JP3185982B2 - Electrode structure of piezoelectric vibrator - Google Patents
Electrode structure of piezoelectric vibratorInfo
- Publication number
- JP3185982B2 JP3185982B2 JP05252989A JP5252989A JP3185982B2 JP 3185982 B2 JP3185982 B2 JP 3185982B2 JP 05252989 A JP05252989 A JP 05252989A JP 5252989 A JP5252989 A JP 5252989A JP 3185982 B2 JP3185982 B2 JP 3185982B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- vibrating portion
- vibrator
- piezoelectric vibrator
- electrode structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005284 excitation Effects 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 2
- 239000010453 quartz Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 239000013078 crystal Substances 0.000 description 6
- 238000007740 vapor deposition Methods 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は50MHz以上の高周波を出力する水晶振動子な
どの圧電振動子の電極構造に関し、特に特性を低下させ
ることなく電極パターンの断線を防止した圧電振動子の
電極構造に関する。Description: TECHNICAL FIELD The present invention relates to an electrode structure of a piezoelectric vibrator such as a crystal vibrator outputting a high frequency of 50 MHz or more, and in particular, to prevent disconnection of an electrode pattern without deteriorating characteristics. The electrode structure of the piezoelectric vibrator thus formed.
（従来の技術） 高周波の基本波を出力する水晶振動子としては、ATカ
ット板を薄く加工した厚味すべり振動モードのものを用
いるのが一般的であるが、従来の製造方法では40μｍ程
度に薄く加工するのが限界であり、従って発振周波数も
40MHzが最高である。また、SAW共振子によれば高周波化
は容易であるが、温度特性の点においてATカット振動子
に劣っている。(Prior art) As a crystal unit that outputs a high-frequency fundamental wave, it is common to use a thick-sliding vibration mode in which an AT-cut plate is thinly processed. The limit is to process thinner, so the oscillation frequency is
40MHz is the best. Further, according to the SAW resonator, it is easy to increase the frequency, but it is inferior to the AT cut resonator in terms of temperature characteristics.
従って、高周波振動子でありながらATカットの振動子
並みの温度特性のものを得るために例えば第４図（ａ）
（ｂ）、第５図（ａ）（ｂ）に示す如き構成の振動子が
開発されている。Accordingly, in order to obtain a high-frequency vibrator having a temperature characteristic comparable to that of an AT-cut vibrator, for example, FIG.
(B) A vibrator having a configuration as shown in FIGS. 5 (a) and 5 (b) has been developed.
これらの従来例は水晶板１の中央部の両面または片面
にドライエッチング又はウェットエッチングによって凹
所２を形成して薄肉の振動部３を設けるとともに各面上
に平面図に示すような形状の電極パターン（励振用電
極）５、６を蒸着等により形成している。In these conventional examples, a concave portion 2 is formed by dry etching or wet etching on both surfaces or one surface of a central portion of a quartz plate 1 to provide a thin vibrating portion 3 and an electrode having a shape as shown in a plan view on each surface. Patterns (excitation electrodes) 5 and 6 are formed by vapor deposition or the like.
この各電極パターン５、６は中央の主電極5a、6aと、
各主電極5a、6aから外径方向へ延出されたリード線5b、
6bとを有しているが、凹所２底面の主電極5a、6aから凹
所の段差をへて延びるリード線5b、6bは細幅であるた
め、製造時等に断線を起こし易く、製造時の歩留りが悪
いという問題があった。Each of the electrode patterns 5 and 6 has a central main electrode 5a and 6a,
Lead wires 5b extending in the outer diameter direction from each main electrode 5a, 6a,
6b, but the lead wires 5b, 6b extending from the main electrodes 5a, 6a on the bottom surface of the recess 2 to the step of the recess are narrow, so that they are liable to be broken at the time of manufacturing or the like. There was a problem that the yield at the time was poor.
（発明の目的） 本発明は上述したごとき従来の水晶振動子などの圧電
振動子が有する問題を解決すべくなされたものであっ
て、50MHz以上の高周波を得ることのできるATカット圧
電振動子において、振動子面の凹所から平坦面にかけて
形成される電極部の断線を防止した圧電振動子の電極構
造を提供することを目的とする。(Purpose of the Invention) The present invention has been made to solve the problems of a piezoelectric vibrator such as a conventional crystal vibrator as described above, and is intended for an AT-cut piezoelectric vibrator capable of obtaining a high frequency of 50 MHz or more. It is another object of the present invention to provide an electrode structure of a piezoelectric vibrator in which disconnection of an electrode portion formed from a recess of a vibrator surface to a flat surface is prevented.
（発明の概要） 上述の目的を達成するため、本発明に係る圧電振動子
の電極構造は、第１及び第２の表面を有する圧電基板の
前記第１の表面に凹所を形成して薄い振動部とこれを囲
む厚い環状部とを設け、第１の表面には、前記厚い環状
部と、前記薄い振動部とそれらの間に形成された段差部
とを覆うように全面電極を形成し、第２の表面には、薄
い振動部上の励振電極と、該励振電極から第２の表面の
外周に延長する細幅のリードパターンとから成る部分電
極パターンを形成したことを特徴とする、または前記第
２の表面には、薄い振動部上の互いに近接して配置した
複数の励振電極と、該励振電極から第２の表面の外周に
延長する細幅のリードパターンとから成る部分電極パタ
ーンを形成したことを特徴としたものである。(Summary of the Invention) In order to achieve the above-mentioned object, an electrode structure of a piezoelectric vibrator according to the present invention is formed by forming a concave portion on the first surface of a piezoelectric substrate having first and second surfaces and thinning the same. A vibrating portion and a thick annular portion surrounding the vibrating portion are provided, and a first surface is provided with a full-surface electrode so as to cover the thick annular portion, the thin vibrating portion and a step formed between them. Forming on the second surface a partial electrode pattern comprising an excitation electrode on a thin vibrating portion and a narrow lead pattern extending from the excitation electrode to the outer periphery of the second surface. Alternatively, on the second surface, a partial electrode pattern including a plurality of excitation electrodes arranged close to each other on a thin vibrating portion and a narrow lead pattern extending from the excitation electrodes to an outer periphery of the second surface. Is formed.
（実施例） 以下、添付図面に示した実施例に基づいて本発明を詳
細に説明する。(Examples) Hereinafter, the present invention will be described in detail based on examples shown in the accompanying drawings.
第１図（ａ）及び（ｂ）は本発明の一実施例に係る水
晶振動子の平面図及びそのＡ−Ａ断面図であり、水晶板
11の片面すなわち第１の表面にドライエッチング或いは
ウェットエッチングによって凹所12を形成するととも
に、凹所形成面はその全面に電極14を蒸着形成する一
方、平坦な他面すなわち第２の表面には従来と同様の電
極パターン16をフォトリソグラフ法により形成する。FIGS. 1 (a) and 1 (b) are a plan view and a cross-sectional view taken along line AA of a crystal unit according to an embodiment of the present invention.
A recess 12 is formed on one side of the first surface 11, ie, the first surface, by dry etching or wet etching, and an electrode 14 is formed on the entire surface of the recess on the other surface, while a flat surface, ie, the second surface, is formed on the second surface. An electrode pattern 16 similar to the conventional one is formed by a photolithographic method.
上記のように、水晶板11の凹所12を有する面の全面に
電極14を蒸着形成することによって凹所12の段差部にお
ける電極の断線を防止することができる。As described above, by forming the electrode 14 on the entire surface of the quartz plate 11 having the recess 12 by vapor deposition, disconnection of the electrode at the step portion of the recess 12 can be prevented.
次に、第２図（ａ）及び（ｂ）は第４図、第５図の従
来の振動子の振動部３及び本発明の振動子の振動部18そ
れぞれにおける振動エネルギー分布図である。まず同図
（ａ）上方に示す従来の振動子は薄肉の振動部３の上下
両面に同一形状の電極が配置されており、振動エネルギ
ー分布は電極の寸法がエネルギー封じ込めに最適な場合
には同図（ａ）下方に示す如き値を示す。Next, FIGS. 2 (a) and 2 (b) are vibration energy distribution diagrams of the vibrating portion 3 of the conventional vibrator and the vibrating portion 18 of the vibrator of the present invention shown in FIGS. 4 and 5, respectively. First, in the conventional vibrator shown in the upper part of FIG. 1A, electrodes of the same shape are arranged on the upper and lower surfaces of the thin vibrating portion 3, and the vibration energy distribution is the same when the dimensions of the electrodes are optimal for energy containment. The values shown in the lower part of FIG.
同図（ｂ）上方に示す本発明の電極構造においては全
面蒸着構造の電極14は質量付加が皆無であるため実質的
に水晶部分と同一であり、振動エネルギーは上部電極16
の面積に大きく依存することとなる。このため、振動エ
ネルギー分布は同図（ｂ）の下方に示すようにエネルギ
ー封じ込めが充分な状態となり、振動子の特性には全く
影響を及ぼすことがない。In the electrode structure of the present invention shown in the upper part of FIG. 3B, the electrode 14 of the whole surface deposition structure is substantially the same as the crystal part because there is no mass addition, and the vibration energy is the upper electrode 16.
Greatly depends on the area. For this reason, the vibration energy distribution is in a state where the energy is sufficiently confined as shown in the lower part of FIG. 4B, and does not affect the characteristics of the vibrator at all.
このように本発明によれば、段差部分に積層した電極
部分に断線を生じることなく、許容周波数の振動子（或
いはフィルター）を、振動部分の厚みを調整することに
よって容易に製造することができる。As described above, according to the present invention, a vibrator (or filter) having an allowable frequency can be easily manufactured by adjusting the thickness of the vibrating portion without disconnection of the electrode portion laminated on the step portion. .
なお、上記実施例は本発明の適用例の一例に過ぎず、
例えば第３図（ａ）（ｂ）に示すように平坦面側に２以
上の電極パターン16を設けることによってモノリシック
・クリスタル・フィルタとしてもよい。更に本発明の水
晶振動子は凹所を有した片面を全面電極とするため、該
水晶振動子の片面はマスク等により被覆することなく蒸
着加工することができ蒸着工程を簡単化することができ
る。In addition, the said embodiment is only an example of the application example of this invention,
For example, a monolithic crystal filter may be provided by providing two or more electrode patterns 16 on the flat surface side as shown in FIGS. Further, since the quartz oscillator of the present invention has a single-sided surface having a recess as the entire surface electrode, one-sided surface of the quartz oscillator can be subjected to vapor deposition without being covered with a mask or the like, thereby simplifying the vapor deposition process. .
尚、上記実施例では水晶振動子を中心として説明した
が、本発明は圧電振動子一般に適用可能である。Although the above embodiment has been described with reference to a quartz oscillator, the present invention is applicable to piezoelectric oscillators in general.
（発明の効果） 以上のように本発明によれば、500MHz以上の高周波を
得ることのできるATカット圧電振動子において、振動子
面の凹所から平坦面にかけて形成される電極部の断線を
防止するのみならず、電極蒸着工程を簡単化する上で著
しい効果を発揮する。(Effects of the Invention) As described above, according to the present invention, in an AT-cut piezoelectric vibrator capable of obtaining a high frequency of 500 MHz or more, disconnection of an electrode portion formed from a concave portion of a vibrator surface to a flat surface is prevented. Not only that, it has a remarkable effect in simplifying the electrode deposition process.
第１図（ａ）（ｂ）は本発明の圧電振動子の電極構造の
一実施例の平面図及びそのＡ−Ａ断面図、第２図（ａ）
及び（ｂ）は従来の振動子と本発明の振動子の振動エネ
ルギー分布の説明図、第３図（ａ）及び（ｂ）は本発明
の他の実施例の平面図及び本発明の他の実施例の平面図
及びＢ−Ｂ断面図、第４図（ａ）（ｂ）、第５図（ａ）
（ｂ）は従来例の構成説明図である。 １……水晶板、２……凹所、５、６……電極パターン
（励振用電極）、5a、6a……主電極、5b、6b……リード
線、11……水晶板、12……凹所、14……電極、16……電
極パターン、18……振動部1 (a) and 1 (b) are a plan view and an AA sectional view of an embodiment of an electrode structure of a piezoelectric vibrator according to the present invention, and FIG. 2 (a).
3 (a) and 3 (b) are explanatory views of the vibration energy distribution of the conventional vibrator and the vibrator of the present invention, and FIGS. 3 (a) and 3 (b) are plan views of another embodiment of the present invention and other drawings of the present invention. 4 (a), (b), and FIG. 5 (a).
(B) is an explanatory view of the configuration of a conventional example. 1 ... quartz plate, 2 ... recess, 5, 6 ... electrode pattern (excitation electrode), 5a, 6a ... main electrode, 5b, 6b ... lead wire, 11 ... quartz plate, 12 ... Recess, 14 ... electrode, 16 ... electrode pattern, 18 ... vibrating part
Claims (2)
記第１の表面に凹所を形成して薄い振動部とこれを囲む
厚い環状部とを設け、第１の表面には、前記厚い環状部
と、前記薄い振動部とそれらの間に形成された段差部と
を覆うように全面電極を形成し、第２の表面には、前記
薄い振動部上の励振電極と、該励振電極から第２の表面
の外周部に延長する細幅のリードパターンとから成る部
分電極パターンを形成したことを特徴とする圧電振動子
の電極構造。1. A piezoelectric substrate having first and second surfaces, wherein a concave portion is formed in the first surface to provide a thin vibrating portion and a thick annular portion surrounding the vibrating portion. An entire surface electrode is formed so as to cover the thick annular portion, the thin vibrating portion and a step formed between them, and an excitation electrode on the thin vibrating portion is provided on a second surface. An electrode structure for a piezoelectric vibrator, wherein a partial electrode pattern comprising a narrow lead pattern extending from an electrode to an outer peripheral portion of a second surface is formed.
記第１の表面に凹所を形成して薄い振動部とこれを囲む
厚い環状部とを設け、第１の表面には、前記厚い環状部
と、前記薄い振動部とそれらの間に形成された段差部と
を覆うように全面電極を形成し、第２の表面には、前記
薄い振動部上の互いに近接して配置した複数の励振電極
と、該励振電極から第２の表面の外周部に延長する細幅
のリードパターンとから成る部分電極パターンを形成し
たことを特徴とする圧電振動子の電極構造。2. A piezoelectric substrate having first and second surfaces, wherein a concave portion is formed in the first surface to provide a thin vibrating portion and a thick annular portion surrounding the vibrating portion. A full-surface electrode is formed so as to cover the thick annular portion, the thin vibrating portion and the step formed between them, and on the second surface, the electrodes are arranged close to each other on the thin vibrating portion. An electrode structure for a piezoelectric vibrator, wherein a partial electrode pattern comprising a plurality of excitation electrodes and a narrow lead pattern extending from the excitation electrodes to an outer peripheral portion of the second surface is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05252989A JP3185982B2 (en) | 1989-03-03 | 1989-03-03 | Electrode structure of piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05252989A JP3185982B2 (en) | 1989-03-03 | 1989-03-03 | Electrode structure of piezoelectric vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02231808A JPH02231808A (en) | 1990-09-13 |
| JP3185982B2 true JP3185982B2 (en) | 2001-07-11 |
Family
ID=12917281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP05252989A Expired - Lifetime JP3185982B2 (en) | 1989-03-03 | 1989-03-03 | Electrode structure of piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3185982B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4007172B2 (en) | 2002-12-03 | 2007-11-14 | ソニー株式会社 | Micromachine and manufacturing method thereof |
| JP4506135B2 (en) * | 2003-09-18 | 2010-07-21 | エプソントヨコム株式会社 | Piezoelectric vibrator |
| JP4558433B2 (en) * | 2004-10-01 | 2010-10-06 | 日本電波工業株式会社 | Crystal oscillator |
| JP2014030126A (en) * | 2012-07-31 | 2014-02-13 | Kyocera Crystal Device Corp | Crystal device |
-
1989
- 1989-03-03 JP JP05252989A patent/JP3185982B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02231808A (en) | 1990-09-13 |
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