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JP3200626B2 - Manufacturing method of spherical optical functional material - Google Patents
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JP3200626B2 - Manufacturing method of spherical optical functional material - Google Patents

Manufacturing method of spherical optical functional material

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Publication number
JP3200626B2
JP3200626B2 JP28298397A JP28298397A JP3200626B2 JP 3200626 B2 JP3200626 B2 JP 3200626B2 JP 28298397 A JP28298397 A JP 28298397A JP 28298397 A JP28298397 A JP 28298397A JP 3200626 B2 JP3200626 B2 JP 3200626B2
Authority
JP
Japan
Prior art keywords
functional material
spherical
optical functional
germanium
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP28298397A
Other languages
Japanese (ja)
Other versions
JPH11106300A (en
Inventor
孝 鶴江
猛 奥谷
善徳 中田
秀明 永井
正昭 鈴木
Original Assignee
経済産業省産業技術総合研究所長
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Priority to JP28298397A priority Critical patent/JP3200626B2/en
Publication of JPH11106300A publication Critical patent/JPH11106300A/en
Application granted granted Critical
Publication of JP3200626B2 publication Critical patent/JP3200626B2/en
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Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Photovoltaic Devices (AREA)
  • Led Devices (AREA)
  • Catalysts (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、球状光機能材料及
びその製造方法に関するものである。さらに詳しくは、
本発明は、金属や合金類などの溶融物を真空もしくは6
65Pa以下のヘリウムなどの不活性ガス中で自由落下
させ、その落下中に凝固させて球体となすことを特徴と
する球状光機能材料の製造方法に関するものである。自
由落下で得られる微小重力環境下で管壁などに接触する
ことなく液滴を固化して得られた凝固物は、格子欠陥の
非常に少ない完全結晶に近く、機械的強度が高く、ま
た、表面が球状であるために光の受光効率の高いあるい
は光の発光を広角度に行える等の従来の方法では達成す
ることのできなかった特性を有する球状光機能材料であ
る。
The present invention relates to a spherical optical functional material and a method for producing the same. For more information,
In the present invention, a molten material such as a metal or
65Pa freely down in an inert gas, such as: helium, those concerning the manufacturing how spherical optical functional material, characterized by forming a solidified by spheres during the fall. The solidified product obtained by solidifying the droplet without contacting the tube wall etc. under the microgravity environment obtained by free fall is close to a perfect crystal with very few lattice defects, has high mechanical strength, It is a spherical optical functional material having characteristics that could not be achieved by conventional methods such as high light receiving efficiency due to its spherical surface or light emission at a wide angle.

【0002】[0002]

【従来の技術】既存の光機能材料は光触媒であるTiO
2のように粉体の状態あるいは粉体を凝集させた厚膜状
態〔例えば、「光触媒の水処理への応用」、セラミック
ス、31巻、No.10、825(1996)〕で、あ
るいは、光電変換素子として用いられているGeは蒸着
法などにより製造される薄膜や単結晶を板状に切り出し
て利用されている〔例えば、「半導体ハンドブック(第
2版)」(平成6年)、443頁(オーム社)〕。Ti
2のように粉体あるいは粉体を凝集させた厚膜状態で
用いられる光触媒は、触媒活性点に反応物と水と光が同
時に存在しなければならない。この場合、TiO2触媒
層の表面は多くの活性点があり、その近辺に反応物と水
が存在し、光も当たりやすくなければならないため、触
媒層は多孔質でなければならない。その結果、触媒は粒
子間に空間が存在しない緻密な構造よりは、粉体もしく
は粉体が凝集し粒子間に十分光反応に必要な空間が存在
する構造であるため、機械的強度が低いものとなる。ア
モルファスシリコンの基板上への堆積あるいはシリコン
単結晶の薄板からなる薄膜太陽電池が一般的であるが、
これらは平坦な表面を持ち、最も効率よく太陽光を受光
するためには表面に垂直に太陽光を受ける姿勢が必要で
ある。通常は太陽の動きにかかわらずほとんどの場合真
昼の太陽に位置に固定した状態で使用されている。
2. Description of the Related Art An existing optical functional material is TiO which is a photocatalyst.
No. 2 , the state of powder or the state of a thick film obtained by aggregating powder [for example, “Application of Photocatalyst to Water Treatment”, Ceramics, Vol. 10, 825 (1996)], or Ge used as a photoelectric conversion element is used by cutting a thin film or a single crystal manufactured by vapor deposition or the like into a plate shape [for example, “Semiconductor Handbook (No. 2nd Edition) "(1994), p. 443 (Ohmsha). Ti
A photocatalyst used in the form of a powder or a thick film obtained by aggregating powders, such as O 2 , requires that a reactant, water, and light simultaneously exist at the catalytically active site. In this case, the surface of the TiO 2 catalyst layer has many active points, the reactants and water are present in the vicinity thereof, and the TiO 2 catalyst layer must be easily exposed to light. Therefore, the catalyst layer must be porous. As a result, the catalyst has a low mechanical strength because it has a structure in which the powder or the powder agglomerates and the space necessary for the photoreaction exists between the particles, rather than a dense structure in which no space exists between the particles. Becomes Thin-film solar cells consisting of amorphous silicon deposited on a substrate or a silicon single crystal thin plate are generally used.
These have a flat surface, and require the attitude to receive sunlight perpendicular to the surface in order to receive sunlight most efficiently. It is usually used in a fixed position in the midday sun regardless of the movement of the sun.

【0003】[0003]

【発明が解決しようとする課題】本発明は、従来の方法
で製造できなかった表面が球状の形態を持つ効率の良い
光機能材料の製造方法を提供することをその課題とす
る。
[SUMMARY OF THE INVENTION The present invention is that the surface which can not be prepared in a conventional manner to provide a manufacturing how the efficient optical functional material having a spherical morphology and Problems.

【0004】[0004]

【課題を解決するための手段】本発明者らは、前記課題
を解決すべく鋭意検討を行った結果、本発明を完成する
に至った。すなわち、本発明によれば、形状が球形状で
ある光機能材料を製造する方法において、微小重力環境
下、該光機能材料又はその主体をなす材料の融液を、微
小重力環境下において、二重管からなり、内管と外管と
の間の間隙部に冷媒を流通させた落下管内を665Pa
以下のガス雰囲気下で自由落下させるとともに、その落
下中に冷却固させる球形化工程を含むことを特徴とする
球状光機能材料の製造方法が提供される。
Means for Solving the Problems The present inventors have made intensive studies to solve the above problems, and as a result, completed the present invention. That is, according to the present invention, a method of shape manufacturing an optical functional material is spherical, microgravity, a melt of the material forming the optical functional material or entity, in microgravity, Two Consisting of heavy pipes, inner and outer pipes
665 Pa in the drop tube in which the refrigerant is circulated in the gap between
A method for producing a spherical optical functional material is provided, which comprises a spheroidizing step of free-falling under a gas atmosphere and cooling and solidifying during the fall.

【0005】[0005]

【発明の実施の形態】本発明において、光機能材料に
は、太陽光を電気に変換するシリコンなどの太陽電池、
光の照射による光起電力効果を利用して電流を増加させ
るゲルマニウムフォトダイオードなどの光電変換材料、
光信号を電気抵抗に換える硫化カドミウムやゲルマニウ
ムなどの光伝導材料、光エネルギーを利用してその表面
で化学反応を誘起する光触媒などが包含される。
DESCRIPTION OF THE PREFERRED EMBODIMENTS In the present invention, a photovoltaic material includes a solar cell such as silicon for converting sunlight into electricity,
Photovoltaic materials such as germanium photodiodes that increase current using the photovoltaic effect of light irradiation,
Examples include photoconductive materials such as cadmium sulfide and germanium that convert optical signals into electrical resistance, and photocatalysts that use light energy to induce a chemical reaction on the surface.

【0006】本発明で採用される光機能材料を球状にす
る方法は、微小重力環境下で液体の表面張力が顕著にな
るためその形状は球になることを利用して、光機能材料
を構成する主体材料、例えば、金属などを加熱溶融して
得た融液を他の物体に接触することなく、665Pa以
下のガス雰囲気下を自由落下させるとともに、その落下
間に冷却凝固することにより球状の光機能材料を得る方
法である。微小重力環境を得る手段としては、落下管を
用いるのが好ましい。この場合の落下管は、その頂部に
光機能材料を構成する金属などを溶融凝固するための誘
導加熱装置や電気抵抗体発熱装置などの加熱装置が設置
され、その真下に生成した融液がその内部を落下する落
下管本体が設置されている。落下管底部には融液が凝固
した球状光機能材料を回収するための受器が設置されて
いる。落下管内部は真空にすることができ、またヘリウ
ムなどの不活性ガスを所定の圧力に充填したり、あるい
は、所定の圧力で落下管内を上部(加熱部)または下部
(受器)から一定流量のガスを供給することもできるよ
うになっている。光機能材料を構成する金属などを落下
管上部の加熱部に供給する方法は、棒状の金属を一定速
度で加熱部に供給しても良く、あるいは、加熱部中心付
近に設置したその下部に黒鉛製などのるつぼに粉末ある
いは細片を供給しても良い。液滴は、棒状の試料を用い
た場合は、棒の径と溶融温度を変えることにより、るつ
ぼを用いた場合はるつぼ下部に設けた細穴の径と溶融温
度を調節することにより、自由落下する液滴量を変える
ことができ、その結果、球の径を調節することができ
る。落下管の材料は鉄製やガラス製など、真空を保持す
ることができれば何でも良い。落下管の径は液滴あるい
は球の径より大きく、落下中管壁に接触しないように設
置する。落下管の長さは、液滴量、光機能材料を構成す
る金属などの融点などにより決定されるが、通常、1〜
100mであり、好ましくは3〜15mである。管は二
重管になっており、液体窒素などの冷媒がその内管と外
管との間の間隙部に充填できるようになっている。冷媒
により管壁を冷却することにより液滴の温度差をより大
きくし、落下時の液滴の輻射による冷却しやすいように
なっている。冷却を促進するためには管内壁を黒色にし
たり、管径をできるだけ小さくするなどの工夫が必要で
ある。落下管底部の受器では融点以下に冷却され、固化
した球状の光機能材料を構成する金属などが得られる
が、容易に取り扱える温度へと冷却するために受器には
スズの粉末が充填されている。また、固化した球の温度
は低い場合は、粘性の高いシリコンオイルなど揮発性の
低い高粘性の液体が充填する場合もある。
[0006] The method of making the optical functional material spherical in the present invention utilizes the fact that the surface tension of the liquid becomes remarkable under the microgravity environment, so that the optical functional material is formed into a sphere. The main material, for example, a melt obtained by heating and melting a metal or the like is allowed to freely fall under a gas atmosphere of 665 Pa or less without contacting other objects, and is cooled and solidified during the fall to form a spherical shape. This is a method for obtaining an optical functional material. As a means for obtaining a microgravity environment, a drop tube is preferably used. In this case, a heating device such as an induction heating device or an electric resistor heating device for melting and solidifying a metal or the like constituting the optical functional material is installed on a top portion of the drop tube, and a melt generated immediately below the heating device is provided thereunder. A drop tube body that falls inside is installed. At the bottom of the drop tube, a receiver for collecting the spherical optical functional material in which the melt has solidified is installed. The inside of the drop tube can be evacuated, filled with an inert gas such as helium to a predetermined pressure, or at a predetermined pressure, a constant flow rate from the upper part (heating unit) or the lower part (receiver) through the drop tube. Gas can also be supplied. As a method of supplying the metal constituting the optical functional material to the heating section above the drop tube, a rod-shaped metal may be supplied to the heating section at a constant speed, or graphite may be provided near the center of the heating section. Powder or strips may be supplied to a crucible made of steel or the like. Drops can be dropped freely by changing the diameter and melting temperature of the rod when using a rod-shaped sample, or by adjusting the diameter and melting temperature of the small hole provided at the bottom of the crucible when using a crucible. It is possible to change the amount of the droplet to be formed, and as a result, it is possible to adjust the diameter of the sphere. The drop tube may be made of any material, such as iron or glass, as long as it can maintain a vacuum. The diameter of the drop tube is larger than the diameter of the droplet or sphere, and it is installed so as not to contact the wall of the tube during the fall. The length of the drop tube is determined by the amount of the droplet, the melting point of the metal or the like constituting the optical functional material, and the like.
100 m, preferably 3 to 15 m. The pipe is a double pipe, and a refrigerant such as liquid nitrogen flows between the inner pipe and the outer pipe.
The space between the tubes can be filled. By cooling the tube wall with a refrigerant, the temperature difference between the droplets is increased, and the droplets are easily cooled by radiation when falling. In order to promote cooling, it is necessary to devise measures such as making the inner wall of the tube black or reducing the tube diameter as much as possible. The receiver at the bottom of the drop tube is cooled below the melting point, and the solid metal and other constituents of the optical functional material can be obtained.However, the receiver is filled with tin powder to cool it to a temperature that can be easily handled. ing. Further, when the temperature of the solidified sphere is low, the sphere may be filled with a highly volatile liquid having low volatility such as silicone oil having high viscosity.

【0007】得られた光機能を構成する金属などの球表
面をドーピングや表面層を形成することにより光機能を
持つ材料を製造することができる。例えば、ゲルマニウ
ム球の場合、5価の原子であるリンをドープするとn型
半導体に、3価の原子であるホウ素をドープするとp型
半導体が球表面に形成される。また、落下管での液滴の
自由落下中の凝固により作成されたチタン球は、硝酸水
溶液中でアノード電解エッチングによりその表面に活性
な酸化チタニウムの層を形成することができる。この活
性酸化チタニウム層には光触媒効果がある。さらに、落
下管でホウ素をドープしたシリコン融液を凝固すること
によりp型シリコン半導体球が作成できる。この球をフ
ッ化水素溶液中でアノード電解エッチングすることによ
り球表面に可視光を発光するポーラスシリコン層を形成
することができる。
A material having an optical function can be manufactured by doping or forming a surface layer of a sphere such as a metal constituting the obtained optical function. For example, in the case of a germanium sphere, an n-type semiconductor is formed on the sphere surface when doped with pentavalent atoms of phosphorus, and a p-type semiconductor is formed on the sphere surface when doped with trivalent atoms of boron. In addition, a titanium sphere formed by solidification of a droplet during free fall of a drop tube can form an active titanium oxide layer on its surface by anodic electrolytic etching in a nitric acid aqueous solution. This active titanium oxide layer has a photocatalytic effect. Furthermore, a p-type silicon semiconductor sphere can be formed by solidifying the boron-doped silicon melt with a drop tube. By subjecting the sphere to anodic electrolytic etching in a hydrogen fluoride solution, a porous silicon layer that emits visible light can be formed on the sphere surface.

【0008】落下管で融液の凝固により製造できる球状
光機能材料は、その結晶構造は欠陥のほとんどない完全
結晶に近い格子構造を持っている。その結晶化度は、9
5%以上であり、実質上完全結晶である。融液が固化す
る過程で、落下管内の自由落下では融液が管壁に接触す
ることもないので、固化する過程で発生する核は融液内
に均一に多数生成することが考えられる。一般に、融液
からの固化過程は管壁に接触している個所から核生成が
生じる。自由落下時の融液内には管壁に接触するところ
がなく、核は融液内に均一に分布していると予想さる。
均一核生成からの固化が起こる温度は、通常の凝固温度
で固化は起こらず、それ以下の温度で固化が起こる過冷
却現象が発現する。従って、自由落下中の液滴は固化す
る温度に達すると瞬時に固化が生じ、欠陥の発達する速
度よりも高く結晶化するため、完全結晶に近い格子を持
つ球が生成する。このような球に不純物原子をドーピン
グすることにより、nあるいはp型半導体を球表面に作
成することが可能になる。例えば、シリコンやゲルマニ
ウム球にジボラン(B23)やホスフィン(PH3)を
含む雰囲気下で加熱処理することにより、3価のホウ素
や5価のリン原子を4価のケイ素及びゲルマニウム格子
中に導入することにより、n及びp型半導体層を作成す
ることができる。この場合、球の格子構造は完全結晶に
近く、格子欠陥などによる影響のない単結晶と同等の性
能を持つ半導体を作成することが可能である。本発明に
より得られる球状体は、実質上真球であり、その粒径
は、0.1〜20mm、好ましくは0.5〜10mmで
ある。
[0008] The spherical optical functional material that can be produced by solidification of the melt with a drop tube has a crystal structure close to a perfect crystal with almost no defects. Its crystallinity is 9
5% or more, and is substantially perfect crystal. In the process of solidification of the melt, the melt does not come into contact with the tube wall during free fall in the drop tube, so it is conceivable that many nuclei generated in the process of solidification are uniformly generated in the melt. Generally, in the process of solidification from the melt, nucleation occurs from a point in contact with the tube wall. There is no contact with the tube wall in the melt during free fall, and it is expected that the nuclei are uniformly distributed in the melt.
As for the temperature at which solidification from uniform nucleation occurs, solidification does not occur at a normal solidification temperature, but a supercooling phenomenon in which solidification occurs at a temperature lower than this temperature appears. Therefore, when the liquid drops during free fall reach the solidification temperature, solidification occurs instantaneously, and crystallizes at a speed higher than the speed at which defects develop, so that a sphere having a lattice close to a perfect crystal is generated. By doping such a sphere with impurity atoms, an n-type or p-type semiconductor can be formed on the sphere surface. For example, by heating silicon or germanium spheres in an atmosphere containing diborane (B 2 H 3 ) or phosphine (PH 3 ), trivalent boron or pentavalent phosphorus atoms can be added to the tetravalent silicon or germanium lattice. To form n-type and p-type semiconductor layers. In this case, the lattice structure of the sphere is close to a perfect crystal, and a semiconductor having performance equivalent to that of a single crystal which is not affected by lattice defects or the like can be produced. The spherical body obtained by the present invention is substantially a true sphere, and has a particle size of 0.1 to 20 mm, preferably 0.5 to 10 mm.

【0009】本発明で得られた球状光機能材料は、球状
であるため機械的強度が高く、かつ、表面が球であるた
め、太陽電池、受光素子や光触媒に適用した場合、光を
受光しやすい形態である。また、発光素子に適用した場
合、光を広角度に放出できるため、平らな表面と比べ指
向性がないなどの特色が期待できる。
The spherical optical functional material obtained in the present invention has a high mechanical strength due to its spherical shape, and has a spherical surface, so that it can receive light when applied to a solar cell, a light receiving element or a photocatalyst. It is an easy form. In addition, when applied to a light-emitting element, light can be emitted at a wide angle, so that it can be expected to have characteristics such as less directivity than a flat surface.

【0010】[0010]

【実施例】次に本発明を実施例によりさらに詳細に説明
する。
Next, the present invention will be described in more detail with reference to examples.

【0011】1.球状ゲルマニウムの製造 自由落下距離13mを持つ二重のガラス管からなる落下
管を用いた。落下管の頂部は外径30mmの石英管1m
で、その最上部は水冷キャップで内部を真空あるいは6
65Pa以下のヘリウムなどのガス雰囲気に調節できる
ように真空ポンプとガス導入口が設けられている。石英
管内部の中心には径1mmのゲルマニウム細線が垂直に
おかれ、外部に設けたコイルに100KHz、100
V、17Aの高周波電源を印可し、ゲルマニウム細線を
加熱溶融できるようになっている。落下管本体は二重管
構造で、内管は外径34mm、内径30mmの硬質ガラ
ス管製でその回りには外径80mm、内径73mmの硬
質ガラス管製外管が内管を覆っている。落下管本体は
1.5mの管7本が球面のすりあわせを備えた部分から
なり、その各々は漏れがないよう、また、垂直になるよ
うに設置されている。二重管の間には液体窒素が充填で
きるようになっている。落下管底部には内容積300m
lの三口円底フラスコが接続されており、その内部には
200メッシュ以下の粒径を持つスズ粉末が150ml
充填されている。フラスコから真空ポンプとガス導出口
が設けられている。球状ゲルマニウムの製造には径1m
mの細線を用いたが、細線は内径1mmの石英管内に1
50メッシュ以下の粒度を有する微粒子状ゲルマニウム
粉末を充填し、真空溶融炉で溶融固化して細線を得た。
この細線を落下管頂部に設置した石英管内に設置し、そ
の先端を外部に設置した誘導コイル中心になるように位
置を決めた。高周波電源を印加し、細線を溶融し、液体
窒素で管壁を冷却した落下管内を落下中に凝固させるこ
とにより、径が約1.5mmの球状のゲルマニウムを作
成した。球状ゲルマニウムの回収は落下管底部に設けた
フラスコ内のスズ粉末中に落下させ、凝固後のゲルマニ
ウムの冷却を行った。なお、加熱部、落下管、回収用フ
ラスコの内部は0.01Torr以下の真空雰囲気に
し、球状ゲルマニウムの製造を行った。得られたゲルマ
ニウムの球断面を鏡面に研磨し、研磨面2%HF+60
%HNO3溶液中に浸漬し、エッチングを行い、エッチ
ング面を光学顕微鏡で観察した。その結果を図1に示
す。さらに、透過電子顕微鏡で格子像を観察した結果を
図2に示した。比較のため、地上での凝固実験は約60
mgのGe粒(融点:958.5℃)を真空雰囲気の石
英アンプル中に封入し、1140℃にアンプルに巻き付
けた白金線に通電し加熱溶融し、アンプルに液化CO2
を吹き付け、8秒間で400℃まで冷却し、凝固したゲ
ルマニウム片を用いた。地上で溶融・凝固を行った場
合、石英アンプル壁にゲルマニウム融体が接触したまま
アンプルに接触した部分から凝固が始まるため、球状の
凝固物は得られなかった。地上での溶融・凝固で得られ
たゲルマニウム断面のエッチング後の光学顕微鏡写真を
図3、欠陥部分の透過電子顕微鏡写真を図4、欠陥部付
近の格子像を図5に示す。
1. Production of spherical germanium A drop tube consisting of a double glass tube having a free fall distance of 13 m was used. The top of the drop tube is 1m quartz tube with an outer diameter of 30mm
The top is a water-cooled cap with a vacuum inside or 6
A vacuum pump and a gas inlet are provided so that the gas atmosphere such as helium of 65 Pa or less can be adjusted. At the center inside the quartz tube, a thin germanium wire with a diameter of 1 mm is vertically placed.
A high-frequency power source of V, 17A is applied to heat and melt the germanium thin wire. The drop tube body has a double-tube structure, and the inner tube is made of a hard glass tube having an outer diameter of 34 mm and an inner diameter of 30 mm. An outer tube made of a hard glass tube having an outer diameter of 80 mm and an inner diameter of 73 mm covers the inner tube. The drop tube main body is composed of seven 1.5-meter tubes with spherical surfaces, each of which is installed so as not to leak and to be vertical. Liquid nitrogen can be filled between the double tubes. 300m internal volume at the bottom of the drop tube
1 is connected to a three-necked round bottom flask, and 150 ml of tin powder having a particle size of 200 mesh or less is connected inside.
Is filled. A vacuum pump and a gas outlet are provided from the flask. 1m diameter for production of spherical germanium
m was used, but the thin wire was placed in a quartz tube with an inner diameter of 1 mm.
A fine-grained germanium powder having a particle size of 50 mesh or less was filled and solidified in a vacuum melting furnace to obtain a fine wire.
This thin wire was placed in a quartz tube placed at the top of the drop tube, and its tip was positioned so that it was located at the center of an induction coil placed outside. A high-frequency power source was applied to melt the thin wire and solidify it in a falling tube whose wall was cooled with liquid nitrogen while falling, thereby producing a spherical germanium having a diameter of about 1.5 mm. For recovery of the spherical germanium, the spherical germanium was dropped into tin powder in a flask provided at the bottom of the drop tube, and the solidified germanium was cooled. In addition, the inside of the heating unit, the drop tube, and the collection flask was set to a vacuum atmosphere of 0.01 Torr or less, and spherical germanium was produced. The spherical cross section of the obtained germanium is polished to a mirror surface, and the polished surface 2% HF + 60
% HNO 3 solution for etching, and the etched surface was observed with an optical microscope. The result is shown in FIG. FIG. 2 shows the result of observing the lattice image with a transmission electron microscope. For comparison, about 60 coagulation experiments on the ground
mg of Ge particles (melting point: 958.5 ° C.) was sealed in a quartz ampoule in a vacuum atmosphere, and a platinum wire wound around the ampoule was heated to 1140 ° C. and heated and melted, and the ampoule was liquefied CO 2.
And cooled to 400 ° C. for 8 seconds, and a piece of solidified germanium was used. In the case of melting and solidifying on the ground, no solidified spherical product was obtained because solidification started from the part in contact with the ampoule while the germanium melt was in contact with the quartz ampule wall. FIG. 3 shows an optical micrograph of a cross section of germanium obtained by melting and solidification on the ground after etching, FIG. 4 shows a transmission electron micrograph of a defective portion, and FIG. 5 shows a lattice image near the defective portion.

【0012】図1及び図2に示した光学顕微鏡写真及び
格子像を図3から図5に示した地上で製造したゲルマニ
ウム凝固物と比較し、落下管内の自由落下で欠陥のほと
んどない完全結晶に近いゲルマニウム球ができたことが
明らかである。
The optical microscope photographs and lattice images shown in FIGS. 1 and 2 are compared with the germanium coagulates produced on the ground shown in FIGS. 3 to 5 to obtain a complete crystal having almost no defects due to free fall in a drop tube. It is clear that a close germanium sphere was formed.

【0013】2.球状酸化チタニウム層被覆チタニウム
の製造 ゲルマニウムと同じ手順で径1mmのチタニウム細線を
溶融し、生成した融液を落下管中を自由落下中に凝固
し、径が約1.5mmの球状チタニウムを得た。球状チ
タニウムを内径2mmの一端を径1mmに絞った石英管
中に2cmの高さに充填し、その内の1cm部を20w
t%硝酸溶液に浸した。片方の浸漬していない部分に銅
線をチタニウム球に接触させ、電流密度50A/m2
1時間アノード電解酸化を行った。その結果、球状チタ
ニウム表面に10μmの酸化チタニウム層の生成が確認
された。
2. Production of Spherical Titanium Oxide Layer-Coated Titanium A 1 mm diameter titanium fine wire was melted in the same procedure as germanium, and the resulting melt was solidified during free fall in a drop tube to obtain a spherical titanium having a diameter of about 1.5 mm. . A spherical tube is filled into a quartz tube having an inner diameter of 2 mm and one end of which is squeezed to a diameter of 1 mm to a height of 2 cm.
Soaked in t% nitric acid solution. A copper wire was brought into contact with a titanium ball on one of the unimmersed portions, and a current density of 50 A / m 2 ,
Anode electrolytic oxidation was performed for one hour. As a result, the formation of a 10 μm titanium oxide layer on the spherical titanium surface was confirmed.

【0014】[0014]

【発明の効果】本発明によれば、機械的強度の高い、光
を効率よく受光できる球状の光機能材料を落下管を用い
て製造することができる。また、本発明によれば、完全
結晶に近い構造を持った光機能材料を製造することがで
きる。
According to the present invention, a spherical optical functional material having high mechanical strength and capable of efficiently receiving light can be manufactured using a drop tube. Further, according to the present invention, an optical functional material having a structure close to a perfect crystal can be manufactured.

【図面の簡単な説明】[Brief description of the drawings]

【図1】ゲルマニウム球体の表面にエッチング処理を施
した本発明品の光学顕微鏡写真を示す。
FIG. 1 shows an optical micrograph of a product of the present invention in which the surface of a germanium sphere has been subjected to an etching treatment.

【図2】ゲルマニウム球体の表面にエッチング処理を施
した本発明品の透過電子顕微鏡写真(格子像)を示す。
FIG. 2 shows a transmission electron micrograph (lattice image) of a product of the present invention in which the surface of a germanium sphere has been subjected to an etching treatment.

【図3】ゲルマニウム片の表面にエッチング処理を施し
た比較品の光学顕微鏡写真を示す。
FIG. 3 shows an optical microscope photograph of a comparative product obtained by subjecting a surface of a germanium piece to an etching treatment.

【図4】ゲルマニウム片の表面にエッチング処理を施し
た比較品の格子欠陥部分の透過電子顕微鏡写真を示す。
FIG. 4 shows a transmission electron micrograph of a lattice defect portion of a comparative product in which the surface of a germanium piece has been subjected to an etching treatment.

【図5】ゲルマニウム片の表面にエッチング処理を施し
た比較品の格子欠陥部付近の透過電子顕微鏡写真(格子
像)を示す。
FIG. 5 shows a transmission electron micrograph (lattice image) of a vicinity of a lattice defect portion of a comparative product in which the surface of a germanium piece is subjected to an etching treatment.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 中田 善徳 北海道札幌市豊平区月寒東2条17丁目2 番1号 工業技術院北海道工業技術研究 所内 (72)発明者 永井 秀明 北海道札幌市豊平区月寒東2条17丁目2 番1号 工業技術院北海道工業技術研究 所内 (72)発明者 鈴木 正昭 北海道札幌市豊平区月寒東2条17丁目2 番1号 工業技術院北海道工業技術研究 所内 (56)参考文献 特開 平2−55292(JP,A) 特開 平2−185975(JP,A) 特開 平3−254832(JP,A) 特開 平10−33969(JP,A) 米国特許4021323(US,A) 国際公開98/15983(WO,A1) (58)調査した分野(Int.Cl.7,DB名) C30B 1/00 - 35/00 B01J 35/02 H01L 31/04 H01L 33/00 CA(STN) JICSTファイル(JOIS)──────────────────────────────────────────────────続 き Continuing on the front page (72) Yoshinori Nakata Inventor, Hokkaido Industrial Technology Research Institute, 2-17-1, Higashikan, Toyohira-ku, Sapporo, Hokkaido 2-17-1, Higashi 2-17-17 Hokkaido Institute of Industrial Technology, Institute of Industrial Science and Technology (72) Inventor Masaaki Suzuki 2-17-2, Tsukikan Higashi 2-1, 2-2-1, Higashikan, Sapporo, Hokkaido (56) References JP-A-2-55292 (JP, A) JP-A-2-185975 (JP, A) JP-A-3-254832 (JP, A) JP-A-10-33969 (JP, A) US Pat. (US, A) WO 98/15983 (WO, A1) (58) Fields investigated (Int. Cl. 7 , DB name) C30B 1/00-35/00 B01J 35/02 H01L 31/04 H01L 33/00 CA (STN) JICST Airu (JOIS)

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 形状が球形状である光機能材料を製造す
る方法において、微小重力環境下、該光機能材料又はそ
の主体をなす材料の融液を、微小重力環境下において、
二重管からなり、内管と外管との間の間隙部に冷媒を流
通させた落下管内を665Pa以下のガス雰囲気下で自
由落下させるとともに、その落下中に冷却固させる球形
化工程を含むことを特徴とする球状光機能材料の製造方
法。
1. A method for producing an optically functional material having a spherical shape, comprising: in a microgravity environment, a melt of the optically functional material or a material constituting the optically functional material;
It consists of a double pipe, and the refrigerant flows through the gap between the inner pipe and the outer pipe.
A method for producing a spherical optical functional material, comprising a step of free-falling in a gas atmosphere of 665 Pa or less through a falling pipe passed through the pipe and cooling and solidifying during the fall.
JP28298397A 1997-09-30 1997-09-30 Manufacturing method of spherical optical functional material Expired - Lifetime JP3200626B2 (en)

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JP3200626B2 true JP3200626B2 (en) 2001-08-20

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Country Link
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4021323A (en) 1975-07-28 1977-05-03 Texas Instruments Incorporated Solar energy conversion
WO1998015983A1 (en) 1996-10-09 1998-04-16 Josuke Nakata Semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4021323A (en) 1975-07-28 1977-05-03 Texas Instruments Incorporated Solar energy conversion
WO1998015983A1 (en) 1996-10-09 1998-04-16 Josuke Nakata Semiconductor device

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