JP3132263B2 - Abnormality judgment method of crystal grain measuring device - Google Patents
Abnormality judgment method of crystal grain measuring deviceInfo
- Publication number
- JP3132263B2 JP3132263B2 JP05242413A JP24241393A JP3132263B2 JP 3132263 B2 JP3132263 B2 JP 3132263B2 JP 05242413 A JP05242413 A JP 05242413A JP 24241393 A JP24241393 A JP 24241393A JP 3132263 B2 JP3132263 B2 JP 3132263B2
- Authority
- JP
- Japan
- Prior art keywords
- measuring device
- grain
- abnormal
- grains
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/11—Analysing solids by measuring attenuation of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/07—Analysing solids by measuring propagation velocity or propagation time of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/0289—Internal structure, e.g. defects, grain size, texture
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/048—Transmission, i.e. analysed material between transmitter and receiver
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、結晶方位が揃った正常
粒と揃っていない異常粒が混在する帯状被検材に、超音
波を走査しながら送受信し、被検材中の各結晶の結晶方
位による超音波伝播速度の差を、被検材内の多重反射干
渉による共振現象を利用して振幅の差に変換し、異常粒
が発生した時の振幅減衰量から、被検材中の異常粒を検
出する結晶粒測定装置の異常判定方法に係り、特に、方
向性珪素鋼板の結晶粒方向の異常を検出する際に用いる
のに好適な、結晶粒測定装置の異常を早期に発見可能な
異常判定方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a band-shaped test material in which normal grains having uniform crystal orientations and abnormal grains having non-uniform crystal orientations are mixed and transmitted / received while scanning an ultrasonic wave. The difference in the ultrasonic wave propagation velocity due to the crystal orientation is converted into the difference in the amplitude using the resonance phenomenon due to the multiple reflection interference in the test material. The present invention relates to a method for judging abnormalities of a crystal grain measuring device for detecting abnormal grains, and particularly to detect abnormalities of a crystal grain measuring device at an early stage, which is suitable for use in detecting an abnormal grain direction of a grain-oriented silicon steel sheet. The present invention relates to a simple abnormality determination method.
【0002】[0002]
【従来の技術】交流電流の昇圧トランスのコア等への適
用を目的として、圧延方向に電磁特性が優れた方向性珪
素鋼板が製造されている。この方向性珪素鋼板は、圧延
方向の2次再結晶方位を、<100>(Goss 方位)に
揃えて、磁性を大幅に向上させている。2. Description of the Related Art Oriented silicon steel sheets having excellent electromagnetic characteristics in a rolling direction have been manufactured for the purpose of applying an alternating current to a core of a step-up transformer or the like. In the grain-oriented silicon steel sheet, the secondary recrystallization orientation in the rolling direction is set to <100> (Goss orientation) to greatly improve magnetism.
【0003】前記Goss 方位に近い結晶粒が多いほど、
電磁特性が優れた方向性珪素鋼板となるわけであるが、
実際の製造工程では、必ずしもGoss 方位に近い結晶粒
のみを作れるわけではなく、製造条件の変化や外乱によ
って2次再結晶が不充分であると、このGoss 方位から
大きくずれた結晶粒、いわゆる異常粒ができてしまい、
磁気特性が悪化して、品質上不合格となる。As the number of crystal grains close to the Goss orientation increases,
Although it becomes a oriented silicon steel sheet with excellent electromagnetic characteristics,
In an actual manufacturing process, it is not always possible to produce only a crystal grain close to the Goss orientation. If the secondary recrystallization is insufficient due to a change in manufacturing conditions or disturbance, a crystal grain greatly deviating from the Goss orientation, a so-called abnormal state, Grains are formed,
The magnetic properties are deteriorated and the quality is rejected.
【0004】この異常粒10Aができた製品鋼板10の
模式図を図1に示す。Goss 方位に近い正常粒10B
は、粒径が数mm〜数十mmと大きいが、異常粒10Aでは
一般に粒径が数mm以下で、結晶粒の方位はランダムな向
きになっており、図1に示した如く、圧延方向に長く延
びて分布する。FIG. 1 is a schematic diagram of a product steel sheet 10 having the abnormal grains 10A. Normal grain 10B close to Goss orientation
Although the grain size is as large as several mm to several tens of mm, in the abnormal grain 10A, the grain size is generally several mm or less, and the orientation of the crystal grains is random, and as shown in FIG. It is elongated and distributed.
【0005】このような方向性珪素鋼板の異常粒を検出
する装置として、出願人は既に特開平1−229962
号で、正常粒と異常粒との超音波伝播速度の差を、鋼板
内の多重反射干渉による共振現象を利用して振幅の差に
変換し、異常粒が発生したときの振幅減衰量から異常粒
を検出するようにした方向性珪素鋼板の結晶粒方位分布
測定装置を提案している。As a device for detecting such abnormal grains in a grain-oriented silicon steel sheet, the applicant has already disclosed Japanese Patent Application Laid-Open No. 1-222962.
The difference in the ultrasonic wave propagation velocity between the normal grain and the abnormal grain is converted into a difference in amplitude using the resonance phenomenon caused by multiple reflection interference in the steel sheet. There has been proposed an apparatus for measuring a grain orientation distribution of a grain-oriented silicon steel sheet in which grains are detected.
【0006】この測定装置は、図2に透過型の場合で原
理を示す如く、結晶方位で弾性係数が異なり、正常粒と
異常粒では板厚方向の超音波伝播速度が異なるので、共
振を利用して伝播速度の差を振幅の差に変換し、信号の
減衰量から異常粒を判定している。即ち、正常粒である
場合には、共振条件2d =λ(d は板厚、λは超音波の
波長)下で超音波が共振しているため、図2(A)に示
す如く、受信側の超音波探触子22Bに大きな振幅の超
音波が入射しているのに対して、異常粒が存在する部位
では、図2(B)に示す如く、超音波伝播速度が異なる
ため共振せず、振幅が減少するため、この差を利用し
て、異常粒を検出する。図2において、22Aは送信側
の超音波探触子である。As shown in FIG. 2, the principle of the transmission type is shown in FIG. 2. The elasticity coefficient differs depending on the crystal orientation, and the ultrasonic propagation speed in the thickness direction differs between normal grains and abnormal grains. Then, the difference in propagation speed is converted into the difference in amplitude, and abnormal grains are determined from the amount of signal attenuation. That is, in the case of a normal grain, since the ultrasonic wave resonates under the resonance condition 2d = λ (d is the plate thickness, λ is the wavelength of the ultrasonic wave), as shown in FIG. 2B, ultrasonic waves having a large amplitude are incident on the ultrasonic probe 22B. On the other hand, in a portion where abnormal grains are present, as shown in FIG. Since the amplitude decreases, abnormal grains are detected using this difference. In FIG. 2, reference numeral 22A denotes an ultrasonic probe on the transmission side.
【0007】この測定装置は、例えば図3に反射型で例
を示す如く構成されており、超音波送信回路20で発生
された、例えばバースト波状の電気信号が、測定対象で
ある鋼板10と対向配置された反射型の超音波探触子2
2に供給される。超音波探触子22は、走査装置26に
よって、例えば鋼板10の幅方向に走査されており、こ
の超音波探触子22から鋼板10に超音波を走査しなが
ら入射する。鋼板10の底面で反射され、該鋼板10中
の各結晶の結晶方位に応じて変調を受けた超音波は、再
び超音波探触子22で受信され、超音波受信回路28に
入力される。超音波受信回路28によって増幅された受
信信号は、ゲート回路30に入力される。ゲート回路3
0により、受信信号のうち、結晶方位に応じて変調を受
けた信号を良く表わす部分のみが抽出され、ピークホー
ルド回路32に入力される。ピークホールド回路32
は、次のパルスが来るまでの一繰返し期間、ゲート回路
30からの信号のピーク値を検出すると共に、ホールド
する。ピークホールド回路32の出力は、A/D変換器
34でデジタル信号に変換され、マイクロプロセッサ3
6に入力される。マイクロプロセッサ36は、A/D変
換器34からのデジタル信号及び走査装置26からの探
触子位置信号を入力し、受信信号の大きさから、異常
粒、正常粒の判断を行って、結果を表示装置38に出力
する。This measuring device is configured as shown in FIG. 3 as an example of a reflection type, in which, for example, a burst wave-like electric signal generated by an ultrasonic transmission circuit 20 is opposed to a steel plate 10 to be measured. Reflection type ultrasonic probe 2 arranged
2 is supplied. The ultrasonic probe 22 is scanned, for example, in the width direction of the steel plate 10 by the scanning device 26, and the ultrasonic probe 22 makes the ultrasonic wave incident on the steel plate 10 while scanning. The ultrasonic wave reflected by the bottom surface of the steel plate 10 and modulated according to the crystal orientation of each crystal in the steel plate 10 is received again by the ultrasonic probe 22 and input to the ultrasonic receiving circuit 28. The received signal amplified by the ultrasonic receiving circuit 28 is input to the gate circuit 30. Gate circuit 3
By means of 0, only the part of the received signal that well represents the signal modulated according to the crystal orientation is extracted and input to the peak hold circuit 32. Peak hold circuit 32
Detects and holds the peak value of the signal from the gate circuit 30 during one repetition period until the next pulse comes. The output of the peak hold circuit 32 is converted into a digital signal by an A / D converter 34,
6 is input. The microprocessor 36 receives the digital signal from the A / D converter 34 and the probe position signal from the scanning device 26, and determines abnormal grains and normal grains based on the magnitude of the received signal. Output to the display device 38.
【0008】図3において、40は、前記走査装置26
の探触子走査速度に対応して、例えば1〜10k Hzのレ
ートで繰返しパルスを出力するタイミング制御回路であ
る。In FIG. 3, reference numeral 40 denotes the scanning device 26.
Is a timing control circuit that outputs repetitive pulses at a rate of, for example, 1 to 10 kHz according to the probe scanning speed.
【0009】又、特開昭51−29187号にも、超音
波により珪素鋼板の結晶粒の大小を判定する結晶粒度判
定方法が記載されている。Japanese Patent Application Laid-Open No. 51-29187 also discloses a crystal grain size determination method for determining the size of crystal grains of a silicon steel sheet by ultrasonic waves.
【0010】このような結晶粒測定装置によれば、珪素
鋼板の異常粒をオンラインで非破壊測定することが可能
である。[0010] According to such a crystal grain measuring apparatus, it is possible to perform non-destructive online measurement of abnormal grains of a silicon steel sheet.
【0011】[0011]
【発明が解決しようとする課題】しかしながら、従来
は、結晶粒測定装置の異常を早期に発見できる方法が考
案されておらず、結晶粒測定装置の異常の発見が遅れる
場合があった。特に、硫化性腐食ガス等の悪雰囲気下に
置かれる超音波送信回路20や受信回路28の故障を、
迅速に発見可能な異常判定方法が望まれていた。However, conventionally, no method has been devised to detect an abnormality in the crystal grain measuring device at an early stage, and there have been cases where the discovery of an abnormality in the crystal grain measuring device is delayed. In particular, failure of the ultrasonic transmission circuit 20 and the reception circuit 28 placed in a bad atmosphere such as sulfide corrosive gas,
An abnormality determination method that can be quickly found has been desired.
【0012】本発明は、前記従来の問題点を解消するべ
くなされたもので、結晶粒測定装置の異常を早期に発見
可能な結晶粒測定装置の異常判定方法を提供することを
目的とする。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned conventional problems, and an object of the present invention is to provide a method for judging an abnormality of a crystal grain measuring device which can detect an abnormality of the crystal grain measuring device at an early stage.
【0013】[0013]
【課題を解決するための手段】本発明は、結晶方位が揃
った正常粒と揃っていない異常粒が混在する帯状被検材
に、超音波を走査しながら送受信し、被検材中の各結晶
の結晶方位による超音波伝播速度の差を、被検材内の多
重反射干渉による共振現象を利用して振幅の差に変換
し、異常粒が発生した時の振幅減衰量から、被検材中の
異常粒を検出する結晶粒測定装置において、一走査で得
られるデータの中から、振幅の大きなデータを所定数抽
出して、その平均値を求め、該平均値が所定範囲外であ
る時に、結晶粒測定装置の異常と判定することにより、
前記目的を達成したものである。SUMMARY OF THE INVENTION According to the present invention, a strip-shaped test material in which normal grains having a uniform crystal orientation and abnormal grains having a non-uniform crystal orientation are mixed is transmitted and received while scanning an ultrasonic wave. The difference in ultrasonic wave propagation speed due to the crystal orientation of the crystal is converted into a difference in amplitude using the resonance phenomenon caused by multiple reflection interference in the test material. In the crystal grain measuring device that detects abnormal grains in the data, a predetermined number of data having a large amplitude is extracted from the data obtained in one scan, and an average value thereof is obtained, and when the average value is out of the predetermined range, By determining that the crystal grain measuring device is abnormal,
The above object has been achieved.
【0014】又、前記所定範囲を、正常粒の基準振幅に
対応した値としたものである。Further, the predetermined range is a value corresponding to a reference amplitude of a normal grain.
【0015】[0015]
【作用】測定対象の鋼板が全面異常粒の場合でも、必ず
正常粒と同じ結晶方位の結晶粒があることから、例えば
幅方向に走査したデータの中には、必ず共振して正常粒
と同じ振幅を示すデータがいくつか含まれる。従って、
一走査で得られるデータの中から、振幅の高い方からデ
ータを採取し、その振幅を正常粒の基準振幅と比較すれ
ば、測定回路の異常を早期に判定することができる。[Function] Even if the steel sheet to be measured has an abnormal grain on the entire surface, since there is always a crystal grain having the same crystal orientation as a normal grain, for example, data scanned in the width direction always resonates and is the same as a normal grain. Some data indicating the amplitude are included. Therefore,
If data is collected from data having a higher amplitude from data obtained in one scan, and the amplitude is compared with the reference amplitude of a normal grain, abnormality of the measurement circuit can be determined at an early stage.
【0016】[0016]
【実施例】以下、図面を参照して、本発明の実施例を詳
細に説明する。Embodiments of the present invention will be described below in detail with reference to the drawings.
【0017】例えば図3のような装置を用いて実施され
る、本実施例における板端の検出及び異常粒の判定は、
図4に示すような手順に従って行われる。For example, the detection of the plate edge and the determination of the abnormal grain in this embodiment, which are carried out by using an apparatus as shown in FIG.
This is performed according to a procedure as shown in FIG.
【0018】即ち、予め、正常粒の電圧レベル平均がV
b (7V)になるよう調整しておく(ステップ10
0)。That is, the average voltage level of normal grains is V
b (7V) (Step 10
0).
【0019】次いで、ステップ102で、図5に示す如
く、各走査L1〜L7毎に、例えば幅方向に1mmピッチ
で超音波受信回路28出力の電圧データをサンプリング
して、図6に示すようなL走査目の測定データを得る。Next, in step 102, as shown in FIG. 5, for each of the scans L1 to L7, the voltage data of the output of the ultrasonic receiving circuit 28 is sampled at a pitch of, for example, 1 mm in the width direction, and as shown in FIG. The measurement data of the Lth scan is obtained.
【0020】次いで、ステップ104に進み、一走査の
電圧データの中から、板端レベルVa (例えば9V)以
下になる範囲を求め、この範囲を板の範囲とする。電圧
レベルVが板端レベルVa を超える範囲は、板がない部
分であるので、データ処理の対象外とする(ステップ1
06)。Next, the routine proceeds to step 104, where a range of the plate edge level Va (for example, 9 V) or less is determined from the voltage data of one scan, and this range is defined as the range of the plate. The range where the voltage level V exceeds the plate edge level Va is a portion where there is no plate, and is excluded from data processing (step 1).
06).
【0021】ステップ104の判定結果が正である板範
囲の電圧データについて、ステップ110で、異常粒判
定レベルVc (例えば4V)と比較し、該Vc 以下の部
分は異常粒と判定する(ステップ112)。同様に板範
囲内の電圧データにおいて、異常粒判定レベルVc を超
える部分は正常粒と判定する(ステップ114)。In step 110, the voltage data in the plate range for which the determination result in step 104 is positive is compared with an abnormal grain determination level Vc (for example, 4 V), and a portion below Vc is determined as an abnormal grain (step 112). ). Similarly, in the voltage data within the plate range, a portion exceeding the abnormal grain determination level Vc is determined to be a normal grain (step 114).
【0022】一方、本発明による測定回路の異常判定
は、図7に示すような手順に従って実行される。On the other hand, the abnormality determination of the measuring circuit according to the present invention is performed according to the procedure as shown in FIG.
【0023】前出図4のステップ104で抽出された板
範囲内の電圧データについて、チャンネル毎(実施例で
は左方の第1チャンネルと右方の第2チャンネルの2チ
ャンネル)に、電圧の最大値からN個(実施例では3
個)の電圧データをサンプリングする。図6の例では、
第1チャンネルのデータV11、V12、V13、及び
第2チャンネルのデータV21、V22、V23の各3
個がサンプリングされる。データのサンプリングは、例
えば鋼板10の先頭から所定距離Lm 以降のn 回分の走
査をサンプリングする。With respect to the voltage data in the range of the plate extracted in step 104 of FIG. 4 described above, the maximum of the voltage is set for each channel (in the embodiment, two channels of the first channel on the left and the second channel on the right). N values (3 in the example)
Sampled) voltage data. In the example of FIG.
Each of data V11, V12, V13 of the first channel and data V21, V22, V23 of the second channel.
Are sampled. The data is sampled, for example, by scanning n times after a predetermined distance Lm from the head of the steel plate 10.
【0024】次いで、チャンネル毎にN個の電圧データ
の平均値を求める(ステップ202)。Next, an average value of N pieces of voltage data is obtained for each channel (step 202).
【0025】次いで、ステップ204に進み、算出され
た平均値を、正常粒の基準電圧(Vb )±a %(例えば
5%)以内であるか否かを判定する(ステップ20
4)。判定結果が正であれば、正常と判定する(ステッ
プ206)。一方、ステップ204の判定結果が否であ
る場合には、該当チャンネルの送受信回路、探触子の劣
化、ドリフト等の異常と判定する(ステップ208)。Next, the process proceeds to step 204, where it is determined whether or not the calculated average value is within the reference voltage (Vb) ± a% (for example, 5%) of normal grains (step 20).
4). If the determination result is positive, it is determined that it is normal (step 206). On the other hand, if the result of the determination in step 204 is negative, it is determined that the transmission / reception circuit and probe of the corresponding channel are abnormal, such as deterioration and drift (step 208).
【0026】上記判定を、鋼板毎、探傷チャンネル毎に
実施し、測定回路の異常判定を行う。The above determination is performed for each steel plate and each flaw detection channel to determine whether the measurement circuit is abnormal.
【0027】なお、図3の装置では、鋼板によって反射
された超音波が検出されていたが、鋼板10の上方と下
方に1対の探触子を配設し、鋼板を通過した超音波を検
出する透過型の結晶粒測定装置にも本発明が同様に適用
できることは明らかである。In the apparatus shown in FIG. 3, the ultrasonic waves reflected by the steel sheet are detected. However, a pair of probes are provided above and below the steel sheet 10 so that the ultrasonic waves passing through the steel sheet can be detected. It is clear that the present invention can be similarly applied to a transmission type crystal grain measuring device for detection.
【0028】[0028]
【発明の効果】以上説明した通り、本発明によれば、送
受信回路や探触子の劣化、ドリフト等の異常を、早期に
発見できるという優れた効果を有する。As described above, the present invention has an excellent effect that abnormalities such as deterioration and drift of a transmitting / receiving circuit and a probe can be detected at an early stage.
【図1】本発明の測定対象の一例である異常粒を含んだ
珪素鋼板を模式的に示す斜視図FIG. 1 is a perspective view schematically showing a silicon steel sheet containing abnormal grains, which is an example of a measurement target of the present invention.
【図2】結晶粒の測定原理を示す断面図FIG. 2 is a cross-sectional view showing the principle of measuring crystal grains.
【図3】結晶粒測定装置の基本的な構成例を示す、一部
斜視図を含むブロック線図FIG. 3 is a block diagram including a partial perspective view showing a basic configuration example of a crystal grain measuring device.
【図4】結晶粒測定装置の実施例における板端の検出及
び異常粒の判定手順を示す流れ図FIG. 4 is a flowchart showing a procedure for detecting a plate edge and determining an abnormal grain in the embodiment of the crystal grain measuring apparatus.
【図5】測定対象の走査経路の例を示す斜視図FIG. 5 is a perspective view showing an example of a scanning path of a measurement target.
【図6】一走査で得られるデータの例を示す線図FIG. 6 is a diagram showing an example of data obtained by one scan.
【図7】本発明による異常判定の手順を示す流れ図FIG. 7 is a flowchart showing a procedure of abnormality determination according to the present invention.
10…鋼板 20…超音波発信回路 22、22A、22B…超音波探触子 26…走査装置 28…超音波受信回路 DESCRIPTION OF SYMBOLS 10 ... Steel plate 20 ... Ultrasonic transmission circuit 22, 22A, 22B ... Ultrasonic probe 26 ... Scanning device 28 ... Ultrasonic reception circuit
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) G01N 29/00 - 29/28 ──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. 7 , DB name) G01N 29/00-29/28
Claims (2)
常粒が混在する帯状被検材に、超音波を走査しながら送
受信し、被検材中の各結晶の結晶方位による超音波伝播
速度の差を、被検材内の多重反射干渉による共振現象を
利用して振幅の差に変換し、異常粒が発生した時の振幅
減衰量から、被検材中の異常粒を検出する結晶粒測定装
置において、 一走査で得られるデータの中から、振幅の大きなデータ
を所定数抽出して、 その平均値を求め、 該平均値が所定範囲外である時に、結晶粒測定装置の異
常と判定することを特徴とする結晶粒測定装置の異常判
定方法。An ultrasonic wave is transmitted and received while scanning an ultrasonic wave to and from a band-shaped test material in which normal grains having uniform crystal orientations and abnormal grains having a non-uniform crystal orientation are mixed. A crystal that converts the speed difference into an amplitude difference using the resonance phenomenon caused by multiple reflection interference in the test material, and detects abnormal grains in the test material from the amplitude attenuation when abnormal grains occur. In the grain measuring device, a predetermined number of data having a large amplitude is extracted from the data obtained in one scan, and the average value is obtained. When the average value is out of the predetermined range, it is determined that the crystal grain measuring device is abnormal. A method for determining an abnormality of a crystal grain measuring device, wherein the determination is performed.
粒の基準振幅に対応した値とされていることを特徴とす
る結晶粒測定装置の異常判定方法。2. A method according to claim 1, wherein said predetermined range is a value corresponding to a reference amplitude of a normal grain.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05242413A JP3132263B2 (en) | 1993-09-29 | 1993-09-29 | Abnormality judgment method of crystal grain measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05242413A JP3132263B2 (en) | 1993-09-29 | 1993-09-29 | Abnormality judgment method of crystal grain measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0798301A JPH0798301A (en) | 1995-04-11 |
| JP3132263B2 true JP3132263B2 (en) | 2001-02-05 |
Family
ID=17088761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP05242413A Expired - Fee Related JP3132263B2 (en) | 1993-09-29 | 1993-09-29 | Abnormality judgment method of crystal grain measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3132263B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100564092B1 (en) * | 2002-10-11 | 2006-03-27 | 주식회사 세라콤 | Method for the Solid-State Single Crystal Growth |
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1993
- 1993-09-29 JP JP05242413A patent/JP3132263B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0798301A (en) | 1995-04-11 |
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