JP3146964B2 - Clean room vibration isolation floor structure - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration-isolating floor structure of a clean room employed in a factory for producing precision machines and ICs.

[0002]

2. Description of the Related Art A factory for producing precision machines and ICs is constructed as a clean room in which foreign substances such as fine dust are eliminated. In this clean room, the interior of the room is maintained in a dust-free state by exhausting the room air from the floor surface while supplying the room with dust-free air from a fan provided with a filter provided on the ceiling.

As a floor structure of such a clean room, a waffle slab system and a joist receiving beam system are known. In the waffle slab method, a lattice-like slab is constructed by RC construction or the like, and grating is laid on a grating-sized opening formed in the lattice-like slab. On the other hand, the joist receiving beam method is RC construction,
The joist receiving beam is built in parallel by S or SRC,
A plurality of joists are bridged between the joist receiving beams in a direction orthogonal to the joist receiving beams, and a grating is laid on the joists.

[0004]

However, regardless of the floor structure of any type, the equipment such as various production facilities and measuring instruments installed in the clean room is subject to the seismic force received by the structure having the clean room. Of course, of course, those who dislike micro vibrations when workers pass on the grating are also common (hereinafter, these equipment are referred to as anti-vibration equipment).

SUMMARY OF THE INVENTION It is an object of the present invention to provide a vibration-isolating floor structure of a clean room capable of reliably suppressing the seismic force applied to the anti-vibration equipment and the micro-vibration when a worker passes.

[0006]

In order to achieve the above object, the present invention relates to a clean room in which air in a clean room is circulated to a return chamber below the floor through a grating installed on the floor surface. A slab made of RC is installed on the floor via a vibration isolator, and is set to be substantially the same as the floor level of the grating through an opening formed on a part of the floor placed on the slab. A gantry for installing the anti-vibration device, insulates the grating from the slab and the gantry for installing the anti-vibration device, and the slab has a plurality of the grating sizes.
It is characterized by having twice the size .

[0007] gantry which Iyafu equipment is placed is on slab that will be placed on the floor of Litan chamber via a vibration isolation device
Because it is mounted , vibration due to the earthquake is suppressed. The slight vibration that occurs when workers pass through the grating is
It will be propagated to the other grating in contact next, grating
Since the slabs and Iyafu device installation for platform is insulated from the not that the micro vibration is propagated to the slab and Iyafu equipment installation for platform, as a result, micro-vibration during the worker passage in Iyafu equipment Is not propagated.

[0008]

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 shows a preferred embodiment of a vibration isolating floor structure of a clean room according to the present invention.

In the clean room 1 of the present embodiment, the air in the room is circulated through a floor surface to a return chamber 5 below the floor.

On the floor of the return chamber 5, for example, 7.
The truss-like main pillars 7, 7 are erected at a span of 2 m.
Large beams 9, 9 are erected in parallel between these main columns 7, 7,
Between the girders 9, 9, small beams 11, 11 are erected in parallel in a direction perpendicular to the girders 9, 9 at an appropriate pitch.
A plurality of joists 13, 13 are laid in parallel on the grid constituted by the 9 and the small beams 11, 11 at a pitch corresponding to the grating size. And these joists 13, 13
The gratings 15 and 15 are placed on the surface of the clean room 1. The level difference between the floor of the return chamber 5 and the floor of the clean room 1 is, for example, 4
m. These girders 9, beams 11, joists 13
The grating 15 constitutes a first vibration system.

In the return chamber 5, a pillar 1 erected on the floor of the chamber 5 with the same span as the main pillars 7, 7.
A gantry 19 supported by 7, 17 is provided. In addition, a plurality of brace members 20, 20 are arranged in a truss shape between the floor surface of the return chamber 5 and the gantry 19.
A relatively large waffle slab 23 (slab) is supported on the gantry 19 via a plurality of vibration isolation devices 21 and 21. As is well known, the waffle slab 23 is a lattice-like slab constructed by RC construction or the like, and has a size several times the grating size. When the size of the grating 15 is 600 × 600 mm, the size of the waffle slab 23 is preferably 3000 × 3000 mm or more.

The vibration isolator 21 of the present embodiment includes a horizontal vibration isolator 21a made of a well-known laminated rubber,
The two-layer structure 21A having a vertical vibration isolator 21b such as an air spring or a metal spring disposed thereon is disposed at an appropriate position in a plane. Damper 21B for suppressing vertical vibration
Is arranged.

An opening 25 is formed in a part of the floor of the clean room 1 by removing the small beams 11, the joists 13 and the gratings 15. On the other hand, on the waffle slab 23, a vibration-isolating pedestal 27 is placed through the floor opening 25 of the clean room 1, and on the vibration-isolating gantry 27, an anti-vibration device 29 such as a precision device that dislikes vibration is further installed. I have. The waffle slab 23 and the anti-vibration base 27 for installing the anti-vibration device
Of the vibration system.

The girders 9, the girders 11, and the joists 13
A predetermined gap is formed between the first vibration system including the grating 15 and the second vibration system including the waffle slab 23 and the vibration isolation pedestal 27, and the two are insulated from each other. However, it is preferable for the safety of the operator to set the gap between the floor opening 25 of the clean room 1 and the vibration isolator 27 as small as possible. Also, the floor level of the vibration isolation stand 27 is
The level is preferably set to be substantially the same as the floor level of the clean room 1 (grating 15) so as to facilitate the handling of the anti-vibration device 29. The waffle slab 23
Is set in consideration of the characteristics of the vibration isolator 21 and the weight of the vibration isolator 27 and the anti-vibration device 29 mounted thereon.

The return chamber 5 is connected to a fan with a filter provided on the ceiling of the clean room 1 through a duct (not shown) to remove dust. The air supplied from the fan into the clean room 1 is supplied to the floor surface. Girder 9 and girder 11 combined in a grid through a grating 15
Is returned to the return chamber 5 from the gap between the clean room 1 and the clean room 1. Since the openings 23 a and 23 a are formed in the waffle slab 23, the air in the clean room 1 flows to the return chamber 5 via the waffle slab 23.

The embodiment of the present invention has the above-described features. The vibration isolator 27 on which the anti-vibration device 29 is mounted is installed on the floor of the return chamber 5 via the vibration isolator 21. Vibrations due to earthquakes are reduced. In particular, the vibration isolator 21 in the present embodiment includes a horizontal vibration isolator 21a.
Not only the vertical vibration isolator 21b and the damper 21B
It has both horizontal and vertical vibration isolation functions during an earthquake.

Further, the micro vibration generated when the worker passes on the grating 15 propagates through the joist 13 to the other grating 15 adjacent thereto.
A first vibration system including a joist 13 and a grating 15 and a second vibration system including a waffle slab 23 and a vibration isolation base 27
This vibration is not propagated to the waffle slab 23 and the vibration-isolation pedestal 27 because the vibration system is insulated.
As a result, the micro-vibration during the passage of the worker is not transmitted to the anti-vibration device 29.

Since the waffle slab 23 has a size several times the grating size, the grating 15 at an arbitrary position on the waffle slab 23 can be removed and the position of the opening 25 can be changed. A vibration isolation base 27 can be installed in the opening 25. For this reason, the position of the anti-vibration gantry 27 (anti-vibration device 29) can be easily changed on the waffle slab 23, and a plurality of anti-vibration gantry 27 can be installed on one waffle slab 23. .

Further, a rail for traveling is arranged on the waffle slab 23, and the vibration-isolation pedestal 27 is configured to travel on this rail, or a self-propelled wheel is provided below the vibration-isolation pedestal 27. In this case, the vibration isolator 27
The (anti-vibration device 29) can freely move in one opening 25 formed by removing the small beam 11, the joist 13, and the grating 15.

In the above embodiment, a waffle slab is exemplified as a slab, but the slab of the present invention is not limited to this.

[0021]

As described above, according to the present invention, the gantry on which the anti-vibration device is mounted is mounted on the slab installed on the floor of the return chamber via the vibration isolation device. The vibration caused by the earthquake is suppressed, and the grating is insulated from the slab and the stand for installing the anti-vibration device. The vibration does not propagate to the installation stand, and the micro-vibration when the worker passes is not propagated to the anti-vibration equipment. Furthermore, slabs, Runode have multiple of the size of the grating size, by removing the grating at an arbitrary position can be changed the position of the openings on the slab, Iyafu equipment installed in the openings A gantry can be installed.

[Brief description of the drawings]

FIG. 1 is a side view showing a vibration isolating floor structure of a clean room according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Clean room 5 Return chamber 15 Grating 19 Mounting stand 21 Vibration isolation device 23 Waffle slab (slab) 21a Horizontal vibration isolation device 21b Vertical vibration isolation device 21B Damper 25 Opening 27 Vibration isolation platform 29 Anti-vibration equipment

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-2-66249 (JP, A) JP-A-63-14025 (JP, A) JP-A-63-67369 (JP, A) (58) Investigation Field (Int.Cl. ⁷ , DB name) E04H 5/02 B01L 1/00 E04B 5/43

Claims (1)

(57) [Claims] 1. A clean room in which air in a clean room is circulated to a return chamber below the floor via gratings installed on the floor, wherein the RC structure is installed on the floor of the return chamber via a vibration isolator. A slab and a pedestal for installing anti-vibration equipment set on the slab through an opening formed in a part of the floor surface and set at substantially the same level as the floor level of the grating are provided. It insulates the slab and Iyafu equipment installation for platform, the slab, the gray
A vibration-isolating floor structure for a clean room, characterized by having a size several times larger than the chin size.