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JP3211916B2 - Karman vortex flowmeter - Google Patents
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JP3211916B2 - Karman vortex flowmeter - Google Patents

Karman vortex flowmeter

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Publication number
JP3211916B2
JP3211916B2 JP27288993A JP27288993A JP3211916B2 JP 3211916 B2 JP3211916 B2 JP 3211916B2 JP 27288993 A JP27288993 A JP 27288993A JP 27288993 A JP27288993 A JP 27288993A JP 3211916 B2 JP3211916 B2 JP 3211916B2
Authority
JP
Japan
Prior art keywords
diaphragm
piezoelectric element
karman vortex
insulating material
vortex
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP27288993A
Other languages
Japanese (ja)
Other versions
JPH07128101A (en
Inventor
雅浩 刑部
誠治 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP27288993A priority Critical patent/JP3211916B2/en
Publication of JPH07128101A publication Critical patent/JPH07128101A/en
Application granted granted Critical
Publication of JP3211916B2 publication Critical patent/JP3211916B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】この発明は、カルマン渦に基づく
力を受ける検出棒と、歪みを生じるダイヤフラムとが一
体構成され、そのダイヤフラムの表面に歪み検出用の圧
電素子が電気的に絶縁されて固定されるカルマン渦流量
計において、とくにダイヤフム表面に一体成形された絶
縁材と別の絶縁板とによって、圧電素子を挟んで固定す
る構造にし、圧電素子の出力感度ひいては測定感度の維
持,向上を図るカルマン渦流量計に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a detection rod which receives a force based on Karman vortex and a diaphragm which generates distortion, and a piezoelectric element for detecting distortion is electrically insulated on the surface of the diaphragm. In the fixed Karman vortex flow meter, the piezoelectric element is sandwiched and fixed, especially by an insulating material integrally formed on the diaphragm surface and another insulating plate, to maintain and improve the output sensitivity of the piezoelectric element and, consequently, the measurement sensitivity. It relates to the Kalman vortex flowmeter.

【0002】[0002]

【従来の技術】従来例について図4と図5とを参照しな
がら説明する。図4は従来例の側断面図、図5は図4の
断面A-A に関する渦発生体の孔部の横断面図である。図
4において、1は測定流体の流れる管路である。2は渦
発生体で、管路1にその直径に沿って貫通する形で挿設
され、この貫通部分は三角形断面の上流側柱状体11と、
台形断面の下流側柱状体12とからなり、かつ管路1 との
上, 下の各嵌合箇所に、カルマン渦発生を促すための円
筒状の各突出部25,26 が一体成形される。なお、管路1
との上, 下の各嵌合箇所に、符号を付けてないOリング
が挿設されるが、これらは流体封止と防振兼用である。
3 は渦検出体で、円板状のダイヤフラム3aと、その軸線
方向に内方に伸びる心棒3bと、その外方に伸びるネジ付
き棒とからなる。心棒3bは、2段階になっており、その
先端側の小径部分が柱状体12にあけられた穴28の内部に
位置し、小径部分の根元部に共振防止用に緩衝材4 が挿
設される。ダイヤフラム3aの上面側に、ネジ付き棒に嵌
まる形で順に絶縁板6,圧電素子8,絶縁板9 および皿バネ
9 が積層され、バランスウェイト10のネジ込みによって
固定される。ここで、圧電素子8 は、渦検出体3 の下側
の棒状部分の微小変位をダイヤフラム3aの変位として検
出し電気信号に変換, 出力する。バランスウェイト10
は、ネジ固定するナットの機能とともに、渦検出体3 が
受けるカルマン渦以外の振動要因、たとえば管路1 など
の振動の影響を打ち消す機能をもつ。
2. Description of the Related Art A conventional example will be described with reference to FIGS. 4 is a side sectional view of a conventional example, and FIG. 5 is a transverse sectional view of a hole of a vortex generator with respect to a section AA in FIG. In FIG. 4, reference numeral 1 denotes a conduit through which a measurement fluid flows. Numeral 2 denotes a vortex generator, which is inserted into the pipe 1 so as to penetrate along the diameter thereof, and the penetrating portion has an upstream columnar body 11 having a triangular cross section.
Cylindrical projections 25 and 26 for promoting the generation of Karman vortices are integrally formed at upper and lower fitting portions of the downstream columnar body 12 having a trapezoidal cross section and the pipeline 1. Line 1
O-rings without reference numerals are inserted into the upper and lower fitting portions of the above, which are used for both fluid sealing and vibration isolation.
Reference numeral 3 denotes a vortex detector, which comprises a disk-shaped diaphragm 3a, a mandrel 3b extending inward in the axial direction, and a threaded rod extending outward. The mandrel 3b has two stages. The small diameter portion on the tip side is located inside the hole 28 drilled in the columnar body 12, and the cushioning material 4 is inserted at the root of the small diameter portion for preventing resonance. You. An insulating plate 6, a piezoelectric element 8, an insulating plate 9 and a disc spring are fitted on the upper surface of the diaphragm 3a in such a manner as to fit into a threaded rod.
9 are stacked and fixed by screwing in the balance weight 10. Here, the piezoelectric element 8 detects a minute displacement of the lower bar portion of the vortex detector 3 as a displacement of the diaphragm 3a, converts the displacement into an electric signal, and outputs the electric signal. Balance weight 10
Has a function of canceling the influence of vibration factors other than the Karman vortex that the vortex detector 3 receives, for example, the vibration of the pipeline 1 and the like, in addition to the function of the nut for fixing the screw.

【0003】図4において、管路1 に流体が右方向に流
れるとき、上流側柱状体11と、下流側柱状体12とによっ
て、カルマン渦が柱状体12の近傍に発生し、この発生し
たカルマン渦によって生じる流体の圧力変化が、渦検出
体3 の先端部分の心棒3bに伝達される。この圧力変化の
伝達は、図5において、柱状体12の穴28と連通するよう
に、心棒3bに対応する位置で、柱状体12に流れと直角に
紙面に平行に貫通される導圧孔13を介しておこなわれ
る。さて、渦検出体3 の心棒3bを含む棒状部分の微小変
位は、ダイヤフラム3aの変位に変換された後、圧電素子
8 によって、対応する電気信号に変換, 出力される。
In FIG. 4, when a fluid flows rightward in a pipe 1, Karman vortices are generated near the column 12 by the upstream column 11 and the downstream column 12, and the generated Karman vortex is generated. The pressure change of the fluid caused by the vortex is transmitted to the mandrel 3b at the tip of the vortex detector 3. In FIG. 5, the pressure change is transmitted through a pressure guiding hole 13 penetrating through the columnar body 12 at a position corresponding to the mandrel 3b at right angles to the flow and in parallel with the sheet of FIG. Is done via Now, the minute displacement of the rod portion including the mandrel 3b of the vortex detector 3 is converted into the displacement of the diaphragm 3a,
8 to convert and output the corresponding electrical signal.

【0004】ところで、圧電素子8と、各絶縁板6,7
についてさらに詳しく説明する。図2は従来例の圧電素
子に関し、(a) はその平面図、(b) はその背面図であ
る。図2(a)において、圧電素子8 の中心を通る横軸に関
し、下側に円弧状の電極8a、上側に円弧状の電極8bが対
称配置される。右側の端に示された舌片状の電極8cは、
図2(b)における円環状電極8cの折り返された部分であ
る。各電極8a,8b の円弧と電極8cの円環とは対応する。
図4 において、カルマン渦に基づく紙面に直角な力は、
ダイヤフラム3aに紙面に含まれる横軸の回りの曲げモー
メントを加える。この曲げモーメントによって、ダイヤ
フラム3aに曲げ歪みが生じ、これに応じて圧電素子8 か
ら電圧信号が出力される。すなわち、図2(a)の各電極8
a,8b には、互いに同じ大きさで符号の異なる歪みが生
じ、各電極8a,8c 間と、各電極8b,8c 間とに互いに同じ
大きさで符号の異なる電圧が発生する。この各電圧に基
づいて、図示してない演算回路によって流速流量を求め
る演算がおこなわれる。なお、図2 と次に述べる図3 と
は、発明に係る実施例と共通である。
By the way, the piezoelectric element 8 and the insulating plates 6 and 7
Will be described in more detail. 2 (a) is a plan view of the conventional piezoelectric element, and FIG. 2 (b) is a rear view thereof. In FIG. 2A, an arc-shaped electrode 8a is symmetrically arranged on the lower side and an arc-shaped electrode 8b is arranged on the upper side with respect to a horizontal axis passing through the center of the piezoelectric element 8. The tongue-shaped electrode 8c shown at the right end is
This is a folded portion of the annular electrode 8c in FIG. 2 (b). The arc of each electrode 8a, 8b corresponds to the ring of electrode 8c.
In Fig. 4, the force perpendicular to the paper based on the Karman vortex is
A bending moment about a horizontal axis included in the drawing is applied to the diaphragm 3a. Due to the bending moment, bending distortion occurs in the diaphragm 3a, and a voltage signal is output from the piezoelectric element 8 in response thereto. That is, each electrode 8 in FIG.
Distortions having the same magnitude and different signs occur in a and 8b, and voltages having the same magnitude and different signs are generated between the electrodes 8a and 8c and between the electrodes 8b and 8c. Based on these voltages, a calculation circuit (not shown) calculates the flow velocity and flow rate. Note that FIG. 2 and FIG. 3 described below are common to the embodiment according to the present invention.

【0005】図3は従来例の圧電素子に係る絶縁板に関
し、(a) はその一方の平面図、(b)はその他方の平面図
である。一方の絶縁板6 は、圧電素子8 の背面側( 図2
(b)参照) と接触し、他方の絶縁板7 は、圧電素子8 の
上面側( 図2 (a) 参照) と接触する。絶縁板6 には電極
はないが、絶縁板7 には各電極7a,7b,7cが設けられる。
絶縁板7 の電極7a,7b,7cと、圧電素子8 の電極8a,8b,8c
(舌片部)とがそれぞれ重なり合って接触して、各電極
7a,7b,7cの直線部の端部から、圧電素子8 からの電圧信
号が取り出される。なお、電極7cは接地用である。
FIGS. 3A and 3B relate to a conventional insulating plate for a piezoelectric element. FIG. 3A is a plan view of one of them, and FIG. 3B is a plan view of the other. One insulating plate 6 is located on the back side of the piezoelectric element 8 (Fig. 2).
2 (b)), and the other insulating plate 7 contacts the upper surface side of the piezoelectric element 8 (see FIG. 2 (a)). The insulating plate 6 has no electrodes, but the insulating plate 7 has electrodes 7a, 7b, 7c.
Electrodes 7a, 7b, 7c of insulating plate 7 and electrodes 8a, 8b, 8c of piezoelectric element 8
(The tongue) overlap each other and contact each other
Voltage signals from the piezoelectric element 8 are extracted from the ends of the linear portions 7a, 7b, 7c. Note that the electrode 7c is for grounding.

【0006】[0006]

【発明が解決しようとする課題】従来例では、カルマン
渦に基づく力を受けて、ダイヤフム3aに曲げ歪みが生じ
たとき、この歪みは、そのまま正確に圧電素子8 に伝わ
らない。その原因は、ダイヤフム3aと絶縁板6 との間、
および、絶縁板6 と圧電素子8 との間でわずかながら滑
りを生じるからである。この滑りのため、圧電素子8 に
生じる歪みは、実際にダイヤフム3aに生じた歪みより小
さくなる。言いかえれば、圧電素子8 の出力感度が低下
することになる。
In the prior art, when a bending strain is generated in the diaphragm 3a by receiving a force based on the Karman vortex, the distortion is not transmitted to the piezoelectric element 8 exactly as it is. The cause is that between the diaphragm 3a and the insulating plate 6,
Also, a slight slippage occurs between the insulating plate 6 and the piezoelectric element 8. Due to this slip, the distortion generated in the piezoelectric element 8 is smaller than the distortion actually generated in the diaphragm 3a. In other words, the output sensitivity of the piezoelectric element 8 decreases.

【0007】この発明が解決すべき課題は、従来の技術
がもつ以上の問題点を解消し、圧電素子の出力感度ひい
ては測定感度の維持,向上を図るカルマン渦流量計を提
供することにある。
An object of the present invention is to provide a Kalman vortex flowmeter which solves the above problems of the prior art and maintains and improves the output sensitivity of the piezoelectric element and hence the measurement sensitivity.

【0008】[0008]

【課題を解決するための手段】請求項1に係るカルマン
渦流量計は、カルマン渦に基づく力を受ける検出棒と、
歪みを生じるダイヤフラムとが一体的に構成され、その
ダイヤフラムの表面に歪み検出用の圧電素子が電気的に
絶縁されて設けられた流量計において、圧電素子が、ダ
イヤフム表面に一体成形された絶縁材と別の絶縁板とに
よって、両側から挟まれて固定される。
According to a first aspect of the present invention, there is provided a Karman vortex flowmeter comprising: a detection rod receiving a force based on a Karman vortex;
In a flowmeter in which a diaphragm that generates distortion is integrally formed and a piezoelectric element for detecting strain is electrically insulated on the surface of the diaphragm, the piezoelectric element is an insulating material integrally formed on the surface of the diaphragm. And another insulating plate to be sandwiched and fixed from both sides.

【0009】請求項2に係るカルマン渦流量計は、請求
項1に記載の流量計において、絶縁材のダイヤフラムと
の一体成形が、検出棒およびダイヤフラムの金属材料を
用いた射出成形による。請求項3に係るカルマン渦流量
計は、請求項1または2に記載の流量計において、絶縁
材が、セラミックスである。
According to a second aspect of the present invention, in the flow meter according to the first aspect, the integral molding of the insulating material with the diaphragm is performed by injection molding using a metal material for the detection rod and the diaphragm. A Karman vortex flowmeter according to a third aspect is the flowmeter according to the first or second aspect, wherein the insulating material is ceramics.

【0010】[0010]

【作用】請求項1ないし3のいずれかの項に係るカルマ
ン渦流量計では、カルマン渦に基づく力を受けて、ダイ
ヤフムに歪みが生じたとき、この歪みは、ダイヤフムの
表面に一体成形された絶縁材を介してほぼ正確に圧電素
子に伝わる。
In the Karman vortex flowmeter according to any one of claims 1 to 3, when the diaphragm is distorted by a force based on the Karman vortex, the distortion is integrally formed on the surface of the diaphragm. Almost accurately transmitted to the piezoelectric element via the insulating material.

【0011】[0011]

【実施例】この発明に係るカルマン渦流量計の実施例に
ついて、以下に図を参照しながら説明する。この実施例
が従来例と異なる点は、圧電素子とダイヤフラムとの絶
縁構造にある。図1は実施例の要部の側断面図である。
なお、従来例における部材に同じ、または対応する部材
には、同じ符号を付ける。図1において、ダイヤフラム
3aの中心部の上面で、圧電素子8 が載置されて接触する
箇所に、セラミック円板である絶縁材3cが、表面を露出
させ半ば埋設される形で一体成形される。しかも絶縁材
3cは、ステンレス鋼からなる渦検出体3 に射出成形によ
って、位置精度良くかつ確実に一体化される。なお、圧
電素子8 の上側の絶縁板7 は従来例におけるのと同じ部
材であるから、出力信号の取り出し方は、従来と同様に
おこなわれる。また、図1 で従来例の図4 におけるのと
異なる点として、主題には直接関係ないが、二つの皿バ
ネ9 の向かい合った間に、安定化のために中間板9aが介
挿入れていることを付言する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a Karman vortex flowmeter according to the present invention will be described below with reference to the drawings. This embodiment differs from the conventional example in the insulating structure between the piezoelectric element and the diaphragm. FIG. 1 is a side sectional view of a main part of the embodiment.
The same reference numerals are given to the same or corresponding members in the conventional example. In FIG. 1, the diaphragm
An insulating material 3c, which is a ceramic disk, is formed integrally with a portion of the upper surface of the central portion of the portion 3a where the piezoelectric element 8 is placed and in contact with the piezoelectric element 8 so that the surface is exposed and partially buried. And insulation
3c is accurately and reliably integrated with the vortex detector 3 made of stainless steel by injection molding. Since the upper insulating plate 7 of the piezoelectric element 8 is the same member as in the conventional example, the method of extracting the output signal is performed in the same manner as in the conventional example. Also, in FIG. 1, the intermediate plate 9 a is interposed for stabilization between the two disc springs 9, although it is not directly related to the subject, unlike the conventional example in FIG. 4. I add that.

【0012】したがって、渦検出体3 の心棒3bがカルマ
ン渦に基づく力を受けて、ダイヤフム3aに曲げ歪みが生
じたとき、この曲げ歪みは、従来例におけるのと異なっ
て、ダイヤフム3aの表面に一体成形された絶縁材3cを介
してほぼ正確に圧電素子8 に伝わる。その結果、圧電素
子8 に生じる曲げ歪みは、実際にダイヤフム3aに生じた
曲げ歪みにほぼ正確に等しくなる。言いかえれば、圧電
素子8 の出力感度、ひいては測定感度が、従来例のとき
に比べて維持,向上する。
Therefore, when the mandrel 3b of the vortex detector 3 receives a force based on the Karman vortex and a bending strain is generated in the diaphragm 3a, the bending strain is different from that in the conventional example, and is generated on the surface of the diaphragm 3a. Almost accurately transmitted to the piezoelectric element 8 via the integrally formed insulating material 3c. As a result, the bending strain generated in the piezoelectric element 8 becomes almost exactly equal to the bending strain actually generated in the diaphragm 3a. In other words, the output sensitivity of the piezoelectric element 8, and thus the measurement sensitivity, is maintained and improved as compared with the conventional example.

【0013】[0013]

【発明の効果】請求項1ないし3のいずれかの項に係る
カルマン渦流量計では、カルマン渦に基づく力を受け
て、ダイヤフムに歪みが生じたとき、この歪みは、ダイ
ヤフムの表面に一体成形された絶縁材を介してほぼ正確
に圧電素子に伝わる。その結果、圧電素子に生じる歪み
は、実際にダイヤフムに生じた歪みにほぼ正確に等しく
なり、言いかえれば、従来例におけるより圧電素子の出
力感度、ひいては測定感度が維持,向上する。
According to the Karman vortex flowmeter according to any one of claims 1 to 3, when the diaphragm is distorted by a force based on the Karman vortex, the distortion is integrally formed on the surface of the diaphragm. Almost accurately transmitted to the piezoelectric element via the insulating material. As a result, the distortion generated in the piezoelectric element becomes almost exactly equal to the distortion actually generated in the diaphragm. In other words, the output sensitivity of the piezoelectric element and, consequently, the measurement sensitivity are maintained and improved as compared with the conventional example.

【0014】とくに請求項2に係るカルマン流量計で
は、絶縁材のダイヤフラムとの一体成形が、検出棒およ
びダイヤフラムの金属材料を用いた射出成形によるか
ら、製作が容易で、絶縁材とダイヤフラムとの一体化が
確実、かつ位置精度良くおこなわれ、圧電素子の出力感
度、ひいては測定感度の維持,向上が支援される。とく
に請求項3に係るカルマン流量計では、絶縁材がセラミ
ックスで、耐熱性にすぐれ、長期間にわたり絶縁性が維
持されるから、射出成形が容易になり、測定感度に対す
る信頼性向上が支援される。
In particular, in the Kalman flowmeter according to the second aspect, since the integral molding of the insulating material with the diaphragm is performed by injection molding using a metal material for the detecting rod and the diaphragm, the production is easy, and the insulating material and the diaphragm can be easily combined. The integration is performed reliably and with high positional accuracy, and the maintenance and improvement of the output sensitivity of the piezoelectric element and, consequently, the measurement sensitivity are supported. In particular, in the Kalman flowmeter according to claim 3, since the insulating material is ceramics, the heat resistance is excellent, and the insulating property is maintained for a long time, the injection molding is facilitated, and the improvement of the reliability with respect to the measurement sensitivity is supported. .

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明に係る実施例の要部の側断面図FIG. 1 is a side sectional view of a main part of an embodiment according to the present invention.

【図2】実施例と従来例の圧電素子に関し、(a) はその
平面図、(b) はその背面図
2 (a) is a plan view and FIG. 2 (b) is a rear view of a piezoelectric element according to an embodiment and a conventional example.

【図3】実施例と従来例の圧電素子の絶縁板に関し、
(a) はその一方の平面図、(b) はその他方の平面図
FIG. 3 shows an insulating plate of a piezoelectric element according to an embodiment and a conventional example.
(a) is a plan view of one of them, (b) is a plan view of the other

【図4】従来例の側断面図FIG. 4 is a side sectional view of a conventional example.

【図5】従来例における渦発生体の孔部の横断面図FIG. 5 is a cross-sectional view of a hole of a vortex generator in a conventional example.

【符号の説明】[Explanation of symbols]

1 管路 2 渦発生体 3 渦検出体 3a ダイヤフラム 3b 検出棒 3c 絶縁材 7 絶縁板 7a,7b,7c 電極 8 圧電素子 8a,8b,8c 電極 9 皿バネ 9a 中間板 DESCRIPTION OF SYMBOLS 1 Pipeline 2 Vortex generator 3 Vortex detector 3a Diaphragm 3b Detection rod 3c Insulating material 7 Insulating plate 7a, 7b, 7c Electrode 8 Piezoelectric element 8a, 8b, 8c Electrode 9 Disc spring 9a Intermediate plate

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平6−174509(JP,A) 特開 平3−251722(JP,A) 特開 平1−123112(JP,A) 特開 昭59−63537(JP,A) 実開 平4−85123(JP,U) 実開 平3−106424(JP,U) 実開 平2−118224(JP,U) 実開 平2−109216(JP,U) 実開 昭64−33614(JP,U) 実開 昭60−65636(JP,U) 実開 昭56−7023(JP,U) 特許2929731(JP,B2) 特許2976592(JP,B2) 特許3114401(JP,B2) 特許3038497(JP,B2) (58)調査した分野(Int.Cl.7,DB名) G01F 1/32 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-6-174509 (JP, A) JP-A-3-251722 (JP, A) JP-A-1-123112 (JP, A) JP-A-59-1984 63537 (JP, A) Japanese Utility Model 4-85123 (JP, U) Japanese Utility Model 3-106424 (JP, U) Japanese Utility Model 2-118224 (JP, U) Japanese Utility Model 2-109216 (JP, U) Japanese Utility Model Application No. Sho 64-33614 (JP, U) Japanese Utility Model Application No. Sho 60-65636 (JP, U) Japanese Utility Model Application No. Sho 56-7023 (JP, U) Patent 2929731 (JP, B2) Patent 2976592 (JP, B2) Patent 3114401 (Japanese) JP, B2) Patent 3038497 (JP, B2) (58) Fields investigated (Int. Cl. 7 , DB name) G01F 1/32

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】カルマン渦に基づく力を受ける検出棒と、
歪みを生じるダイヤフラムとが一体的に構成され、その
ダイヤフラムの表面に歪み検出用の圧電素子が電気的に
絶縁されて設けられた流量計において、圧電素子は、ダ
イヤフム表面に一体成形された絶縁材と別の絶縁板とに
よって、両側から挟まれて固定されることを特徴とする
カルマン渦流量計。
A detection rod receiving a force based on Karman vortex;
In a flow meter in which a diaphragm that generates distortion is integrally formed, and a piezoelectric element for strain detection is electrically insulated on the surface of the diaphragm, the piezoelectric element is an insulating material integrally formed on the surface of the diaphragm. A Karman vortex flowmeter, which is sandwiched and fixed from both sides by an insulating plate.
【請求項2】請求項1に記載の流量計において、絶縁材
のダイヤフラムとの一体成形は、検出棒およびダイヤフ
ラムの金属材料を用いた射出成形によることを特徴とす
るカルマン渦流量計。
2. The Karman vortex flow meter according to claim 1, wherein the integral molding of the insulating material with the diaphragm is performed by injection molding using a metal material for the detection rod and the diaphragm.
【請求項3】請求項1または2に記載の流量計におい
て、絶縁材は、セラミックスであることを特徴とするカ
ルマン渦流量計。
3. The Karman vortex flow meter according to claim 1, wherein the insulating material is a ceramic.
JP27288993A 1993-11-01 1993-11-01 Karman vortex flowmeter Expired - Fee Related JP3211916B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27288993A JP3211916B2 (en) 1993-11-01 1993-11-01 Karman vortex flowmeter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27288993A JP3211916B2 (en) 1993-11-01 1993-11-01 Karman vortex flowmeter

Publications (2)

Publication Number Publication Date
JPH07128101A JPH07128101A (en) 1995-05-19
JP3211916B2 true JP3211916B2 (en) 2001-09-25

Family

ID=17520172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27288993A Expired - Fee Related JP3211916B2 (en) 1993-11-01 1993-11-01 Karman vortex flowmeter

Country Status (1)

Country Link
JP (1) JP3211916B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020134264A1 (en) 2020-12-18 2022-06-23 Endress+Hauser Flowtec Ag Sensor for detecting pressure fluctuations in a flowing fluid and measuring system formed therewith

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2929731B2 (en) 1991-02-12 1999-08-03 富士電機株式会社 Karman vortex flowmeter and method of manufacturing the same
JP2976592B2 (en) 1991-07-01 1999-11-10 富士電機株式会社 Karman vortex flowmeter
JP3038497B2 (en) 1989-12-22 2000-05-08 ザ フォックスボロ カンパニー Piezoelectric differential pressure vortex sensor
JP3114401B2 (en) 1992-12-09 2000-12-04 富士電機株式会社 Karman vortex flowmeter
JP3106424U (en) 2003-09-30 2005-01-06 自強 簡 Quick clock mechanism

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3038497B2 (en) 1989-12-22 2000-05-08 ザ フォックスボロ カンパニー Piezoelectric differential pressure vortex sensor
JP2929731B2 (en) 1991-02-12 1999-08-03 富士電機株式会社 Karman vortex flowmeter and method of manufacturing the same
JP2976592B2 (en) 1991-07-01 1999-11-10 富士電機株式会社 Karman vortex flowmeter
JP3114401B2 (en) 1992-12-09 2000-12-04 富士電機株式会社 Karman vortex flowmeter
JP3106424U (en) 2003-09-30 2005-01-06 自強 簡 Quick clock mechanism

Also Published As

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