JP3141679B2 - Clean room dust removal method - Google Patents
Clean room dust removal methodInfo
- Publication number
- JP3141679B2 JP3141679B2 JP06077053A JP7705394A JP3141679B2 JP 3141679 B2 JP3141679 B2 JP 3141679B2 JP 06077053 A JP06077053 A JP 06077053A JP 7705394 A JP7705394 A JP 7705394A JP 3141679 B2 JP3141679 B2 JP 3141679B2
- Authority
- JP
- Japan
- Prior art keywords
- dust
- clean room
- dust removal
- floor
- removal method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000428 dust Substances 0.000 title claims description 30
- 238000000034 method Methods 0.000 title claims description 8
- 239000003973 paint Substances 0.000 claims description 19
- 239000010419 fine particle Substances 0.000 description 9
- 230000005611 electricity Effects 0.000 description 7
- 230000003068 static effect Effects 0.000 description 6
- 230000003749 cleanliness Effects 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 238000007667 floating Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 2
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 239000002216 antistatic agent Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000004811 fluoropolymer Substances 0.000 description 2
- 229920002313 fluoropolymer Polymers 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- -1 polyethylene Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical compound C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229920001577 copolymer Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Prevention Of Fouling (AREA)
- Electrostatic Separation (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Description
【０００１】[0001]
【産業上の利用分野】この発明は、壁面及び／または床
面に直接微粒子を吸着し、室内を高度な清浄度に維持で
きるようにしたクリーンルームの除塵方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for removing dust from a clean room in which fine particles are directly adsorbed on a wall surface and / or a floor surface so that the interior of the room can be maintained at a high degree of cleanliness.
【０００２】[0002]
【従来の技術】半導体製造等に用いられるクリーンルー
ムは、清浄な空気を導入すると同時に発生塵に対する除
塵機能を有する無塵装置によって常時内部の空気が高度
の清浄状態に保たれている部屋であり、使用目的によっ
て許容される塵埃の状態が定まる。無塵装置は、主とし
てフィルター類、ファン・ダクト及びチャンバー、吹出
口・排気口、圧力制御装置などの一連の設備からなって
おり、これらの駆動によりクリーンルーム内の清浄度が
保たれる。2. Description of the Related Art A clean room used for semiconductor manufacturing or the like is a room in which clean air is introduced and at the same time the internal air is kept in a highly clean state by a dust-free device having a function of removing generated dust. The state of dust allowed is determined by the purpose of use. The dust-free device mainly includes a series of equipment such as filters, a fan duct and a chamber, an air outlet / exhaust port, a pressure control device, and the like, and the driving of these devices keeps cleanliness in the clean room.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、クラス
１〜２（０．１〜０．３μｍの微粒子の数が１ｍ3 中に
約１０個前後）程度の高度な清浄度を要求される室内で
は、前記装置のみでは達成が困難であり、換気のために
極めて大きな駆動動力が必要となり、不経済となってい
た。However, in a room where a high degree of cleanliness of class 1 or 2 (the number of fine particles of 0.1 to 0.3 μm is about 10 in 1 m 3 ) is required, It was difficult to achieve with only the above-mentioned device, and an extremely large driving power was required for ventilation, which was uneconomical.
【０００４】ところで、クリーンルームの壁面や床面に
塗布される塗料はこれらの塵埃の吸着を防止するため内
装下地として化粧鋼板を用い、これの表面にエポキシ
系，アクリル系，ウレタン系、アクリルウレタン系など
の導電性・超耐久性樹脂及びこれら樹脂に帯電防止剤を
含有させた塗料を用いている。[0004] By the way, the paint applied to the walls and floors of the clean room uses a decorative steel plate as an interior base to prevent the adsorption of these dusts, and the surface of the decorative steel plate is epoxy, acrylic, urethane or acrylic urethane. And conductive and ultra-durable resins, and paints containing antistatic agents in these resins.
【０００５】このことは、壁面や床面が塵埃を吸着しや
すいと、付着した塵埃が空調空気などによって吹き飛ば
されることによる室内汚染が生ずるため、これらの付着
を未然に防止するという考えに基づくものである。[0005] This is based on the idea that if the wall surface or the floor surface easily absorbs dust, the attached dust is blown off by air-conditioning air or the like, thereby causing indoor contamination. It is.
【０００６】一方、帯電しやすいポリマーとしては、ポ
リスチレン、メタクリル酸メチル、ポリエチレン、塩ビ
及びフッ素系ポリマー等があり、特にフッ素系ポリマー
等の帯電しやすいポリマーベースの塗料は空気中の微粒
子を吸着し汚染されやすいとされ、本来の長所である耐
候性が高い利点に関わらず需要が伸びなかった。但しそ
の汚れは塗膜の組織と結び付くものではなく、拭き取る
ことによって容易に除去できるものである。On the other hand, polymers that are easily charged include polystyrene, methyl methacrylate, polyethylene, vinyl chloride, and fluoropolymers. Particularly, polymer-based coatings that are easily charged, such as fluoropolymers, adsorb fine particles in the air, and thus are not easily charged. Demand was stagnant, despite the alleged susceptibility to contamination, despite the inherent advantage of high weather resistance. However, the stain is not linked to the structure of the coating film, but can be easily removed by wiping.
【０００７】この発明は、従来の考えとは逆に、この種
の帯電性塗料の持つ塵埃吸着能を積極的に利用すること
によって壁面及び／または床面を除塵のための補助手段
として用いることができるようにしたクリーンルームの
除塵方法を提供することを目的とする。The present invention, contrary to the conventional idea, uses the wall surface and / or floor surface as an auxiliary means for removing dust by positively utilizing the dust adsorbing ability of this kind of chargeable paint. It is an object of the present invention to provide a method for removing dust in a clean room.
【０００８】[0008]
【課題を解決するための手段】前記目的を達成するた
め、請求項１の発明は、クリーンルームの内装仕上げと
して、側面及び／または床面に帯電性塗料を塗布し、該
側面、床面の近傍でコロナ放電装置を作動させることに
より前記帯電性塗料層に強制的に静電気を帯電させるこ
とを特徴とする。In order to achieve the above object, according to the first aspect of the present invention, as an interior finish of a clean room, a chargeable paint is applied to a side surface and / or a floor surface.
Activating the corona discharge device near the sides and floor
More forcibly charged with static electricity to the charging paint layer, characterized in Rukoto.
【０００９】[0009]
【００１０】[0010]
【００１１】[0011]
【作用】以上の構成によれば、クリーンルーム内の空気
中に浮遊する微粒子は壁および／または床の表面に吸着
され、この塵挨は静電気によって結合しているので壁，
床面からの発塵も防止される。帯電性塗料層は、側面、
床面の近傍でコロナ放電装置を作動させることにより強
制的に静電気を帯電されるので、塵挨吸着能を向上でき
る。 According to the above construction, the fine particles floating in the air in the clean room are adsorbed on the surface of the wall and / or the floor, and the dust is bound by the static electricity.
Dust from the floor is also prevented. The chargeable paint layer is on the side,
By operating the corona discharge device near the floor,
Static electricity can be charged to improve dust absorption
You.
【００１２】[0012]
【００１３】[0013]
【００１４】[0014]
【実施例】以下、本発明の一実施例を図面を用いて詳細
に説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below in detail with reference to the drawings.
【００１５】図１はこの発明の除塵方法を適用したクリ
ーンルーム１を示すものであり、図示しないがこのクリ
ーンルーム１には前述の無塵装置が付設されているとと
もに、その側面２及び床面３の表面は帯電性のあるフッ
素系樹脂系塗料が塗装され、この帯電性塗料層４で表面
を覆われている。FIG. 1 shows a clean room 1 to which the dust removing method of the present invention is applied. Although not shown, the clean room 1 is provided with the above-described dust-free device, and has a side surface 2 and a floor surface 3 thereof. The surface is coated with a fluorine-based resin paint having a chargeability, and the surface is covered with the chargeable paint layer 4.
【００１６】帯電性塗料層４を構成するフッ素樹脂系塗
料はフッ化オレフィン、及びこれとビニールエーテルの
コポリマーなどを樹脂成分とし、これに染顔料、各種添
加剤及び溶剤からなる組成のものを予め表面下地処理さ
れた前記壁面２及び床面３にスプレーあるいははけ塗り
等により塗装し、乾燥によって所定の膜厚の表面滑性を
有する強靭な皮膜を形成する。なお、一般の塗料におい
ては、帯電防止剤などを添加混合するものであるが、本
発明に用いられる塗料は積極的にこれを除去した配合と
している。The fluororesin-based paint constituting the chargeable paint layer 4 comprises a resin component comprising a fluorinated olefin and a copolymer thereof with vinyl ether, and a composition comprising a dye, a pigment, various additives and a solvent. The wall surface 2 and the floor surface 3 that have been subjected to the surface preparation are applied by spraying or brushing, and dried to form a tough film having a predetermined thickness and surface lubricity. In general, an antistatic agent and the like are added and mixed in a general coating material. However, the coating material used in the present invention has a composition in which this is positively removed.
【００１７】したがって、得られた帯電性塗料層４はそ
の樹脂成分の特性によりプラスに帯電しており、空気中
に浮遊するマイナスに帯電した微粒子Ａを静電引力によ
ってその表面に吸着し、無塵装置による塵埃除去能力に
加えて、壁面２及び床面３によっても塵埃を除去し、こ
の結果、クリーンルーム１の内部空間は塵埃が極めて少
なく、また一旦吸着された微粒子Ａはその位置に付着状
態に保持されるので、これらが発塵することもなく、清
浄度を有効に保持する。Accordingly, the obtained chargeable paint layer 4 is positively charged due to the properties of the resin component, and the negatively charged fine particles A floating in the air are adsorbed on the surface by electrostatic attraction, and the In addition to the dust removal capability of the dust device, the dust is also removed by the wall surface 2 and the floor surface 3. As a result, the interior space of the clean room 1 has extremely little dust, and the fine particles A once adsorbed adhere to that position. , So that they do not generate dust and effectively maintain cleanliness.
【００１８】但し、天井面や壁面２の高い位置に帯電性
塗料層４を形成した場合には塵埃の剥落の惧れもあるた
め、壁面２の場合には比較的低い位置に形成するか、場
合によっては床面３のみに形成することもできる。さら
にはクリーンルーム１内で塵埃吸着部位を特定し、この
特定部位にのみ帯電性塗料層４を形成することもでき
る。However, if the chargeable paint layer 4 is formed at a high position on the ceiling surface or the wall surface 2, there is a possibility that the dust will fall off. In some cases, it may be formed only on the floor 3. Further, it is also possible to specify a dust adsorption site in the clean room 1 and form the chargeable paint layer 4 only on this specific site.
【００１９】以上の構成において、前記壁面２及び床面
３を静電吸着材を含浸したウエスにより定期的に拭き取
ればこれらの表面に付着した微粒子Ａは簡単に除去され
るので、壁面２及び床面３を永続的に除塵用の手段とし
て利用できる。In the above configuration, if the wall surface 2 and the floor surface 3 are periodically wiped with a rag impregnated with an electrostatic adsorbent, the fine particles A adhering to these surfaces can be easily removed. The surface 3 can be used permanently as a means for dust removal.
【００２０】また、清掃時において、静電気測定器など
により定期的に静電気を測定し、帯電量が不足する場合
にはコロナ放電装置を該当する壁面２，床面３の近房で
作動させれば帯電性塗料層４は強制的に再帯電され、塵
埃吸着能を回復する。At the time of cleaning, static electricity is periodically measured by a static electricity measuring device or the like, and when the charge amount is insufficient, the corona discharge device is operated in the vicinity of the corresponding wall surface 2 and floor surface 3. The chargeable paint layer 4 is forcibly recharged to recover the dust absorbing ability.
【００２１】なお、フッ素樹脂系塗料は帯電しやすい上
に、滑性があり強靭な皮膜を形成するため、表面に付着
した微粒子Ａは皮膜組織と結び付くことはないので、清
掃作業はふき取りだけで良く、以上の除塵方法に好適で
ある。In addition, since the fluororesin-based paint is easily charged and forms a slippery and tough film, the fine particles A adhering to the surface do not associate with the film structure. Good and suitable for the above dust removal method.
【００２２】しかしながら、その他に帯電しやすい塗料
のポリマーとしては、前述のごとくポリスチレン、メタ
クリル酸メチル、ポリエチレン、塩ビ系ポリマー等があ
り、いずれも使用可能であることは勿論である。However, as the polymer of the coating material which is easily charged, there are polystyrene, methyl methacrylate, polyethylene, vinyl chloride polymer and the like as described above, and it is needless to say that any of them can be used.
【００２３】[0023]
【発明の効果】以上実施例によって詳細に説明したよう
に、この発明によるクリーンルームの除塵方法にあって
は、クリーンルーム内の空気中に浮遊する微粒子は壁お
よび／または床の表面に吸着され、この塵挨は静電気に
よって結合しているので壁，床面からの発塵も防止さ
れ、さらに高度な清浄度が得られるとともに、付設され
る無塵装置の負荷を減少させることができるため、除塵
のための補助手段として好適である。またクリーンルー
ムの内装下地にも化粧鋼板でなく、比較的安価な無機系
ボードを用いることができなど、建築コストの面からも
有利である。さらに、帯電性塗料層は、側面、床面の近
傍でコロナ放電装置を作動させることにより強制的に静
電気を帯電されるので、塵挨吸着能を向上できる。 As described in detail in the above embodiments, in the method for removing dust in a clean room according to the present invention, fine particles floating in the air in the clean room are adsorbed on the surface of the wall and / or the floor. Since dust and dust are bound by static electricity, dust generation from walls and floors is prevented, and a high degree of cleanliness can be obtained, and the load on the attached dust-free device can be reduced. Suitable as a supplementary means. In addition, a relatively inexpensive inorganic board can be used instead of a decorative steel plate for the interior base of the clean room, which is advantageous in terms of construction costs. Furthermore, the chargeable paint layer is located near the side and floor.
Activate the corona discharge device nearby to forcibly shut down
Since the electricity is charged, the dust absorbing ability can be improved.
【００２４】[0024]
【００２５】[0025]
【図１】この発明にかかるクリーンルームの除塵方法を
示す説明図である。FIG. 1 is an explanatory diagram showing a dust removal method for a clean room according to the present invention.
１ クリーンルーム ２ 壁面 ３ 床面 ４ 帯電性塗料層 1 Clean room 2 Wall 3 Floor 4 Chargeable paint layer
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭61−218613（ＪＰ，Ａ) 特開 昭63−275681（ＪＰ，Ａ) 特開 昭62−227967（ＪＰ，Ａ) 実開 昭62−179541（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.7，ＤＢ名) E04H 5/02 B03C 3/28 B08B 17/02 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-61-218613 (JP, A) JP-A-63-275681 (JP, A) JP-A-62-227967 (JP, A) 179541 (JP, U) (58) Field surveyed (Int. Cl. 7 , DB name) E04H 5/02 B03C 3/28 B08B 17/02
Claims (1)
面及び／または床面に帯電性塗料を塗布し、該側面、床
面の近傍でコロナ放電装置を作動させることにより前記
帯電性塗料層に強制的に静電気を帯電させることを特徴
とするクリーンルームの除塵方法。Claims: 1. As an interior finish of a clean room, a chargeable paint is applied to a side surface and / or a floor surface,
By operating a corona discharge device near the surface
Dust removal method for a clean room, wherein Rukoto forcibly charged electrostatically charged paint layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP06077053A JP3141679B2 (en) | 1994-04-15 | 1994-04-15 | Clean room dust removal method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP06077053A JP3141679B2 (en) | 1994-04-15 | 1994-04-15 | Clean room dust removal method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07284661A JPH07284661A (en) | 1995-10-31 |
| JP3141679B2 true JP3141679B2 (en) | 2001-03-05 |
Family
ID=13623052
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP06077053A Expired - Fee Related JP3141679B2 (en) | 1994-04-15 | 1994-04-15 | Clean room dust removal method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3141679B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4557316B2 (en) * | 1997-07-24 | 2010-10-06 | Ｏｋｉセミコンダクタ株式会社 | Semiconductor device manufacturing method and semiconductor device manufacturing processing chamber |
-
1994
- 1994-04-15 JP JP06077053A patent/JP3141679B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07284661A (en) | 1995-10-31 |
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