JP3115145B2 - Single crystal manufacturing method - Google Patents
Single crystal manufacturing methodInfo
- Publication number
- JP3115145B2 JP3115145B2 JP05045376A JP4537693A JP3115145B2 JP 3115145 B2 JP3115145 B2 JP 3115145B2 JP 05045376 A JP05045376 A JP 05045376A JP 4537693 A JP4537693 A JP 4537693A JP 3115145 B2 JP3115145 B2 JP 3115145B2
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- seed
- single crystal
- inner diameter
- seed tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Crystals, And After-Treatments Of Crystals (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は単結晶の製造方法、特に
はブリッジマン法によって光学用単結晶としてのニオブ
酸リチウムおよびシンチレータ用結晶としてのゲルマニ
ウム酸ビスマスの製造方法に関するものである。The present invention relates to a method for producing a single crystal, and more particularly to a method for producing lithium niobate as an optical single crystal and bismuth germanate as a scintillator crystal by the Bridgman method.
【0002】[0002]
【従来の技術】光学用単結晶としてのニオブ酸リチウム
(以下LNと略記する)およびシンチレータ用結晶であ
るゲルマニウム酸ビスマス(以下BGOと略記する)の
製造は従来、チョクラルスキー法で行なわれていたので
あるが、最近ではブリッジマン法で育成する方法が提案
されており、これは種管の中に収納された種結晶を用い
て育成が行なわれている(特開平2-271989号、特開平3-
290390号公報参照)。2. Description of the Related Art Conventionally, lithium niobate (hereinafter abbreviated as LN) as an optical single crystal and bismuth germanate (hereinafter abbreviated as BGO) as a scintillator crystal have been produced by the Czochralski method. Recently, however, a method of growing by the Bridgman method has been proposed, which is performed by using a seed crystal stored in a seed tube (Japanese Patent Laid-Open No. 2-271989, Kaihei 3-
No. 290390).
【0003】しかし、ブリッジマン法では結晶の成長速
度がチョクラルスキー法に比較して小さいために、種管
を用いると種管の小さな径から結晶の胴体部の径までに
達する時間が長くなり、生産性が悪くなるという欠点が
ある。したがってこの欠点を無くした例を本発明者らは
四ほう酸リチウム単結晶の製造方法として提案してお
り、結晶の胴体径と等しい径の種結晶を用いて結晶を育
成する実施例を含めて、種管の内径を大きくした実施例
を開示している(特願平4-80430 号明細書参照)。However, since the crystal growth rate of the Bridgman method is lower than that of the Czochralski method, the use of a seed tube increases the time from the small diameter of the seed tube to the diameter of the body of the crystal. However, there is a disadvantage that productivity is deteriorated. Therefore, the present inventors have proposed an example of eliminating this disadvantage as a method for producing a lithium tetraborate single crystal, including an example of growing a crystal using a seed crystal having a diameter equal to the body diameter of the crystal, An embodiment in which the inner diameter of the seed tube is increased is disclosed (see Japanese Patent Application No. 4-80430).
【0004】[0004]
【発明が解決しようとする課題】しかし、LNおよびB
GO結晶を内径が大きな径を有する種管から育成したと
ころ、種管の径が5mm程度の大きさ迄は特に問題はなか
ったけれども、この種管の径を50mm以上の大きなものと
したところ、種部から胴体部に達する時間を著しく短縮
させることができたけれども、この場合には得られる単
結晶にクラックが入るという問題が生じ、この対策が必
要とされることが判かった。However, LN and B
When the GO crystal was grown from a seed tube having a large inner diameter, there was no particular problem up to a seed tube diameter of about 5 mm, but when the seed tube diameter was increased to 50 mm or more, Although the time from the seed portion to the body portion could be remarkably reduced, in this case, there was a problem that the obtained single crystal was cracked, and it was found that this measure was required.
【0005】[0005]
【課題を解決するための手段】本発明はこのような不
利、問題点を解決した単結晶の製造方法に関するもので
あり、これはブリッジマン法で融液から種結晶を用いて
単結晶を育成させる方法において、種管の内径をD(m
m)とし、使用する種結晶の厚さをT(mm)としたとき
に、このDとTが式 T<(3.75×103/D)−15 の関係を満たすようにしてなることを特徴とするもので
ある。SUMMARY OF THE INVENTION The present invention relates to a method for producing a single crystal which solves such disadvantages and problems, and which grows a single crystal from a melt using a seed crystal by the Bridgman method. In the method, the inner diameter of the seed tube is set to D (m
m), and when the thickness of the seed crystal to be used is T (mm), this D and T satisfy the relation of T <(3.75 × 10 3 / D) −15. It is assumed that.
【0006】すなわち、本発明者等はブリッジマン法で
の単結晶の育成方法について種々検討した結果、これに
ついては種管の内径を種々変化させたルツボを用意して
単結晶の製造を行なったところ、種管の内径をD(m
m)、使用する種結晶の厚さをT(mm)としたときの
D、Tの関係を T<(3.75×103/D)−15 が満足するようにすると結晶中のクラック発生を防止で
きることを見出して本発明を完成させた。以下にこれを
さらに詳述する。That is, the present inventors have made various studies on the method of growing a single crystal by the Bridgman method, and found that a single crystal was manufactured by preparing a crucible in which the inner diameter of a seed tube was variously changed. However, the inner diameter of the seed tube is D (m
m), when the thickness of the seed crystal used is T (mm), the relationship between D and T is such that T <(3.75 × 10 3 / D) −15 is satisfied, thereby preventing cracks in the crystal. The inventors have found out what can be done and completed the present invention. This is described in more detail below.
【0007】[0007]
【作用】本発明は単結晶の製造方法に関するものであ
り、これはブリッジマン法で融液から種結晶を用いて単
結晶を成長させる方法において、種管の内径をD(mm)
とし、使用する種結晶の厚さをT(mm)としたときに、
このDとTとを式 T<(3.75×103/D)−15 の関係を満たすようにしてなることを特徴とするもので
あるが、これによれば結晶中のクラックの発生を防止す
ることができるので、目的とする単結晶を歩留りよく得
ることができるという有利性が与えられる。The present invention relates to a method for producing a single crystal, which is a method for growing a single crystal from a melt by a Bridgman method using a seed crystal, wherein the inner diameter of the seed tube is D (mm).
And when the thickness of the seed crystal to be used is T (mm),
It is characterized in that D and T satisfy the relationship of T <(3.75 × 10 3 / D) −15. According to this, the occurrence of cracks in the crystal is prevented. Therefore, there is an advantage that a target single crystal can be obtained with high yield.
【0008】本発明による単結晶の製造は前記したよう
にブリッジマン法で行なわれる。このブリッジマン法は
公知のものであり、これは例えば図1に示した装置で行
なわれる。図1はブリッジマン法による単結晶成長装置
の縦断面図を示したものであるが、これは電気炉1の中
には白金ルツボ2が設置されており、この白金ルツボに
仕込まれた多結晶体は図示されていないヒーター部で加
熱されて融液3としてルツボ2の中に保持されている。
また、この白金ルツボ2にはその下方に種管4が設置さ
れており、その先端部に種結晶5が挿入されている。The production of a single crystal according to the present invention is performed by the Bridgman method as described above. This Bridgman method is known, and is carried out, for example, with the apparatus shown in FIG. FIG. 1 is a longitudinal sectional view of a single crystal growing apparatus using the Bridgman method, in which a platinum crucible 2 is installed in an electric furnace 1 and a polycrystal charged in the platinum crucible. The body is heated by a heater (not shown) and held as a melt 3 in the crucible 2.
A seed tube 4 is provided below the platinum crucible 2, and a seed crystal 5 is inserted at the tip thereof.
【0009】この装置による単結晶の成長は、この種結
晶部の温度を結晶の融点よりやや高めに保持し、種結晶
の一部を溶融することで融液4を種結晶に完全に接触さ
せ、これをより低温に保持されている炉1の下方に育成
する結晶に応じた速度、例えばLN結晶では 0.3〜10mm
/時、BGO結晶では 0.1〜5mm/時の降下速度で約15
0mm 降下させると、融液3がルツボ2の中で単結晶に育
成されるので、降下後に炉の温度を常温まで下げてから
白金ルツボを取り出し、白金を破って取り出せばよい。In the growth of a single crystal by this apparatus, the temperature of the seed crystal portion is maintained slightly higher than the melting point of the crystal, and a part of the seed crystal is melted to bring the melt 4 completely into contact with the seed crystal. The speed of this is adjusted according to the crystal grown below the furnace 1 maintained at a lower temperature, for example, 0.3 to 10 mm for an LN crystal.
/ H, about 15 mm at a descent speed of 0.1 to 5 mm / h for BGO crystal.
When the melt 3 is lowered by 0 mm, the melt 3 grows into a single crystal in the crucible 2, so that the platinum crucible may be taken out after the furnace temperature is lowered to room temperature after descending, and the platinum may be broken and taken out.
【0010】しかし、この場合、単結晶の生産性をよく
するために種管4の内径を大きいものとすると育成され
た単結晶にクラックの生ずることが確認されているの
で、本発明者らはこの種管4の内径をD(mm)とし、種
結晶5の厚さをT(mm)とし、この種管4の内径Dおよ
び種結晶の厚さTを種々変化させたルツボを用意し、結
晶育成開始時の温度とルツボ位置を変えて単結晶を育成
したところ、このDとTについて T≧(3.75×103/D)−15 という条件では種付け時の熱応力が解消されていないた
めか育成された単結晶にクラックが発生するけれども、
このDとTが T<(3.75×103/D)−15 という関係を満たしているときには育成された単結晶に
クラックが発生しないことを見出した。However, in this case, if the inner diameter of the seed tube 4 is increased in order to improve the productivity of the single crystal, it has been confirmed that cracks occur in the grown single crystal. A crucible in which the inner diameter of the seed tube 4 is D (mm), the thickness of the seed crystal 5 is T (mm), and the inner diameter D of the seed tube 4 and the thickness T of the seed crystal are variously changed is prepared. When a single crystal was grown by changing the temperature at the start of crystal growth and the crucible position, the thermal stress at the time of seeding was not eliminated under the condition of T ≧ (3.75 × 10 3 / D) −15 for D and T. Although cracks occur in the grown single crystal,
When D and T satisfy the relationship of T <(3.75 × 10 3 / D) −15, it was found that no crack was generated in the grown single crystal.
【0011】したがって、このブリッジマン法による単
結晶の育成において、種管の内径Dと種結晶の厚さTを
上記した T<(3.75×103/D)−15 という関係を満たすようにし、この種管の内径Dに応じ
て種結晶を所望の厚さまで溶かして種結晶が種管の中で
変形するようにすれば、この熱応力が解消でき、したが
って育成された単結晶へのクラックの発生が防止される
という有利性が与えられる。Therefore, in growing a single crystal by the Bridgman method, the inner diameter D of the seed tube and the thickness T of the seed crystal are set so as to satisfy the relationship of T <(3.75 × 10 3 / D) −15, If the seed crystal is melted to a desired thickness in accordance with the inner diameter D of the seed tube so that the seed crystal is deformed in the seed tube, the thermal stress can be eliminated, and thus cracks in the grown single crystal can be eliminated. The advantage is given that the occurrence is prevented.
【0012】なお、この種管の内径は白金ルツボの胴体
部の内径と異なってもよいが、ルツボの加工性が良くな
るし、コーン部を形成する必要がなくなり、生産性もよ
くなるということからは、種管の内径はルツボの胴体部
の内径と等しくした形状とすることが好ましい。Although the inner diameter of the seed tube may be different from the inner diameter of the body of the platinum crucible, the workability of the crucible is improved, the necessity of forming a cone is eliminated, and the productivity is improved. It is preferable that the inner diameter of the seed tube is equal to the inner diameter of the body of the crucible.
【0013】[0013]
【実施例】つぎに本発明の実施例、比較例をあげる。 実施例1、比較例1 純度4Nの炭酸リチウムと五酸化ニオブとを1:1(モ
ル比)の割合で混合したのち、 1,200℃で仮焼し、これ
を内径80mm、長さ 180mmの2個の白金ルツボにそれぞれ
2,300gづつ装入した。Next, examples of the present invention and comparative examples will be described. Example 1, Comparative Example 1 After mixing lithium carbonate having a purity of 4N and niobium pentoxide at a ratio of 1: 1 (molar ratio), the mixture was calcined at 1,200 ° C., and two pieces having an inner diameter of 80 mm and a length of 180 mm were obtained. Each of the platinum crucibles
2,300g was charged at a time.
【0014】ついで、これらのルツボに内径が77mmの種
管に収納した直径77mm、厚さが50mmの円盤状種結晶を挿
入し、種結晶を完全に溶かさないように炉のピーク温度
を 1,300℃とし、種結晶近傍の温度をLN結晶の融点よ
りやや高目とし、2個のルツボに対し育成位置を20mm変
えて種結晶を一部溶解し、降下速度 0.5mm/時で結晶を
育成し、育成後白金ルツボを破って種結晶の厚みと育成
結晶中のクラックの有無をしらべたところ、育成位置が
高い方は種結晶の厚さが25mmでクラックはみられなかっ
たが、育成位置の低い方は種結晶の厚さが42mmで育成結
晶中にクラックがみられた。Then, a disc-shaped seed crystal having a diameter of 77 mm and a thickness of 50 mm housed in a seed tube having an inner diameter of 77 mm is inserted into these crucibles, and the peak temperature of the furnace is set at 1,300 ° C. so that the seed crystal is not completely melted. The temperature near the seed crystal is slightly higher than the melting point of the LN crystal, the growth position is changed by 20 mm for the two crucibles, the seed crystal is partially melted, and the crystal is grown at a descent rate of 0.5 mm / hour. After growing the platinum crucible and examining the thickness of the seed crystal and the presence or absence of cracks in the grown crystal, the higher the growing position, the seed crystal thickness was 25 mm and no cracks were observed, but the lower growing position On the other hand, the seed crystal had a thickness of 42 mm and cracks were observed in the grown crystal.
【0015】実施例2、比較例2 純度4Nの酸化ビスマスと二酸化ゲルマニウムとを2:
3(モル比)の割合で混合したのち、 900℃で仮焼し、
内径50mm〜150mm に変えた種管にこの内径よりやや小さ
い直径で長さ65mmに仕上げた種結晶を挿入した、内径 1
50mm、長さ 200mmのブリッジマン法用白金ルツボにこの
仮焼した原料 12,000gを装入した。Example 2, Comparative Example 2 Bismuth oxide having a purity of 4N and germanium dioxide were mixed with
After mixing at a ratio of 3 (molar ratio), calcine at 900 ° C,
A seed tube with a diameter slightly smaller than this inner diameter and finished to a length of 65 mm was inserted into a seed tube with an inner diameter of 50 mm to 150 mm.
12,000 g of the calcined raw material was charged into a 50 mm, 200 mm long platinum crucible for the Bridgman method.
【0016】ついで、これらの種結晶を完全に溶かさな
いように炉のピーク温度を 1,200℃とし、種結晶近傍の
温度をBGO結晶の融点よりやや高目とし、育成開始位
置を変えて種結晶を一部溶解し、降下速度 0.5mm/時で
結晶を育成し、育成後白金ルツボを破って単結晶を取出
し、種結晶の厚さと育成結晶中のクラックの有無をしら
べたところ、図2に示したとおりの結果が得られ、この
図を基にしてこのグラフの横軸の種管内径を種管内径の
逆数(1/種管内径)として、これと種結晶の厚みとの
関係をしらべたところ、図3に示したとおりの結果が得
られた。Next, in order not to completely melt these seed crystals, the peak temperature of the furnace was set to 1,200 ° C., the temperature in the vicinity of the seed crystals was slightly higher than the melting point of the BGO crystal, and the seeding crystal was grown by changing the growth starting position. The crystals were partially melted and grown at a descent rate of 0.5 mm / hr. After growth, the platinum crucible was broken to take out a single crystal, and the thickness of the seed crystal and the presence or absence of cracks in the grown crystal were examined. Based on this figure, the seed tube inner diameter on the horizontal axis of this graph was defined as the reciprocal of the seed tube inner diameter (1 / seed tube inner diameter), and the relationship between this and the seed crystal thickness was examined. However, the result as shown in FIG. 3 was obtained.
【0017】[0017]
【発明の効果】本発明は単結晶の製造方法に関するもの
であり、これは前記したようにブリッジマン法で融液か
ら種結晶を用いて単結晶を育成させる方法において、種
管の内径をD(mm)とし、使用する種結晶の厚さをT
(mm)としたときに、このDとTが式 T<(3.65×103/D)−15 の関係を満たすようにしてなることを特徴とするもので
あるが、これによれば種管の径を大きくしてこれをルツ
ボの胴体部と同じ径のものとしても得られる単結晶のク
ラックの発生が防止されるので、目的とする単結晶を歩
留りよく得ることができるという有利性が与えられる。The present invention relates to a method for producing a single crystal, which is a method for growing a single crystal from a melt by a Bridgman method using a seed crystal as described above. (Mm) and the thickness of the seed crystal used is T
(Mm), D and T satisfy the relation of T <(3.65 × 10 3 / D) −15. Since the occurrence of cracks in the single crystal obtained by increasing the diameter of the crucible and having the same diameter as the body of the crucible is prevented, the advantage that the desired single crystal can be obtained with good yield is provided. Can be
【図1】本発明で使用されるブリッジマン法による単結
晶製造装置の縦断面図を示したものである。FIG. 1 is a longitudinal sectional view of a single crystal manufacturing apparatus according to the Bridgman method used in the present invention.
【図2】本発明の実施例による単結晶製造時における種
管内径と種結晶の厚みとの関係グラフを示したものであ
る。FIG. 2 is a graph showing the relationship between the inner diameter of a seed tube and the thickness of a seed crystal during the production of a single crystal according to an embodiment of the present invention.
【図3】本発明の実施例による単結晶製造時における種
管内径の逆数と種結晶の厚みとの関係グラフを示したも
のである。FIG. 3 is a graph showing the relationship between the reciprocal of the inner diameter of a seed tube and the thickness of a seed crystal during the production of a single crystal according to an embodiment of the present invention.
1…電気炉、 2…白金ルツボ、 3…融液、 4…種管、 5…種結晶。 1: electric furnace, 2: platinum crucible, 3: melt, 4: seed tube, 5: seed crystal.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 流王 俊彦 群馬県安中市磯部2丁目13番1号 信越 化学工業株式会社 精密機能材料研究所 内 (56)参考文献 特開 平3−40987(JP,A) (58)調査した分野(Int.Cl.7,DB名) C30B 11/00 - 11/14 C30B 28/00 - 35/00 ──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Toshihiko Nagao 2-13-1 Isobe, Annaka-shi, Gunma Prefecture Shin-Etsu Chemical Co., Ltd. Precision Functional Materials Research Laboratories (56) References JP-A-3-40987 ( JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) C30B 11/00-11/14 C30B 28/00-35/00
Claims (3)
て単結晶を成長させる方法において、種管の内径をD
(mm)とし、使用する種結晶の厚さをT(mm)としたと
きに、このDとTが式 T<(3.75×103/D)−15 の関係を満たすようにしてなることを特徴とする単結晶
の製造方法。In a method for growing a single crystal from a melt by a Bridgman method using a seed crystal, the inner diameter of the seed tube is set to D.
(Mm), and when the thickness of the seed crystal to be used is T (mm), it is assumed that D and T satisfy the relation of T <(3.75 × 10 3 / D) −15. Characteristic single crystal production method.
1に記載した単結晶の製造方法。2. The method according to claim 1, wherein the single crystal is lithium niobate.
請求項1に記載した単結晶の製造方法。3. The method for producing a single crystal according to claim 1, wherein the single crystal is bismuth germanate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05045376A JP3115145B2 (en) | 1993-03-05 | 1993-03-05 | Single crystal manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05045376A JP3115145B2 (en) | 1993-03-05 | 1993-03-05 | Single crystal manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06263581A JPH06263581A (en) | 1994-09-20 |
| JP3115145B2 true JP3115145B2 (en) | 2000-12-04 |
Family
ID=12717551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP05045376A Expired - Lifetime JP3115145B2 (en) | 1993-03-05 | 1993-03-05 | Single crystal manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3115145B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013010656A (en) * | 2011-06-28 | 2013-01-17 | Chichibu Fuji Co Ltd | Method for producing single-polarized lithium niobate single crystal |
-
1993
- 1993-03-05 JP JP05045376A patent/JP3115145B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06263581A (en) | 1994-09-20 |
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