JP3205530B2 - Color microscope imaging device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microscope image pick-up device for picking up and displaying an image of a sample observed by a microscope, and more particularly to displaying a sample image with high resolution and good color reproducibility. The present invention relates to a color microscope apparatus capable of performing the above-mentioned.

[0002]

2. Description of the Related Art Conventionally, an image of a sample observed by a microscope is photoelectrically converted by an image pickup device to extract a color image signal, and this image signal is displayed on a monitor to obtain a color image of the sample. Various types of devices have been proposed. In the most common apparatus, a white beam emitted from a white light source is projected as a spot on a sample via an objective lens, reflected light from the sample is condensed by the objective lens, and red and blue light is reflected by a dichroic mirror. , Green, and three primary colors, and each light is received by a light receiving element to extract red, blue, and green color signals, and a color image of the sample is displayed on a color monitor. According to such a color microscope imaging apparatus, the color reproducibility of the color image of the sample projected on the color monitor is excellent, but the disadvantage that the resolution is low because the non-confocal optical system is employed. is there.

The present applicant has already developed a color microscope image pickup apparatus using a confocal optical system in order to solve the above-mentioned drawbacks of a color microscope image pickup apparatus having a non-confocal optical system. FIG. 1 diagrammatically shows the configuration of such a color microscope imaging apparatus. Laser light sources 1, which emit red, green and blue laser light, respectively.
Beam expanders 4, 5 and 6 for emitting light from 2 and 3
To form a parallel light beam, reflected by the mirror 7 and the dichroic mirrors 8 and 9 and incident on the beam splitter 10 through a common optical path, and deflects light transmitted through the beam splitter in x and y directions orthogonal to each other.
A raster is formed by being deflected by the -y scanner 11, and the raster image is projected onto the sample 13 by the objective lens 12.

The light reflected by the sample 13 is condensed by the objective lens 12, passed through the xy scanner 11 again to perform descanning, and then enters the beam splitter 10, where the light reflected by the light is reflected by the dichroic mirror. The light is reflected by 14, 15 and a mirror 16 to be separated into three primary color lights, and the respective lights are received by light receiving elements 24, 25, 26 via relay lenses 17, 18, 19 and pinholes 20, 21, 22. ing. Blue,
The signals output from the light receiving elements 23, 24 and 25 that receive green and red light are amplified by amplifiers 26, 27 and 28, respectively, to generate a blue signal B, a green signal G and a red signal R, and The signal is supplied to the color monitor 29 and the sample 13
Is displayed. Here, the emission points of the laser light sources 1 to 3 and the sample 13 are conjugate with respect to the objective lens 12 and the sample 13 and the pinholes 20 to 22 are conjugated.
Is conjugate with respect to the objective lens 12 and constitutes a confocal optical system, so that the resolution of a color image is very high.

[0005]

A color microscope image pickup apparatus employing the above-described confocal optical system can display an image with extremely high resolution, but depending on the sample, the color reproducibility is low and the chromatic aberration is large. There is a disadvantage that. Hereinafter, this will be described in detail. FIG. 2 shows an optical path of a blue light beam in the confocal optical system. The emission point O of the blue laser 3 can be regarded as a point light source, and an image of this point O is formed at a point P on the surface of the sample 13 by the objective lens 12. The image of this point P is
Is formed at a point Q in the opening of the pinhole 20, and this image is picked up by the light receiving element 23. According to such a confocal optical system, a high-resolution image of a sample can be displayed.

Considering the color reproducibility, the sample
If 13 has a high surface reflectivity such as a metal, the color can be reproduced by receiving the reflected light from the sample surface. When the sample 13 is a thin film, an interference image can be displayed with good color reproducibility. However, in the case where the sample 13 is a printed matter, a colored resin, or a semiconductor device chip, almost no color can be reproduced only by receiving the reflected light from the surface of the sample,
Unable to reproduce accurate hue. For example, in order to reproduce the color of the sample 13, which is a printed matter, it is necessary to receive light that passes through the sample and is reflected by the inside and the bottom as shown in FIG. Such light is blocked by the pinhole 20 and does not enter the light receiving element 23. If the pinhole is removed so as to receive such light, the confocal optical system will no longer be formed, and the resolution will be reduced.

[0007] When light of three primary colors of red, green and blue is used as shown in FIG. 1, it is difficult to correct the chromatic aberration of the objective lens 12 for light of all these colors.
Therefore, the influence of chromatic aberration becomes large, and it is very difficult to display an image having an extremely high resolution which the confocal optical system originally has. For example, when the chromatic aberration of magnification is large, the sizes of the images of the three primary colors are different, and the outline of the image is not displayed sharply. Such a problem is not limited to the confocal optical system, but also occurs in a conventional color microscope imaging apparatus using a non-confocal optical system.

Accordingly, an object of the present invention is to eliminate the above-mentioned conventional disadvantages and to display a color image of an arbitrary sample with an extremely high resolution characteristic of a confocal optical system and with good color reproducibility. It is an object of the present invention to provide a color microscope imaging apparatus capable of performing the above-described operations.

[0009]

A color microscope image pickup apparatus according to the present invention comprises: an image pickup means for extracting high-resolution luminance information of a sample by a confocal optical system; and a low-resolution sample image by a non-confocal optical system. Second imaging means for extracting color information; means for generating a color image signal of the sample from the luminance information and color information; and means for receiving the color image signal and displaying a color image of the sample. It is characterized by the following.

In realizing such a color microscope image pickup apparatus according to the present invention, a method of simultaneously performing an operation of capturing luminance information by a confocal optical system and an operation of capturing color information by a non-confocal optical system (Y). -C
(Simultaneous method) and a method of performing sequentially (YC sequential method). A sequential system is advantageous for simplifying the configuration of the apparatus, but a simultaneous system must be employed when real-time image display is required.

[0011]

FIG. 3 is a diagram showing the principle configuration of a color microscope image pickup apparatus according to the present invention. In this example, the sequential system is adopted, but for convenience of explanation, the confocal optical system and the non-confocal optical system are shown as separate optical systems, but they can be actually configured with a common optical element. is there. Therefore, elements which can be configured in common are denoted by the same reference numerals. First, a confocal optical system for extracting high-resolution luminance information of a sample will be described. The laser beam emitted from the laser light source 31 is converted into a beam expander 32, a beam splitter 33, x
Projecting onto a sample 36 via a y-scanner 34 and an objective lens 35; In the present invention, since the confocal optical system is used to extract luminance information of the sample, the wavelength of the laser beam emitted from the laser light source 31 is not particularly limited, but the aberration correction in the objective lens 35 is good. Wavelength.

The laser beam reflected by the sample 36 is condensed by the objective lens 35, and converges at the opening position of the pinhole 39 via the beam splitter 33, the mirror 37 and the imaging lens 38, and the light transmitted through this pinhole Is received by the light receiving element 40. The output signal of the light receiving element 40 is amplified by the amplifier 41 to generate a lightness signal L ^* representing luminance information. This lightness signal L ^* is called metric lightness in the CIELAB (L ^* a ^* b ^* ) color system and represents luminance information. Further, as will be described later, the quantities a ^* and b ^* representing color information relate to hue and saturation, and are referred to as chromaticity signals in this specification.

As shown in FIG. 3, the above-mentioned optical system constitutes a confocal optical system, and
The lightness signal L ^* obtained from the above represents high-resolution luminance information of the sample 36. In the present invention, a white light source 42 is provided to further extract color information of the sample by the non-confocal optical system, and the white light emitted from the light source is transmitted to the beam splitter 33, the xy scanner 34, and the objective lens 35. After that, it is projected on the sample 36. In FIG. 3, the beam splitter 33 of the non-confocal optical system, the xy scanner
Although 34 and the objective lens 35 are shown separately from those of the confocal optical system, they are the same.

The white light reflected by the sample 36 is passed through the objective lens 35
Then, the light is made incident on the beam splitter 33 via the xy scanner 34, and the light reflected there is reflected by the dichroic mirror 4
The light is separated into blue light, green light and red light by 3, 44 and a mirror 45, and is incident on light receiving elements 49, 50 and 51 via imaging lenses 46, 47 and 48, respectively. Since the optical system for extracting color information is a non-confocal optical system, no pinholes are arranged on the front surfaces of these light receiving elements 49, 50 and 51. Here, mirror 37 and dichroic mirror 4
Since it is necessary to arrange the mirrors 3 and 44 and the mirror 45 on the same optical path, the mirror 37 can be inserted into and removed from the optical path.
Output signals from the light receiving elements 49, 50 and 51 are amplified by amplifiers 52, 53 and 54, respectively, to generate three primary color signals B, G and R of blue, green and red. These three primary color signals are supplied to the first conversion circuit 55, and the chromaticity signals a ^* and b ^* of the CIELAB (L ^* a ^* b ^* ) color system described above are generated according to a predetermined formula. At this time, a brightness signal L ^* is also generated. This signal can be output from the output terminal 56 to the outside. However, this brightness signal is not necessary for displaying a color image according to the present invention.

The chromaticity signals a ^* and b ^* output from the above-mentioned first conversion circuit 54 are supplied to a memory 57 and temporarily stored therein. The chromaticity signals chromaticity a ^* and b ^* read out from the memory 57 in synchronization with the extraction of the high-resolution lightness signal L ^* of the sample by the confocal optical system described above ^.
Is supplied to the second conversion circuit 58 together with the lightness signal L ^* , where the signal of the CIELAB (L ^* a ^* b ^* ) color system is converted into three primary color signals R, G, B according to a predetermined formula. In the present invention, since the color information is extracted by the non-confocal optical system and the luminance information is extracted by the confocal optical system, the three primary color signals R, G, and B generated by the second conversion circuit 57 have high resolution. As well as having high color reproducibility. Therefore, by supplying the three primary color signals thus obtained to the color monitor 59, a color image having high resolution and good color reproducibility can be displayed.

FIG. 4 shows the configuration of the optical system of the first embodiment of the color microscope image pickup apparatus according to the present invention based on the basic configuration shown in FIG. The confocal optical system includes a light source 61, an optical fiber 62 for guiding a light beam emitted from the light source 61, a point where one end of a number of optical fibers is collected, opposed to the output end of the optical fiber 62, and the other end is arranged in one direction. Driven by a linear conversion fiber bundle 63, a slit 64, a relay lens 65, a beam splitter 66, and a driver 67 arranged so as to face the linear output end of the fiber bundle so as to deflect light in the sub-scanning direction. A scanning mirror 68, a relay lens 69, a half mirror 70, and an objective lens 71 are provided, and an image of the slit 64 is formed on the sample 72 by the objective lens 71. The light source 61 can be a high-intensity lamp such as a mercury lamp with a reflecting mirror or a xenon lamp. The half mirror 70 can be selectively inserted into the optical path, and is removed from the optical path when taking in luminance information by the confocal optical system.
Since the scanning mirror 68 deflects light in a direction perpendicular to the longitudinal direction of the light beam transmitted through the slit 64, a raster of the light beam is formed by the slit and the scanning mirror, and the raster is projected onto the sample 72. Becomes

In the confocal optical system, the sample 72
Is reflected by the objective lens 71, re-enters the scanning mirror 68 via the relay lens 69, undergoes a descanning action, and is converted into a linear light beam. The linear light beam further passes through the beam splitter 66, and is imaged on the light receiving element 75 formed of a one-dimensional CCD by the imaging lens 73 through the rotation filter 74. The rotation filter 74 has
A filter 74R, 74G, 74B for red, green, and blue, and a mere opening 74T are provided, and the sample is confocal optical system.
When extracting high-resolution luminance information of 72, the opening 74T is positioned in the optical path.

Further, in order to extract the color information of the sample 72 by the non-confocal optical system, a white light source 76 for emitting light in the entire visible range is provided. And a large diameter light beam emitted from this fiber bundle is relayed by a relay lens 78, 79, an aperture stop 81, and a relay lens 8.
2. The light enters the half mirror 70 via the field stop 83 and the relay lens 84. That is, in this case, the half mirror 70 is inserted in the optical path. The white light reflected by the half mirror 70 is projected as a large spot on the sample 72 by the objective lens 71.

The white light reflected by the sample 72 is
And is incident on the scanning mirror 68 via the half mirror 70 and the relay lens 69, where it is deflected in the sub-scanning direction. The white light deflected by the scanning mirror 68 passes through the beam splitter 66 and is imaged on the light receiving element 75 by the imaging lens 73. When extracting the color information of the sample 72 using the non-confocal optical system, the red, green and blue filters 74R, 74G, and 74B of the rotating filter 74 are sequentially inserted into the optical path, and the red, green, and blue signals, respectively. R, G, and B are taken out. In this manner, signals sequentially output from the one-dimensional CCD 75 can be processed by the processing circuit shown in FIG. 3 to extract high-resolution luminance information and color information of the sample. Since the signals are also sequentially taken out, the memory 57 needs to be arranged on the input side of the first conversion circuit 55. In this example, a part of the confocal optical system for extracting high-resolution luminance information and a part of the non-confocal optical system for extracting color information with good color reproducibility are shared, thereby simplifying the overall configuration. But cannot display a color image of the sample in real time. When the memory is used as described above, image processing such as resizing can be performed.

FIG. 5 shows the structure of a second embodiment of the color microscope image pickup apparatus according to the present invention.
It is of the C simultaneous type. In order to extract high-resolution luminance information of the sample by the confocal optical system, a laser light source 91 is provided, and a laser beam emitted from the laser light source is converted into a laser beam having a predetermined diameter by a beam expander 92, and a mirror 93, a dichroic mirror 94, Beam splitter 95,
The light is projected onto a sample 98 via an xy scanner 96 and an objective lens 97.

The laser beam reflected by the sample 98 is passed through an objective lens 97 and an xy scanner 96 to a beam splitter 95.
After the laser beam reflected by the beam splitter is reflected by the dichroic mirror 99, an image of the sample is formed at the opening position of the pinhole 101 by the imaging lens 100. The light transmitted through the pinhole 101 is received by the light receiving element 102, and the output signal is amplified by the amplifier 103 to generate a brightness signal L ^* representing high-resolution brightness information of the sample.

On the other hand, a non-confocal optical system for extracting color information is provided with a white light source 104, a white light beam emitted from the white light source 104 is reflected by a dichroic mirror 94, and a beam splitter 95, an xy scanner 96 and The light is projected onto the sample 98 via the objective lens 97. The white light beam reflected from the sample 98 is passed through the objective lens 97 and the xy scanner 9.
6, beam splitter 95 and dichroic mirror 99
Through the dichroic mirrors 105, 106 and 107 in order to split the light into blue light, green light and red light, and separate the light of each color into imaging lenses 108, 109 and 110
, And then enter the light receiving elements 111, 112 and 113. Output signals from these light receiving elements 111, 112 and 113 are amplified by amplifiers 114, 115 and 116, respectively, to generate three primary color signals B, G and R. In this manner, color information with good color reproducibility by the non-confocal optical system can be extracted.

As described above, amplifiers 114, 115 and 116
Converts the three primary color signals B, G, and R output from the first conversion circuit
, And generates chromaticity signals a ^* and b ^* of the above-described CIELAB (L ^* a ^* b ^* ) color system from the three primary color signals according to a predetermined formula. At this time, a brightness signal L ^* is also generated, but this signal is not used as described above. The chromaticity signals a ^* and b ^* thus obtained are supplied to the second conversion circuit 118. The brightness signal L ^* output from the amplifier 103 is also supplied to the second conversion circuit 118, and the chromaticity signals a ^* and b ^* and the brightness signal L ^* are converted into three primary color signals R, G and B. Then, these three primary color signals are supplied to the color monitor 119 to display a color image of the sample 98. In this way, a color image with extremely high resolution and good color reproducibility can be obtained. In this example, since the YC simultaneous method is employed, the laser beam for extracting luminance information needs to be outside the wavelength band of white light for extracting color information. It shall emit an ultraviolet laser. The dichroic mirror 94 transmits ultraviolet light but reflects visible light, and the dichroic mirror 99 reflects ultraviolet light but transmits visible light.

FIG. 6 shows the configuration of a third embodiment of the color microscope image pickup apparatus according to the present invention. The device of this embodiment is the same as that of the second embodiment shown in FIG. 5 except that the non-confocal optical system is of a transmissive illumination type. The same elements as those shown in FIG. In this example, the white light emitted from the white light source 104 of the non-confocal optical system is reflected by the mirror 94a, and the collimator lens
The light is projected onto the sample 98 from the back side through 120. The white light transmitted through the sample 98 is separated into blue light, green light and red light and received by the light receiving elements 111, 112 and 113, respectively, as in the second embodiment shown in FIG. Therefore, three primary color signals having good color reproducibility can be obtained from these light receiving elements 111, 112 and 113. The confocal optical system of this embodiment is essentially the same as that of the second embodiment shown in FIG. 5, except that no dichroic mirror is arranged between the mirror 93 and the beam splitter 95.

FIG. 7 shows the configuration of a fourth embodiment of the color microscope image pickup apparatus according to the present invention. In this example, a red laser light source 121, a green laser light source 122, and a blue laser light source 123 are provided, and laser beams emitted from these laser light sources are shaped by beam expanders 124, 125, and 126, respectively, and then a mirror 127 and a dichroic The light is guided to a common optical path by mirrors 128 and 129. These laser beams are converted into a beam splitter 130, an xy scanner.
The light is projected onto a sample 133 via an objective lens 132 and an objective lens 132. The laser beam reflected by the sample 133 is applied to the objective lens 13
2, guided to dichroic mirrors 134, 135 and 136 via an xy scanner 131 and a beam splitter 130, separated into a blue laser beam, a green laser beam and a red laser beam, respectively. , 138 and 139 to the light receiving elements 140, 141 and 142.

Here, the blue laser beam, the green laser beam and the red laser beam are respectively applied to the light receiving elements 140 and 1.
41 and 142 are central light receiving areas having a small area at the center
140a, 141a and 142a, and peripheral light receiving regions 140b, 140b and 140b having a large area around the light receiving light by the confocal optical system in the central light receiving region and light by the non-confocal optical system in the peripheral light receiving region Is received. Therefore, by amplifying the output signals of the center light receiving areas 140a, 141a and 142a by the amplifiers 143a, 144a and 145a, high-resolution three primary color signals B _H , G _H and R _H by the confocal optical system are obtained, Region 140b, 14
By amplifying the output signals of 1b and 142b with amplifiers 143b, 144b and 145b, respectively, three primary color signals B _L , G _L and R _L having low resolution but excellent color reproducibility by a non-confocal optical system can be obtained.

The non-comfortable obtained as described above
Three primary color signal B by cull optical system_L, G _LAnd R_LThe first
To the conversion circuit 146 of CIELAB (L)^*
a^*b^*) Color system lightness signal L^*And chromaticity signal a^*, B
 ^*Generate The chromaticity signal a thus obtained
 ^*, B^*Is supplied to the second conversion circuit 147. This second
The conversion circuit 147 has a high resolution three primary color signal B_HG_HYou
And R_HSelect one of them with switch 148 and supply
I do. As is well known, among the three primary color signals, the green signal is
Normally, the green signal G
_HYou just have to select In the second conversion circuit 147,
This green signal G_HIs the brightness signal L^*As described above
Color signal a^*, B^*And the three primary color signals R,
G and B are generated. The three primary color signals thus obtained
By supplying R, G, B to the color monitor 149,
Displays color images with high resolution and color reproducibility
can do. In this example, the comfort
High resolution three primary color signals B by cull optical system_H, G_Hand
R_HAnd low resolution with non-confocal optics
There are three primary color signals B with good color reproducibility_L, G_LAnd R_LTo
These are supplied to color monitors 15 and 151, respectively, and displayed.
As shown.

The present invention is not limited to the above-described embodiment, but can be variously modified and modified. For example, in the second to fourth embodiments based on the simultaneous YC system, the light source of the confocal optical system emits ultraviolet light, but emits light of a specific wavelength in the visible region. It can also be. In this case, a narrow band filter that selectively transmits or reflects light of a specific wavelength in the visible region may be used instead of the dichroic mirror. Further, in the fourth embodiment shown in FIG. 7, one of the color signals extracted by the confocal optical system is selected by the switch 148 and the second conversion circuit 14 is selected.
7, the luminance signal Y obtained by mixing the three primary color signals B _H , G _H and R _H at a rate of 0.11 B _H +0.59 G _H +0.30 R _H is supplied to the second conversion circuit. You may make it supply. Further, in the fourth embodiment shown in FIG. 7, since the laser light sources respectively emitting the three primary colors are used, there is a possibility that chromatic aberration of magnification may occur, but such an effect is reduced. For this purpose, a resizing process can be performed.

[0029]

As described above, in the color microscope imaging apparatus according to the present invention, the high-resolution luminance information extracted by the confocal optical system and the color information with good color reproducibility extracted by the non-confocal optical system. Are combined to generate a color image signal, so that a color image with high resolution and good color reproducibility can be displayed. In this case, the color information includes an error due to chromatic aberration, but the luminance information does not include an error due to chromatic aberration. Therefore, when viewed as an image, the effect due to chromatic aberration is not noticeable to the eyes.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration of a conventional color microscope imaging apparatus using a confocal optical system.

FIG. 2 is a diagram for explaining the operation thereof.

FIG. 3 is a diagram showing a basic configuration of a color microscope imaging apparatus according to the present invention.

FIG. 4 is a diagram showing the configuration of a first embodiment of a color microscope imaging apparatus according to the present invention.

FIG. 5 is a diagram showing a configuration of a second embodiment of the color microscope imaging apparatus according to the present invention.

FIG. 6 is a diagram showing the configuration of a third embodiment of the color microscope imaging apparatus according to the present invention.

FIG. 7 is a diagram showing a configuration of a fourth embodiment of a color microscope imaging apparatus according to the present invention.

[Explanation of symbols]

31 laser light source, 32 beam expander, 33 beam splitter, 34x-y scanner, 35 objective lens, 36 samples, 37 mirror, 38 imaging lens,
39 pinhole, 40 light receiving element, 41 amplifier, 42
White light source, 43, 44 Dichroic mirror, 45
Mirror, 46, 46, 48 imaging lens, 49, 50, 51 light receiving element, 52, 53, 54 amplifier, 55 first conversion circuit,
57 memory, 58 second conversion circuit, 59 color monitor, 61 light source for confocal optics, 62 optical fiber, 63 point-linear conversion fiber bundle, 64 slit, 65 relay lens, 66 beam splitter,
67 driver, 68 scanning mirror, 69 relay lens, 70 half mirror, 71 objective lens, 72 samples, 73 imaging lens, 74 rotating filter, 75 1
Dimensional CCD, 76 non-confocal optical system light source,
77 optical fiber, 78 points-circle conversion fiber bundle, 7
9, 80, 82, 84 relay lens, 81 aperture stop, 82
Field stop, 91 UV laser, 92 beam expander, 93 mirror, 94 dichroic mirror, 94
a mirror, 95 beam splitter, 96 xy scanner, 97 objective lens, 98 samples, 99, 105, 1
06 dichroic mirror, 100, 108, 109, 110 imaging lens, 101 pinhole, 102, 111, 112, 113 light receiving element, 103, 114, 115, 116 amplifier, 117 1st
Conversion circuit, 118 second conversion circuit, 119 color monitor, 120 collimator lens, 121, 122, 123 laser light source, 124, 125, 126 beam expander,
127 mirror, 128, 129 dichroic mirror,
130 beam splitter, 131 xy expander,
132 Objective lens, 133 samples, 134, 135 Dichroic mirror, 136 mirror, 137, 138, 139
Imaging lens, 140, 141, 142 light receiving element, 143a,
143b, 144a, 144b, 145a, 145b amplifier, 146 first
Conversion circuit, 147 second conversion circuit, 148 switch,
149, 150, 151 color monitor

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) G02B 21/36 H04N 9/04

Claims (15)

(57) [Claims] 1. A laser light source that emits a laser beam having a wavelength other than the visible light region for extracting color information, and a confocal optical system that irradiates the laser beam to a sample to extract high-resolution luminance information of the sample. A white light source that emits white light, and a white light emitted from the white light source is irradiated on the sample simultaneously with the laser beam to extract color information of the sample simultaneously with the luminance information. Second imaging means including a confocal optical system; means for generating a color image signal of the sample from the simultaneously generated luminance information and color information; and receiving the color image signal to generate a color image of the sample in real time. A color microscope imaging apparatus, comprising: means for displaying a color microscope; 2. The apparatus according to claim 1, wherein said first imaging means and said second imaging means are means for deflecting the light beam two-dimensionally, an objective lens for irradiating the sample with the light beam, and a laser beam and white light. The color microscope imaging apparatus according to claim 1, further comprising a common dichroic mirror for separation. 3. The color microscope imaging apparatus according to claim 1, wherein the laser light source is an ultraviolet laser light source. 4. A first imaging means including a high-intensity lamp that emits monochromatic light, a confocal optical system that irradiates the monochromatic light to a sample to extract high-resolution luminance information of the sample, A second imaging unit including a white light source that emits light, a non-confocal optical system that irradiates the sample with white light emitted from the white light source, and extracts color information of the sample, A color microscope imaging apparatus comprising: means for generating a color image signal of a sample; and means for receiving the color image signal and displaying a color image of the sample. 5. A storage unit for operating the first imaging unit and the second imaging unit at different timings in time and storing at least luminance information or color information output from the imaging unit that has been operated first. The color microscope imaging apparatus according to claim 4, wherein a color image of the sample is displayed based on the luminance information or the color information read from the storage means. 6. An image pickup apparatus according to claim 4, wherein said first image pickup means and said second image pickup means commonly have an objective lens for irradiating a sample with a light beam. apparatus. 7. A light beam converting means for converting monochromatic light emitted from the high-intensity lamp into a slit-shaped light beam extending in the main scanning direction in the first imaging means, and the first imaging means is provided with a light beam converting means. A one-dimensional deflecting means for deflecting the light beam in a sub-scanning direction orthogonal to the optical axis, and a non-confocal optical system of the second imaging means on a sample surface scanned by the light beam converting means and the one-dimensional deflecting means 7. The color microscope imaging apparatus according to claim 5, wherein the whole area is simultaneously irradiated. 8. A point-to-linear conversion fiber bundle in which an end facing a high-intensity lamp is gathered in a point shape and the other end is arranged in a straight line in the light beam converting means of the first imaging means; 8. The color microscope imaging apparatus according to claim 7, wherein a slit disposed opposite to a straight end of the fiber bundle is provided. 9. The first imaging means forms an image of a luminescent spot of the monochromatic light source on a sample surface, forms an image of a light beam reflected from the sample at an opening position of a pinhole, and transmits the light beam through the opening. The light beam is received by a light receiving element, and the second
Projecting a light beam radiated from the white light source onto the sample, and decomposing the light beam transmitted through the sample and reflected on the back surface into a light beam of three primary colors via a three-primary-color separation optical system. 5. A light receiving element for receiving light of each color sequentially or simultaneously.
2. The color microscope imaging device according to 1. 10. A first imaging means including a light source for emitting monochromatic light, a confocal optical system for irradiating the monochromatic light to a sample to extract high-resolution luminance information of the sample, and emits white light. A second imaging unit including a white light source and a non-confocal optical system that irradiates the sample with white light emitted from the white light source and extracts color information of the sample; Means for generating a color image signal; and means for receiving the color image signal and displaying a color image of the sample. The first and second imaging means receive light for receiving the monochromatic light and white light. An element and a rotary filter provided with a red filter, a green filter, and a blue filter, which are arranged on the front surface of the light receiving element and pass the monochromatic light as it is, are provided in common. Ra microscope imaging apparatus. 11. A laser light source that emits red, green and blue laser beams, projects these laser beams onto a sample, and uses only a central part of each color laser beam reflected from the sample as a confocal optical system. A light receiving element having a central light receiving area for receiving light via the light receiving element and a peripheral light receiving area for receiving only the peripheral part of each color laser beam through the non-confocal optical system is provided, and an output signal of the central light receiving area for receiving the central part Means for generating color information from an output signal of a peripheral light receiving region for receiving a peripheral portion from the light source, means for generating a color image signal of the sample from the luminance information and the color information, Means for displaying a color image of the sample. 12. The laser beam of red, green and blue is simultaneously projected on a sample, a laser beam reflected from the sample is decomposed into laser beams of respective colors, and only a central portion of the laser beam of each color is subjected to confocal optics. A light receiving element having a light receiving area for receiving light via the system and a light receiving area for receiving only a peripheral portion of the beam through the non-confocal optical system is provided for each laser beam of each color.
At the same time as generating luminance information from the output signal of the light receiving area that receives the central part of the laser beam, and simultaneously generating color information from the output signal of the light receiving area that receives the peripheral part of the laser beam, a color image is displayed in real time. The color microscope imaging apparatus according to claim 11, wherein the imaging apparatus is configured. 13. A first imaging unit including a confocal optical system for extracting high-resolution luminance information of a sample, a second imaging unit including a non-confocal optical system for extracting color information of the sample, and the luminance information. Means for generating a color image signal of the sample from the image data and the color information; and means for receiving the color image signal and displaying a color image of the sample. A color microscope imaging apparatus, wherein a common light source means is provided. 14. The color microscope imaging apparatus according to claim 13, wherein said common light source means comprises three laser light sources for emitting red, green and blue laser beams, respectively. 15. A first imaging unit including a confocal optical system for extracting high-resolution luminance information of a sample, a second imaging unit including a non-confocal optical system for extracting color information of the sample, and the luminance information. Means for generating a color image signal of the sample from the image data and the color information; and means for receiving the color image signal and displaying a color image of the sample. A central light receiving area for receiving only the central portion of the light beam via the confocal optical system and outputting luminance information, and receiving a color for only the peripheral portion of the light beam via the non-confocal optical system. A color microscope imaging apparatus, wherein a light receiving element having a peripheral light receiving area for outputting information is provided in common.