JP3175681B2 - Storage device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a storage device installed in a clean factory where, for example, a semiconductor manufacturing process is provided, for storing silicon wafers, liquid crystal panels, and the like in an environment with a higher degree of cleanliness than in the factory. is there.

[0002]

2. Description of the Related Art FIGS. 1A, 1B and 2 show examples of a storage device installed in a clean factory. In the storage device 10, storage shelves 14 each having a plurality of storage parts 22 for storing one storage object are provided in the room so as to face each other, and each storage part 22 is provided in a passage 12 extending between the storage shelves 14. On the other hand, a stacker crane 13 that automatically performs a transfer operation is provided. Delivery of stored items between the outside of the storage device 10 and the stacker crane 13 is performed by a conveyor 18 that communicates the outside with the inside of the storage device 10 at an entrance / exit port provided on one side of the storage device 10. The interior of the storage device 10 is designed to have higher air cleanliness than in a factory where the storage device 10 is installed. The cleanliness is expressed by the number of dusts contained in air per unit volume, and the cleanliness increases as the number of dusts decreases. For this reason, the storage device 10 includes an air cleaning device for filtering dust from the air inside the storage device 10.

In the storage device 10 shown in FIGS. 1 (a), 1 (b) and 2, each of the storage shelves 14 has storage units 22 of three levels vertically.
Storage unit 15 equipped with a stacker crane 1
3 is formed by connecting a plurality of members along a moving path. This is so that the common storage unit 15 can be used to make the storage devices 10 having different total numbers of the storage units 22, or the total number of the storage units 22 of the existing storage device 10 can be easily increased as necessary. To do that.

Each storage unit 10 is provided with a fan filter unit 26 including a filter 27 and a motor fan 28 on the back side of each storage unit 22. Motor fan 28 of each fan filter unit 26
Is operated, a negative pressure is generated in the communication path 24 in which the back side of each fan filter unit 26 is vertically communicated, and this negative pressure causes air introduction provided in the lower part of each storage unit 15 to communicate with the communication path 24. Stacker crane 13 on road 23
Side air is introduced. Then, the air introduced into each fan filter unit 26 from the rear side is filtered by a filter 27 to remove minute dust, and is supplied into the storage unit 22. The air supplied to each storage section 22 is discharged to the stacker crane 13 side, and is again introduced into the fan filter unit 26 from the air introduction path 23. Therefore, the high-purity air filtered by the filter 27 is always supplied to each storage unit 22, and the cleanliness of the air inside the storage device 10 is maintained at or above the reference value.

[0005] Each motor fan 28 of each storage unit 15
, A driving AC power is supplied from a control panel 29 provided outside the storage device 10. The control panel 29 supplies driving AC power to each motor fan 28 of all storage units 15 or stops supplying driving AC power to all motor fans 28. Therefore, while the factory is operating, all motor fans 2
8 is driven. The cleaning capacity of each fan filter unit 26, i.e., the amount of air that can be filtered per unit time, depends on the regular cleaning in the storage device when all the fan filter units 26 are operated continuously. The degree is set to a size that becomes substantially a predetermined reference value.

[0006]

By the way, the storage device 1
When a regular maintenance work is performed at 0 or when some trouble occurs in the storage device 10, a worker may enter the storage device 10. Since humans generate dust, when the worker enters the storage device 10, the cleanliness in the storage device 10 may be lower than the reference value. As a result, there is a problem that the number of dusts adhered to, for example, a silicon wafer stored in the storage device 10 increases, and the yield of semiconductor chips manufactured from the wafer decreases.

In order to solve such a problem, the cleaning capacity of the fan filter unit 26 is made extra large so as to obtain a cleanness higher than a predetermined reference value, and the normal cleanliness is reduced. It is conceivable to maintain the cleanliness higher than the reference value. In this way, even if a worker enters the storage device 10 for maintenance work or the like, the cleanliness can be prevented from being lower than a predetermined reference value.

However, in order to further increase the cleaning ability of each fan filter unit 26, it is necessary to keep the rotation speed of the motor fan 28 higher than ever. Then, there is a problem that the power consumption of the motor fan 28 greatly increases, and the power consumption of the entire storage device 10 greatly increases.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to suppress a decrease in cleanliness due to a person entering inside without causing a large increase in power consumption. It is an object of the present invention to provide a storage device which can perform the storage.

[0010]

In order to solve the above-mentioned problems, the invention according to claim 1 is characterized in that the room is formed in a state that is sealed from the outside and that a person can enter the room. A plurality of storage units, each of which is provided with storage items, a transfer unit for transferring storage items between each of the storage units and the outside of the room, and air introduced from the room.
Is filtered and supplied to the storage unit, and from the storage unit to the room
And air cleaning means for filtering the air by circulating the air in the room by discharging to a man-detecting unit for detecting that a person is within the room, the detection result of the human detection means Based on the above, when no person is detected by the person detecting means, the air purifying means is set at a predetermined cleaning ability set to maintain the cleanliness in the room at a high degree of cleanliness equal to or higher than a predetermined degree of cleanliness. The operation control is performed, and when a person is detected by the person detecting means, the operation of the air purifying means is controlled with a cleaning ability larger than the predetermined cleaning ability at least while a person is detected by the person detecting means. Cleaning capacity control means.

According to a second aspect of the present invention, in the first aspect of the present invention, the transfer means includes a stacker crane, and each of the storage sections is formed in the same shape.
The storage unit is provided in each of the storage units sequentially arranged on both sides thereof along the path along which the stacker crane moves, and the air purifying means is an air purifier independently provided in the storage unit. Wherein the cleaning ability control means controls the operation of the air cleaning means of each storage unit.

According to a third aspect of the present invention, in the second aspect of the present invention, the storage units are formed in substantially the same shape, and only the stacker crane side is opened in the room, and is arranged vertically. The plurality of storage units provided as described above, provided below the storage units, an air introduction path that opens into the room on the stacker crane side, and the air introduction path is the opening side of each storage unit A communication passage communicating with an opposite side surface, wherein the air purifier is provided on an opposite side to an opening side for each of the storage units, and each has substantially the same cleaning ability, and the communication passage and Air in the room is introduced through the air introduction unit, and the introduced air is filtered and supplied from each storage unit into the room.

According to a fourth aspect of the present invention, in the invention according to any one of the first to third aspects, the cleaning ability control means determines whether or not a person is no longer detected by the human detection means. The operation of the air purifying means is controlled with a cleaning ability larger than the predetermined cleaning ability until a predetermined time period elapses from the time when the air purifying means is operated.

(Operation) According to the first aspect of the present invention,
At least while the person is in the room, the air is cleaned with greater cleaning capacity than when no person is in the room.

According to the invention described in claim 2, according to claim 1
In addition to the operation of the invention described in the above, the entire storage unit is formed by a plurality of storage unit units each having a storage unit and sequentially connected along the path of the stacker crane. The cleanliness in the storage device is maintained by the air purifier provided in each storage unit.

According to the invention of claim 3, according to claim 2,
In addition to the operation of the invention described in (1), clean air is supplied to each storage section so that each storage section has a substantially uniform positive pressure.

According to the invention described in claim 4, according to claim 1,
In addition to the effect of the invention according to any one of the third to third aspects, the air is cleaned with a larger cleaning capacity than usual until a predetermined time has passed even after a person leaves the room.

[0018]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. FIG. 1 (a),
As shown in (b), the storage device 10 includes a room 11 formed in an elongated shape and sealed from the outside. A passage 12 extending in the longitudinal direction of the room 11 is provided inside the room 11, and a stacker crane 13 traveling in the longitudinal direction is provided in the passage 12. On both sides of the passage 12, storage shelves 14 are provided along the passage 12, respectively. Each storage shelf 14 is formed identically, and is formed of a plurality of storage units 15 arranged in order along the passage 12. Each storage shelf 14 is formed by connecting a required number of storage units 15 in accordance with the number of items to be stored in the entire storage device 10.

The storage device 10 includes a work space 17 in which a distribution board 16 and the like are accommodated at one end in the longitudinal direction, and the stacker crane 13 and the storage device 1 at the other end.
And a transfer chamber 19 provided with a conveyor 18 for transferring stored items to and from an unillustrated unmanned transport vehicle outside the vehicle 0. Further, the storage device 10 includes a door 20 for entering the work space 17. In the present embodiment, the transfer means is constituted by the stacker crane 13 and the conveyor 18.

In the work space 17, the worker is in the work space 1.
A first pyroelectric infrared sensor (hereinafter, referred to as a first infrared sensor) 21a that detects that the infrared sensor 7 is in the vehicle 7 is provided. or,
At the end of the passage 12 on the work space 17 side, the worker
A second pyroelectric infrared sensor (hereinafter, referred to as a second infrared sensor) 21b for detecting that the user is at a position on the side of the second work space 17 is provided. The first infrared sensor 21a and the second infrared sensor 21b are provided so that at least one of them detects the worker when the worker moves between the work space 17 and the passage 12.

As shown in FIG. 2, the storage unit 15
A plurality of storage sections 22 which are formed in substantially the same shape, open only in the passage 12 side in the room 11, and are provided so as to be arranged vertically. Also, the storage unit 15
Is the room 11 on the side of the passage 12 below the storage units 22.
An air introduction passage 23 that opens into the inside is provided. Further, the storage unit 15 includes a communication path 24 that connects the air introduction path 23 to a side opposite to the opening side of each storage unit 22.
Further, the storage unit 15 includes an air introduction passage 23 and a communication passage 24.
And a pre-filter 25 for filtering air introduced from the air introduction passage 23 into the communication passage 24.

In the storage unit 15, air on the side of the passage 12 is introduced into the storage unit 15 through the communication path 24 and the air introduction path 23 on the side opposite to the opening side of each storage unit 22. A fan filter unit 26 is provided as an air purifier that is discharged from the part 22 to the passage 12 side. The fan filter units 26 provided in each storage unit 15 are all the same and have the same cleaning ability. In the present embodiment, the fan filter unit 2
6 and the pre-filter 25 constitute an air cleaning means.

The fan filter unit 26 includes a filter 27 (for example, a HEPA filter) and a motor fan 28 for feeding air to the filter 27 from one side thereof. In the fan filter unit 26, a filter 27 is arranged on each storage section 22 on the opposite side to the opening side of the storage section 22, and the motor fan 28
The storage section 22 is provided so as to face the communication path 24 on the opposite side to the storage section 22. And for each storage unit 15,
Each storage unit 22, passage 12, air introduction passage 23 and communication passage 2
4 is formed.

Outside the storage device 10, FIG.
As shown in (b), a control panel 29 as a cleaning capacity control means for controlling the operation of each motor fan 28 of each storage unit 15 is provided immediately outside the work space 17.

Next, the electrical configuration of the storage device will be described with reference to the electrical wiring diagram shown in FIG. The control panel 29 has three-phase 2
00 V commercial AC power is supplied via a main breaker 30 provided on the distribution board 16. From the control panel 29, a plurality of power cables 31a for supplying power to a predetermined number of storage units 15 arranged in predetermined power consumption units are drawn out. Each power cable 31a
Are connected to one of a plurality of sub-breakers 32 provided on the distribution board 16.

Each storage unit 15 has a power cable 3
A power distribution device 3 that distributes driving power supplied from a control panel 29 to each motor fan 28 of the unit 15 via the control panel 1a
3 are provided. The power distributor 33 can be connected in parallel with the power distributor 33 of another storage unit 15 by a connection cable 31b. Each of the power distributors 33 of the predetermined number of storage units 15 is connected by a different connection cable 31b, and one of the power cables 31a is connected to one of the power distributors 33. Therefore, a predetermined number of storage units 15
The driving power is supplied to each motor fan 28 via one power cable 31a.

The control panel 29 includes the infrared sensor 2
1a and 21b are connected respectively. Control panel 29
Is provided with a known frequency converter 34 that converts a commercial AC voltage supplied via the main breaker 30 into a driving AC voltage having a predetermined frequency and outputs the driving AC voltage. Control panel 29
Is provided with a control circuit section 35 for controlling the frequency and voltage of the driving AC voltage generated by the frequency converter 34 based on the detection results of the infrared sensors 21a and 21b.

The control circuit unit 35 includes the first infrared sensor 21
When no person is detected by the second infrared sensor 21a and the second infrared sensor 21b, the frequency converter 34 is controlled so as to convert the commercial AC voltage into a first driving AC voltage having a predetermined frequency. Further, when a person is detected by the first infrared sensor 21a or the second infrared sensor 21b, the control circuit unit 35 changes the commercial AC voltage to the second drive voltage having a predetermined frequency higher than the first drive AC voltage. The frequency converter 34 is controlled so as to convert the AC voltage into the AC voltage. Also, the control circuit unit 35
If the worker is detected by the second infrared sensor 21b after the worker is detected once by the first infrared sensor 21a, even if the worker is no longer detected by the second infrared sensor 21, the first If no worker is detected by the infrared sensor 21a, the frequency converter 34 is controlled to convert the commercial AC voltage to the second drive AC voltage, assuming that the worker is in the back of the passage 12. In the present embodiment, the two infrared sensors 21a and 21b and the control panel 29 constitute a human detecting means.

The first driving AC voltage is an AC voltage having a frequency and a voltage capable of driving the motor fan 28 at a predetermined first rotation speed, and the second driving AC voltage is a voltage for driving the motor fan 28 during the first rotation. An AC voltage having a frequency and a voltage that can be rotationally driven at a predetermined second rotation speed higher than the speed.

The first drive AC voltage indicates that the total cleaning ability when the operation of each motor fan 28 of all the storage units 15 is controlled at the first rotation speed is such that no person enters the storage device 10. Of the storage device 10 is set to a size that is a degree of cleanliness represented by a predetermined first reference value. Here, the cleanliness is represented by the number of dusts contained per unit volume of space, and the smaller the number of dusts, the higher the cleanliness. On the other hand, the second drive AC voltage is applied to all the storage units 15 at the second rotation speed.
The total cleanability when the operation of each motor fan 28 is controlled is higher than the first reference value in the constant cleanliness in the storage device 10 when no person is in the storage device 10. The size is set to be a degree of cleanliness represented by a predetermined second reference value. When the cleanliness in the storage device 10 is the second reference value, when a worker whose dust generation amount is equal to or less than a predetermined standard amount enters the storage device 10, The cleanliness in the storage device 10 is set to a value that is maintained at or above the first reference value. The first reference value and the second reference value are values represented by the number of dust.

When a person is once detected by the first infrared sensor 21a, the control circuit section 35 waits for a predetermined period of time after the first infrared sensor 21a stops detecting a person. Until this time, the frequency converter 34 is controlled so as to continuously convert the commercial AC voltage into the second drive AC voltage.

The operation of the storage device configured as described above will be described. Stored goods conveyed by the automatic guided vehicle on the conveyor 18 at the entrance / exit port at the time of entering the warehouse are the conveyors 1
8 transported into the storage device 10. Storage device 10
The storage items conveyed into the storage unit are conveyed to the storage unit 22 at the storage destination by the stacker crane 13 and are transferred to the storage unit 22. Similarly, at the time of unloading, the storage items stored in the storage unit 22 of the storage source are transferred from the storage device 10 to the outside. At this time, dust is generated from the sliding portion and the like as the stacker crane 13 operates.

At this time, based on the detection results of the first infrared sensor 21a and the second infrared sensor 21b, the storage device 10
It is determined that there is no worker inside, and the first driving AC voltage is supplied from the control panel 29 to each motor fan 28 of each storage unit 5. And each motor fan 2
8 is operated at the first rotation speed, and the cleaning capacity of each fan filter unit 26 is a normal size.
Therefore, the constant cleanliness in the storage device 10 is maintained at a cleanliness higher than the first reference value.

When a worker enters the work space 17 and the passage 12 side in daily inspection work or the like, the cleanliness in the storage device 10 is reduced from the first reference value due to dust from the worker. At this time, the first infrared sensor 21a and the second infrared sensor 21
Based on the detection result of b, it is determined that there is a person in the storage device 10, and the control panel 29 supplies a second drive AC voltage to each motor fan 28 instead of the first drive AC voltage. Then, each motor fan 28 is driven to rotate at the second rotation speed higher than the first rotation speed, and the cleaning ability of the fan filter unit 26 increases the cleanliness in the storage device 10 to the second reference value higher than the first reference value. The size is changed to the cleanliness level. Therefore, even if the worker is in the storage device 10, the cleanliness in the storage device 10 is maintained at a high cleanliness level equal to or higher than the first reference value.

Further, the first infrared sensor 21a and the second infrared sensor 21a
When it is determined that the worker has left the storage device 10 based on the detection result of the infrared sensor 21b, the control panel 29 transmits the second drive to the motor fan 28 of each fan filter unit 26 until a predetermined time has elapsed from that point. AC voltage is supplied. Therefore, even if the amount of dust generated by the worker is greater than the standard and the cleanliness when leaving the storage device 10 is lower than the first reference value, the cleanliness can be reduced to the first standard in a shorter time than before. It returns to high cleanliness above the value.

As described in detail above, according to the storage device of the present embodiment, the following effects can be obtained. (1) The person detection means (infrared sensors 21a, 21b) detects that a person has entered the storage device 10, and based on the detection result, the cleaning ability control means (control panel 29) determines that at least the person The operation control is performed so that the cleaning ability of the air cleaning means (fan filter unit 26) is larger than that when no person is inside when the vehicle is inside.

Therefore, even when a person enters the storage device 10, the cleanliness in the storage device 10 is maintained so as not to be significantly reduced from at least the normal predetermined cleanliness. as a result,
It is possible to suppress a decrease in cleanliness in the storage device 10 due to a person entering the room without causing a large increase in power consumption.

(2) The same storage unit (storage unit 15) having the storage unit 22 is arranged along the path along which the stacker crane 13 moves to constitute the storage device 10 having the required number of storage units 22. . An air purifier (fan filter unit 26) is provided for each storage unit 15, and the cleaning ability control means (control panel 29) controls the operation of each air purifier. Therefore, the storage devices 10 having different numbers of storage units 22 can be formed using a common storage unit.

(3) Storage unit (storage unit 15)
In the above, an air purifier (fan filter unit 26) having the same cleaning ability provided for each storage unit 22 is connected to the air introducing passage 23 provided below each storage unit 22 through the passage 1.
The air on the two sides was introduced from the back side of each storage unit 22 through the communication passage 24, and the introduced air was filtered and discharged from each storage unit 22 to the passage 12 side. Therefore, the storage unit 22
Irrespective of the upper and lower positions, the cleanliness in each storage unit 22 can be made substantially equal.

(4) Cleaning ability control means (control panel 29)
Is a human detecting means (first and second infrared sensors 21a, 21a).
From the time point when it is determined that the person has left the storage device 10 based on the detection result of 1b) to the time point when a predetermined time elapses, the cleaning ability of the air cleaning means (fan filter unit 26) is set to be lower than normal. The operation is controlled so as to keep it large. Therefore, even when the cleanliness is lower than the predetermined cleanliness when the person leaves the storage device 10, the cleanliness returns to the predetermined cleanliness in a short time.

(5) Person detecting means (infrared sensor 21)
The storage device 10 is provided with a pyroelectric infrared sensor.
It is possible to reliably detect the person by sensing the infrared rays emitted by the person entering the inside.

The embodiment is not limited to the above embodiment, but may be modified as follows. The storage unit 15 is not limited to the storage unit having three storage units 22, but may be a storage unit having two or four or more storage units.

The cleaning capacity control means (control panel 29)
The air purifying means may be controlled so that the cleaning ability of the air purifying means is larger than usual only while a person is detected by the person detecting means. Also in this case, it is possible to suppress a decrease in cleanliness due to a person entering the storage device 10 without causing a large increase in power consumption.

The storage unit includes a storage unit provided with a plurality of storage units 22 arranged vertically, and a blower unit provided below the storage unit to introduce air from the passage 12 and feed it by pressure. And a duct unit for guiding the air pumped from the blower unit to the back side of each storage unit 22 and filtering the air pumped from the blower unit unit to the back side of each storage unit 22. It is good also as a structure provided with each filter. Also in this case, in the storage device in which the entire storage unit is formed by the storage unit, it is possible to suppress a decrease in cleanliness due to a person entering the room.

The storage unit in which the storage shelf 14 is formed by the storage unit (storage unit 15) is not limited to the storage device.
The present invention may be implemented in a storage device that is integrally formed as a whole. In this case, the air purifying means is not limited to the air purifier (fan filter unit 26) provided for each storage unit, but may be an air purifier provided at an appropriate place for a predetermined number of storage units. When an air purifier is provided for each storage unit, it is possible to maintain the cleanliness of all the storage units higher than the cleanliness outside the storage unit, and without causing a significant increase in power consumption, It is possible to suppress a decrease in cleanliness due to the entry.

The method of changing the rotation speed of the motor fan 28 is not limited to the method using the frequency converter 34 when the motor is a three-phase cage induction motor. Alternatively, for example, a motor capable of switching the number of poles may be used, and the rotation speed may be changed by switching the number of poles. In the case of a three-phase winding type induction motor, slip can be controlled to change the rotation speed.

In the case of a single-phase squirrel-cage induction motor, the rotation speed can be changed by switching the number of poles. In the above embodiment, when the worker is detected by the first or second infrared sensor 21a, 21b,
The rotation speed of only the motor fan 28 of the fan filter unit 26 in a limited area on the work space 17 side may be switched from the first rotation speed to the second rotation speed.
In this case, it is possible to suppress a decrease in cleanliness due to a person entering the storage device 10 without increasing power consumption of the motor fan 28 of the storage device 10 as a whole.

A spare air purifier is provided in addition to the air purifier normally used when a person is not in the room, and the spare air purifier is installed at least while a person enters the room. The cleaning capability may be increased by operating the air purifier in addition to the air purifier that is normally used.

The transfer means is not limited to the stacker crane 13 and may be, for example, a monorail type crane suspended from a ceiling and capable of vertically moving a carriage for transferring storage items. Alternatively, it may be an unmanned transfer truck of a tracked type, in which a stage for transferring stored items can be moved up and down.

The present invention is not limited to a storage device installed in a clean factory for manufacturing semiconductor devices, but may be applied to a storage device used in a factory in a normal environment. Hereinafter, technical ideas other than the claims that can be grasped from the embodiment will be described together with their effects.

(1) In the storage device according to claim 1, the air purifying means is provided for each of the storage units,
An air purifier comprising: a filter provided between the storage unit and the outside of the storage unit; and a motor fan for pumping air outside the storage shelf to the filter, wherein the cleaning capability control unit includes: The motor fan is controlled to a predetermined first rotation speed and a second rotation speed higher than the first rotation speed.

According to such a configuration, while keeping the cleanliness of all the storage units higher than that of the outside of the storage units, the cleanliness caused by a person entering the room can be maintained without a large increase in power consumption. Can be suppressed.

(2) In the storage device according to any one of claims 1 to 4, the human detecting means includes a pyroelectric infrared sensor. According to such a configuration, a person can be reliably detected by sensing infrared rays emitted by a person who has entered the storage device.

[0054]

According to the first to fourth aspects of the present invention, it is possible to suppress a decrease in cleanliness caused by a person entering the storage device without causing a large increase in power consumption. .

According to the second aspect of the present invention, storage devices having different numbers of storage units can be formed by using a common storage unit. According to the invention described in claim 3,
The degree of cleanliness in each storage unit can be made substantially uniform regardless of the position of the storage unit above and below.

According to the fourth aspect of the present invention, it is possible to shorten the time during which the state in which the cleanliness is lower than the predetermined reference value continues.

[Brief description of the drawings]

FIG. 1A is a schematic plan sectional view of a storage device, and FIG. 1B is a schematic side view of the same.

FIG. 2 is a sectional view taken along line AA in FIG.

FIG. 3 is an electric wiring diagram of a storage device.

[Explanation of symbols]

11 room, 13 stacker crane constituting transfer means, 15 storage unit as storage unit, 18 conveyor similarly, 21a first infrared sensor constituting human detection means, 21b second infrared sensor similarly Reference numeral 22: storage unit, 23: air introduction unit, 24: communication path, 25: pre-filter constituting air purifying means, 26: main filter unit as air purifier constituting air purifying means;
29 ... Control panel as cleaning capacity control means constituting the human detection means.

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) B65G 1/00-1/20 F24F 7/06

Claims (4)

(57) [Claims] 1. A room which is formed in a sealed state with respect to the outside and in which a person can enter, a plurality of storage units provided in the room and on which storage articles are respectively placed, A transfer means for transferring storage items between the storage unit and the outside of the room, and filtering air supplied from the room and supplying the filtered air to the storage unit.
A man-detecting unit for detecting that the air cleaning means for filtering the air by circulating the air in the room, where a person is within the room by discharging into the room from Rutotomoni the storage unit, Based on the detection result of the person detecting means, when a person is not detected by the person detecting means, a predetermined degree set to maintain the cleanliness in the room at a high degree of cleanliness equal to or higher than a predetermined degree of cleanliness. Operating and controlling the air purifying means with a purifying ability,
When a person is detected by the person detecting means, at least while a person is detected by the person detecting means, a cleaning ability control means for controlling the operation of the air cleaning means with a cleaning ability greater than the predetermined cleaning ability. And a storage device comprising: 2. The transfer means includes a stacker crane, and each of the storage units is formed in the same shape, and each of the storage units is arranged in a storage unit body sequentially arranged on both sides thereof along a path along which the stacker crane moves. Wherein the air purifier is an air purifier independently provided in the storage unit, wherein the cleaning capability control unit operates the air purifier in each of the storage units. The storage device according to claim 1, which is controlled. 3. The storage unit body is formed in substantially the same shape, and only the stacker crane side is opened in a room, and a plurality of storage units are provided so as to be vertically arranged. An air introduction passage provided in a lower portion and opening into the room on the stacker crane side; and a communication passage communicating the air introduction passage to a side surface opposite to the opening side of each of the storage units; The purifier is provided on the opposite side of the opening side for each of the storage units and has substantially the same cleaning ability, and introduces and introduces air in the room through the communication passage and the air introduction unit. The storage device according to claim 2, wherein air is filtered and supplied from each storage unit into the room. 4. The cleaning ability control means according to claim 1, wherein said cleaning means controls said air cleaning means to have a cleaning ability greater than a predetermined cleaning ability until a predetermined time period elapses after no more persons are detected by said human detection means. Operation control based on ability
The storage device according to claim 1.