JP3154403B2 - Coating mold - Google Patents
Coating moldInfo
- Publication number
- JP3154403B2 JP3154403B2 JP33361697A JP33361697A JP3154403B2 JP 3154403 B2 JP3154403 B2 JP 3154403B2 JP 33361697 A JP33361697 A JP 33361697A JP 33361697 A JP33361697 A JP 33361697A JP 3154403 B2 JP3154403 B2 JP 3154403B2
- Authority
- JP
- Japan
- Prior art keywords
- coating
- mold
- base material
- film
- gpa
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
Landscapes
- Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Forging (AREA)
- Molds, Cores, And Manufacturing Methods Thereof (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Description
【0001】[0001]
【発明の属する技術分野】本発明は自動車部品や機械部
品等の鉄系部品あるいはアルミニウム合金部品を成形す
るのに最適な金型に関するもので、特に耐熱亀裂性と耐
酸化性とに優れた金型に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mold most suitable for molding iron-based parts or aluminum alloy parts such as automobile parts and machine parts, and more particularly to a mold excellent in heat crack resistance and oxidation resistance. It is about type.
【0002】[0002]
【従来の技術】温間あるいは熱間での鍛造に用いられる
鍛造型や鋳造に用いられる鋳型などの金型は、使用中に
受ける高温(一般的に500℃以上)のために、金型表
面の酸化による損傷や繰り返し熱応力による疲労亀裂が
発生し、ヒートチェックと呼ばれる「肌荒れ」現象が生
じる。このような肌荒れは加工数の増大に伴って進行
し、寸法精度の維持が困難になった時点で金型の寿命に
達するとされる。2. Description of the Related Art A mold such as a forging die used for warm or hot forging and a mold used for casting has a high surface temperature (generally 500 ° C. or higher) during use. Damage due to oxidation of the steel and fatigue cracks due to repeated thermal stress occur, resulting in a "skin roughening" phenomenon called heat check. It is said that such rough surface progresses with an increase in the number of processes, and reaches the life of the mold when it becomes difficult to maintain the dimensional accuracy.
【0003】このような金型の損傷を少しでも遅らせる
ために、現在、窒化処理(タフトライド処理、ガス窒化
処理、イオン窒化処理、浸硫窒化処理など)が幅広く用
いられている。窒化処理の特徴は、鋼の金型母材表面に
窒素を主成分ととする元素を拡散浸透させ、表面硬度の
増大、表面圧縮応力の導入などを図り、ヒートチェック
に対する金型表面の耐久性を向上させることにある。し
かし、窒化処理では金型表面の耐酸化性を向上させるこ
とをはできず、金型表面の酸化による損傷、即ち「金型
表面での酸化鉄の発生→酸化スケールの脱落→さらなる
酸化の進行」という現象を抑制することはできていな
い。[0003] In order to delay such damage to the mold even a little, nitriding treatment (tufftriding treatment, gas nitriding treatment, ion nitriding treatment, sulphonitriding treatment, etc.) is widely used at present. The feature of nitriding treatment is to diffuse and infiltrate the element mainly composed of nitrogen into the surface of the steel mold base material to increase the surface hardness, introduce surface compressive stress, etc., and make the mold surface durable against heat check. Is to improve. However, the oxidation resistance of the mold surface cannot be improved by the nitriding treatment, and damage due to oxidation of the mold surface, that is, "generation of iron oxide on the mold surface → falling off of oxide scale → further oxidation progression Has not been suppressed.
【0004】窒化処理以外の表面処理として広く使われ
ているのは、化学蒸着法(CVD法)あるいは物理蒸着
法(PVD法)による炭化チタン、窒化チタンあるいは
炭窒化チタンなどのセラミックス被膜の形成である。ま
た、TRD法あるいはTD法と呼ばれる熱反応・析出法
による炭化バナジウムなども用いられている。しかし、
これらの炭窒化チタン、炭化バナジウムなどは、それ自
身の耐酸化性が500〜600℃付近で失われ、金型表
面の酸化抑制には顕著な効果は得られていなかった。A widely used surface treatment other than nitriding is the formation of a ceramic film such as titanium carbide, titanium nitride or titanium carbonitride by chemical vapor deposition (CVD) or physical vapor deposition (PVD). is there. Further, vanadium carbide or the like by a thermal reaction / precipitation method called a TRD method or a TD method is also used. But,
These titanium carbonitrides, vanadium carbides, and the like lose their oxidation resistance at around 500 to 600 ° C., and no remarkable effect has been obtained in suppressing the oxidation of the mold surface.
【0005】これらの欠点を克服するために、窒化処理
などの表面硬化処理と、前記蒸着法などの被膜形成処理
とを組み合わせる方法が開示されている。In order to overcome these drawbacks, a method is disclosed in which a surface hardening treatment such as a nitriding treatment is combined with a film forming treatment such as the above-mentioned vapor deposition method.
【0006】(1) 特開昭62-103368 号公報では、金属基
材の表面に窒化物層を形成し、セラミックコーティング
層を被覆したセラミックコーティング金属を提案し、具
体的な被膜形成方法としてCVD法を開示している。(1) Japanese Patent Application Laid-Open No. 62-103368 proposes a ceramic coating metal in which a nitride layer is formed on the surface of a metal substrate and a ceramic coating layer is coated. Discloses the law.
【0007】(2) 特開平2-125861号公報では、イオン窒
化処理とイオンプレーティングを同一真空層内槽内で連
続して行い、金属の窒化物、炭化物、炭窒化物、炭窒酸
化物、酸化物等の膜を一層以上形成する方法を開示して
いる。(2) In Japanese Patent Application Laid-Open No. H2-125861, ion nitriding treatment and ion plating are performed continuously in the same vacuum layer inner tank, and metal nitride, carbide, carbonitride, carbonitride And a method of forming one or more films of oxide or the like.
【0008】(3) 特開平5-984422号公報では、真空容器
内で高周波電源を用いてプラズマを発生した窒素イオン
を被処理物に衝突させて硬化層を作り、そのまま直ちに
セラミックスコーティングする連続処理方法を開示して
いる。(3) Japanese Patent Application Laid-Open No. 5-984422 discloses a continuous process in which a high-frequency power source is used in a vacuum vessel to impinge on nitrogen ions that generate plasma to a workpiece to form a hardened layer and immediately perform ceramic coating as it is. A method is disclosed.
【0009】(4) 特開平8-35075 号公報では、金属部材
をアンモニアガスと水素ガスの雰囲気下でグロー放電し
てイオン窒化し、このイオン窒化層の上にPVD法によ
り硬質被膜を形成する方法を開示している。(4) In JP-A-8-35075, a metal member is ion-nitrided by glow discharge in an atmosphere of ammonia gas and hydrogen gas, and a hard coating is formed on the ion-nitrided layer by a PVD method. A method is disclosed.
【0010】[0010]
【発明が解決しようとする課題】しかし、これらの先行
技術はいずれも処理方法を単に開示しただけか材料系を
開示したに止まっている。特に、耐熱亀裂性と耐熱酸化
性とを同時に満足させる材料系と、その材料系が満足す
べき機械的特性の特徴を与えるものではなかった。However, all of these prior arts merely disclose a processing method or merely disclose a material system. In particular, a material system that simultaneously satisfies the heat crack resistance and the heat oxidation resistance, and the material system did not provide satisfactory characteristics of mechanical properties.
【0011】従って、本発明の主目的は、金型表面の耐
熱亀裂性と耐酸化性とを両立した被覆金型を提供するこ
とにある。Accordingly, a main object of the present invention is to provide a coated mold having both heat crack resistance and oxidation resistance of the mold surface.
【0012】[0012]
【課題を解決するための手段】本発明は、窒化処理によ
る金型母材表面部の硬化層形成と、耐酸化性に優れたセ
ラミックス被膜の形成とを組み合わせることで上記の目
的を達成したもので、この二つの表面改質技術の相乗効
果により長寿命の金型を実現する。The present invention has achieved the above object by combining the formation of a hardened layer on the surface of a mold base material by nitriding treatment and the formation of a ceramic film having excellent oxidation resistance. Thus, a long-life mold is realized by a synergistic effect of the two surface modification technologies.
【0013】すなわち、本発明金型は表面部に窒化処理
層を有する金型母材に次の〜より選ばれる1種以上
のセラミック被膜を具えたことを特徴とする。 (Ti1−x、Crx)Nの被膜(但しxは原子比で
あり、1.0≧x≧0.02) 化学式がTiNとTi2Nの少なくとも一方を含む窒
化チタン膜と、化学式がCrNとCr2Nの少なくとも
一方を含む窒化クロム層とを交互に5回以上積層した被
膜組成が異なる2種類以上の(Ti1−x、Crx)
Nの薄膜(但しxは原子比であり、1.0≧x≧0.0
2)が交互に4回以上積層した被膜特に、金型母材の表
面から深さ10μmにわたっての圧縮残留応力の平均値
を0.2GPa以上、1.5GPa以下とすると共に、
セラミックス被膜全体の圧縮残留応力の平均値を0.2
GPa以上、8GPa以下とすることが好ましい。[0013] Namely, the present invention molds the mold base material having a nitrided layer on the surface portion and wherein the kite comprising the following 1 or more ceramic coatings selected from ~. (Ti 1-x , Cr x ) N film (where x is an atomic ratio, 1.0 ≧ x ≧ 0.02) A titanium nitride film containing at least one of TiN and Ti 2 N, and a chemical formula CrN and Cr 2 N coating composition laminated alternately five times or more and a chromium nitride layer comprising at least one of two or more kinds of (Ti 1-x, Cr x )
N thin film (where x is an atomic ratio and 1.0 ≧ x ≧ 0.0
2) The coatings laminated alternately four or more times, especially the table of the mold base material
Average value of compressive residual stress over a depth of 10 μm from the surface
Is not less than 0.2 GPa and not more than 1.5 GPa,
The average value of the compressive residual stress of the entire ceramic coating is 0.2
It is preferable to be not less than GPa and not more than 8 GPa .
【0014】ここで、本発明の金型には温間または熱間
鍛造用の鍛造型や鋳造用の鋳型が含まれる。また、金型
母材はJIS鋼種SKHやSKDあるいはこれらの相当
材であるものが好ましい。Here, the mold of the present invention includes a forging die for warm or hot forging and a casting mold. Further, the mold base material is preferably JIS steel type SKH or SKD or a material equivalent to these.
【0015】金型母材表面への窒化処理としては、タフ
トライド処理、ガス窒化処理、イオン窒化処理など、多
数の窒化処理法が適用できる。ただし、多くの手法では
窒化処理後の金型材表面に、化合物層あるいは脆化層と
呼ばれる脆い化合物「γ′−Fe4 Nあるいはε−Fe
2-3 N」が発生するため、このような化合物層を研磨し
て除去することが望ましい。なお、イオン窒化処理を用
いれば、上述の化合物層を形成させることなく窒化処理
が実現できる。窒化処理層の厚みは、50μm以上、5
00μm以下であることが好ましい。金型母材の表面か
ら深さ10μmにわたっての窒化処理層の圧縮残留応力
の平均値は、窒化処理時の処理温度や窒化層の深さを最
適化することで、0.2GPa以上、1.5GPa以下
とできる。As the nitriding treatment on the surface of the mold base material, many nitriding treatment methods such as a tuftride treatment, a gas nitridation treatment and an ion nitridation treatment can be applied. However, in many methods, a brittle compound “γ′-Fe 4 N or ε-Fe” called a compound layer or an embrittlement layer is formed on the surface of the mold material after the nitriding treatment.
Since 2-3 N "is generated, it is desirable to remove such a compound layer by polishing. Note that when the ion nitriding treatment is used, the nitriding treatment can be realized without forming the above-described compound layer. The thickness of the nitrided layer is 50 μm or more,
It is preferably not more than 00 μm. The average value of the compressive residual stress of the nitrided layer over a depth of 10 μm from the surface of the mold base material is 0.2 GPa or more by optimizing the processing temperature during nitriding and the depth of the nitrided layer. It can be 5 GPa or less.
【0016】このような窒化処理層の上に形成されるセ
ラミックス被膜は耐酸化性に優れたものとする。耐酸化
性に優れたセラミックス被膜としては、窒化チタンにク
ロム元素を添加したものが挙げられる。窒化チタンにク
ロム元素を添加することで耐酸化性が大きく向上する。
クロムの添加量としては、被膜の組成を(Ti1-x 、C
rx )Nで表したときに(xは原子比)、1.0≧x≧
0.02であることが必要である。このときに、母材側
から被膜表面側へ向けて、(Ti1-x 、Crx)Nの被
膜の組成が連続的あるいは段階的にクロムリッチへと傾
斜していることが好ましい。このセラミックス被膜を、
化学式がTiNとTi2 Nの少なくとも一方からなる窒
化チタン層と化学式がCrNとCr2 Nの少なくとも一
方からなる窒化クロム層とを交互に5回以上積層した被
膜や、組成が異なる2種類以上の(Ti1-x 、Crx )
Nの薄膜(但しxは原子比であり、1.0≧x≧0.0
2)を交互に4回以上積層した被膜としても同等以上の
金型寿命を得ることができる。The ceramic film formed on such a nitriding layer has excellent oxidation resistance. Examples of the ceramic film having excellent oxidation resistance include a film obtained by adding a chromium element to titanium nitride. Oxidation resistance is greatly improved by adding chromium element to titanium nitride.
The amount of chromium added depends on the composition of the coating (Ti 1-x , C
r x ) N (x is the atomic ratio), 1.0 ≧ x ≧
It needs to be 0.02. At this time, it is preferable that the composition of the coating of (Ti 1-x , Cr x ) N be continuously or stepwise inclined toward chromium-rich from the base material side to the coating surface side. This ceramic coating
A film in which a titanium nitride layer having a chemical formula of at least one of TiN and Ti 2 N and a chromium nitride layer having a chemical formula of at least one of CrN and Cr 2 N are alternately laminated five times or more, or two or more types having different compositions. (Ti 1-x , Cr x )
N thin film (where x is an atomic ratio and 1.0 ≧ x ≧ 0.0
Even if a coating is obtained by alternately laminating 2) four or more times, equivalent or longer mold life can be obtained.
【0017】セラミックス被膜全体の圧縮残留応力の平
均値は、被膜形成時の条件を最適化することで0.5G
Pa以上、8GPa以下とできる。セラミックス被膜の
全体厚みは0.5μm以上、40μm以下が好ましい。
なお、セラミックス被膜のと金型母材との間に窒化チタ
ン膜を介在させればより好ましい。The average value of the compressive residual stress of the entire ceramic film is 0.5 G by optimizing the conditions at the time of film formation.
It can be set to Pa or more and 8 GPa or less. The total thickness of the ceramic coating is preferably 0.5 μm or more and 40 μm or less.
It is more preferable that a titanium nitride film is interposed between the ceramic film and the mold base material.
【0018】上記のように構成を限定した主な理由は次
の通りである。窒化処理は、耐熱亀裂性向上という優れ
た効果をもたらすとされているが、この処理法を単独で
用いたとしても、金型の寿命は鋼の持つ低い耐酸化性に
よってすぐに限界に達してしまう。窒化処理層には、適
切な圧縮残留応力が存在していることが必須である。The main reasons for limiting the configuration as described above are as follows. Nitriding treatment is said to have an excellent effect of improving heat crack resistance, but even if this treatment method is used alone, the life of the mold quickly reaches the limit due to the low oxidation resistance of steel. I will. It is essential that an appropriate compressive residual stress exists in the nitrided layer.
【0019】この残留応力とは、X線回折法(sin2
ψ法)で測定されるものであり、金型母材の表面から深
さ10μmにわたっての残留応力の平均値が0.2GP
a以上、1.5GPa以下の圧縮応力とする必要があ
る。圧縮残留応力が0.2GPaより小さい、あるいは
引張りの残留応力になっている場合は、熱亀裂の発生抑
制効果が得られず好ましくない。また、圧縮残留応力が
1.5GPaを越えると、逆に亀裂発生を促進してしま
うため好ましくない。The residual stress is defined by an X-ray diffraction method (sin 2
The average value of the residual stress over a depth of 10 μm from the surface of the mold base material is 0.2 GP.
It is necessary to set a compressive stress of not less than a and not more than 1.5 GPa. If the compressive residual stress is smaller than 0.2 GPa or the tensile residual stress is not preferable, the effect of suppressing the generation of thermal cracks cannot be obtained. On the other hand, when the compressive residual stress exceeds 1.5 GPa, it is not preferable because crack generation is promoted.
【0020】金型表面に形成されるセラミックス被膜
は、従来からあるセラミックスではなく、窒化チタンを
ベースとしたセラミックス被膜にクロム元素を添加する
ことで耐酸化性を向上させる。同時に被膜中には圧縮残
留応力が存在していることが必須であり、上に述べたX
線回折法で測定される。具体的には被膜全体の残留応力
の平均値が0.5GPa以上、8GPa以下の圧縮応力
であることが必須である。圧縮残留応力の平均値が0.
5GPaより小さい、あるいは引張りの残留応力になっ
ている場合は、熱亀裂発生抑制効果が不十分である。ま
た、圧縮残留応力が8GPaを越えると、逆に亀裂発生
を促進してしまうため好ましくない。The ceramic film formed on the surface of the mold is improved in oxidation resistance by adding a chromium element to a ceramic film based on titanium nitride instead of a conventional ceramic. At the same time, it is essential that a compressive residual stress exists in the coating, and the above-mentioned X
It is measured by the line diffraction method. Specifically, it is essential that the average value of the residual stress of the entire coating film is a compressive stress of 0.5 GPa or more and 8 GPa or less. The average value of the compressive residual stress is 0.
If the stress is less than 5 GPa or the tensile residual stress is obtained, the effect of suppressing the occurrence of thermal cracks is insufficient. On the other hand, if the compressive residual stress exceeds 8 GPa, it is not preferable because crack generation is accelerated.
【0021】金型表面部の窒化処理層の深さは、50μ
m以上、500μm以下であることが望ましい。50μ
m未満の処理では顕著な効果を得ることができない。ま
た、500μmを越える窒化処理層を得る処理にはかな
りの長時間を要するため、費用対効果の点で経済的では
ない。The depth of the nitrided layer on the surface of the mold is 50 μm.
It is desirable that it is not less than m and not more than 500 μm. 50μ
If the processing is less than m, a remarkable effect cannot be obtained. Further, since a process for obtaining a nitrided layer exceeding 500 μm requires a considerably long time, it is not economical in terms of cost effectiveness.
【0022】窒化チタンセラミックスにクロム元素を添
加することで、被膜の耐酸化性を向上させることができ
る理由は、被膜中のクロムが、金型の使用時の高温大気
雰囲気で酸化し、被膜表面に酸化クロムの強固な保護膜
を形成するためである。この様な緻密な酸化被膜は、窒
化チタン被膜の酸化の進行を大幅に抑制する効果を持っ
ており、金型表面の酸化摩耗を大きく抑制する。被膜の
組成としては(Ti1-x 、Crx )Nで表現したときに
(xは原子比)、1.0≧x≧0.02であることが好
ましい。組成xの上限は、物質の特性から1.0であ
る。組成xが0.02を下回ると、耐酸化性向上の効果
が得られない。The reason that the oxidation resistance of the coating can be improved by adding a chromium element to the titanium nitride ceramics is that chromium in the coating is oxidized in a high-temperature atmosphere at the time of using a mold, and the surface of the coating is oxidized. This is for forming a strong protective film of chromium oxide. Such a dense oxide film has the effect of greatly suppressing the progress of oxidation of the titanium nitride film, and greatly suppresses the oxidative wear of the mold surface. It is preferable that the composition of the coating film satisfies 1.0 ≧ x ≧ 0.02 when expressed as (Ti 1-x , Cr x ) N (x is an atomic ratio). The upper limit of the composition x is 1.0 from the characteristics of the substance. When the composition x is less than 0.02, the effect of improving the oxidation resistance cannot be obtained.
【0023】また、窒化チタンセラミックスへのクロム
の添加方法については、被覆厚み方向の組成を均一にす
るものの他、次のように工夫することで一層耐酸化性を
向上させることができる。Regarding the method of adding chromium to the titanium nitride ceramics, in addition to making the composition uniform in the coating thickness direction, the oxidation resistance can be further improved by devising as follows.
【0024】(A) 母材側をチタンリッチな(Ti1-x 、
Crx )Nの被膜とし、被膜表面側をクロムリッチな
(Ti1-x 、Crx )Nの被膜とすることで、被膜表面
側の耐酸化性を特に向上させておく。(A) The base material side is made of titanium rich (Ti 1-x ,
The oxidation resistance of the coating surface side is particularly improved by using a coating of Cr x ) N and a coating surface of the coating film of chromium-rich (Ti 1-x , Cr x ) N.
【0025】(B) 化学式TiNとTi2 Nの少なくとも
一方を含む窒化チタン膜と、化学式CrNとCr2 Nの
少なくとも一方を含む窒化クロム膜とを交互に4回以上
繰り返して積層した構造とすることで、一層が摩耗して
消失しても次の層が顔を出すことで効果が持続する。(B) A structure in which a titanium nitride film containing at least one of the chemical formulas TiN and Ti 2 N and a chromium nitride film containing at least one of the chemical formulas CrN and Cr 2 N are alternately repeated at least four times and laminated. Thus, even if one layer is worn away and disappears, the effect is maintained by the next layer showing a face.
【0026】(C) それぞれ組成の異なる2種類以上の
(Ti1-x 、Crx )Nの薄膜(但しxは原子比であ
り、1.0≧x≧0.02)を交互に4回以上繰り返し
て積層した構造とすることで、一層が磨耗して消失して
も次の層が顔を出すことで効果を持続させる。(C) Two or more (Ti 1-x , Cr x ) N thin films (where x is an atomic ratio and 1.0 ≧ x ≧ 0.02) having different compositions are alternately applied four times. By repeating the above-described structure, even if one layer is worn out and disappears, the effect is maintained by the next layer appearing.
【0027】セラミックス被膜の全体厚みとしては、
0.5μm以上、40μm以下であることが好ましい。
0.5μmを下回ると、被膜処理の効果が得られない。
また、40μmを越えると、使用時の衝撃によって被膜
が自己破壊するため、好ましくない。The total thickness of the ceramic film is as follows:
The thickness is preferably 0.5 μm or more and 40 μm or less.
When the thickness is less than 0.5 μm, the effect of the coating treatment cannot be obtained.
On the other hand, when the thickness exceeds 40 μm, the coating is self-destructed by an impact during use, which is not preferable.
【0028】なお、セラミックス被膜と母材との間に窒
化チタン膜を挿入することで、母材表面の窒化処理層と
上記セラミックス被膜との密着性を最大限に発揮させる
ことができて好ましい。It is preferable to insert a titanium nitride film between the ceramic film and the base material since the adhesion between the nitrided layer on the surface of the base material and the ceramic film can be maximized.
【0029】[0029]
【発明の実施の形態】以下本発明の実施の形態を説明す
る。 (試験例1)JIS鋼種SKD61からなるφ40×h
30mmの円筒形状のブロックを作り、焼き入れ、焼き
戻しによる熱処理を施して、ロックウェルCスケール硬
度を52とした。このブロックの端面を粗さ0.5Z以
下に研磨した。Embodiments of the present invention will be described below. (Test Example 1) φ40 × h made of JIS steel type SKD61
A 30 mm cylindrical block was made and heat treated by quenching and tempering to a Rockwell C scale hardness of 52. The end face of this block was polished to a roughness of 0.5Z or less.
【0030】このブロックの研磨面に、表1に示した本
発明に基づく表面処理を施した(実施例1〜16)。ま
た、比較のために、表2に示した比較例を作製した(比
較例1〜13)。The polished surface of this block was subjected to a surface treatment according to the present invention shown in Table 1 (Examples 1 to 16). For comparison, comparative examples shown in Table 2 were produced (Comparative Examples 1 to 13).
【0031】[0031]
【表1】 [Table 1]
【0032】[0032]
【表2】 [Table 2]
【0033】なお、表1,2において、窒化処理または
セラミックス被膜形成手法の詳細は次の通りである。 〔手法1〕タフトライド処理:温度550℃、時間30
分〜20時間、塩浴中で保持し、表面に深さ25〜45
0μmの硬化層を得た。この表面に生成した深さ10μ
mの化合物層を研磨除去し、表面粗さを0.5Zとし
た。なお、タフトライド処理の温度を変えて、硬化層表
面の残留応力を変化させたものも用意した。In Tables 1 and 2, details of the nitriding treatment or the method of forming the ceramic film are as follows. [Method 1] Tuftride treatment: temperature 550 ° C., time 30
Keep in salt bath for 20 minutes to 20 minutes, 25-45 depth on surface
A cured layer of 0 μm was obtained. 10μ depth generated on this surface
The compound layer of m was polished and removed to have a surface roughness of 0.5Z. In addition, what changed the residual stress of the hardened layer surface by changing the temperature of the tufted-ride process was also prepared.
【0034】〔手法2〕イオン窒化処理:温度500
℃、時間15分〜2時間、窒素ガス60流量%、水素ガ
ス40流量%、処理槽内圧力2Torr、母材に印加し
た直流電圧−100V、同高周波電力(13.56MH
z)1000Wの条件で、表面に15〜120μm(比
較例も含む)の硬化層を得た。この表面には有害な化合
物層は生成しなかったが、プラズマ処理によって荒らさ
れた表面を軽くラッピングし、粗さ0.5Zの表面を得
た。なお、イオン窒化処理の温度を変えて、硬化層表面
の圧縮残留応力を変化させたものも用意した。[Method 2] Ion nitriding treatment: temperature 500
° C, time 15 minutes to 2 hours, nitrogen gas 60 flow%, hydrogen gas 40 flow%, processing tank pressure 2 Torr, DC voltage -100 V applied to the base material, high frequency power (13.56 MH)
z) Under the condition of 1000 W, a cured layer of 15 to 120 μm (including comparative examples) was obtained on the surface. No harmful compound layer was formed on this surface, but the surface roughened by the plasma treatment was lightly lapped to obtain a surface having a roughness of 0.5Z. In addition, what changed the compression residual stress of the hardened layer surface by changing the temperature of the ion nitriding process was also prepared.
【0035】〔手法3〕(Ti1-x 、Crx )N被膜形
成:まず、アークイオンプレーティング法により下地T
iNを約0.5μm形成し、この膜形成に連続して同法
により厚み3.1μmでx=0.03の(Ti1-x 、C
rx )N被膜を形成した。(Ti1-x 、Crx )N被膜
の形成条件は、蒸発源:目標とする組成xで決まるチタ
ン−クロム合金(Cr組成は100×x原子%)、アー
ク電流100A、母材温度450℃、窒素雰囲気中、真
空槽内圧力30mTorr、母材に印加した直流電流電
圧−200V、処理時間30分である。その結果、被膜
の全体厚みは3.6μmとなった。同様にして処理時間
を変えて、全体の厚みの異なる(Ti1-x 、Crx )N
被膜を形成した。また、蒸発源の金属組成を変えて、x
=0.03,0.3および0.7の(Ti1-x 、Cr
x )N被膜を形成した。さらに、母材温度を変化させ
て、被膜中の残留応力を変化させたものも用意した。[Procedure 3] Formation of (Ti 1-x , Cr x ) N coating: First, the base T was formed by arc ion plating.
iN is formed to a thickness of about 0.5 μm, and subsequently to this film formation, (Ti 1−x , C
r x ) N coating was formed. The conditions for forming the (Ti 1-x , Cr x ) N coating are as follows: evaporation source: titanium-chromium alloy (Cr composition is 100 × atomic%) determined by target composition x, arc current 100 A, base material temperature 450 ° C. In a nitrogen atmosphere, the pressure in the vacuum chamber is 30 mTorr, the DC current voltage applied to the base material is -200 V, and the processing time is 30 minutes. As a result, the overall thickness of the coating was 3.6 μm. Similarly, by changing the processing time, (Ti 1-x , Cr x ) N
A coating was formed. Also, by changing the metal composition of the evaporation source, x
= 0.03, 0.3 and 0.7 (Ti 1-x , Cr
x ) An N film was formed. Further, a material in which the residual stress in the coating was changed by changing the temperature of the base material was also prepared.
【0036】〔手法4〕TiN/CrN被膜形成:純チ
タン(不可避不純物を0.5重量%以下含む)あるいは
純クロム(不可避不純物を0.5重量%以下含む)のそ
れぞれで作製された蒸発源を各1個ずつ用いて、これら
二つの蒸発源を真空槽内壁に対向するように配置した。
二つの蒸発源の中心に回転テーブルを配置し、そこに母
材を取り付けた。アークイオンプレーティング法を用い
て、それぞれの蒸発源のアーク電流100A、母材温度
450℃、窒素雰囲気中、真空槽内圧力30mTor
r、母材に印加した直流電圧−200V、テーブルの回
転数0.3rpm、処理時間20分の条件で、厚み2μ
mのTiN/CrN被膜を形成した。積層の繰り返し回
数は6回であった。また、テーブルの回転数を変えて積
層の繰り返し回数が25回,500回の実施例と同回数
が4回,500回の比較例を作製した。さらに、母材温
度を変化させて、被膜中の残留応力を変化させたものも
用意した。[Method 4] Formation of TiN / CrN coating: Evaporation source made of pure titanium (containing 0.5% by weight or less of unavoidable impurities) or pure chromium (containing 0.5% by weight or less of unavoidable impurities) , And these two evaporation sources were arranged so as to face the inner wall of the vacuum chamber.
A rotary table was placed at the center of the two evaporation sources, and the base material was attached thereto. Using an arc ion plating method, the arc current of each evaporation source is 100 A, the base material temperature is 450 ° C., the atmosphere is nitrogen, the pressure in the vacuum chamber is 30 mTorr.
r, DC voltage applied to the base material -200 V, table rotation speed 0.3 rpm, processing time 20 minutes, thickness 2μ
m of TiN / CrN coating was formed. Repetitive returns the number of laminated was 6 times. In addition, a comparative example in which the number of laminations was changed 25 times and 500 times and the same number of times was 4 times and 500 times was produced by changing the number of rotations of the table. Further, a material in which the residual stress in the coating was changed by changing the temperature of the base material was also prepared.
【0037】〔手法5〕(Ti1-x 、Crx )N/(T
i1-x ′、Crx ′)N被膜形成:手法4に準ずる方法
で、組成の異なるチタン−クロム合金を一つずつ作製
し、真空槽内壁に対向させて設置した。テーブルの回転
数は0.3rpmとした。その他の条件は手法4と同様
であり、処理時間20分で厚み2μmの(Ti1-x 、C
rx )N/(Ti1-x ′、Crx ′)N被膜を形成し
た。積層の繰り返し回数は6回であった。また、テーブ
ルの回転数を変えて積層の繰り返し回数を10回,80
回とした実施例と、テーブル回転数を0.15rpmと
し、積層の繰り返し回数を3回とした比較例も作製し
た。さらに、母材温度を変化させて、被膜中の残留応力
を変化させたものも用意した。[Method 5] (Ti 1-x , Cr x ) N / (T
i 1-x ′, Cr x ′) N film formation: Titanium-chromium alloys having different compositions were prepared one by one according to the method 4 and placed facing the inner wall of the vacuum chamber. The rotation speed of the table was 0.3 rpm. The other conditions are the same as those of the method 4. A processing time of 20 minutes and a thickness of 2 μm (Ti 1 -x , C
(r x ) N / (Ti 1-x ′, Cr x ′) N coating was formed. The number of times of lamination was 6 times. Further, the number of times of lamination is changed to 10, 80
Examples were also made, and a comparative example was made in which the number of table rotations was 0.15 rpm and the number of laminations was three. Further, a material in which the residual stress in the coating was changed by changing the temperature of the base material was also prepared.
【0038】〔手法6〕(Ti1-x 、Crx )N→(T
i1-x ′、Crx ′)N傾斜組成被膜形成:アークイオ
ンプレーティング法により、目標とする組成x、x′で
決まるチタン−クロム合金(Cr組成は100×x原子
%、100×x′原子%)で作製された蒸発源を距離3
00mmの間隔を開けて2基平行に配置し、アーク電流
100A、母材温度450℃、窒素雰囲気中、真空槽内
圧力30mTorr、母材に印加した直流電圧−200
V、処理時間60分の条件で、母材を二つの蒸発源の間
をゆっくりと平行移動させることで、厚み2μmの(T
i1-x 、Crx)N→(Ti1-x ′、Crx ′)N傾斜
組成被膜を形成した。ここではx=0.03,x′=
0.7とした。また、母材温度を変化させて、被膜中の
残留応力を変化させたものも用意した。[Method 6] (Ti 1-x , Cr x ) N → (T
i 1-x ′, Cr x ′) N Gradient composition film formation: Titanium-chromium alloy (Cr composition is 100 × atomic%, 100 × x) determined by the target compositions x and x ′ by arc ion plating. (Atomic%) with a distance of 3
Two units were arranged in parallel with an interval of 00 mm, arc current 100 A, base material temperature 450 ° C., nitrogen atmosphere, vacuum chamber pressure 30 mTorr, DC voltage −200 applied to the base material.
V and a processing time of 60 minutes, the base material was slowly translated in parallel between the two evaporation sources to obtain a (T
i 1-x , Cr x ) N → (Ti 1-x ′, Cr x ′) N Graded composition coating was formed. Here, x = 0.03, x '=
0.7. In addition, a material in which the residual stress in the coating was changed by changing the temperature of the base material was also prepared.
【0039】〔手法7〕TiN被膜形成:手法3に準ず
る方法で、チタンで作製された蒸発源を用い、処理時間
を変えて厚さの異なるTiN被膜を形成した。[Method 7] Formation of TiN film: A method similar to Method 3 was used to form TiN films having different thicknesses by changing the treatment time using an evaporation source made of titanium.
【0040】また、金型の金属表面近傍および被膜の残
留応力の測定は、sin2 ψ法によるX線回折法を用い
て実施した。そして、これらの実施例および比較例につ
いて、表面処理面全面に、600℃大気中加熱(60
秒)〜水中急冷(60秒)の繰り返し熱負荷を作用させ
た。この熱サイクルを100回単位で作用させた後の処
理面の損傷を光学顕微鏡にて観察した。試験結果も併せ
て表1,2に示す。The measurement of the residual stress in the vicinity of the metal surface of the mold and in the coating was carried out by the X-ray diffraction method based on the sin 2 ψ method. Then, for these examples and comparative examples, the entire surface treated surface was heated in air at 600 ° C. (60 ° C.).
Second) to underwater quenching (60 seconds). The damage of the treated surface was observed with an optical microscope after the thermal cycle was applied in units of 100 times. The test results are also shown in Tables 1 and 2.
【0041】表1,2から明らかなように、実施例では
熱亀裂の発生が大幅に抑制されていることが確認され
た。As is clear from Tables 1 and 2, it was confirmed in the examples that the generation of thermal cracks was significantly suppressed.
【0042】(試験例2)試験例1における実施例4、
6、10、15と比較例5、6、10、13を、温間鍛
造用の金型パンチ(JIS鋼種SKH51、ロックウェ
ルCスケール硬度53)に処理し、実際に温間鍛造時の
金型寿命評価を行った。鍛造時には、金型表面は700
℃まで加熱されていた。寿命の判定は、被加工材の寸法
精度が規定の範囲を越えた時点とした。寿命評価結果を
表3に示す。各実施例では金型の寿命が大きく向上して
いることが確認された。Test Example 2 Example 4 in Test Example 1
6, 10 and 15 and Comparative Examples 5, 6, 10 and 13 were processed into warm forging die punches (JIS steel type SKH51, Rockwell C scale hardness 53), and the die was actually subjected to warm forging. The life was evaluated. During forging, the mold surface is 700
℃. The life was determined when the dimensional accuracy of the workpiece exceeded a specified range. Table 3 shows the life evaluation results. In each example, it was confirmed that the life of the mold was greatly improved.
【0043】[0043]
【表3】 [Table 3]
【0044】(試験例3)試験例2における実施例4、
6、10、15と比較例5、6、10、13を、アルミ
ニウム合金鋳造用の鋳抜きピン(JIS鋼種SKD6
1、ロックウェルCスケール硬度51)に処理し、実際
にアルミニウム合金の鋳造時の鋳抜きピンの寿命評価を
行った。鋳造方法は重力鋳造とし、鋳抜きピン表面は6
70℃まで加熱されていた。寿命の判定は、被加工材の
寸法精度が規定の範囲を越えた時点とした。寿命評価結
果を表4に示す。本発明品では鋳抜きピンの寿命が大き
く向上していることが確認された。Test Example 3 Example 4 in Test Example 2
6, 10 and 15 and Comparative Examples 5, 6, 10 and 13 were prepared by using an assembling pin (JIS steel type SKD6) for casting aluminum alloy.
1. Processed to a Rockwell C scale hardness of 51), and the life of the cast pin was actually evaluated at the time of casting an aluminum alloy. The casting method is gravity casting, and the surface of the blanking pin is 6
It had been heated to 70 ° C. The life was determined when the dimensional accuracy of the workpiece exceeded a specified range. Table 4 shows the life evaluation results. It was confirmed that the life of the cast pin was greatly improved in the product of the present invention.
【0045】[0045]
【表4】 [Table 4]
【0046】[0046]
【発明の効果】以上説明したように、本発明によれば耐
熱亀裂性と耐酸化性を両立でき、従来技術では達成困難
であった高温雰囲気下で用いられる鍛造型や鋳型などの
金型の寿命向上が達成できる。特に、自動車部品や機械
部品等の鉄系部品の鍛造型またはアルミニウム合金部品
の鋳造型としての利用が期待される。As described above, according to the present invention, it is possible to achieve both heat crack resistance and oxidation resistance, and it is difficult to achieve a mold such as a forging die or a mold used in a high temperature atmosphere, which was difficult to achieve with the prior art. Life extension can be achieved. In particular, it is expected to be used as a forging die of an iron-based part such as an automobile part or a machine part or a casting die of an aluminum alloy part.
Claims (7)
た窒化処理層を有し、この窒化処理層の上にセラミック
ス被膜を形成した被覆金型であって、 このセラミックス被膜は次の〜より選ばれるいずれ
かより構成されることを特徴とする被覆金型。 (Ti1−x、Crx)Nの被膜(但しxは原子比で
あり、1.0≧x≧0.02) 化学式がTiNとTi2Nの少なくとも一方を含む窒
化チタン膜と、化学式がCrNとCr2Nの少なくとも
一方を含む窒化クロム層とを交互に5回以上積層した被
膜 組成が異なる2種類以上の(Ti1−x、Crx)N
の薄膜(但しxは原子比であり、1.0≧x≧0.0
2)が交互に4回以上積層した被膜1. A coating mold having a nitriding layer in which nitrogen is diffused and infiltrated on the surface of a mold base material, and a ceramic film formed on the nitriding layer. Any of
Coating mold, characterized in that the Kayori configuration. (Ti 1-x , Cr x ) N film (where x is an atomic ratio, 1.0 ≧ x ≧ 0.02) A titanium nitride film containing at least one of TiN and Ti 2 N, and a chemical formula CrN, Cr 2 coating composition laminated alternately five times or more and a chromium nitride layer containing at least one of N different 2 or more of (Ti 1-x, Cr x ) N
(Where x is an atomic ratio and 1.0 ≧ x ≧ 0.0
2) alternately laminated 4 or more times
わたっての圧縮残留応力の平均値が0.2GPa以上、
1.5GPa以下で、 前記セラミックス被膜全体の圧縮残留応力の平均値が
0.2GPa以上、8GPa以下であることを特徴とす
る請求項1記載の被覆金型。 2. A depth of 10 μm from the surface of the mold base material.
Average compressive residual stress over 0.2 GPa,
1.5 GPa or less, the average value of the compressive residual stress of the entire ceramic coating is
0.2 GPa or more and 8 GPa or less
2. The coating mold according to claim 1, wherein:
x)Nの被膜で(但しxは原子比であり、1.0≧x≧
0.02)、 この被膜のCrの組成が母材側から被膜表面へ向けて増
大した傾斜組成であることを特徴とする請求項1または
2記載の被覆金型。3. A ceramic coating comprising (Ti 1-x , Cr
x ) N (where x is the atomic ratio, 1.0 ≧ x ≧
0.02), according to claim 1 or, wherein the composition of Cr in the coating is a gradient composition that increases toward the base material side to the coating surface
2. The coating mold according to 2 .
にTiNの被膜を介在したことを特徴とする請求項1〜
3のいずれかに記載の被覆金型。4. A TiN film is interposed between a surface of a mold base material and a ceramic film.
3. The coating mold according to any one of 3 .
0μm以下であることを特徴とする請求項1〜4のいず
れかに記載の被覆金型。5. The method according to claim 1, wherein the thickness of the nitrided layer is at least 50 μm.
The coating mold according to any one of claims 1 to 4 , wherein the thickness is 0 µm or less.
上、40μm以下であることを特徴とする請求項1〜5
のいずれかに記載の被覆金型。6. A thickness of the ceramic film is 0.5μm or more, according to claim 1 to 5, characterized in that at 40μm or less
The coated mold according to any one of the above.
間鍛造用あるいはアルミニウム合金の鋳造用であること
を特徴とする請求項1〜6のいずれかに記載の被覆金
型。7. A mold applications, the coating die according to any one of claims 1 to 6, characterized in that the casting of warm or hot forging or aluminum alloy ferrous component.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33361697A JP3154403B2 (en) | 1997-11-17 | 1997-11-17 | Coating mold |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33361697A JP3154403B2 (en) | 1997-11-17 | 1997-11-17 | Coating mold |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11152583A JPH11152583A (en) | 1999-06-08 |
| JP3154403B2 true JP3154403B2 (en) | 2001-04-09 |
Family
ID=18268052
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33361697A Expired - Fee Related JP3154403B2 (en) | 1997-11-17 | 1997-11-17 | Coating mold |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3154403B2 (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1245699B1 (en) | 2001-03-30 | 2011-05-11 | Hitachi Metals, Ltd. | Coated tool for warm and/or hot working |
| JP3857213B2 (en) | 2002-10-30 | 2006-12-13 | 本田技研工業株式会社 | Mold for casting and surface treatment method thereof |
| JP5225596B2 (en) * | 2007-03-15 | 2013-07-03 | 株式会社不二Wpc | Method for strengthening alloy steel for hot mold and alloy steel for hot mold formed by suppressing generation of thermal fatigue crack by the method |
| IL182741A (en) | 2007-04-23 | 2012-03-29 | Iscar Ltd | Coatings |
| JP5027760B2 (en) * | 2008-08-20 | 2012-09-19 | 株式会社神戸製鋼所 | Hard film forming member |
| CN102719796A (en) * | 2011-03-30 | 2012-10-10 | 深圳富泰宏精密工业有限公司 | Coated part with hard coating and preparation method thereof |
| WO2017204286A1 (en) * | 2016-05-26 | 2017-11-30 | 日立金属株式会社 | HOT DIE Ni-BASED ALLOY, HOT FORGING DIE USING SAME, AND FORGED PRODUCT MANUFACTURING METHOD |
| CN116145082A (en) * | 2023-03-01 | 2023-05-23 | 纳狮新材料有限公司杭州分公司 | Surface Cleaning Method and Surface Structure Preparation of Slot Coating Mold |
-
1997
- 1997-11-17 JP JP33361697A patent/JP3154403B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH11152583A (en) | 1999-06-08 |
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