JP3175864B2 - Guide rod device for analysis and observation equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION The present invention relates to an operating rod which is supported by a bearing so that the operating rod can be moved and rotated in the axial direction, and a flange integrated with the bearing and a flange on the body chamber side are connected by a bellows. The present invention relates to a guide rod device for an analysis and observation device in which the distal end of an operating rod is inserted into a main body chamber and the other end is operated to move and rotate the operating rod in the axial direction.

[0002]

2. Description of the Related Art In an Auger electron analyzer, an X-ray photoelectron spectrometer, a scanning tunneling microscope, a combination thereof, and the like, a sample is analyzed and observed in a high vacuum state. Therefore, in order to perform these operations efficiently, the apparatus is divided into a plurality of vacuum chambers including an observation room, an analysis room, a sample exchange room, and the like. In addition, these samples and the like are loaded, mounted, unloaded, transported, and the like while being cut off from the outside of the vacuum chamber. Conventionally, an MGL (magnetic coupling type guide rod) device is used for these operations.

FIG. 2 is a cross-sectional view showing a configuration example of a conventional MGL device, and its outline will be described below. Conventional MGL
As shown in FIG. 2 (a), the apparatus fixes the magnetic pole block 2 to the end of the operating rod 1 guided by the bearing 4, and arranges the magnet 3 outside through the pipe 5 to perform magnetic coupling. The operation of the magnet 3 drives the magnetic pole block 2 to move or rotate the operation rod 1 in parallel.

[0004] One end of the pipe 5 is connected to a vacuum chamber mounting flange 8 through a flange 6 and a bellows 7 to shut off the atmosphere. Then, between the flange 6 and the vacuum chamber mounting flange 8 is supported and fixed by a plurality of bolts 9 and nuts 10, as shown in FIG. At the same time, the angle of the surface of the flange 6 is adjusted to adjust the position of the operation rod 1 at the distal end portion 11. The stopper 12 adjusts the stroke of the operation rod 1, and adjusts the mounting position of the operation rod 1 to adjust the contact position of the magnet 3.

[0005]

However, in the above-described conventional MGL device, the stroke of the operating rod 1 is adjusted by the magnet 3 and the magnetic pole block 2, and the operating rod 1 is adjusted by a plurality of bolts 9 and nuts 10. Although the position of the distal end portion 11 is adjusted, the adjustment using the bolt 9 and the nut 10 has a problem that the distal end portion 11 of the operation rod 1 cannot be easily aligned. That is, the bolt 9 and the nut 1
In the adjustment by 0, not only the alignment but also the stroke changes at the same time. Therefore, even if the stroke is adjusted by the magnet 3 and the magnetic pole block 2, by performing the alignment, a minute displacement or the like at the axial position can be obtained. Will occur.

Further, in the adjustment using the bolts 9 and the nuts 10, there is no reference and a fulcrum for the surface angle of the flange 6, so that not only the adjustment is difficult, but also the reproducibility of the alignment cannot be obtained. was there.

Further, after the adjustment with the bolts 9 and the nuts 10, the distance between the surfaces of the flange 6 and the vacuum chamber mounting flange 8 changes. This has hindered the improvement of the positioning accuracy and often wastes time in positioning.

The present invention solves the above-mentioned problems, and provides a guide rod device for an analysis and observation device in which the positioning of the distal end portion of the operation rod can be easily performed and the reproducibility of the positioning can be obtained. The purpose is to do so.

[0009]

For this purpose, the present invention provides an operation rod which is supported by a bearing so as to be able to move and rotate in the axial direction, and is provided between a flange integrated with the bearing and a main body chamber side flange. In an analysis and observation device guide rod device in which the tip of the operation rod is inserted into the main body chamber and the other end is operated for axial movement and rotation at the other end, a flange is connected to the main body side flange. A bearing ring is provided therebetween, two shafts passing through the center of the bearing ring are set, and the bearing ring and the flange and the bearing ring and the body chamber side flange are supported so as to be rotatable with the respective shafts. An adjusting means for adjusting the surface angle of the chamber-side flange is provided.

[0010]

According to the guide rod device for the analyzing and observing device of the present invention,
A bearing ring is provided between the flange and the body chamber side flange, and two axes passing through the center of the bearing ring are set, and the bearing ring and the flange, and the bearing ring and the body chamber side flange are rotatable about each axis. And the adjusting means for adjusting the surface angle between the flange and the main chamber side flange, so that the adjusting means uses the center of the bearing ring as a fulcrum and does not affect the stroke. The angle can be adjusted. Therefore, adjustment of the tip position of the operation rod is facilitated, and reproducibility of the alignment is obtained.

[0011]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a view showing one embodiment of a guide rod device for an analysis and observation device according to the present invention, wherein 1 is an operation rod, 2 is a magnetic pole block, 3 is a magnet, 4 is a bearing, 5 is a pipe, 6 is a flange, 7 is a bellows, 8 is a vacuum chamber mounting flange, 9 is a bolt, 10 is a nut, 11 is a tip, 12 is a stopper, 1
3 is a bearing ring, 14a, 14b, 15a, 15b are shafts, 16a, 16b, 17a, 17b are bearings, 18 and 1
Reference numeral 9 denotes a micro head, and reference numerals 20 and 21 denote compression coil springs.

In FIG. 1, the bearing ring 13 is located between the flange 6 and the vacuum chamber mounting flange 8, and the shafts 14a, 14b,
The shafts 15a and 15b are respectively attached and fixed at left and right positions. Then, facing the shafts 14a, 14b attached and fixed at the upper and lower positions on the outer periphery of the bearing ring 13, the bearings 16a, 1b are attached to the flange 6 as shown in FIG.
6b is fixed, and the bearings 17a and 17b are fixed to the vacuum chamber mounting flange 8 as shown in (c) so as to face the shafts 15a and 15b mounted and fixed at the left and right positions. The shafts 14a and 14b and the bearings 16a and 16b are located on axes passing through the center of the bearing ring 13, respectively, and rotatably support the flange 6 on the bearing ring 13. Similarly, the shafts 15a and 15b and the bearings 17a and 17b are also on the shaft passing through the center of the bearing ring 13, and rotatably support the vacuum chamber mounting flange 8 on the bearing ring 13.

Further, in the flange 6, the horizontal shaft 15
b, micro heads 18 and 19 are provided outside the bearing 17b and at a position outside the shaft 14b and the bearing 16b at an angle shifted by 90 degrees from the bearing 17b.
Compression coil springs 20 and 21 are provided at positions opposite to the operation rod 1 facing 8 and 19, respectively. Micro head 18,
Reference numeral 19 denotes a member for maintaining a constant distance between the flange 6 and the vacuum chamber mounting flange 8, and a compression coil spring 20,
Reference numeral 21 is attached so as to be sandwiched between the flange 6 and the vacuum chamber attachment flange 8. These are means for adjusting the surface angle between the flange 6 and the vacuum chamber mounting flange 8.

The operation rod 1 to the vacuum chamber mounting flange 8, the tip 11, and the stopper 12 are the same as those of the conventional apparatus described above with reference to FIG.
And can move and rotate in the axial direction. The operation of the axial movement and rotation is performed by a magnet 3 magnetically coupled via a pipe 5 to a magnetic pole block 2 fixed to an end of an operating rod 1. The flange 6 provided at one end of the pipe 5 and the vacuum chamber mounting flange 8 are connected by a bellows 7, and the bearing ring 13 is mounted outside the bellows 7 as described above.

Next, the operation function of the guide rod device configured as described above will be described. With respect to the surface angle of the flange 6 with respect to the vacuum chamber mounting flange 8, the shafts 14a and 14b and the bearings 16a and 16b provide an adjustment fulcrum for right and left inclination, and similarly, the shafts 15a and 15b and the bearings 17a and 17a.
17b provides a vertical fulcrum adjustment fulcrum. Therefore, by changing the distance to the vacuum chamber mounting flange 8 by the micro head 18, fine adjustment of the left and right angles can be performed.
By changing the distance to the vacuum chamber mounting flange 8 with the use of 9, the vertical angle can be finely adjusted. At this time, the compression coil springs 20 and 21 always press the tips of the micro heads 18 and 19 against the vacuum chamber mounting flange 8 by the reaction force so that the flange 6 and the vacuum chamber mounting flange 8 are accurately inclined and fixed. I have.

That is, when the micro head 18 is loosened, the distance between the flange 6 and the vacuum chamber mounting flange 8 is changed by the compression coil spring 20 with the shafts 14a and 14b as fulcrums.
The reaction force causes the micro head 18 side to become narrower and the compression coil spring 20 side to become wider. Conversely, when the micro head 18 is tightened, the distance between the flange 6 and the vacuum chamber mounting flange 8 is reduced by the compression coil spring 20 with the shafts 14a and 14b as fulcrums.
Is further compressed, and the side of the micro head 18 becomes wider and the side of the compression coil spring 20 becomes narrower. Thus, the adjustment of the micro head 18 changes the left and right distance between the flange 6 and the vacuum chamber mounting flange 8. Micro head 19
In the same manner, the vertical distance between the flange 6 and the vacuum chamber mounting flange 8 changes. In this case, the fulcrum is the intersection of the shafts 14a, 14b, 15a, and 15b, that is, the axis point of the operating rod 1, so that the operating rod 1 can be changed to an arbitrary angle while the axial direction is fixed.

It should be noted that the present invention is not limited to the above embodiment, and various modifications are possible. For example, in the above embodiment, the shaft is provided on the outer peripheral side of the bearing ring. However, the shaft may be provided on the inner peripheral side, or the shaft passing through the center of the bearing ring may be set so as to be rotatable. If the chamber-side flanges are supported, it is not always necessary to divide the bearing ring into four equal parts and shift the shaft by 90 ° to provide the shaft. Further, the distance between the flange 6 and the vacuum chamber mounting flange 8 is adjusted by using the micro head and the compression coil spring. However, the configuration may be such that the flange is tapped to adjust without using the compression coil spring. Furthermore, although the stroke operation has been described as a mechanism composed of a magnet and a magnetic pole block, it goes without saying that a gear mechanism or other operation mechanism by operating a handle may be employed.

[0018]

As is apparent from the above description, according to the present invention, a bearing ring is provided between a flange and a body chamber side flange, and an axis passing through the center of the bearing ring is set so as to be rotatable. The bearing ring and the flange and the bearing ring and the main body chamber side flange are supported, and the adjusting means for adjusting the surface angle of the flange and the main body chamber side flange is provided. The surface angle of the body chamber side flange can be adjusted. In addition, since there is no change in the axial center distance between the flanges, it is possible to adjust the surface angle without affecting the stroke. Therefore, adjustment and fine adjustment of the tip position of the operation rod are facilitated, and reproducibility of the alignment can be obtained.

[Brief description of the drawings]

FIG. 1 shows a guide rod device for an analysis and observation device according to the present invention.
It is a figure showing an example.

FIG. 2 is a cross-sectional view illustrating a configuration example of a conventional MGL device.

[Explanation of symbols]

1 ... operation rod, 2 ... magnetic pole block, 3 ... magnet, 4 ... bearing,
5 pipe, 6 flange, 7 bellows, 8 vacuum chamber mounting flange, 9 bolt, 10 nut, 11 tip, 12 stopper, 13 bearing ring, 14a, 14
b, 15a, 15b ... axis, 16a, 16b, 17a, 1
7b: bearing, 18 and 19: micro head, 20 and 21
… Compression coil spring

Claims (1)

(57) [Claims] An operating rod is supported by a bearing so as to be able to move and rotate in the axial direction, and a flange integrated with the bearing and a flange on a main body chamber side are connected by a bellows. In a guide rod device for an analyzing and observing device which is inserted into a main body chamber and controls the axial movement and rotation of an operation rod at the other end, a bearing ring is provided between a flange and a main body side flange. Set two axes that pass through the center of
While supporting the bearing ring and the flange and the bearing ring and the body side flange so that it can rotate on each shaft,
A guide rod device for an analyzing and observing device, comprising an adjusting means for adjusting a surface angle between the flange and the main chamber side flange.