JP3214756B2 - Epoxy resin composition, cured product thereof, and semiconductor device - Google Patents
Epoxy resin composition, cured product thereof, and semiconductor deviceInfo
- Publication number
- JP3214756B2 JP3214756B2 JP15198993A JP15198993A JP3214756B2 JP 3214756 B2 JP3214756 B2 JP 3214756B2 JP 15198993 A JP15198993 A JP 15198993A JP 15198993 A JP15198993 A JP 15198993A JP 3214756 B2 JP3214756 B2 JP 3214756B2
- Authority
- JP
- Japan
- Prior art keywords
- group
- epoxy resin
- resin composition
- amino
- resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000003822 epoxy resin Substances 0.000 title claims description 49
- 229920000647 polyepoxide Polymers 0.000 title claims description 49
- 239000000203 mixture Substances 0.000 title claims description 37
- 239000004065 semiconductor Substances 0.000 title claims description 24
- -1 phenol compound Chemical class 0.000 claims description 46
- 239000005011 phenolic resin Substances 0.000 claims description 29
- 125000003277 amino group Chemical group 0.000 claims description 23
- 239000003795 chemical substances by application Substances 0.000 claims description 19
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 14
- 125000003710 aryl alkyl group Chemical group 0.000 claims description 11
- 125000004104 aryloxy group Chemical group 0.000 claims description 11
- 229920001568 phenolic resin Polymers 0.000 claims description 10
- 239000011256 inorganic filler Substances 0.000 claims description 9
- 229910003475 inorganic filler Inorganic materials 0.000 claims description 9
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 claims description 8
- 125000003545 alkoxy group Chemical group 0.000 claims description 8
- 125000005843 halogen group Chemical group 0.000 claims description 8
- 150000001412 amines Chemical class 0.000 claims description 7
- 125000003118 aryl group Chemical group 0.000 claims description 7
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 6
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 6
- 238000005538 encapsulation Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 125000006539 C12 alkyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 4
- 125000003700 epoxy group Chemical group 0.000 claims description 4
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 44
- 229920005989 resin Polymers 0.000 description 36
- 239000011347 resin Substances 0.000 description 36
- 238000006243 chemical reaction Methods 0.000 description 29
- 229920003986 novolac Polymers 0.000 description 15
- 238000000034 method Methods 0.000 description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 13
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 10
- 239000003054 catalyst Substances 0.000 description 10
- QWVGKYWNOKOFNN-UHFFFAOYSA-N o-cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 description 10
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 9
- 150000001875 compounds Chemical class 0.000 description 8
- 238000012360 testing method Methods 0.000 description 8
- KJCVRFUGPWSIIH-UHFFFAOYSA-N 1-naphthol Chemical group C1=CC=C2C(O)=CC=CC2=C1 KJCVRFUGPWSIIH-UHFFFAOYSA-N 0.000 description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- 239000003377 acid catalyst Substances 0.000 description 6
- 229960001755 resorcinol Drugs 0.000 description 6
- 239000006087 Silane Coupling Agent Substances 0.000 description 5
- 229920001296 polysiloxane Polymers 0.000 description 5
- 238000005476 soldering Methods 0.000 description 5
- ZZHIDJWUJRKHGX-UHFFFAOYSA-N 1,4-bis(chloromethyl)benzene Chemical group ClCC1=CC=C(CCl)C=C1 ZZHIDJWUJRKHGX-UHFFFAOYSA-N 0.000 description 4
- PLIKAWJENQZMHA-UHFFFAOYSA-N 4-aminophenol Chemical compound NC1=CC=C(O)C=C1 PLIKAWJENQZMHA-UHFFFAOYSA-N 0.000 description 4
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 4
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 4
- 239000004927 clay Substances 0.000 description 4
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 4
- 239000005350 fused silica glass Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 229940078552 o-xylene Drugs 0.000 description 4
- 150000002989 phenols Chemical class 0.000 description 4
- 239000011342 resin composition Substances 0.000 description 4
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 4
- 150000003335 secondary amines Chemical class 0.000 description 4
- 238000003786 synthesis reaction Methods 0.000 description 4
- 238000006276 transfer reaction Methods 0.000 description 4
- 229930185605 Bisphenol Natural products 0.000 description 3
- SJRJJKPEHAURKC-UHFFFAOYSA-N N-Methylmorpholine Chemical compound CN1CCOCC1 SJRJJKPEHAURKC-UHFFFAOYSA-N 0.000 description 3
- BWVAOONFBYYRHY-UHFFFAOYSA-N [4-(hydroxymethyl)phenyl]methanol Chemical group OCC1=CC=C(CO)C=C1 BWVAOONFBYYRHY-UHFFFAOYSA-N 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 239000002585 base Substances 0.000 description 3
- 238000009835 boiling Methods 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 238000006482 condensation reaction Methods 0.000 description 3
- 239000007822 coupling agent Substances 0.000 description 3
- 238000004821 distillation Methods 0.000 description 3
- 230000009477 glass transition Effects 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- 230000035484 reaction time Effects 0.000 description 3
- 238000010992 reflux Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- 125000004400 (C1-C12) alkyl group Chemical group 0.000 description 2
- DZSJGYKKLRZRMS-UHFFFAOYSA-N 1,1-dimethyl-2,3-dihydroinden-4-amine Chemical compound C1=CC=C(N)C2=C1C(C)(C)CC2 DZSJGYKKLRZRMS-UHFFFAOYSA-N 0.000 description 2
- CZZZABOKJQXEBO-UHFFFAOYSA-N 2,4-dimethylaniline Chemical group CC1=CC=C(N)C(C)=C1 CZZZABOKJQXEBO-UHFFFAOYSA-N 0.000 description 2
- NXXYKOUNUYWIHA-UHFFFAOYSA-N 2,6-Dimethylphenol Chemical compound CC1=CC=CC(C)=C1O NXXYKOUNUYWIHA-UHFFFAOYSA-N 0.000 description 2
- MLPVBIWIRCKMJV-UHFFFAOYSA-N 2-ethylaniline Chemical compound CCC1=CC=CC=C1N MLPVBIWIRCKMJV-UHFFFAOYSA-N 0.000 description 2
- CRBJBYGJVIBWIY-UHFFFAOYSA-N 2-isopropylphenol Chemical compound CC(C)C1=CC=CC=C1O CRBJBYGJVIBWIY-UHFFFAOYSA-N 0.000 description 2
- JWAZRIHNYRIHIV-UHFFFAOYSA-N 2-naphthol Chemical compound C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 description 2
- DOLQYFPDPKPQSS-UHFFFAOYSA-N 3,4-dimethylaniline Chemical group CC1=CC=C(N)C=C1C DOLQYFPDPKPQSS-UHFFFAOYSA-N 0.000 description 2
- CWLKGDAVCFYWJK-UHFFFAOYSA-N 3-aminophenol Chemical compound NC1=CC=CC(O)=C1 CWLKGDAVCFYWJK-UHFFFAOYSA-N 0.000 description 2
- ZUVPLKVDZNDZCM-UHFFFAOYSA-N 3-chloro-2-methylaniline Chemical compound CC1=C(N)C=CC=C1Cl ZUVPLKVDZNDZCM-UHFFFAOYSA-N 0.000 description 2
- HXDOZKJGKXYMEW-UHFFFAOYSA-N 4-ethylphenol Chemical compound CCC1=CC=C(O)C=C1 HXDOZKJGKXYMEW-UHFFFAOYSA-N 0.000 description 2
- ZSBDGXGICLIJGD-UHFFFAOYSA-N 4-phenoxyphenol Chemical compound C1=CC(O)=CC=C1OC1=CC=CC=C1 ZSBDGXGICLIJGD-UHFFFAOYSA-N 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- NBBJYMSMWIIQGU-UHFFFAOYSA-N Propionic aldehyde Chemical compound CCC=O NBBJYMSMWIIQGU-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 235000019270 ammonium chloride Nutrition 0.000 description 2
- HUMNYLRZRPPJDN-UHFFFAOYSA-N benzaldehyde Chemical compound O=CC1=CC=CC=C1 HUMNYLRZRPPJDN-UHFFFAOYSA-N 0.000 description 2
- 235000010290 biphenyl Nutrition 0.000 description 2
- 239000004305 biphenyl Substances 0.000 description 2
- LLEMOWNGBBNAJR-UHFFFAOYSA-N biphenyl-2-ol Chemical compound OC1=CC=CC=C1C1=CC=CC=C1 LLEMOWNGBBNAJR-UHFFFAOYSA-N 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000008393 encapsulating agent Substances 0.000 description 2
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 2
- RLSSMJSEOOYNOY-UHFFFAOYSA-N m-cresol Chemical compound CC1=CC=CC(O)=C1 RLSSMJSEOOYNOY-UHFFFAOYSA-N 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000012778 molding material Substances 0.000 description 2
- RNVCVTLRINQCPJ-UHFFFAOYSA-N o-toluidine Chemical compound CC1=CC=CC=C1N RNVCVTLRINQCPJ-UHFFFAOYSA-N 0.000 description 2
- IWDCLRJOBJJRNH-UHFFFAOYSA-N p-cresol Chemical compound CC1=CC=C(O)C=C1 IWDCLRJOBJJRNH-UHFFFAOYSA-N 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- SMQUZDBALVYZAC-UHFFFAOYSA-N salicylaldehyde Chemical compound OC1=CC=CC=C1C=O SMQUZDBALVYZAC-UHFFFAOYSA-N 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 239000011973 solid acid Substances 0.000 description 2
- 238000001721 transfer moulding Methods 0.000 description 2
- IMNIMPAHZVJRPE-UHFFFAOYSA-N triethylenediamine Chemical compound C1CN2CCN1CC2 IMNIMPAHZVJRPE-UHFFFAOYSA-N 0.000 description 2
- 239000008096 xylene Substances 0.000 description 2
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 description 2
- KYLUAQBYONVMCP-UHFFFAOYSA-N (2-methylphenyl)phosphane Chemical compound CC1=CC=CC=C1P KYLUAQBYONVMCP-UHFFFAOYSA-N 0.000 description 1
- WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 description 1
- UVXKCEMBYZHXMM-UHFFFAOYSA-N 1,1-dimethyl-2,3-dihydroindene-4,6-diamine Chemical compound C1=C(N)C=C(N)C2=C1C(C)(C)CC2 UVXKCEMBYZHXMM-UHFFFAOYSA-N 0.000 description 1
- KGKAYWMGPDWLQZ-UHFFFAOYSA-N 1,2-bis(bromomethyl)benzene Chemical group BrCC1=CC=CC=C1CBr KGKAYWMGPDWLQZ-UHFFFAOYSA-N 0.000 description 1
- FMGGHNGKHRCJLL-UHFFFAOYSA-N 1,2-bis(chloromethyl)benzene Chemical group ClCC1=CC=CC=C1CCl FMGGHNGKHRCJLL-UHFFFAOYSA-N 0.000 description 1
- GEYOCULIXLDCMW-UHFFFAOYSA-N 1,2-phenylenediamine Chemical compound NC1=CC=CC=C1N GEYOCULIXLDCMW-UHFFFAOYSA-N 0.000 description 1
- OXHOPZLBSSTTBU-UHFFFAOYSA-N 1,3-bis(bromomethyl)benzene Chemical group BrCC1=CC=CC(CBr)=C1 OXHOPZLBSSTTBU-UHFFFAOYSA-N 0.000 description 1
- GRJWOKACBGZOKT-UHFFFAOYSA-N 1,3-bis(chloromethyl)benzene Chemical group ClCC1=CC=CC(CCl)=C1 GRJWOKACBGZOKT-UHFFFAOYSA-N 0.000 description 1
- WZCQRUWWHSTZEM-UHFFFAOYSA-N 1,3-phenylenediamine Chemical compound NC1=CC=CC(N)=C1 WZCQRUWWHSTZEM-UHFFFAOYSA-N 0.000 description 1
- RBZMSGOBSOCYHR-UHFFFAOYSA-N 1,4-bis(bromomethyl)benzene Chemical group BrCC1=CC=C(CBr)C=C1 RBZMSGOBSOCYHR-UHFFFAOYSA-N 0.000 description 1
- DAJPMKAQEUGECW-UHFFFAOYSA-N 1,4-bis(methoxymethyl)benzene Chemical group COCC1=CC=C(COC)C=C1 DAJPMKAQEUGECW-UHFFFAOYSA-N 0.000 description 1
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- VVAKEQGKZNKUSU-UHFFFAOYSA-N 2,3-dimethylaniline Chemical group CC1=CC=CC(N)=C1C VVAKEQGKZNKUSU-UHFFFAOYSA-N 0.000 description 1
- KWVPRPSXBZNOHS-UHFFFAOYSA-N 2,4,6-Trimethylaniline Chemical compound CC1=CC(C)=C(N)C(C)=C1 KWVPRPSXBZNOHS-UHFFFAOYSA-N 0.000 description 1
- ZPDPRPHPYMTWMA-UHFFFAOYSA-N 2,4-di(propan-2-yl)aniline Chemical compound CC(C)C1=CC=C(N)C(C(C)C)=C1 ZPDPRPHPYMTWMA-UHFFFAOYSA-N 0.000 description 1
- VOZKAJLKRJDJLL-UHFFFAOYSA-N 2,4-diaminotoluene Chemical compound CC1=CC=C(N)C=C1N VOZKAJLKRJDJLL-UHFFFAOYSA-N 0.000 description 1
- GEQNZVKIDIPGCO-UHFFFAOYSA-N 2,4-dimethoxyaniline Chemical compound COC1=CC=C(N)C(OC)=C1 GEQNZVKIDIPGCO-UHFFFAOYSA-N 0.000 description 1
- XVBLEUZLLURXTF-UHFFFAOYSA-N 2,4-dimethylbenzene-1,3-diamine Chemical compound CC1=CC=C(N)C(C)=C1N XVBLEUZLLURXTF-UHFFFAOYSA-N 0.000 description 1
- KUFFULVDNCHOFZ-UHFFFAOYSA-N 2,4-xylenol Chemical compound CC1=CC=C(O)C(C)=C1 KUFFULVDNCHOFZ-UHFFFAOYSA-N 0.000 description 1
- RLYCRLGLCUXUPO-UHFFFAOYSA-N 2,6-diaminotoluene Chemical compound CC1=C(N)C=CC=C1N RLYCRLGLCUXUPO-UHFFFAOYSA-N 0.000 description 1
- FOYHNROGBXVLLX-UHFFFAOYSA-N 2,6-diethylaniline Chemical compound CCC1=CC=CC(CC)=C1N FOYHNROGBXVLLX-UHFFFAOYSA-N 0.000 description 1
- UFFBMTHBGFGIHF-UHFFFAOYSA-N 2,6-dimethylaniline Chemical group CC1=CC=CC(C)=C1N UFFBMTHBGFGIHF-UHFFFAOYSA-N 0.000 description 1
- OEWYVHJLQDINFS-UHFFFAOYSA-N 2-(2-aminoethyl)aniline Chemical compound NCCC1=CC=CC=C1N OEWYVHJLQDINFS-UHFFFAOYSA-N 0.000 description 1
- BLDLRWQLBOJPEB-UHFFFAOYSA-N 2-(2-hydroxyphenyl)sulfanylphenol Chemical compound OC1=CC=CC=C1SC1=CC=CC=C1O BLDLRWQLBOJPEB-UHFFFAOYSA-N 0.000 description 1
- IXQGCWUGDFDQMF-UHFFFAOYSA-N 2-Ethylphenol Chemical compound CCC1=CC=CC=C1O IXQGCWUGDFDQMF-UHFFFAOYSA-N 0.000 description 1
- YKOLZVXSPGIIBJ-UHFFFAOYSA-N 2-Isopropylaniline Chemical compound CC(C)C1=CC=CC=C1N YKOLZVXSPGIIBJ-UHFFFAOYSA-N 0.000 description 1
- ZMXYNJXDULEQCK-UHFFFAOYSA-N 2-amino-p-cresol Chemical compound CC1=CC=C(O)C(N)=C1 ZMXYNJXDULEQCK-UHFFFAOYSA-N 0.000 description 1
- VADKRMSMGWJZCF-UHFFFAOYSA-N 2-bromophenol Chemical compound OC1=CC=CC=C1Br VADKRMSMGWJZCF-UHFFFAOYSA-N 0.000 description 1
- AKCRQHGQIJBRMN-UHFFFAOYSA-N 2-chloroaniline Chemical compound NC1=CC=CC=C1Cl AKCRQHGQIJBRMN-UHFFFAOYSA-N 0.000 description 1
- YTWBFUCJVWKCCK-UHFFFAOYSA-N 2-heptadecyl-1h-imidazole Chemical compound CCCCCCCCCCCCCCCCCC1=NC=CN1 YTWBFUCJVWKCCK-UHFFFAOYSA-N 0.000 description 1
- LXBGSDVWAMZHDD-UHFFFAOYSA-N 2-methyl-1h-imidazole Chemical compound CC1=NC=CN1 LXBGSDVWAMZHDD-UHFFFAOYSA-N 0.000 description 1
- WYWNLVJBQRJIOU-UHFFFAOYSA-N 2-methyl-4-propan-2-ylaniline Chemical compound CC(C)C1=CC=C(N)C(C)=C1 WYWNLVJBQRJIOU-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- PZOZYLSYQJYXBI-UHFFFAOYSA-N 2-propan-2-yloxyaniline Chemical compound CC(C)OC1=CC=CC=C1N PZOZYLSYQJYXBI-UHFFFAOYSA-N 0.000 description 1
- AEIOZWYBDBVCGW-UHFFFAOYSA-N 2-tert-butylaniline Chemical compound CC(C)(C)C1=CC=CC=C1N AEIOZWYBDBVCGW-UHFFFAOYSA-N 0.000 description 1
- LLEASVZEQBICSN-UHFFFAOYSA-N 2-undecyl-1h-imidazole Chemical compound CCCCCCCCCCCC1=NC=CN1 LLEASVZEQBICSN-UHFFFAOYSA-N 0.000 description 1
- SDYWXFYBZPNOFX-UHFFFAOYSA-N 3,4-dichloroaniline Chemical compound NC1=CC=C(Cl)C(Cl)=C1 SDYWXFYBZPNOFX-UHFFFAOYSA-N 0.000 description 1
- MKARNSWMMBGSHX-UHFFFAOYSA-N 3,5-dimethylaniline Chemical group CC1=CC(C)=CC(N)=C1 MKARNSWMMBGSHX-UHFFFAOYSA-N 0.000 description 1
- 229940018563 3-aminophenol Drugs 0.000 description 1
- DHYHYLGCQVVLOQ-UHFFFAOYSA-N 3-bromoaniline Chemical compound NC1=CC=CC(Br)=C1 DHYHYLGCQVVLOQ-UHFFFAOYSA-N 0.000 description 1
- RQKFYFNZSHWXAW-UHFFFAOYSA-N 3-chloro-p-toluidine Chemical compound CC1=CC=C(N)C=C1Cl RQKFYFNZSHWXAW-UHFFFAOYSA-N 0.000 description 1
- PNPCRKVUWYDDST-UHFFFAOYSA-N 3-chloroaniline Chemical compound NC1=CC=CC(Cl)=C1 PNPCRKVUWYDDST-UHFFFAOYSA-N 0.000 description 1
- GDJLLPTUSIUMOM-UHFFFAOYSA-N 3-ethyl-2-methylaniline Chemical compound CCC1=CC=CC(N)=C1C GDJLLPTUSIUMOM-UHFFFAOYSA-N 0.000 description 1
- XCCNRBCNYGWTQX-UHFFFAOYSA-N 3-propan-2-ylaniline Chemical compound CC(C)C1=CC=CC(N)=C1 XCCNRBCNYGWTQX-UHFFFAOYSA-N 0.000 description 1
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 1
- YBRVSVVVWCFQMG-UHFFFAOYSA-N 4,4'-diaminodiphenylmethane Chemical compound C1=CC(N)=CC=C1CC1=CC=C(N)C=C1 YBRVSVVVWCFQMG-UHFFFAOYSA-N 0.000 description 1
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 1
- OMVFXCQLSCPJNR-UHFFFAOYSA-N 4-amino-2,6-dimethylphenol Chemical compound CC1=CC(N)=CC(C)=C1O OMVFXCQLSCPJNR-UHFFFAOYSA-N 0.000 description 1
- LJXDFLGENKUMOA-UHFFFAOYSA-N 4-amino-2-tert-butylphenol Chemical compound CC(C)(C)C1=CC(N)=CC=C1O LJXDFLGENKUMOA-UHFFFAOYSA-N 0.000 description 1
- KGEXISHTCZHGFT-UHFFFAOYSA-N 4-azaniumyl-2,6-dichlorophenolate Chemical compound NC1=CC(Cl)=C(O)C(Cl)=C1 KGEXISHTCZHGFT-UHFFFAOYSA-N 0.000 description 1
- WDFQBORIUYODSI-UHFFFAOYSA-N 4-bromoaniline Chemical compound NC1=CC=C(Br)C=C1 WDFQBORIUYODSI-UHFFFAOYSA-N 0.000 description 1
- GZFGOTFRPZRKDS-UHFFFAOYSA-N 4-bromophenol Chemical compound OC1=CC=C(Br)C=C1 GZFGOTFRPZRKDS-UHFFFAOYSA-N 0.000 description 1
- NVVVQTNTLIAISI-UHFFFAOYSA-N 4-butan-2-ylaniline Chemical compound CCC(C)C1=CC=C(N)C=C1 NVVVQTNTLIAISI-UHFFFAOYSA-N 0.000 description 1
- JCLZLZKUISPXDC-UHFFFAOYSA-N 4-chloro-2,6-dimethylaniline Chemical compound CC1=CC(Cl)=CC(C)=C1N JCLZLZKUISPXDC-UHFFFAOYSA-N 0.000 description 1
- QSNSCYSYFYORTR-UHFFFAOYSA-N 4-chloroaniline Chemical compound NC1=CC=C(Cl)C=C1 QSNSCYSYFYORTR-UHFFFAOYSA-N 0.000 description 1
- WXNZTHHGJRFXKQ-UHFFFAOYSA-N 4-chlorophenol Chemical compound OC1=CC=C(Cl)C=C1 WXNZTHHGJRFXKQ-UHFFFAOYSA-N 0.000 description 1
- OAHMVZYHIJQTQC-UHFFFAOYSA-N 4-cyclohexylphenol Chemical compound C1=CC(O)=CC=C1C1CCCCC1 OAHMVZYHIJQTQC-UHFFFAOYSA-N 0.000 description 1
- PTMVFRKAMOUORT-UHFFFAOYSA-N 4-ethylbenzene-1,3-diamine Chemical compound CCC1=CC=C(N)C=C1N PTMVFRKAMOUORT-UHFFFAOYSA-N 0.000 description 1
- KRZCOLNOCZKSDF-UHFFFAOYSA-N 4-fluoroaniline Chemical compound NC1=CC=C(F)C=C1 KRZCOLNOCZKSDF-UHFFFAOYSA-N 0.000 description 1
- IGFHQQFPSIBGKE-UHFFFAOYSA-N 4-nonylphenol Chemical compound CCCCCCCCCC1=CC=C(O)C=C1 IGFHQQFPSIBGKE-UHFFFAOYSA-N 0.000 description 1
- NTDQQZYCCIDJRK-UHFFFAOYSA-N 4-octylphenol Chemical compound CCCCCCCCC1=CC=C(O)C=C1 NTDQQZYCCIDJRK-UHFFFAOYSA-N 0.000 description 1
- IPDXWXPSCKSIII-UHFFFAOYSA-N 4-propan-2-ylbenzene-1,3-diamine Chemical compound CC(C)C1=CC=C(N)C=C1N IPDXWXPSCKSIII-UHFFFAOYSA-N 0.000 description 1
- ZUTYZAFDFLLILI-UHFFFAOYSA-N 4-sec-Butylphenol Chemical compound CCC(C)C1=CC=C(O)C=C1 ZUTYZAFDFLLILI-UHFFFAOYSA-N 0.000 description 1
- WRDWWAVNELMWAM-UHFFFAOYSA-N 4-tert-butylaniline Chemical compound CC(C)(C)C1=CC=C(N)C=C1 WRDWWAVNELMWAM-UHFFFAOYSA-N 0.000 description 1
- JFQJDZQPICZGJF-UHFFFAOYSA-N 4-tert-butylbenzene-1,3-diamine Chemical compound CC(C)(C)C1=CC=C(N)C=C1N JFQJDZQPICZGJF-UHFFFAOYSA-N 0.000 description 1
- RIAHASMJDOMQER-UHFFFAOYSA-N 5-ethyl-2-methyl-1h-imidazole Chemical compound CCC1=CN=C(C)N1 RIAHASMJDOMQER-UHFFFAOYSA-N 0.000 description 1
- ABAPNKBSVNXXPG-UHFFFAOYSA-N 5-phenylbenzene-1,3-diamine Chemical group NC1=CC(N)=CC(C=2C=CC=CC=2)=C1 ABAPNKBSVNXXPG-UHFFFAOYSA-N 0.000 description 1
- WEBFIEBRATXTAO-UHFFFAOYSA-N 5-tert-butyl-2-ethylaniline Chemical compound CCC1=CC=C(C(C)(C)C)C=C1N WEBFIEBRATXTAO-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical group [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- MQJKPEGWNLWLTK-UHFFFAOYSA-N Dapsone Chemical compound C1=CC(N)=CC=C1S(=O)(=O)C1=CC=C(N)C=C1 MQJKPEGWNLWLTK-UHFFFAOYSA-N 0.000 description 1
- 238000005727 Friedel-Crafts reaction Methods 0.000 description 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- 229920000557 Nafion® Polymers 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 229910021627 Tin(IV) chloride Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- XMUZQOKACOLCSS-UHFFFAOYSA-N [2-(hydroxymethyl)phenyl]methanol Chemical group OCC1=CC=CC=C1CO XMUZQOKACOLCSS-UHFFFAOYSA-N 0.000 description 1
- YWMLORGQOFONNT-UHFFFAOYSA-N [3-(hydroxymethyl)phenyl]methanol Chemical group OCC1=CC=CC(CO)=C1 YWMLORGQOFONNT-UHFFFAOYSA-N 0.000 description 1
- BFXRJTDKPLPXSK-UHFFFAOYSA-N [SiH4].CO[Si](CCCS)(OC)OC Chemical compound [SiH4].CO[Si](CCCS)(OC)OC BFXRJTDKPLPXSK-UHFFFAOYSA-N 0.000 description 1
- IKHGUXGNUITLKF-XPULMUKRSA-N acetaldehyde Chemical compound [14CH]([14CH3])=O IKHGUXGNUITLKF-XPULMUKRSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 150000001299 aldehydes Chemical class 0.000 description 1
- 150000004645 aluminates Chemical class 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- SBXKRBZKPQBLOD-UHFFFAOYSA-N aminohydroquinone Chemical compound NC1=CC(O)=CC=C1O SBXKRBZKPQBLOD-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 150000004982 aromatic amines Chemical class 0.000 description 1
- RPHKINMPYFJSCF-UHFFFAOYSA-N benzene-1,3,5-triamine Chemical compound NC1=CC(N)=CC(N)=C1 RPHKINMPYFJSCF-UHFFFAOYSA-N 0.000 description 1
- YXVFYQXJAXKLAK-UHFFFAOYSA-N biphenyl-4-ol Chemical compound C1=CC(O)=CC=C1C1=CC=CC=C1 YXVFYQXJAXKLAK-UHFFFAOYSA-N 0.000 description 1
- ZTQSAGDEMFDKMZ-UHFFFAOYSA-N butyric aldehyde Natural products CCCC=O ZTQSAGDEMFDKMZ-UHFFFAOYSA-N 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 239000000378 calcium silicate Substances 0.000 description 1
- 229910052918 calcium silicate Inorganic materials 0.000 description 1
- OYACROKNLOSFPA-UHFFFAOYSA-N calcium;dioxido(oxo)silane Chemical compound [Ca+2].[O-][Si]([O-])=O OYACROKNLOSFPA-UHFFFAOYSA-N 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- 229910052570 clay Inorganic materials 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 229930003836 cresol Natural products 0.000 description 1
- 229910002026 crystalline silica Inorganic materials 0.000 description 1
- ZWAJLVLEBYIOTI-UHFFFAOYSA-N cyclohexene oxide Chemical group C1CCCC2OC21 ZWAJLVLEBYIOTI-UHFFFAOYSA-N 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical class C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- WHGNXNCOTZPEEK-UHFFFAOYSA-N dimethoxy-methyl-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](C)(OC)CCCOCC1CO1 WHGNXNCOTZPEEK-UHFFFAOYSA-N 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- ZZTCPWRAHWXWCH-UHFFFAOYSA-N diphenylmethanediamine Chemical compound C=1C=CC=CC=1C(N)(N)C1=CC=CC=C1 ZZTCPWRAHWXWCH-UHFFFAOYSA-N 0.000 description 1
- PVAONLSZTBKFKM-UHFFFAOYSA-N diphenylmethanediol Chemical compound C=1C=CC=CC=1C(O)(O)C1=CC=CC=C1 PVAONLSZTBKFKM-UHFFFAOYSA-N 0.000 description 1
- FWDBOZPQNFPOLF-UHFFFAOYSA-N ethenyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C=C FWDBOZPQNFPOLF-UHFFFAOYSA-N 0.000 description 1
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 125000005313 fatty acid group Chemical group 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012847 fine chemical Substances 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- LHGVFZTZFXWLCP-UHFFFAOYSA-N guaiacol Chemical compound COC1=CC=CC=C1O LHGVFZTZFXWLCP-UHFFFAOYSA-N 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 239000012433 hydrogen halide Substances 0.000 description 1
- 229910000039 hydrogen halide Inorganic materials 0.000 description 1
- 150000002460 imidazoles Chemical class 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 125000005647 linker group Chemical group 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229940018564 m-phenylenediamine Drugs 0.000 description 1
- 229940098779 methanesulfonic acid Drugs 0.000 description 1
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- PHQOGHDTIVQXHL-UHFFFAOYSA-N n'-(3-trimethoxysilylpropyl)ethane-1,2-diamine Chemical compound CO[Si](OC)(OC)CCCNCCN PHQOGHDTIVQXHL-UHFFFAOYSA-N 0.000 description 1
- LIBWSLLLJZULCP-UHFFFAOYSA-N n-(3-triethoxysilylpropyl)aniline Chemical compound CCO[Si](OCC)(OCC)CCCNC1=CC=CC=C1 LIBWSLLLJZULCP-UHFFFAOYSA-N 0.000 description 1
- NXPPAOGUKPJVDI-UHFFFAOYSA-N naphthalene-1,2-diol Chemical compound C1=CC=CC2=C(O)C(O)=CC=C21 NXPPAOGUKPJVDI-UHFFFAOYSA-N 0.000 description 1
- 150000004780 naphthols Chemical class 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- VMPITZXILSNTON-UHFFFAOYSA-N o-anisidine Chemical compound COC1=CC=CC=C1N VMPITZXILSNTON-UHFFFAOYSA-N 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 235000010292 orthophenyl phenol Nutrition 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- AFEQENGXSMURHA-UHFFFAOYSA-N oxiran-2-ylmethanamine Chemical compound NCC1CO1 AFEQENGXSMURHA-UHFFFAOYSA-N 0.000 description 1
- 125000001820 oxy group Chemical group [*:1]O[*:2] 0.000 description 1
- QBDSZLJBMIMQRS-UHFFFAOYSA-N p-Cumylphenol Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=CC=C1 QBDSZLJBMIMQRS-UHFFFAOYSA-N 0.000 description 1
- BHAAPTBBJKJZER-UHFFFAOYSA-N p-anisidine Chemical compound COC1=CC=C(N)C=C1 BHAAPTBBJKJZER-UHFFFAOYSA-N 0.000 description 1
- NKTOLZVEWDHZMU-UHFFFAOYSA-N p-cumyl phenol Natural products CC1=CC=C(C)C(O)=C1 NKTOLZVEWDHZMU-UHFFFAOYSA-N 0.000 description 1
- URLKBWYHVLBVBO-UHFFFAOYSA-N p-dimethylbenzene Natural products CC1=CC=C(C)C=C1 URLKBWYHVLBVBO-UHFFFAOYSA-N 0.000 description 1
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 1
- QNGNSVIICDLXHT-UHFFFAOYSA-N para-ethylbenzaldehyde Natural products CCC1=CC=C(C=O)C=C1 QNGNSVIICDLXHT-UHFFFAOYSA-N 0.000 description 1
- LRTFPLFDLJYEKT-UHFFFAOYSA-N para-isopropylaniline Chemical compound CC(C)C1=CC=C(N)C=C1 LRTFPLFDLJYEKT-UHFFFAOYSA-N 0.000 description 1
- RPGWZZNNEUHDAQ-UHFFFAOYSA-N phenylphosphine Chemical compound PC1=CC=CC=C1 RPGWZZNNEUHDAQ-UHFFFAOYSA-N 0.000 description 1
- 150000003003 phosphines Chemical class 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229920000768 polyamine Polymers 0.000 description 1
- 150000007519 polyprotic acids Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 150000003141 primary amines Chemical class 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 1
- 235000010215 titanium dioxide Nutrition 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- TUQOTMZNTHZOKS-UHFFFAOYSA-N tributylphosphine Chemical compound CCCCP(CCCC)CCCC TUQOTMZNTHZOKS-UHFFFAOYSA-N 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- 238000007039 two-step reaction Methods 0.000 description 1
- 238000005292 vacuum distillation Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 150000003739 xylenols Chemical class 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
- 239000011592 zinc chloride Substances 0.000 description 1
- 235000005074 zinc chloride Nutrition 0.000 description 1
Landscapes
- Compositions Of Macromolecular Compounds (AREA)
- Epoxy Resins (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、注型、積層、接着、成
形、封止、複合材等の用途に対する耐熱性、耐湿性に優
れたエポキシ樹脂組成物およびその硬化物に関し、特
に、半導体装置封止用として好適なエポキシ樹脂組成
物、その硬化物、それを用いた半導体装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an epoxy resin composition excellent in heat resistance and moisture resistance for casting, laminating, bonding, molding, encapsulating, composite materials and the like, and a cured product thereof. The present invention relates to an epoxy resin composition suitable for device sealing, a cured product thereof, and a semiconductor device using the same.
【0002】[0002]
【従来の技術】フェノール系樹脂を耐熱性複合材用マト
リックス樹脂や耐熱性成形材料などに利用することは、
近年、ますます多種多様化され、工業的に重要になって
きている。これらの先端分野では、フェノール樹脂自体
に高度な性能が求められる。例えば、IC封止材分野で
は、エポキシ樹脂として、または、その硬化剤として利
用され、全体として、接着性、耐熱性、耐湿性等に高い
性能が求められている。従来、この分野のフェノール系
樹脂としては、オルソクレゾールノボラック型エポキシ
樹脂とフェノールノボラック樹脂を硬化剤とする組み合
わせが主流であった。2. Description of the Related Art The use of phenolic resins in matrix resins for heat-resistant composite materials and heat-resistant molding materials is difficult.
In recent years, it has become increasingly diverse and industrially important. In these advanced fields, high performance is required for the phenolic resin itself. For example, in the field of IC encapsulants, it is used as an epoxy resin or as a curing agent thereof, and as a whole, high performance is required in adhesiveness, heat resistance, moisture resistance, and the like. Conventionally, as a phenolic resin in this field, a combination of an ortho-cresol novolak type epoxy resin and a phenol novolak resin as a curing agent has been the mainstream.
【0003】近年、電子部品のプリント配線板への高密
度実装化が進むにつれ、電子部品は、従来のピン挿入型
パッケージから、表面実装型のパッケージが主流になっ
てきている。IC、LSIなどの表面実装型ICは、実
装密度を高くし、実装高さを低くするために、薄型、小
型のパッケージになってきており、素子のパッケージに
対する占有体積が大きくなり、パッケージの肉厚は非常
に薄くなってきた。さらに、これらのパッケージは、従
来のピン挿入型のものと実装が異なっている。即ち、ピ
ン挿入型パッケージは、ピンを配線板に挿入した後、配
線板裏面からはんだ付けを行うために、パッケージが直
接高温にさらされることがなかった。しかし、表面実装
型ICは、配線板表面に仮止を行い、はんだバスやリフ
ロー装置などで処理されるため、直接はんだ付け温度に
さらされる。現在、ICパッケージを配線板に実装する
場合、IRリフローによる方法が主流となっているが、
この方法による適用温度は215℃程度が一般的であ
る。しかしながら、生産性の改善に伴い、はんだ付け温
度は、240℃〜265℃とより高温度での処理が求め
られており、このような高温度領域での使用において
は、ベース樹脂の耐湿性や耐熱性が極めて重要である。[0003] In recent years, as electronic components have been mounted on a printed wiring board at a high density, electronic components have become more prevalent than conventional pin insertion type packages, but surface mount type packages. Surface mount ICs such as ICs and LSIs are becoming thinner and smaller packages in order to increase the mounting density and lower the mounting height. The thickness has become very thin. Furthermore, these packages are different in mounting from the conventional pin insertion type. That is, in the pin insertion type package, since the pins are inserted into the wiring board and then soldered from the back surface of the wiring board, the package is not directly exposed to a high temperature. However, the surface mount IC is temporarily exposed to the soldering temperature because it is temporarily fixed to the surface of the wiring board and is processed by a solder bath or a reflow device. At present, when an IC package is mounted on a wiring board, a method using IR reflow is mainly used.
The application temperature by this method is generally about 215 ° C. However, with the improvement of productivity, the soldering temperature is required to be higher than 240 ° C. to 265 ° C., and in such a high temperature range, the moisture resistance of the base resin and the Heat resistance is extremely important.
【0004】ベース樹脂のエポキシ樹脂組成物では、一
般に耐湿性と耐熱性は相反する関係にある。即ち、耐熱
性を向上させるために架橋密度を増加させれば吸湿性が
大きくなり、吸湿性を下げるために架橋密度を減少させ
れば耐熱性に問題が残る。現在、半導体封止材料で主流
となっているフェノールノボラック構造では、耐熱性に
優れている反面、吸湿性が大きいために前述したような
高温での使用はパッケージが吸湿した場合、はんだ付け
時に吸湿水分が急激に膨張し、パッケージをクラックさ
せてしまう。現在、この現象が表面実装型ICに係わる
大きな問題となっている。このような問題に対し、樹脂
の構造自体を改良する方法が幾つか試みられている。例
えば、一般式(II)(化2)で表されるキシリレン結合
を有するフェノール樹脂を使用する方法である(特開昭
59−105018号公報、特公昭62−28165号
公報、特開平3−90075号公報、特開平4−933
20号公報)。[0004] In an epoxy resin composition as a base resin, generally, moisture resistance and heat resistance have an opposite relationship. That is, if the crosslink density is increased to improve the heat resistance, the hygroscopicity increases, and if the crosslink density is reduced to reduce the hygroscopicity, there remains a problem in the heat resistance. At present, the phenol novolak structure, which is currently the mainstream of semiconductor encapsulants, has excellent heat resistance, but has high moisture absorption, so if it is used at high temperatures as described above, if the package absorbs moisture, it will absorb moisture during soldering. Moisture expands rapidly and cracks the package. At present, this phenomenon has become a major problem relating to surface mount ICs. To solve such a problem, several methods for improving the resin structure itself have been attempted. For example, a method using a phenol resin having a xylylene bond represented by the general formula (II) (Chemical Formula 2) (JP-A-59-105018, JP-B-62-28165, JP-A-3-90075) No., JP-A-4-933
No. 20).
【0005】[0005]
【化2】 (式中、Aはフェノール、ナフトール等を、lは整数を
表す)Embedded image (In the formula, A represents phenol, naphthol, etc., and l represents an integer.)
【0006】しかしながら、これらのフェノール樹脂を
使用した封止材料では、ノボラック構造に比べて低吸湿
性となる反面、耐熱性を表すガラス転移温度(Tg)が
150〜160℃台とまだ不十分である。即ち、240
〜265℃のはんだ付温度でのパッケージのフクレ等の
問題は解消され得ない。一方、吸湿性を少々犠牲にして
耐熱性を向上させる方面からは、フェノールノボラック
構造にアミノ基を導入し架橋密度を向上させる方法も試
みられている(特開平5−105734号公報)。しか
しながら、この方法では耐熱性のみを向上させただけで
あり、吸湿性の増大を伴うため、パッケージクラックの
発生を抑制することは出来ない。However, the sealing materials using these phenolic resins have low hygroscopicity as compared with the novolak structure, but still have insufficient glass transition temperature (Tg) of 150 to 160 ° C. indicating heat resistance. is there. That is, 240
Problems such as blistering of the package at a soldering temperature of 26265 ° C. cannot be solved. On the other hand, from the viewpoint of improving heat resistance at the expense of a little sacrifice of hygroscopicity, a method of improving the crosslink density by introducing an amino group into a phenol novolak structure has been attempted (JP-A-5-105734). However, in this method, only the heat resistance is improved, and the hygroscopicity is increased, so that the occurrence of the package crack cannot be suppressed.
【0007】[0007]
【発明が解決しようとする課題】本発明の課題は、ベー
ス樹脂組成物において、吸湿性を損なうことなく、今一
段の耐熱性向上を達成するためのエポキシ樹脂組成物を
見い出すことにある。さらに、それを用いることによ
り、信頼性の優れた半導体装置を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to find an epoxy resin composition for achieving a further improvement in heat resistance without impairing the hygroscopicity of the base resin composition. Another object of the present invention is to provide a highly reliable semiconductor device by using the semiconductor device.
【0008】[0008]
【課題を解決するための手段】本発明者らは、前記課題
を解決するために鋭意検討した。その結果、エポキシ樹
脂組成物において、硬化剤として、キシリレン結合を有
するフェノール樹脂構造にアミノ基を導入したものを用
いることにより、前記目的を達成しうることを見い出
し、本発明を完成するに至った。即ち、本発明は、
(A)1分子中に2個以上のエポキシ基を有するエポキ
シ樹脂と、(B)一般式(I)(化3)で表される軟化
点40〜120℃、平均分子量300〜5000、アミ
ン価150〜2000g/eqであるアミノ基含有フェ
ノール樹脂を含む硬化剤とを配合して成るエポキシ樹脂
組成物、およびこのエポキシ樹脂組成物に、50重量%
以上の無機充填剤を配合して成る半導体封止用エポキシ
樹脂組成物に関するものであり、さらに、これらの硬化
物並びに前記無機充填剤を配合させた硬化物により封止
された半導体装置に関するものである。Means for Solving the Problems The present inventors have made intensive studies to solve the above-mentioned problems. As a result, in the epoxy resin composition, it was found that the object can be achieved by using, as a curing agent, a phenol resin structure having a xylylene bond with an amino group introduced, and completed the present invention. . That is, the present invention
(A) an epoxy resin having two or more epoxy groups in one molecule; and (B) a softening point of 40 to 120 ° C., an average molecular weight of 300 to 5000, and an amine value represented by the general formula (I). An epoxy resin composition containing a curing agent containing an amino group-containing phenol resin of 150 to 2000 g / eq; and 50% by weight of the epoxy resin composition.
The present invention relates to an epoxy resin composition for semiconductor encapsulation containing the above-mentioned inorganic filler, and further relates to a semiconductor device encapsulated by a cured product containing these cured products and the above-mentioned inorganic filler. is there.
【0009】[0009]
【化3】 (式中、R1、R2は水素原子、ハロゲン原子、水酸
基、またはC1〜C12のアルキル基、アリール基、シ
クロアルキル基、アラルキル基、アルコキシ基、アリー
ルオキシ基を示し、同一でも異なってもよく、R1とR
2は環を形成しても良く、R3、R4は、水素原子、ハ
ロゲン原子、水酸基、アミノ基、C1〜C12のアルキ
ル基、アリール基、シクロアルキル基、アラルキル基、
アミノ基置換アラルキル基、ヒドロキシ基置換アラルキ
ル基、アルコキシ基、アリールオキシ基、アミノ基置換
アリールオキシ基、ヒドロキシ基置換アリールオキシ基
を示し、同一でも異なっても良く、R3とR4は環を形
成してもよい。m、nは1〜20の整数を示し、末端は
フェノール化合物及び/または芳香族アミン化合物であ
り、フェノール化合物と芳香族アミン化合物の結合順序
は限定されない)Embedded image (Wherein, R 1 and R 2 represent a hydrogen atom, a halogen atom, a hydroxyl group, or a C 1 to C 12 alkyl group, an aryl group, a cycloalkyl group, an aralkyl group, an alkoxy group, or an aryloxy group. at best, R 1 and R
2 may form a ring, and R 3 and R 4 represent a hydrogen atom, a halogen atom, a hydroxyl group, an amino group, a C 1 to C 12 alkyl group, an aryl group, a cycloalkyl group, an aralkyl group,
An amino-substituted aralkyl group, a hydroxy-substituted aralkyl group, an alkoxy group, an aryloxy group, an amino-substituted aryloxy group, or a hydroxy-substituted aryloxy group, which may be the same or different, and R 3 and R 4 represent a ring It may be formed. m and n each represent an integer of 1 to 20, and the terminal is a phenol compound and / or an aromatic amine compound, and the bonding order of the phenol compound and the aromatic amine compound is not limited.
【0010】本発明のエポキシ樹脂組成物では、耐熱性
と耐湿性が共に優れ、耐衝撃性等の機械的強度も優れる
ため、先端材料の耐熱性複合材用マトリックス樹脂に好
適であり、特に半導体封止材料では、従来はんだ耐熱や
実装装置におけるヒートサイクルで使用に耐えなかった
ものが問題なく使用できることから、信頼性の高い樹脂
封止装置が得られる。又、本発明のエポキシ樹脂組成物
において、硬化剤として使用されるアミノ基含有フェノ
ール樹脂は、連結基にキシリレン結合を有するため、耐
酸化安定性に優れ、軟化点や溶融粘度も低く、作業性に
優れることも特徴である。本発明のエポキシ樹脂組成物
では、硬化剤として前記一般式(I)で表されるアミノ
基含有フェノール樹脂、またはこのアミノ基含有フェノ
ール樹脂を一部含むものを使用する。この場合、アミノ
基含有フェノール樹脂の割合は、硬化剤全体の15重量
%以上、好ましくは30重量%以上あればよく、その他
は公知のエポキシ樹脂用硬化剤の1種またはそれ以上を
併用することができる。The epoxy resin composition of the present invention is excellent in both heat resistance and moisture resistance and excellent in mechanical strength such as impact resistance, so that it is suitable for a matrix resin for a heat-resistant composite material as an advanced material, and especially a semiconductor. As a sealing material, a material that has not been used in a heat cycle of a soldering device or a heat cycle in a mounting device can be used without any problem, so that a highly reliable resin sealing device can be obtained. In the epoxy resin composition of the present invention, the amino group-containing phenol resin used as a curing agent has a xylylene bond in the linking group, so that it has excellent oxidation resistance, low softening point and low melt viscosity, and low workability. It is also characterized by being excellent. In the epoxy resin composition of the present invention, a phenol resin containing an amino group represented by the general formula (I) or a part of the phenol resin containing the amino group is used as a curing agent. In this case, the proportion of the amino group-containing phenol resin may be 15% by weight or more, preferably 30% by weight or more of the entire curing agent, and the other may be used in combination with one or more known curing agents for epoxy resins. Can be.
【0011】前記一般式(I)で表されるアミノ基含有
フェノール樹脂は、本発明者らによって新規に見いださ
れたものであり、その製造方法を以下に記す。即ち、一
般式(III) (化4)で表されるフェノール化合物および
一般式(IV)(化5)で表される芳香族アミン化合物のモ
ル比0.97:0.03〜0.2:0.8の混合物1モ
ルと、一般式(V)(化6)で表されるアラルキル化合
物0.1〜0.95モルとを反応させることにより、前
記式(I)のアミノ基含有フェノール樹脂を製造する。The amino group-containing phenolic resin represented by the general formula (I) has been newly discovered by the present inventors, and a method for producing the same will be described below. That is, the molar ratio of the phenol compound represented by the general formula (III) (formula 4) and the aromatic amine compound represented by the general formula (IV) (formula 5) is 0.97: 0.03 to 0.2: By reacting 1 mol of the mixture of 0.8 with 0.1 to 0.95 mol of the aralkyl compound represented by the general formula (V) (Formula 6), the amino group-containing phenol resin of the formula (I) To manufacture.
【0012】[0012]
【化4】 (式中、R1 、R2 は水素原子、ハロゲン原子、水酸
基、またはC1 〜C12のアルキル基、アリール基、シク
ロアルキル基、アラルキル基、アルコキシ基、アリール
オキシ基を示し、同一でも異なってもよく、R1 とR2
は環を形成しても良い。)Embedded image (Wherein, R 1 and R 2 represent a hydrogen atom, a halogen atom, a hydroxyl group, or a C 1 -C 12 alkyl group, an aryl group, a cycloalkyl group, an aralkyl group , an alkoxy group, an aryl group,
Represents an oxy group and may be the same or different, and R 1 and R 2
May form a ring. )
【0013】[0013]
【化5】 (式中、R3 、R4 は水素原子、ハロゲン原子、水酸
基、アミノ基、C1 〜C12のアルキル基、アリール基、
シクロアルキル基、アラルキル基、アミノ基置換アラル
キル基、ヒドロキシ基置換アラルキル基、アルコキシ
基、アリールオキシ基、アミノ基置換アリールオキシ
基、ヒドロキシ基置換アリールオキシ基を示し、同一で
も異なってもよく、R3 とR4 は環を形成してもよ
い。)Embedded image (Wherein, R 3 and R 4 represent a hydrogen atom, a halogen atom, a hydroxyl group, an amino group, a C 1 -C 12 alkyl group, an aryl group,
A cycloalkyl group, an aralkyl group, an amino-substituted aralkyl group, a hydroxy-substituted aralkyl group, an alkoxy group, an aryloxy group, an amino-substituted aryloxy group, or a hydroxy-substituted aryloxy group, which may be the same or different; 3 and R 4 may form a ring. )
【0014】[0014]
【化6】 (式中、Xはハロゲン原子、水酸基、炭素数1〜4のア
ルコキシ基を示す。)Embedded image (In the formula, X represents a halogen atom, a hydroxyl group, or an alkoxy group having 1 to 4 carbon atoms.)
【0015】この方法で使用できる式(III) のフェノー
ル化合物としては、一価または二価フェノール、および
ビスフェノール、トリスフェノール等が挙げられる。具
体的には、フェノール、o−クレゾール、m−クレゾー
ル、p−クレゾール、o−エチルフェノール、p−エチ
ルフェノール、o−イソプロピルフェノール、p−se
c−ブチルフェノール、p−シクロヘキシルフェノー
ル、p−クロロフェノール、o−ブロモフェノール、p
−ブロモフェノール、2,4−キシレノール、2,6−
キシレノール、p−t−ブチルフェノール、p−オクチ
ルフェノール、p−ノニルフェノール、p−クミルフェ
ノール、p−フェニルフェノール、o−フェニルフェノ
ール、p−フェノキシフェノール、o−メトキシフェノ
ール、p−メトキシフェノール、レゾルシン、カテコー
ル、ハイドロキノン、2,2−ビス(4−ヒドロキシフ
ェニル)プロパン、ジヒドロキシジフェニルメタン、α
−ナフトール、β−ナフトール等が挙げられる。The phenolic compounds of the formula (III) which can be used in this method include monohydric or dihydric phenols, bisphenol, trisphenol and the like. Specifically, phenol, o-cresol, m-cresol, p-cresol, o-ethylphenol, p-ethylphenol, o-isopropylphenol, p-se
c-butylphenol, p-cyclohexylphenol, p-chlorophenol, o-bromophenol, p
-Bromophenol, 2,4-xylenol, 2,6-
Xylenol, pt-butylphenol, p-octylphenol, p-nonylphenol, p-cumylphenol, p-phenylphenol, o-phenylphenol, p-phenoxyphenol, o-methoxyphenol, p-methoxyphenol, resorcinol, catechol , Hydroquinone, 2,2-bis (4-hydroxyphenyl) propane, dihydroxydiphenylmethane, α
-Naphthol, β-naphthol and the like.
【0016】又、式(IV)の芳香族アミン化合物として
は、アニリン、2−メチルアニリン、2−クロルアニリ
ン、2−エチルアニリン、m−フェニレンジアミン、p
−フェニレンジアミン、2,6−ジアミノトルエン、
3,5−ジアミノビフェニル、4,4'−ジアミノジフェ
ニルメタン、1,3,5−トリアミノベンゼン、p−ア
ミノフェノール、m−アミノフェノール、4−アミノ−
4' −ヒドロキシジフェニルエーテル、4−アミノ−
4' −ヒドロキシプロパン、2−アミノ−1,3−レゾ
ルシン、4−アミノ−1,3−レゾルシン、2−アミノ
ハイドロキノン、2−メトキシアニリン、4−メトキシ
アニリン、2−イソプロポキシアニリン、2,4−ジメト
キシアニリン、o−イソプロピルアニリン、m−イソプ
ロピルアニリン、p−イソプロピルアニリン、o−n−
プロピルアニリン、o−tert−ブチルアニリン、p
−tert−ブチルアニリン、p−sec−ブチルアニ
リン、2,3−キシリジン、2,4−キシリジン、2,
6−キシリジン、3,4−キシリジン、3,5−キシリ
ジン、2−メチル−3−エチルアニリン、2−メチル−
4−イソプロピルアニリン、2,6−ジエチルアニリ
ン、2−エチル−5−tert−ブチルアニリン、2,4−
ジイソプロピルアニリン、2,4,6−トリメチルアニ
リン、4−クロロアニリン、4−ブロモアニリン、4−
フルオロアニリン、3−クロロアニリン、3−ブロモア
ニリン、3,4−ジククロロアニリン、3−クロロ−o
−トルイジン、3−クロロ−p−トルイジン、2,6−
ジメチル−4−クロロアニリン、2−アミノ−4−クレ
ゾール、4−アミノ−2−tert−ブチルフェノール、
2,6−ジメチル−4−アミノフェノール、2,6−ジ
クロロ−4−アミノフェノール、2−アミノ−1,3−
レゾルシン、4−アミノ−1,3−レゾルシン、1,1
−ジメチル−4−アミノインダン、o−フェニレンジア
ミン、2,4−ジアミノトルエン、2,4−ジアミノエ
チルベンゼン、2,6−ジアミノエチルベンゼン、2,
4−ジアミノイソプロピルベンゼン、2,4−ジアミノ
−tert−ブチルベンゼン、2,6−ジアミノ−te
rt−ブチルベンゼン、2,4−ジアミノ−1,3−ジ
メチルベンゼン、1,1−ジメチル−4−アミノインダ
ン、1,1−ジメチル−4,6−ジアミノインダン等が
挙げられる。好適な化合物はアニリンである。The aromatic amine compound of the formula (IV) includes aniline, 2-methylaniline, 2-chloroaniline, 2-ethylaniline, m-phenylenediamine,
-Phenylenediamine, 2,6-diaminotoluene,
3,5-diaminobiphenyl, 4,4'-diaminodiphenylmethane, 1,3,5-triaminobenzene, p-aminophenol, m-aminophenol, 4-amino-
4'-hydroxydiphenyl ether, 4-amino-
4'-hydroxypropane, 2-amino-1,3-resorcin, 4-amino-1,3-resorcin, 2-aminohydroquinone, 2-methoxyaniline, 4-methoxyaniline, 2-isopropoxyaniline, 2,4 -Dimethoxyaniline, o-isopropylaniline, m-isopropylaniline, p-isopropylaniline, on-
Propylaniline, o-tert-butylaniline, p
-Tert-butylaniline, p-sec-butylaniline, 2,3-xylidine, 2,4-xylidine, 2,
6-xylidine, 3,4-xylidine, 3,5-xylidine, 2-methyl-3-ethylaniline, 2-methyl-
4-isopropylaniline, 2,6-diethylaniline, 2-ethyl-5-tert-butylaniline, 2,4-
Diisopropylaniline, 2,4,6-trimethylaniline, 4-chloroaniline, 4-bromoaniline, 4-
Fluoroaniline, 3-chloroaniline, 3-bromoaniline, 3,4-dichloroaniline, 3-chloro-o
-Toluidine, 3-chloro-p-toluidine, 2,6-
Dimethyl-4-chloroaniline, 2-amino-4-cresol, 4-amino-2-tert-butylphenol,
2,6-dimethyl-4-aminophenol, 2,6-dichloro-4-aminophenol, 2-amino-1,3-
Resorcinol, 4-amino-1,3-resorcinol, 1,1
-Dimethyl-4-aminoindane, o-phenylenediamine, 2,4-diaminotoluene, 2,4-diaminoethylbenzene, 2,6-diaminoethylbenzene, 2,
4-diaminoisopropylbenzene, 2,4-diamino-tert-butylbenzene, 2,6-diamino-te
rt-butylbenzene, 2,4-diamino-1,3-dimethylbenzene, 1,1-dimethyl-4-aminoindan, 1,1-dimethyl-4,6-diaminoindan and the like. A preferred compound is aniline.
【0017】アラルキル化合物は、式(V)で表される
化合物であり、Xが塩素原子、臭素原子、フッ素原子等
のハロゲン原子、水酸基、炭素数1〜4のアルコキシ基
である。例えば、α,α' −ジヒドロキシ−o−キシレ
ン、α,α' −ジヒドロキシ−m−キシレン、α,α'
−ジヒドロキシ−p−キシレン、α,α' −ジメトキシ
−m−キシレン、α,α' −ジメトキシ−p−キシレ
ン、α,α' −ジエトキシ−o−キシレン、α,α' −
ジエトキシ−m−キシレン、α,α' −ジエトキシ−p
−キシレン、α,α' −ジイソプロポキシ−o−キシレ
ン、α,α' −ジイソプロポキシ−m−キシレン、α,
α' −ジイソプロポキシ−p−キシレン、α,α' −ジ
−n−プロポキシ−p−キシレン、α,α' −ジ−n−
ブトキシ−m−キシレン、α,α' −ジ−n−ブトキシ
−p−キシレン、α,α' −ジ−sec −ブトキシ−p−
キシレン、α,α' −ジイソブトキシ−p−キシレン、
α,α' −ジクロロ−o−キシレン、α,α' −ジクロ
ロ−m−キシレン、α,α' −ジクロロ−p−キシレ
ン、α,α' −ジブロモ−o−キシレン、α,α' −ジ
ブロモ−m−キシレン、α,α' −ジブロモ−p−キシ
レン、α,α' −ジフルオロ−o−キシレン、α,α'
−ジフルオロ−m−キシレン、α,α' −ジフルオロ−
p−キシレン、α,α' −ジョード−o−キシレン、
α,α' −ジョード−m−キシレン、α,α' −ジョー
ド−p−キシレン等を挙げることが出来る。好適な化合
物としては、α,α' −ジヒドロキシ−p−キシレン、
α,α' −ジクロロ−p−キシレン等が挙げられる。The aralkyl compound is a compound represented by the formula (V), wherein X is a halogen atom such as a chlorine atom, a bromine atom and a fluorine atom, a hydroxyl group, and an alkoxy group having 1 to 4 carbon atoms. For example, α, α′-dihydroxy-o-xylene, α, α′-dihydroxy-m-xylene, α, α ′
-Dihydroxy-p-xylene, α, α'-dimethoxy-m-xylene, α, α'-dimethoxy-p-xylene, α, α'-diethoxy-o-xylene, α, α'-
Diethoxy-m-xylene, α, α'-diethoxy-p
-Xylene, α, α′-diisopropoxy-o-xylene, α, α′-diisopropoxy-m-xylene, α,
α′-diisopropoxy-p-xylene, α, α′-di-n-propoxy-p-xylene, α, α′-di-n-
Butoxy-m-xylene, α, α′-di-n-butoxy-p-xylene, α, α′-di-sec-butoxy-p-
Xylene, α, α'-diisobutoxy-p-xylene,
α, α′-dichloro-o-xylene, α, α′-dichloro-m-xylene, α, α′-dichloro-p-xylene, α, α′-dibromo-o-xylene, α, α′-dibromo -M-xylene, α, α′-dibromo-p-xylene, α, α′-difluoro-o-xylene, α, α ′
-Difluoro-m-xylene, α, α'-difluoro-
p-xylene, α, α'-jodo-o-xylene,
α, α′-Jodo-m-xylene, α, α′-Jodo-p-xylene and the like can be mentioned. Suitable compounds include α, α′-dihydroxy-p-xylene,
α, α'-dichloro-p-xylene and the like.
【0018】このアミノ基含有フェノール樹脂を製造す
る具体的な方法は、式(III)で表されるフェノール化合
物と式(IV)で表される芳香族アミン化合物との混合物
を、式(V)で表されるアラルキル化合物と酸触媒を用
いて反応させる。この酸触媒としては、無機または有機
の酸、例えば、塩酸、燐酸、硫酸または硝酸、あるいは
塩化亜鉛、塩化第二錫、塩化アルミニウム、塩化第二鉄
のようなフリーデルクラフツ系触媒、メタンスルホン
酸、ナフィオンH(商品名:デュポン社製)のような超
強酸等であり、これらは単独で使用しても、併用しても
よい。また、活性白土、ゼオライト類の固体酸触媒やヘ
テロポリ酸類も使用できる。工業的に好ましいのは安価
な塩酸である。触媒の使用量は、フェノール化合物と芳
香族アミン化合物の合計に対して、3モル%以上、好ま
しくは5〜80モル%である。固体酸触媒の場合は、全
原料に対し、1〜100wt%、好ましくは5wt%以
上である。この範囲以上でも反応における問題はない
が、経済的でない。式(V)で表されるアラルキル化合
物として、ビスハロゲノメチル誘導体を用いる場合に
は、触媒の不存在下でも反応を行うことが出来るが、反
応を速める目的で酸触媒を用いてもよい。その酸触媒と
しては、前記の酸触媒のいずれも使用可能であり、工業
的に好ましいのは安価な塩酸である。A specific method for producing this amino group-containing phenolic resin is to prepare a mixture of a phenolic compound represented by the formula (III) and an aromatic amine compound represented by the formula (IV) by the formula (V) Is reacted with an aralkyl compound represented by the formula (1) using an acid catalyst. Examples of the acid catalyst include inorganic or organic acids such as hydrochloric acid, phosphoric acid, sulfuric acid or nitric acid, Friedel-Crafts catalysts such as zinc chloride, stannic chloride, aluminum chloride and ferric chloride, methanesulfonic acid And super strong acids such as Nafion H (trade name, manufactured by DuPont), which may be used alone or in combination. Activated clay, zeolite solid acid catalysts and heteropolyacids can also be used. Industrially preferred is inexpensive hydrochloric acid. The amount of the catalyst used is 3 mol% or more, preferably 5 to 80 mol%, based on the total of the phenol compound and the aromatic amine compound. In the case of a solid acid catalyst, the amount is 1 to 100 wt%, preferably 5 wt% or more, based on all raw materials. Above this range, there is no problem in the reaction, but it is not economical. When a bishalogenomethyl derivative is used as the aralkyl compound represented by the formula (V), the reaction can be performed in the absence of a catalyst, but an acid catalyst may be used for the purpose of accelerating the reaction. As the acid catalyst, any of the aforementioned acid catalysts can be used, and industrially preferred is inexpensive hydrochloric acid.
【0019】この方法では、芳香族アミン化合物と式
(V)のアラルキル化合物の反応は、二段階の反応によ
って得られる。即ち、一段目の反応に於いては第二アミ
ンを含む樹脂が生成するが、この第二アミンを転移反応
(第二段の反応)によって第一アミン樹脂に導くことが
できる。その転移反応は前記の酸を触媒として達成され
るが、アラルキル化合物としてビスハロゲノメチル誘導
体を用いた場合には第二アミン樹脂が生成する際に発生
するハロゲン化水素を触媒としてこの転移反応が達成さ
れる。この転移反応を速めるには、第二アミン樹脂が生
成される反応条件よりも、(イ)同種または異種の触媒
量の増加(ロ)反応温度を上げる(ハ)反応時間を長く
する等の手段により行われる。アラルキル化合物として
ビスハロゲノメチル誘導体を用い自己触媒によって反応
を行う場合にも、先に述べたように上記の酸触媒を使用
することにより反応を速めることが出来る。この方法で
はこのような第一段階〜第二段階の反応の途中、フェノ
ール化合物とアラルキル化合物との反応も同時に起こ
る。その結果、本願において硬化剤として使用されるア
ミノ基含有フェノール樹脂が製造される。なお、フェノ
ール化合物と芳香族アミン化合物との使用割合は、モル
比で、0.97:0.03〜0.2:0.8である。In this method, the reaction between the aromatic amine compound and the aralkyl compound of the formula (V) is obtained by a two-step reaction. That is, in the first-stage reaction, a resin containing a secondary amine is generated, and this secondary amine can be led to a primary amine resin by a transfer reaction (second-stage reaction). The transfer reaction is achieved using the above-mentioned acid as a catalyst, but when a bishalogenomethyl derivative is used as the aralkyl compound, the transfer reaction is achieved using hydrogen halide generated when a secondary amine resin is formed as a catalyst. Is done. In order to accelerate this transfer reaction, there are means such as (a) increasing the amount of the same or different type of catalyst, (b) increasing the reaction temperature, and (c) increasing the reaction time, compared with the reaction conditions under which the secondary amine resin is formed. It is performed by Even when a reaction is carried out by a self-catalyst using a bishalogenomethyl derivative as an aralkyl compound, the reaction can be accelerated by using the above-mentioned acid catalyst as described above. In this method, a reaction between the phenol compound and the aralkyl compound occurs simultaneously during the reaction between the first and second steps. As a result, an amino group-containing phenol resin used as a curing agent in the present application is produced. Note that the molar ratio of the phenol compound to the aromatic amine compound is 0.97: 0.03 to 0.2: 0.8.
【0020】反応温度は、反応全体としては0〜220
℃であるが、第一段階の反応においては、0〜130
℃、好ましくは20〜110℃であり、第二段階の反応
においては、150〜220℃であり、第二段階の反応
時間をできるだけ短縮するためには170℃以上の反応
温度が望ましい。反応時間は、第一段階の反応では1〜
5時間であり、第二段階の反応では3〜20時間であ
る。The reaction temperature is from 0 to 220 for the whole reaction.
° C, but in the first stage reaction,
C., preferably 20 to 110 ° C., and in the second stage reaction, 150 to 220 ° C. In order to shorten the reaction time of the second stage as much as possible, a reaction temperature of 170 ° C. or higher is desirable. The reaction time is 1 to 1 in the first stage reaction.
5 hours and 3-20 hours for the second stage reaction.
【0021】本発明の硬化剤であるフェノール樹脂で
は、フェノール化合物と芳香族アミン化合物の合計に対
するアラルキル化合物のモル比を変えることにより、低
分子量樹脂から高分子量樹脂までの種々の形態のフェノ
ール樹脂を用途に応じて製造できる。すなわち、液状−
低軟化点のフェノール樹脂は、その縮合反応の際に、ア
ラルキル化合物に対してフェノール化合物と芳香族アミ
ン化合物の合計モル比を大きくすれば得ることが出来
る。一方、高軟化点の芳香族アミン樹脂は、その縮合反
応の際に、アラルキル化合物に対してフェノール化合物
と芳香族アミン化合物の合計モル比を理論量に近いとこ
ろにすれば得られる。即ち、フェノール化合物と芳香族
アミン化合物の合計1モルに対し、アラルキル化合物を
0.1〜0.95モルの範囲で反応させることにより、
得られるフェノール樹脂の分子量範囲は300〜500
0程度であり、アミン価は150〜2000g/eq
で、樹脂の軟化点範囲は40〜120℃程度である。In the phenol resin as the curing agent of the present invention, by changing the molar ratio of the aralkyl compound to the total of the phenol compound and the aromatic amine compound, phenol resins of various forms from low molecular weight resin to high molecular weight resin can be used. It can be manufactured according to the application. That is, liquid-
A phenol resin having a low softening point can be obtained by increasing the total molar ratio of a phenol compound and an aromatic amine compound to an aralkyl compound during the condensation reaction. On the other hand, an aromatic amine resin having a high softening point can be obtained by making the total molar ratio of the phenol compound and the aromatic amine compound to the aralkyl compound close to the theoretical amount during the condensation reaction. That is, by reacting the aralkyl compound in a range of 0.1 to 0.95 mol with respect to a total of 1 mol of the phenol compound and the aromatic amine compound,
The molecular weight range of the resulting phenolic resin is 300-500
0 and the amine value is 150 to 2000 g / eq.
The softening point range of the resin is about 40 to 120 ° C.
【0022】本発明において、(B)成分として前記の
アミノ基含有フェノール樹脂と併用される他の硬化剤と
しては、例えば、フェノール、クレゾール、キシレノー
ル、レゾルシン、カテコール、ビスフェノールA、ビス
フェノールFなどのフェノール類とホルムアルデヒド、
アセトアルデヒド、プロピオンアルデヒド、ベンズアル
デヒド、サリチルアルデヒド等を、酸性触媒下で縮合反
応させて得られるノボラック型フェノール樹脂、フェノ
ール等のキシリレン結合によるアラルキル樹脂、フェノ
ール−ジシクロペンタジエン樹脂などが挙げられ、これ
らは単独でも、又は二種以上併用してもよい。In the present invention, the other curing agent used in combination with the above-mentioned amino group-containing phenol resin as the component (B) includes, for example, phenol, cresol, xylenol, resorcin, catechol, bisphenol A, bisphenol F and the like. And formaldehyde,
Novolak-type phenol resins obtained by subjecting acetaldehyde, propionaldehyde, benzaldehyde, salicylaldehyde, etc. to a condensation reaction in the presence of an acidic catalyst, aralkyl resins by xylylene bonds such as phenol, phenol-dicyclopentadiene resins, and the like. Or two or more of them may be used in combination.
【0023】本発明において用いられる(A)成分であ
る1分子中に2個以上のエポキシ基を有するエポキシ樹
脂としては、エポキシ樹脂として一般に使用されている
ものであればよく、例えば、フェノールノボラック型エ
ポキシ樹脂、o−クレゾールノボラック型エポキシ樹脂
を始めとするフェノール類とアルデヒド類から得られる
ノボラック樹脂をエポキシ化したもの、フェノール、ナ
フトール類のキシリレン結合によるアラルキル樹脂のエ
ポキシ化物、フェノール−ジシクロペンタジエン樹脂の
エポキシ化物、ビスフェノールA、ビスフェノールF、
ビスフェノールS、チオジフェノール、ビスフェノー
ル、置換ビスフェノール、ジヒドロキシナフタレンなど
のジグリシジルエーテル、フタル酸、ダイマー酸などの
多塩基酸とエピクロルヒドリンの反応によって得られる
グリシジルエステル型エポキシ樹脂、ジアミノジフェニ
ルメタン、ジアミノジフェニルスルホン、イソシアヌル
酸などのポリアミンとエピクロルヒドリンの反応によっ
て得られるグリシジルアミン型エポキシ樹脂などがあ
り、これらを適宜何種類でも併用することもできる。エ
ポキシ樹脂と全硬化剤との当量比は特に限定はされない
が、0.5〜1.5が好ましい。The epoxy resin having two or more epoxy groups in one molecule, which is the component (A) used in the present invention, may be any epoxy resin generally used as an epoxy resin, for example, phenol novolak type. Epoxy resin, epoxidized novolak resin obtained from phenols and aldehydes including o-cresol novolak type epoxy resin, phenol, epoxidized aralkyl resin by xylylene bond of naphthols, phenol-dicyclopentadiene resin Epoxidized product, bisphenol A, bisphenol F,
Bisphenol S, thiodiphenol, bisphenol, substituted bisphenol, diglycidyl ethers such as dihydroxynaphthalene, phthalic acid, glycidyl ester type epoxy resin obtained by the reaction of polybasic acid such as dimer acid and epichlorohydrin, diaminodiphenylmethane, diaminodiphenylsulfone, There is a glycidylamine type epoxy resin obtained by the reaction of a polyamine such as isocyanuric acid and epichlorohydrin, and any number of these can be used in combination. The equivalent ratio between the epoxy resin and the total curing agent is not particularly limited, but is preferably 0.5 to 1.5.
【0024】半導体封止用エポキシ樹脂組成物では、無
機充填剤(C)を必須成分として使用する。この無機充
填剤の使用量は全エポキシ樹脂組成物の50重量%以上
であるが、耐湿性や機械的強度向上の観点から70重量
%以上が特に好ましい。無機充填剤としては、シリカ、
アルミナ、窒化珪素、炭化珪素、タルク、ケイ酸カルシ
ウム、炭酸カルシウム、マイカ、クレー、チタンホワイ
ト等の粉体、ガラス繊維、カーボン繊維等の繊維体が例
示される。これらの中で熱膨張率と熱伝導率の点から、
結晶性シリカおよび/または溶融性シリカが好ましい。
更に、樹脂組成物の成形時の流動性を考えるとその形状
は球形、または球形と不定型の混合物が好ましい。In the epoxy resin composition for semiconductor encapsulation, an inorganic filler (C) is used as an essential component. The amount of the inorganic filler used is 50% by weight or more of the total epoxy resin composition, but is preferably 70% by weight or more from the viewpoint of improving moisture resistance and mechanical strength. As the inorganic filler, silica,
Examples thereof include powders such as alumina, silicon nitride, silicon carbide, talc, calcium silicate, calcium carbonate, mica, clay, and titanium white, and fibrous bodies such as glass fibers and carbon fibers. Among these, from the point of thermal expansion coefficient and thermal conductivity,
Crystalline silica and / or fusible silica are preferred.
Further, considering the fluidity during molding of the resin composition, the shape is preferably spherical, or a mixture of spherical and amorphous.
【0025】本発明において、樹脂組成物を硬化させる
にあたっては硬化促進剤を使用することが望ましい。硬
化促進剤としては、2−メチルイミダゾール、2−メチ
ル−4−エチルイミダゾール、2−ヘプタデシルイミダ
ゾール等のイミダゾール類、トリエタノールアミン、ト
リエチレンジアミン、N−メチルモルホリン等のアミン
類、トリブチルホスフィン、トリフェニルホスフィン、
トリトリルホスフィン等の有機ホスフィン類、テトラフ
ェニルホスホニウムテトラフェニルボレート、トリエチ
ルアンモニウムテトラフェニルボレート等のテトラフェ
ニルボロン類、1,8−ジアザ−ビシクロ(5,4,
0)ウンデセン−7およびその誘導体がある。これらの
硬化促進剤は、単独で用いても2種類以上を併用しても
よい。これら硬化促進剤の配合は、エポキシ化物または
エポキシ化合物および硬化剤の合計量100重量部に対
して0.01〜10重量部の範囲で用いられる。In the present invention, in curing the resin composition, it is desirable to use a curing accelerator. Examples of the curing accelerator include imidazoles such as 2-methylimidazole, 2-methyl-4-ethylimidazole and 2-heptadecylimidazole; amines such as triethanolamine, triethylenediamine and N-methylmorpholine; tributylphosphine; Phenylphosphine,
Organic phosphines such as tolyl phosphine; tetraphenylborons such as tetraphenylphosphonium tetraphenylborate and triethylammonium tetraphenylborate; and 1,8-diaza-bicyclo (5,4,
0) Undecene-7 and its derivatives. These curing accelerators may be used alone or in combination of two or more. The curing accelerator is used in an amount of 0.01 to 10 parts by weight based on 100 parts by weight of the total amount of the epoxidized product or epoxy compound and the curing agent.
【0026】本発明のエポキシ樹脂組成物においては、
機械的強度、耐熱性の点から各種の添加剤をも配合する
ことが望ましい。すなわち、樹脂と無機充填剤との接着
性向上の目的でカップリング剤を併用することが好まし
く、かかるカップリング剤としては、シラン系、チタネ
ート系、アルミネート系およびジルコアルミネート系等
のカップリング剤が使用できる。その中でも、シラン系
カップリング剤が好ましく、特にエポキシ樹脂と反応す
る官能基を有するシラン系カップリング剤が最も好まし
い。かかるシラン系カップリング剤の例としては、ビニ
ルトリメトキシシラン、ビニルトリエトキシシラン、N
−(2−アミノメチル)−3−アミノプロピルメチルジ
メトキシシラン、N−(2−アミノエチル)−3−アミ
ノプロピルトリメトキシシラン、3−アミノプロピルト
リエトキシシラン、3−アニリノプロピルトリエトキシ
シラン、3−グリシドキシプロピルトリメトキシシラ
ン、3−グリシドキシプロピルメチルジメトキシシラ
ン、2−(3,4−エポキシシクロヘキシル)エチルト
リメトキシシラン、3−メタクリロキシプロピルトリメ
トキシシラン、3−メルカプトプロピルトリメトキシシ
ラン等を挙げることができ、これらを単独、あるいは併
用して使用することができる。これらのシラン系カップ
リング剤は、予め無機充填剤の表面に吸着あるいは反応
により固定化されているのが好ましい。In the epoxy resin composition of the present invention,
It is desirable to add various additives in view of mechanical strength and heat resistance. That is, it is preferable to use a coupling agent in combination for the purpose of improving the adhesiveness between the resin and the inorganic filler. Examples of such a coupling agent include silane-based, titanate-based, aluminate-based and zircoaluminate-based coupling agents. Agents can be used. Among them, a silane coupling agent is preferable, and a silane coupling agent having a functional group that reacts with an epoxy resin is particularly preferable. Examples of such silane coupling agents include vinyltrimethoxysilane, vinyltriethoxysilane, N
-(2-aminomethyl) -3-aminopropylmethyldimethoxysilane, N- (2-aminoethyl) -3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-anilinopropyltriethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropylmethyldimethoxysilane, 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, 3-methacryloxypropyltrimethoxysilane, 3-mercaptopropyltrimethoxysilane Silane and the like can be mentioned, and these can be used alone or in combination. It is preferable that these silane coupling agents are previously fixed to the surface of the inorganic filler by adsorption or reaction.
【0027】また、本発明の半導体封止用エポキシ樹脂
組成物には、内部応力の低減のためにシリコーン化合物
を加えてもよい。このシリコーン化合物としては特開平
4−155940で開示されたような末端および分岐末
端にアミノ基、エポキシ基、カルボキシ基、水酸基また
はシクロヘキセンオキサイド基を有するポリシロキサン
類が挙げられる。このようなシリコーン化合物の添加量
は全組成物に対して多くても5重量%であり、通常は
0.5〜3重量%の範囲である。更に、本発明の樹脂組
成物には、上記各成分の他、必要に応じて脂肪酸、脂肪
酸基、ワックスなどの離型剤、ブロム化物、アンチモ
ン、リン等の難燃剤、カーボンブラック等の着色剤等を
配合し、混合、混練してIC封止用の成形材料とするこ
とができる。本発明のエポキシ樹脂組成物を用いて半導
体素子の封止を行う方法は、特に限定されるものではな
く、通常のトランスファー成形等の公知のモールド方法
によって行うことができる。このような方法によって得
られる半導体装置は、半田浸漬時における優れた耐クラ
ック性を有し、高集積度ICとして長期に亘る使用で安
定であり、そのため高信頼性が得られる。Further, a silicone compound may be added to the epoxy resin composition for semiconductor encapsulation of the present invention in order to reduce internal stress. Examples of the silicone compound include polysiloxanes having an amino group, an epoxy group, a carboxy group, a hydroxyl group or a cyclohexene oxide group at the terminal and the branched terminal as disclosed in JP-A-4-155940. The addition amount of such a silicone compound is at most 5% by weight based on the whole composition, and is usually in the range of 0.5 to 3% by weight. Further, in addition to the above components, the resin composition of the present invention may further comprise, if necessary, a release agent such as a fatty acid, a fatty acid group and a wax, a brominated compound, a flame retardant such as antimony and phosphorus, and a coloring agent such as carbon black. Can be mixed, kneaded and kneaded to obtain a molding material for IC encapsulation. The method of sealing a semiconductor element using the epoxy resin composition of the present invention is not particularly limited, and can be performed by a known molding method such as ordinary transfer molding. A semiconductor device obtained by such a method has excellent crack resistance during solder immersion, and is stable over a long period of use as a highly integrated IC, so that high reliability is obtained.
【0028】[0028]
【実施例】次に、本発明を実施例により詳細に説明する
が、本発明はこれにより何ら制限されるものではない。 合成例1 攪拌器、温度計及び還流冷却器を備えたガラス製反応容
器に、フェノール193.0g、アニリン181.5g
を装入し、内温を105℃まで昇温した。次にp−キシ
リレンジクロライド175.0gを装入し、内温を同温
度に保ちつつ、2.5時間攪拌を続けた後、内温を18
0℃まで昇温してさらに9.5時間攪拌を続けた。反応
終了後、内温を60℃まで徐冷し、28%アンモニア水
280gを装入し中和した。次いで水、未反応のフェノ
ール及びアニリンを真空蒸留により除去し、残渣にトル
エン、水を装入して水洗して塩化アンモニウムを除い
た。水洗終了後、トルエン、微量の水を減圧蒸留によっ
て除去し、得られた赤褐色透明樹脂を熱時に排出した。
収量は215gで、軟化点(JIS−K−2548)は
62.4℃であった。この樹脂の水酸基当量(g/e
q)は201で、アミン価(g/eq)は820であっ
た。また、GPCによる樹脂の平均分子量は620であ
った。Next, the present invention will be described in more detail with reference to examples, but the present invention is not limited thereto. Synthesis Example 1 193.0 g of phenol and 181.5 g of aniline were placed in a glass reaction vessel equipped with a stirrer, a thermometer, and a reflux condenser.
And the internal temperature was raised to 105 ° C. Next, 175.0 g of p-xylylene dichloride was charged, and stirring was continued for 2.5 hours while maintaining the internal temperature at the same temperature.
The temperature was raised to 0 ° C., and stirring was continued for another 9.5 hours. After completion of the reaction, the internal temperature was gradually cooled to 60 ° C., and 280 g of 28% aqueous ammonia was charged for neutralization. Then, water, unreacted phenol and aniline were removed by vacuum distillation, and toluene and water were added to the residue and washed with water to remove ammonium chloride. After washing with water, toluene and a trace amount of water were removed by distillation under reduced pressure, and the resulting red-brown transparent resin was discharged when hot.
The yield was 215 g and the softening point (JIS-K-2548) was 62.4 ° C. The hydroxyl equivalent (g / e) of this resin
q) was 201 and the amine value (g / eq) was 820. The average molecular weight of the resin measured by GPC was 620.
【0029】合成例2 攪拌器、温度計及び還流冷却器を備えたガラス製反応容
器に、α−ナフトール259.6g、アニリン111.
7gを装入し、内温を95℃まで昇温した。次にp−キ
シリレンジクロライド105.1gを装入し、実施例1
と同様に反応を行った。反応終了後、内温を60℃まで
徐冷し、28%アンモニア水157.7gを装入し中和
した。次いで、水、トルエンを加えて分液、水洗して塩
化アンモニウムを除去した。トルエン、残存する未反応
のα−ナフトールおよび微量の水を減圧蒸留により除い
て、得られた暗褐色樹脂を熱時に排出した。収量は15
6gで、軟化点(JIS−K−2548)は94.0℃
であった。この樹脂の水酸基当量(g/eq)は390
で、アミン価(g/eq)は1190であった。また、
GPCによる樹脂の平均分子量は760であった。Synthesis Example 2 259.6 g of α-naphthol and 111.aniline were placed in a glass reactor equipped with a stirrer, thermometer and reflux condenser.
7 g was charged, and the internal temperature was raised to 95 ° C. Next, 105.1 g of p-xylylene dichloride was charged, and Example 1 was added.
The reaction was carried out in the same manner as described above. After the completion of the reaction, the internal temperature was gradually cooled to 60 ° C., and neutralized by charging 157.7 g of 28% aqueous ammonia. Next, water and toluene were added thereto, and the mixture was separated and washed with water to remove ammonium chloride. Toluene, remaining unreacted α-naphthol and traces of water were removed by distillation under reduced pressure, and the resulting dark brown resin was discharged hot. Yield 15
6g, softening point (JIS-K-2548) 94.0 ° C
Met. The hydroxyl equivalent (g / eq) of this resin is 390
And the amine value (g / eq) was 1190. Also,
The average molecular weight of the resin measured by GPC was 760.
【0030】合成例3 攪拌器、温度計及び還流冷却器および水分離器を備えた
ガラス製反応容器に、α,α' −ジヒドロキシ−p−キ
シレン138.1g、フェノール94.1g、p−アミ
ノフェノール109.1および活性白土(ガレオナイト
#136、水沢化学(株)製)68.3gを装入し、内
温を180℃まで昇温した。内温を同温度に保ち、攪拌
を13時間続けた。反応中に生成する水は、水分離器に
よって除去した。反応終了後、反応液を110℃まで除
冷した後に濾過によって活性白土を除き、減圧蒸留によ
って、残存するフェノール、p−アミノフェノールを除
去し、得られた暗褐色樹脂を熱時に排出した。収量は2
30gで、軟化点(JIS−K−2548)は81℃で
あった。この樹脂の水酸基当量(g/eq)は175
で、アミン価(g/eq)は435であった。GPCに
よる樹脂の平均分子量は2300であった。Synthesis Example 3 138.1 g of α, α'-dihydroxy-p-xylene, 94.1 g of phenol, p-amino were placed in a glass reactor equipped with a stirrer, thermometer, reflux condenser and water separator. Phenol 109.1 and 68.3 g of activated clay (Galeonite # 136, manufactured by Mizusawa Chemical Co., Ltd.) were charged, and the internal temperature was raised to 180 ° C. The internal temperature was kept at the same temperature, and stirring was continued for 13 hours. Water generated during the reaction was removed by a water separator. After completion of the reaction, the reaction solution was cooled to 110 ° C., and then activated clay was removed by filtration. The remaining phenol and p-aminophenol were removed by distillation under reduced pressure, and the resulting dark brown resin was discharged while hot. Yield 2
With 30 g, the softening point (JIS-K-2548) was 81 ° C. The hydroxyl equivalent (g / eq) of this resin is 175
And the amine value (g / eq) was 435. The average molecular weight of the resin by GPC was 2,300.
【0031】実施例1〜4 エポキシ樹脂にo−クレゾールノボラック型エポキシ樹
脂(商品名 EOCN−102S、(株)日本化薬製)
およびビフェニル型エポキシ樹脂(商品名 YX−40
00H、(株)油化シェルエポキシ製)を用い、硬化剤
として合成例1〜3で得られたアミノ基含有フェノール
樹脂およびフェノールノボラック樹脂(商品名 BRG
#558、(株)昭和高分子製)、無機充填剤として球
形溶融シリカ(ハリミックS−CO、(株)マイクロン
製)と不定形溶融シリカ(ヒューズレックスRD−8、
(株)龍森製)の50/50(重量比)の混合物、その
他の添加物を表−1(表1)に示す配合(重量部)で加
え、温度100℃のミキシングロール機で3分間混練を
行ってエポキシ樹脂組成物を得た。この組成物を注型加
工し、得られた硬化物の物性を測定した。物性測定用の
試験片はトランスファー成形(180℃、30Kg/c
m2 、3min)により成形し、表−1に示す条件で後
硬化を行った。また、上記エポキシ樹脂組成物を用い
て、フラットパッケージ型半導体装置用リードフレーム
の素子搭載部に半導体素子(10mm×10mm角)を
搭載した後、トランスファー成形(180℃、30Kg
/cm2 、3min)により半導体装置を得た。この半
導体装置について、V.P.Sテスト(クラック発生テ
スト)を行った。結果を表−1に示した。Examples 1 to 4 An o-cresol novolak type epoxy resin (trade name: EOCN-102S, manufactured by Nippon Kayaku Co., Ltd.) was used as the epoxy resin.
And biphenyl type epoxy resin (trade name: YX-40)
00H, manufactured by Yuka Shell Epoxy Co., Ltd.), and as the curing agent, the amino group-containing phenol resin and phenol novolak resin (trade name BRG) obtained in Synthesis Examples 1 to 3
# 558, manufactured by Showa Kogyo Co., Ltd.), spherical fused silica (Halimic S-CO, manufactured by Micron Corporation) and amorphous fused silica (Hughex RD-8,
50/50 (weight ratio) mixture of Tatsumori Co., Ltd.) and other additives were added in the proportions (parts by weight) shown in Table 1 (Table 1), and mixed with a mixing roll machine at a temperature of 100 ° C. for 3 minutes. Kneading was performed to obtain an epoxy resin composition. The composition was cast and the physical properties of the obtained cured product were measured. The test piece for measuring physical properties was transfer molded (180 ° C, 30Kg / c
m 2 , 3 min) and post-cured under the conditions shown in Table 1. Further, after the semiconductor element (10 mm × 10 mm square) is mounted on the element mounting portion of the flat package type lead frame for a semiconductor device using the epoxy resin composition, transfer molding (180 ° C., 30 kg) is performed.
/ Cm 2 , 3 min) to obtain a semiconductor device. About this semiconductor device, P. An S test (crack generation test) was performed. The results are shown in Table 1.
【0032】比較例1 硬化剤としてフェノールノボラック樹脂(商品名 BR
G#558、(株)昭和高分子製)およびザイロック樹
脂(商品名 ミレックスXL−225−3L、(株)三
井東圧化学製)を使用した以外は、実施例と同様にして
エポキシ樹脂組成物および半導体装置を得た。これらの
評価結果を表−1に示した。Comparative Example 1 A phenol novolak resin (trade name BR) was used as a curing agent.
G # 558, manufactured by Showa Polymer Co., Ltd.) and Xyloc resin (trade name: MILEX XL-225-3L, manufactured by Mitsui Toatsu Chemicals, Inc.) were used in the same manner as in Examples, except that epoxy resin compositions were used. And a semiconductor device. The evaluation results are shown in Table 1.
【0033】[0033]
【表1】 本発明のアミノ基含有フェノール樹脂を用いたエポキシ
樹脂組成物は、実施例1と比較例1を比べて判るように
同様の骨格を有するフェノール樹脂に対してガラス転移
温度が大巾に向上し、吸湿性はほとんど変わらない。
又、ノボラック型のフェノール樹脂と比べると吸湿性が
低い。[Table 1] The epoxy resin composition using the amino group-containing phenol resin of the present invention has a significantly improved glass transition temperature with respect to a phenol resin having a similar skeleton as can be seen by comparing Example 1 and Comparative Example 1, Hygroscopicity hardly changes.
Further, it has low hygroscopicity as compared with a novolak type phenol resin.
【0034】なお、各種物性等の試験方法は以下の通り
である。 ・ガラス転移温度:TMA法(島津、TMA−DRW
DT−30で測定) ・煮沸吸水率:100℃で沸騰水中で2時間煮沸後の重
量増加を測定 ・V.P.Sテスト:試験用の半導体装置を65℃、9
5%の恒温恒湿槽に、168時間放置した後、直ちに2
40℃のフロナート液(住友スリーエム製、FC−7
0)に投入し、パッケージ樹脂にクラックが発生した半
導体の数を数えた。試験値を分数で示し、分子はクラッ
クの発生した半導体装置の数、分母は試験に供した半導
体装置の数である。また、試験に供した添加剤およびエ
ポキシ化物、硬化剤は以下の通りである。 ・C11Z:ウンデシルイミダゾール(四国ファインケ
ミカル製) ・無機充填剤:球形溶融シリカ(ハリミックS−CO、
(株)マイクロン製50重量部と不定型溶融シリカ(ヒ
ューズレックスRD−8、(株)龍森製)50重量部の
混合物 ・シランカップリング剤:(SZ−6083、東レダウコー
ニングシリコーン製) ・EOCN−102S:o−クレゾールノボラック型エ
ポキ樹脂(株)日本化薬製、エポキシ当量214 ・BRG #558:フェノールノボラック樹脂(株)
昭和高分子製、水酸基当量102 ・YX−4000H:ビフェニル型エポキシ樹脂(株)
油化シェルエポキシ製、エポキシ当量190g/eq ・XL−225−3L:ザイロック樹脂〔下記式(VI)
(化7)〕(株)三井東圧化学製、水酸基当量174g
/eqTest methods for various physical properties and the like are as follows. -Glass transition temperature: TMA method (Shimadzu, TMA-DRW
(Measured by DT-30) Boiling water absorption: Measure the weight increase after boiling for 2 hours in boiling water at 100 ° C. P. S test: Test semiconductor device at 65 ° C, 9
Immediately after leaving for 168 hours in a 5% constant temperature and humidity chamber,
40 ° C Freonart liquid (manufactured by Sumitomo 3M, FC-7
0), and the number of semiconductors having cracks in the package resin was counted. The test value is indicated by a fraction, the numerator is the number of semiconductor devices having cracks, and the denominator is the number of semiconductor devices subjected to the test. The additives, epoxidized products, and curing agents used in the test are as follows. -C11Z: undecyl imidazole (manufactured by Shikoku Fine Chemical)-Inorganic filler: spherical fused silica (Halimic S-CO,
A mixture of 50 parts by weight of Micron Co., Ltd. and 50 parts by weight of amorphous fused silica (Hughes Rex RD-8, manufactured by Tatsumori Co., Ltd.) • Silane coupling agent: (SZ-6083, manufactured by Toray Dow Corning Silicone) EOCN-102S: o-cresol novolak type epoxy resin, Nippon Kayaku Co., Ltd., epoxy equivalent 214 · BRG # 558: phenol novolak resin
Showa Polymer, hydroxyl equivalent 102 * YX-4000H: Biphenyl epoxy resin
Made of Yuka Shell Epoxy, epoxy equivalent 190g / eq. XL-225-3L: Xyloc resin [Formula (VI) below
(Chemical formula 7)] 174 g of hydroxyl equivalent, manufactured by Mitsui Toatsu Chemicals, Inc.
/ Eq
【0035】[0035]
【化7】 (式中、pは0〜20の整数を示す)Embedded image (Where p represents an integer of 0 to 20)
【0036】[0036]
【発明の効果】本発明のアミノ基含有フェノール樹脂を
用いたエポキシ樹脂組成物は、類似の骨格を有するフェ
ノール樹脂に比してガラス転移温度が大巾に向上し、且
つ、吸湿性はほとんど変わらず、一方、ノボラック型の
フェノール樹脂と比べると吸湿性が低い。このことか
ら、本発明のエポキシ樹脂組成物は、半導体封止材とし
て好適であり、これを用いて封止された装置は高い信頼
性が得られる。The epoxy resin composition using the amino group-containing phenolic resin of the present invention has a significantly improved glass transition temperature and substantially no change in hygroscopicity as compared with a phenolic resin having a similar skeleton. On the other hand, on the other hand, its hygroscopicity is lower than that of a novolak type phenol resin. For this reason, the epoxy resin composition of the present invention is suitable as a semiconductor encapsulating material, and a device encapsulated with the epoxy resin composition has high reliability.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 山口 彰宏 神奈川県横浜市栄区笠間町1190番地 三 井東圧化学株式会社内 (56)参考文献 特開 平1−259024(JP,A) 特公 昭45−29390(JP,B1) (58)調査した分野(Int.Cl.7,DB名) C08G 59/62 C08L 63/00 - 63/10 H01L 23/29 ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Akihiro Yamaguchi 1190 Kasama-cho, Sakae-ku, Yokohama-shi, Kanagawa Prefecture Inside Mitsui Toatsu Chemicals Co., Ltd. −29390 (JP, B1) (58) Fields investigated (Int. Cl. 7 , DB name) C08G 59/62 C08L 63/00-63/10 H01L 23/29
Claims (5)
有するエポキシ樹脂と、(B)一般式(I)(化1)で
表され、かつ軟化点40〜120℃、平均分子量300
〜5000、アミン価150〜2000g/eqである
アミノ基含有フェノール樹脂を含む硬化剤とを配合して
なるエポキシ樹脂組成物。 【化1】 (式中、R1、R2は水素原子、ハロゲン原子、水酸
基、またはC1〜C12のアルキル基、アリール基、シ
クロアルキル基、アラルキル基、アルコキシ基、アリー
ルオキシ基を示し、同一でも異なってもよく、R1とR
2は環を形成しても良く、R3、R4は、水素原子、ハ
ロゲン原子、水酸基、アミノ基、C1〜C12のアルキ
ル基、アリール基、シクロアルキル基、アラルキル基、
アミノ基置換アラルキル基、ヒドロキシ基置換アラルキ
ル基、アルコキシ基、アリールオキシ基、アミノ基置換
アリールオキシ基、ヒドロキシ基置換アリールオキシ基
を示し、同一でも異なっても良く、R3とR4は環を形
成してもよい。m、nは1〜20の整数を示し、末端は
フェノール化合物及び/または芳香族アミン化合物であ
り、フェノール化合物と芳香族アミン化合物の結合順序
は限定されない)(A) an epoxy resin having two or more epoxy groups in one molecule; (B) an epoxy resin represented by the general formula (I) (Chemical Formula 1) having a softening point of 40 to 120 ° C. and an average molecular weight of 1. 300
An epoxy resin composition comprising a curing agent containing an amino group-containing phenolic resin having an amine value of 150 to 2000 g / eq. Embedded image (Wherein, R 1 and R 2 represent a hydrogen atom, a halogen atom, a hydroxyl group, or a C 1 to C 12 alkyl group, an aryl group, a cycloalkyl group, an aralkyl group, an alkoxy group, or an aryloxy group. at best, R 1 and R
2 may form a ring, and R 3 and R 4 represent a hydrogen atom, a halogen atom, a hydroxyl group, an amino group, a C 1 to C 12 alkyl group, an aryl group, a cycloalkyl group, an aralkyl group,
An amino-substituted aralkyl group, a hydroxy-substituted aralkyl group, an alkoxy group, an aryloxy group, an amino-substituted aryloxy group, or a hydroxy-substituted aryloxy group, which may be the same or different, and R 3 and R 4 represent a ring It may be formed. m and n each represent an integer of 1 to 20, and the terminal is a phenol compound and / or an aromatic amine compound, and the bonding order of the phenol compound and the aromatic amine compound is not limited.
50重量%以上の無機充填剤を配合してなる半導体封止
用エポキシ樹脂組成物。2. The epoxy resin composition according to claim 1,
An epoxy resin composition for semiconductor encapsulation, comprising 50% by weight or more of an inorganic filler.
化させることにより得られる硬化物。3. A cured product obtained by curing the epoxy resin composition according to claim 1.
化させることにより得られる硬化物。4. A cured product obtained by curing the epoxy resin composition according to claim 2.
半導体装置。5. A semiconductor device sealed with the cured product according to claim 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15198993A JP3214756B2 (en) | 1993-06-23 | 1993-06-23 | Epoxy resin composition, cured product thereof, and semiconductor device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15198993A JP3214756B2 (en) | 1993-06-23 | 1993-06-23 | Epoxy resin composition, cured product thereof, and semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0718060A JPH0718060A (en) | 1995-01-20 |
| JP3214756B2 true JP3214756B2 (en) | 2001-10-02 |
Family
ID=15530633
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|---|---|---|---|
| JP15198993A Expired - Fee Related JP3214756B2 (en) | 1993-06-23 | 1993-06-23 | Epoxy resin composition, cured product thereof, and semiconductor device |
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| Country | Link |
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| KR102434730B1 (en) * | 2020-11-20 | 2022-08-23 | 한국생산기술연구원 | Low hygroscopicity epoxy compoistion |
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