JP3131075B2 - Purification method of ultrafine metal powder - Google Patents
Purification method of ultrafine metal powderInfo
- Publication number
- JP3131075B2 JP3131075B2 JP05134422A JP13442293A JP3131075B2 JP 3131075 B2 JP3131075 B2 JP 3131075B2 JP 05134422 A JP05134422 A JP 05134422A JP 13442293 A JP13442293 A JP 13442293A JP 3131075 B2 JP3131075 B2 JP 3131075B2
- Authority
- JP
- Japan
- Prior art keywords
- powder
- metal
- ultrafine
- metal powder
- washing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は金属ハロゲン化物の蒸気
を気相還元して得た金属超微粉又は金属微粉(以下本発
明ではこれらを総称して金属超微粉という)中に含有さ
れる不純物としてのハロゲンの除去に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrafine metal powder or a metal fine powder obtained by reducing a metal halide vapor in the gas phase (hereinafter, these are collectively referred to as ultrafine metal powder). And the removal of halogen.
【0002】[0002]
【従来の技術】金属ハロゲン化物を気相還元して得た金
属超微粉中に残留するハロゲン化物は、金属超微粉の耐
錆性を阻害するほか、例えば金属超微粉を導電ペースト
に使用する場合マイグレーションを引き起こす等の問題
があり、その除去が必要である。2. Description of the Related Art Halide remaining in ultrafine metal powder obtained by gas phase reduction of metal halide inhibits the rust resistance of ultrafine metal powder, and when metal ultrafine powder is used for conductive paste, for example. There are problems such as migration, and it is necessary to remove them.
【0003】特開昭60−67603号公報に金属ハロ
ゲン化物の気相還元法で得られた金属超微粉を水洗して
付着ハロゲン化物を取り除く技術が開示されている。こ
の技術は、処理に長時間を要し、また、水に溶解しない
ハロゲン化物に対しては適用できない。また特開昭60
−174807号公報においても金属ハロゲン化物の気
相還元で得られた金属および金属窒化物の超微粉を水洗
し、未反応ハロゲン化物および副生成物を除去する技術
が開示されている。この技術も処理に長時間を要し、し
かも、X線のピークが消滅していると報告されているだ
けで、濃度値は述べられていないが、0.1%以下程度
と推測される。[0003] Japanese Patent Application Laid-Open No. 60-67603 discloses a technique in which ultrafine metal powder obtained by a gas phase reduction method of a metal halide is washed with water to remove an attached halide. This technique requires a long processing time and is not applicable to halides that are not soluble in water. In addition, JP
JP-A-174807 also discloses a technique for washing ultrafine powders of metal and metal nitride obtained by gas-phase reduction of metal halides with water to remove unreacted halides and by-products. This technique also requires a long time for the treatment, and furthermore, it is reported that the peak of the X-ray has disappeared, but the concentration value is not described, but it is estimated to be about 0.1% or less.
【0004】また特開昭61−48506号公報には、
金属ハロゲン化物の気相還元により得られた金属、およ
び金属窒化物微粒子中のハロゲン化物及び副生成物を溶
解する酸を用いて洗浄する方法が開示されている。しか
し、この方法でも不純物の除去はX線のピークが消滅す
る程度であり、また薄い酸では長時間を要し、濃い酸で
は金属、金属窒化物粉自体が溶解してしまうという問題
がある。Japanese Patent Application Laid-Open No. 61-48506 discloses that
A method is disclosed in which a metal obtained by gas phase reduction of a metal halide and a method of washing with a metal that dissolves a halide and a by-product in metal nitride fine particles are used. However, even in this method, there is a problem that the removal of impurities is such that the peak of X-rays disappears, and a long time is required for a thin acid, and a metal or a metal nitride powder itself is dissolved for a strong acid.
【0005】特開平1−319610号公報には、金属
ハロゲン化物の気相還元で得られた金属超微粉をアンモ
ニア水を用いて洗浄する技術が開示されている。この技
術は、上記在来技術の欠点を改善したもので、洗浄時間
が短く、水に溶解しないハロゲン化物にも適用すること
ができ、洗浄による金属自体の溶解損失もないという特
徴を有する。[0005] Japanese Patent Application Laid-Open No. 1-319610 discloses a technique for cleaning ultrafine metal powder obtained by gas phase reduction of a metal halide using aqueous ammonia. This technique is an improvement over the above-mentioned disadvantages of the conventional technique, and has a feature that the washing time is short, the technique can be applied to a halide that does not dissolve in water, and there is no dissolution loss of the metal itself due to washing.
【0006】[0006]
【発明が解決しようとする課題】本発明は、金属ハロゲ
ン化物の蒸気を気相還元して得た金属超微粉中の未反応
ハロゲン化物を除去するに当って、上記特開平1−31
9610号公報の技術とは異なる技術であって、これと
同等ないしはさらに優れた効果を奏する技術を提供する
ことを目的とする。すなわち、洗浄時間が比較的短くて
済み、水に不溶なハロゲン化物にも適用することがで
き、金属粉自体の酸化に起因する溶解損失の殆んどない
効率的な金属超微粉の精製方法を提案するものである。SUMMARY OF THE INVENTION The present invention relates to the removal of unreacted halide in ultrafine metal powder obtained by reducing the vapor of a metal halide in the gas phase.
It is an object of the present invention to provide a technique which is different from the technique of Japanese Patent Application Laid-Open No. 9610, and which has the same or better effects. That is, an efficient metal ultrafine powder purification method that requires a relatively short washing time, can be applied to a halide insoluble in water, and has almost no dissolution loss due to oxidation of the metal powder itself. It is a suggestion.
【0007】[0007]
【課題を解決するための手段】本発明は、金属ハロゲン
化物の蒸気を気相還元して得た金属超微粉を、酒石酸、
クエン酸、EDTA等のキレート剤水溶液を用いて洗浄
し残留ハロゲン化物を除去することを特徴とする金属超
微粉の精製方法である。この場合、キレート剤水溶液の
濃度を0.02〜0.2wt%とすると好適である。ま
た、洗浄を非酸化性雰囲気中で行うことにより、金属超
微粉自体の酸化による溶解損失を減少させることができ
る。SUMMARY OF THE INVENTION The present invention provides a method for producing a metal ultrafine powder obtained by reducing the vapor of a metal halide in the gas phase, using tartaric acid,
A method for purifying ultrafine metal powder, comprising washing with an aqueous solution of a chelating agent such as citric acid or EDTA to remove residual halide. In this case, it is preferable that the concentration of the chelating agent aqueous solution be 0.02 to 0.2 wt%. Further, by performing the cleaning in a non-oxidizing atmosphere, dissolution loss due to oxidation of the ultrafine metal powder itself can be reduced.
【0008】なお、一般に粒度により金属超微粉と微粉
を区別しているが、本発明の金属超微粉は一般の金属微
粉もその範囲に含むものである。[0008] Generally, ultrafine metal powder and fine powder are distinguished by the particle size, but the ultrafine metal powder of the present invention includes general fine metal powder in its range.
【0009】[0009]
【作用】本発明方法を適用することができる金属超微粉
としては、金属ハロゲン化物を気相還元して得たAu,
Ag,Cu,Ni,Co,Fe,Mn,Cd,Cr,T
i,Pt,Pd,Ce,Al,Ca,Bi等である。こ
れらの金属のハロゲン化物はキレート剤水溶液中で水溶
性キレートを形成する。そこで、金属ハロゲン化物の蒸
気を気相還元して得た金属超微粉をキレート剤水溶液を
用いて洗浄すると、金属超微粉中の金属ハロゲン化物が
水溶性キレートを形成し、これを金属粉末と分離する
と、容易に精製金属粉を得ることができる。The metal ultrafine powder to which the method of the present invention can be applied includes Au, obtained by gas phase reduction of a metal halide,
Ag, Cu, Ni, Co, Fe, Mn, Cd, Cr, T
i, Pt, Pd, Ce, Al, Ca, Bi and the like. The halides of these metals form water-soluble chelates in aqueous chelating agents. Therefore, when the metal ultrafine powder obtained by vapor-phase reduction of the metal halide vapor is washed with an aqueous solution of a chelating agent, the metal halide in the metal ultrafine powder forms a water-soluble chelate, which is separated from the metal powder. Then, a purified metal powder can be easily obtained.
【0010】図1に本発明の金属超微粉の精製方法のフ
ローチャートを示す。未処理の金属超微粉1にキレート
剤水溶液2を加える。キレート剤水溶液は望ましくは溶
存酸素を十分除去したものを用いる。ついで、撹拌、洗
浄工程3で1〜20分の撹拌、洗浄を行う。洗浄方法と
しては、超音波または機械的撹拌を用い、洗浄時間10
分程度、洗浄回数は1〜2回で十分である。2回を超え
て洗浄してもかまわないが、経済性と残留ハロゲン量の
関係からその必要は殆んどない。この撹拌、洗浄処理を
非酸化性雰囲気中で行うと、Cu,Fe,Ni等では洗
浄時の溶解損失を低減することができる。ただし、A
g,Au,Pt,Pd等の貴金属については、非酸化性
雰囲気中でなくとも溶解損失を伴うことなく残留ハロゲ
ン化物の除去を達成することができる。非酸化性雰囲気
としては、Ar,He,N2 等の不活性ガス、H2 ,C
H4 等の還元性ガス、燃焼排ガス等の非酸化性ガス雰囲
気あるいは真空雰囲気を利用することができる。FIG. 1 shows a flow chart of the method for purifying ultrafine metal powder of the present invention. A chelating agent aqueous solution 2 is added to the untreated ultrafine metal powder 1. The aqueous solution of the chelating agent is preferably one from which dissolved oxygen has been sufficiently removed. Next, in the stirring and washing step 3, stirring and washing are performed for 1 to 20 minutes. As a cleaning method, ultrasonic or mechanical stirring is used, and the cleaning time is 10 minutes.
It is sufficient that the number of times of washing is about 1 minute or 2 times. Although washing may be performed more than twice, there is almost no necessity from the viewpoint of economy and the amount of residual halogen. When the stirring and cleaning treatments are performed in a non-oxidizing atmosphere, dissolution loss during cleaning can be reduced for Cu, Fe, Ni, and the like. However, A
With respect to precious metals such as g, Au, Pt, and Pd, removal of residual halide can be achieved without dissolution loss even in a non-oxidizing atmosphere. Examples of the non-oxidizing atmosphere include an inert gas such as Ar, He, and N 2 , H 2 , C
A reducing gas such as H 4, a non-oxidizing gas atmosphere such as a combustion exhaust gas, or a vacuum atmosphere can be used.
【0011】洗浄後、濾過工程4において吸引濾過等に
より精製粉と水溶性キレート(濾液5)の分離を非酸化
性ガス中で行う。濾過された精製金属粉7は、乾燥工程
6で非酸化性雰囲気中で乾燥した後、非酸化性ガスまた
は真空中に保存する。After the washing, in a filtration step 4, the purified powder and the water-soluble chelate (filtrate 5) are separated in a non-oxidizing gas by suction filtration or the like. The filtered purified metal powder 7 is dried in a non-oxidizing atmosphere in a drying step 6 and then stored in a non-oxidizing gas or vacuum.
【0012】[0012]
実施例−1 図1のフローに従って、塩化銅の気相水素還元により得
られた銅超微粉(平均粒径0.2μm)の精製を実施し
た。大気中で、未精製粉10gに対し、0.02wt%
EDTA水溶液100ccを添加し、超音波洗浄により
10分間の撹拌、洗浄を2回行った。撹拌洗浄後、吸引
濾過、真空中乾燥をすることにより、塩素含有量は2.
5%から0.01%まで低下した。酸素含有量は、0.
2%が6%となった。銅粉自体のキレート剤水溶液への
溶解は14%であった。Example 1 Purification of ultrafine copper powder (average particle size: 0.2 μm) obtained by gas-phase hydrogen reduction of copper chloride was performed according to the flow of FIG. 1. 0.02wt% to 10g of unrefined powder in air
100 cc of an EDTA aqueous solution was added, and stirring and washing were performed twice for 10 minutes by ultrasonic washing. After stirring and washing, suction filtration and drying in a vacuum are performed, so that the chlorine content is 2.
It decreased from 5% to 0.01%. The oxygen content is 0.1
2% became 6%. The dissolution of the copper powder itself in the aqueous chelating agent solution was 14%.
【0013】実施例−2 実施例−1で用いたものと同じ銅超微粉の精製におい
て、N2 ガス雰囲気中で、未精製粉10gに対して、溶
存酸素を除去した0.02wt%EDTA水溶液100
ccで超音波による撹拌、洗浄を10分/回で2回の処
理をした。塩素含有量は2.5%から10ppm以下に
低下し、酸素含有量は0.2%が0.3%となった。銅
粉自体の溶出は認められなかった。Example 2 In purifying the same ultrafine copper powder as used in Example 1, a 0.02 wt% aqueous solution of EDTA with 10 g of unpurified powder removed of dissolved oxygen in an N 2 gas atmosphere. 100
Stirring and washing with ultrasonic waves at cc were performed twice at 10 minutes / time. The chlorine content was reduced from 2.5% to 10 ppm or less, and the oxygen content was reduced from 0.2% to 0.3%. No elution of the copper powder itself was observed.
【0014】実施例−3 実施例−1で用いたものと同じ銅超微粉の精製におい
て、N2 ガス雰囲気中で、未精製粉10gに対し溶存酸
素を除去した0.05wt%酒石酸水溶液100ccで
超音波による撹拌、洗浄を10分/回で2回行った。塩
素含有量は2.5%から10ppm以下に低下し、銅粉
自体の溶出は認められなかった。Example 3 In the purification of the same copper ultrafine powder as used in Example 1, 100 cc of a 0.05 wt% tartaric acid aqueous solution obtained by removing dissolved oxygen from 10 g of unpurified powder in an N 2 gas atmosphere was used. Stirring and washing with ultrasonic waves were performed twice at 10 minutes / time. The chlorine content was reduced from 2.5% to 10 ppm or less, and no elution of the copper powder itself was observed.
【0015】実施例−4 塩化ニッケルの水素還元により得られたニッケル超微粉
(平均粒径0.4μm)の精製において、Ar雰囲気中
で未精製粉10gに対し溶存酸素を除去した0.1%酒
石酸水溶液100ccで超音波による撹拌、洗浄を10
分/回で2回処理した。塩素含有量は1.2%から10
ppm以下に低下し、酸素含有量は0.2%が0.2%
と変化しなかった。ニッケル粉自体の溶出は認められな
かった。Example 4 In the purification of ultrafine nickel powder (average particle diameter 0.4 μm) obtained by hydrogen reduction of nickel chloride, 0.1% of dissolved pure oxygen was removed from 10 g of unpurified powder in an Ar atmosphere. 100 ml of tartaric acid aqueous solution, ultrasonic stirring and washing 10
Treated twice per minute. Chlorine content from 1.2% to 10%
ppm, the oxygen content is reduced from 0.2 % to 0.2 %
And did not change. Elution of the nickel powder itself was not observed.
【0016】比較例−1 実施例−1で用いたものと同じ銅超微粉を水で洗浄し
た。未精製粉1gに対し溶存酸素を除去した純水100
ccを添加し、Ar雰囲気中で超音波洗浄による30分
/回×5回の撹拌、洗浄を行い、吸引濾過後、真空乾燥
した。塩素含有量は2.5%から0.7%までしか低下
しなかった。Comparative Example 1 The same ultrafine copper powder as used in Example 1 was washed with water. 100 g of pure water from which dissolved oxygen has been removed per 1 g of unpurified powder
cc was added, and the mixture was stirred and washed 30 minutes / times × 5 times by ultrasonic cleaning in an Ar atmosphere, suction-filtered, and then vacuum-dried. The chlorine content dropped only from 2.5% to 0.7%.
【0017】比較例−2 実施例−1で用いたものと同じ銅超微粉を塩酸で洗浄を
行った。未精製粉2.5gに対し、溶存酸素を除去した
2規定の塩酸100ccを加えて40分間超音波洗浄を
行った後500ccの純水で洗浄し、吸引濾過、真空乾
燥を行った。この方法では塩素含有量は2.5%から
0.4%までしか低下しなかった。Comparative Example 2 The same copper ultrafine powder as used in Example 1 was washed with hydrochloric acid. To 2.5 g of the unpurified powder, 100 cc of 2N hydrochloric acid from which dissolved oxygen had been removed was added, ultrasonic cleaning was performed for 40 minutes, followed by washing with 500 cc of pure water, suction filtration, and vacuum drying. In this way, the chlorine content dropped only from 2.5% to 0.4%.
【0018】[0018]
【発明の効果】本発明によれば、金属ハロゲン化物の気
相還元により製造した金属超微粉中の未反応ハロゲン化
物を、極低濃度まで短時間に効率よく除去することがで
きる。また、金属の酸化、溶出を最小限に抑制すること
ができる。According to the present invention, unreacted halide in ultrafine metal powder produced by gas phase reduction of metal halide can be efficiently removed in a short time to an extremely low concentration. In addition, metal oxidation and elution can be suppressed to a minimum.
【図1】本発明の洗浄工程を示すフローチャートであ
る。FIG. 1 is a flowchart showing a cleaning step of the present invention.
1 金属超微粉 2 キレート剤水溶液 3 撹拌、洗浄工程 4 濾過工程 5 濾液 6 乾燥工程 7 精製金属粉 DESCRIPTION OF SYMBOLS 1 Ultrafine metal powder 2 Chelating agent aqueous solution 3 Stirring and washing process 4 Filtration process 5 Filtrate 6 Drying process 7 Purified metal powder
───────────────────────────────────────────────────── フロントページの続き (72)発明者 石川 博之 千葉市中央区川崎町1番地 川崎製鉄株 式会社 技術研究本部内 (58)調査した分野(Int.Cl.7,DB名) B22F 9/28 ──────────────────────────────────────────────────の Continuing from the front page (72) Inventor Hiroyuki Ishikawa 1 Kawasaki-cho, Chuo-ku, Chiba Kawasaki Steel Corp. Technical Research Division (58) Fields investigated (Int. Cl. 7 , DB name) B22F 9 / 28
Claims (2)
得た金属超微粉をキレート剤水溶液を用いて洗浄し残留
ハロゲン化物を除去することを特徴とする金属超微粉の
精製方法。1. A method for purifying an ultrafine metal powder, comprising washing an ultrafine metal powder obtained by vapor-phase reduction of a metal halide vapor with an aqueous solution of a chelating agent to remove residual halide.
徴とする請求項1記載の金属超微粉の精製方法。2. The method for purifying ultrafine metal powder according to claim 1, wherein the cleaning is performed in a non-oxidizing atmosphere.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05134422A JP3131075B2 (en) | 1993-06-04 | 1993-06-04 | Purification method of ultrafine metal powder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05134422A JP3131075B2 (en) | 1993-06-04 | 1993-06-04 | Purification method of ultrafine metal powder |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06346119A JPH06346119A (en) | 1994-12-20 |
| JP3131075B2 true JP3131075B2 (en) | 2001-01-31 |
Family
ID=15128018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP05134422A Expired - Lifetime JP3131075B2 (en) | 1993-06-04 | 1993-06-04 | Purification method of ultrafine metal powder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3131075B2 (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1254341C (en) | 2001-06-14 | 2006-05-03 | 东邦钛株式会社 | Method for mfg. metal powder metal powder, conductive paste therefor, and laminated ceramic capacitor |
| JP4578996B2 (en) * | 2005-02-08 | 2010-11-10 | Jfeミネラル株式会社 | Method for refining ultrafine metal powder |
| JP5125411B2 (en) * | 2007-10-26 | 2013-01-23 | 住友金属鉱山株式会社 | Nickel powder and method for producing the same |
| JP5131098B2 (en) * | 2008-09-04 | 2013-01-30 | 住友金属鉱山株式会社 | Nickel fine powder and method for producing the same |
| JP5136904B2 (en) * | 2008-12-02 | 2013-02-06 | 住友金属鉱山株式会社 | Method for producing nickel powder |
| JP5369864B2 (en) * | 2009-04-24 | 2013-12-18 | 住友金属鉱山株式会社 | Nickel powder and method for producing the same |
| JP2019199652A (en) * | 2019-08-19 | 2019-11-21 | 株式会社新光化学工業所 | Copper nanoparticle, copper nanoparticle paste and copper nanoparticle core shell metal using the same, copper nanoparticle production device, and copper nanoparticle production method |
| JP7848152B2 (en) * | 2023-03-17 | 2026-04-20 | Jfeミネラル株式会社 | Method for cleaning ultrafine metal powders |
-
1993
- 1993-06-04 JP JP05134422A patent/JP3131075B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06346119A (en) | 1994-12-20 |
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