to be joined. The current-carrying electrode may be replaced with one integrated current-carrying electrode. In the present embodiment, the heating insert is used, but the electrode arrangement of the present embodiment can of course be applied to a system that does not use the heating insert.

[0087]

Embodiment 18 FIGS. 28 (A) and (B) show an embodiment in which tubular ceramics 1a and 1b having the same shape and the same size are butted together with a bonding agent 2 therebetween to join a sample having a butted portion. 2A and 2B show a side view and a cross-sectional view, respectively. In the present embodiment, the current-carrying electrode A
1 to AN are brought into contact with each other in a state of being tightly pressed, and the current-carrying electrodes a1 to aN are brought into contact with the outer peripheral surface of the ceramics 1b along the abutting portion in a state of being pressed tightly. FIG. 28C shows an example of an electrode switching pattern that can be used in this embodiment. In the present embodiment, the number of opposing energizing electrodes is the same, but the number of opposing energizing electrodes may be different, and the energizing electrodes arranged on one side of the joined object are integrated. It may be replaced with one integrated current-carrying electrode. In the present embodiment, the heating insert is used, but the electrode arrangement of the present embodiment can of course be applied to a system that does not use the heating insert.

[0088]

Embodiment 19 FIGS. 29A and 29B show a butt portion formed by butt-joining tubular ceramics 1a and 1b having the same shape and the same size with a heating insert material 20 and a bonding agent interposed therebetween. 1A and 1B show a side view and a cross-sectional view of an embodiment for joining samples. This embodiment is an extension of the electrode arrangement of the embodiment 18 shown in FIG. In Example 18, since the current-carrying electrodes are arranged only on the outer peripheral surfaces of the ceramics 1a and 1b, when the thickness of the ceramics is increased, the butted portion located on the inner peripheral side of the ceramics is favorably heated. Can not. Therefore, in the present embodiment, the current-carrying electrodes A1 'to AN' and a1 'to
aN '(not shown) was arranged. And in this embodiment,
Current-carrying electrodes A1 to AN and a1 to aN and current-carrying electrodes A1 'to
Electric conduction is performed between AN ′ and a1 ′ to aN ′. In this way, the butted portion can be favorably heated from both the outer and inner peripheral sides of the ceramic. FIG. 29 (C)
Shows an example of an electrode switching pattern that can be used in this embodiment.

The arrangement of the current-carrying electrodes in the case of joining the tubular ceramics is not limited to the embodiment described above. For example, as shown in the plan views and side views shown in FIGS. Current-carrying electrodes may be arranged on both end faces in the axial direction of the ceramic joined body. FIG.
As shown in (C), one electrode group is made of ceramics 1a.
May be provided on one end face in the axial direction, and the other electrode group may be provided on the outer peripheral face of the ceramics 1b.

In this embodiment, the number of opposing energizing electrodes is the same. However, the number of opposing energizing electrodes may be different. It may be replaced with one integrated current-carrying electrode. In this embodiment, the heating insert is used. However, the electrode arrangement of this embodiment can be applied to a system without the heating insert.

[0091]

Embodiment 20 This embodiment is an embodiment for confirming the effect of the embodiment for joining tubular ceramics. FIGS. 31 (A) and (B) show a case where the size is 60 × outside diameter using 16 conductive electrodes A1 to A8 and a1 to a8 made of carbon.
An electrode arrangement in the case of joining tubular SiC ceramics 1a and 1b having an inner diameter of 48 × length of 100 mm and a resistivity of 10 ⁻² [Ω · cm] is shown. A Ge-Si based bonding agent 2 was interposed between the joining surfaces of the two ceramics at the joint, and the two ceramics were butted together and pressurized with a predetermined force to be set on a holding jig. Although not shown, a heat insulating material is provided around the butt portion for the purpose of keeping the temperature. The joining was performed in an Ar gas atmosphere. Each energized electrode was brought into contact with the outer peripheral surface of the ceramic at a distance of 50 mm from the butted portion via a carbon paste, and arranged at equal intervals in the circumferential direction. A voltage was applied to the current-carrying electrode from room temperature to start current-carrying heating.
The energization at this time is performed by power control, and the electrode switching pattern, the energization elapsed time, the energization holding time shown in FIG.
The power value shown in (C) was input to the program, and bonding was performed by automatic control. The condition where the joining temperature is about 1200 ° C is 5
After holding for one minute, cooling was performed according to the program to complete the joining. When the airtightness of this sample was checked with a He leak detector, the level was below the detection limit. When the sample was cut and observed with an optical microscope, a uniform bonding layer was formed. A joined body having excellent airtightness was obtained.

[0092]

Embodiment 21 This embodiment is an embodiment for confirming the effect of the embodiment in which two wide rectangular ceramics having the same dimensions are joined together. 33 (A) and 33 (B), ceramics 1a and 1b have dimensions of 100 × 50 × 10
Approximately 10 ^-2 [Ω · cm] in mm (butting surface 50 × 100 mm)
Is a conductive Si ₃ N ₄ ceramic having a resistivity of As the bonding agent 2, a Ti-based active metal brazing material was used. 20 × 20 on the upper and lower surfaces of both ceramics
Conductive electrodes A1 to A4 and B1 to B4 and a1 to a4 and b1 to b4 (not shown) made of carbon having a contact area of mm.
Were equally arranged by eight. Each of the current-carrying electrodes is in close contact with the ceramic via the carbon paste in a pressurized state. Although not shown, the surroundings were kept warm by a heat insulating material, and the atmosphere was Ar gas. A voltage was applied to the current-carrying electrode from room temperature to start current-carrying heating. The energization at this time is performed by temperature control, and FIG. 33 (C) and FIG.
The temperature, the switching pattern, and the holding time shown in (1) were input to a program, and bonding was performed by automatic control. Joining temperature is about 900
The holding time at 5 ° C. was 5 minutes. 3 x 4 x 4
When a 0 mm bending test piece was cut out and subjected to a four-point bending test, a strength of about 200 MPa was obtained. Also, when this bonded body was cut and the bonding layer was observed with an optical microscope,
It was found that a uniform bonding layer was formed and good bonding was obtained over the entire surface.

[0093]

Embodiment 22 This embodiment is an embodiment for confirming the effect of the embodiment in which two irregularly shaped ceramics are joined. The ceramics 1a and 1b used for bonding have the shape and dimensions shown in FIG. 35A, respectively, and are SiC ceramics having a resistivity of about 10 ⁻² [Ω · cm]. The heating insert 20 is a heating insert made of SiC ceramic having a resistivity approximately two orders of magnitude higher than that of the ceramics 1a and 1b to be joined, and has a Ti-based joining agent on both joining surfaces. The lower conducting electrode a is made of carbon and is in close contact with the entire lower surface of the ceramics 1b via a carbon paste. Upper conducting electrodes A1 to A
10 is made of carbon, 10 pieces are arranged at equal intervals as shown in the figure, and each is pressurized by a pressing device (not shown),
It is in close contact with the upper surface of the ceramic 1a. The joining was performed in a vacuum atmosphere. Then, a voltage was applied to the current-carrying electrode from room temperature to start current-carrying heating. The energization at this time was performed by temperature control, and as shown in FIGS. 35 (C) and 36, the temperature, time, switching pattern, and holding time were input to a program and bonding was performed under automatic control. Joining temperature is about 900
C. was maintained for 5 minutes, and cooled according to the program to complete the bonding. In FIG. 36, the reason why the switching time of the current-carrying electrode is delayed at the protruding portion of the ceramics 1a is to prevent the temperature rise from being delayed due to the large heat capacity of the protruding portion. It is a consideration to equalize. It is also possible to adopt a method in which the switching power is made constant and the energized power is increased at the portion corresponding to the protruding portion. When the joined joined body was cut and the joining layer was observed with an optical microscope, it was found that a uniform joining layer was formed and good joining was obtained over the entire surface.

It should be noted that even when a method of crossing the butted portion, that is, energizing the butted portion in the vertical direction is performed,
A plurality of energized electrodes can be divided into groups, and energization can be performed for each group using the same electrode switching pattern as described in connection with the eighth embodiment.

In the case of joining ceramics and metal, if a soft metal or an intermediate member having a thermal expansion coefficient intermediate between that of ceramics and metal is interposed at the butted portion to reduce residual stress, good joining can be achieved. There is an advantage that can be performed.

In the case of not only the present embodiment group but also the embodiment groups 1 and 2, the conductive ceramic is
Since it is possible to conduct electricity from room temperature, basically, no auxiliary heating means is required to increase conductivity, but the auxiliary heating means can be used for the purpose of reducing thermal shock and the like.
As the auxiliary heating means, various heating means such as those using a gas flame, those using an electric furnace, and those using lamp heating can be used alone or in combination.

[0097]

According to the present invention, so as to move by performing energized energizing electrode are sequentially selected from three or more current-carrying electrode is brought into contact with the conductive member, along the energizing area abutting portion Therefore, there is no need to cause relative movement between the current-carrying electrode and the member to be joined as in the related art . Therefore,
Moving parts to reduce the number of maintenance
In addition, the advantage that safety can be improved is obtained.
Can be In addition, by eliminating moving parts,
And the member to be energized can be brought into close contact,
No discharge occurs even when the current is increased, and ceramics
The advantage that it can be joined without being damaged or deteriorated
Points are obtained. Furthermore, according to the present invention, the energized areas are butted.
Because it moves along the part, the entire butting part is energized simultaneously.
Use a smaller capacity power supply than the conventional method
And heat the long butt to the specified temperature
Can be. In particular, according to the first aspect of the present invention,
Multiple types of electrode switching patterns according to changes in the conditions of the joining section
Select an appropriate electrode switching pattern from the
Power supply can be controlled efficiently, and
Even an object to be joined having a simple shape can be easily joined. Ma
The invention described in claim 1 and the invention described in claim 3
According to the above, power is supplied at a short power supply distance at the beginning of power supply.
Electrode switching pattern that gradually increases the energizing distance
Since the required maximum voltage is reduced,
To raise the length of the long butt with the source capacity to the desired temperature
And can improve safety.
Benefits are obtained. According to the second aspect of the present invention,
Energization so that the current area and the energization area
By doing so, if the energized area does not overlap
In comparison, set the resistance value in the energized area as low as possible
Energization can be performed. Therefore, according to the present invention,
Suppresses the temperature drop in the heating section, causing large voltage fluctuations
Without that, advance the joint by moving the energizing area smoothly
This has the advantage that it can be Claim 4
According to the invention, the current-carrying electrodes are divided into a plurality of electrode groups.
Electrode switching pattern and electrode switching pattern for each electrode group
Current is controlled in accordance with the current
If the joint length is very long, or if the shape of the
Efficient and quick butt-joining even in rough cases
There is an advantage that bonding can be performed by heating to a desired temperature.
You. According to the invention of claim 5, according to claim 4,
As in the invention, the energized electrodes are divided into multiple groups and energized.
When controlling, each electrode group has independent communication
Electricity control of each electrode group because it is controlled by the power controller
Can be easily performed. Further
According to the invention of claim 6, communication is performed in a predetermined electrode switching pattern.
Switching the electrodes to be charged and moving the energized area,
Depending on the condition of the butting part, which differs
Change at least one of the
Energizing condition (a) for heating the butted portion almost uniformly
According to a predetermined temperature control pattern,
And at least one of the power-on hold times over time
Change to reduce the thermal shock of the workpiece and promote the reaction of the bonding agent
Use at least one of the energizing conditions (b)
Therefore, it is possible to obtain from the invention described in claims 1 to 5.
In addition to the effect, the two
The butt joints evenly to ensure good contact
Good results are obtained and the thermal shock of the workpiece is reduced.
The effect of obtaining a good joining result.
It is.

[Brief description of the drawings]

FIGS. 1A and 1B are a schematic front view and a schematic plan view, respectively, of a bonding apparatus for carrying out a first embodiment of the method of the present invention.

FIGS. 2A and 2B are diagrams illustrating an example of a power control pattern and an example of an electrode switching pattern applied to the first embodiment, respectively.

FIG. 3A is an electrode arrangement diagram of a second embodiment,
(B) is a diagram showing an example of an electrode switching pattern applied to the second embodiment.

FIGS. 4A and 4B are a schematic cross-sectional view and a vertical cross-sectional view, respectively, of a bonding apparatus for performing a third embodiment of the method of the present invention.

FIG. 5A is an electrode arrangement diagram of a fourth embodiment,
(B) is a diagram showing an example of an electrode switching pattern applied to the fourth embodiment.

FIGS. 6 (A) and (B) are a schematic cross-sectional view and a vertical cross-sectional view, respectively, of a bonding apparatus for performing a fifth embodiment of the method of the present invention.

FIGS. 7A and 7B are a schematic perspective view and a schematic plan view of an application example for implementing a sixth embodiment of the method of the present invention, and FIG. 7C is applied to the sixth embodiment; FIG. 4 is a diagram illustrating an example of a temperature control pattern according to the embodiment.

FIG. 8 is a diagram showing an example of an electrode switching pattern applied in a sixth embodiment.

FIG. 9A is an electrode arrangement diagram of a seventh embodiment,
(B) is a figure which shows the example of the electrode switching pattern applied to the figure.

FIG. 10A is an electrode arrangement diagram of an eighth embodiment obtained by expanding the electrode arrangement in the seventh embodiment shown in FIG. 9A, and FIG. 10B is applied to the eighth embodiment. FIG. 4 is a diagram showing an example of an electrode switching pattern to be performed.

FIG. 11 is a diagram showing an example of another electrode switching pattern applied to the eighth embodiment.

FIG. 12 is a diagram showing an example of still another electrode switching pattern applied to the eighth embodiment.

FIG. 13 is a diagram showing an example of another electrode switching pattern applied to the eighth embodiment.

14A is a diagram showing an arrangement of electrodes of a bonding apparatus for implementing a ninth embodiment of the method of the present invention, FIG. 14B is a sectional view of the bonding apparatus, and FIG. It is a figure showing the power control pattern applied when implementing.

FIG. 15A is a diagram showing an example of an electrode switching pattern applied to the ninth embodiment, and FIG. 15B is a diagram showing a temperature control pattern.

FIG. 16A is an electrode arrangement view of a bonding apparatus for performing a tenth embodiment of the method of the present invention, FIG. 16B is a sectional view of the bonding apparatus, and FIG. It is a figure showing a temperature control pattern applied in a case.

FIG. 17 is a diagram showing an example of an electrode switching pattern applied to the eleventh embodiment shown in FIG.

FIG. 18A is a schematic perspective view of an application example for implementing the eleventh embodiment of the method of the present invention, FIG. 18B is a diagram showing a temperature control pattern applied to this embodiment, (C)
FIG. 4 is a diagram showing an electrode switching pattern applied to the present embodiment.

FIG. 19 is a schematic plan view of a bonding apparatus used in carrying out a twelfth embodiment of the method of the present invention.

FIG. 20A is an electrode layout diagram of a thirteenth embodiment of the method of the present invention, and FIG. 20B is a diagram showing an example of an electrode switching pattern applied to the present embodiment.

FIG. 21A is a schematic perspective view of an application example for carrying out the fourteenth embodiment of the method of the present invention, and FIG. 21B is an electrode arrangement diagram.

FIG. 22 is a diagram showing an electrode switching pattern applied to the fourteenth embodiment shown in FIG.

FIG. 23A is a diagram showing an electrode arrangement of a fifteenth embodiment of the method of the present invention, and FIG. 23B is a diagram showing an example of an electrode switching pattern applied to the present embodiment.

FIG. 24 (A) is a schematic front view of an application example for carrying out the sixteenth embodiment of the method of the present invention, and FIG. 24 (B) is a schematic plan view.

FIG. 25 is a diagram showing an electrode switching pattern applied to the sixteenth embodiment shown in FIG. 24;

FIG. 26A is a schematic front view of an application example for carrying out the seventeenth embodiment of the method of the present invention, and FIG. 26B is a schematic plan view.

FIG. 27 is a diagram showing an electrode switching pattern applied to the seventeenth embodiment shown in FIG. 26;

FIG. 28A is a schematic front view of an application example for carrying out the eighteenth embodiment of the method of the present invention, FIG. 28B is an electrode arrangement diagram, and FIG. It is a figure showing an electrode switching pattern applied.

FIG. 29 (A) is a schematic front view of an application example for implementing the nineteenth embodiment of the method of the present invention, FIG. 29 (B) is an electrode arrangement diagram, and FIG. It is a figure showing an electrode switching pattern applied.

FIGS. 30A and 30B are a schematic plan view and a schematic front view for explaining an arrangement example of another electrode, and FIG. 30C is a schematic view for explaining an arrangement example of still another electrode. It is a front view.

FIG. 31 (A) is a schematic plan view of a bonding apparatus for carrying out a twentieth embodiment of the method of the present invention, (B) is a schematic front view of the bonding apparatus, and (C) is the present embodiment. Is the power control pattern applied to

FIG. 32 is a diagram showing an electrode switching pattern applied to the twentieth embodiment shown in FIG. 31;

FIGS. 33 (A) and (B) are a schematic side view and a schematic plan view of an application example of the twenty-first embodiment of the method of the present invention;
(C) is a diagram showing a temperature control pattern applied to the present embodiment.

FIG. 34 is a diagram showing an example of an electrode switching pattern applied to the twenty-first embodiment shown in FIG.

35A and 35B are a schematic perspective view and a schematic side view of an application example of the twenty-second embodiment of the method of the present invention,
(C) is a diagram showing a temperature control pattern applied to the present embodiment.

FIG. 36 is a diagram showing an example of an electrode switching pattern applied to the twenty-second embodiment shown in FIG.

[Explanation of symbols]

1a, 1b Ceramics 2 Bonding agent 20 Heating insert material 3a. 3b Holding jigs 4a to 4h, 41 to 4N, 41 'to 4N', 9a to 9
e, 9a'-9e ', 91-9N, 91'-9N', A
1 to AN, B1 to BN, C1 to CN, a1 to aN, b1
To bN, c1 to cN energizing electrode 5, 5A, 5B energizing control device 51 electrode switching unit 51a to 51h switching terminal 52 power supply unit 53 output detection unit 54 control unit 55 display unit 56 recording unit 7 heat insulating material 8 gas burner 80 electric furnace

──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Masashi Numano 2-1-1, Tagawa, Yodogawa-ku, Osaka-shi, Osaka Dainai Co., Ltd. No. 11 Daihen Co., Ltd. (72) Inventor Natsumi Miyake 2-1-1 Tagawa, Yodogawa-ku, Osaka City, Osaka Prefecture Daihen Co., Ltd. (56) References JP-A-62-235269 (JP, A) (58) Survey Field (Int. Cl. ⁷ , DB name) C04B 37/00-37/02

Claims (6)

(57) [Claims] 1. A joining agent is interposed between butting surfaces of two objects to be joined, at least one of which is made of ceramics , or a joining material is joined with a heating insert material made of a conductive ceramic as a base. Make up part, front
The object to be joined, the joining agent and the heating insert material
A part to be energized to generate Joule heat
Apply three or more current-carrying electrodes on the surface of the
Contact, and energize the member to be energized through the energizing electrode.
The Joule heat generated from the current-carrying member
The above-mentioned bonding agent is heated and reacted to form the two objects to be bonded.
An electrical method of joining ceramic to be joined, said when energizing the energization members, the three or more current
Through at least one pair of conducting electrodes selected in sequence from the electrodes.
And a current generated when current flows between the at least one pair of current-carrying electrodes.
Electrode switching pattern for moving an electric field along the butting portion
Prepare multiple types of nozzles to meet the changing conditions of the butt
Electrode switching from multiple types of electrode switching patterns
Select a pattern and short at the beginning of energization
Energize at energizing distance and then gradually increase energizing distance
To select the electrode switching pattern to
The two joined parts are moved while moving along the butting portion.
An electrical joining method for ceramics that joins bodies . 2. A butt joint between two butted surfaces of at least one of which is made of ceramics with a bonding agent interposed therebetween , or a heating insert material made of conductive ceramics and a bonding agent interposed therebetween. Make up part, front
The object to be joined, the joining agent and the heating insert material
A part to be energized to generate Joule heat
Apply three or more current-carrying electrodes on the surface of the
Contact, and energize the member to be energized through the energizing electrode.
The Joule heat generated from the current-carrying member
The above-mentioned bonding agent is heated and reacted to form the two objects to be bonded.
An electrical method of joining ceramic to be joined, said when energizing the energization members, the three or more current
Through at least one pair of conducting electrodes selected in sequence from the electrodes.
And a current generated when current flows between the at least one pair of current-carrying electrodes.
Electrode switching pattern for moving an electric field along the butting portion
Prepare several types of power supply areas so that the current-carrying area before and the current-carrying area partially overlap.
Select the electrode switching pattern and set the energization area to the
While moving along the butt,
Electrical method of joining ceramics to be joined. 3. An electric current is applied at a short energizing distance at the initial stage of energization.
Select the electrode switching pattern to perform
3. The method according to claim 2, wherein the electrode switching pattern is selected so as to increase the distance . 4. A butt joint between two butted surfaces of at least one of which is made of ceramics with a bonding agent interposed therebetween , or a heating insert material made of conductive ceramics and a bonding agent interposed therebetween. Make up part, front
The object to be joined, the joining agent and the heating insert material
A part to be energized to generate Joule heat
A large number of current-carrying electrodes are abutted on the surface of the
And apply current to the member to be energized through the energizing electrode.
And Joule heat generated from the member to be energized
The two bonding objects are bonded by heating and reacting the bonding agent.
An electrical method of joining ceramics, the multi three or more powered electrode as one electrode group
Number of energized electrodes are divided into a plurality of electrode groups, and when energized to the energized member, the energized electrodes belong to each electrode group.
Between at least one pair of electrodes selected from the
To be generated when a current is applied between at least a pair of energized electrodes selected.
Electrode switching for moving the current-carrying area along the butt
A plurality of patterns are prepared for each electrode group, and a predetermined electrode switching pattern and a predetermined
The energization is controlled according to the energization conditions, and the energization region is
While moving along the butt,
Electric joining method of ceramics to be joined. 5. The plurality of electrode groups are independent of each other.
5. The power supply control according to claim 4, wherein the power supply is controlled by the power supply control device.
Electric joining method of ceramics. 6. (a) Butting portions that vary depending on the energizing position
Depending on the conditions of
At least one of them is changed to heat the butt almost uniformly
And (b) a predetermined temperature control pattern
According to at least the current, power and current holding time
One of them is changed over time to change the heat of the
Energizing conditions to reduce impact and promote the reaction of the bonding agent
And at least one of the electrode switching patterns
And energizing the member to be energized.
3. The method for electrically joining ceramics according to any one of the above items 3.