Deprecated: The each() function is deprecated. This message will be suppressed on further calls in /home/zhenxiangba/zhenxiangba.com/public_html/phproxy-improved-master/index.php on line 456
JP3147917B2 - Vibrator - Google Patents
[go: Go Back, main page]

JP3147917B2 - Vibrator - Google Patents

Vibrator

Info

Publication number
JP3147917B2
JP3147917B2 JP07316091A JP7316091A JP3147917B2 JP 3147917 B2 JP3147917 B2 JP 3147917B2 JP 07316091 A JP07316091 A JP 07316091A JP 7316091 A JP7316091 A JP 7316091A JP 3147917 B2 JP3147917 B2 JP 3147917B2
Authority
JP
Japan
Prior art keywords
phase
power supply
group
vibrator
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP07316091A
Other languages
Japanese (ja)
Other versions
JPH04308486A (en
Inventor
千葉一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP07316091A priority Critical patent/JP3147917B2/en
Publication of JPH04308486A publication Critical patent/JPH04308486A/en
Application granted granted Critical
Publication of JP3147917B2 publication Critical patent/JP3147917B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、圧電素子等の振動発生
用素子と、該素子からの振動を受けて振動する振動体に
発生させた振動によって、該振動体に圧接した部材、例
えばロータと該振動体とを相対的に移動させる振動型モ
ータ用の振動子に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration generating element such as a piezoelectric element, and a member, for example, a rotor, which is pressed against a vibrating body by vibrating the vibrating body which receives the vibration from the element. it relates vibration Doko for vibration type motor for relatively moving the vibration member and.

【0002】[0002]

【従来技術】圧電素子等の振動発生用素子を2枚重ね合
わせたものを一群の振動発生駆動部とし、これを二群用
いて振動駆動源とすると共に、これら二群の積層された
圧電素子の両側に振動体としての金属ブロックを配置
し、これら金属ブロック間に圧電素子を配置し、またこ
れら圧電素子間には圧電素子への外部電源からの電圧を
給電するための電極板を介装し、これら圧電素子並びに
電極板を挟持した状態でボルト等の締結部材によりこれ
ら金属ブロックを締結して一体化した振動子が提案され
ている。
2. Description of the Related Art A group of two vibration generating elements such as piezoelectric elements are superimposed to form a group of vibration generating drivers, and two groups are used as a vibration driving source. A metal block as a vibrator is disposed on both sides of the piezoelectric element, a piezoelectric element is disposed between the metal blocks, and an electrode plate for supplying a voltage from an external power supply to the piezoelectric element is interposed between the piezoelectric elements. A vibrator has been proposed in which these metal blocks are fastened together by fastening members such as bolts while sandwiching these piezoelectric elements and electrode plates.

【0003】従来の振動子を図3に基づき説明する。A conventional vibrator will be described with reference to FIG.

【0004】1,2は振動体をなす前後の金属ブロッ
ク、3,4,5,6はPZT等で構成される電気−機械
エネルギー変換素子としての圧電素子、7,8,9,1
0は電極板で、圧電素子3,4により一群の振動発生駆
動部(以下A相と称す)を、また圧電素子5,6により
一群の振動発生駆動部(以下B相と称す)を夫々構成し
ており、後金属ブロック2側から挿入された締結ボルト
11のオネジ部11aが前金属ブロック1のメネジ部1
aに螺着することによりこれらの振動子を構成する部材
を一体化する。
[0004] Reference numerals 1 and 2 denote metal blocks before and after forming a vibrating body, reference numerals 3, 4, 5, and 6 denote piezoelectric elements as electro-mechanical energy conversion elements made of PZT or the like, 7, 8, 9, 1, and 1.
Reference numeral 0 denotes an electrode plate, which constitutes a group of vibration generating and driving units (hereinafter referred to as A phase) by the piezoelectric elements 3 and 4, and a group of vibration generating and driving units (hereinafter referred to as B phase) by the piezoelectric elements 5 and 6, respectively. The male screw portion 11a of the fastening bolt 11 inserted from the rear metal block 2 side is
The members constituting these vibrators are integrated by being screwed to a.

【0005】グランド用の電極板(共通グランド電極)
8とA相用の電極板7にはA相駆動用交流電源回路(不
図示)からの交流電圧が給電され、またグランド用の電
極10とB相用の電極板9にはB相駆動用交流電源回路
(不図示)からの交流電圧が給電されるようになってい
る。グランド用の電極板10が導電性を有する後金属ブ
ロック2と電気的に接しており、共通グランド電極8は
A相、B相駆動用交流電源回路13、14のグランド側
出力に接続されており、導電性を有する後金属ブロック
2は導電性を有する締結ボルト11を介して電気的に共
通グランド電極8、及び前金属ブロック1に導通してい
る。
[0005] Electrode plate for ground (common ground electrode)
An AC voltage from an A-phase driving AC power supply circuit (not shown) is supplied to the 8 and A-phase electrode plates 7, and a B-phase driving electrode is applied to the ground electrode 10 and the B-phase electrode plate 9. An AC voltage is supplied from an AC power supply circuit (not shown). The ground electrode plate 10 is electrically in contact with the rear metal block 2 having conductivity, and the common ground electrode 8 is connected to the ground-side outputs of the A-phase and B-phase driving AC power supply circuits 13 and 14. The conductive rear metal block 2 is electrically connected to the common ground electrode 8 and the front metal block 1 via the conductive fastening bolt 11.

【0006】図3に示す振動子は、ペンシル型モータの
振動子として用いられるもので、ボルト11の先端部に
植設された小径軸部15の回りに、前金属ブロック1の
前端面と当接するロータ12、ロータ12と当接する外
周部にギア13aを有する出力部材13、出力部材13
にベアリング14を介して内装されるスリーブ部材16
が設けられ、小径軸部15の先端部に抜け止め固定され
たストッパープレート18とスリーブ部材16との間に
弾装された加圧バネ17により、ロータ12は前金属ブ
ロック1に圧接されている。
The vibrator shown in FIG. 3 is used as a vibrator of a pencil-type motor. The vibrator shown in FIG. Rotor 12 in contact with, output member 13 having gear 13a on the outer peripheral portion in contact with rotor 12, output member 13
Sleeve member 16 which is fitted inside bearing 14
The rotor 12 is pressed against the front metal block 1 by a pressure spring 17 elastically mounted between a stopper plate 18 fixed to the distal end of the small diameter shaft portion 15 and the sleeve member 16. .

【0007】このようなペンシル型モータは、人間の手
の小指よりもさらに小さい超小型化が可能で、電極板7
〜10に径方向外方に向けて延出されている給電用端子
部7a〜10aは、振動子の振動系においてはアンバラ
ンスな要因となり、振動に対して少なからず影響を及ぼ
し、給電用端子部による影響をできるだけ少なくしたい
という要求がある。
[0007] Such a pencil-type motor can be miniaturized even smaller than the little finger of a human hand.
The power supply terminal portions 7a to 10a extending radially outward from the power supply terminals 7a to 10a are unbalanced factors in the vibrating system of the vibrator, and have a considerable influence on the vibration. There is a demand to minimize the influence of the department.

【0008】また、給電用の端子部7a〜10aの向き
については特に規定していないことから個々の振動体毎
に異なり、通常は電源回路間とのリード線による配線に
より決められることが多く、例えば図3の(a)に示す
ように夫々が周方向において異なった位置(角度)に配
置されている。
Further, since the direction of the power supply terminals 7a to 10a is not particularly specified, it differs for each vibrating body, and is usually determined by a lead wire between power supply circuits. For example, as shown in FIG. 3A, each is arranged at a different position (angle) in the circumferential direction.

【0009】しかし、これらの端子部7a〜10aをフ
レキシブルプリント配線板により電源回路と接続する場
合、端子間の間隔が大きいためにフレキシブルプリント
配線板が不必要に大きくなり、また複雑化するという問
題がある。
However, when these terminal portions 7a to 10a are connected to a power supply circuit by a flexible printed circuit board, the flexible printed circuit board becomes unnecessarily large and complicated due to a large interval between the terminals. There is.

【0010】さらに、これらの端子部7a〜10aは軸
方向において重なってないことから、振動子を実際に配
置する場合には、図3の例では各端子部に対応してその
回りの部品に最大4箇所の逃げを設ける必要があり、超
小型化を可能とするペンシル型モータへの利用に際して
スペースの著しい無駄を招くという問題がある。
Further, since these terminal portions 7a to 10a do not overlap in the axial direction, when the vibrator is actually arranged, in the example of FIG. It is necessary to provide a maximum of four reliefs, and there is a problem that a space is remarkably wasted when used in a pencil-type motor capable of miniaturization.

【0011】[0011]

【発明が解決しようとする課題】本発明が解決しようと
する課題は、振動子の圧電素子に接触する電極板の給電
用端子部がその配置位置によっては振動子の振動に影響
を及ぼすこと、複数の端子部がバラバラな向きに位置し
ていることによるフレキシブルプリント配線板との接続
に不向きであり、また振動子の回りに余計なスペース多
く必要とすることにある。
The problem to be solved by the present invention is that the power supply terminal portion of the electrode plate in contact with the piezoelectric element of the vibrator has an effect on the vibration of the vibrator depending on its arrangement position. It is not suitable for connection to a flexible printed wiring board due to the plurality of terminal portions being located in different directions, and requires extra space around the vibrator.

【0012】本発明の目的は、振動への影響を少なく
し、フレキシブルプリント配線板との接続及び周囲の無
駄なスペースをできる限り少なくすることができる振動
子を提供することにある。
An object of the present invention is to provide a vibrator capable of minimizing the influence on vibration and minimizing the connection with a flexible printed wiring board and the useless space around it.

【0013】[0013]

【課題を解決するための手段】本発明の目的を実現する
ための構成は、介装される給電部材を介して供給される
電気信号に応答して振動を発生する電気−機械エネルギ
ー変換素子を積層配置し、複数層の電気−機械エネルギ
ー変換素子は第1相駆動群と、前記第1相駆動群とは
90度位相が異なる第2相駆動群とを有し、これら電気
−機械エネルギー変換素子および給電部材を挟持するよ
に配置された振動体とで一体化され、前記第1相駆動
群と前記第2相駆動群とにより励起される振動の合成に
より、首振りのような振動を生じさせる振動子におい
て、前記給電部材と外部の回路とを電気的に接続するた
めに設けられたものであって、前記給電部材の外部に突
出した給電用突出部を、前記第1相駆動群と前記第2相
駆動群との位相ずれの中間である略45度位相の位置に
位置させたことを特徴とする。
According to an aspect of the present invention, there is provided an electro-mechanical energy conversion element which generates vibration in response to an electric signal supplied via an interposed power supply member. laminated arrangement, electrical multiple layers - mechanical energy conversion element is a first-phase driving group, stand for the first-phase driving group
And a 90 ° phase different from the first two-phase drive unit, these electric - is integrated in the placement vibration member so as to hold the mechanical energy conversion element and a power supply member, the said first phase driving group In a vibrator that generates vibration such as swinging by combining vibrations excited by the second phase drive group, the power supply member and an external circuit are electrically connected.
And provided outside the power supply member.
The projecting portion for power supply that is output is connected to the first phase drive group and the second phase drive group.
In the position of approximately 45 degree phase, which is in the middle of the phase shift with the drive group
It is characterized by being located .

【0014】[0014]

【作用】上記した構成の振動子は、圧電素子等の電気−
機械エネルギー変換素子に給電するために介装されてい
る給電部材は、その外部に突出した給電用突出部を、第
1相駆動群と第2相駆動群との位相のずれである略90
度の中間である略45度の位相ずれの位置に位置させた
ので、第1相駆動群により励振される振動と、第2相駆
動群により励振される振動に対する影響を略等しくする
ことができ、剛性振動としての首振のような振動を駆動
効率の良い真円に近づけることができる
The vibrator having the above-described structure is an electric element such as a piezoelectric element.
Interposed to supply power to the mechanical energy conversion element
The power supply member has a power supply protrusion protruding to the outside thereof,
Approximately 90, which is the phase shift between the one-phase drive group and the second-phase drive group
At a position with a phase shift of about 45 degrees, which is halfway between degrees.
Therefore, the vibration excited by the first phase drive group and the second phase drive
Make the effects on vibrations excited by the motion group approximately equal
Can drive vibration like sway as rigid vibration
An efficient perfect circle can be approached .

【0015】[0015]

【実施例】図1及び図2には本発明による振動子の一実
施例を示す。図1に示す振動子はペンシル型モータに利
用したもので、図3に示す従来例と基本的構造は同じで
あるため、従来例に示したモータの各構成部材と同じ符
号を用いる。
1 and 2 show an embodiment of a vibrator according to the present invention. The vibrator shown in FIG. 1 is used for a pencil type motor and has the same basic structure as that of the conventional example shown in FIG. 3, so that the same reference numerals are used as those of the components of the motor shown in the conventional example.

【0016】本実施例における振動子を構成する圧電素
子板3〜6は、同一構造のものを使用しており、図2に
示す圧電素子板3を例にすると、内径部を有する円板形
状の圧電素子板3は、直径線部に電極膜の形成されてい
ないスリット部3Cを境界としてその両側に電極膜3A
と3Bとが形成され、これら電極膜3A、3Bの領域は
異なった分極方向に分極処理されている。そして第1相
駆動群である駆動用のA相をなす圧電素子3、4は例え
ばその極性を逆にして(180度位相をずらして)中央
のスリット部3Cを一致させて重ね合わせられ、また
2相駆動群である駆動用のB相をなす圧電素子5、6は
上記のA相の場合と同様に位相を180度ずらして重ね
合わせられているが、A相に対して位相を90度ずらし
て配置されている。すなわち、圧電素子5のスリット部
5Cは圧電素子3のスリット部3Cに対して直交してい
ることになる。
The piezoelectric element plates 3 to 6 constituting the vibrator according to the present embodiment have the same structure. For example, in the case of the piezoelectric element plate 3 shown in FIG. Of the piezoelectric element plate 3 has a slit portion 3C where the electrode film is not formed on the diameter line portion, and the electrode films 3A on both sides thereof.
And 3B are formed, and the regions of the electrode films 3A and 3B are polarized in different polarization directions. And the first phase
The driving A-phase piezoelectric elements 3 and 4, which are the driving group, are overlapped, for example, by reversing their polarities (shifting the phase by 180 degrees) so that the central slit portions 3C coincide with each other .
The driving B-phase piezoelectric elements 5 and 6, which are a two-phase driving group, are superposed with the phase shifted by 180 degrees as in the case of the A-phase, but the phase is shifted by 90 degrees with respect to the A-phase. They are staggered. That is, the slit 5C of the piezoelectric element 5 is orthogonal to the slit 3C of the piezoelectric element 3.

【0017】一方、これら圧電素子間に介装される給電
部材としての電極板7〜10は、その給電用突出部とし
ての端子部7a〜10aが軸方向において重ね合わせた
状態に位置合わせされていて、これら端子部7a〜10
aは圧電素子3のスリット3Cに対して位相角度αずら
して配置されており、本実施例では駆動用のA相圧電素
子群と駆動用のB相圧電素子群とを90度の位相ずれを
有して配置していることから位相角度αを45度として
いる。
On the other hand, a power supply interposed between these piezoelectric elements
The electrode plates 7 to 10 as members are formed as power feeding protrusions.
All of the terminal portions 7a to 10a are aligned in a state of being overlapped in the axial direction.
a is arranged with a phase angle α shifted with respect to the slit 3C of the piezoelectric element 3, and in this embodiment, the phase difference between the driving A-phase piezoelectric element group and the driving B-phase piezoelectric element group is shifted by 90 degrees. The phase angle α is set to 45 degrees because of the arrangement.

【0018】すなわち、振動子を単にその長さ方向にお
いてのみ振動させるには、2相の圧電素子群を設ける必
要はなく、位相の異なる振動を2相の圧電素子群により
励起させ、その合成として振動子に首振りのような振動
を発生させ、振動子の先端部表面に形成される円又は楕
円運動によりロータ12を摩擦駆動するには、A相駆圧
電素子群により振動する振動系と、B相駆動圧電素子群
により振動する振動系が等価であることが最も望まし
い。
That is, in order to vibrate the vibrator only in its length direction, it is not necessary to provide a two-phase piezoelectric element group. Vibrations having different phases are excited by the two-phase piezoelectric element group, and the combined In order to generate vibration such as swinging on the vibrator and frictionally drive the rotor 12 by a circular or elliptical motion formed on the surface of the distal end of the vibrator, a vibration system vibrated by an A-phase driving piezoelectric element group; It is most desirable that the vibration system vibrated by the B-phase driving piezoelectric element group is equivalent.

【0019】しかし、電極板から延出される端子部は1
つであり、このため振動子の対称性を阻害していること
になり、図3に示すような従来の配置では、A相駆動圧
電素子群とB相駆動圧電素子群との振動による、軸方向
振動と半径方向振動の機械インピーダンスに差が生じ、
振動子に上述したような略真円を描く首振運動を行わせ
ることができなくなる。
However, the terminal portion extending from the electrode plate is one.
Therefore, the symmetry of the vibrator is impaired, and in the conventional arrangement as shown in FIG. 3, the axis due to the vibration of the A-phase driving piezoelectric element group and the B-phase driving piezoelectric element group A difference occurs in the mechanical impedance between the directional vibration and the radial vibration,
It becomes impossible to cause the vibrator to perform the swinging motion that draws a substantially perfect circle as described above.

【0020】これに対し本実施例のように、電極板の位
置をA相圧電素子群の振動系とB相圧電素子群の振動系
と等価の位置である位相角度が45度ずれた共役な位置
に配置することにより、機械インピーダンスの差が生じ
なくなり、従ってモータ性能に何らの影響も及ぼさなく
なる。
On the other hand, as in the present embodiment, the positions of the electrode plates are conjugate with a phase angle shifted by 45 degrees, which is a position equivalent to the vibration system of the A-phase piezoelectric element group and the vibration system of the B-phase piezoelectric element group. Positioning eliminates differences in mechanical impedance and therefore has no effect on motor performance.

【0021】[0021]

【発明の効果】以上説明したように本発明によれば、圧
電素子等の電気−機械エネルギー変換素子に給電するた
めに介装されている給電部材は、その外部に突出した給
電用突出部を第1相駆動群と第2相駆動群との位相のず
れ略90度の中間である略45度位相の位置に位置させ
たので、第1相駆動群により励振される振動と第2相駆
動群により励振される振動に対する影響を略等しくする
ことができ、合成振動としての首振りのような振動を駆
動効率の良い真円に近づけることができる。
As described above, according to the present invention, power is supplied to an electro-mechanical energy conversion element such as a piezoelectric element .
The power supply member installed for
The power projecting portion is out of phase between the first phase drive group and the second phase drive group.
At a position of approximately 45 degrees, which is halfway between approximately 90 degrees.
Therefore, the vibration excited by the first phase drive group and the second phase drive
Make the effects on vibrations excited by the motion group approximately equal
Can be used to drive vibration such as swing as a synthetic vibration.
It is possible to approach a perfect circle with high dynamic efficiency.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明による振動子の一実施例を示す断面図。FIG. 1 is a sectional view showing an embodiment of a vibrator according to the present invention.

【図2】図1のA−A線に沿った断面図。FIG. 2 is a sectional view taken along the line AA of FIG. 1;

【図3】従来の振動子を示す縦断面図。FIG. 3 is a longitudinal sectional view showing a conventional vibrator.

【符号の説明】[Explanation of symbols]

1、2…金属ブロック 3〜6…圧電素子板 7〜10…電極板 7a〜10a…端子部 11…ボルト 12…ロータ 13…出力部材 14…ベアリング 1, 2, metal block 3-6, piezoelectric element plate 7-10, electrode plate 7a-10a, terminal portion 11, bolt 12, rotor 13, output member 14, bearing

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 介装される給電部材を介して供給される
電気信号に応答して振動を発生する電気−機械エネルギ
ー変換素子を積層配置し、複数層の電気−機械エネルギ
ー変換素子は第1相駆動群と、前記第1相駆動群とは
90度位相が異なる第2相駆動群とを有し、これら電気
−機械エネルギー変換素子および給電部材を挟持するよ
に配置された振動体とで一体化され、前記第1相駆動
群と前記第2相駆動群とにより励起される振動の合成に
より、首振りのような振動を生じさせる振動子におい
て、前記給電部材と外部の回路とを電気的に接続するために
設けられたものであって、前記給電部材の外部に突出し
た給電用突出部を、前記第1相駆動群と前記第2相駆動
群との位相ずれの中間である略45度位相の位置に位置
させた ことを特徴とする振動子。
1. An electro-mechanical energy conversion element that generates vibration in response to an electric signal supplied through an interposed power supply member is arranged in a stack, and a plurality of layers of the electro-mechanical energy conversion element are a first layer . The phase drive group and the first phase drive group are approximately
And a 90 ° phase different from the first two-phase drive unit, these electric - is integrated in the placement vibration member so as to hold the mechanical energy conversion element and a power supply member, the said first phase driving group In order to electrically connect the power supply member to an external circuit in a vibrator that generates vibration such as swinging by combining vibrations excited by the second phase drive group ,
Provided outside the power supply member.
The power supply protruding portion, the first phase drive group and the second phase drive
Located at a position of approximately 45 degrees phase, which is halfway between the group and
Vibrator, characterized in that is.
JP07316091A 1991-04-05 1991-04-05 Vibrator Expired - Fee Related JP3147917B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP07316091A JP3147917B2 (en) 1991-04-05 1991-04-05 Vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07316091A JP3147917B2 (en) 1991-04-05 1991-04-05 Vibrator

Publications (2)

Publication Number Publication Date
JPH04308486A JPH04308486A (en) 1992-10-30
JP3147917B2 true JP3147917B2 (en) 2001-03-19

Family

ID=13510143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP07316091A Expired - Fee Related JP3147917B2 (en) 1991-04-05 1991-04-05 Vibrator

Country Status (1)

Country Link
JP (1) JP3147917B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2565351Y2 (en) * 1993-02-23 1998-03-18 株式会社三協精機製作所 Magnetic disk drive

Also Published As

Publication number Publication date
JPH04308486A (en) 1992-10-30

Similar Documents

Publication Publication Date Title
US6072267A (en) Vibration wave motor
JP2714261B2 (en) Transducer and vibration device
US8410671B2 (en) Vibratory actuator
JPH08103089A (en) Vibration motor
US8299682B2 (en) Ultrasonic motor
US7638927B2 (en) Vibration actuator
JP3147917B2 (en) Vibrator
JPS61121777A (en) Piezoelectric supersonic motor
US7851972B2 (en) Vibration actuator
US6747397B2 (en) Stacked type electro-mechanical energy conversion element and vibration wave driving apparatus using the same
JP3441585B2 (en) Ultrasonic motor and method of driving ultrasonic motor
GB2196190A (en) Electrostriction motors
JPH05236767A (en) Oscillation motor
JPS62260567A (en) Oscillatory wave motor
JPH0538170A (en) Oscillation motor
JPS62201072A (en) Oscillatory wave motor
JPH0332377A (en) Ultrasonic motor
JPH04308485A (en) vibrator
JPH0538168A (en) Oscillation motor
JP2011160545A (en) Ultrasonic motor
JP2004274898A (en) Ultrasonic motor
JP2996494B2 (en) Vibration type motor device
JP4388273B2 (en) Ultrasonic motor and electronic device with ultrasonic motor
JP2601659B2 (en) Ultrasonic drive
JPH05328760A (en) Vibration motor

Legal Events

Date Code Title Description
FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090112

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090112

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100112

Year of fee payment: 9

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110112

Year of fee payment: 10

LAPS Cancellation because of no payment of annual fees