JP3189447B2 - Discharge lamp device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION The present invention relates to, for example,
The present invention relates to a discharge lamp device that emits ultraviolet light for surface cleaning, sterilization, photochemical reaction, and the like. In particular, the dielectric using a dielectric barrier discharge to emit ultraviolet light by using a silent discharge
The present invention relates to a barrier discharge lamp device.

[0002]

2. Description of the Related Art The present invention relates to the prior art described in, for example, Japanese Patent Laid-Open Publication No. 1-144560. That is, a discharge space is formed by providing two light-transmitting dielectrics such as quartz glass plates facing each other, and filling the discharge space with a rare gas, deuterium or a mixed gas of a rare gas and a halogen, It is known that an electrode is provided on a surface of the two dielectrics not facing the discharge space, and an AC voltage is applied to the electrodes to generate a silent discharge and emit ultraviolet rays. As the dielectric, sapphire, magnesium fluoride, calcium fluoride and the like are known in addition to quartz glass. The discharge lamp as described above is useful because emitted light of a desired wavelength can be obtained by selecting a discharge gas. However, its life characteristics are not always sufficient. In addition, when the lamp is used for photosynthesis, sterilization, and the like, the generated substance adheres to the light extraction window of the lamp, or adheres to a part of the light extraction window of the substance to be sterilized, thereby decreasing the transmittance of the window. There is a problem that light output is reduced.

[0003]

SUMMARY OF THE INVENTION An object of the present invention is to provide a lamp having sufficient life characteristics and, when the lamp is used for photosynthesis or the like, the produced substance does not adhere to the light extraction window of the lamp.
An object of the present invention is to provide a high-performance dielectric barrier discharge lamp device in which light output does not decrease.

[0004]

SUMMARY OF THE INVENTION An object of the present invention is to provide a discharge vessel having a light extraction window and containing a discharge gas or generating discharge plasma while flowing the discharge gas. In a dielectric barrier discharge lamp device comprising a power supply device for generating the discharge plasma, at least a part of a wall of the discharge vessel is made of polytetrafluoroethylene (abbreviated as PTFE), tetrafluoroethylene perfluoroalkyl vinyl ether. Copolymer (abbreviated as PFA) or tetrafluoroethylene / hexafluoropropylene copolymer (FEP)
This is achieved by using a fluororesin such as In particular, it is effective that at least a part of the light extraction window of the discharge vessel is made of a fluororesin. The above object is also achieved by attaching a fluororesin to at least a part of the inner wall surface of the discharge vessel, particularly to the light extraction window. When a gas containing at least halogen is used as the discharge gas, there is an advantage that radiation light of various wavelengths can be selected. If the surface of the light extraction window not facing the discharge space is made of fluororesin, when this lamp is used for photosynthesis, reaction products may adhere to the surface of the light extraction window not facing the discharge space. Less, so the transmittance of the window does not decrease,
Therefore, a long-life discharge lamp device can be obtained. By generating the discharge plasma by silent discharge, the discharge has no electrode in the discharge space, so that there is no reaction between the electrode and the discharge gas, and the above object is further achieved.

[0005]

According to the present invention, there is provided a discharge vessel having a light extraction window and containing a discharge gas or generating discharge plasma while flowing the discharge gas, and a power supply device for generating the discharge plasma. When at least a part of the wall of the discharge vessel is made of a fluororesin such as PTFE, PFA or FEP, a reaction between the discharge gas, particularly a gas activated by the discharge, and the discharge vessel is reduced. As a result, the discharge gas is less contaminated and the light extraction window is less deteriorated, so that a long-life discharge lamp device can be obtained. In particular, when a gas containing at least halogen, especially fluorine or chlorine is used as the discharge gas, the gas for discharge by the fluororesin, particularly the gas activated by the discharge, is used to prevent the reaction between the discharge vessel and the discharge vessel. Hardening is remarkable.

When the surface of the light extraction window not facing the discharge space is made of fluororesin, when this lamp is used for photosynthesis, sterilization, or the like, a reaction product is formed on the surface of the light extraction window not facing the discharge space. Thus, a discharge lamp device having a long life can be obtained without a decrease in the transmittance of the window due to little adhesion of the material to be sterilized or impurities in the material to be sterilized. When a thin film of the fluororesin is attached to a part of the inner wall surface of the discharge vessel, the discharge gas and the discharge vessel
An effect such as reaction prevention is obtained. When the discharge plasma is generated by a silent discharge, the discharge does not have an electrode in the discharge space, so that there is no reaction between the electrode and the discharge gas, but a dense discharge plasma exists in a portion close to the surface of the discharge vessel. However, a reaction between the gas species activated by the discharge and the discharge vessel easily occurs. Therefore , when the fluororesin is applied to a discharge lamp device in which the discharge plasma is generated by silent discharge, the discharge gas and the discharge vessel are discharged.
Effects such as anti-reaction is not authored.

[0007]

FIG. 1 shows a first embodiment of the present invention. Two dielectrics 1 and 2 made of transparent quartz glass are provided to face each other via a spacer 5 to form a discharge space 6. The distance between the dielectrics 1 and 2 is about 3 mm. Electrodes 3 and 4 made of a metal net are provided on the surfaces of the dielectrics 1 and 2 not facing the discharge space.
Is provided. P on both surfaces of dielectrics 1 and 2 as fluororesin
TFE 7, 8, 9, and 10 were applied in a thickness of 0.2 mm. 50,000 Pa of a mixed gas of krypton and fluorine was filled as a discharge gas, and a voltage was applied to the electrodes 3 and 4 with the AC power supply 11 to generate a silent discharge in the discharge space 6.

[0008] 240nm ~ 255n generated in the discharge space
m ultraviolet rays, fluororesin 7-quartz glass 1-fluororesin 9 and fluororesin 8-quartz glass 2-fluororesin 1
0, the reaction between quartz glass and fluorine as a discharge gas was also suppressed, and a long-life discharge lamp device was obtained. Further, the discharge lamp was immersed in water to sterilize the water with ultraviolet rays. However, the amount of deposits of impurities in the water on the surfaces 9 and 10 corresponding to the light extraction windows was as follows.
It is reduced to about 50% compared to the case without fluororesin,
Good life characteristics were obtained.

FIG. 2 is a longitudinal sectional view of a second embodiment of the present invention. An electrode 23 is spirally provided inside a cylindrical dielectric 21 made of transparent PFA. The spiral electrode 23 also functions to mechanically reinforce the PFA cylinder in addition to the role of the electrode. A PFA rod having a rod-shaped electrode 24 embedded therein is inserted into the center of the cylindrical dielectric 22 to form a hollow cylindrical discharge space 26. When a mixed gas of krypton and chlorine is used as a discharge gas and an AC voltage is applied to the electrodes 23 and 24 by the AC power supply 11 to generate a silent discharge in the discharge space 26, a cylindrical shape corresponding to a light extraction window is obtained. Radiation light having a wavelength of 200 nm to 240 nm was emitted through the dielectric 21. By configuring the discharge lamp device as described above, the reaction between the tube wall and chlorine was suppressed, and a long-life discharge lamp device was obtained. In addition, the discharge lamp was immersed in water to sterilize the water with ultraviolet rays. Approximately 50
%, And good life characteristics were obtained.

[0010]

[0011]

As described above, according to the present invention, the life characteristics are sufficient, and when the lamp is used for photosynthesis, the produced substance does not adhere to the light extraction window of the lamp and the light output is reduced. And a high-performance discharge lamp device can be provided.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view schematically showing a discharge lamp device according to a first embodiment of the present invention.

FIG. 2 is a longitudinal sectional view schematically showing a discharge lamp device according to a second embodiment of the present invention.

[Explanation of symbols]

 7, 8, 9, 10, 21, 22 are fluororesins respectively 3, 4, 23, 24 are electrodes 6, 26 are discharge spaces, respectively

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-2-40853 (JP, A) Japanese Utility Model Showa 61-144563 (JP, U) Japanese Utility Model Showa 59-128163 (JP, U) (58) Field (Int. Cl. ⁷ , DB name) H01J 65/00

Claims (1)

(57) [Claims] 1. A discharge vessel having a light extraction window, containing a discharge gas, or generating discharge plasma while flowing the discharge gas, and
In a dielectric barrier discharge lamp device including a power supply device for generating, a fluororesin is provided so as to cover at least an electrode formed on an outer surface of a wall of the discharge vessel, or on a part of an inner wall surface of the discharge vessel. A dielectric barrier discharge lamp device, wherein a portion made of a fluororesin is formed.