JP3222840B2 - Quartz glass burner head and method of manufacturing the same - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a quartz glass burner head used for producing synthetic quartz glass or for performing flame processing on quartz glass products, and a method for producing the same.

[0002]

2. Description of the Related Art Hitherto, many embodiments of a burner using a quartz glass head have been well known together with the necessity thereof. When a burner head is manufactured using quartz glass, generally, as shown in FIG. 9, a small diameter quartz glass for discharging a gaseous body is provided in an outer tube 100 having a burner discharge port formed in a cylindrical glass opening shape. A large number of tubes 102 to 104 are arranged concentrically around the tube 101, and the tubes 102 to 104 are arranged obliquely so that the gas body converges at a point P in front. .

Since the small diameter quartz glass tube has a small inner diameter, it is difficult to maintain dimensional accuracy in the tube manufacturing process, requires a step of correcting the inner diameter, requires a long working time, and reduces the manufacturing cost of the burner head. To rise. Also, since a large number of tubes must be arranged at an angle so that the gas body converges at the point P in front,
Along with disposing the tube within the outer cylinder 100 at a predetermined distance from the outer cylinder, the tube and the fuel gas pipe;
It is difficult to mass-produce the welding process because it requires a high level of technology to perform welding with a combustion supporting gas pipe or the like, and only a skilled worker must perform the welding process. In addition, since the direction of the tube to be welded is slightly different for each burner head, the performance of each burner head is different, and it is difficult to manufacture a burner head having the same performance.

As a prior art, Japanese Patent Laid-Open No. 5-2153 is disclosed.
No. 13 is known. This technology uses a porous tube having a large number of conducting holes inclined so that the gas to be discharged converges in the front, instead of the tube, in an outer tube in which the burner discharge port is formed in a cylindrical glass opening shape. A plate is arranged.

[0005]

According to this technique, the perforated plate is formed by piercing the conductive hole in a disk body, and there is no need to weld a large number of tubes at a predetermined interval. Therefore, the conduction hole can be formed with high accuracy, but the perforated plate is disposed in the outer cylinder at right angles to the axis of the outer cylinder and is welded to a fuel gas pipe, a supporting gas pipe, or the like. A high level of technology was required at a point and at a predetermined distance between the outer periphery of the perforated plate and the inner periphery of the outer cylinder.

SUMMARY OF THE INVENTION In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide a burner head made of quartz glass which does not impose a burden on a worker in manufacturing and a method of manufacturing the same.

[0007]

SUMMARY OF THE INVENTION According to the present invention, there are provided a plurality of inlets provided on a rear surface, to which a fuel gas pipe and a supporting gas pipe are connected, and provided on a front surface thereof, and communicating with the inlet. And a method of manufacturing the same.

The first invention is a quartz glass burner head, which is formed on an integral quartz glass rod.
The gas body inclined concentrically between the inlet and the outlet so that the gas discharged from the outlet provided on the front surface of the quartz glass rod converges forward of the front surface. Characterized by having a circulation passage of

In the quartz glass burner head according to the first aspect of the present invention, a concentrically inclined flow passage communicating between the inlet and the outlet is formed in an integral quartz glass rod. There is no need to adjust and set the position of the tube and the perforated plate for welding, and a highly accurate quartz glass burner head can be provided.

A plurality of grooves are formed concentrically on the back surface, and all of the openings of the inlet having the same diameter as the flow passage having the same concentric inclination angle are all the same. The configuration facing the inside is also an effective means of the first invention.

In the first invention, for example, as shown in FIGS. 1 and 2, a back surface 1Aa of a quartz glass burner head 1A is provided.
Has a number of grooves (1Ac-1Ag) formed concentrically,
Flow passages (2 to 6) are formed in these grooves. That is, in the groove 1Ac, the opening of the flow passage 2 is not lacked by the lateral wall surface of the groove 1Ac, and all of the opening faces the groove. Therefore, the gas body filling the groove can flow into the flow passage 2 without any obstruction at the entrance of the opening.

In addition, a central passage for circulating a combustion supporting gas is formed in the back of the integral quartz glass rod, which extends perpendicularly to the front surface, and the circulation passage is formed in a multistage shape concentrically outside the central passage. It is also an effective means of the first invention that a plurality of fuel gas and a fuel supporting gas are alternately arranged outside the fuel gas.

The gas passages are concentrically arranged in multiple stages.
Since a large number of fuel gas and fuel support gas are alternately provided, it is possible to supply a necessary amount of fuel support gas to the fuel gas and there is no lack of oxygen.

A central passage for circulating a combustion supporting gas is formed in the back of the integral quartz glass rod and extends vertically to the front surface. For gas, for multi-stage supporting gas on the outside,
Further, it is an effective means of the first invention that a large number of outsides are arranged in the order for the fuel gas.

For example, as shown in FIG. 5, a flow passage 23 for the fuel gas is provided immediately outside the central passage 24 for the support gas, and a flow passage 22 for the support gas is provided outside the flow passage 23. Are formed. Now, when the flow passage 21 further outside the flow passage 22 is formed as a flow passage for the fuel gas and the inclination angle of the flow passage 22 with respect to the center passage 24 is increased, the front surface of the quartz glass head 1B of the flow passage 22 is formed. The opening of the circulation passage 22 on 1Bb is close to the opening of the circulation passage 23, and only the same number of the passages 23 can be formed. Then, even if the supporting gas can be sufficiently supplied to the flow passage 23, the supply of the fuel gas in the flow passage 21 outside the flow passage 22 may be insufficient, resulting in oxygen deficiency. There are cases.

The present technical means comprises a plurality of flow passages 20 and 21 for the supporting gas between the flow passage 23 for the first fuel gas and the flow passage 19 for the second fuel gas. , 22 ensured the supply of the supporting gas to these fuel gases. Accordingly, it is not necessary to form a flow passage for the combustion supporting gas outside the flow passage 19, and it is possible to prevent the quartz glass head from increasing in diameter and to arrange a plurality of flow passages for the combustion supporting gas in close proximity. Therefore, it is not necessary to partition each of these circulation passages with the introduction pipe, and the configuration is simplified.

According to a second aspect of the present invention, there are provided a fuel gas pipe, a plurality of inlets to which the fuel supporting gas pipe is connected, and
This is a method for manufacturing a quartz glass burner head provided on the front surface and having a number of outlets communicating with the inlet. Then, using a drill, a central passage extending vertically to the front surface is formed on the back surface of the integral quartz glass rod, and the quartz glass rod is aligned with the drill central axis at a position where the central passage is inclined by a predetermined angle. It is characterized in that a large number of gas flow passages which are concentrically inclined with the central passage are rotated by a predetermined angle as a fulcrum, and are drilled by the drill.

According to the second aspect of the present invention, a quartz glass rod is provided, and a central passage extending perpendicularly to the back surface of the quartz glass rod and extending to the front surface is drilled and inclined concentrically with the central passage. Since a large number of gas passages are bored by the drill, there is no need to adjust and set the position of the outer cylinder and the perforated plate to perform welding, and a highly accurate quartz glass burner head is provided. be able to.

Also, a large number of grooves are formed on the back surface of the quartz glass rod concentrically with the opening of the central passage so that the entire opening of the introduction port of the flow passage is formed inside. Is also an effective means of the second invention. By forming the groove in this manner, all of the opening faces the inside of the groove without being cut off by the wall surface of the width of the groove, so that the gas filled in the groove is formed at the entrance of the opening. There is nothing obstructed above and flows into the flow passage.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to an embodiment shown in the drawings. However, the dimensions, materials, shapes, relative arrangements, and the like of the components described in this embodiment are not intended to limit the scope of the invention thereto, but are merely illustrative examples unless otherwise specified. Not just.

FIG. 1 is a sectional view showing an embodiment of a burner head made of quartz glass, FIG. 2 is a right side view of FIG. 1, and FIG. 3 is a left side view of FIG. In these figures, a burner head 1A made of quartz glass is formed in a cylindrical shape,
One central passage 7 communicating with the front 1Ab side to the central axis destination position from the back 1Aa side of the cylinder is bored as a passage for combustion assisting gas O _2.

The central passage 7 is concentric, and the front passage 1Ab is lower and the back 1Aa is higher.
4, 3, and 2 are formed, and the circulation passages 6, 4, and 2 serve as passages for the fuel gas H ₂ , and the circulation passages 5 and 3 correspond to the combustion supporting gas O _2.
For use, the release gas body is formed so as to be focused ahead of the front surface 1Ab. As shown in FIG. 2 and FIG. 3, these distribution passages include 32 distribution passages 2,
Fourteen and four distribution passages 6 and eight distribution passages 6 are formed.

On the back surface 1Aa, grooves 1Ac to 1Ag having a lateral width larger than the diameter of the flow passages 2 to 7 are cut, and all of the openings of the flow passages are not cut off by the wall surfaces of the grooves. A groove is formed so as to face.

Next, a method of forming the central passage and the circulation passage will be described with reference to FIG. The NC machine tool 42
An XY carriage 40 is arranged so as to be movable on the surface 41a of the base 41 by an NC device (not shown) in the horizontal direction (X direction) in the drawing and the Y direction penetrating the drawing.
, A tilting table 38 that can tilt in the left and right directions on the drawing with respect to the tilt axis 39 is disposed.

When the upper surface 38a of the tilting table 38 is in a horizontal state in the drawing, the tilting table 38 is rotated about a center line 43 passing through the tilting axis 39 in a vertical direction with the surface. A turntable 37 is disposed on the turntable 37 so that the quartz glass rod 50 can be moved toward and away from the center line 43.
The grippers 36 and 36 are arranged so as to be able to grip and release the gripper. The NC machine tool 42 is configured such that a diamond drill 35 and an end mill (not shown) can be switched and used upward.

In FIG. 7, the quartz glass rod 50 is gripped by the grippers 36, 36, and the XY moving table 40 is set at the center position.
(FIG. 1). Then, the tilting table 38 is tilted at a predetermined angle, its position is fixed by a lock mechanism (not shown), the rotary table 37 is stopped at a position rotated by a predetermined angle, and the circulation passage 6 is bored. A large number of flow passages 6 are formed while rotating. Then, the tilting table 38 is further tilted by a predetermined angle corresponding to the flow passages 5, 4, 3, and 2 to form a large number of flow passages.

When the formation of the flow passage is completed, the diamond drill 35 and the end mill (not shown) are switched, and
The XY moving table 40 is moved and set to the initial position, and the rotary table 37 is rotated to cut the grooves 1Ac to 1Ag corresponding to the flow paths 2 to 6, thereby completing the quartz glass burner head.

Next, as shown in FIG. 4, an end portion 8a of a quartz glass tube 8, which is a fuel gas introduction tube, is brought into contact with the back edge 1Ah of the central passage 7 of the quartz glass burner head 1A. ,Weld. Next, the end 9a of the quartz glass tube 9, which is a tube for introducing a combustible gas, is brought into contact with the back edge 1Ai of the flow passage 6 of the quartz glass burner head 1A and welded. The large diameter portion 8b and the rear end 9c of the quartz glass tube 9 are welded.

Next, the back end 1Aj of the flow passage 5 of the quartz glass burner head 1A is brought into contact with the end 10a of the quartz glass tube 10 serving as a fuel gas introducing tube, and is welded to the quartz glass tube. 9 and the rear end 10c of the quartz glass tube 10 are welded.

Next, an end portion 11a of a quartz glass tube 11, which is a tube for introducing a combustible gas, is brought into contact with the back edge 1Ak of the flow passage 4 of the quartz glass burner head 1A, and is welded. The outside of the tube 10 and the rear end 11c of the quartz glass tube 11 are welded.

Next, the back edge 1Am of the flow passage 3 of the quartz glass burner head 1A is brought into contact with the end 12a of the quartz glass tube 12, which is a fuel gas introduction pipe, and welded. 11 and the rear end 12c of the quartz glass tube 12 are welded.

Next, an end portion 13a of a quartz glass tube 13 which is a tube for introducing a combustible gas is brought into contact with the back edge 1An of the flow passage 2 of the burner head 1A made of quartz glass and welded to the quartz glass tube. The outside of the tube 12 and the rear end 13c of the quartz glass tube 13 are welded.

Further, the introduction port 9b of the combustion supporting gas of the quartz glass tube 9 and the discharge port 18a of the introduction pipe 18 of the combustion supporting gas, and the introduction port 10b of the fuel gas of the quartz glass tube 10 and the fuel Outlet 1 of introduction pipe 17 for reactive gas
7a, inlet 1 for flammable gas in quartz glass tube 11
1b, a discharge port 16a of a combustion supporting gas introduction pipe 16; a fuel gas introduction port 12b of the quartz glass tube 12; a discharge port 15a of a fuel gas introduction pipe 15; The inlet 13b and the outlet 14a of the support tube 14 for the supporting gas are welded to produce a quartz glass burner in which each released gas is focused at a point P in front of 1Ab as shown in FIG. .

In this embodiment, a concentrically inclined flow passage communicating between the inlet and the outlet is formed as an integral quartz glass rod, so that the outer cylinder and the perforated plate are connected to each other. There is no need to adjust and set the position for welding, and a highly accurate quartz glass burner head can be provided.

In the rear surface, a large number of grooves are formed concentrically, and all of the openings of the inlet having the same diameter as the flow passage having the same concentric inclination angle are formed in the same groove. Since it is configured so as to face inward, the gas body filling the groove can flow into the flow passage 2 without being obstructed at the entrance of the opening.

Further, a central passage for circulating a combustion supporting gas is formed in the back of the integrated quartz glass rod and extending perpendicularly to the front surface, and the circulation passage is formed in a multistage shape concentrically outside the central passage. Since a large number of fuel-supplying gases are provided alternately with the fuel-supplying-use gas outside the fuel-supplying gas, it is possible to supply a necessary amount of the fuel-supplying gas to the fuel-containing gas. Never be.

FIG. 5 is a cross-sectional view showing another embodiment, but it is not shown in the cross-sectional view because the drawing is complicated. The difference between the embodiment shown in FIG. 4 and the embodiment shown in FIG. 5 is that the case shown in FIG. A central passage for circulation is bored, and the circulation passage is configured by arranging a large number of fuel gas alternately with a fuel supporting gas outside the central passage in a multistage manner concentrically outside the central passage. On the other hand, in the case of FIG.
A plurality of flow passages 20, 21 and 22 for supporting gas are provided between the first fuel flow passage 23 and the second fuel flow passage 19 just outside the fuel gas flow passage 4. It is the point that it was arranged.

[0038] These flow passages have a flow passage 19 of 32.
Book, circulation passages 20 and 21 each, and circulation passage 2
Eight lines 2 and 23 are formed. And FIG.
As shown in FIG. 3, a flow passage 23 for the fuel gas is provided immediately outside the central passage 24 for the support gas.
A combustion-supporting gas flow passage 22 is formed on the outside.

Now, instead of the configuration of FIG. 5, the flow paths of the fuel gas and the supporting gas are alternately formed as in the configuration of FIG. Is formed as a flow passage for the fuel gas, and when the inclination angle of the flow passage 22 with respect to the center passage 24 is increased, the flow passage 22
Passage 22 on front surface 1Bb of quartz glass head 1B
Is close to the opening of the flow passage 23,
Only the same number of lines can be formed. Then, even if the supporting gas can be sufficiently supplied to the flow passage 23, the supply of the fuel gas in the flow passage 21 outside the flow passage 22 may be insufficient, resulting in oxygen deficiency. There are cases.

Accordingly, in the case of FIG. 5, the first-stage fuel passage 23 for fuel gas and the second passage 19 for fuel gas immediately outside the central passage through which the supporting gas flows are provided. A plurality of flow passages 20, 21 and 22 for the supporting gas are arranged between them to ensure the supply of the supporting gas to these fuel gases. Thus, even if the inclination angle of the flow passage is increased, it is not necessary to form a flow passage for the combustion supporting gas outside the flow passage 19, and it is possible to prevent the quartz glass head from increasing in diameter and to reduce the number of the fuel support passages. Since the circulation passages for the volatile gas are arranged close to each other, there is no need to partition each of these circulation passages with the introduction pipe, and the configuration is simplified.

Incidentally, the quartz glass introduction pipes 14, 15, in FIG.
The circular S portions in 16 and 17 and the circular S portions in the quartz glass introduction pipes 29, 31 and 32 in FIG. 5 may be formed by welding the cylinders, but the quartz glass tube is bent as shown in FIG. The inlet pipe 34 may be welded to the inlet of the outer pipe 33. The welding time is determined by welding the outer tube 33 beforehand to the inlet of the outer tube 33, which means the quartz glass tubes 9 to 13, and then attaching the outer tube 33 to the burner head 1 made of quartz glass.
Of course, it may be welded to the back of A.

[0042]

Embodiment (First Embodiment) As shown in FIG.
mm, a quartz glass rod with a length of 68 mm, a diameter of 1.2 mm
Using a drill with a diamond tip having a height of 2.0 mm and a height of 2.0 mm, the central passage 7 and the circulation passages 2 to 6 were divided into a total of 8 mm.
Nine holes were drilled, and grooves 1Ac to 1Ag having a depth of 5 mm were cut by an end mill having diamond tips to produce two quartz glass burner heads. Thereafter, as shown in FIG. 4, each of the introduction pipes was welded to produce two quartz glass burners. Using these two burners, the gas flow rate,
Hydrogen gas 20 m ³ / h, under the conditions of oxygen gas 10 m ³ / h, an outer diameter of 150 mm, was subjected to round sealing process of molding glass tube wall thickness 3 mm, since conventionally the sufficient firepower is not obtained 1 Time-consuming machining time has been reduced to 30 minutes.

(Second Embodiment) As shown in FIG.
A quartz glass rod with a diameter of 8 mm and a length of 50 mm was used.
The center passage 24 and the circulation passages 19 to 23 are drilled with a drill having a diamond tip of 2 mm and a height of 2.0 mm.
Were drilled in total, and grooves 1Bc, 1Bd, and 1Be having a depth of 5 mm were cut by an end mill having a diamond tip to produce two quartz glass burner heads. After that, each inlet pipe was welded and burned with quartz glass.
This was produced. Using these two burners, a molded glass tube having an outer diameter of 150 mm and a wall thickness of 3 mm was round-sealed under the conditions of a gas flow rate, hydrogen gas of 20 m ³ / h, and oxygen gas of 10 m ³ / h. The processing time, which conventionally required one hour because a sufficient thermal power could not be obtained, has been reduced to 30 minutes.

[0044]

As described above, according to the quartz glass burner head and the method of manufacturing the same according to the present invention, since the gas body discharge passage is formed in the integral quartz glass rod, the outer cylinder and the perforated plate are formed. There is no need to adjust and set the position and welding, and a highly accurate quartz glass burner head can be provided.

[Brief description of the drawings]

FIG. 1 is an embodiment diagram schematically showing a quartz glass burner head.

FIG. 2 is a right side view of FIG.

FIG. 3 is a left side view of FIG.

FIG. 4 is an embodiment diagram schematically showing a quartz glass burner device used in the present embodiment.

FIG. 5 is an embodiment diagram schematically showing a quartz glass burner device used in another embodiment.

FIG. 6 is an embodiment diagram showing a connection form of an introduction pipe.

FIG. 7 is a schematic configuration diagram of a processing machine showing a method for processing a burner head made of quartz glass.

FIG. 8 is a diagram showing a focused state of emitted gas of the burner head according to the present embodiment.

FIG. 9 is a view showing a conventional example of a burner head.

[Explanation of symbols]

 1 Burner head made of quartz glass (1A, 1B) 2-6 Flow passage

Continuation of the front page (56) References JP-A-62-187135 (JP, A) JP-A-5-215313 (JP, A) Jiko 41-11653 (JP, Y1) (58) Fields investigated (Int) .Cl. ⁷ , DB name) F23D 14/22 F23D 14/38 F23D 14/48-14/58 C03B 20/00

Claims (6)

(57) [Claims] 1. Quartz having a plurality of inlets provided on a back side and connected to a fuel gas pipe and a supporting gas pipe, and a plurality of outlets provided on a front face and communicating with the inlet. In the glass burner head, between the inlet and the outlet, the flow path of the gas body inclined concentrically so that the gas discharged from the outlet converges forward of the front surface. Are formed on an integral quartz glass rod. 2. A plurality of grooves are formed concentrically on the back surface, and all of the openings of the inlet having the same diameter as the flow passage having the same inclination angle are the same. The burner head made of quartz glass according to claim 1, wherein the burner head faces inward. 3. A central passage for circulating a combustion supporting gas is formed in the back of the integral quartz glass rod and extends vertically to the front, and the circulation passage is formed in a multistage shape concentrically outside the central passage. 2. A quartz glass burner head according to claim 1, wherein a large number of the burner heads are alternately arranged for fuel gas and for the support gas outside thereof. 4. A central passage through which a combustion-supporting gas flows, which is perpendicular to the back surface of the integral quartz glass rod and extends to the front surface, wherein the circulation passage is concentric with the outside of the central passage,
2. The quartz glass burner head according to claim 1, wherein a plurality of burner heads are arranged in order of a fuel gas, a plurality of stages of a supportive gas outside the fuel gas, and a plurality of the outside of the burner gas. 5. Quartz having a plurality of inlets provided on the back side and connected to the fuel gas pipe and the supporting gas pipe, and a plurality of outlets provided on the front face and communicating with the inlet. In the method for manufacturing a glass burner head, a drill is used to drill a central passage extending vertically to the front surface of the integrated quartz glass rod, and the quartz glass is placed at a position inclined by a predetermined angle. A quartz glass burner head characterized in that a rod is rotated by a predetermined angle around the center axis of the drill, and a large number of gas passages concentrically inclined with the center passage are bored by the drill. Production method. 6. A large number of grooves are formed on the back surface of the quartz glass rod concentrically with the opening of the central passage so that all openings of the introduction port of the flow passage are formed inside. The method for producing a quartz glass burner head according to claim 5, characterized in that: