JP3181192B2 - Testing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a test apparatus for sequentially testing a test object in a vacuum chamber.
The present invention relates to an electron beam tester for testing a circuit operation of an SI (Large Scale Integrated Circuit) device.

[0002]

2. Description of the Related Art In recent LSI device tests, the pattern inside a chip element has become ultra-fine with a line width of 1 μm or less as the degree of integration increases. In probing, there is a risk of destroying the pattern in the device. For this reason, an electron beam tester capable of testing a circuit operation by probing a pattern without directly contacting an LSI device has been put to practical use.

Conventionally, as the electron beam tester, FIG.
No. 0 (JP-A-62-88332). This electron beam tester sets a sample (LSI device) in a high vacuum,
An LSI is irradiated with an electron beam while receiving a control signal, and various parameters representing a circuit operation state are measured by utilizing the fact that the energy of secondary electrons generated varies depending on the potential of a wiring. is there.

That is, in FIG. 10A, an electron beam irradiation device 1 irradiates an LSI device 2 described later with an electron beam. The vacuum chamber 3 has a case 5 movable with respect to a table 4 to be described later, and a vacuum seal member 6 provided on the case 5 side between the case 5 and the table 4 to keep the case 5 airtight. are doing. The LSI device 2 is one of the devices under test, and is subjected to a performance test by being irradiated with an electron beam.

[0005] The terminal of the LSI device 2 is inserted into the socket 7 mounted on the socket mounting base 10, and the LSI device 2 is electrically connected. The test head 8 can be moved up and down with respect to the table 4 by a moving device (not shown).
2, a drive signal is input, and the output from the LSI device 2 with respect to the drive signal is monitored, and the quality of the LSI device 2 is evaluated.

The table 4 is connected to an XY driving device (not shown) and is provided so as to be horizontally movable, and sequentially moves the irradiation position of the electron beam on the LSI device 2. An electric wire 9 connecting the test head 8 and the socket 7 is stored in a storage case 11. The storage case 11 is fixed on the test head 8 and the socket mounting table 1
0 is fixed to the test head 8, and the airtightness of the vacuum chamber 3 is maintained by making close contact with the table 4 to eliminate a gap with the table 4. The vacuum seal 12 is connected to the electric wire 9 in the storage case 11.
Is kept in a vacuum.

FIG. 10B is a cross-sectional view taken along the line AA in FIG. In FIG. 10B, the storage case 11 has a circular cross section. The wires 9 are arranged so as to be easily connected to the terminals of the socket 7. Further, the storage case 11 and the vacuum seal 12 are configured to prevent air from entering the vacuum chamber 3.

However, in the above-mentioned electron beam tester, only one sample can be set on the stage 4 which is a sample mounting stage at a time. Therefore, when performing the LSI device evaluation analysis on a plurality of samples, the sample must be mounted on the sample mounting table (that is, the vacuum chamber is opened to the atmosphere) several times, and the vacuum state of the vacuum chamber 3 is changed. Has the drawback that it takes a long time to recover the data and a great amount of time is lost.

In order to solve the above-mentioned drawbacks, Schlumberger has developed an electron beam tester capable of mounting a plurality of samples on a sample mounting table. FIG.
FIG. 2 is a configuration diagram of an electron beam tester on which the plurality of samples can be mounted. However, FIG. 11A is a longitudinal sectional view, and FIG.
FIG. 1 (b) is a sectional view taken along the line BB in FIG. 11 (a).

In FIG. 11, 21 is an LSI tester head, 22 is an electron gun, 23 is a sample mounting table drive unit, 24 is a rotating shaft, 25 is a pulley, 26 is a rotary sample mounting table, and 27 is a rotary force transmission. Wire, 28 is a sample chamber, 29 is L
A connector between the SI tester head 21 and the sample 30b (LSI device), and 31 is a rotation shaft on the sample mounting table side.

In the electron beam tester, the sample 30b is exchanged for the sample 30a without opening the sample chamber 28 to the atmosphere by rotating the pulley 25 by the sample mount driving unit 23 in the atmosphere. still,
When the test of the two samples 30a and 30b is completed, the sample chamber 28 is opened to the atmosphere, the upper part of the sample chamber 28 is removed, and both samples 30a and 30b are replaced with new samples.

[0012]

However, the above-mentioned 2)
In the electron beam tester capable of mounting one sample on the sample mounting table, the sample 30b is turned into the sample 30a by rotating the pulley 25 by the sample mounting table driving unit 23 as described above.
Before that, it is necessary to temporarily move the connector section 29 upward to disconnect the electrical connection between the sample 30b and the LSI tester head 21. Further, after the positions of the sample 30b and the sample 30a are switched, the connector 29
Is moved downward, and the sample 30a and the LSI tester head 21 are moved.
And must be electrically connected. Therefore, there is a problem in that the operation of exchanging the mounted samples by rotating the movable sample mounting table 26 without exposing the sample chamber 28 to the atmosphere is very troublesome.

A rotary sample mounting table 26 on which the two samples 30a and 30b are mounted is connected to a pulley 25 by wires 27.
Cannot be easily removed from the sample chamber 28. Therefore, the above two samples 3
There is also a problem that the work of exchanging 0a and 30b with two new samples is very troublesome.

SUMMARY OF THE INVENTION An object of the present invention is to provide a test apparatus capable of easily exchanging a plurality of test objects mounted on a sample mounting table in a vacuum chamber with a simple operation.

[0015]

According to a first aspect of the present invention, there is provided a test apparatus for sequentially testing a plurality of devices under test in a vacuum chamber. A test section that is electrically connected to obtain test results of the connected DUT, and is detachably installed in the vacuum chamber, and a plurality of DUTs are placed side by side in a horizontal direction; While moving along a path that is bent or curved up and down to electrically connect the individual DUTs sequentially to the test section each time it is located at one of the upper and lower ends of the path. A sample mounting table that separates all the DUTs from the test section each time it is located at the other upper and lower ends of the path, and a sample mounting table that drives the sample mounting table to move along the path. It is characterized by having a table drive unit.

According to a second aspect of the present invention, in the test apparatus according to the first aspect of the present invention, the sample mounting table driving unit drives the sample mounting table in a horizontal direction, and the vacuum chamber extends along the path. The sample mounting table has a guide member that is inserted into the guide groove of the vacuum chamber and moves while being guided in the guide groove.

According to a third aspect of the present invention, in the test apparatus according to the second aspect, the vacuum chamber is continuous with the guide groove, and a guide member of the sample mounting table is placed above the guide groove. It is characterized by having a vertical groove to be guided from the inside.

[0018]

According to the first aspect of the present invention, the sample mounting table installed in the vacuum chamber is driven by the sample mounting table drive unit and moves along a path bent up or down. Each time the sample mounting table is positioned at one of the upper and lower ends of the path, each of the DUTs placed side by side in the horizontal direction is sequentially electrically connected to the test section. On the other hand, every time it is located at the other upper and lower ends of the above route,
The connection between all the DUTs and the test section is cut off. In this manner, by one operation of driving the sample mounting table by the sample mounting table drive unit, switching of the device under test electrically connected to the test unit, and electrical connection between the device under test and the test unit. The connection and the separation are performed, and the test unit sequentially obtains the test results of the plurality of DUTs.

Further, when the test for all the DUTs mounted on the sample mounting table is completed, the sample mounting table is removed from the vacuum chamber, and the tested DUT is removed from the vacuum chamber. It is often replaced with a new test object.

In the invention according to the second aspect, the sample mounting table driving unit drives the sample mounting table installed in the vacuum chamber in the horizontal direction. Then, the sample mounting table moves along the path while the guide member is guided by the guide groove formed in the vacuum chamber. In this way, each time the sample mounting table is positioned at one of the upper and lower ends of the path, each of the DUTs placed side by side in the horizontal direction is electrically connected to the test section sequentially. on the other hand,
Every time it is located at the other upper or lower end of the path, the connection between all the DUTs and the test section is cut off.

In the invention according to claim 3, when the guide member of the sample mounting table is inserted into the guide groove of the vacuum chamber, the guide member is guided by a vertical groove continuous with the guide groove. It is inserted from above. Also,
The guide member thus inserted into the guide groove,
It is guided by the vertical groove and escapes upward from the guide groove. Thus, the sample mounting table is easily attached to and detached from the vacuum chamber via the vertical groove.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the illustrated embodiments. FIG. 1 is a configuration diagram of a test apparatus in the present embodiment, and FIG. 2 is a configuration diagram of an electron beam tester on which the test apparatus shown in FIG. 1 is mounted.

In FIG. 2, reference numeral 41 denotes an LSI tester,
Denotes an LSI tester head, 43 denotes a vacuum chamber, and 44 denotes a computer unit. Note that the LSI tester head 42 includes the test head 8 in the electron beam tester shown in FIG.
Alternatively, the LS in the electron beam tester shown in FIG.
It is the same as the I-tester head 21, but its mounting direction is opposite to that of FIG. 10 as in FIG.

In FIG. 1, reference numeral 45 denotes a sample mounting table storage unit,
46 is a movable sample mounting table, and 47 is an electron gun. The movable sample mounting table 46 is stored in a sample mounting table storage section 45 attached to the upper part of the vacuum chamber 43, and has two samples (LSI devices) 48a, 4 on the lower surface.
8b are mounted in parallel and fixed by fixing means (not shown). One end of a driving rod 49 extending in the horizontal direction is attached to one end surface of the movable sample mounting table 46, and a rack is formed on the other end of the driving rod 49. It meshes with a pinion 75 provided at the tip of the rotation shaft of the mounting base drive unit 50. Then, the movable sample mounting table 46 is driven in the horizontal direction by moving the driving rod 49 in the horizontal direction by the sample mounting table driving unit 50. Thus, when the movable sample mounting table 46 is located farthest from the sample mounting table drive unit 50, the sample 48b is located at the position where the electron gun 47 irradiates the electron beam. On the other hand, when the movable sample mounting table 46 is located at the position closest to the sample mounting table driving unit 50, the sample 48a is located at the electron beam irradiation position.

On the upper surface of the vacuum chamber 43 and above the electron gun 47, a substantially rectangular stepped hole 43 is provided.
a is provided, and the load module 6 is provided in the stepped hole 43a.
5 are fitted. The load module 65 separates the vacuum in the vacuum chamber 43 from the atmosphere and transmits a control signal from the LSI tester head 42 to the samples 48a and 48b.

FIG. 3 is a plan view (FIG. 3 (a)), a side view (FIG. 3 (b)) and a front view (FIG. 3 (c)) of the movable sample mounting table 46. The movable sample mounting table 46 has a substantially flat plate shape, and the sample mounting holes 5 for fitting the samples 48a and 48b are provided at two central portions.
2a, 52b are drilled, and a total of four guide rods 53 as guide members are provided at both ends of both side surfaces 54, 54, respectively.
Are provided to protrude in the horizontal direction. In the center of one end face 55 of the movable sample mounting table 46, a vertically long rectangular drive rod engaging hole 56 is bored, and a square drive rod engaging groove 57 communicating with the drive rod engaging hole 56 is formed inside. Provided.

FIG. 4 is a side view (FIG. 4 (a)) and a plan view (FIG. 4 (b)) of the sample mounting table storage section 45. The sample mounting table storage section 45 is provided with two side plates 58 and both side plates 58 and 5 arranged side by side.
It is roughly constituted by a connecting member 59 for connecting one ends of 8. The sample mounting table drive unit 50 is mounted on a mounting member 60 provided at the other end of the one side plate 58. The V-shaped guide grooves 61 and 6 are formed in the both side plates 58.
1 are further provided, and two vertical grooves 62, 62 for opening the lowermost portions of the guide grooves 61, 61 to the upper edge of the side plate 58 are further provided. Then, the guide groove 61 and the vertical groove 6
The width of 2 is the guide rod 53 in the movable sample mounting table 46.
And the distance between the vertical grooves 62 is equal to the distance between the guide rods 53 on the movable sample mounting table 46. Movable sample mounting table 46 having the above configuration
The sample mounting table storage section 45 is detachably connected as follows.

FIG. 5 is an explanatory view of the procedure for storing the movable sample mounting table 46 in the sample mounting table storage section 45. As shown in FIG. 5 (a), the four guide rods 53 of the movable sample mounting table 46 are inserted into the four vertical grooves 62 of the sample mounting table storage section 45 from the upper side. 46 is stored in the sample mounting table storage section 45. Then, as shown in FIG. 5B, a T-shaped closing jig 64 having the same width as the vertical groove 62 is inserted into each vertical groove 62, and
2 is closed. After that, an engaging member 63 provided at a right angle to the one end of the driving rod 49 inserted into the hole of the fixing jig 51 and forming a T-shaped horizontal bar is provided on one end surface of the movable sample mounting table 46. 55 is inserted into a drive rod engaging groove 57 from a drive rod engaging hole 56 drilled. Further, the engagement member 63 of the drive rod 49 is further rotated by 90 degrees in the drive rod engagement groove 57 (that is, the engagement member 63 is positioned in the horizontal direction). Then, since the driving rod engaging hole 56 has a vertically long rectangle, the engaging member 63 of the driving rod 49 is moved by the driving rod engaging groove 56 as shown in FIG. It is locked in 57. Then, the fixing jig 5
1 is inserted into the tip of the rotating shaft of the sample mounting table driving unit 50, so that the rack of the driving rod 49 is moved to the sample mounting table driving unit 5
0 is engaged with the pinion 75.

Incidentally, the movable sample mounting table 46 housed and coupled in the sample mounting table storage section 45 in this way follows the above-described reverse process, thereby performing the sample mounting table storage section 45.
It can be easily removed from. Therefore, the two samples 48a and 48b mounted on the movable sample mounting table 46
Is completed, the movable sample mounting table 46
Is removed from the sample mounting table storage section 45, and both samples 48a, 4
8b can be replaced with two new samples with good workability.

As described above, in the movable sample mounting table 46 stored in the sample mounting table storage section 45, the four guide rods 53 are provided with the guide grooves 61 of the sample mounting table storage section 45.
It is movable within. Therefore, when the driving rod 49 is driven in the horizontal direction by the sample mounting table driving unit 50, the movable sample mounting table 54 is also moved along with the guide rod 53.
Is guided by the guide groove 61 and moves in the horizontal direction. At this time, since the guide groove 61 has a V-shape, the movable sample mounting table 54 moves in the horizontal direction and reciprocates only in the vertical direction at the same time.

FIG. 6 shows the horizontal positional relationship between the load hole fitting stepped hole 43a formed in the upper surface of the vacuum chamber 43 and the sample mounting table storage section 45. As can be seen from the figure, the stepped hole 43a is drilled such that its center is located at the center of the sample mounting table storage section 45. FIG. 7 shows a plan view (FIG. 7 (a)) and a side view (FIG. 7 (b)) of the load module 65 fitted into the stepped hole 43a of the vacuum chamber 43. When the load module 65 is mounted on the vacuum chamber 43, a portion of the load module 65 located directly above the electron gun 47 has a telescopic function for transmitting a control signal from the LSI tester head 42 to the samples 48a and 48b. Pin penetrating member 67 through which a contact probe 66 which is a contact pin of
Are fitted. The joint surface between the stepped hole 43a and the load module 65 and the joint surface between the load module 65 and the pin penetrating member 67 are completely shielded so that the degree of vacuum in the vacuum chamber 43 does not decrease.

As described above, the test apparatus having the sample mounting table storage section 45 storing the movable sample mounting table 46 operates as shown in FIG. FIG. 8A shows that the drive rod 49 is moved in the direction away from the sample mounting table drive unit 50 by the sample mounting table drive unit 50, and the guide rod 53 of the movable sample mounting table 46 is moved to the sample mounting table storage unit 45. 3 shows a state in which the guide groove 61 is located farthest from the sample-mounting-table driving unit 50. In this case, of the samples 48a and 48b mounted on the movable sample mounting table 46, the sample 48b is located directly above the electron gun 47 (that is, the test position). At this time, since the guide rod 53 of the movable sample mounting table 46 is at the highest position in the guide groove 61, the movable sample mounting table 4
6 is also at the top. As a result, the contact probe 68b of the sample 48b protrudes from the upper end of the sample mounting table storage unit 45, and the contact probe 66b of the load module 65
(Represented by two wires located at both ends). The control signal from the LSI tester head 42 is transmitted to the contact probe 6 of the load module 65.
6, the output from the sample 48b in response to the control signal is supplied to the load module 65.
Is supplied to the LSI tester head 42 via the contact probe 66.

FIG. 8B shows that the driving rod 49 is moved from the position shown in FIG. 8A toward the sample mounting table driving unit 50 by the sample mounting table driving unit 50, and the guide rod 53 is V-shaped. 5 shows a state at an intermediate position in the guide groove 61 of FIG.
In this case, since the guide rod 53 is at the lowest position in the guide groove 61, the movable sample mounting table 46 is also at the lowest position. As a result, the contact probe 68b of the sample 48b separates from the contact probe 66 of the load module 65.

FIG. 8C shows that the driving rod 49 is moved by the sample mounting table driving unit 50 from the position shown in FIG. 8B toward the sample mounting table driving unit 50, and the guide rod 53 is guided. This shows a state where the groove 61 is located at a position closest to the sample mounting table drive unit 50. In this case, the sample 48a
Is located at the test position. At that time, guide rod 5
Since sample 3 is at the highest position in guide groove 61, sample 4
The contact probe 68a of 8a is connected to the sample mounting table storage section 45.
Projecting from the upper end of the load module 65 and connected to the contact probe 66 of the load module 65. The control signal from the LSI tester head 42 is supplied to the sample 48a via the contact probe 66 of the load module 65, while the output from the sample 48a in response to the control signal is supplied via the contact probe 66 of the load module 65. It is supplied to the LSI tester head 42.

When the samples 48a and 48b are exchanged with each other, the movable sample mounting table 46 moves up and down.
The position of the engaging member 63 at one end of the sample mounting table storage unit 4
Move up and down with respect to 5. On the other hand, the position of the sample mounting table drive unit 50 in the vertical direction with respect to the sample mounting table storage unit 45 does not change. Therefore, in the present embodiment, the driving rod 49 is made swingable by the fixing jig 51 of the sample mounting table driving unit 50. Therefore, when the movable sample mounting table 46 is located at an upper position as shown in FIGS. 8A and 8C, the driving rod 49 is inclined to the lower left in the figure, while FIG.
When the movable sample mounting table 46 is located at the lower position as shown in FIG. 19, the driving rod 49 is substantially in the horizontal direction, and the movable sample mounting table 46 can easily move up and down.

As described above, in this embodiment, LS
A movable sample mounting table 46, which is provided with two samples such as I-devices arranged side by side and movable in the horizontal direction, is stored in the sample mounting table storage section 45. At this time, the guide rod 53 of the movable sample mounting table 46 is inserted into the V-shaped guide groove 61 provided on both side plates 58 of the sample mounting table storage unit 45, and the driving rod 49 is driven by the sample mounting table driving unit 50. When the movable sample mounting table 46 is moved in the horizontal direction via the, the movable sample mounting table 46 is guided by the guide groove 61 and moves in the horizontal direction, and at the same time, reciprocates only in the vertical direction.

Therefore, when the guide rod 53 of the movable sample mounting table 46 is located at one end of the guide groove 61 of the sample mounting table storage section 45, one of the two samples 48a and 48b is at the test position. The contact probe of the sample located is connected to the contact probe 66 of the load module 65. When the guide rod 53 is located at the center of the guide groove 61, the contact probes 68a and 68b are not connected to the contact probe 66 of the load module 65 because both the samples 48a and 48b are not located at the test position. When the guide rod 53 is located at the other end of the guide groove 61, one of the two samples 48a and 48b is located at the test position, and the contact probe of the sample is set to the contact probe 66 of the load module 65. It is connected.

That is, according to this embodiment, the driving rod 49 is driven by the sample mounting table driving section 50 of the sample mounting table storage section 45.
Only by moving the movable sample mounting table 46 in the horizontal direction.
One of the two samples 48a and 48b mounted on the
The disconnection of the electrical connection with the SI tester head 42, the movement of the sample, and the electrical connection between the other sample and the LSI tester head 42 can be continuously and automatically performed. Therefore, a plurality of samples can be tested without opening to the atmosphere.

When the test on the two samples 48a and 48b mounted on the movable sample mounting table 46 is completed, the closing jig 64 is pulled out upward and the vertical groove of the sample mounting table storage portion 45 is removed. By lifting the guide bar 53 of the movable sample mounting table upward through 62, the movable sample mounting table 46 can be easily removed from the sample mounting table storage section 45, and both samples 48a and 48b can be replaced with two new samples. .

In the above embodiment, two samples can be mounted side by side on the movable sample mounting table 46. However, in the present invention, it is possible to mount three or more samples side by side. However, in that case,
It is necessary to form V-shaped guide grooves 61 provided in the sample mounting table storage section 45 in a number corresponding to the number of samples. In the above embodiment, one unit of the guide groove 61 provided in the sample mounting table storage part 45 is formed in a V-shape.
The present invention is not limited to this. For example, if formed in a U-shape as shown in FIG.
When attaching / detaching the contact probe to / from the contact probe 66 of the load module 65, bending stress is not applied to each contact probe, and the attachment / detachment can be performed smoothly.

In the above embodiment, the LSI
Although the tester head 42 is installed on the upper side with respect to the sample mounting table storage section 45, it may be installed on the lower side as in the conventional example shown in FIG. However, in this case, the shape of the guide groove provided in the sample mounting table storage section must be upwardly convex. Further, in the above embodiment, the test apparatus provided with the sample mounting table storage section 45 storing the movable type sample mounting table 46 in the vacuum chamber 43 is mounted on the electron beam tester. It is not limited.

[0042]

As is apparent from the above description, the test apparatus according to the first aspect of the present invention comprises: a test section that is electrically connected to each of a plurality of DUTs to obtain a test result; A sample mounting table that is mounted and moves along a path that is bent or curved up and down, and a sample mounting table driving unit that drives the sample mounting table to move along the path,
Each time the sample mounting table driven along the path by the sample mounting table drive section is located at one of the upper and lower ends of the path, the individual DUTs are sequentially electrically connected to the test section. Every time the device under test is located at the other upper or lower end of the path, all the test objects can be separated from the test section. Therefore, according to the present invention, in one operation of driving the sample mounting table, separation of the device under test from the test section, movement of the device under test, and electrical connection between the next device under test and the test portion. Connection can be continuously performed without opening the vacuum chamber to the atmosphere.

Further, the sample mounting table is detachably installed in the vacuum chamber. Therefore, when the test on all the DUTs mounted on the sample mounting table is completed, remove the sample mounting table from the vacuum chamber and replace the tested DUT with good workability. Can be replaced with a test specimen.

In the test apparatus according to the second aspect of the present invention, the vacuum chamber has a guide groove along the path, and the sample mounting table has a guide member guided and moved in the guide groove. In a very simple operation of driving the sample mounting table in the horizontal direction by the sample mounting table drive unit, separating the test object from the test unit, moving the test object, Electrical connection with the test section can be made continuously without opening the vacuum chamber to the atmosphere.

Further, in the test apparatus according to the third aspect of the present invention, the vacuum chamber has a vertical groove for guiding the guide member of the sample mounting table from above into the guide groove. The sample mounting table can be easily attached to and detached from the vacuum chamber.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a test apparatus of the present invention.

FIG. 2 is a configuration diagram of an electron beam tester on which the test apparatus of FIG. 1 is mounted.

FIG. 3 is a detailed view of a movable sample mounting table in FIG. 1;

FIG. 4 is a detailed view of a sample mounting table storage unit in FIG. 1;

5 is a diagram showing a procedure when the movable sample mounting table shown in FIG. 3 is integrally stored in the sample mounting table storage section shown in FIG.

FIG. 6 is a diagram showing a positional relationship between a stepped hole of a vacuum chamber and a sample mounting table storage section in FIG. 1;

FIG. 7 is a detailed view of the load module shown in FIG. 1;

FIG. 8 is an operation explanatory view of the movable sample mounting table shown in FIG. 3;

FIG. 9 is a view showing a sample mounting table storage unit different from FIG. 4;

FIG. 10 is an explanatory diagram of a conventional electron beam tester.

11 is an explanatory diagram of an electron beam tester different from FIG.

[Explanation of symbols]

42: LSI tester head, 43: Vacuum chamber, 45, 70: Sample mounting table storage section, 46: Movable sample mounting table, 47: Electron gun, 48
... sample, 49 ... drive rod, 50 ... sample mounting table drive unit, 53 ... guide rod,
56: drive rod engagement hole, 57: drive rod engagement groove,
61, 71: guide groove, 63: engaging member,
65: Load module.

Continued on the front page (58) Fields surveyed (Int.Cl. ⁷ , DB name) G01R 31/28 G01R 31/302 G01R 31/26 H01L 21/66 H01J 37/20 H01J 37/28

Claims (3)

(57) [Claims] 1. A test apparatus for sequentially testing a plurality of DUTs in a vacuum chamber, wherein the test device is electrically connected to each of the DUTs to obtain a test result of the connected DUTs. A test unit, which is removably installed in the vacuum chamber, a plurality of test objects are placed side by side in a horizontal direction, and moved along a vertically bent or curved path; Each time the test object is electrically connected to the test section each time it is located at one of the upper and lower ends of the path, all the test objects are electrically connected to the upper and lower ends of the path each time. A test apparatus comprising: a sample mounting table that is separated from the test section; and a sample mounting table driving section that drives the sample mounting table to move along the path. 2. The test apparatus according to claim 1, wherein the sample mounting table driving unit drives the sample mounting table in a horizontal direction, the vacuum chamber has a guide groove along the path, A test apparatus, wherein the sample mounting table has a guide member that is inserted into a guide groove of the vacuum chamber and moves while being guided in the guide groove. 3. The test apparatus according to claim 2, wherein the vacuum chamber is continuous with the guide groove,
A test apparatus having a vertical groove for guiding the guide member of the sample mounting table into the guide groove from above.