JP3105271B2 - Method and apparatus for rinsing and cleaning an object to be cleaned - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for rinsing an object to be cleaned, which has been cleaned using a cleaning solution comprising a hydrocarbon solvent or a silicon solvent.
The object of the present invention is to effectively remove a cleaning liquid adhering to an object to be cleaned and reliably recover the cleaning liquid by performing a cleaning operation on the object to be cleaned such as a silk screen, a mechanical component, an electronic component, and a printed circuit board.

[0002]

2. Description of the Related Art Conventionally, silk screens, mechanical parts, electronic parts, printed circuit boards, and the like have been used for cleaning because they are nonflammable and have no danger of ignition, and are excellent in cleaning power.
Generally, CFCs and chlorine-based solvents have been used. However, the use of these solvents has been regulated because of the destruction of the global environment.

As an alternative to the cleaning method using chlorofluorocarbon or a chlorine-based solvent, an aqueous cleaning method using water as a base is considered. However, since the water-based cleaning has a low cleaning ability, a long time is required for the cleaning operation, resulting in poor working efficiency. In addition, water-based cleaning
There is no accurate method for treating sewage containing sewage removed from the object to be washed, and there is a possibility that a new pollution problem different from the case of using a chlorofluorocarbon-based solvent may occur.

[0004] Solvents such as silicon solvents and hydrocarbon solvents are considered as non-aqueous solvents that do not use chlorofluorocarbons or chlorine solvents because of their excellent detergency.

However, these hydrocarbon-based solvents or silicon-based solvents have a danger of ignition, and it is difficult to perform heating or steam cleaning in order to remove the solvent attached to the object to be cleaned after the solvent cleaning. Met. Therefore, in order to remove the hydrocarbon-based solvent or silicon-based solvent attached to the object to be cleaned, blow air onto the object to be cleaned,
It has been practiced to blow off non-aqueous flammable solvents.

The air containing a large amount of the non-aqueous flammable solvent is exhausted to the outside as it is. However, the consumption of the solvent is not only uneconomical, but also the danger of air pollution and ignition. It is not preferable from the viewpoint of the above.

[0007]

DISCLOSURE OF THE INVENTION The present invention is to solve the above-mentioned problems. In order to prevent environmental pollution, a hydrocarbon-based solvent or a silicon-based solvent is used without using chlorofluorocarbon or a chlorine-based organic solvent. While using a solvent as a cleaning solution,
An object of the present invention is to provide a safe and reliable rinsing and washing method which is not economical and has no risk of ignition and no risk of ignition.

[0008]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention provides a cleaning step of cleaning an object to be cleaned by using a cleaning liquid substantially consisting of a hydrocarbon solvent or a silicon solvent; A rinsing step of immersing the object to be washed with the rinsing liquid containing a perfluorinated liquid as a main component, and rinsing the object to be cleaned after the rinsing with the perfluorinated liquid as a main component. using steam, until the object to be cleaned reaches the steam temperature, by condensing adhered steam rinsing to be cleaned, and the rinsing wash solution is accompanied by the cleaning liquid of the cleaning process, the cleaning liquid from the cleaning object And a steam cleaning step of drying the object to be cleaned when the temperature reaches the steam temperature.

[0009] In the cleaning method may be characterized in that it has a higher cleaning Engineering for injecting further washing liquid composed mainly of completely fluorinated liquid to be cleaned.

[0010] The invention of a separate cleaning device is a hydrocarbon
Cleaning solution consisting essentially of a system solvent or a silicon solvent
The object to be cleaned by washing with, complete means for immersing the perfluorinated liquid to rinse the cleaning solution mainly composed, a cleaning tank accommodating a rinsing cleaning liquid mainly containing fully fluorinated liquid, at least a steam generating heater A cooling coil for steam cooling and condensation, and a steam generating tank containing a rinse liquid containing a perfluorinated liquid as a main component, the tank including an openable / closable lid for controlling the pressure of steam. It is characterized by the following.

In the above-described cleaning apparatus, the cleaning tank and the steam generating tank are connected via a supply port provided with an on-off valve for supplying a vapor of a rinsing cleaning liquid containing the perfluorinated liquid as a main component. May be available.

[0012]

In the method of the present invention, the rinsing operation of an object to be cleaned such as a silk screen, a mechanical part, an electronic part, a printed circuit board, etc. is performed by first using a non-aqueous flammable solvent. The object to be cleaned is washed to remove dirt. This wash
A hydrocarbon solvent may be used, or a silicon solvent may be used depending on the purpose of cleaning.

Next, the object to be cleaned to which the hydrocarbon-based solvent or the silicon-based solvent has adhered by the above-described cleaning means is placed in a rinsing cleaning tank to which a rinsing cleaning liquid mainly containing a perfluorinated liquid is supplied. The object to be cleaned, which has been stored and to which the cleaning liquid is attached, is immersed in a rinsing cleaning liquid containing a perfluorinated liquid as a main component to perform rinsing cleaning.

The rinsing using the perfluorinated liquid is performed by immersing the object to be cleaned in a cleaning tank containing the perfluorinated liquid. This immersion cleaning may be performed by applying ultrasonic vibration, rocking or the like.

Next, the object to be cleaned which has been subjected to the immersion rinsing cleaning is subjected to steam cleaning with rinsing steam containing a perfluorinated liquid as a main component. By the steam cleaning, the rinse liquid adhered to the object to be cleaned and condensed is separated from the object to be cleaned together with the cleaning liquid, whereby the cleaning liquid can be removed from the object to be cleaned. Further, in the steam cleaning, when the object to be cleaned is heated to the steam temperature, the steam cleaning is completed and the object to be cleaned can be dried, so that the steam cleaning step can be a drying step.

The rinsing liquid used for the steam cleaning is as follows.
Although a liquid containing a perfluorinated liquid as a main component is used, a perfluorinated liquid is a compound in which all substituents capable of bonding to carbon atoms in the structure are fluorine atoms. However, it is difficult to obtain such a pure product in industrial production, and hydrogen, chlorine, bromine, etc., as some impurities, are not contained.
It is unavoidable that about 5 to 5.0 wt% is contained, and these are practically no problem at all. In addition, the perfluorinated liquid is nonflammable, inert, non-toxic, odorless, has high safety, and does not substantially contain chlorine, so that it does not cause environmental destruction.

Therefore, even if the above-mentioned cleaning solution is mixed with the rinsing cleaning solution containing a perfluorinated liquid as a main component, only the fluorinated solvent will not be dissolved, and separation of the cleaning solution and the rinsing cleaning solution will be described later. It can be done easily.

Examples of such a fully fluorinated liquid include C
_{3 F 6, C 4 F 8} , C 5 F 10, C 6 F 12, C 6 F 12 O, C
_{6 F 14, C 7 F 14} , C 7 F 14 O, C 7 F 16, C 8 F 16 O, C 8
Those represented by molecular formulas such as F ₁₈ , C ₉ F ₁₈ O, and C ₁₀ F ₂₀ O;

[0019]

Embedded image

A structure having the following structure is exemplified.

Next, by the rinsing cleaning mainly containing the above-mentioned perfluorinated liquid, the cleaning liquid consisting of a hydrocarbon solvent or a silicon-based solvent adhering to the object to be cleaned is separated from the object to be cleaned. Mix into rinse fluid. However, since the rinse liquid mainly containing the perfluorinated liquid is inert and does not dissolve other liquids other than the fluorinated solvent, the rinse liquid and the rinse liquid are easily separated and each of them is recovered. It becomes possible.

This recovery can be achieved, for example, by using a commercially available product of a perfluorinated liquid having a specific gravity at 25 ° C. of about 1.6 to 2.
Although it is 0, the cleaning liquid composed of the hydrocarbon-based solvent or the silicon-based solvent has a much lower specific gravity than the perfluorinated liquid. Therefore, the perfluorinated liquid is settled by the difference in specific gravity, and the cleaning liquid and the rinsing cleaning liquid can be separated. Further, by utilizing this difference in specific gravity, the washing solution and the rinsing washing solution may be separated by a centrifugal separation method. In addition, by utilizing the difference in boiling point between the cleaning liquid and the rinsing cleaning liquid, distillation regeneration may be performed to regenerate the cleaning liquid and the rinsing cleaning liquid.

As described above, unlike the conventional rinsing cleaning using water, the cleaning liquid adhering to the object to be cleaned is not discarded as it is together with the waste water, and the recovery of the cleaning liquid and the rinsing cleaning liquid can be reliably performed. This makes it possible to regenerate the wastewater, thereby greatly reducing the consumption of the cleaning liquid, making the cleaning operation economical, and eliminating or extremely simplifying the wastewater treatment facility.

In still another aspect of the present invention, an object to be cleaned to which a cleaning liquid comprising a hydrocarbon solvent or a silicon solvent has adhered is rinsed and washed with a rinsing liquid mainly containing a perfluorinated liquid. The cleaning is performed by spraying a rinse liquid onto the object to be cleaned. This rinsing cleaning liquid is performed by spraying a cleaning liquid composed of a hydrocarbon-based solvent or a silicon-based solvent adhered to the object to be cleaned from the nozzle under pressure or spraying it in a shower. Most of the cleaning liquid adhered to the object to be cleaned by spraying the rinsing cleaning liquid is removed by physical pressure of the rinsing cleaning liquid, integration by surface tension, or the like.

[0025] The cleaning liquid comprising a hydrocarbon-based solvent or a silicon-based solvent mixed with the rinsing cleaning liquid does not dissolve in the rinsing cleaning liquid except for the fluorine-based solvent.
It can be separated from water with a difference in specific gravity over time, or separated by centrifugation, can be regenerated by distillation, and the washing solution can be reused as it is, not only economically, but also economically, There is no problem such as pollution caused by drainage.

[0026]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIG. 1. (1) is a cleaning tank containing a rinsing cleaning liquid (2) containing a perfluorinated liquid as a main component. And it is formed separately from the steam generating tank (3) which also contains the rinsing and cleaning liquid (2) mainly composed of a perfluorinated liquid. And
A heater (4) for generating steam is provided in the rinsing liquid (2) of the steam generating tank (3). Further, a cooling coil (6) for cooling and condensing the non-combustible steam (5) is provided on the inner surface of the upper part of the steam generating tank (3), and the cooling coil (6) and the filled rinse fluid (2) are provided. Between the inner lid (7) having the appropriate weight
Is installed so as to be openable and closable to control the pressure of the nonflammable steam (5).

The steam generating tank (3) is provided with an on-off valve (8).
Is connected to the cleaning tank (1) through a supply port (10) provided with a gas, and the vapor of the rinsing cleaning liquid (2) containing a perfluorinated liquid as a main component.
(5) can be supplied. The washing tank (1) is provided with a vertical moving means (11) using an air cylinder, an oil cylinder, etc., on the side of the steam generating tank (3). Then, a vertically moving rod (12) is connected to the vertically moving means (11),
The washing table (13) fixed to the lower end of the vertically movable rod (12) can be moved up and down. In addition, an inlet / outlet (16) for an object to be cleaned (15) is provided at an upper portion of the cleaning tank (1) through a cooling coil (14) for condensing vapor (5) of the rinsing liquid (2). In the section (16), an entrance for entering and exiting the object to be cleaned (15)
(17) is formed, and the entrance (17) can be closed by a shutter (18). In addition, doorway (1
7), a mounting table (2) for mounting an object to be cleaned (15).
0) is provided. (21) in the figure is a water separator.

In the apparatus constructed as described above, in order to carry out rinsing cleaning, cleaning is performed with a hydrocarbon-based solvent or a silicon-based solvent, and the object to be cleaned (15) to which these solvents are adhered.
Is immersed in a rinse liquid (2) containing a perfluorinated liquid as a main component. This immersion is performed from the mounting table (20) to the entrance (17).
The object to be cleaned (15) is inserted into the entrance (16) through the, and the vertical movement means (11) is moved up to move the cleaning table (13) into and out of the entrance.
The cleaning object (15) is placed on the cleaning stand (13), and the cleaning is performed by descending to the rinsing cleaning liquid (2). The cleaning by immersion in the rinsing cleaning liquid (2) may be performed by moving the cleaning table (13) up and down little by little, or by performing ultrasonic cleaning by operating the ultrasonic vibrator (22).

The rinsing of the object to be cleaned which has been cleaned with a hydrocarbon solvent or a silicon solvent is performed by steam cleaning in addition to the immersion rinsing performed by immersion in the rinsing cleaning liquid (2) as described above. .

Rinsing by steam cleaning is performed by introducing the steam generated in the steam generating tank (3) into the cleaning tank (1) by opening the on-off valve (8).

The rinsing of the object to be cleaned, which has been cleaned with a hydrocarbon-based solvent or a silicon-based solvent, is performed in addition to the above-described immersion rinsing cleaning and steam rinsing cleaning. It can be done by spraying.

The cleaning performed by spraying the rinsing cleaning liquid (2) containing the perfluorinated liquid as a main component onto the object (15) to be cleaned is performed by opening the upper end opening (23) of the cleaning tank (1) as shown in FIG. Lid (2
Closed in 4), the rinsing solvent tank (25) filled with the rinsing cleaning liquid (2) containing a perfluorinated liquid as a main component and the lower bottom of the cleaning tank (1) are connected by a communication path (26). ing.

A rinsing cleaning liquid is provided on the inner surface of the cleaning tank (1).
The injection nozzle (27) of (2) is formed. The injection nozzle (27) has an injection pump connected to the rinsing solvent tank (25).
(28) is connected through an outlet pipe (29), and the high-pressure rinsing cleaning liquid (2) is injected by the injection pump (28) into the injection nozzle (27).
To be rinsed, thereby enabling the object (15) to be rinsed and cleaned.

In the above-described structure, the rinsing of the object (15) is performed by inserting the object (15) into the rinsing tank (2) and then rinsing the object (15). ), The rinsing cleaning liquid (2) is jetted at a high pressure onto the article (15) to be cleaned from the jet nozzle (27). By this injection, the rinse liquid (2)
Contacts the object to be cleaned (15) and cleans the object to be cleaned (15).

Further, by this rinsing cleaning, the cleaning liquid composed of a hydrocarbon-based solvent or a silicon-based solvent mixed into the rinsing cleaning liquid (2) containing a perfluorinated liquid as a main component:
Since the specific gravity is lower than that of the rinse liquid (2) containing a perfluorinated liquid as a main component, the liquid is located in the upper layer of the cleaning tank (1), thereby facilitating separation and recovery.

[0036]

According to the present invention, as described above, in order to prevent environmental pollution, rinsing and washing are performed using non-aqueous solvents such as silicon solvents and hydrocarbon solvents as cleaning liquids without using chlorofluorocarbon or chlorine solvents. In operation, there is no danger of ignition due to the use of a rinsing and cleaning liquid containing a perfluorinated liquid as a main component.

Further, it is possible to reliably collect the cleaning liquid, and it is economical, and also enables safe and reliable rinsing without any risk of air pollution and ignition.

[Brief description of the drawings]

FIG. 1 is a sectional view,

FIG. 2 is a cross-sectional view of another embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Cleaning tank 2 Rinse cleaning liquid 3 Steam generation tank 4 Heater 5 Steam 6 Cooling coil 7 Inner lid

────────────────────────────────────────────────── ─── Continued on the front page (51) Int.Cl. ⁷ Identification code FI C11D 17/00 C11D 17/00 H05K 3/26 H05K 3/26 (72) Inventor Yasutaka Imajo 1-chome, Shibaura, Minato-ku, Tokyo No. 1 Inside the Toshiba head office

Claims (4)

(57) [Claims] 1. A cleaning step of cleaning an object to be cleaned using a cleaning liquid substantially consisting of a hydrocarbon-based solvent or a silicon-based solvent; A rinsing step of immersing and rinsing in the rinsing liquid to be rinsed, and the object to be cleaned after the rinsing, using a rinsing steam containing a perfluorinated liquid as a main component, until the object to be cleaned reaches the vapor temperature, by adhering the vapor rinse the object to be cleaned condensate, said rinsing wash solution is accompanied by the cleaning liquid of the cleaning process, the cleaning liquid is separated and removed from the object to be cleaned,
A rinsing step of drying the object to be cleaned when the temperature of the object reaches the steam temperature. 2. A method of cleaning according to claim 1, wherein rinsing method object to be cleaned, characterized in that it comprises a higher cleaning Engineering for injecting further washing liquid composed mainly of completely fluorinated liquid to be cleaned. 3. A hydrocarbon solvent or a silicon solvent.
The object to be cleaned by washing with a cleaning solution consisting essentially of, and means for immersing the rinse cleaning liquid mainly composed of fully fluorinated liquid, a cleaning tank accommodating a rinsing cleaning liquid mainly containing fully fluorinated liquid At least a heater for steam generation, a cooling coil for steam cooling and condensation, and an inner lid openably and closably provided for controlling pressure of steam, and containing a rinse liquid mainly containing a perfluorinated liquid. An apparatus for rinsing and cleaning an object to be cleaned, comprising a steam generating tank. 4. The cleaning apparatus according to claim 3, wherein the cleaning tank and the steam generating tank are connected via a supply port provided with an on-off valve for supplying steam of the rinsing cleaning liquid containing the perfluorinated liquid as a main component. A rinsing and cleaning apparatus for an object to be cleaned, which is connected.