JP3132707B2 - Light beam deflector - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light beam deflecting device, which is devised so that a light beam propagating in space can be deflected by a small and simple structure.

[0002]

2. Description of the Related Art A light beam deflector is used to deflect a light beam propagating in a three-dimensional space in an arbitrary direction.
As a conventional light beam deflector, those shown in FIGS. 11 and 12 are used.

In a deflecting device 01 whose configuration is schematically shown in FIG. 11, a mirror 04 is provided obliquely on a shaft 03 of a rotating body 02, and a mirror 07 is provided obliquely on a shaft 06 of the rotating body 05. Moreover, the axes 03,06 are not parallel. And rotating body 0
By changing the angle of the mirror 04,07 by 2,05, the incident light beam B _in a mirror 04,07 and changing the direction of the reflected beam B _out1, B _out2 which is reflected.

[0004] A deflection device 010 whose schematic structure is shown in FIG.
Is described in JP-A-62-184434. In the deflecting device 010, a mirror 011 is provided on a holder 012, and the holder 012 is provided on a holder 014 rotatably via a shaft 013. Holder 01
4 is rotatably provided via a shaft 015. The holder 012 and 014 are rotated by a drive mechanism (not shown) to change the direction of the mirror 011 and deflect the light beam.

The conventional light beam deflector 01 shown in FIG. 11 has a complicated structure and requires many parts. In addition, since two mirrors 04 and 07 are used, there is a great restriction in downsizing.

[0006]

Further, in the conventional light beam deflecting device 010 shown in FIG. 12, since a rotational force must be applied to the shafts 013 and 015 having different axial directions and positions, the driving mechanism becomes complicated. However, miniaturization was difficult.

An object of the present invention is to provide an ultra-compact and inexpensive light beam deflecting device in view of the above prior art.

[0008]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention is directed to a hemisphere formed by a light transmitting member having a solid hemisphere shape, and a light beam provided on a plane portion of the hemisphere to reflect a light beam. The surface of the reflective layer, which is formed of a plate-shaped light transmitting member and faces the surface on which the light beam is incident, contacts the spherical portion of the hemisphere at three or more points to rotatably support the hemisphere. A substrate having a groove formed therein, an optical oil filled in the groove, and a drive mechanism arranged to face the plane portion of the hemisphere and rotate the hemisphere.

Further, in the configuration of the present invention, the driving mechanism may include a plurality of support rods that apply a rotational force to the hemisphere by moving independently of each other while the tip contacts the flat portion of the hemisphere. Features.

Further, according to the structure of the present invention, the driving mechanism is provided and provided at a first electrode provided on a plane portion of the hemisphere and to which electric charge is applied, and at a position facing the first electrode. It is characterized in that it has a plurality of second electrodes whose charge amounts are individually adjusted to generate an electrostatic force with the first electrode.

Further, according to the structure of the present invention, the drive mechanism may move between the magnetic body provided on the flat portion of the hemisphere and the magnetic body by independently moving so as to approach / separate from the magnetic body. And a plurality of magnets that generate magnetic force.

Further, in the configuration of the present invention, the hemisphere, the substrate, and the optical oil have the same refractive index.

[0013] The structure of the present invention is characterized in that the reflection layer is made of aluminum.

[0014]

According to the present invention, when the hemisphere is rotated by the driving mechanism, the direction of the reflection layer changes and the deflection direction of the light beam changes. The hemisphere is simply supported by the groove of the substrate, and the configuration is simple.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 shows a light beam deflector according to a first embodiment of the present invention. As shown in the figure, the hemisphere 1 has a solid hemispherical shape, and is formed of optical glass having a refractive index in the range of 1.4 to 1.9 or silicon transmitting infrared rays.
The reflecting layer 2 is provided on the plane portion 1a of the hemisphere 1.
The reflective layer 2 is formed of a metal film having almost no incident angle dependence.

The substrate 3 has a plate shape and is made of a member made of the same material as the hemisphere 1, that is, optical glass having a refractive index in the range of 1.4 to 1.9 or silicon transmitting infrared rays. On the upper surface 3a of the substrate 3, a conical groove 4 is formed. The hemisphere 1 is rotatably accommodated in the groove 4, and the spherical surface 1 b of the hemisphere 1 is in contact with the inner surface of the groove 4. This contact portion forms one circumference (which can be considered as a set of infinite points). That is, the hemisphere 1 is in contact with and supported at countless points on the inner surface of the groove 4. And hemisphere 1
The center of rotation 1c is aligned with the center of the plane portion 1a.

The groove 4 is filled with an optical oil 5.
The optical oil 5 is an oil that absorbs little with respect to the wavelength of the propagating light beam, and generally uses a refractive index matching liquid. If the refractive index of the optical oil 5, the hemisphere 1, and the substrate 3 are all the same, it is possible to prevent the generation of stray light due to Fresnel reflection at the groove 4 and the spherical portion 1b. In this case, considering the compatibility with the optical oil 5, the hemisphere 1
The use of the optical glass (refractive index: 1.4 to 1.9) as the material of the substrate 3 is easier to prevent the generation of stray light due to Fresnel reflection than that of the silicon.

The driving mechanism 6 has a flat portion 1a above the hemisphere 1.
Are arranged opposite to each other. Although the detailed structure will be described in another embodiment, the drive mechanism 6 rotates the hemisphere 6 by applying a force to the hemisphere 1 in a contact type or a non-contact type. Here, “rotation” means that the flat portion 1 a of the hemisphere 1 is tilted with respect to the upper surface 3 a of the substrate 3.

[0020] In the optical beam deflecting device has the above configuration, transmitted through the incident from the lower surface 3b of the substrate 3 a light beam B _in an angle, the light beam B _in the substrate 3, the optical oil 5 and hemisphere 1 To reach the reflective layer 2 and is reflected by the reflective layer 2. The reflected light beam B _out passes through the hemisphere 1, the optical oil 5 and the substrate 3, and is emitted obliquely to the outside from the lower surface 3 b of the substrate 3.

When the driving mechanism 6 rotates the hemisphere 1, the direction of the reflected light beam B _out can be changed, for example, from the direction shown by a solid line to the direction shown by a dotted line in FIG. That is, the light beam can be deflected.

As described above, in the present embodiment, since the center of rotation 1c of the hemisphere 1 and the center of the plane portion 1a are coincident with each other, even if the rotation angle of the hemisphere 1 is different, the light beam _Bin is not emitted. The point to be reflected always coincides with the center of the plane portion 1a.

Further, since the drive mechanism 6 is arranged at a position facing the flat portion 1a, it does not _hinder the propagation of the light beams B _in and B _out .

[0024] surface for reflecting the light beam B _in the because it is the surface in contact with the flat portion 1a of the reflective layer 2, the surface facing the drive mechanism 6 of the reflective layer 2, oxide or drive mechanism 6
Even if the film is destroyed by the action of, the reflectance does not deteriorate. That is, the surface of the reflective layer 2 that is in contact with the plane portion 1a (the surface that contributes to the reflection of the light beam) is not oxidized because it does not face the outside, and no force is directly applied from the drive mechanism 6 Therefore, the surface has a good reflection function without being roughened.

In the embodiment shown in FIG. 1, the shape of the groove 4 is conical, but the shape of the groove is not limited to this and may be another shape.
For example, as shown in FIG. 2, a cylindrical groove 4a may be formed,
As shown in FIG. 3, an intersection groove 4 that crosses two diches
b or a hemispherical hemispherical groove 4c as shown in FIG.

Next, a light beam deflector according to a second embodiment of the present invention will be described with reference to FIG. The description of the same parts as in the first embodiment is omitted, and only the parts unique to the second embodiment will be described. In the second embodiment, the hemisphere 1 and the substrate 3 were formed of quartz glass. The hemisphere 1 is formed by polishing a ball lens.
The ball lens is available from those having a diameter of about 300 μm, and in this embodiment, in consideration of the compatibility with the light beam,
The hemisphere 1 was formed by polishing a material having a diameter of 1500 μm. On the other hand, a conical groove 4 was formed on the upper surface 3a of the substrate 3 by cutting or molding.

The effective diameter of the hemisphere 1 is 1000
A μm reflective layer 12 was provided. This reflection layer 12 is formed of aluminum. Aluminum has a high reflectivity over a wide wavelength range, so that the reflective layer 12
Is formed of aluminum, a high-bandwidth light beam deflecting device can be realized.

The drive mechanism 100 of the second embodiment includes three support rods 111, 112, and 113, and is disposed so as to face the flat portion 1a of the hemisphere 1. Each support rod 111, 11
2 and 113 have a diameter of about 300 μm.
00, as shown in FIG.
The support rods 111, 112, and 113 were arranged such that the tips of 11, 112, and 113 were located on a circumference having a diameter of 800 μm. Each of the support rods 111, 112, and 113 can be independently moved in the longitudinal direction by an electromagnetic actuator.

As the electromagnetic actuator, for example, FIG.
As shown in FIG. 5, a solenoid 120 having two coils 121 and 122 was used. When the coil current is controlled so that the magnetic fields generated by the coils 121 and 122 are in opposite directions, the support rod 111 (112, 1
13) protrudes and controls the coil current so that the coil magnetic field is in the same direction.
13) retreats.

Each of the support rods 111, 112, 113 is placed in a state where the tip of the support rod 111, 112, 113 is placed on the upper surface of the reflection layer 12.
The rotation angle of the hemisphere 1 and, consequently, the deflection angle of the light beam can be changed by controlling the projecting length of the projections 1, 112, 113.

In the second embodiment, the hemisphere 1 is supported by the conical groove 4 so that the rotation center 1c of the hemisphere 1 does not shift, and the deflection angle is uniquely determined by the two support rods. Decided. Therefore, when changing the deflection angle, one of the three support rods 111, 112, 113 is set free. By doing so, even if the hemisphere 1 is rotated due to a change in the deflection angle, it is possible to prevent the drive mechanism 100 and the hemisphere 1 from being damaged.

Next, a light beam deflecting device according to a third embodiment of the present invention will be described with reference to FIGS. In FIG. 8, 1 is a hemisphere, 2 is a reflective layer, 3 is a substrate, and 4 is a groove, and these members are the same as those in the above-described embodiment.

The driving mechanism 200 used in the third embodiment rotates the hemisphere 1 using electrostatic force. The electrode 201 was formed by providing a Cr layer on the reflective layer 2 and providing an Au layer on the Cr layer.
Further, a substrate 202 was arranged facing the upper surface of the substrate 3, and a hole 203 was formed in a portion of the substrate 202 located above the electrode 201. On the lower surface 202b of the substrate 202 and around the hole 203, the three divided electrodes 204a, 204
04b and 204c were arranged (see FIG. 9). These electrodes 204a, 204b, 204c are connected to wires 205a, 2
Electric charges can be individually applied through the lines 05b and 205c. On the other hand, an electrode 206 is provided on the upper surface 202a of the substrate 202.
Was formed. Then, one end of the Au wire 207 is bonded to the Au layer of the electrode 201 by ultrasonic bonding.
07 was joined to the electrode 206. Therefore, the electrode 20
6, charges can be applied to the electrode 201 via the wire 207. Further, the optical oil 5 was filled in the groove 4 and between the substrates 3 and 202.

In the driving mechanism 200 having the above-described configuration, the electric charge applied to the electrode 201 and the electrodes 204a, 204b, 20
When the polarities of the electric charges applied to the electrodes 4c are the same, a repulsive force is generated between the electrode 201 and the electrodes 204a, 204b, 204c by the electrostatic force. In this case, the electrodes 204a, 204
The hemisphere 1 can be rotated by the repulsive force by controlling the amounts of charge applied to the b and 204c to be different. The more the amount of charge applied, the more the electrostatic force
Also, the strength increases as the electrode area increases.

According to the driving mechanism 200, the electric charges of all the three electrodes 204a, 204b, and 204c can be simultaneously controlled, and the deflection angle can be controlled by these electrodes 20a, 204b, and 204c.
4a, 204b, and 204c are determined by the difference in the amount of charge applied between them. Therefore, the drive mechanism 200 can control the deflection angle more quickly than the drive mechanism 100 that directly rotates the hemisphere by the support rods 111, 112, and 113 shown in FIG.

Next, a light beam deflecting device according to a fourth embodiment of the present invention will be described with reference to FIG. The driving mechanism 300 used in the fourth embodiment rotates the hemisphere 1 by using a magnetic repulsive force. Explaining the structure, a magnetic film 301 is provided on the reflective layer 2, and the magnetic film 301 is magnetized in a direction perpendicular to the film. Further, three rod-shaped magnets 30 axially magnetized so as to repel the magnetic film 301.
2, 303, 304 are arranged above the magnetic film 301 so that the respective bar-shaped magnets 302, 303, 304 can be moved in the vertical direction. Further, for example, the bar-shaped magnets 302, 303, 304 can be individually and independently driven by a solenoid as shown in FIG. The other parts are the same as in the first embodiment.

In the drive mechanism 300, each rod-shaped magnet 30
The rotation of the hemisphere 1, that is, the deflection angle can be adjusted by controlling the protruding lengths of 2, 303 and 304.

According to the light beam deflecting device of each of the above embodiments, it is possible to realize a very small and inexpensive light beam deflecting device. Therefore, by integrating the light beam deflecting device of the present invention, it is possible to realize an inexpensive light beam deflecting device compatible with multiple beams.

[0039]

According to the first aspect of the present invention, the deflection angle of the reflection layer is changed by rotating the hemisphere with a simple configuration in which the hemisphere having the reflection layer is supported by the groove formed in the substrate. be able to. Further, in order to rotate the rotating body, the driving mechanism only needs to apply a force to the flat portion of the hemisphere, and the configuration of the driving mechanism is simplified. Therefore, an inexpensive light beam deflecting device having a simple overall configuration can be realized.

According to the second aspect of the present invention, since the plurality of support rods are in contact with the hemisphere and rotate the hemisphere, the hemisphere can be accurately and reliably rotated, that is, the deflection angle can be adjusted.

According to the third and fourth aspects of the present invention, the hemisphere is rotated in a non-contact manner by electrostatic force or magnetic force, so that the hemisphere and the reflection layer are not damaged, and the deflection angle can be adjusted with good responsiveness. it can.

According to the fifth aspect of the present invention, since the refractive indices of the hemisphere, the substrate, and the optical oil are the same, generation of stray light due to Fresnel reflection can be prevented.

According to the sixth aspect of the present invention, since the reflection layer is formed of aluminum, a wide-band light beam deflecting device can be realized.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a first embodiment of the present invention.

FIG. 2 is a configuration diagram showing a cylindrical groove.

FIG. 3 is a configuration diagram showing an intersection groove.

FIG. 4 is a configuration diagram showing a hemispherical groove.

FIG. 5 is a configuration diagram showing a second embodiment of the present invention.

FIG. 6 is a bottom view showing a driving mechanism.

FIG. 7 is a configuration diagram showing a solenoid.

FIG. 8 is a configuration diagram showing a third embodiment of the present invention.

FIG. 9 is an explanatory diagram showing an arrangement of electrodes.

FIG. 10 is a configuration diagram showing a fourth embodiment of the present invention.

FIG. 11 is a configuration diagram showing a conventional light beam deflecting device.

FIG. 12 is a configuration diagram showing a conventional light beam deflecting device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Hemisphere 1a Flat part 1b Spherical part 1c Rotation center 2 Reflective layer 3 Substrate 3a Upper surface 3b Lower surface 4 Groove 4a Cylindrical groove 4b Intersection groove 4c Hemispheric groove 5 Optical oil 6 Drive mechanism 12 Reflection layer 100 Drive mechanism 111, 112, 113 Support Rod 120 Solenoid 121, 122 Coil 200 Drive mechanism 201 Electrode 202 Substrate 203 Hole 204a, 204b, 204c Electrode 205a, 205b, 205c Wire 206 Electrode 207 Wire 300 Drive mechanism 301 Magnetic film 302, 303, 304 Rod magnet

────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Akinori Watanabe 1-6, Uchisaiwaicho, Chiyoda-ku, Tokyo Nippon Telegraph and Telephone Corporation (56) References JP-A-4-213294 (JP, A) JP-A Sho 63-173013 (JP, A) JP-A-7-72410 (JP, A) JP-A-1-238609 (JP, A) JP-A-4-199116 (JP, A) JP-A-5-297306 (JP, A A) Japanese Utility Model Hei 4-67615 (JP, U) Special Table 62-502291 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) G02B 26/08 G02B 26/10 101

Claims (6)

(57) [Claims] 1. A hemisphere formed by a light transmitting member having a solid hemispherical shape, a reflecting layer provided on a plane portion of the hemisphere to reflect a light beam, and a light formed by a plate-shaped light transmitting member. A substrate having a groove that contacts the spherical portion of the hemisphere at three or more points and rotatably supports the hemisphere on a surface facing the surface on which the beam is incident; and an optical oil filled in the groove. A light beam deflecting device, comprising: a driving mechanism arranged to face the plane portion of the hemisphere and rotate the hemisphere. 2. The driving mechanism according to claim 1, wherein the driving mechanism has a plurality of support rods that apply a rotational force to the hemisphere by moving independently of each other at a tip thereof in contact with a plane portion of the hemisphere. 2. The light beam deflecting device according to 1. 3. The driving mechanism according to claim 1, wherein the driving mechanism includes a first electrode provided on a plane portion of the hemisphere, to which a charge is applied, and a charge amount provided at a position opposed to the first electrode, the charge being applied to the first electrode. The light beam deflecting device according to claim 1, further comprising a plurality of second electrodes that are adjusted to generate an electrostatic force between the first electrodes. 4. The driving mechanism generates a magnetic force between a magnetic body provided on a plane portion of the hemisphere and a magnetic body by independently moving so as to approach / separate from the magnetic body. The light beam deflecting device according to claim 1, comprising a plurality of magnets. 5. The light beam deflector according to claim 1, wherein said hemisphere, said substrate, and said optical oil have the same refractive index. 6. The light beam deflector according to claim 1, wherein said reflection layer is made of aluminum.