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JP3155067B2 - Powder spraying device and spraying method - Google Patents
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JP3155067B2 - Powder spraying device and spraying method - Google Patents

Powder spraying device and spraying method

Info

Publication number
JP3155067B2
JP3155067B2 JP16625892A JP16625892A JP3155067B2 JP 3155067 B2 JP3155067 B2 JP 3155067B2 JP 16625892 A JP16625892 A JP 16625892A JP 16625892 A JP16625892 A JP 16625892A JP 3155067 B2 JP3155067 B2 JP 3155067B2
Authority
JP
Japan
Prior art keywords
powder
substrate
nozzle
spraying
spray nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP16625892A
Other languages
Japanese (ja)
Other versions
JPH063679A (en
Inventor
博 村田
君夫 宮川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nisshin Seifun Group Inc
Original Assignee
Nisshin Seifun Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nisshin Seifun Group Inc filed Critical Nisshin Seifun Group Inc
Priority to JP16625892A priority Critical patent/JP3155067B2/en
Priority to US07/969,365 priority patent/US5332133A/en
Publication of JPH063679A publication Critical patent/JPH063679A/en
Priority to US08/214,300 priority patent/US5614254A/en
Priority to US08/516,487 priority patent/US5660633A/en
Application granted granted Critical
Publication of JP3155067B2 publication Critical patent/JP3155067B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は粉体散布装置に関し、例
えば、液晶を用いた電気光学素子、特に液晶表示パネル
を構成する2枚の透明基板の間に数μm〜10μm程度
の微粒粉体をスペーサとして介挿させるために用いられ
る粉体の散布装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a powder dispersing apparatus, for example, an electro-optical device using a liquid crystal, in particular, a fine powder of about several .mu.m to 10 .mu.m between two transparent substrates forming a liquid crystal display panel. The present invention relates to an apparatus for dispersing powder used for interposing as a spacer.

【0002】[0002]

【従来技術】本発明の対象となる従来技術を、液晶表示
パネルを製造する場合を例として説明する。
2. Description of the Related Art The prior art to which the present invention is applied will be described by taking as an example the case of manufacturing a liquid crystal display panel.

【0003】液晶表示パネルは、中間に液晶を充填した
2枚の透明基板の適当な部分に選択的に電界を与えて、
特定の図形や文字等の情報を表示する液晶表示装置のパ
ネル部分をなすものであり、2枚の透明基板の間に均一
な隙間を保つためこれらの間にスペーサとして微粒粉体
を介挿する必要がある。そして従来一般には、このスペ
ーサの介挿方法として、基板の上に分散状態の微粒粉体
をノズルから散布する方法が採用されている(例えば特
開昭64−76031号等)。
A liquid crystal display panel selectively applies an electric field to appropriate portions of two transparent substrates filled with liquid crystal in the middle,
It forms a panel portion of a liquid crystal display device that displays information such as specific figures and characters, and fine particles are interposed between two transparent substrates as spacers to keep a uniform gap between them. There is a need. Conventionally, as a method of inserting the spacer, a method of spraying fine powder in a dispersed state on a substrate from a nozzle has been adopted (for example, Japanese Patent Application Laid-Open No. 64-76031).

【0004】ところで、上記のスペーサに用いられる微
粒粉体は、数μm〜10μm程度の極めて粒径の小さな
ものであるが、液晶表示パネルの性能に直接影響するた
め、使用する粉体の材質,粒径の均一性等についての種
々の要求を満足すること、散布する粉体が凝集して二次
粒子化していると基板間隔を均一に保てないため十分分
散されていることなどが工業的実施において課題とされ
ているが、これらと共に、十分に分散された粉体が、粉
体散布領域において偏在することなく、全体的にも部分
的にも平均して存在するように散布されることが望まれ
ている。
The fine powder used for the spacer has an extremely small particle size of about several μm to 10 μm, but directly affects the performance of the liquid crystal display panel. Industrial requirements include satisfying various requirements for particle size uniformity, etc., and the fact that the powder to be sprayed is agglomerated and formed into secondary particles so that the spacing between substrates cannot be kept uniform and is sufficiently dispersed. Although it is a problem in practice, together with these, the well-dispersed powder is sprayed so as not to be unevenly distributed in the powder spraying area, but to be present in whole and in part on average. Is desired.

【0005】このような平均的散布の要求は、一例的に
言えば、例えば1mm2 当たり30〜200個程度の範
囲内で設定される特定の設計個数に対して数個ないし1
0数個程度以下のバラツキしか許されない厳しいもので
あり、製品検査の結果その要求を満足できないものは不
良品とされて製品の歩留まりを低下させることからも理
解される。
[0005] request for such average spraying, to not a few for the particular design number that is set in one For example speaking, within the range of, for example 1 mm 30 to 200 or so per 2 1
It is also understood from the fact that a variation of about 0 or less is allowed, and a product that cannot satisfy the requirements as a result of product inspection is regarded as a defective product and lowers the product yield.

【0006】このため、従来の粉体散布法においては、
広範囲に粉体を均一に散布できるように基板から散布ノ
ズルを十分に離して散布することが行なわれていた。
For this reason, in the conventional powder spraying method,
Spraying has been performed with the spray nozzle sufficiently separated from the substrate so that the powder can be uniformly spread over a wide range.

【0007】しかし、この方式では装置が大型化し、ま
た散布に時間がかかるという問題があり、液晶表示パネ
ルの大型化が進んでいる近時においてはこの傾向はます
ます顕著になるため改善が望まれている。
However, this method has a problem that the apparatus becomes large and it takes a long time to spray the liquid crystal. This tendency becomes more and more remarkable in recent years when the size of the liquid crystal display panel is increasing. It is rare.

【0008】そこで例えば上記の特開昭64−7603
1号では、散布ノズルを固定でなく、円形に回転させる
ことによって散布領域を拡大させるという提案がされて
いる。
Accordingly, for example, Japanese Patent Application Laid-Open No.
No. 1 proposes that the spray area is enlarged by rotating the spray nozzle not in a fixed manner but in a circular shape.

【0009】[0009]

【発明が解決しようとする課題】本発明は、上記の提案
と同様の目的である散布装置の小型化を実現することと
共に、更に、この目的とは別に、上述のように材質,粒
度の均一性等々の要求を満足するために極めて高価とな
っている粉体の使用量を削減してコストの低廉化を図
り、また資源を有効に利用するという目的をも同時に満
足できる方法につき鋭意研究を重ねた。
SUMMARY OF THE INVENTION The present invention not only achieves the same object as the above-mentioned proposal, but also achieves a reduction in the size of the spraying apparatus. In order to satisfy the demands of properties, etc., the amount of powder that is extremely expensive is reduced and the cost is reduced, and earnest research is conducted on methods that can simultaneously satisfy the purpose of effectively using resources. Stacked.

【0010】[0010]

【課題を解決するための手段及び作用】上記特許請求の
範囲の各請求項に記載した本発明は、上記のような目的
を達成するためになされたものである。
The present invention described in each of the claims set forth above has been made to achieve the above object.

【0011】本発明の特徴の一つは、例えば代表的に液
晶表示パネルを構成する透明基板として例示される基板
上面に対して、上方から微粒粉体を散布する散布ノズル
と、この散布ノズルと上記基板を水平2軸のx,y各方
向に相対移動させる移動機構とを備えていて、この移動
機構は、上記散布ノズルの延長線が基板上にジグザグ状
の走査軌跡を描くように、これらの散布ノズル又は基板
の少なくともいずれか一方を移動させる手段からなる粉
体散布装置にある。
One of the features of the present invention is that, for example, a spray nozzle for spraying fine powder from above onto a substrate upper surface typically exemplified as a transparent substrate constituting a liquid crystal display panel, And a moving mechanism for relatively moving the substrate in each of the two horizontal x and y directions. The moving mechanism is configured to move the spray nozzle so that an extended line of the spray nozzle draws a zigzag scanning trajectory on the substrate. And a means for moving at least one of the spray nozzle and the substrate.

【0012】上記の散布ノズルと基板を相対移動させる
ための移動機構は、特に限定されるものではないが、例
えば、カム機構によって、散布ノズルを基板に対して水
平2軸のx,y各方向に首振りさせるノズル首振り装置
としたものを例示できる他、基板をx方向に移動させる
コンベア等の第1の移動手段と、散布ノズルをy方向に
往復動させる第2の移動手段(例えば一方向にノズルを
往復動させるノズル首振り手段)を組合せた形式のもの
を例示することができる。この後者の形式の装置によれ
ば、多数の基板をコンベア等で連続的に搬送させながら
粉体を散布する連続処理装置を構成することが可能であ
る。
The moving mechanism for moving the spray nozzle and the substrate relative to each other is not particularly limited. For example, a cam mechanism is used to move the spray nozzle relative to the substrate in two horizontal x and y directions. In addition to a nozzle oscillating device for oscillating the nozzle, a first moving unit such as a conveyor for moving the substrate in the x direction and a second moving unit (for example, one Nozzle swing means for reciprocating the nozzle in the direction). According to the latter type of apparatus, it is possible to configure a continuous processing apparatus for spraying powder while continuously transporting a large number of substrates on a conveyor or the like.

【0013】上記の粉体散布ノズルの延長線が基板状で
描く軌跡が「ジグザグ状」とは、散布領域を重複させな
いで均一散布を実現するという観点からは、図9に示す
ように基板上でノズル延長線の軌跡を矩形に描かせるこ
とが、均一散布と散布粉体量の少量化のために理想的と
も言えようが、実際には、のこ歯型のジグザグ状の軌跡
を描いた場合と大きな差はなく、散布ノズルが後者のの
こ歯型の軌跡を描くことで本発明の目的は十分に達成で
き、またノズルの首振り機構も簡単なものとできる。こ
の場合、のこ歯型の軌跡に沿って両側にある程度の幅を
もって与えられる帯状の粉体散布域は、単位面積あたり
の散布個数のバラツキ範囲の要求課題を満足することを
条件として、部分的に重複させることができる。
The trajectory drawn by the extended line of the powder spraying nozzle in the form of a substrate in a “zigzag shape” means that, as shown in FIG. Drawing a trajectory of the nozzle extension line in a rectangle could be said to be ideal for uniform spraying and minimizing the amount of scattered powder, but in fact, a sawtooth-shaped zigzag trajectory was drawn. There is no great difference from the case, and the object of the present invention can be sufficiently achieved by the spray nozzle drawing the latter sawtooth-shaped trajectory, and the nozzle swinging mechanism can be simplified. In this case, the band-shaped powder spraying area provided with a certain width on both sides along the sawtooth-shaped trajectory is partially provided that the required range of the number of sprays per unit area is satisfied. Can be duplicated.

【0014】粉体散布は、基板上の散布対象(必要)領
域内に粉体を必要十分に散布できる範囲に限定すること
が、散布粉体量の少量化のために望ましい。
In order to reduce the amount of powder to be sprayed, it is desirable to limit the amount of powder to be sprayed in a range where the powder can be sprayed as necessary and sufficiently in the area to be sprayed (necessary) on the substrate.

【0015】本発明によれば、従来提案の散布ノズルを
円形に回転させる形式の装置に比べて、同程度の散布精
度を満足する設計仕様において基板とノズルの距離を1
/2以下に縮小できる。
According to the present invention, the distance between the substrate and the nozzle is set to 1 in a design specification satisfying the same level of spraying accuracy as compared with the conventionally proposed apparatus in which the spraying nozzle is rotated in a circular shape.
/ 2 or less.

【0016】また、散布対象領域の外側に生ずる粉体散
布域の面積が大幅に小さくなり、面積比の比較からも、
粉体使用量を数10%も削減できる。
Further, the area of the powder spraying area generated outside the area to be sprayed is greatly reduced, and from the comparison of the area ratios,
The amount of powder used can be reduced by several tens of percent.

【0017】本発明は、微粒粉体を出来るだけ一次粒子
に分散した状態で供給できる粉体供給装置(例えば特願
平3−287879号記載の装置)と組み合わせて使用
されることが望ましい。
The present invention is desirably used in combination with a powder supply apparatus (for example, an apparatus described in Japanese Patent Application No. 3-287879) capable of supplying finely divided powder as much as possible into primary particles.

【0018】このような装置によれば、粉体供給装置か
らノズルまでの粉体の(輸送)の間に分散が十分に行な
われるという利点がある。すなわち、上記粉体供給装置
により、流通する空気に粉体を定量供給することと、こ
の粉体供給装置からノズルまでの細管内を粉体を含んだ
空気が高速で輸送されることにより、該細管内で分散が
一層促進されるからである。
According to such an apparatus, there is an advantage that the dispersion is sufficiently performed during (transportation) of the powder from the powder supply apparatus to the nozzle. That is, the powder supply device supplies a constant amount of powder to the flowing air, and the air containing the powder is transported at high speed through the narrow tube from the powder supply device to the nozzle. This is because dispersion is further promoted in the thin tube.

【0019】本発明の粉体散布装置は、種々の粉体散布
の用途に用いることができるが、特には、液晶を用いた
電気光学素子の基板の間にスペーサとしての粉体を介挿
させる用途において優れて適用される。
The powder dispersing device of the present invention can be used for various powder dispersing applications. In particular, powder as a spacer is interposed between substrates of an electro-optical element using liquid crystal. Excellently applied in applications.

【0020】[0020]

【実施例】以下本発明を図面に基づいて更に詳細に説明
する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in more detail with reference to the drawings.

【0021】実施例1 図1〜図4は液晶表示パネルの製造に本発明を適用した
本例を説明するための図であり、これらの図において、
1は粉体散布のための空間を外部から区画した容器であ
り、図示しない開閉扉により容器空間内の下部に、散布
対象である基板2を外部から設置,取出しできるように
設けられている。
Embodiment 1 FIGS. 1 to 4 are diagrams for explaining the present embodiment in which the present invention is applied to the manufacture of a liquid crystal display panel.
Reference numeral 1 denotes a container in which a space for dispersing powder is partitioned from the outside, and is provided at a lower portion in the container space by an opening / closing door (not shown) so that the substrate 2 to be dispersed can be installed and removed from the outside.

【0022】またこの容器の上部略中央には、散布ノズ
ル3が設けられ、図3に示す首振り機構4によって所定
の首振り動作をおこなうようにされている。またこの散
布ノズル3は粉体輸送管5を介して粉体分散機6に接続
され、コンプレッサー7からのエア圧で、分散状態の粉
体を該ノズル3から下方の基板2に向かって噴出するよ
うになっている。
A spray nozzle 3 is provided substantially at the center of the upper part of the container, and a predetermined swing operation is performed by a swing mechanism 4 shown in FIG. The spray nozzle 3 is connected to a powder disperser 6 via a powder transport pipe 5, and ejects the dispersed powder from the nozzle 3 toward the lower substrate 2 by air pressure from a compressor 7. It has become.

【0023】なお上記粉体供給機6としては、例えば上
記した特願平3−287879号に記載の少量の粉体を
精密に定量供給できる空気混入式の粉体分散供給装置を
好ましく採用することができる。また上記粉体輸送管5
は、散布のための粉体を該粉体夾給気6からノズル3に
輸送するためのものであるが、その長さ/径の比を20
としたものを用いることにより、管内での分散効果が好
ましく得られることが実験的に確認されている。
As the powder feeder 6, it is preferable to use, for example, an air-mixing type powder dispersing and feeding apparatus described in Japanese Patent Application No. 3-287879, which is capable of precisely feeding a small amount of powder. Can be. In addition, the powder transport pipe 5
Is for transporting the powder for spraying from the powder supply air 6 to the nozzle 3, and the length / diameter ratio is set to 20.
It has been experimentally confirmed that the use of the above-mentioned material can favorably obtain a dispersion effect in the tube.

【0024】8は上記容器1の下部に接続された排気管
であり、ブロアー9により容器1内のエアを外部に排気
する。
Reference numeral 8 denotes an exhaust pipe connected to a lower portion of the container 1, and the air in the container 1 is exhausted to the outside by a blower 9.

【0025】散布ノズル3の首振り機構4を図2により
説明すると、本例では、散布ノズル3をその中間位置で
球軸受(図示せず)により支持することで首振り自在と
なすと共に、その上端部を揺動リンク411の端部に回
転自在に連結し、この揺動リンク411の揺動中心をな
すピン412が設けられているスライダ413を図中の
矢印B方向に往復動させることで、図中にAで示した散
布ノズル3の上端部の回転円を該Bの往復動に追随させ
るようにしている。
The swing mechanism 4 of the spray nozzle 3 will be described with reference to FIG. 2. In this embodiment, the spray nozzle 3 is supported by a ball bearing (not shown) at an intermediate position so that the spray nozzle 3 can swing freely. The upper end is rotatably connected to the end of the swing link 411, and the slider 413 provided with the pin 412 that forms the swing center of the swing link 411 is reciprocated in the direction of arrow B in the figure. The rotating circle at the upper end of the spraying nozzle 3 indicated by A in the figure follows the reciprocating movement of B.

【0026】414はスライダ413上に設けられた第
1モータであり、その回転駒415が上記揺動リンク4
11の長穴416にその長尺方向に移動できるように遊
嵌することで、該揺動リンク411のピン412回りの
揺動、従って上記散布ノズル上端部の円回転を行なわせ
るものである。また417は図示しない装置固定部に固
定された第2モータであり、その回転駒418が、同じ
く装置固定部に固定して設けられたピン420回りに揺
動する第2揺動リンク419の長穴421に遊嵌するこ
とでこの第2揺動リンク419を揺動させ、他端側の突
起422を上記スライダ413に設けた凹部423に係
合させることで該スライダ413を上記B方向に往復動
させるようになっている。
Reference numeral 414 denotes a first motor provided on the slider 413.
11 is loosely fitted in the long hole 416 so as to be able to move in the longitudinal direction thereof, so that the swing link 411 swings around the pin 412, and thus the upper end of the spray nozzle is rotated in a circular manner. Reference numeral 417 denotes a second motor fixed to a device fixing portion (not shown), and a rotating piece 418 of the second motor 419 is oscillated around a pin 420 which is also fixed to the device fixing portion. The second swing link 419 is swung by loosely fitting into the hole 421, and the slider 413 is reciprocated in the B direction by engaging the protrusion 422 on the other end with the recess 423 provided in the slider 413. It is made to move.

【0027】そして上記第1モータ414,第2モータ
417の回転速度比、各揺動リンク411,419の揺
動の大きさを所定の関係に設定することで、図1の散布
ノズル3の下端(粉体噴出口部)をジグザグ状に移動さ
せることができる。
By setting the rotation speed ratio of the first motor 414 and the second motor 417 and the magnitude of the swing of the swing links 411 and 419 in a predetermined relationship, the lower end of the spray nozzle 3 in FIG. (Powder ejection port) can be moved in a zigzag shape.

【0028】図3および図4は、以上のような構成の粉
体散布装置を用いて、縦300mm(図1の紙面に垂直
な方向),横350mm(図1の左右方向)の基板2上
に粉体を均一に散布させるために、図4のC線で示した
ジグザグ状の軌跡(ノズル延長線の軌跡)を描くように
散布ノズル3を首振りさせる場合を示し、本例では、散
布ノズル3から噴出する粉体の広がり角;20°、上記
B方向の首振り角度;60°として、基板2から散布ノ
ズル3の下端までの距離;200mmで、従来と同様の
要求均一分散状態を達成できた。
FIGS. 3 and 4 show a substrate 200 having a length of 300 mm (in a direction perpendicular to the plane of FIG. 1) and a width of 350 mm (in the horizontal direction in FIG. 1) using the powder dispersing apparatus having the above-described structure. In this example, the spray nozzle 3 is swung so as to draw a zigzag trajectory (trajectory of the nozzle extension line) shown by the line C in FIG. The spread angle of the powder ejected from the nozzle 3; 20 °; the swing angle in the B direction; 60 °; the distance from the substrate 2 to the lower end of the spray nozzle 3; 200 mm; Achieved.

【0029】そしてこの時のジグザグ状の軌跡Cに沿っ
て帯状に与えられる粉体散布域(図4の点線内)の全体
は、粉体散布が必要な基板面とその外側に若干広がって
与えられた。なお基板面の外側の粉体散布域をハッチン
グで示した。
At this time, the entire powder dispersion area (in the dotted line in FIG. 4) provided in a band along the zigzag trajectory C spreads slightly to the substrate surface where powder dispersion is required and the outside thereof. Was done. In addition, the powder dispersion area outside the substrate surface is indicated by hatching.

【0030】比較例1 図10の装置を用いて、散布ノズル3を円回転させるよ
うにした他は、実施例1と同様にして粉体散布を行なっ
た。なお基板2と散布ノズル3の距離は実施例1と同じ
にした。
Comparative Example 1 Powder was sprayed in the same manner as in Example 1 except that the spray nozzle 3 was rotated circularly using the apparatus shown in FIG. The distance between the substrate 2 and the spray nozzle 3 was the same as in Example 1.

【0031】この時の散布ノズル3が描く円錐頂角の角
度を種々選定した。
At this time, various angles of the cone apex angle drawn by the spray nozzle 3 were selected.

【0032】しかし、該頂角の角度を例えば46°とし
た場合の図6のD線で示したノズル延長線の基板上の円
形の軌跡と、これに沿った点線で示した散布域から分か
るように、円形の軌跡の中心部と基板2の外縁付近に、
粉体が散布されない領域が大きく生じた。
However, when the angle of the apex angle is set to, for example, 46 °, a circular trajectory on the substrate of the nozzle extension line shown by the line D in FIG. 6 and a scattered area shown by a dotted line along the nozzle trajectory can be understood. Thus, in the center of the circular locus and near the outer edge of the substrate 2,
The area where the powder was not sprayed was large.

【0033】比較例2 比較例1の方法で、基板上の全体に粉体が実施例1と同
等程度の均一散布状態とできるまで基板2と散布ノズル
3の距離を漸次拡大しながら、散布ノズル3が描く円錐
頂角の角度を種々選定した。
Comparative Example 2 In the method of Comparative Example 1, while gradually increasing the distance between the substrate 2 and the spraying nozzle 3 until the powder on the entire surface of the substrate was uniformly dispersed as in Example 1, the spraying nozzle was Various angles of the cone apex angle described by No. 3 were selected.

【0034】その結果、該頂角の角度を19°、基板2
と散布ノズル3の距離を630mmとすることによっ
て、上記実施例1と同等の粉体均一分散状態が達成でき
た。
As a result, the angle of the apex angle was 19 ° and the substrate 2
By setting the distance between the spray nozzle 3 and the spray nozzle 3 to 630 mm, a powder uniform dispersion state equivalent to that of the above-mentioned Example 1 could be achieved.

【0035】この時の散布ノズルの延長線が基板状に描
く軌跡をE線とすると、粉体散布域の外縁は破線で示さ
れ、そのうちの基板外側の領域をハッチングで示した。
Assuming that the trajectory drawn by the extension line of the spraying nozzle in the shape of a substrate at this time is the E line, the outer edge of the powder spraying area is indicated by a broken line, and the area outside the substrate is hatched.

【0036】この例では、基板上の粉体散布状態は実施
例1と同等の均一状態とできたが、基板と散布ノズルの
距離は、実施例1に比べて約3倍以上となり、一枚の基
板に対する散布時間が長くなった。また、図4と図8の
ハッチング部分の面積比で分かるように、粉体の散布必
要量が実施例1に比べ25%以上も多くなった。
In this example, the state of powder spraying on the substrate could be made uniform as in Example 1, but the distance between the substrate and the spraying nozzle was about three times or more as compared with Example 1, and one sheet Spraying time on the substrate became longer. Further, as can be seen from the area ratios of the hatched portions in FIG. 4 and FIG.

【0037】[0037]

【発明の効果】本発明の粉体散布装置は、散布ノズルを
円形に回転させる形式の装置と同程度の散布精度を満足
できる設計仕様において、基板とノズルの距離を1/2
以下に縮小でき、したがって装置の高さを大幅に減少で
きるろいう効果があり、また粉体の散布飛翔距離が短い
ために迅速な処理が可能となって、大量の基板を処理す
る場合には、散布処理時間の短縮によって生産性の向上
が得られるという効果がある。
According to the powder spraying apparatus of the present invention, the distance between the substrate and the nozzle is reduced by half in a design specification capable of satisfying the same spraying accuracy as that of the apparatus in which the spray nozzle is rotated in a circular shape.
It has the effect of being able to reduce the height of the apparatus significantly, and also has the effect of greatly reducing the height of the apparatus.Because the flying distance of the powder is short, rapid processing becomes possible. In addition, there is an effect that the productivity can be improved by shortening the spraying time.

【0038】また、上記実施例と比較例の対比から明ら
かであるように、散布が必要な散布対象領域と、その外
側に生ずる本来は粉体散布が必要のない領域の合計面積
で決まる使用粉体量が、本発明では粉体散布対象領域外
の面積を大幅に小さくできるため粉体使用量を大幅に削
減でき、資源の有効な利用が実現され、同時に単位基板
あたりの使用粉体量の低減によるコストの低廉化が実現
できるという効果が得られる。
As is clear from the comparison between the above embodiment and the comparative example, the powder used is determined by the total area of the area to be sprayed and the area outside the area which does not normally need to be sprayed. In the present invention, the amount of powder used can be greatly reduced because the area outside the target area of powder spraying can be significantly reduced in the present invention, and the amount of powder used can be significantly reduced. The effect is obtained that the cost can be reduced by the reduction.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明を適用する粉体散布装置の全体の概略構
成を示した図、
FIG. 1 is a diagram showing an overall schematic configuration of a powder spraying apparatus to which the present invention is applied;

【図2】図1の実施例における散布ノズルの首振りを行
なわせるカム機構の一例を示した図、
FIG. 2 is a view showing an example of a cam mechanism for swinging a spray nozzle in the embodiment of FIG. 1;

【図3】本発明の実施例1における散布ノズルの首振り
状態を説明するための図、
FIG. 3 is a view for explaining a swinging state of a spray nozzle in Embodiment 1 of the present invention;

【図4】図3のカム機構の動きにより基板上に描かれる
ノズル延長線の走査軌跡と、粉体散布域を示した図、
FIG. 4 is a diagram showing a scanning trajectory of a nozzle extension line drawn on a substrate by the movement of a cam mechanism of FIG. 3, and a powder dispersion area;

【図5】散布ノズルを円形に回転させた比較例1の説明
図、
FIG. 5 is an explanatory view of Comparative Example 1 in which a spray nozzle is rotated in a circular shape;

【図6】図5の比較例1により基板上に描かれるノズル
延長線の走査軌跡と、粉体散布域を示した図、
FIG. 6 is a diagram showing a scanning locus of a nozzle extension line drawn on a substrate according to Comparative Example 1 of FIG. 5 and a powder spraying area;

【図7】散布ノズルを円形に回転させた比較例2の説明
図、
FIG. 7 is an explanatory view of Comparative Example 2 in which a spray nozzle is rotated in a circular shape;

【図8】図7の比較例2により基板上に描かれるノズル
延長線の走査軌跡と、粉体散布域を示した図、
8 is a diagram showing a scanning trajectory of a nozzle extension line drawn on a substrate according to Comparative Example 2 of FIG. 7 and a powder spraying area,

【図9】理想的な粉体散布を行なった場合に基板上に描
かれる散布ノズル延長線の走査軌跡と、粉体散布域を説
明するための図、
FIG. 9 is a view for explaining a scanning trajectory of a spray nozzle extension line drawn on a substrate when ideal powder spraying is performed, and a powder spray area;

【図10】比較例1の散布ノズルを円回転させるための
機構を示した図である。
FIG. 10 is a view showing a mechanism for rotating a spray nozzle of Comparative Example 1 in a circular manner.

【符号の説明】[Explanation of symbols]

1・・・容器、2・・・基板、3・・・散布ノズル、4
・・・首振り機構、5・・・粉体輸送管。
DESCRIPTION OF SYMBOLS 1 ... Container, 2 ... Substrate, 3 ... Spray nozzle, 4
... Swing mechanism, 5 ... Powder transport pipe.

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) G02F 1/1339 500 G09F 9/30 320 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 7 , DB name) G02F 1/1339 500 G09F 9/30 320

Claims (5)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 2枚の透明基板間を均一な隙間に保つた
めのスぺーサとしての微粒粉体を基板上面に対し上方か
ら散布する散布ノズルと、この散布ノズルと上記基板を
水平2軸のx,y各方向に相対移動させる移動機構とを
備えた粉体散布装置であって、この移動機構は、上記散
布ノズルの延長線が基板上にジグザグ状の走査軌跡を描
くように該散布ノズルと基板の少なくともいずれか一方
を移動させる手段からなることを特徴とする粉体散布装
置。
1. A spray nozzle for spraying a fine powder as a spacer for keeping a uniform gap between two transparent substrates from above on a substrate upper surface, and a spray nozzle and the substrate being horizontally biaxially spread. And a moving mechanism for relatively moving in the x and y directions, the moving mechanism comprising: a moving mechanism configured to move the spraying nozzle such that an extended line of the spraying nozzle draws a zigzag scanning trajectory on a substrate. A powder dispersing apparatus comprising: means for moving at least one of a nozzle and a substrate.
【請求項2】 請求項1において、基板上面に対し上方
から微粒粉体を散布する散布ノズルと、この散布ノズル
をその延長線が基板上でジグザグ状の走査軌跡を描くよ
うに首振りさせるノズル首振り装置とを備えたことを特
徴とする粉体散布装置。
2. A spray nozzle according to claim 1, wherein said spray nozzle sprays fine powder from above the substrate upper surface , and a nozzle which swings said spray nozzle such that an extension of said spray nozzle draws a zigzag scanning trajectory on said substrate. A powder dispersing device comprising a swinging device.
【請求項3】 請求項1又は2のいずれかにおいて、基
板が、液晶を用いた電気光学素子を構成する透明基板で
あることを特徴とする粉体散布装置。
3. The powder dispersion apparatus according to claim 1, wherein the substrate is a transparent substrate constituting an electro-optical element using liquid crystal.
【請求項4】 粉体分散用の流通空気に粉体を連続的に
定量供給する粉体供給装置と、請求項1の散布装置と
を、長さ/径の比が20以上の粉体輸送管を介して接続
したことを特徴とする粉体散布装置。
4. A powder feeder having a length / diameter ratio of 20 or more, comprising: a powder supply device for continuously supplying a constant amount of powder to flowing air for powder dispersion; A powder spraying device connected via a pipe.
【請求項5】 2枚の透明基板間を均一な隙間に保つた
めのスぺーサとしての微粒粉体を基板上に散布する粉体
散布ノズルを、その延長線がジグザグ状の軌跡を描くよ
うに走査させることを特徴とする粉体の散布方法。
5. A powder dispersing nozzle for dispersing fine powder as a spacer on a substrate for keeping a uniform gap between two transparent substrates such that an extended line thereof draws a zigzag locus. A method for dispersing powder, characterized in that the powder is scanned.
JP16625892A 1991-11-01 1992-06-24 Powder spraying device and spraying method Expired - Lifetime JP3155067B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP16625892A JP3155067B2 (en) 1992-06-24 1992-06-24 Powder spraying device and spraying method
US07/969,365 US5332133A (en) 1991-11-01 1992-10-30 Powder supplying apparatus and powder spraying apparatus
US08/214,300 US5614254A (en) 1991-11-01 1994-03-17 Method of spraying powder on a substrate
US08/516,487 US5660633A (en) 1991-11-01 1995-08-17 Powder supplying apparatus and powder spraying apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16625892A JP3155067B2 (en) 1992-06-24 1992-06-24 Powder spraying device and spraying method

Publications (2)

Publication Number Publication Date
JPH063679A JPH063679A (en) 1994-01-14
JP3155067B2 true JP3155067B2 (en) 2001-04-09

Family

ID=15828048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16625892A Expired - Lifetime JP3155067B2 (en) 1991-11-01 1992-06-24 Powder spraying device and spraying method

Country Status (1)

Country Link
JP (1) JP3155067B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5834139A (en) * 1995-07-05 1998-11-10 Nippon Telegraph And Telephone Corporation Negative electrode material for use in lithium secondary batteries and lithium secondary batteries incorporating this material
KR100257942B1 (en) * 1996-02-26 2000-06-01 니시무로 타이죠 The method of manufacturing liquid crystal display
JP3288268B2 (en) 1997-07-17 2002-06-04 日本電気株式会社 Spacer spraying device
JP4500588B2 (en) * 2004-06-02 2010-07-14 日清エンジニアリング株式会社 Fine powder spraying device
JP2010066298A (en) * 2008-09-08 2010-03-25 Bridgestone Corp Manufacturing device and manufacturing method of panel for information display

Also Published As

Publication number Publication date
JPH063679A (en) 1994-01-14

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