JP3119620B2 - Heater unit and heat treatment furnace - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heater unit suitable for heat treatment of various objects to be heated, for example, electronic components, and a heat treatment furnace using the heater unit.

[0002]

2. Description of the Related Art Generally, a heat treatment furnace such as an electric furnace is used for heat treatment of an object to be heated. The heat treatment furnace heats the objects to be heated collectively housed in the furnace chamber from the surroundings.To uniformly heat all the objects to be heated housed in the furnace chamber, the space in the furnace chamber is kept at the same temperature. Must be retained.

[0003]

Therefore, the processing temperature of all the objects to be processed at once in the furnace must be the same.

On the other hand, heat treatment is performed in an open atmosphere depending on the type of the object to be heated. For example, regarding the screening process for electronic components, ICs, transistors,
Electronic components such as CLCD and PDP are collectively processed in a furnace, and color liquid crystals are processed in an open atmosphere outside the furnace. When performing heat treatment in an open atmosphere, it is convenient to use a panel heater, and if the panel heater can be installed in a furnace and heat treatment can be performed on the panel heaters in each stage, it is set for each panel heater. It is possible to change the temperature.

An object of the present invention is to provide a heater unit capable of maintaining a uniform temperature on a panel heater and arbitrarily setting a heating area on the panel heater, and a heat treatment furnace using the heater unit. .

[0006]

In order to achieve the above object, the present invention provides a heater unit having a combination of a panel heater, a reflector and a far-infrared radiating film . One surface of the panel is a heat radiating surface, the other surface is a heating surface, the heating surface is a surface to which heat is applied, a pattern of a planar heating element is attached, and the heat radiating surface is a surface on which an object to be heated is mounted and subjected to heat treatment. And the panel
Is an excellent metal plate thermal conductivity, pattern of the planar heating element
Are stacked between the first and second insulating films.
The reflector covers the open surface of the sheet heating element and reflects the heat generated by the sheet heating element to the panel side. The far-infrared radiation film is formed on the heat dissipation surface of the panel.
The heat generated by the sheet heating element depends on the thickness of the panel.
And the heat dissipation surface is partially even
The difference in temperature is eliminated, and the surface becomes a soaking surface.

Further, in the heat treatment furnace according to the present invention,
Means that the heater unit is installed in the furnace chamber at least two levels above and below.
In a processing furnace, the heater unit includes at least a panel.
Panel heater having a combination of a heater and a reflector
, One side of the panel is the heat dissipation side, the other side is the heating side,
Is a surface to which heat is applied, and a pattern of planar heating elements is attached.
The heat radiating surface is the surface on which the heat
The reflector covers the open side of the planar heating element,
The heat generated by the heating element is reflected to the panel side.
Ri, the heat producing temperature of the heater surface of the heater unit of each stage, heat -
Can be adjusted for each data unit, and processing temperatures differ from each other.
Simultaneous processing of two or more types of workpieces in the same furnace
Is made possible.

Further , the heater unit mounts an object to be heated.
It becomes a shelf board.

[0009]

[0010]

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of a heater unit according to the present invention and a heat treatment furnace using the heater unit will be described below with reference to the drawings. In FIG. 1, a heater unit 1 according to the present invention includes a panel heater 2 and a reflector 3.
And a combination of The panel heater 2 is a flat plate in which a pattern of the planar heating element 5 is provided on one surface of the panel 4, and the reflector 3 is a flat plate that covers an open surface of the planar heating element 5. FIG. 2 shows the configuration of the panel heater 2.

The panel 4 is made of, for example, stainless steel (SUS3
04) is a metal plate having excellent thermal conductivity, one surface (upper surface) of which is used as a heat radiation surface 4a and the other surface (lower surface) is used as a heating surface 4b. The heating surface 4b is a surface for applying heat to the panel 4, and the heat radiating surface 4a is a heat-treated surface of the object to be heated. The pattern of the planar heating element 5 is formed on the heating surface 4b side. In this embodiment, as shown in FIG. 2B, the first insulating film 6 and the first insulating film 6 are formed on the heating surface 4b side of the panel 4. 2
The pattern of the sheet heating element 5 is laminated between the insulating films 7.

The first and second insulating films 6 and 7 are made of, for example, oxide ceramics having a thickness of 100 to 200 μm (having a melting point of 1 μm).
(300 ° C.), and the sheet heating element 5 has a composite resistor of (nickel, silicon, Fe) and ceramic titania, a resistor of a metal compound, or a resistor of ceramics or titania alone. Body (resistance several ohms to several tens)
Ω) (thickness: 10 to 200 μm) is selectively used and a printing pattern of these low antibodies is applied to form a sheet heating element.

Terminals 8 are attached to both ends of the pattern of the sheet heating element 5 and lead wires 9 are drawn out.
Are tightened to the panel 4 with the screws 11 via the insulator 10. A heat-resistant reflector such as a stainless steel plate is used for the reflector 3. The reflector 3 has a mirror surface for reflecting the heat generated by the planar heating element 5 to the panel 4 side.
It is assembled to the panel 4 via the spacer 12, covers the outer surface side of the sheet heating element 5, and is arranged at a fixed distance from the panel 4.

By arranging the reflector 3 away from the panel 4, the heat generated by the sheet heating element 5 is not trapped, but is reflected by the reflector 3 toward the panel 4, and the heating surface 4b of the panel 4 It is heated by conduction heat directly transmitted from the heating element 5 to the panel 4 and radiant heat by reflection of the reflector 3, and the heat is radiated from the heat radiation surface 4 a of the panel 4.

A far-infrared radiation film 13 can be further formed on the heat radiation surface 4a of the panel 4. By forming the far-infrared radiating film 13 on the panel surface, far-infrared rays are radiated on the heat radiating surface 4a, and the heat treatment of the article can be promoted. The far-infrared radiating film 13 is formed, for example, by using a fine powder of ceramic far-infrared radiating material as a thermal spraying material and applying the thermal spraying material on the heat radiating surface 4a of the panel 4 using a low-temperature thermal spraying method. No. 6-7508).

In the present invention, the panel heater 2 and the reflector 3 are not limited to the case where they are vertically arranged at a fixed interval, but the reflector 3 is directly laminated on the second insulating film 7 as shown in FIG. It can also be assembled integrally with the panel 4.
When the reflector 3 and the panel 4 are laminated and integrated,
Since the reflector 3 is held by the panel heater 2, the reflector 3 does not necessarily need to have a self-retaining property, and therefore, for example, a heat-resistant metal foil can be used.

Since the sheet heating element 5 partially generates heat in accordance with the pattern, the temperature of the heating surface 4b of the panel 4 varies locally depending on the presence or absence of the pattern. Is uniformly distributed while traveling in the thickness direction of the panel 4, so that the heat radiating surface has a uniform temperature difference, becomes a heat uniforming surface, and further has a far-infrared radiation film 13.
Radiates far infrared rays onto the heat radiation surface 4a.

In the present invention, the heat radiation surface 4a of the panel 4
The object to be heated M is placed thereon, and the heat treatment is performed. For example, when a color liquid crystal screening process is performed, the color liquid crystal is used as the object to be heated M and mounted on the panel 4 of the heater unit 1 placed in the atmosphere.

Further, the heater unit 1 according to the present invention comprises:
As shown in FIG. 4, a plurality of heaters 1 are installed in a furnace chamber 15 of a heat treatment furnace 14, and a screening process for an electronic component such as an IC, a transistor, a CLCD, or a PDP is performed on the heater unit 1 at each stage. It can be carried out. In this case, the panel 4 of the heater unit according to the present invention becomes a shelf on which the object to be heated M is mounted, and therefore, the shelf itself to which the object to be heated contacts is heated, so that the temperature rises quickly, The heat generation temperature can be stabilized within a short time, and the heat treatment time can be substantially reduced,
Further, the thickness of the wall of the heat treatment furnace 14 can be set thin.

Further, on the heat radiating surface 4a of each of the heater units 1 in which the heater units 1 are vertically arranged in multiple stages, the object to be heated M
When the heat treatment is performed, the heater units 1, 1.
By controlling the heat generation temperature of each of the heater units, the heat generation temperatures of the shelves in each stage are made different,
Heat treatment can be performed on the object to be heated on each stage at a different temperature for each stage.

Further, since no gas is emitted from the heater unit of the present invention, a vacuum furnace is used as a heat treatment furnace, and the heater unit of the present invention is installed in the furnace chamber to heat-treat an article in a vacuum. It is valid.

[0023]

As described above, according to the present invention, the surface heating element can be freely formed on the metal panel, and the thickness, the shape, and the pattern forming range of the pattern of the sheet heating element can be arbitrarily determined. By doing so, the heating temperature and heating range of the heater unit can be set freely, and the heat efficiency is high by combining the heater unit and the reflector. This has the effect that two or more types of processing can be performed simultaneously.

[Brief description of the drawings]

FIG. 1 is a diagram showing one embodiment of a heater unit according to the present invention.

FIGS. 2A and 2B show the configuration of a panel heater, wherein FIG. 2A is a bottom view and FIG.

FIG. 3 is a view showing another embodiment of the heater unit according to the present invention.

FIG. 4 is a view showing one embodiment of a heat treatment tank according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Heater unit 2 Panel heater 3 Reflector 4 Panel 4a Heat radiating surface 4b Heating surface 5 Planar heating element 6 First insulating film 7 Second insulating film 8 Terminal 9 Lead wire 10 Insulator 11 Screw 12 Spacer 13 Far infrared radiation film 14 Insulation tank

Claims (2)

(57) [Claims] 1. A heat treatment furnace in which a heater unit is installed in a furnace chamber at two or more upper and lower stages, wherein the heater unit has at least a combination of a panel heater and a reflector, and the panel heater has a heat radiation surface on one side of the panel. The other surface is a heating surface, the heating surface is a surface to which heat is applied, a pattern of a planar heating element is attached, a heat radiation surface is a surface on which a heat-receiving object is mounted, and a heat treatment is performed. Covers the open side of the planar heating element and reflects the heat generated by the planar heating element to the panel side. The heating temperature of the heating surface of each stage heater unit can be adjusted for each heater unit. And a heat treatment furnace capable of simultaneously processing two or more kinds of workpieces having different processing temperatures in the same furnace. 2. The heat treatment furnace according to claim 1 , wherein the heater unit serves as a shelf on which the object to be heated is mounted.