JP3201817B2 - Multi-mode crystal oscillator - Google Patents
Multi-mode crystal oscillatorInfo
- Publication number
- JP3201817B2 JP3201817B2 JP04600892A JP4600892A JP3201817B2 JP 3201817 B2 JP3201817 B2 JP 3201817B2 JP 04600892 A JP04600892 A JP 04600892A JP 4600892 A JP4600892 A JP 4600892A JP 3201817 B2 JP3201817 B2 JP 3201817B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- input
- gap
- container body
- guaranteed attenuation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【0001】[0001]
【産業上の利用分野】本発明はMCF(Monolithic Cry
stal Filter)としての多重モード型水晶振動子(多重
モード振動子とする)を利用分野とし、特に保証減衰量
を高める多重モード振動子に関する。The present invention relates to an MCF (Monolithic Cry).
The present invention relates to a multi-mode type crystal resonator (hereinafter referred to as a multi-mode resonator) as a stal filter, and particularly relates to a multi-mode resonator which increases a guaranteed attenuation.
【0002】[0002]
【発明の背景】多重モード振動子は水晶片に形成した例
えば二組の電極対間の音響的結合を利用し、所定のフィ
ルタ特性(伝送特性)を得るものとして通信機器等に有
用されている。このようなものの一つに入出力電極間の
電気的結合による漏れ信号を少なくして保証減衰量を高
めたものがある(参照:実願昭60-118993、特願昭63-27
3981、特願平1-83007号)。BACKGROUND OF THE INVENTION A multi-mode vibrator is used in communication equipment and the like to obtain a predetermined filter characteristic (transmission characteristic) by utilizing acoustic coupling between, for example, two pairs of electrodes formed on a crystal blank. . One of such devices is to reduce the leakage signal due to the electrical coupling between the input and output electrodes, thereby increasing the guaranteed attenuation (see: Japanese Patent Application No. 60-118993, Japanese Patent Application No. 63-27 / 1988).
3981, Japanese Patent Application No. 1-83007).
【0003】[0003]
【従来技術】第6図乃至第8図はこのような多重モード
振動子の一従来例を説明する図で、第6図は(a)は断
面図、第7図は(ab)水晶片の表裏面を示す図、第8
図は容器本体の底面図である。多重モード振動子は水晶
片1を密閉容器2内に封入して形成される。水晶片1は
例えばATカットとした厚みすべり振動子からなる。一
方の主面1aには分割された入出力電極3、4を、他方
の主面1bには共通電極5を形成する。入出力電極3、
4と共通電極5からはそれぞれ引出電極6、7、8を延
出する。密閉容器2は凹状の容器本体9とシーム溶接し
てなる金属蓋体10とからなる。容器本体9の底面9a
には、その中央にシールド電極11と、両側に入出力用
接続電極12、13とをメタイズする。シールド電極1
1は共通電極用引出電極8とワイヤボンディング等によ
り接続し(未図示)、入出力接続電極12、13は入出
力用引出電極6、7と導電性接着剤14等により接続す
る。そして、導電性接着剤14の厚みにより、シールド
電極11と入出力電極3、4とは対向させた状態で、水
晶片1の一方の主面と容器本体9との底面に間隙(電極
間隙Gとする)をもたせる。シールド電極11と入出力
接続電極12、13は容器本体9の外表面に露出して表
面実装用の端子となる。このようなものでは、入出力電
極3、4間の電気的結合により直接的に伝搬する漏れ信
号を、シールド電極11により遮蔽するので、保証減衰
量の低下を防止する。特に、電極間隙Gは、導電性接着
剤14の厚み分となって、大幅に小さくなる。したがっ
て、遮蔽効果を高め、保証減衰量の大幅な増加を期待で
きる。なお、ここでの保証減衰量は第9図に示したよう
に、中心周波数f0から910KHz下がった点での減
衰量A(dB)を指す。2. Description of the Related Art FIGS. 6 to 8 are views for explaining a conventional example of such a multimode vibrator. FIG. 6 (a) is a sectional view, and FIG. FIG.
The figure is a bottom view of the container body. The multi-mode vibrator is formed by enclosing a crystal blank 1 in a sealed container 2. The crystal blank 1 is composed of, for example, an AT-cut thickness shear resonator. On one main surface 1a, divided input / output electrodes 3, 4 are formed, and on the other main surface 1b, a common electrode 5 is formed. Input / output electrode 3,
The extraction electrodes 6, 7, and 8 extend from the common electrode 4 and the common electrode 5, respectively. The closed container 2 includes a concave container body 9 and a metal lid 10 formed by seam welding. Bottom surface 9a of container body 9
, A shield electrode 11 is provided at the center thereof, and input / output connection electrodes 12 and 13 are provided on both sides. Shield electrode 1
1 is connected to the common electrode extraction electrode 8 by wire bonding or the like (not shown), and the input / output connection electrodes 12 and 13 are connected to the input / output extraction electrodes 6 and 7 by the conductive adhesive 14 or the like. Then, due to the thickness of the conductive adhesive 14, a gap (electrode gap G) is formed between the one main surface of the crystal blank 1 and the bottom surface of the container body 9 with the shield electrode 11 and the input / output electrodes 3 and 4 facing each other. ). The shield electrode 11 and the input / output connection electrodes 12 and 13 are exposed on the outer surface of the container body 9 and serve as surface mounting terminals. In such a case, since the leak signal directly propagating due to the electrical coupling between the input and output electrodes 3 and 4 is shielded by the shield electrode 11, a decrease in the guaranteed attenuation is prevented. In particular, the electrode gap G is much smaller than the thickness of the conductive adhesive 14. Therefore, it is possible to enhance the shielding effect and expect a large increase in the guaranteed attenuation. Note that guarantee attenuation in the as shown in FIG. 9 refers to the attenuation A (dB) at the points down 910KHz from the center frequency f 0.
【0004】[0004]
【従来技術の問題点】しかしながら、上記構成のもので
は、導電性接着剤14の厚みを薄くして電極間隙Gを小
さくすると、その期待に反して保証減衰量が低下する問
題があった。Problems with the prior art However, in the above-mentioned structure, when the thickness of the conductive adhesive 14 is reduced to reduce the electrode gap G, there is a problem that the guaranteed attenuation is reduced contrary to the expectation.
【0005】[0005]
【発明の目的】本発明は、電極間隙と保証減衰量との関
係を更に明確にし、保証減衰量を高める多重モード振動
子を提供することを目的とする。SUMMARY OF THE INVENTION It is an object of the present invention to further clarify the relationship between the electrode gap and the guaranteed attenuation and to provide a multi-mode vibrator that increases the guaranteed attenuation.
【0006】[0006]
【解決手段】本発明は、電極間隙に最適値(特異点)の
あることを見い出し、電極間隙を保証減衰量のピーク値
及びその近傍に設定したことを解決手段とする。更に、
具体的には、電極間隙を15μmから40μmに設定し
たことを解決手段とする。以下、本発明の一実施例を、
これらを明らかにする実験例をもって説明する。According to the present invention, an electrode gap is found to have an optimum value (singular point), and the electrode gap is set to a peak value of a guaranteed attenuation amount and its vicinity. Furthermore,
Specifically, the solution is to set the electrode gap from 15 μm to 40 μm. Hereinafter, one embodiment of the present invention,
This will be described with an experimental example that clarifies these.
【0007】[0007]
【実施例】第1図(abc)は、電極間隙(横軸、μ
m)と保証減衰量(縦軸、dB)との関係を説明する図
である。なお、第1図(a)は多重モード振動子の中心
周波数f0を約22MHz、同図(b)は45MHz、
同図(c)は90MHzとした場合である。また、これ
らの実験例では、前従来例における容器本体9の底壁9
aに対応する保持板上に水晶片1を固着し、導電性接着
剤14の厚みに対応した電極間隙Gを顕微鏡(写真)を
もって測定した。これらの実験結果から、いずれの場合
でも、電極間隙Gが小さくなるほど、保証減衰量は高ま
るが、15から40μm中の25μm近傍でピーク値を
迎え、これ以下になると急激に減少する。特に22MH
z「第1図(a)」の場合はそのピーク値は80dB以
上となり、以下、45MHz「第1図(b)」では約8
0dB、90MHz「第1図(c)」では70dBとな
ることが理解される。なお、中心周波数が高くなるほ
ど、ピーク値を得る電極間隙Gは微妙に小さくなる。こ
の実験結果につき、本発明者がその現象を考察したとこ
ろ、次に起因することが推測された。すなわち、第3図
に示したように、電極間隙Gがピーク値となる例えば2
5μm以上に離れて接近する場合は、入出力電極3、4
間の電気的結合(浮遊容量C1)による漏れ信号P1が、
シールド電極11に流入(吸引)して基準電位に流出す
る。したがって、入出力電極3、4間が遮蔽されて保証
減衰量は増加する。次に、25μm以内に接近すると、
入出力電極3、4とシールド電極11との間に浮遊容量
C2、C3を発生する。そして、この浮遊容量C2、C3を
経由して入力電極3から出力電極4に漏れ信号P2が漏
洩する(第4図)。したがって、保証減衰量は急激に低
下すると推測された。なお、第3図においても、シール
ド電極11と入出力電極3、4との間に浮遊容量C2、
C3は発生すると考えられるが、その値が小さくて漏れ
信号P2は微量であり、それ以上に入出力電極3、4間
の漏れ信号P1を遮蔽すると推定される。また、入出力
電極3、4間の漏れ信号P1を特に問題としたが、入出
力電極3、4と共通電極5との間に生ずる漏れ信号(未
図示)についても同様なことが言えると考えられる。し
たがって、上述したことから、電極間隙Gを保証減衰量
のピーク値及びその近傍に設定することにより、例えば
15乃至40μmの間に設定することにより保証減衰量
を良好とした多重モード振動子を得ることができる。FIG. 1 (abc) shows the electrode gap (horizontal axis, μ
FIG. 7 is a diagram for explaining a relationship between m) and a guaranteed attenuation (vertical axis, dB). FIG. 1 (a) shows the center frequency f 0 of the multi-mode vibrator at about 22 MHz, FIG.
FIG. 3C shows a case where the frequency is set to 90 MHz. In these experimental examples, the bottom wall 9 of the container body 9 in the prior art example was used.
The crystal blank 1 was fixed on the holding plate corresponding to a, and the electrode gap G corresponding to the thickness of the conductive adhesive 14 was measured with a microscope (photograph). From these experimental results, in any case, as the electrode gap G becomes smaller, the guaranteed attenuation increases, but reaches a peak value near 25 μm of 15 to 40 μm, and rapidly decreases when the value is less than 25 μm. Especially 22MH
z In the case of "FIG. 1 (a)", the peak value is 80 dB or more, and hereinafter, about 8 MHz in the case of 45 MHz "FIG. 1 (b)".
It is understood that the frequency is 70 dB in the case of 0 dB, 90 MHz “FIG. 1 (c)”. Note that the electrode gap G for obtaining the peak value becomes slightly smaller as the center frequency becomes higher. The inventor of the present invention has considered the phenomenon with respect to this experimental result, and it is presumed that the phenomenon is caused as follows. That is, as shown in FIG. 3, the electrode gap G has a peak value, for example, 2
When approaching at a distance of 5 μm or more, the input / output electrodes 3, 4
Leakage signal P 1 due to electrical coupling (stray capacitance C 1 ) between
It flows (sucks) into the shield electrode 11 and flows out to the reference potential. Therefore, the input / output electrodes 3 and 4 are shielded, and the guaranteed attenuation increases. Next, when approaching within 25 μm,
Stray capacitances C 2 and C 3 are generated between the input / output electrodes 3 and 4 and the shield electrode 11. Then, the leakage signal P 2 leaks from the input electrode 3 to the output electrode 4 via the stray capacitances C 2 and C 3 (FIG. 4). Therefore, it was presumed that the guaranteed attenuation rapidly decreased. In FIG. 3, the stray capacitance C 2 ,
Although C 3 is considered to occur, its value is small and the leakage signal P 2 is very small. It is estimated that the leakage signal P 1 between the input / output electrodes 3 and 4 is further shielded. Further, although a particular problem leakage signal P 1 between the input and output electrodes 3 and 4, when said Similar remarks leakage signal generated between the output electrode 3, 4 and the common electrode 5 (not shown) Conceivable. Therefore, as described above, by setting the electrode gap G to the peak value of the guaranteed attenuation and the vicinity thereof, for example, by setting it between 15 and 40 μm, it is possible to obtain a multi-mode vibrator having a good guaranteed attenuation. be able to.
【0008】[0008]
【他の事項】上記実施例(実験例)では、保持板(容器
本体の底壁)9aに水晶片1の両端部を導電性接着剤1
4により固着し、その厚み分をシールド電極11と入出
力電極3、4の電極間隙Gとしたが、導電性接着剤14
ではその間隙Gを一定(均一)にしにくいので、例えば
第5図に示したようにしてもよい。すなわち、容器本体
9の底壁に設けるシールド電極11と出力接続電極4の
メタライズ時にその厚みを20μ程度異ならせる。そし
て、水晶片1の一端部を5μ程度の導電性接着剤14に
より固着して電極間隙Gを得る。このようにすると、メ
タライズは均一にできるので、導電性接着剤14のみの
場合よりも電極間隙Gを一定に制御しやすい。また、一
端部のみを固着し、他端部を自由端とするので耐衝撃性
を良好とすることができる。なお、この図において、水
晶片1の入出力電極及び引出電極は省略している。ま
た、他端部からの電極導出はワイヤボンディングとす
る。このように、本発明は種々の変形が可能であり、基
本的には、水晶片1の保持構造等は任意に設計してよ
く、要はシールド電極11と入出力電極3、4の電極間
隙Gを保証減衰量のピーク値となる程度に近接させて構
成したものは、本発明の技術的範囲に包含される。な
お、シールド電極11は金属板等であってもよいことは
勿論である。[Others] In the above embodiment (experimental example), both ends of the crystal blank 1 are attached to the holding plate (bottom wall of the container body) 9a by the conductive adhesive 1.
4, and the thickness corresponding to the gap is defined as the electrode gap G between the shield electrode 11 and the input / output electrodes 3 and 4.
In this case, it is difficult to make the gap G constant (uniform), so that the gap G may be as shown in FIG. 5, for example. That is, the thicknesses of the shield electrode 11 provided on the bottom wall of the container body 9 and the output connection electrode 4 are made different by about 20 μm when metallized. Then, one end of the crystal blank 1 is fixed with a conductive adhesive 14 of about 5 μ to obtain an electrode gap G. In this case, since the metallization can be made uniform, it is easier to control the electrode gap G to be constant than when only the conductive adhesive 14 is used. In addition, since only one end is fixed and the other end is a free end, impact resistance can be improved. In this figure, the input / output electrodes and the extraction electrodes of the crystal blank 1 are omitted. In addition, the electrode is led out from the other end by wire bonding. As described above, the present invention can be variously modified. Basically, the holding structure of the crystal blank 1 and the like may be arbitrarily designed. In short, the electrode gap between the shield electrode 11 and the input / output electrodes 3 and 4 is essential. A structure in which G is brought close to the peak value of the guaranteed attenuation is included in the technical scope of the present invention. Note that, of course, the shield electrode 11 may be a metal plate or the like.
【0009】[0009]
【発明の効果】本発明は、電極間隙に最適値(特異点)
のあることを見い出し、電極間隙を保証減衰量のピーク
値及びその近傍に設定したので、保証減衰量を高める多
重モード振動子を提供でき、その実際上のメリットには
非常に大きいものがある。According to the present invention, the optimum value (singular point) is set for the electrode gap.
Since the electrode gap is set at or near the peak value of the guaranteed attenuation, it is possible to provide a multi-mode vibrator that increases the guaranteed attenuation, and its practical merit is very large.
【第1図】本発明の作用効果を説明する電極間隙Gに対
する保証減衰量の特性図で、同図(a)は中心周波数を
22MHz、同図(b)は45MHz、同図(c)は9
0MHzの場合である。FIGS. 1A and 1B are characteristic diagrams of a guaranteed attenuation amount with respect to an electrode gap G for explaining the operation and effect of the present invention. FIG. 1A shows a center frequency of 22 MHz, FIG. 9
This is the case of 0 MHz.
【第2図】本発明の一実施例(実験例)のための多重モ
ード振動子の構造断面図である。FIG. 2 is a structural sectional view of a multimode vibrator for one embodiment (experimental example) of the present invention.
【第3図】本発明の作用効果を説明する模式図で、電極
間隙Gが25μm以上離れて接近したときの図である。FIG. 3 is a schematic diagram for explaining the operation and effect of the present invention, and is a diagram when an electrode gap G approaches by a distance of 25 μm or more.
【第4図】本発明の作用効果を説明する模式図で、電極
間隙Gが25μm以内に接近したときの図である。FIG. 4 is a schematic diagram illustrating the operation and effect of the present invention, and is a diagram when an electrode gap G approaches within 25 μm.
【第5図】本発明の他の実施例を説明する多重モード振
動子の断面図である。FIG. 5 is a sectional view of a multimode vibrator for explaining another embodiment of the present invention.
【第6図】従来例を説明する多重モード振動子の断面図
である。FIG. 6 is a sectional view of a multimode vibrator for explaining a conventional example.
【第7図】同図(a)は従来例を説明する水晶片の一方
の主面の図で、同図(b)は他方方の主面の図である。FIG. 7 (a) is a view of one main surface of a crystal blank for explaining a conventional example, and FIG. 7 (b) is a view of the other main surface.
【第8図】従来例を説明する容器本体の底面の図であ
る。FIG. 8 is a diagram of a bottom surface of a container body for explaining a conventional example.
【第9図】多重モード振動子の保証減衰量を示す帯域特
性図である。FIG. 9 is a band characteristic diagram showing a guaranteed attenuation of a multi-mode vibrator.
1 水晶片、2 密閉容器、3 入力電極、4 出力電
極、5 共通電極、6、7、8 引出電極、9 容器本
体、9a 容器底面、10 金属カバー、11 シール
ド電極、12 入力用接続電極、13 出力用接続電
極、14 導電性接着剤.1 crystal blank, 2 sealed container, 3 input electrode, 4 output electrode, 5 common electrode, 6, 7, 8 extraction electrode, 9 container body, 9a container bottom, 10 metal cover, 11 shield electrode, 12 input connection electrode, 13 output connection electrode, 14 conductive adhesive.
フロントページの続き (56)参考文献 特開 昭52−141157(JP,A) 特開 昭63−65707(JP,A) 特開 平2−261211(JP,A) 特開 平2−119406(JP,A) 特開 平2−98207(JP,A) (58)調査した分野(Int.Cl.7,DB名) H03H 9/00 - 9/215 H03H 9/54 - 9/60 Continuation of the front page (56) References JP-A-52-141157 (JP, A) JP-A-63-65707 (JP, A) JP-A-2-2611211 (JP, A) JP-A-2-119406 (JP) , A) JP-A-2-98207 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) H03H 9/00-9/215 H03H 9/54-9/60
Claims (1)
るとともに他方の主面に共通電極を形成して前記入出力
電極から前記水晶片の外周部に引出電極を延出し、前記
引出電極の延出した水晶片の外周部を容器本体の底面に
設けた接続電極に導電性接着剤によって固着するととも
に、前記水晶片の一方の主面を容器本体の底面に設けた
シールド用電極に対向して近接させ、保証減衰量を高め
た多重モード型水晶振動子において、前記接続端子の厚
みを前記シールド電極よりも大きくして前記導電性接着
剤との合計厚みを、前記水晶片の一方の主面とシールド
用電極との間隙が保証減衰量のピーク値の存在する15
μmから40μm以内としたことを特徴とする多重モー
ド型水晶振動子。[Claim 1 wherein said input to form a common electrode on the other principal surface to form a first main surface to the input and output electrodes of the crystal piece
Extending the extraction electrode from the electrode to the outer peripheral portion of the crystal piece, the
The outer periphery of the crystal piece with the extraction electrode extended to the bottom of the container body
It is fixed to the provided connection electrode with a conductive adhesive.
In the multi-mode crystal resonator having one main surface of the crystal piece opposed to and close to a shield electrode provided on the bottom surface of the container body to increase the guaranteed attenuation , Thick
Only make the conductive adhesive larger than the shield electrode
The total thickness of the material and the gap between one of the main surfaces of the crystal blank and the shielding electrode is such that the peak value of the guaranteed attenuation exists.
A multi-mode crystal resonator characterized in that the thickness is within 40 μm from 40 μm .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04600892A JP3201817B2 (en) | 1992-01-31 | 1992-01-31 | Multi-mode crystal oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04600892A JP3201817B2 (en) | 1992-01-31 | 1992-01-31 | Multi-mode crystal oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0629776A JPH0629776A (en) | 1994-02-04 |
| JP3201817B2 true JP3201817B2 (en) | 2001-08-27 |
Family
ID=12735042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP04600892A Expired - Lifetime JP3201817B2 (en) | 1992-01-31 | 1992-01-31 | Multi-mode crystal oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3201817B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5727124B2 (en) * | 2008-08-28 | 2015-06-03 | 日本電波工業株式会社 | Piezoelectric vibrator |
-
1992
- 1992-01-31 JP JP04600892A patent/JP3201817B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0629776A (en) | 1994-02-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3239769B2 (en) | Surface mount type piezoelectric filter | |
| JP3201817B2 (en) | Multi-mode crystal oscillator | |
| JPH02261211A (en) | Multiple mode type crystal oscillator | |
| JP3203064B2 (en) | Multi-mode crystal oscillator | |
| JPH1168503A (en) | Multi-mode crystal oscillator | |
| JPS583413B2 (en) | surface acoustic wave device | |
| JPH0685599A (en) | Multimode crystal unit | |
| JPH0697757A (en) | Surface acoustic wave filter for surface package | |
| JPH11284482A (en) | Multi-mode crystal oscillator | |
| JP3251061B2 (en) | Multi-mode crystal oscillator | |
| JP3327535B2 (en) | Crystal oscillator for surface mounting | |
| JP3222087B2 (en) | Crystal oscillator for surface mounting | |
| JPH0298207A (en) | Multiple mode type piezoelectric vibrator | |
| JP3287383B2 (en) | Monolithic crystal filter | |
| JP2901791B2 (en) | Surface acoustic wave circuit | |
| JPS596008Y2 (en) | piezoelectric device | |
| JPH02288410A (en) | Surface acoustic wave filter | |
| JP3328455B2 (en) | Multi-mode crystal oscillator | |
| JPH0124977Y2 (en) | ||
| JPH08222987A (en) | Multimode piezoelectric vibrator | |
| JPH06132778A (en) | Ceramic filter utilizing thickness-shear vibration mode | |
| JPH026666Y2 (en) | ||
| CN106603034B (en) | Electrode transmission structure of surface acoustic wave resonator | |
| JP3295926B2 (en) | Monolithic crystal filter | |
| JPH0644231U (en) | Surface acoustic wave filter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090622 Year of fee payment: 8 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090622 Year of fee payment: 8 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090622 Year of fee payment: 8 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100622 Year of fee payment: 9 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100622 Year of fee payment: 9 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110622 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110622 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120622 Year of fee payment: 11 |
|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120622 Year of fee payment: 11 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120622 Year of fee payment: 11 |