JP3136073B2 - Vibration body vibration detection device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for detecting vibration of a vibrating body for detecting vibration having six degrees of freedom without attenuating the vibration of the vibrating body.

[0002]

2. Description of the Related Art A device for detecting vibration of a vibrating body is known from Japanese Patent Publication No. 3-11417. As shown in FIG. 17, this conventional example has a base 3
0, and the movable base 32 is fixed to the base 30.
Is movable by a cylinder 33, the vibrating body 1 such as a motor is elastically held by vibrating body receiving rubbers 34 provided on the fixed base 31 and the movable base 32, and the power supply means 20 is connected to the vibrating body 1. The vibrating body 1 such as a motor is vibrated by applying a voltage, and the vibrating body 1 is vibrated by a non-contact vibration sensor 35 supported by a vibrating body receiving rubber 34 so as to be in a non-contact state with the vibrating body 1. Was to be detected. When the vibrating body 1 is held by the vibrating body receiving rubber 34, a metal plate 36 is interposed as shown in FIG. 17 in order to increase abrasion resistance. Further, in the conventional example, the cylinder 33 is used for the purpose of not damping the vibration of the vibrating body 1.
The vibration of the vibrating body 1 is detected in a state where the holding force of the vibration member 1 is weakened.

[0003]

In the above conventional example, since the metal plate 36 is provided, the vibration is attenuated for all six degrees of freedom of the vibrating body 1 vibrating three-dimensionally with six degrees of freedom. There was a problem that the measurement could not be performed accurately. Further, since the non-contact vibration sensor 35 is supported by rubber, the position of the non-contact vibration sensor 35 cannot be determined accurately,
Further, the non-contact vibration sensor 35 is affected by the vibrating body 1 and cannot accurately detect the vibration of the vibrating body 1. Further, since the vibrating body 1 is directly supported by the vibrating body receiving rubber 34, the vibrating body receiving rubber 34 is easily damaged, and a change in the holding force of the vibrating body 1 affects the vibration phenomenon,
There is a problem that maintaining the performance of the device becomes very difficult.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art, and has as its object to detect vibrations of a vibrating body without attenuating it, and to accurately detect the vibration. Another object of the present invention is to provide a vibration detecting device for a vibrating body, in which the vibrating body is not directly supported by the shock absorbing material, so that the shock absorbing material is hardly damaged.

[0005]

In order to solve the above-mentioned problems of the prior art and achieve the object of the present invention, the vibration detecting device for a vibrating body of the present invention holds the vibrating body 1 on a jig 4. Holding hands
A stage 2 and vibration detecting means 3 for the vibrating body 1;
Can be provided on the opposing support rib 9 and one support rib 9.
It can be formed by a moving plate 10 and means for moving the movable plate 10.
The vibrating body 1 is supported by the moving plate 10 and the opposing support rib 9.
While the vibrating body 1 is supported by the jig 4
The vibrating body is configured so that the center of gravity and the center of gravity of the jig 4 match.
The jig 4 is provided with a vibration detecting means 3 for detecting the vibration of
To detect the vibration of the vibrating body with 6 degrees of freedom
Are arranged in each of two directions of each axis of the rectangular coordinate system,
Holding means 2 for holding the vibration and vibration detecting means 3 for the vibrating body 1 are provided.
The obtained jig 4 is supported on a base via a cushioning material 6 which can swing in six degrees of freedom.

Further, holding means for holding the vibrating body on the jig 4
2 and a center-of-gravity adjusting means.
A movable plate 10 provided on one support rib 9,
A means for moving the plate 10 and a transfer means provided on the other support rib 9.
The moving plate 22 and a means for moving the moving plate 22 may be formed.
The vibrating body 1 is supported by the moving plate 10 and the moving plate 22.
Then, the center-of-gravity adjusting means is repaired without holding the vibrating body 1.
First center-of-gravity adjusting means 21a for adjusting the tool 4 horizontally
In holding the vibrating body 1 on the horizontal jig 4,
A second method for horizontal adjustment while holding the vibrating body 1
It is composed of the center of gravity adjusting means 21b, and the holding means 2 and the center of gravity adjustment
A jig 4 provided with means is supported on a base 5 via a buffer material 6 which can swing in six degrees of freedom .
In order to detect vibrations with 6 degrees of freedom,
It is also preferable that two vibration detecting means 3 are arranged .

It is also preferable that the driving means 7 for driving the holding means 2 of the vibrating body 1 is arranged on the base independently of the jig 4. It is also preferable to provide a lock means 8 for preventing vibration of the jig 4 except when detecting vibration of the vibrating body 1 .

It is also preferable to provide a driving means 7 capable of driving the holding means 2 and the locking means 8. Also movable
It is also preferable to provide a cylinder 11 for driving the plate 10 .

Further, it is preferable to provide the vibrating means 12 on the jig 4. It is also preferable to provide a position detecting means 13 for detecting the position of the jig 4. It is also preferable to provide a detecting means capable of detecting the vibration of the vibrating body 1 and the position of the jig 4. It is also preferable to provide a power supply means for the vibrating body 1 on the jig 4.

It is also preferable that the jig 4 is provided with an external vibration means 40 for performing impulse-like vibration from outside the jig 4. The moving means 4 for moving the driving means 7
3, the locking means 8 is separated from the driving means 7 and the moving means 43, and the locking means 8 is constituted by at least a plurality of pins 60.
It is also preferable that the jig 4 is three-dimensionally positioned with the plurality of pins 60 inserted into the lock pin insertion holes 61 while being freely insertable into the lock pin insertion holes 61.

The vibrating means 12 attached to the jig 4 has one
The uniaxial vibrator 12a may be attached to the jig 4 such that the uniaxial vibrator 12a is not parallel to any one of the orthogonal coordinate axes on which the vibration detecting means 3 is disposed. preferable. Further, it is preferable to provide a vibration direction adjusting means that allows the vibration direction of the jig 4 by the uniaxial vibration device 12a to be adjusted freely.

It is also preferable to provide a waveform generator 41 capable of changing the excitation frequency for vibrating the one-axis exciter 12a. It is also preferable to provide a waveform generator 41 that can generate a plurality of excitation frequencies for vibrating the uniaxial exciter 12a. It is also preferable that the vibration means 12 is a voice coil motor.

[0013]

According to the present invention having the above structure, the jig 4
Holding means 2 for holding the vibrating body 1 and a hand for detecting vibration of the vibrating body 1
A supporting rib 9 having a step 3 and facing the holding means 2;
Movable plate 10 provided on one of the support ribs 9 and movable plate 10
Supporting ribs formed by the moving means and facing the movable plate 10
9 supports the vibrating body 1 and attaches the vibrating body 1 to the jig 4.
The center of gravity of the vibrating body 1 matches the center of gravity of the jig 4 in the supported state
To detect vibration of the vibrating body 1.
When the movement detecting means 3 is provided on the jig 4,
Two in each axis direction of Cartesian coordinates to detect the vibration of freedom
And holding means 2 for holding the vibrating body 1
The jig 4 provided with the vibration detecting means 3 of the body 1 is supported on the base via the shock-absorbing material 6 which can swing in six degrees of freedom.
When the vibrating body 1 is vibrated, the vibrating body 1 and the jig 4 vibrate integrally, and the vibrations are not attenuated by the vibration detecting means 3 fixed to the jig 4 and are arranged in the respective axial directions. Two
Is calculated between the output values of the vibration detecting means 3 of the
Vibration of Cartesian Cartesian Axis and Rotation Direction around Cartesian Axis
Can be detected, and the vibration of the vibrating body 1 with six degrees of freedom can be detected.
Can be issued.

Further, holding means for holding the vibrating body on the jig 4
2 and a center-of-gravity adjusting means.
A movable plate 10 provided on one support rib 9,
A means for moving the plate 10 and a transfer means provided on the other support rib 9.
The moving plate 22 and a means for moving the moving plate 22 may be formed.
The vibrating body 1 is supported by the moving plate 10 and the moving plate 22.
Then, the center-of-gravity adjusting means is repaired without holding the vibrating body 1.
First center-of-gravity adjusting means 21a for adjusting the tool 4 horizontally
In holding the vibrating body 1 on the horizontal jig 4,
A second method for horizontal adjustment while holding the vibrating body 1
It is composed of the center of gravity adjusting means 21b, and the holding means 2 and the center of gravity adjustment
A jig 4 provided with means is supported on a base 5 via a buffer material 6 which can swing in six degrees of freedom .
In order to detect vibrations with 6 degrees of freedom,
In the case where two vibration detecting units 3 are arranged , the position of the center of gravity of the jig 4 in the horizontal plane is adjusted by adjusting the first center of gravity adjusting unit 21a and the second center of gravity adjusting unit 21b.
The position of the center of gravity of the vibrating body 1 in the horizontal plane is viewed in the horizontal plane.
When the vibrating body 1 is vibrated in this state , the vibrating body 1 and the jig 4 vibrate integrally, and the jig 4
The two vibration detectors arranged in each axial direction are not attenuated by the vibration detecting means 3 provided at a position away from
A calculation is performed between the output values of the output means 3 and the orthogonal
Detects vibration in the rotation direction around the mark axis and the Cartesian coordinate axis.
To accurately detect vibration of the vibrating body 1 with 6 degrees of freedom
can do.

[0015]

Further, by arranging the driving means 7 for driving the holding means 2 of the vibrating body 1 on the base 5 independently of the jig 4, all the masses elastically supported by the cushioning material 6 can be reduced in weight. Therefore, the vibration gain with respect to the exciting force of the vibrating body 1 can be increased. A lock means 8 for preventing vibration of the jig 4 except when vibration of the vibrating body 1 is detected.
Is provided, the swing of the jig 4 due to the attachment and detachment of the vibrating body 1 to and from the jig 4 can be prevented, and the jig 4 can be accurately positioned.

Further , by providing a driving means 7 capable of driving the holding means 2 and the locking means 8, the driving means 7 drives the holding means 2 to hold or release the vibrating body 1; The lock 7 is unlocked or unlocked by the drive of the lock means 8 by the drive of the lock 7.

A cylinder 11 for driving the movable plate 10
Is provided to hold or release the vibration body 1 by driving the movable plate 10 by driving the cylinder 11, and the vibration body 1 can be automatically attached to and detached from the holding means 2.

Further, by providing the vibrating means 12 on the jig 4, a change in the performance of the apparatus due to a change in the characteristics of the cushioning member 6 can be detected. In other words, it is possible to check the abnormality of the device by providing the reference vibration means as a reference of the vibration force, detecting the vibration when a constant vibration force is generated, and comparing the vibration with the normal value. Become. Further, by providing the position detecting means 13 for detecting the position of the jig 4, it is possible to detect a change in the performance of the device due to a change in the characteristics of the cushioning material 6. That is, the initial position of the jig 4 can be detected, and the performance change can be detected by comparing the initial position with the normal value. Here, if a detecting means capable of detecting the vibration of the vibrating body 1 and the position of the jig 4 is provided, the detecting means is used to detect the vibration detecting means 3 of the vibrating body 1 and the jig 4 for detecting a change in the performance of the apparatus. Can be used also as the position detecting means 13 for detecting the position, and the configuration is simplified.

By providing the power supply means for the vibrating body 1 on the jig 4, it is not necessary to couple another vibrating system to the vibrating body 1. Further, by providing the jig 4 with an external vibration means 40 for performing impulse-like vibration from outside the jig 4,
The characteristics of the jig 4 can be checked by being vibrated by the external vibrating means 40 in the same state as in the vibration inspection of the vibrating body 1. Then, the characteristic of the jig 4 can be checked by constantly applying a constant excitation force to the jig 4 by the external vibration means 40.

A moving means 43 for moving the driving means 7
The locking means 8 is separated from the driving means 7 and the moving means 43, and the locking means 8 is constituted by at least a plurality of pins 60, and the plurality of pins 60 are inserted into lock pin insertion holes 61 of the jig 4. The jig 4 can be inserted into the jig 4 while a plurality of pins 60 are inserted into the lock pin insertion holes 61.
Is three-dimensionally positioned, the jig 4 can be positioned three-dimensionally with a simple configuration of inserting the pin 60, and the jig is vibrated by the vibration of the vibrating body 1 during the vibration inspection of the vibrating body 1. 4 enables accurate inspection without contacting the driving means 7.

The vibrating means 12 attached to the jig 4 has one
The one-axis vibrator 12a is attached to the jig 4 such that the uniaxial vibrator 12a is not parallel to any one of the orthogonal coordinate axes on which the vibration detecting means 3 is arranged. The characteristic check of the jig 4 can be performed simultaneously in six directions. In addition, by providing a vibrating direction adjusting means that can freely adjust the vibrating direction of the jig 4 by the uniaxial vibrator 12a, the vibrating force can be easily distributed evenly in all six directions. become.

Further, by providing the waveform generator 41 capable of changing the vibration frequency for vibrating the single-axis vibrator 12a, the frequency characteristics of the jig 4 can be checked. Further, by providing the waveform generator 41 capable of generating a plurality of excitation frequencies for vibrating the single-axis exciter 12a, the frequency characteristics of the jig 4 can be efficiently checked.

Further, since the vibrating means 12 is a voice coil motor, a linear vibrating force can be generated with respect to the input current, so that the setting of the vibration frequency can be facilitated.

[0025]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail based on embodiments shown in the accompanying drawings. FIG. 1 shows an embodiment of a vibration detecting device for a vibrating body according to the present invention. A support 14 is erected on the base 5, and the jig 4 is supported on the support 14 provided on the base 5 via a cushioning material 6 so as to be swingable in six degrees of freedom. Jig 4
The holding means 2 for holding the vibrating body 1, the vibration detecting means 3 for detecting the vibration of the vibrating body 1, the power supply means 20 as a power supply means for the vibrating body 1, and the characteristics of the cushioning material 6 A vibration means 12 serving as a reference vibration means for detecting a change is provided.

In the embodiment shown in the accompanying drawings, the holding means 2 is composed of opposing support ribs 9, a movable plate 10 provided on one of the support ribs 9, and means for moving the movable plate 10. The movable plate 10 is provided at the distal end of a movable body 15 movably penetrating the support rib 9.
The movable plate 10 is elastically pressed toward the opposing support rib 9 (the side indicated by the arrow A in FIG. 2) by the spring material 16 with the spring member 16 interposed therebetween. The vibrating body 1 is supported by the rib 9. The support rib 9 is provided with a shaft support 17, and a shaft 19, which is a fulcrum of a bell crank 18, is supported by the shaft support 17, and the cylinder 11 that constitutes the drive unit 7 that is arranged away from the jig 4. By applying an acting force to the bell crank 18, the movable body 15 having the movable plate 10 at the tip is moved in the direction of arrow B in FIG. 2 against the spring force of the spring material 16. The movable plate 10 is provided with a power supply means 20.

As shown in the explanatory view of FIG. 3, two vibration detecting means 3 for detecting the vibration of the vibrating body 1 are arranged in each of the directions of the orthogonal coordinates (X-axis, Y-axis, Z-axis). I have.
That is, the vibration detecting means 3x ₁ and 3x ₂ are arranged as the vibration detecting means 3 in the X-axis direction, and the vibration detecting means 3
Vibration detecting means 3y ₁ as a 3y ₂ is arranged, Yes disposed vibration detecting means 3z _1, 3z ₂ as a vibration detecting unit 3 in the Z-axis direction, the two vibration detecting means 3 arranged in the respective axis directions Is calculated between the output values of the vibration member 1 and the vibration of the vibration member 1 in six degrees of freedom, that is, the direction of the orthogonal coordinate axes of the vibration member 1 (X, Y, Z).
Direction) and the rotation direction (θx, θy, θ
(Z direction) vibration is detected. here,
The detected vibration may be any of vibration displacement, vibration speed, and vibration acceleration.

In the present invention, when the vibrating body 1 is held by the jig 4, the center of gravity of the vibrating body 1 is set to coincide with the center of gravity of the jig 4 . Then, the jig 4 is attached to the base 5 by 6
Buffer material 6 for supporting swingably freedom, for example, a spring member 6a ₁ of the elastic coefficient k ₁ as shown in FIG. 4, the elastic coefficient k ₁
Jig and the spring member 6a _2, the spring member 6b ₁ of the elastic coefficient k _2, Yes cushioning material 6 is constituted by a spring material 6b ₂ elastic coefficient k _2, which supports this as the vibration member 1 If 4 of the central axis passing through the center of gravity G of the entire mass is Y-axis direction, the Y-axis direction is set as the elastic axis of the spring member 6a ₁ and the spring member 6a ₂ are identical. Here, both the modulus of elasticity of the spring member 6a ₁ and the spring member 6a ₂ are k _1, both modulus of elasticity of the spring member 6b ₁ and the spring member 6b ₂ is set at k _2.

On the base 5, further independent of the jig 4,
A driving means 7 (cylinder 11 in the embodiment) for driving the holding means 2 of the vibrating body 1 and a locking means 8 are provided. The driving means 7 and the locking means 8 are completely insulated from the jig 4 when the vibrating body 1 is held by the holding means 2. Cylinder 1 constituting drive means 7
1, the bell crank 18 and the cylinder 11 are not in contact with each other as shown in FIG. 1, and the lock means 8 and the jig 4 are not in contact with each other. The movable plate 10 is supported by the supporting member 9 only by the cushioning member 6 and the opposing support rib 9 is pressed by the spring member 16. In this state, the vibrating body 1 is held by the holding means 2 and the vibration is detected. State. On the other hand, the cylinder 11 constituting the driving means 7 is driven to be raised to push the bell crank 18 upward, whereby the jig 4 is pushed upward via the support rib 9 and the gap s shown in FIG. Is satisfied, that is, the jig 4 is locked by the lock means 8 while the jig 4 is pressed against the lock means 8. Here, when the cylinder 11 constituting the driving means 7 further pushes the bell clamp 18 upward, the movable body 15 is moved in the direction of arrow B in FIG. The gap between the supporting means 9 and the supporting rib 9 is widened (that is, the holding means 2 is opened).

Next, the operation of the vibration detecting device for a vibrating body having the above configuration will be described. The vibrating body 1 is set on the jig 4 by any transportation means. At this time, the driving means 7
Is driven to raise the jig 4 so that the gap s in FIG.
As a result, the jig 4 is locked and fixed by the lock means 8, and at the same time, the holding means 2 is opposed to the spring force of the spring member 16.
Is open. Next, the driving means 7 is operated in the reverse direction. Then, the movable plate 10 is moved by the spring force of the spring member 16.
Moves, the holding means 2 is closed, the vibrating body 1 is completely fixed to the jig 4 by the holding means 2, and at the same time, the locking means 8 is released, and the power supply means 20 comes into contact with the electrode of the vibrating body 1. , A voltage is supplied to the vibrating body 1. Then, the transportation means is disengaged, and the jig 4 is supported by the base 5 only via the buffer material 6, and is in a state of being able to swing with six degrees of freedom. Subsequently, the vibrations at the respective points are simultaneously detected by the six vibration detection means 3, and the calculation is performed to calculate the vibrations having six degrees of freedom. When the vibration detection is completed, the driving means 7 is operated again, the jig 4 is fixed by the locking means 8, the holding means 2 is opened, and the vibrating body 1 is removed from the jig 4 by the transportation means. The driving of the driving means 7 is controlled by a personal computer or the like so that the vibrating body 1 is automatically attached and detached. The above operation is repeated to automatically detect the vibration of the vibrating body 1 with six degrees of freedom. Here, feature extraction is performed from the obtained vibration of the vibrating body 1 having six degrees of freedom. Thereby, the quality of the vibrating body 1 can be determined. In determining whether the vibrating body 1 is good or bad in this case, for example, Japanese Patent Application No. Hei.
-5968 can be employed. In addition,
An example of the vibrating body 1 is a motor.

In this embodiment, as means for maintaining the performance of the vibration detecting device, there is provided a vibration means 12 serving as a reference vibration means for detecting a change in the characteristics of the cushioning member 6. A known vibrating force is applied to the jig 4 by the vibrating means 12 serving as the reference vibrating means, and the output value of the vibration detecting means 3 at that time is compared with a normal value to check for an abnormality in the apparatus. Has become.

Next, another embodiment of the present invention will be described in detail with reference to FIG. A support 14 is provided upright on the base 5, and the jig 4 is attached to the support 14 provided on the base 5 via a cushioning material 6.
It is swingably supported freely. The jig 4 is provided with a holding means 2 for holding the vibrating body 1 and a center-of-gravity adjusting means 21. In this embodiment, the center of gravity of the vibrating body 1 and the jig 4
Are you in so that the spine of the match the center of gravity.

In the embodiment shown in the accompanying drawings, the holding means 2 includes a support rib 9 facing the other end, a movable plate 10 provided on one support rib 9, a means for moving the movable plate 10, and a support rib 9 on the other side. It comprises a movable plate 22 provided and a means for moving the movable plate 22. The movable plate 10 is a support rib 9
The movable member 15 is provided at the distal end of the movable body 15 movably penetrating therethrough. A spring member 16 is interposed between the movable plate 10 and the support rib 9, and the movable plate 10 is opposed to the support rib 9 by the spring member 16. (In FIG. 5, the arrow A side) is elastically pressed, and the vibrating body 1 is supported by the movable plate 10 and the support rib 9 facing the movable plate 10. A shaft support 17 is provided on the support rib 9, and a shaft 19 serving as a fulcrum of a bell crank 18 is supported by the shaft support 17, and the cylinder 11 constituting the driving means 7 disposed apart from the jig 4 is used. Bell crank 1
By applying an acting force to the movable member 8, the movable body 15 having the movable plate 10 at the tip is moved in the direction of arrow B in FIG. 5 against the spring force of the spring material 16. The movable plate 10 is provided with a power supply means 20. The moving plate 22 is provided, for example, at the tip of a lateral screw bar 23 screwed into the support rib 9, and the position of the moving plate 22 is moved in the axial direction of the screw bar 23 by rotating the screw bar 23 by some means. I can do it. That is, the vibrating body 1 is sandwiched between the movable plate 10 and the moving plate 22, and the holding position of the vibrating body 1 is changed by rotating the screw bar 23 to change the position of the moving plate 22. The direction can be adjusted.

The jig 4 is provided with a center-of-gravity adjusting means 21. The center of gravity adjusting means 21 includes a first center of gravity adjusting means 21a,
It comprises the second center-of-gravity adjusting means 21b. The first center-of-gravity adjusting means 21a comprises four vertical screw bars 24 erected at the front and rear portions on both the left and right sides of the jig 4, and a weight 25 serving as a load is screwed onto each of the vertical screw bars 24. When the vibrating body 1 is not set on the jig 4, the position of the center of gravity of the jig 4 is adjusted by moving and adjusting the weight 25 in the vertical direction. Here, in the embodiment, the first center-of-gravity adjusting means 21a is adjusted to be horizontal. The second center-of-gravity adjusting means 21b is constituted by a horizontal screw bar 23 for moving the moving plate 22 described above in the horizontal direction.
In the state where the vibrating body 1 is held in the
b, the screw rod 23 is rotated and moved with respect to the support rib 9, thereby finely adjusting the axial position of the screw rod 23 of the moving plate 22, whereby the moving plate 22 and the movable plate 10 vibrate.
Adjust so that the jig 4 holding the body 1 is horizontal.
In the embodiment, the position of the center of gravity of the vibrating body 1 in the horizontal plane
And the position of the center of gravity of the jig 4 in the horizontal plane
At the same time. By adjusting the first center-of-gravity adjusting means 21a and the second center-of-gravity position adjusting means 21b in this manner, the center of gravity of the vibrating body 1 can be adjusted to a horizontal plane.
Between the position of the jig 4 and the position of the center of gravity of the jig 4 in the horizontal plane.
They can be matched in plan view .

In this embodiment, the vibration detecting means 3 for detecting the vibration of the vibrating body 1 is provided independently of the jig 4. That is, a plurality of supporting portions 26 are erected from the base 5, and the vibration detecting means 3 is provided on the supporting portion 26, and the vibration detecting means 3 is a non-contact type position detecting sensor which is not in contact with the jig 4. It is constituted by. Also in this example,
The vibration detecting means 3 for detecting the vibration of the vibrating body 1 is provided in each axis direction (X axis, Y
(Two in the axis and Z-axis directions). That is, X
As the vibration detecting means 3 in the axial direction, vibration detecting means 3 x ₁ , 3
The x ₂ is arranged, the vibration detecting means 3y _1, 3y ₂ arranged as a vibration detecting unit 3 in the Y-axis direction, Yes disposed vibration detecting means 3z _1, 3z ₂ as a vibration detecting unit 3 in the Z-axis direction, Calculation is performed between the output values of the two vibration detecting means 3 arranged in each axis direction, and the vibration of the vibrating body 1 with six degrees of freedom, that is, the direction of the orthogonal coordinate axes (X, Y, Z) of the vibrating body 1 is calculated. Direction) and vibrations in rotational directions (θx, θy, θz directions) around the orthogonal coordinate axes. Here, the detected vibration may be any of vibration displacement, vibration speed, and vibration acceleration.

On the base 5, further independent of the jig 4,
A driving means 7 (cylinder 11 in the embodiment) for driving the holding means 2 of the vibrating body 1 and a locking means 8 are provided. The driving means 7 and the locking means 8 are completely insulated from the jig 4 when the vibrating body 1 is held by the holding means 2. Cylinder 1 constituting drive means 7
5, the bell crank 18 and the cylinder 11 are not in contact with each other as shown in FIG. 5, and the lock means 8 and the jig 4 are not in contact with each other. The movable plate 10 is supported on the base 5 only by the cushioning material 6, and the movable plate 10 is pressed against the moving plate 22 by the spring material 16. In this state, the vibrating body 1 is held by the holding means 2 to detect the vibration. State. On the other hand, the cylinder 11 constituting the driving means 7 is driven up and raised to push the bell crank 18 upward, whereby the jig 4 is pushed upward via the support rib 9, and the jig 4 is moved to the locking means 8. The jig 4 is locked by the lock means 8 in the pressed state. Here, when the cylinder 11 constituting the driving means 7 further pushes the bell clamp 18 upward, the movable body 15 is moved in the direction of arrow B in FIG. The gap between the moving plate 22 and the moving plate 22 is widened (that is, the holding unit 2 is opened).

Next, the operation of the vibration detector for a vibrating body according to the second embodiment having the above-described configuration will be described. First, before setting the vibrating body 1, the first center-of-gravity adjusting means 21 is set.
The center of gravity of the jig 4 is finely adjusted by a, and the jig 4 is adjusted horizontally. In this state, the driving means 7 is driven to raise the jig 4, and the jig 4 is locked and fixed by the locking means 8, and at the same time, the holding means 2 is opened against the spring force of the spring material 16. State. In this state, the vibrating body 21 is set on the jig 4 by any transportation means. Next, the driving means 7 is operated in the reverse direction. Then, the movable plate 10 is moved by the spring force of the spring member 16 and the holding means 2 is closed, the vibrating body 1 is completely fixed to the jig 4 by the holding means 2, and the locking means 8 is released at the same time. The supply unit 20 comes into contact with the electrode of the vibrating body 1, and a voltage is supplied to the vibrating body 1. Then, the transportation means is disengaged, and the jig 4 is supported by the base 5 only via the buffer material 6, and is in a state of being able to swing with six degrees of freedom. Next, the second center-of-gravity adjusting means 21b is adjusted,
The jig 4 holding the vibrating body 1 by the holding means 2 is
Adjust so that it is flat. Thereby, the center of gravity of the jig 4
The position in the horizontal plane and the position of the vibrating body 1 in the horizontal plane
Can be matched in a horizontal plane view. In this case, when the vibrating body 1 is set on the jig 4 which has been leveled by the first center-of-gravity adjusting means 21a, the vibrating body 1 is placed on the horizontal plane of the center of gravity of the vibrating body 1 .
Horizontal position of the center of gravity of the jig 4
If they do not match in plan view , the jig 4 will tilt ,
As described above, when the jig 4 in a state where the vibrating body 1 is set while being adjusted by the second center-of-gravity adjusting means 21b is horizontal,
The position of the center of gravity of the vibrating body 1 in the horizontal plane and the center of gravity of the jig 4
The position on the horizontal plane matches in the horizontal plane view . Subsequently, the vibrations at the respective points are simultaneously detected by the six vibration detection means 3, and the calculation is performed to calculate the vibrations having six degrees of freedom. When the vibration detection is completed, the driving means 7 is operated again, the jig 4 is fixed by the locking means 8, the holding means 2 is opened, and the vibrating body 1 is removed from the jig 4 by the transportation means. The driving of the driving means 7 is controlled by a personal computer or the like so that the vibrating body 1 is automatically attached and detached. The above operation is repeated to automatically detect the vibration of the vibrating body 1 with six degrees of freedom. Here, feature extraction is performed from the obtained vibration of the vibrating body 1 having six degrees of freedom. Thereby, the quality of the vibrating body 1 can be determined. To determine the quality of the vibrating body 1 in this case, for example, a method as disclosed in Japanese Patent Application No. 5-5968 filed by the present applicant can be adopted.

[0038]

By the way, the vibration detecting means 3 in this embodiment is constituted by a non-contact type position detecting sensor for the vibration system of the vibrating body 1, and not only detects the vibration of the vibrating body 1, but also adjusts the center of gravity. And the initial position of the jig 4 in a state where the vibrating body 1 is not set is detected, and the position of the jig 4 due to deterioration of the cushioning material 6 is compared with a normal value. It is also used as a means for inspecting misalignment.

Next, still another embodiment of the present invention will be described with reference to FIGS. The structure of the vibration detecting device in this embodiment is such that a jig 4 having a holding means 2 for holding a vibrating body 1 and a vibration detecting means 3 for detecting vibration is swingably mounted on a base 5 with six degrees of freedom. A driving means 7 for driving the holding means 2, a moving means 43 for moving the driving means 7 in the vertical direction, and preventing the jig 4 from swinging except when vibration is detected. And a vibrating means 40 for detecting a change in the characteristics of the jig 4.

Here, the holding means 2 is provided with the support ribs 9 opposed to each other.
And a movable plate 10 provided on at least one support rib 9.
And means for moving the movable plate 10. The movable plate 10 is a movable body 15 movably penetrating the support rib 9.
The spring member 16 is interposed between the movable plate 10 and the support rib 9, and the movable plate 1 is
0 is elastically pressed toward the opposing support rib 9, and the vibrating body 1 is supported by the movable plate 10 and the opposing support rib 9. At the rear end of the movable body 15, a U-shaped locking portion 15a having a U-shape in a plan view is provided.

The driving means 7 is constituted by providing a locking projection 46 at the tip of a driving rod 45 of the cylinder device 44.
The cylinder device 44 constituting the driving means 7 includes the moving means 4
3 makes it movable vertically. When the cylinder device 44 is lowered and the locking projection 46 is positioned below the U-shaped locking portion 15a, the driving means 7 and the movable body 1
5 is completely cut off and separated. Then, the cylinder device 44 is raised, and the locking projection 46 is inserted into the U-shaped locking portion 15a through the lower opening of the U-shaped locking portion 15a. The movable body 15 is moved in such a manner that the movable body 15 moves. Since the driving means 7 is vertically movable by the moving means 43 in this manner, the driving means 7 is lowered to move the vibrating body 1 to the holding means 2.
In this state, the driving means 7 is completely insulated from the jig 4 by vibration, so that the reliability of vibration detection can be improved. Also, by providing the driving means 7 completely at an independent position separated from the jig 4,
Can be made lighter.

The locking means 8 for preventing the jig 4 from swinging except when the vibration is detected is provided at a position independent from the driving means 7 and the moving means 43. This locking means 8
Is constituted by a plurality of pins 60. In the embodiment, three pins 60 are provided, and two pins are disposed at the front or rear of the jig 4, and one is disposed at either of them. And
Lock pin insertion holes 6 provided on the front and rear portions of the jig 4
1 can be freely inserted. A pin support 64 having a pin 60 movably inserted therein is fixed by a fixing bolt 65 on a substrate 63 fixed to the upper surface of the base 5, and a cylinder constituting a pin driving means 62 is mounted on the substrate 63. Device 6
7 is fixed. A locking projection 66 is provided at the rear end of the pin 60.
A U-shaped locking portion 69 is provided at the tip of a rod 68 of the cylinder device 67, and a locking projection 66 is fitted into the U-shaped locking portion 69 so as to be vertically movable. The pin support 64 is provided with a pin insertion angle adjusting means 70. In the embodiment of FIGS. 8 to 10, the pin angle adjusting means 70 is formed by screwing at least three bolts 71 left, right, front and rear. That is, each of the bolts 71 is screwed into a female screw portion provided on the pin support 64. If the plurality of pins 60 do not completely coincide with the plurality (three in this embodiment) of the lock pin insertion holes 61 provided in the jig 4, the pin insertion angle adjustment means 70 will be formed. Can be used to adjust the insertion angle of the pin 60. That is, with the pin support 64 placed on the substrate 63 as shown in FIG.
In order to adjust the insertion angle of the pin 60 from the state in which the bolt is tightened and fixed, first, the fixing bolt 65 is loosened, and in this state, the bolt 71 is rotated to move the lower end of the bolt 71 to the pin support 6.
9, the pin support 64 is lifted off the substrate 63 and pressed against the substrate 63 as shown in FIG.
In this state, the height of the bolts 71 is adjusted, and the fixing bolts 65 are fixed. Alternatively, as shown in FIG. At this time, the angle is adjusted and the fixing angle is adjusted by the fixing bolt 65. FIG.
Even if the state is adjusted from the state shown in FIG. 9 to the state shown in FIG. 9 and FIG. There is no problem in driving the pin 60 by the 67.

The external vibrating means 40 is arranged at a position completely separated from the jig 4 and applies impulse-like vibration (impact vibration) to the jig 4 from outside the jig 4. Do, jig 4
It is used to detect a change in the characteristic. The impulse-like vibration refers to vibration with a waveform represented by the following equation (1).

[0045]

(Equation 1)

As a feature of vibrating with the waveform represented by the above equation (1), the frequency components as shown in FIG. 11A, that is, all the frequencies are almost the same (a perfect impulse waveform). By observing the vibration of the jig 4 due to the impulse excitation.
The frequency characteristics from the low frequency range to the high frequency range can be analyzed in a short time. At this time, since it is difficult to apply the impulse excitation force to the jig 4 with a constant magnitude each time, it is necessary to normalize the excitation force. Further, the frequency of the exciting force can be adjusted by the material used for the collision portion 40a of the external exciting means 40. For example, when it is not necessary to check the characteristics up to high frequencies, a resin material is used, as shown in FIG.
An exciting force including a frequency as shown in FIG. On the other hand, by using a metal material, FIG.
Excitation force including a frequency as shown in FIG. 4C can be applied, and frequency characteristics up to a high frequency can be understood. Next, the operation of this embodiment will be described. First, a lock pin insertion hole 61 in which three pins 60 constituting the lock means 8 are provided in the jig 4.
And the jig 4 is three-dimensionally positioned and fixed.
That is, in this embodiment, three pins 60 in FIG.
Is inserted into the lock pin insertion hole 61, so that the pin 60 is positioned in two directions orthogonal to the axial direction, and the pin 60 is provided with the stepped portion 60a, so that the stepped portion 60a
Abuts against the edge of the lock pin insertion hole 61 to position the pin 60 in the axial direction. As a result, the jig 4 is positioned and fixed so as not to move three-dimensionally. After the positioning and fixing of the jig 4 is performed by the locking means 8 in this manner, the moving means 43
To move the driving means 7 to the position A in FIG.
Is inserted into the U-shaped engaging portion 15a, and in this state, the driving means 7 is driven to pull the holding means 2 to release the clamp. In this released state, the vibrating body 1 is transported and set on the jig 4 by any transporting means. When the setting is completed, the driving means 7 is driven in the reverse direction to clamp the vibrating body 1 by the holding means 2. And hold. Thereafter, the driving means 7 is moved to the position B in FIG. 6 by the moving means 43, and the lock of the jig 4 by the locking means 8 is released. As a result, the jig 4 is completely insulated from the base 5 by vibration (this state is called a vibration detectable state). After the vibration of the jig 4 is detected by the vibration detecting means 3 in the vibration detectable state, the locking means 8, the moving means 43, and the driving means 7 are operated again, and the vibrating body 1 is removed from the jig 4 by the carrying means. . Thereafter, the above operation is repeated, and the vibration of the vibrating body 1 having six degrees of freedom is automatically detected.

Next, a method for detecting a characteristic change of the jig 4 by the external vibration means 40 will be described. First, the vibrating body 1 is fixed to the jig 4
To the external vibrating means 4
0 causes the jig 4 to vibrate in an impulse waveform. The vibration of the jig 4 after the vibration is detected by the six vibration detecting means 3, and the vibration is divided into vibrations for each vibration direction having six degrees of freedom by calculation, and an impulse response waveform is observed. By analyzing the frequency of this response waveform, it is possible to observe the frequency characteristics of the jig 4 in each of the six degrees of freedom. By comparing this result with that in the normal state, the current characteristic change of the jig 4 is detected.

Next, still another embodiment of the present invention will be described. The configuration of the vibration detector of the vibrating body of the present embodiment is the same as the configuration of the embodiment shown in FIGS. 6 to 10 described above.
This embodiment is characterized in the configuration of the vibration means 12 for detecting a change in the characteristic of the jig 4. That is, the vibrating means 12 of the present embodiment is a reference vibrating means capable of applying a known vibration to the jig 4, and the vibrating means 12 is a one-axis vibrator 12a, It is characterized in that the vibrator 12a is attached to the jig 4 so that the vibrating direction is not parallel to any of the orthogonal coordinate axes on which the vibration detecting means 3 is arranged.

The uniaxial vibrator 12a is a vibrator capable of vibrating in only one direction, and vibrator holding means 80 holding the uniaxial vibrator 12a is attached to the jig 4. Exciter holding means 80
As shown in FIG. 13, an upper base 82 is mounted on a lower base 81 held and held by the holding means 2 provided on the jig 4, and the uniaxial vibrator 12 a is mounted on the upper base 82. A part 83 is provided and configured. Then, as shown in FIG. 15, the single-axis vibrator 12a is mounted on the mounting portion 83.
In a state where the single-axis vibrator 12a is mounted on the mounting portion 83 as shown in FIG. 15, the vibration direction of the single-axis vibrator 12a is in each of the orthogonal coordinate axes (X-axis, Y-axis, Z-axis) in FIG. Direction) are not set to be parallel. Therefore, while holding the lower base 81 by the holding means 2, 1
When vibration is applied in only one direction by the shaft vibrator 12a, the jig 4 is subjected to orthogonal directions (X-axis, Y-axis)
Axis, Z-axis direction) and rotation directions around it (θx, θy,
θz). Note that, as described in the first embodiment, two vibration detecting means 3 are already arranged in each of the orthogonal coordinate axes (X-axis, Y-axis, and Z-axis directions).

Here, FIG.
(B) As shown in (c), a hole serving as a mounting portion 83 is provided at an angle, and two screw holes 84 are provided on the lower surface of the upper base 82 while the lower base 81 is provided with two screw holes 84. FIG. 14 (d)
(E) As shown in (f), one shaft hole 85a and one long hole 85b having an arc-shaped cross section are provided. Then, the upper base 82 is placed on the lower base 81 as shown in FIG. 13, and a bolt (not shown) inserted into the shaft hole 85a is inserted into one of the upper bases 82.
A screw (not shown) inserted into one of the screw holes 84 and inserted into the long hole 85b is screwed into the other screw hole 84 to form the lower base 81.
In this case, the vibration direction of the uniaxial vibrator 12a with respect to the jig 4 is adjusted by screwing the bolts in the elongated holes 85b in a state where the bolts are slid and positioned. It is possible to make adjustments so that vibrations are evenly distributed in any direction as much as possible.

Power is supplied from the waveform generator 41 to the single-axis vibrator 12a, and an amplifier 86 amplifies the output of the waveform generator 41. The waveform generator 41 has a function of generating, for example, a sine wave of a trigonometric function, and thereby the single-axis vibrator 12a generates vibration. Since the vibration having the same frequency as the signal output from the waveform generator 41 is generated, there is an advantage that the excitation frequency can be easily determined. FIG. 16 shows a single-axis vibrator 12 a having a built-in voice coil motor as the vibration means 12. This is the fixed part 87
And a permanent magnet 88 fixed to the fixing portion 87 and the coil 8
9 and a linear guide 90 for moving the coil 89 smoothly in one direction with respect to the fixed portion 87. An electromagnetic force proportional to the current supplied from the amplifier 86 acts on the coil, and the linear guide 90 The mechanism moves the coil in the direction forced at 90, thereby generating vibration. If a device having a function of changing the frequency of the signal output from the waveform generator 41 is used, the characteristics of the jig 4 at each frequency can be observed. Further, when the waveform generator 41 has a function capable of outputting a waveform including a plurality of frequencies, the characteristics of the jig 4 for each frequency can be obtained very efficiently.

Next, the operation of this embodiment will be described. First, the one-axis vibrator 12 a constituting the vibration means 12 as the reference vibration means is mounted on the mounting portion 83 of the upper base 82. Then, the holding means 2 provided on the jig 4 is opened, the lower base 81 is set on the holding means 2, and the holding means 2 is closed. Thereafter, the present embodiment is set to the vibration detectable state described in the above-described embodiment, and the output signal of the waveform generator 41 is input to the one-axis vibrator 12a as the reference vibrating means, and the jig 4 is vibrated. At this time,
Even if the vibrating means 12 is a one-axis vibrator 12a with a built-in voice coil motor capable of vibrating in only one direction,
In the state where 2a is attached to the holding means 2, as described above, the jig 4 is attached so as not to be parallel to any of the orthogonal coordinate axes on which the vibration detecting means 3 is disposed. Therefore, six directions (X, Y, Z, θ
x, θy, θz).
Here, the configuration as shown in FIG.
It is preferable to adjust the vibration direction in each direction by adjusting the vibration direction, and to make the adjustment as uniform as possible in every direction.

The vibration to the jig 4 by the vibration means 12 as the reference vibration means is detected by the vibration detection means 3 and the jig is obtained from each detection output of the vibration detection means 3 by the method described in the first embodiment. 4 directions (X, Y, Z, θx, θy, θz)
Is calculated, and the change in the characteristics of the jig 4 is detected by comparing the magnitude of the vibration of the jig 4 with respect to the magnitude of the excitation input with a value in a normal state. At this time, change the excitation frequency,
By observing the magnitude of the vibration of the jig 4 with respect to each frequency, the frequency characteristics of the jig 4 can be known, and a change in the characteristics of the jig 4 can be detected more accurately. Further, at this time, if a waveform generator 41 capable of simultaneously outputting a waveform including a plurality of frequencies is used, the frequency characteristics of the jig 4 can be efficiently analyzed.

[0054]

According to the first aspect of the present invention, as described above, the holding means for holding the vibrating body on the jig is provided.
Vibration detecting means for the vibrating body, and supporting means for supporting the holding means.
Holding plate, movable plate provided on one support rib, and movable plate
A supporting rib formed of movable means and facing the movable plate;
Supporting the vibrating body with the jig and supporting the vibrating body with the jig
So that the center of gravity of the vibrator and the center of gravity of the jig coincide
And a jig for detecting vibration of the vibrating body.
6 degrees of freedom vibration of vibrating body in preparation for
In order to avoid vibration,
The jig provided with the holding means for holding the body and the vibration detecting means of the vibrating body is supported on the base via a buffer material which can swing in six degrees of freedom. and a jig holding the body was completely fixed, will be to detect the vibration of the system together, the result, there is no effect on the vibration damping factor due to a difference in retention force of the vibrating body, each axial Two vibrations arranged in
An operation is performed between the output values of the detection means to obtain the orthogonal coordinates of the vibrating body.
Detects vibration in the rotation direction around the axis and the Cartesian axis
Can detect the vibration of the vibrating body with 6 degrees of freedom
Thus , accurate vibration of the vibrating body can be detected. Further, by detecting the vibration of the jig, it is not necessary to temporarily remove the vibration detecting means from the driving system when the vibrating body is attached or detached, and furthermore, it is not necessary to elastically support the vibration detecting means. Can be detected.

In the invention according to claim 2, the cure is
The tool has a holding means for holding the vibrating body and a center of gravity adjusting means,
Holding means are provided on the opposing support rib and one of the support ribs
Movable plate, means for moving the movable plate, and the other support rib
Formed by the moving plate provided in
The vibrating body is supported by the movable plate and the movable plate,
Center the jig horizontally without holding the vibrator.
First center-of-gravity adjusting means for adjusting, and a horizontal jig
When holding the vibrating body while holding the vibrating body
A second center-of-gravity adjusting means for horizontal adjustment;
A jig provided with a holding means and a center of gravity adjusting means is supported on a base via a buffer material which can swing in six degrees of freedom, and a vibration of the vibrating body having six degrees of freedom is detected at a position apart from the jig. Of rectangular coordinates
Since two vibration detecting means are arranged in each axis direction ,
By adjusting the first center-of-gravity adjusting means and the second center-of-gravity adjusting means, the position of the center of gravity of the jig in the horizontal plane and the center of gravity of the vibrating body are adjusted.
The position in the horizontal plane with the position of
In this way, in the horizontal plane of the center of gravity of the jig
Viewing the position and the position of the center of gravity of the vibrator on the horizontal plane
In this way, the vibrating body and the jig holding the vibrating body are completely fixed and the vibration of the integrated system is detected. As a result, the vibration damping rate due to the difference in the holding force of the vibrating body is reduced. Effect is eliminated, and the two vibrations
An operation is performed between the output values of the motion detection means, and the orthogonal
Detects vibration in the rotation direction around the mark axis and the Cartesian coordinate axis.
Can accurately detect vibration of 6 degrees of freedom of vibrating body
The vibration of the vibrating body can be detected accurately. Also, by detecting the vibration of the jig at a position distant from the jig, the vibration is not attenuated by the vibration detection means provided at a position distant from the jig,
The vibration of the vibrating body can be accurately detected.

[0056]

[0057]

According to the third aspect of the present invention, in addition to the effects of the first or second aspect, the driving means for driving the vibrating body holding means is provided independently of the jig. , The weight of all the masses elastically supported by the cushioning material can be reduced, and as a result, the vibration gain with respect to the exciting force of the vibrating body can be increased.

According to the fourth aspect of the present invention, in addition to the effects of the first or second aspect of the present invention, there is provided a lock means for preventing vibration of the jig except when vibration of the vibrating body is detected. Therefore, the jig can be prevented from swinging except at the time of detecting the vibration of the vibrating body, the jig can be accurately positioned, and the productivity can be improved .

According to the fifth aspect of the present invention, in addition to the effects of the first or second aspect of the present invention, by providing a driving means capable of driving the holding means and the locking means, the driving means is provided. The vibrating body can be held or released by the holding means by driving, and the locking or unlocking by the locking means can be performed by driving the driving means, so that the mechanism of the apparatus can be simplified.

According to the sixth aspect of the present invention, in addition to the effects of the first or second aspect, the movable plate
By driving the cylinder to move the movable plate, the vibrating body can be held or released, and the vibrating body can be automatically attached to and detached from the holding means. The property is improved.

According to the seventh aspect of the present invention, in addition to the effects of the first and second aspects of the present invention, since the vibrating means is provided in the jig, the apparatus can be changed by changing the characteristics of the cushioning material. A change in performance can be detected and checked, enabling accurate vibration detection. Further, in the invention according to claim 8 , in addition to the effects of the invention according to claim 1 or 2, a position detecting means for detecting the position of the jig is provided, so that the apparatus according to the characteristic change of the cushioning material is provided. It is possible to detect and check the change in the performance of the device, thereby enabling accurate vibration detection.

According to the ninth aspect of the present invention, the contract
In addition to the effect of the invention according to claim 8, since a detecting means capable of detecting the vibration of the vibrating body and the position of the jig is provided, the detecting means detects the vibration detecting means of the vibrating body and a performance change of the device. Therefore, the apparatus can be used as a position detecting means for detecting the position of the jig, thereby simplifying the apparatus. Claims
According to the tenth aspect , in addition to the effects of the first or second aspect, the power supply means for the vibrating body is provided in the jig, so that the power supply means must be pressed against the vibrating body by an elastic body. And accurate vibration can be detected.

Further, in the invention according to claim 11 ,
In addition to the effects of the first or second aspect of the present invention, since the jig is provided with external vibrating means for performing impulse-like vibration from outside the jig, the characteristic of the jig is a vibration. The check can be performed in the same state as when inspecting the body (that is, the state in which the vibrating body is held by the holding means), so that a more accurate check can be performed, and a constant excitation force can be applied to the jig. Things.

In the invention according to claim 12 ,
In addition to the effect of the third or fourth aspect of the present invention, in addition to the effect of the present invention, there is provided a moving means for moving the driving means, wherein the locking means is separated from the driving means and the moving means and the locking means comprises at least a plurality of pins The jig is positioned three-dimensionally with the plurality of pins being freely insertable into the lock pin insertion holes of the jig and the plurality of pins being inserted into the lock pin insertion holes. Occasionally, the vibrating body enables accurate inspection without the jig contacting the driving means, and the jig can be positioned three-dimensionally, so that the jig can be accurately positioned. is there.

In the invention according to claim 13 ,
In addition to the effect of the invention according to claim 7, the vibration means attached to the jig is a uniaxial vibrator, and the vibration direction of the uniaxial vibrator is set to the orthogonal coordinate axis on which the vibration detecting means is arranged. Since the jig is attached to the jig so that it is not parallel to any of the axial directions, the characteristic check of the jig can be performed in six directions (X, Y, Z, θ).
x, θy, θz) can be performed simultaneously.

In the invention according to claim 14 ,
In addition to the effect of the thirteenth aspect of the present invention, since the vibration direction adjusting means is provided for freely adjusting the vibration direction of the jig by the uniaxial vibrator, the vibration direction can be adjusted. The vibration force can be easily dispersed evenly in all directions. In the invention according to claim 15 , the contract
In addition to the effects of the invention of claim 13 or claim 14 , 1
Since a waveform generator capable of changing the excitation frequency for vibrating the shaft exciter is provided, the frequency characteristics of the jig can be checked.

In the invention according to claim 16 ,
In addition to the effects of the invention according to any one of claims 13 to 15, a waveform generator capable of generating a plurality of excitation frequencies for vibrating the single-axis exciter is provided. The frequency characteristics of the jig can be efficiently checked. According to the seventeenth aspect of the present invention, in addition to the effects of the thirteenth to sixteenth aspects, since the vibrating means is a voice coil motor, it is linear with respect to the input current. Since the exciting force can be generated, the exciting frequency can be easily set.

[Brief description of the drawings]

FIG. 1 is a schematic front view of one embodiment of the present invention.

FIG. 2 is an explanatory view showing a mechanism for driving the movable plate according to the first embodiment.

FIG. 3 is a diagram illustrating the vibration detecting means in each of the orthogonal coordinate directions (X
FIG. 9 is an explanatory diagram illustrating that two pieces are arranged in each of (an axis, a Y axis, and a Z axis).

FIG. 4 is an explanatory view showing an example of support by the cushioning material according to the first embodiment;

FIG. 5 is a schematic front view showing another embodiment of the present invention.

FIG. 6 is a schematic front view showing still another embodiment of the present invention.

FIG. 7 is a schematic plan view of the same.

FIGS. 8A and 8B are diagrams showing a mounting state of a pin support that supports the pin, in which FIG. 8A is a schematic side view and FIG. 8B is a schematic front view.

FIGS. 9A and 9B are diagrams showing position adjustment of the pin, in which FIG. 9A is a schematic side view and FIG. 9B is a schematic front view.

FIG. 10 is a view showing position adjustment of a pin according to the embodiment;
Is a schematic side view, and (b) is a schematic front view.

11 (a), (b) and (c) are graphs showing the relationship between the vibration acceleration level and the frequency in the above.

FIG. 12 is a schematic front view showing still another embodiment of the present invention.

FIG. 13 (a) is a perspective view of a vibrator holding means used in the above, and FIG. 13 (b) is a perspective view seen from another direction.

14 (a), (b), and (c) are a front view, a side view, and a bottom view of an upper base, respectively. (D), (e), and (f) are a front view, a side view, and a bottom view of a lower base, respectively. FIG.

FIG. 15A is a perspective view showing a state in which a single-axis vibrator is attached to the vibrator holding means, and FIG. 15B is a perspective view seen from another direction.

FIG. 16 shows a case where the voice coil motor used in Embodiment 1 is used.
It is the front view which fractured | ruptured the axial vibration device partially.

FIG. 17 is a schematic explanatory view showing a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Vibration body 2 Holding means 3 Vibration detecting means 4 Jig 5 Base 6 Buffer material 7 Driving means 8 Locking means 9 Support rib 10 Movable plate 11 Cylinder 12 Vibrating means 12a Single-axis vibrator 13 Position detecting means 40 External vibration Shaking means 41 Waveform generator 43 Moving means 60 Pin 61 Lock pin insertion hole

──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Takuya Nakatani 1048 Kadoma, Kadoma, Osaka Prefecture Matsushita Electric Works, Ltd. (56) References JP-B 3-11417 (JP, B2) (58) Fields surveyed (58) Int.Cl. ⁷ , DB name) G01H 1/00

Claims (17)

(57) [Claims] A holding means for holding a vibrating body on a jig and vibration
Body vibration detecting means, and a support rib facing the holding means.
And a movable plate provided on one of the support ribs, and the movable plate is movable.
The movable plate and the supporting rib facing the movable plate.
With the moving body supported and the vibrating body supported by the jig
The center of gravity of the vibrating body and the center of gravity of the jig are configured to match,
Vibration detection means for detecting vibration of the vibrating body is provided on the jig.
To detect the vibration of the vibrating body with 6 degrees of freedom
Are arranged two in each axis direction of the rectangular coordinates, and the vibrating body is
A vibration detecting device for a vibrating body, comprising a jig provided with a holding means for holding and a vibration detecting means for the vibrating body supported on a base via a shock-absorbing material capable of swinging in six degrees of freedom. 2. A holding means for holding a vibrating body on a jig and a center of gravity.
A support rib having an adjusting means and facing the holding means;
Movable plate provided on the support ribs and means for moving the movable plate
And a moving plate provided on the other support rib, and moving the moving plate.
The vibrating body is supported by the movable plate and the movable plate.
So that the center of gravity adjustment means does not hold the vibrating body
First center-of-gravity adjusting means for adjusting the jig horizontally in a state
And vibrating when holding the vibrating body on a horizontal jig
Second center of gravity for horizontal adjustment while holding body
And holding means and center-of-gravity adjusting means.
The jig is supported on the base via a shock-absorbing material that can swing in six degrees of freedom, and vibration of the vibrating body with six degrees of freedom is detected at a position away from the jig.
Not two vibration detection means in each axis direction of Cartesian coordinates
A vibration detecting device for a vibrating body, comprising : 3. A driving means for driving a vibrating body holding means.
It is characterized by being arranged on the base independently of the jig
The vibration detecting device for a vibrating body according to claim 1 or 2. 4. The vibration of the jig except when the vibration of the vibrating body is detected.
Lock means for preventing
The vibration detecting device for a vibrating body according to claim 1 or 2. 5. A drive capable of driving a holding means and a locking means.
5. A vibration device according to claim 4, further comprising a moving means.
Moving body vibration detection device. 6. A system comprising a cylinder for driving a movable plate.
The vibrating body 請 Motomeko 1 or claim 2, wherein the
Vibration detector. 7. A vibrating means provided on a jig.
3. A vibration detecting device for a vibrating body according to claim 1 or 2.
Place. 8. A position detecting means for detecting a position of a jig is provided.
3. The method according to claim 1 or 2, wherein
Vibration body vibration detection device. 9. The vibration of the vibrating body and the position of the jig can be detected.
9. The apparatus according to claim 8, further comprising a detecting means.
Vibration body vibration detection device. 10. A power supply means for a vibrating body is provided on a jig.
The vibration according to claim 1 or 2, wherein the vibration is formed.
Body vibration detection device. 11. A jig is impulse-shaped from outside the jig.
It is characterized by providing external vibration means for
The vibration detection of the vibrating body according to claim 1 or 2,
apparatus. 12. A moving means for moving a driving means,
The locking means is separated from the driving means and moving means,
The locking means is constituted by at least a plurality of pins,
The plurality of pins can be freely inserted into the lock pin insertion holes of the jig.
With multiple pins inserted into the lock pin insertion holes
Characterized in that the jig is positioned three-dimensionally with
The vibration detecting device for a vibrating body according to claim 3 or 4. 13. A single-axis vibrator for vibrating means attached to a jig.
The vibration direction of the uniaxial vibrator corresponds to the vibration detecting means.
Parallel to each of the orthogonal coordinate axes
It is characterized by being attached to a jig so that it does not become
A vibration detecting device for a vibrating body according to claim 7. 14. The vibration direction of the jig by the uniaxial vibrator is changed.
It is characterized by providing a vibration direction adjusting means that can be adjusted.
14. The vibration detecting device for a vibrating body according to claim 13, wherein: 15. A vibrating circumference for vibrating a uniaxial vibrator.
It is characterized by comprising a waveform generator capable of changing the wave number
15. The vibration detection of the vibrating body according to claim 13 or claim 14.
apparatus. 16. A plurality of vibrators for vibrating a uniaxial shaker.
Equipped with a waveform generator that can generate the excitation frequency
The method according to claim 13, wherein:
A vibration detecting device for a vibrating body according to any one of the above. 17. The vibration means is a voice coil motor.
17. A method according to claim 13, wherein:
The vibration detecting device for a vibrating body according to any one of the above items.