JP3146844B2 - Method of forming bump - Google Patents
Method of forming bumpInfo
- Publication number
- JP3146844B2 JP3146844B2 JP09959694A JP9959694A JP3146844B2 JP 3146844 B2 JP3146844 B2 JP 3146844B2 JP 09959694 A JP09959694 A JP 09959694A JP 9959694 A JP9959694 A JP 9959694A JP 3146844 B2 JP3146844 B2 JP 3146844B2
- Authority
- JP
- Japan
- Prior art keywords
- electronic component
- screen printing
- cream solder
- bumps
- bump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1216—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by screen printing or stencil printing
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistors
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3465—Application of solder
Landscapes
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Manufacturing Of Printed Wiring (AREA)
Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【0001】[0001]
【産業上の利用分野】本発明は、基板やチップなどの電
子部品の表面にマトリクス状に形成された電極上にスク
リーン印刷手段によりバンプを形成するバンプの形成方
法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bump forming method for forming bumps by screen printing means on electrodes formed in a matrix on the surface of an electronic component such as a substrate or a chip.
【0002】[0002]
【従来の技術】電子部品を小型高密度化するための手段
として、電子部品の表面に電極をマトリクス状に多数個
形成し、この電極上にバンプ(突出電極)を形成するこ
とが知られている。またバンプの形成方法として、スク
リーン印刷手段により電極上にクリーム半田を塗布した
後、電子部品を加熱炉で加熱することにより、クリーム
半田を溶融固化させてバンプを形成する方法が知られて
いる。2. Description of the Related Art As means for reducing the size and density of electronic components, it is known that a large number of electrodes are formed in a matrix on the surface of the electronic components and bumps (protruding electrodes) are formed on the electrodes. I have. Further, as a method for forming a bump, a method is known in which cream solder is applied to electrodes by screen printing means, and then the electronic component is heated in a heating furnace to melt and solidify the cream solder to form a bump.
【0003】[0003]
【発明が解決しようとする課題】スクリーン印刷手段に
よれば、バンプを低コストで作業性よく形成できる利点
があるが、クリーム半田をリフロー装置の加熱炉で加熱
して溶融させた際に、溶融したクリーム半田が流動して
ブリッジを生じ、相隣るバンプ同士が短絡しやすいとい
う問題点があった。According to the screen printing means, there is an advantage that bumps can be formed at low cost and with good workability. However, when the cream solder is melted by being heated in a heating furnace of a reflow apparatus, the melting point is reduced. There is a problem that the cream solder flows to form a bridge and adjacent bumps are likely to be short-circuited.
【0004】図9は、従来のバンプが形成された電子部
品の部分平面図であって、電子部品1の表面にはバンプ
6aがマトリクス状に多数個形成されているが、上述の
ように溶融したクリーム半田が流動してブリッジ2が生
じた結果、相隣るバンプ6a同士はブリッジ2で短絡し
ている。このようなブリッジ2は、電子部品1の小型高
密度化のために、バンプ6aを狭ピッチ化するほど発生
しやすいものである。FIG. 9 is a partial plan view of a conventional electronic component on which bumps are formed. A large number of bumps 6a are formed on the surface of the electronic component 1 in a matrix. As a result, the bridge 2 is generated by the flowing of the cream solder, and the adjacent bumps 6 a are short-circuited by the bridge 2. Such a bridge 2 is more likely to be generated as the pitch of the bumps 6a is reduced in order to reduce the size and density of the electronic component 1.
【0005】そこで本発明は、バンプ同士を短絡させる
ブリッジの発生を解消できるバンプの形成方法を提供す
ることを目的とする。Accordingly, an object of the present invention is to provide a method for forming a bump which can eliminate the occurrence of a bridge that short-circuits the bumps.
【0006】[0006]
【課題を解決するための手段】このために本発明は、第
1回目のスクリーン印刷手段により電子部品の表面の電
極上にクリーム半田を間引きして塗布し、次いでこの電
子部品を加熱することによりこのクリーム半田を溶融固
化させて第1回目のバンプを形成した後、第2回目のス
クリーン印刷手段により電子部品の表面の残りの電極上
にクリーム半田を塗布し、次いで電子部品を再度加熱す
ることによりこのクリーム半田を溶融固化させて第2回
目のバンプを形成するようにし、且つ第2回目のスクリ
ーン印刷手段のスクリーンマスクの下面には、第1回目
のバンプが嵌合する凹部を形成したものである。Means for Solving the Problems] The present invention To this end, the
After the cream solder is thinned and applied to the electrode on the surface of the electronic component by the first screen printing means, and then the cream solder is melted and solidified by heating the electronic component to form the first bump. , by the second scan <br/> screen printing means cream solder is coated on the remaining electrodes of the surface of the electronic component, and then a second time with the cream solder is melted and solidified by heating the electronic component again
So that the second bump is formed and the second screen
The first printing is performed on the lower surface of the screen mask of the screen printing means.
Are formed with concave portions to which the bumps are fitted .
【0007】[0007]
【作用】上記構成によれば、バンプを複数回に分けて間
引き形成することにより、電子部品を加熱して溶融させ
た際に、バンプ同士を短絡させるブリッジが生じるのを
防止できる。According to the above construction, by forming the bumps in a plurality of times by thinning them out, it is possible to prevent the occurrence of a bridge that short-circuits the bumps when the electronic component is heated and melted.
【0008】[0008]
【実施例】次に、図面を参照しながら本発明の一実施例
を説明する。図7は本発明の一実施例のバンプの形成方
法のフローチャートを示している。このバンプの形成方
法は、第1回スクリーン印刷と、第1回リフローと、第
2回スクリーン印刷と、第2回リフローの4つの工程か
ら成っており、以下各工程順に説明する。Next, an embodiment of the present invention will be described with reference to the drawings. FIG. 7 shows a flowchart of a bump forming method according to one embodiment of the present invention. The method of forming the bumps includes four steps of a first screen printing, a first reflow, a second screen printing, and a second reflow, which will be described in the order of each step.
【0009】図1は本発明の一実施例の第1回のスクリ
ーン印刷のスクリーン印刷機の部分断面図、図2は同部
分拡大断面図である。図1において、スクリーン印刷機
のスクリーンマスク4aを電子部品1の上面に近接さ
せ、スクリーンマスク4a上をスキージ5を矢印方向に
摺動させることにより、クリーム半田6を電子部品1に
塗布する。図2において、電子部品1の表面には電極7
が形成されており、またスクリーンマスク4aの電極7
に対応する箇所にはパターン孔8が開口されている。パ
ターン孔8は電極7を1つおきに露呈させるように形成
されており、したがってスキージ5を摺動させることに
より、1つおきの電極7上にクリーム半田6は間引きし
て塗布される。FIG. 1 is a partial sectional view of a screen printing machine for a first screen printing according to an embodiment of the present invention, and FIG. 2 is an enlarged sectional view of the same. In FIG. 1, a cream mask 6 is applied to the electronic component 1 by bringing a screen mask 4a of the screen printing machine close to the upper surface of the electronic component 1 and sliding a squeegee 5 on the screen mask 4a in the direction of the arrow. In FIG. 2, an electrode 7 is provided on the surface of the electronic component 1.
Are formed, and the electrodes 7 of the screen mask 4a are formed.
A pattern hole 8 is opened at a location corresponding to. The pattern holes 8 are formed so that every other electrode 7 is exposed. Therefore, when the squeegee 5 is slid, the cream solder 6 is thinly applied onto every other electrode 7.
【0010】電子部品1にクリーム半田6を塗布したな
らば、電子部品1をスクリーン印刷機から取り出す。図
3は本発明の一実施例の第1回のスクリーン印刷が行わ
れた電子部品の平面図であって、上記第1回のスクリー
ン印刷により塗布されたクリーム半田6は+印で示して
いる。図示するように電極7は電子部品1の表面にマト
リクス状に多数個形成されており、1つおきの電極7上
にクリーム半田6が間引きして塗布されている。After the cream solder 6 is applied to the electronic component 1, the electronic component 1 is taken out of the screen printing machine. FIG. 3 is a plan view of the electronic component on which the first screen printing has been performed according to the embodiment of the present invention. The cream solder 6 applied by the first screen printing is indicated by a + mark. . As shown in the figure, a large number of electrodes 7 are formed in a matrix on the surface of the electronic component 1, and cream solder 6 is thinned and applied on every other electrode 7.
【0011】次にこの電子部品1を第1回リフローのた
めにリフロー装置の加熱炉へ送り、加熱してクリーム半
田6を溶融させた後、冷却して固化させることによりバ
ンプ6aを形成する。Next, the electronic component 1 is sent to a heating furnace of a reflow apparatus for a first reflow, and is heated to melt the cream solder 6, and then cooled and solidified to form a bump 6a.
【0012】次にこの電子部品1を再度スクリーン印刷
機へ送り、残りの電極7にクリーム半田6を塗布する。
図4は本発明の一実施例の第2回のスクリーン印刷のス
クリーン印刷機の部分拡大断面図である。電子部品1の
1つおきの電極7上には、第1回のスクリーン印刷とリ
フローを行ったことにより、クリーム半田6が固化した
バンプ6aが形成されている。スクリーンマスク4bの
下面にはこのバンプ6aが嵌合する凹部9が形成されて
おり、また第2回のクリーム半田6を電極7上に塗布す
るためのパターン孔8が開口されている。したがってス
キージ5を摺動させると、残りの電極7上にクリーム半
田6が塗布される。図5は本発明の一実施例の第2回の
スクリーン印刷が行われた電子部品の平面図である。図
5において、+印とハッチングで示すバンプ6aは上述
した第1回のスクリーン印刷とリフローで形成されたも
のである。Next, the electronic component 1 is sent to the screen printing machine again, and the cream solder 6 is applied to the remaining electrodes 7.
FIG. 4 is a partially enlarged cross-sectional view of a screen printing machine for the second screen printing according to one embodiment of the present invention. On every other electrode 7 of the electronic component 1, bumps 6a in which the cream solder 6 is solidified are formed by performing the first screen printing and reflow. The lower surface of the screen mask 4b is formed with a concave portion 9 into which the bump 6a is fitted, and a pattern hole 8 for applying the second cream solder 6 on the electrode 7 is opened. Therefore, when the squeegee 5 is slid, the cream solder 6 is applied on the remaining electrodes 7. FIG. 5 is a plan view of the electronic component on which the second screen printing is performed according to the embodiment of the present invention. In FIG. 5, the bumps 6a indicated by + and hatching are formed by the above-described first screen printing and reflow.
【0013】続いてこの電子部品1を第2回のリフロー
のためにリフロー装置の加熱炉へ送り、加熱してクリー
ム半田6を溶融させる。この時1回目で形成されたバン
プ6aも再度溶融するが、このバンプ6aは既に電極7
の上面に付着しているので電極7から流出することはな
い。従ってその分、2回目のリフローで溶融したクリー
ム半田6とブリッジを生じにくくなる。その後、溶融し
たクリーム半田6を冷却して固化させれば、バンプ付き
電子部品1が完成する。図6は、以上のようにして完成
した本発明の一実施例の電子部品の部分断面図である。
上述のように本方法はすべてのバンプ6aを同時に形成
せずに、1つおきに2回に分けて形成するようにしてい
るので、クリーム半田6を加熱炉で加熱して溶融させて
も、溶融した相隣るクリーム半田6同士が短絡してブリ
ッジを生じにくく、バンプ6aを狭ピッチで確実に形成
できる。なお上記実施例では、バンプ6aは2回に分け
て形成しているが、3回以上に分けて形成してもよいも
のである。Subsequently, the electronic component 1 is sent to a heating furnace of a reflow apparatus for the second reflow, and is heated to melt the cream solder 6. At this time, the bump 6a formed at the first time is also melted again.
Does not flow out of the electrode 7 because it adheres to the upper surface of the electrode 7. Accordingly, the bridge with the cream solder 6 melted in the second reflow is less likely to occur. Then, if the melted cream solder 6 is cooled and solidified, the electronic component 1 with bumps is completed. FIG. 6 is a partial sectional view of an electronic component according to one embodiment of the present invention completed as described above.
As described above, in the present method, all the bumps 6a are not formed at the same time, but are formed twice every other one. Therefore, even if the cream solder 6 is heated and melted in a heating furnace, Adjacent melted cream solders 6 are not short-circuited to each other to form a bridge, and bumps 6a can be reliably formed at a narrow pitch. In the above embodiment, the bump 6a is formed in two steps, but may be formed in three or more steps.
【0014】図8は本発明の他の実施例の第2回のスク
リーン印刷のスクリーン印刷機の部分拡大断面図であ
る。このスクリーンマスク4cは、第1回のリフローで
形成されたバンプ6aが嵌合する凹部9aを確保するた
めの上面10がドーム状に形成されている。したがって
このスクリーンマスク4cの厚さは、図4に示すスクリ
ーンマスク4bよりも薄くでき、パターン孔8にクリー
ム半田6が過量に塗布されるのを解消できる。FIG. 8 is a partially enlarged sectional view of a screen printing machine for the second screen printing according to another embodiment of the present invention. The screen mask 4c has a dome-shaped upper surface 10 for securing a concave portion 9a in which the bump 6a formed by the first reflow is fitted. Therefore, the thickness of the screen mask 4c can be made smaller than that of the screen mask 4b shown in FIG. 4, and it is possible to prevent the cream solder 6 from being excessively applied to the pattern holes 8.
【0015】[0015]
【発明の効果】以上説明したように本発明のバンプ形成
方法は、すべてのバンプを同時に形成せずに、複数回に
分けて間引き形成するようにしているので、電子部品を
加熱してクリーム半田を溶融させた際に、溶融したクリ
ーム半田同士が短絡してブリッジを生じにくく、狭ピッ
チのバンプを確実に形成することができる。As described above, according to the bump forming method of the present invention, all the bumps are not formed at the same time, but are thinned out in a plurality of times. When the solder is melted, the melted cream solders are short-circuited to each other, so that a bridge is unlikely to be formed, and a narrow pitch bump can be reliably formed.
【図1】本発明の一実施例の第1回のスクリーン印刷の
スクリーン印刷機の部分断面図FIG. 1 is a partial cross-sectional view of a first screen printing screen printing machine according to an embodiment of the present invention.
【図2】本発明の一実施例の第1回のスクリーン印刷の
スクリーン印刷機の部分拡大断面図FIG. 2 is a partially enlarged cross-sectional view of a screen printing machine of a first screen printing according to an embodiment of the present invention.
【図3】本発明の一実施例の第1回のスクリーン印刷が
行われた電子部品の平面図FIG. 3 is a plan view of an electronic component on which first screen printing is performed according to an embodiment of the present invention.
【図4】本発明の一実施例の第2回のスクリーン印刷の
スクリーン印刷機の部分拡大断面図FIG. 4 is a partially enlarged cross-sectional view of a screen printer of a second screen printing according to an embodiment of the present invention.
【図5】本発明の一実施例の第2回のスクリーン印刷が
行われた電子部品の平面図FIG. 5 is a plan view of an electronic component on which a second screen printing is performed according to an embodiment of the present invention.
【図6】本発明の一実施例の電子部品の部分断面図FIG. 6 is a partial sectional view of an electronic component according to one embodiment of the present invention.
【図7】本発明の一実施例のバンプの形成方法のフロー
チャートFIG. 7 is a flowchart of a bump forming method according to an embodiment of the present invention.
【図8】本発明の他の実施例の第2回のスクリーン印刷
のスクリーン印刷機の部分拡大断面図FIG. 8 is a partially enlarged cross-sectional view of a screen printing machine for a second screen printing according to another embodiment of the present invention.
【図9】従来のバンプが形成された電子部品の部分平面
図FIG. 9 is a partial plan view of a conventional electronic component on which bumps are formed.
1 電子部品 4a,4b スクリーンマスク 5 スキージ 6 クリーム半田 6a バンプ 7 電極 8 パターン孔 9 凹部 DESCRIPTION OF SYMBOLS 1 Electronic component 4a, 4b Screen mask 5 Squeegee 6 Cream solder 6a Bump 7 Electrode 8 Pattern hole 9 Depression
Claims (1)
た電極上にバンプを形成するバンプの形成方法であっ
て、第1回目のスクリーン印刷手段により電子部品の表
面の電極上にクリーム半田を間引きして塗布し、次いで
この電子部品を加熱することによりこのクリーム半田を
溶融固化させて第1回目のバンプを形成した後、第2回
目のスクリーン印刷手段により前記電子部品の表面の残
りの電極上にクリーム半田を塗布し、次いで前記電子部
品を再度加熱することによりこのクリーム半田を溶融固
化させて第2回目のバンプを形成するようにし、且つ前
記第2回目のスクリーン印刷手段のスクリーンマスクの
下面には、前記第1回目のバンプが嵌合する凹部を形成
したことを特徴とするバンプの形成方法。1. A method of forming a bump on an electrode formed in a matrix on the surface of an electronic component, wherein cream solder is applied to the electrode on the surface of the electronic component by first screen printing means. culled by coating, and then after forming the first round of bumps the cream solder is melted and solidified by heating the electronic component, a second time
The eyes of a screen printing means cream solder is coated on the remaining electrodes of the electronic component of the surface and then to form a second round of bumps the cream solder is melted and solidified by heating the electronic component again And before
The screen mask of the second screen printing means
On the lower surface, a recess is formed to fit the first bump
A method for forming a bump, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09959694A JP3146844B2 (en) | 1994-05-13 | 1994-05-13 | Method of forming bump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09959694A JP3146844B2 (en) | 1994-05-13 | 1994-05-13 | Method of forming bump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07307562A JPH07307562A (en) | 1995-11-21 |
| JP3146844B2 true JP3146844B2 (en) | 2001-03-19 |
Family
ID=14251486
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP09959694A Expired - Fee Related JP3146844B2 (en) | 1994-05-13 | 1994-05-13 | Method of forming bump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3146844B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3631230B2 (en) * | 2002-11-21 | 2005-03-23 | 富士通株式会社 | Method for forming spare solder |
-
1994
- 1994-05-13 JP JP09959694A patent/JP3146844B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07307562A (en) | 1995-11-21 |
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