JP3166235B2 - Surface acoustic wave device - Google Patents
Surface acoustic wave deviceInfo
- Publication number
- JP3166235B2 JP3166235B2 JP25330391A JP25330391A JP3166235B2 JP 3166235 B2 JP3166235 B2 JP 3166235B2 JP 25330391 A JP25330391 A JP 25330391A JP 25330391 A JP25330391 A JP 25330391A JP 3166235 B2 JP3166235 B2 JP 3166235B2
- Authority
- JP
- Japan
- Prior art keywords
- acoustic wave
- surface acoustic
- ground
- electrode finger
- bus bar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims description 32
- 239000000758 substrate Substances 0.000 claims description 6
- 244000126211 Hericium coralloides Species 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は弾性表面波装置に関し、
特に電極パターンの構造を変えて特性を改良した弾性表
面波装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface acoustic wave device,
In particular, the present invention relates to a surface acoustic wave device having improved characteristics by changing the structure of an electrode pattern.
【0002】[0002]
【従来の技術】従来の弾性表面波装置は図6に示すよう
に、入力側の+側バスバー21Aと接地側バスバー21
Bからなるトランスデューサおよび出力側の+側バスバ
ー24Aと接地側バスバー24Bからなるトランスデュ
ーサの少なくとも2個のトランスデューサが圧電基板の
表面に設けられている。また各バスバー21A,21B
は+側電極指22A〜22Cと接地側電極指23A〜2
3Cとが所定の間隔を保持して対向している。また、こ
の電極パターンの対向している部分の長さはL20はす
べて同じ長さである。出力側の電極指も同じ構造であ
る。今弾性表面波は電極指22Aから22C方向および
電極指25Aから25C方向へ伝搬するが、その伝搬方
向に対して長さL20は一定であった。図5はこの弾性
表面波装置の伝送特性を示している。すなわちfo例え
ば45MHzを中心に±0.1MHz程度の通過帯域を
有するが、この図5に見られるように、横モードスプリ
アス27が表れることがあった。2. Description of the Related Art As shown in FIG. 6, a conventional surface acoustic wave device has an input side bus bar 21A and a ground side bus bar 21A.
At least two transducers are provided on the surface of the piezoelectric substrate, that is, a transducer composed of B and a transducer composed of an output-side bus bar 24A and a ground-side bus bar 24B. In addition, each bus bar 21A, 21B
Are the positive electrode fingers 22A to 22C and the ground electrode fingers 23A to 2
3C are opposed to each other with a predetermined interval. Further, the lengths of the opposing portions of the electrode pattern are all the same in L20. The output electrode fingers have the same structure. Now, the surface acoustic wave propagates from the electrode fingers 22A to 22C and from the electrode fingers 25A to 25C, and the length L20 is constant in the propagation direction. FIG. 5 shows the transmission characteristics of this surface acoustic wave device. That is, fo, for example, has a pass band of about ± 0.1 MHz centered at 45 MHz, but as shown in FIG. 5, the transverse mode spurious 27 sometimes appeared.
【0003】[0003]
【発明が解決しようとする課題】この従来の電極パター
ン構造を有する弾性表面波装置ではトランスデューサ間
の横モード結合によるスプリアスが発生し易く、弾性表
面波装置の特性に悪影響を及ぼすという欠点があった。The conventional surface acoustic wave device having the electrode pattern structure has a drawback that spurious due to transverse mode coupling between transducers is apt to occur, which adversely affects the characteristics of the surface acoustic wave device. .
【0004】[0004]
【課題を解決するための手段】本発明の弾性表面波装置
は圧電基板の表面に+側バスバーと接地側バスのそれぞ
れにくしの歯状の+側電極指と、くしの歯状の接地電極
指とを互いに所定の間隔で対向して配置した少なくとも
2つ以上のトランスデューサを設けた弾性表面波装置に
おいて、前記+側電極指と前記接地電極指とが対向する
対向長さを一定に保持し、前記+側電極指の先端と前記
先端が対向する前記接地側バスバーとの間の間隙におけ
る、弾性表面波の伝搬方向に対して垂直方向の長さと、
前記接地側電極指の先端と前記先端が対向する前記+側
バスバーとの間の間隙における、弾性表面波の伝搬方向
に対して垂直方向の長さとを、弾性表面波が伝搬する方
向への距離の変化にともないテーパ状に変化させてい
る。また、本発明の弾性表面波装置は圧電基板の表面に
+側バスバーと接地側バスのそれぞれにくしの歯状の+
側電極指と、くしの歯状の接地電極指とを互いに所定の
間隔で対向して配置した入力側トランスデューサと出力
側トランスデューサを設けた弾性表面波装置において、
前記+側電極指の先端と前記先端が対向する前記接地側
バスバーとの間の間隙における、弾性表面波の伝搬方向
に対して垂直方向の長さと、前記接地側電極指の先端と
前記先端が対向する前記+側バスバーとの間の間隙にお
ける、弾性表面波の伝搬方向に対して垂直方向の長さと
を、前記入力側トランスデューサにおいては、弾性表面
波が伝搬する方向への距離の変化にともないテーパ状に
小さくし、前記出力側トランスデューサにおいては、弾
性表面波が伝搬する方向への距離の変化にともないテー
パ状に大きくしている。 A surface acoustic wave device according to the present invention comprises a comb-shaped ground electrode and a comb-shaped ground electrode on each of a + bus bar and a ground bus on the surface of a piezoelectric substrate.
In a surface acoustic wave device provided with at least two or more transducers in which fingers are arranged to face each other at a predetermined interval, the positive electrode finger and the ground electrode finger face each other.
The opposing length is kept constant, and the tip of the
In the gap between the tip and the ground-side bus bar
The length in the direction perpendicular to the propagation direction of the surface acoustic wave;
The + side where the tip of the ground-side electrode finger faces the tip
Propagation direction of surface acoustic wave in gap between bus bar
The length in the direction perpendicular to the direction in which the surface acoustic wave propagates
In a tapered shape as the distance in the direction changes.
You. In addition, the surface acoustic wave device of the present invention is applied to the surface of the piezoelectric substrate.
Comb tooth-shaped + for each of the + busbar and the ground bus
The side electrode finger and the comb-shaped ground electrode finger
Input transducer and output placed opposite each other at a distance
In the surface acoustic wave device provided with the side transducer,
The ground side where the tip of the + side electrode finger and the tip face each other
Propagation direction of surface acoustic wave in gap between bus bar
And the length in the vertical direction with respect to the tip of the ground-side electrode finger.
In the gap between the above-mentioned + busbar and the opposite end,
Length in the direction perpendicular to the surface acoustic wave propagation direction
In the input transducer, an elastic surface
Taper shape with change in distance in the direction of wave propagation
And the output transducer has an elastic
Due to the change in distance in the direction in which
It is enlarged like a pa.
【0005】[0005]
【実施例】次に本発明について図面を参照して説明す
る。図1は本発明の第1の実施例の電極パターンを示す
平面図である。図1の実施例は圧電基板の表面に入力側
のトランスデューサとして+側バスバー1A,接地側バ
スバー1Bを有し、出力のトランスデューサとして+側
バスバー4A,接地側バスバー4Bを有している。ま
た、バスバー1A,1Bは+側電極指2A,2B,2C
(図では6本)と接地側電極指3A,3B,3Cとがそ
れぞれ所定の間隔を保持して対向している。出力側バス
バー4A,4Bの電極指も同様である。ここで対向して
いる部分の長さL5は電極指2Aと2Bとを比較すると
L1だけ変えており、電極指2Bと電極指2Cとを比較
するとL3だけ変えている。また接地側電極指3A,3
Bもこの電極指の両側の対向部分の長さがそれぞれL
2,L4だけ変えている。このように対向する電極指の
間隔は、弾性表面波の伝搬方向への距離の変化にともな
い変化させている。よって弾性表面波のバスバー部で反
射波を散乱し易くなるので、横モードの発生を防ぐこと
ができ、トランスデューサ間の横モード結合によるスプ
リアスをおさえることができる。図4は図1の電極パタ
ーンを使用したときの伝送特性を示す特性図を示してい
る。図4と図5を比較してわかるように、従来の電極パ
ターンを使用したときに発生していた横モードスプリア
スが、本発明の電極パターンを使用したときに抑圧され
消去されている。DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings. FIG. 1 is a plan view showing an electrode pattern according to a first embodiment of the present invention. In the embodiment shown in FIG. 1, a positive side bus bar 1A and a ground side bus bar 1B are provided on the surface of the piezoelectric substrate as input-side transducers, and a positive side bus bar 4A and a ground side bus bar 4B are provided as output transducers. The bus bars 1A and 1B are connected to the + side electrode fingers 2A, 2B and 2C.
(Six in the figure) and the ground-side electrode fingers 3A, 3B, 3C oppose each other with a predetermined interval. The same applies to the electrode fingers of the output side bus bars 4A and 4B. Here, the length L5 of the facing portion is changed by L1 when comparing the electrode fingers 2A and 2B, and is changed by L3 when comparing the electrode finger 2B and the electrode finger 2C. Also, the ground-side electrode fingers 3A, 3
B also has the length of the opposing portions on both sides of the electrode finger L, respectively.
Only 2 and L4 are changed. The distance between the opposing electrode fingers is changed in accordance with the change in the distance in the propagation direction of the surface acoustic wave. Therefore, the reflected wave is easily scattered at the bus bar portion of the surface acoustic wave, so that the occurrence of the transverse mode can be prevented, and the spurious due to the transverse mode coupling between the transducers can be suppressed. FIG. 4 is a characteristic diagram showing transmission characteristics when the electrode pattern of FIG. 1 is used. As can be seen by comparing FIGS. 4 and 5, the transverse mode spurious generated when using the conventional electrode pattern is suppressed and eliminated when using the electrode pattern of the present invention.
【0006】次に本発明の第2の実施例を図2の電極パ
ターンの平面図、および図3に示す図2の電極パターン
の平面図および図3に示す図2の電極パターンの部分拡
大図により説明する。図2において入力側トランスデュ
ーサは+側バスバー7A,接地側バスバー7Bで構成さ
れ、出力側トランスデューサは+側バスバー10A,接
地側バスバー10Bで構成されている。ここで+側電極
指8Aと8Bは対向する面の長さが相違しており、両電
極指の間をテーパ状に間隔を変えている。設置側の電極
指9Aと9Bも対向する面の長さが相違しており、両電
極指の間をテーパ状に間隔を変えている。すなわち図3
に示すように、+側電極指8Aの内側から接地側電極指
9Aの対向する側に向かって長さL7,L8がテーパ状
にL7>L8としており、第1の実施例で説明したよう
に両方のバスバー部のL7,L8および後続の各位置で
反射波を散乱し易くして横モードの発生を防止してい
る。Next, a second embodiment of the present invention will be described with reference to a plan view of the electrode pattern of FIG. 2, a plan view of the electrode pattern of FIG. 2 shown in FIG. 3, and a partially enlarged view of the electrode pattern of FIG. 2 shown in FIG. This will be described below. In FIG. 2, the input-side transducer includes a positive-side bus bar 7A and a ground-side bus bar 7B, and the output-side transducer includes a positive-side bus bar 10A and a ground-side bus bar 10B. Here, the lengths of the opposing surfaces of the positive electrode fingers 8A and 8B are different, and the interval between the two electrode fingers is changed in a tapered manner. The installation-side electrode fingers 9A and 9B also have different lengths of opposing surfaces, and the distance between the electrode fingers is changed in a tapered manner. That is, FIG.
As shown in the figure, the lengths L7 and L8 are tapered from the inside of the positive electrode finger 8A toward the opposite side of the ground electrode finger 9A so that L7> L8, as described in the first embodiment. The reflected waves are easily scattered at L7, L8 of each of the bus bar portions and at each subsequent position to prevent the occurrence of the transverse mode.
【0007】[0007]
【発明の効果】以上説明したように本発明は、+側およ
び接地側バスバーからなる一対のバスバーの対向する面
の伝搬方向と垂直方向の長さを弾性表面波の伝搬方向へ
の変化にともない変化させることにより、横モードスプ
リアスによる弾性表面波装置への悪影響を防ぐことがで
きるという効果がある。As described above, according to the present invention, the length in the direction perpendicular to the propagation direction of the opposing surfaces of the pair of bus bars composed of the + side bus bar and the ground side bus bar changes with the change in the propagation direction of the surface acoustic wave. The effect of the change is that an adverse effect on the surface acoustic wave device due to the transverse mode spurious can be prevented.
【図1】本発明の第1の実施例の平面図である。FIG. 1 is a plan view of a first embodiment of the present invention.
【図2】本発明の第2の実施例の平面図である。FIG. 2 is a plan view of a second embodiment of the present invention.
【図3】第2の実施例の部分拡大図である。FIG. 3 is a partially enlarged view of the second embodiment.
【図4】第1の実施例の特性図である。FIG. 4 is a characteristic diagram of the first embodiment.
【図5】従来例の特性図である。FIG. 5 is a characteristic diagram of a conventional example.
【図6】従来の弾性表面波装置の平面図である。FIG. 6 is a plan view of a conventional surface acoustic wave device.
1A,1B,4A,4B,7A,7B,10A,10B
バスバー 2A〜2C,5A〜5C,8A〜8C,11A〜11C
+側電極指 3A〜3C,6A〜6C,9A〜9C,12A〜12C
接地側電極指1A, 1B, 4A, 4B, 7A, 7B, 10A, 10B
Bus bar 2A-2C, 5A-5C, 8A-8C, 11A-11C
+ Side electrode finger 3A-3C, 6A-6C, 9A-9C, 12A-12C
Ground electrode finger
フロントページの続き (56)参考文献 特開 昭52−72137(JP,A) 特開 平2−170610(JP,A) 特開 平3−125511(JP,A) 特開 昭59−200519(JP,A) 実開 昭58−178731(JP,U) 実開 昭59−169128(JP,U) 実開 平4−114225(JP,U) (58)調査した分野(Int.Cl.7,DB名) H03H 9/145 Continuation of front page (56) References JP-A-52-72137 (JP, A) JP-A-2-170610 (JP, A) JP-A-3-125511 (JP, A) JP-A-59-200519 (JP, A) , A) Japanese Utility Model Showa 58-177871 (JP, U) Japanese Utility Model Showa 59-169128 (JP, U) Japanese Utility Model Utility Model No. 4-114225 (JP, U) (58) Fields surveyed (Int. Cl. 7 , DB (Name) H03H 9/145
Claims (2)
バスのそれぞれにくしの歯状の+側電極指と、くしの歯
状の接地電極指とを互いに所定の間隔で対向して配置し
た少なくとも2つ以上のトランスデューサを設けた弾性
表面波装置において、前記+側電極指と前記接地電極指とが対向する対向長さ
を一定に保持し、 前記+側電極指の先端と前記先端が対向する前記接地側
バスバーとの間の間隙における、弾性表面波の伝搬方向
に対して垂直方向の長さと、前記接地側電極指の先端と
前記先端が対向する前記+側バスバーとの間の間隙にお
ける、弾性表面波の伝搬方向に対して垂直方向の長さと
を、 弾性表面波が伝搬する方向への距離の変化にともな
いテーパ状に変化させていることを特徴とする弾性表面
波装置。1. A positive side bus bar and a ground side on a surface of a piezoelectric substrate.
Each of the buses has a comb-shaped + side electrode finger and a comb tooth
Surface acoustic wave device provided with at least two or more transducers in which at least two transducers are arranged so as to face each other at a predetermined interval with respect to each other, the opposing length in which the + electrode finger and the ground electrode finger face each other.
And the ground side where the tip of the + electrode finger and the tip face each other.
Propagation direction of surface acoustic wave in gap between bus bar
And the length in the vertical direction with respect to the tip of the ground-side electrode finger.
In the gap between the above-mentioned + busbar and the opposite end,
Length in the direction perpendicular to the surface acoustic wave propagation direction
The surface acoustic wave device, characterized in that it is changed with the tapering change in distance in the direction in which the surface acoustic wave propagates.
バスのそれぞれにくしの歯状の+側電極指と、くしの歯
状の接地電極指とを互いに所定の間隔で対向して配置し
た入力側トランスデューサと出力側トランスデューサを
設けた弾性表面波装置において、 前記+側電極指の先端と前記先端が対向する前記接地側
バスバーとの間の間隙における、弾性表面波の伝搬方向
に対して垂直方向の長さと、前記接地側電極指の先端と
前記先端が対向する前記+側バスバーとの間の間隙にお
ける、弾性表面波の伝搬方向に対して垂直方向の長さと
を、前記入力側トランスデューサにおいては、弾性表面
波が伝搬する方向への距離の変化にともないテーパ状に
小さくし、前記出力側トランスデューサにおいては、弾
性表面波が伝搬する方向への距離の変化にともないテー
パ状に大きくしていることを特徴とする 弾性表面波装
置。2. A positive side bus bar and a ground side on a surface of a piezoelectric substrate.
Each of the buses has a comb-shaped + side electrode finger and a comb tooth
And ground electrode fingers facing each other at a predetermined interval.
Input and output transducers
In the surface acoustic wave device provided, the tip of the positive electrode finger and the ground side where the tip faces each other.
Propagation direction of surface acoustic wave in gap between bus bar
And the length in the vertical direction with respect to the tip of the ground-side electrode finger.
In the gap between the above-mentioned + busbar and the opposite end,
Length in the direction perpendicular to the surface acoustic wave propagation direction
In the input transducer, an elastic surface
Taper shape with change in distance in the direction of wave propagation
And the output transducer has an elastic
Due to the change in distance in the direction in which
A surface acoustic wave device characterized in that the surface acoustic wave device is enlarged in a pa shape .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25330391A JP3166235B2 (en) | 1991-10-01 | 1991-10-01 | Surface acoustic wave device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25330391A JP3166235B2 (en) | 1991-10-01 | 1991-10-01 | Surface acoustic wave device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0595250A JPH0595250A (en) | 1993-04-16 |
| JP3166235B2 true JP3166235B2 (en) | 2001-05-14 |
Family
ID=17249417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25330391A Expired - Fee Related JP3166235B2 (en) | 1991-10-01 | 1991-10-01 | Surface acoustic wave device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3166235B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10454449B2 (en) | 2014-06-23 | 2019-10-22 | Murata Manufacturing Co., Ltd. | Elastic wave device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4601416B2 (en) * | 2004-12-24 | 2010-12-22 | 京セラ株式会社 | Surface acoustic wave device |
-
1991
- 1991-10-01 JP JP25330391A patent/JP3166235B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10454449B2 (en) | 2014-06-23 | 2019-10-22 | Murata Manufacturing Co., Ltd. | Elastic wave device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0595250A (en) | 1993-04-16 |
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