JP3144110B2 - Flying magnetic head - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flying magnetic head for recording and reproducing data on and from a magnetic disk.

[0002]

2. Description of the Related Art As a flying magnetic head, there is a small magnetic head having no rail portion on the flying surface side of a slider and having a substantially flat surface over the entire surface (Japanese Patent Application Laid-Open No. Sho 64-8).
No. 4486).

FIG. 10 is a perspective view of a conventional small magnetic head of this type.

As shown in FIG. 1, a thin-film read / write conversion element 101 is formed on a rear end face 100a of a slider 100, and a flying surface (hereinafter referred to as ABS) of the slider 100 is formed.
The surface 102 is referred to as a surface.
Front edge 102a of ABS surface 102 of slider 100
The rear edge 102b is formed in an arcuate shape so as to prevent the rear edge 102b from being caught on the surface of the magnetic disk at the start of contact. In the illustrated example, the ABS surface 102
The left and right edge portions 102c and 102d are also arc-shaped.

[0005] In this specification, the front side, the rear side, and the left and right mean the front side, the rear side, and the left and right, respectively, with respect to the relative traveling direction of the magnetic head with respect to the magnetic disk.

[0006]

However, in order to always finish the edge of the ABS 102 in a constant arc shape in the small-sized magnetic head having such a configuration, a special technique is required, which reduces the manufacturing cost. 1 that hinders reduction
Was one of the causes.

Therefore, the present invention solves the above-mentioned problems of the prior art, and can be formed using ordinary simple manufacturing techniques, and has the same function as the arc-shaped edge in the prior art. The present invention is to provide a floating magnetic head having the same.

[0008]

According to the present invention, a flying magnetic head having a slider is provided so as to cover almost the entire width of the slider.
An air bearing surface (ABS surface) is formed across the
The surface is almost entirely flat except for its edges.
Ri, at least the front edge of the air bearing surface includes a shoulder having the air bearing surface and the step, the planar shape of the stepped shoulder portions at both corners of the front end edge portion is a circular arc shape.

It is preferable that the rear edge of the ABS surface of the slider also has an arc shape in plan view of the step at both corners.

[0010] The slider may be provided with a shoulder having a step from the ABS on all edges of the ABS.

The plane shape of the above-mentioned shoulder step provided on the front edge of the ABS surface of the slider has an asymmetric shape such that a force is applied to the magnetic head to cancel the influence of the skew angle. Is also preferred.

The slider may have a lateral groove transversely extending in the left-right direction on the ABS.

[0013]

The ABS surface is formed over almost the entire width of the slider.
This ABS surface is almost entirely excluding its edge.
Forming a shoulder at least at the front edge of the ABS surface so that the plane shape of the step at both corners is an arc shape is a general manufacturing technique such as ion milling. Feasible and does not require special skills. In addition, as in the case of the conventional arc-shaped edge portion, the engagement with the magnetic disk surface at the start of contact can be minimized.

[0014]

The present invention will be described in detail with reference to the following examples.

FIG. 1 is a perspective view showing an embodiment of a flying magnetic head according to the present invention so that the ABS side can be seen. FIG. 2 is a sectional view taken along the line II-II of FIG.

As shown in FIG. 1, a thin-film read / write conversion element 11 is formed on a rear end face 10a of a ceramic structure such as Al ₂ O ₃ —TiC constituting a flying slider 10. Almost the entire ABS surface 12 is flat. A shoulder 13 which is one step lower than the ABS 12 is provided on the entire peripheral edge of the ABS 12 of the slider 10.
Is provided. The four corners 14a, 14b, 14c, and 14d of the edge of the ABS 12 are machined so that the planar shape of the step becomes an arc shape.

The edge of the ABS 12 is actually formed with two shoulders as shown in FIG. The shoulder 13 is related to the present invention, and its height × width is about 3 μm or less × about 3 μm or less in this embodiment. Shoulder 15
Corresponds to the groove formed before the cutting step to prevent chipping when cutting the slider 10;
In this embodiment, the height × width is about 50 μm × about 50 μm.

Four corners 14a at the edge of the ABS 12
Since the planar shapes of the steps 14b, 14c, and 14d are arc-shaped, engagement with the magnetic disk surface at the start of contact can be minimized.

Next, a method of manufacturing the magnetic head will be described. First, a large number of read / write conversion elements are arranged in a matrix and stacked on the entire surface of a wafer made of a ceramic structure such as Al ₂ O ₃ —TiC by a thin film forming technique.

Next, the wafer is cut for each thin-film magnetic head row. As a result, a bar in which a plurality of thin film magnetic heads are arranged in a line is obtained. During this cutting step, a groove for preventing chipping corresponding to the step 15 is formed.

The ABS of the thin-film magnetic head row in this bar state
After the surface is polished to adjust the slot height, the above-mentioned shoulder is formed in the form of a groove or the like from the ABS surface side. This shoulder formation
It is performed by machining, ion milling, or etching. Thereafter, the bar is cut to obtain individual magnetic heads, which are attached to a support mechanism (not shown) to obtain a magnetic head assembly.

FIG. 3 is a perspective view showing another embodiment of the floating type magnetic head of the present invention so that the ABS side can be seen.

As shown in FIG. 1, a thin-film read / write conversion element 31 is formed on the rear end face 30a of the ceramic structure constituting the flying slider 30, and the ABS 32 of the slider 30 is almost entirely covered. Are planar.
The front edge 32a of the ABS 32 of the slider 30 is provided with a shoulder 33 which is one step lower than the ABS 32, and both corners 34a and 34 of the front edge 32a are provided.
It is machined so that the plane shape of the step in b is an arc shape. Further, the rear edge portion 32 of the ABS 32
The two corners 34c and 34d of b are provided with shoulders 35 one step lower than the ABS 32, and the steps are machined so that the plane shape of the steps also becomes an arc shape.

The manufacturing method and operation and effect of this embodiment are shown in FIG.
The description is omitted because it is almost the same as that of the embodiment.

FIG. 4 is a perspective view showing still another embodiment of the flying magnetic head of the present invention so that the ABS side can be seen.

As shown in FIG. 1, a thin film read / write conversion element 41 is formed on the rear end face 40a of the ceramic structure constituting the flying slider 40, and the ABS 42 of the slider 40 is almost entirely covered. Are planar.
In front of the front edge 42a of the ABS surface 42 of the slider 40, a shoulder 43 that is one step lower than the ABS surface 42 (with a difference of about 3 μm or less) is provided. This shoulder 43 and ABS
The plane shape of the step with the surface 42 (i.e., the front edge 42a) has a left-right asymmetric curved shape, as clearly shown in FIG. Asymmetrical forces are created by the air 46 and 47 flowing between, which are applied to the magnetic head,
The influence of the skew angle is negated, and a stable flying height and flying posture can be obtained.

It should be noted that both corners 44 of the front edge 42a are provided.
The planar shape of the step at a and 44b is machined so as to be an arc shape, and the two corners 44c and 44d of the rear edge 42b of the ABS 42 are AB
A shoulder 45 which is one step lower than the S surface 42 is provided, and the planar shape of the step at the shoulder 45 is also processed into an arc shape in this embodiment.

The manufacturing method and other functions and effects of this embodiment are almost the same as those in the embodiment of FIG.

FIG. 5 is a perspective view showing still another embodiment of the flying type magnetic head of the present invention so that the ABS side can be seen.

As shown in the figure, a thin-film read / write conversion element 51 is formed on the rear end face 50a of the ceramic structure constituting the flying slider 50, and the ABS 52 of the slider 50 is almost entirely covered. Are planar.
In front of the front edge 52a of the ABS surface 52 of the slider 50, there is provided a shoulder 53 which is one step lower than the ABS 52 (with a difference of about 3 μm or less). This shoulder 53 and ABS
The plane shape of the step with the surface 52 (that is, the front edge 52a) is a bilaterally asymmetric oblique straight line shape as clearly shown in FIG. The asymmetric force is generated by the air 56 flowing into the magnetic head and applied to the magnetic head, so that the influence of the skew angle is canceled and a stable flying height and flying posture are obtained.

It should be noted that both corners 54 of the front edge 52a
The planar shape of the step at a and 54b is machined so as to be an arc shape, and two corners 54c and 54d of the rear edge 52b of the ABS 52 are provided with AB.
A shoulder 55 that is one step lower than the S surface 52 is provided, and the planar shape of the step at the shoulder 55 is also processed into an arc shape in this embodiment.

The manufacturing method and other functions and effects of this embodiment are almost the same as those in the embodiment of FIG.

As shown in FIG. 6C, the planar shape of the step between the shoulder 53 'and the ABS 52' (ie, the front edge 52a ') may be a bilaterally asymmetric obliquely bent linear shape. Good. As a result, an asymmetric force is generated by the air flowing between the magnetic disk and the surface of the magnetic disk, and this force is applied to the magnetic head, so that the influence of the skew angle is canceled and a stable flying height and flying attitude can be obtained.

FIG. 7 is a perspective view showing still another embodiment of the flying magnetic head of the present invention so that the ABS side can be seen.

As shown in the drawing, a thin-film read / write conversion element 71 is formed on the rear end face 70a of the ceramic structure constituting the flying slider 70, and the ABS 72 of the slider 70 is basically formed. It has a planar shape. A front edge 72a of the ABS 72 of the slider 70 has
Shoulder 7 one step lower than BS surface 72 (with a difference of about 3 μm or less)
3 are provided. Both corners 7 of the front edge 72a
The plane shapes of the steps at 4a and 74b are machined so as to be arc-shaped.
A shoulder 75 which is one step lower than the BS surface 72 is provided, and the planar shape of the step at the shoulder 75 is also processed into an arc shape in this embodiment.

The ABS 72 is provided with a lateral groove 76 which crosses in the left-right direction. Generally, in a magnetic disk, the peripheral speed of the outer circumference of the track is different from that of the inner circumference, so that the flying height of the magnetic head is larger when the magnetic head is on the outer circumference than when it is on the inner circumference. However, by providing the lateral groove 76 as in the present embodiment, a negative pressure is generated in the groove and a force acting in a direction opposite to the levitation force is applied to the magnetic head. Since this negative pressure becomes higher as the peripheral speed increases, the difference between the outer circumference and the inner circumference of the above-mentioned flying height is eliminated, and as a result, a constant flying height is secured over the entire surface of the magnetic disk. Becomes possible.

Further, the lateral grooves 76, as shown more clearly in FIG. 9 (A), the width W _in the inner circumferential side of the magnetic disk ABS surface 72 opposing than the width W _{ou t} at the outer side If it is set to be narrow and asymmetrical linear plane shape is applied, the asymmetric force is applied to the magnetic head, so the effect of the skew angle is negated and a stable flying height and flying attitude can be obtained. It is.

The manufacturing method and other functions and effects of this embodiment are almost the same as those in the embodiment of FIG.

FIG. 8 is a perspective view showing still another embodiment of the flying magnetic head of the present invention so that the ABS side can be seen.

As shown in the drawing, a thin-film read / write conversion element 81 is formed on the rear end face 80a of the ceramic structure constituting the flying slider 80, and the ABS 82 of the slider 80 is basically formed. It has a planar shape. A front edge 82a of the ABS 82 of the slider 80 has
Shoulder 8 one step lower than BS plane 82 (with a difference of about 3 μm or less)
3 are provided. Both corners 8 of the front edge 82a
4a and 84b are machined so that the planar shape of the step becomes an arc shape. Further, two corners 84c and 84d of the rear edge 82b of the ABS 82 are provided with A.
A shoulder portion 85 that is one step lower than the BS surface 82 is provided, and the planar shape of the step at the shoulder portion 85 is also processed into an arc shape in this embodiment.

The ABS 82 is provided with a lateral groove 86 which crosses in the left-right direction. The horizontal groove 86 also eliminates the difference between the outer circumference and the inner circumference of the flying height, as in the case of the horizontal groove 76 in the embodiment of FIG. 7, and as a result, ensures a constant flying height over the entire magnetic disk. Becomes possible.

Further, the lateral grooves 86, as shown more clearly in FIG. 9 (B), the width W _in the inner circumferential side of the magnetic disk ABS surface 82 opposing than the width W _{ou t} at the outer side If it is set to be narrow and has a left-right asymmetric curved planar shape, an asymmetric force is applied to the magnetic head, so the effect of the skew angle is canceled and a stable flying height and flying posture can be obtained. It is.

The manufacturing method and other functions and effects of this embodiment are almost the same as those of the embodiment of FIG.

It is apparent that a similar effect can be obtained even if a lateral groove 86 'having a shape as shown in FIG. 9C is provided on the ABS 82'.

[0045]

As described above in detail, according to the present invention, the ABS is formed over almost the entire width of the slider.
This ABS surface is almost flat except for its edge.
Are formed on, has a shoulder with the ABS surface and the step to at least the front edge portion of the ABS surfaces, the planar shape of the stepped shoulder portions at both corners of the front edge portion and the arc Therefore, it is possible to provide a flying magnetic head which can be formed by using an ordinary simple manufacturing technique and has a function equivalent to that of the arc-shaped edge portion in the conventional technique.

[Brief description of the drawings]

FIG. 1 shows an embodiment of a flying magnetic head according to the present invention, which is an ABS.
It is the perspective view which represented so that the surface side could be seen.

FIG. 2 is a sectional view taken along line II-II of FIG.

FIG. 3 shows another embodiment of a flying magnetic head according to the present invention;
FIG. 3 is a perspective view showing an S-surface side so as to be seen.

FIG. 4 is a perspective view showing still another embodiment of the flying magnetic head of the present invention so that the ABS side can be seen.

FIG. 5 is a perspective view showing still another embodiment of the flying magnetic head of the present invention so that the ABS side can be seen.

FIG. 6 is a plan view of the flying magnetic head in FIG. 4, FIG. 5, or another embodiment as viewed from the ABS side.

FIG. 7 shows another embodiment of a flying magnetic head according to the present invention;
FIG. 3 is a perspective view showing an S-surface side so as to be seen.

FIG. 8 is a perspective view showing still another embodiment of the flying magnetic head of the present invention so that the ABS side can be seen.

FIG. 9 is a plan view of the flying magnetic head in FIG. 7, FIG. 8, or another embodiment as viewed from the ABS side.

FIG. 10 is a perspective view showing a conventional flying magnetic head so that the ABS side can be seen.

[Explanation of symbols]

10, 30, 40, 50, 70, 80 sliders 11, 31, 41, 51, 71, 81 read / write elements 12, 32, 42, 52, 52 ', 72, 82 ABS
Surfaces 13, 33, 35, 43, 45, 53, 53 ', 55,
73, 75, 83, 85 Shoulder 76, 86, 86 'Lateral groove

──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. ⁷ , DB name) G11B 5/60 G11B 21/21

Claims (5)

(57) [Claims] 1. A flying magnetic head having a slider in which a read / write conversion element is provided on a rear end face, wherein a flying surface is formed over substantially the entire width of the slider .
The floating surface is almost flat except for its edge.
Are, at least on the front edge of 該浮top includes a shoulder portion having a該浮top and stepped, the planar shape of the step of the shoulder portion at both corners of the front edge and the arcuate shape A floating magnetic head, comprising: 2. A flying magnetic head according to claim 1, wherein the planar shape of the step at both corners of the rear edge of the flying surface of the slider is an arc shape. 3. The flying magnetic head according to claim 1, wherein all the edges of the flying surface of the slider are provided with shoulders having a step from the flying surface. 4. A plane shape of a step of the shoulder provided at a front edge portion of a flying surface of the slider has a left-right asymmetric shape that exerts a force for canceling an influence of a skew angle on the magnetic head. 2. The device according to claim 1, wherein
4. The flying magnetic head according to any one of items 1 to 3. 5. The flying magnetic head according to claim 1, wherein a horizontal groove is provided on the flying surface of the slider so as to cross in the left-right direction.